JPH0929624A - Double surface polishing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To restrain generation of polishing error on a workpiece by making hard to change the flatness of surface plate of a double surface polishing device for ultra thin or fragile objects through change in the shapes of a sun gear and an internal gear. SOLUTION: This device comprises a sun gear 1, lower surface plate 2, internal gear and drum 4 and the rotation speeds and directions thereof are made variable. The drum 4 has a groove in which a hook for the connection with an upper surface plate 6 is hooked. The device is also provided with a carrier 5 rotates clockwise or counterclockwise according to the rotation ratio between the gears 1, 3 while revolves on the lower surface plate 2 in the same direction therewith. Both the gears 1, 3 are in the form of helical gear, whereby the polishing of surface plates is made reversally to conventional polishing devices with respect to the inside and the outside, making the flatness in the surface plates hard to change.

Description

Detailed Description of the Invention

[0001]

[Industrial application] The present invention is applied to a double-sided surface polishing machine for polishing extremely thin and brittle workpieces.
Ultra-thin workpieces that are workpieces, brittle workpieces (hereinafter commonly referred to as workpieces), and jigs that hold the workpieces (hereafter,
This is an invention characterized by making it difficult to change the flatness of the surface plate that changes depending on the abrasive used during polishing and the polishing material used during polishing, by changing the tooth shapes of the sun gear and internal gear.

[0002]

2. Description of the Related Art In a conventional double-sided flat surface polishing machine, the flatness of the surface plate changes depending on the rotation direction of the rotation of the carrier while the processing is continued. If the flatness of the surface plate exceeds a certain value that was empirically obtained, we were working to correct the flatness of the surface plate. In the conventional technology, there is one in which the surface plate is corrected while machining by reversing the rotation direction of the carrier rotation, but the flatness of the surface plate must always be managed,
In addition, there is a problem that the rate of occurrence of defects in the workpiece is increased by processing by reversing the rotation direction of the rotation of the carrier.

[0003]

SUMMARY OF THE INVENTION The present invention solves the problems of the above-mentioned double-sided surface polishing machine, and changes the flatness of the surface plate which changes by processing the workpiece, the sun gear and the internal gear. The purpose is to make it difficult to change by changing the shape of.

[0004]

In order to achieve the above object, the sun gear and the internal gear of the double-sided surface polishing machine of the present invention have helical teeth with the teeth inclined with respect to the axis. It has the shape of a gear.

[0005]

In the double-sided surface polishing machine of the present invention, the sun gear and the internal gear have the teeth of helical gears. The two gears are assembled in a double-sided plane polishing machine so that the spiral direction of the teeth is clockwise. The sun gear, internal gear, drive shaft that rotates the upper surface plate, the lower surface plate,
The rotation speed and rotation direction are variable, and the carrier has a mechanism that rotates clockwise and counterclockwise while moving in the same direction as the lower platen, depending on the rotation ratio of the sun gear and internal gear. If the sun gear and the internal gear are formed into the teeth of helical gears, the gap between the upper and lower surface plates will not be smaller than the thickness of the work piece, and the thickness of the carrier itself will not affect the finish of the work piece. Since it is thinner than the thickness, when the carrier being processed meshes with each gear and rotates, the portion in contact with the gear is curved upward or downward. With the conventional double-sided surface polishing machine, when the carrier is rotated clockwise and the surface plate is rotated counterclockwise, the outer part of the surface plate that tries to rotate in the direction opposite to the rotation direction of the carrier is compared to other parts. , More polished,
The flatness of the surface plate is lost as the processing continues. The double-sided flat surface polishing machine of the present invention, by bending the carrier,
When the carrier is clockwise, as shown in FIG. 2, the positional relationship between the surface plate being machined, the carrier, the sun gear, and the internal gear is forcibly changed. When the surface plate is rotated counterclockwise and the carrier is rotated clockwise, a downward force is exerted on the carrier by the sun gear inside the surface plate as shown in FIG.
Try to polish the lower surface plate. On the outside of the surface plate, an upward force acts on the carrier by the internal gear and tries to separate from the lower surface plate, so that the flatness of the surface plate is not lost and the surface plate is not corrected.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the accompanying drawings, FIG. 1 is a block diagram of an example of a double-sided surface polishing machine of the present invention, in which 1 is a sun gear having a mechanism capable of mechanically or electrically changing the rotational speed and the rotational direction, Reference numeral 2 is a lower surface plate having a mechanism capable of mechanically or electrically changing the rotation speed and rotation direction, 3 is an internal gear having a mechanism capable of mechanically or electrically changing the rotation speed and rotation direction, 4 Is the mechanical speed and direction of rotation,
Alternatively, it is a drum that serves as a drive shaft for rotating an upper surface plate having an electrically variable mechanism, and has a groove for hooking 8 hooks for connection with the upper surface plate. A carrier 5 revolves on the lower surface plate in the same direction as the lower surface plate by the sun gear and the internal gear, and rotates clockwise and counterclockwise depending on the rotation ratio of the sun gear and the internal gear. FIG. 2 shows the positional relationship between the sun gear and the internal gear when the carrier is rotating clockwise and the surface plate is rotating counterclockwise. An upper surface plate that rotates in a horizontal direction, and 7 is a workpiece.

[0007]

As described above, in the double-sided surface polishing machine of the present invention, the sun gear and the internal gear have the teeth of the helical gear, so that the surface plate generated by the rotation of the carrier during processing. Since the above polishing works against the inside and outside of the surface plate in the opposite manner to the conventional double-sided flat surface polishing machine, there is an effect that it is difficult to change the flatness of the surface plate.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an example of a double-sided surface polishing machine.

[Figure 2] Sun gear, internal gear, upper and lower surface plate,
It is the figure which showed the carrier and the positional relationship of the to-be-processed object.

[Explanation of symbols]

1 ... Sun gear with a mechanism that can mechanically or electrically change the rotation speed and rotation direction 2 ... Lower surface plate with a mechanism that can mechanically or electrically change the rotation speed and rotation direction 3 ... Internal gear with a mechanism that can mechanically or electrically change the rotational speed and rotational direction 4 ... Upper constant with a mechanism that can mechanically or electrically change the rotational speed and rotational direction A drum that serves as a driving force for rotating the board, and has a groove on the outer periphery for connection with the upper surface plate 5 ・ ・ ・ The lower surface of the lower surface plate is fixed by the sun gear and the internal gear. Carrier that revolves in the same direction as the board and rotates clockwise and counterclockwise depending on the rotation ratio of the sun gear and the internal gear ..... An upper surface plate 7 that rotates in the opposite direction to the lower surface plate by the drum of 4. ... Addition Hook for connecting and objects 8 ... on the surface plate, a 4-drum

Claims (2)

[Claims] 1. A double-sided flat polishing machine characterized by making it difficult to change the flatness of a surface plate of a double-sided flat polishing machine used for polishing extremely thin and fragile workpieces. 2. A double-sided surface polishing machine having a sun gear and an internal gear in which teeth are spirally attached to be inclined with respect to an axis.