JPH01100971U

JPH01100971U -

Info

Publication number: JPH01100971U
Application number: JP1987197230U
Authority: JP
Priority date: 1987-12-25
Filing date: 1987-12-25
Publication date: 1989-07-06

Description

[Brief explanation of the drawing]

第１図及び第２図はそれぞれ油圧サーボ弁に適
用された本考案による圧電式アクチユエータの一
つの実施例を示す解図的縦断面図及び平断面図、
第３図乃至第５図はそれぞれ第１図の線―、
第２図の線―、線―に沿う断面図、第６
図は第１図乃至第５図に示された実施例の第二の
変位拡大機構を示す斜視図、第７図は第１図乃至
第６図に示されたアクチユエータの修正例の要部
を示す解図的部分平断面図、第８図及び第９図は
それぞれ本考案によるアクチユエータの他の一つ
の実施例を示す解図的縦断面図及び平断面図であ
る。１０……アクチユエータ、１２……弁、１４…
…弁ハウジング、１６……スリーブ、２４，２６
……リターン油路、３６……スプール、４２，４
４……通路、４６……センサ、５０……圧電素子
、５２……リテーナ、８０……ヨーク形部材、８
６……ベース部、９２……シヤフト、９６，９８
……弾性ヒンジ、１００，１０２……出力アーム
、１０４，１０６……弾性ヒンジ、１０８……支
持部、１１０，１１２……リンク、１２０……出
力部材、１２４……接続部材、１２８，１３０…
…第一の変位拡大機構、１３２……第二の変位拡
大機構、１３６……キヤツプ部材、１３６ａ……
ナツト、１３８……プレート、１４０，１４２…
…スリーブ、１４８……ナツト、１５２，１５４
……リード線、１５６……シール、１５８……グ
ロメツト、１６２……フローセパレータ、１６６
，１６８，１７０……窓、１７２……本体、１７
６……プレート、１７８，１８０……シム。 1 and 2 are an illustrative longitudinal sectional view and a plan sectional view, respectively, showing one embodiment of a piezoelectric actuator according to the present invention applied to a hydraulic servo valve;
Figures 3 to 5 are the lines of Figure 1, respectively.
Sectional view along line -, line - of Fig. 2, No. 6
The figure is a perspective view showing the second displacement magnification mechanism of the embodiment shown in Figs. 1 to 5, and Fig. 7 shows the main parts of the modified example of the actuator shown in Figs. 1 to 6. The illustrated partial plan sectional view, FIGS. 8 and 9 are an illustrative longitudinal sectional view and a plan sectional view, respectively, showing another embodiment of the actuator according to the present invention. 10...actuator, 12...valve, 14...
...Valve housing, 16...Sleeve, 24, 26
...Return oil path, 36...Spool, 42,4
4... Passage, 46... Sensor, 50... Piezoelectric element, 52... Retainer, 80... Yoke shaped member, 8
6... Base part, 92... Shaft, 96, 98
...Elastic hinge, 100, 102... Output arm, 104, 106... Elastic hinge, 108... Support part, 110, 112... Link, 120... Output member, 124... Connection member, 128, 130...
...First displacement amplifying mechanism, 132... Second displacement amplifying mechanism, 136... Cap member, 136a...
Natsu, 138...Plate, 140,142...
...Sleeve, 148...Nut, 152,154
... Lead wire, 156 ... Seal, 158 ... Grommet, 162 ... Flow separator, 166
, 168, 170...Window, 172...Body, 17
6...Plate, 178,180...Shim.

Claims

[Scope of utility model registration request]

an output member configured to be coupled to a driven member that reciprocates along an axis; a piezoelectric element disposed substantially along the axis; and an output member that supports one end of the piezoelectric element; a first retainer having a pair of arm portions extending from one end to the other end; a second retainer connected to the tips of the pair of arm portions; and an elastic hinge supported by the second retainer. a pair of input arms and a pair of output arms, the input arm having a first displacement amplifying mechanism that abuts the other end of the piezoelectric element, and one end of which is pivotally connected to the tip of the output arm; a second displacement magnifying mechanism having a pair of links pivotally connected to each other at the other end and to the output member, the output arm extending from the other end of the piezoelectric element toward the one end; a piezoelectric actuator, the piezoelectric actuator being angularly offset from the arm about the axis;