JPH09271793A - Fluidized bed type biological treatment device - Google Patents
Fluidized bed type biological treatment deviceInfo
- Publication number
- JPH09271793A JPH09271793A JP8111127A JP11112796A JPH09271793A JP H09271793 A JPH09271793 A JP H09271793A JP 8111127 A JP8111127 A JP 8111127A JP 11112796 A JP11112796 A JP 11112796A JP H09271793 A JPH09271793 A JP H09271793A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- hydrogen peroxide
- biological reaction
- oxygen
- reaction tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/10—Biological treatment of water, waste water, or sewage
Landscapes
- Biological Treatment Of Waste Water (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】この発明は有機物濃度(TO
C)や、アンモニア濃度が高い廃水を処理する流動床式
生物処理装置に関する。TECHNICAL FIELD The present invention relates to organic matter concentration (TO
C) and a fluidized bed biological treatment apparatus for treating wastewater having a high ammonia concentration.
【0002】[0002]
【従来の技術】半導体や液晶等の製造工場では、製品の
洗浄に超純水を使用しているが、近年取水量や排水量の
規制によって、本特許出願人の先願の特願平8−180
38号でも説明したが、図2に示すように、その洗浄廃
水を回収し、pH調整槽1でpHを中性化し、次いでポ
ンプにより流動床式生物処理装置2に供給して廃水中に
イソプロピルアルコール、メタノール、酢酸、アセトン
等の有機物(TOC)や、NH4+を分解除去し、その処
理水のタンク3から殺菌剤としてCl2 が連続的に供給
される殺菌槽に供給し、殺菌槽から限外濾過膜や精密濾
過膜等の膜分離装置5にポンプで加圧して供給すること
により流動式生物処理装置からの菌体を分離し、膜を透
過した透過水を超純水製造用原水とし、超純水製造シス
テムに送水している。尚、殺菌槽でのCl2 の連続添加
は、運転の継続によって後段の膜分離装置の膜面に菌体
が付着し、フラックスが低下するのを防止するためであ
る。2. Description of the Related Art Ultra-pure water is used for cleaning products in semiconductor and liquid crystal manufacturing plants. In recent years, however, due to restrictions on water intake and drainage, Japanese Patent Application No. 8- 180
As described in No. 38, as shown in FIG. 2, the washing wastewater is recovered, the pH is neutralized in the pH adjusting tank 1, and then the liquid is fed to the fluidized bed biological treatment apparatus 2 by a pump to supply isopropyl to the wastewater. Organic substances (TOC) such as alcohol, methanol, acetic acid, and acetone, and NH 4 + are decomposed and removed, and the treated water is supplied from a tank 3 to a sterilizing tank to which Cl 2 is continuously supplied as a sterilizing agent. From the flow-type biological treatment equipment by separating the bacterial cells from the flow type biological treatment device by supplying pressure to the membrane separation device 5 such as ultrafiltration membrane or microfiltration membrane with a pump for producing ultrapure water. The raw water is sent to the ultrapure water production system. The continuous addition of Cl 2 in the sterilization tank is for preventing the bacterial cells from adhering to the membrane surface of the membrane separation device at the subsequent stage and lowering the flux due to continuous operation.
【0003】従来、使用されている流動式生物処理装置
は、図3に示すように生物反応槽6と、酸素溶解槽8と
からなり、生物反応槽6は微生物を担持した粒状又はペ
レット状の活性炭による充填層7を有し、処理されるべ
き排水は充填層中を上向流で通水し、充填層を一定に展
開する。そして、酸素溶解槽8中には散気装置9を設
け、散気装置が水中に空気を曝気して水に溶存させ、循
環ポンプP1 が酸素溶解槽中の溶存酸素を含む水を生物
反応槽6の底部に供給し、生物反応槽中の活性炭に付着
した微生物に酸素を補給する。As shown in FIG. 3, a conventional fluid-type biological treatment apparatus conventionally used comprises a biological reaction tank 6 and an oxygen dissolution tank 8, and the biological reaction tank 6 is in the form of granules or pellets carrying microorganisms. Having a packed bed 7 of activated carbon, the wastewater to be treated flows through the packed bed in an upward flow to spread the packed bed constantly. Then, an air diffuser 9 is provided in the oxygen dissolving tank 8, the air diffuser aerates air into the water and dissolves it in water, and the circulation pump P1 converts the water containing the dissolved oxygen in the oxygen dissolving tank into the biological reaction tank. Oxygen is supplied to the microorganisms adhering to the activated carbon in the bioreactor, which is supplied to the bottom of No. 6.
【0004】[0004]
【発明が解決しようとする課題】洗浄廃水の再利用を積
極的に行うにつれ、洗浄水中のTOCは、従来は高くて
も1〜2ppmであったものが、次第に多くなり、近年
では数10ppmに達することがある。このように高濃
度の洗浄廃水を流動式生物処理装置で処理するには、廃
水中のTOCに見合った量の溶存酸素を生物反応槽に供
給する必要があり、その対策として酸素溶解槽で飽和に
なった循環水の生物反応槽への供給量を増大する方法が
取られていた。しかし、生物反応槽に供給する循環水量
を増大させると、生物反応槽内の微生物を付着した坦体
である活性炭の展開率が大きくなり、活性炭がキャリー
オーバーして処理水に混ざって生物反応槽から流出する
という問題が生じる。又、循環水量を増大するためには
循環ポンプP1 に大容量のものが必要になり、設置コス
ト、ランニングコストが嵩む。As the waste water of the cleaning waste water is positively reused, the TOC in the cleaning water has been increased from 1 to 2 ppm at the highest in the past to several tens of ppm in recent years. May reach. In order to treat high-concentration cleaning wastewater with the fluid biological treatment device, it is necessary to supply the biological reaction tank with an amount of dissolved oxygen commensurate with the TOC in the wastewater. The method of increasing the supply amount of the recycled water to the biological reaction tank has been taken. However, if the amount of circulating water supplied to the biological reaction tank is increased, the expansion rate of the activated carbon, which is the carrier with the microorganisms attached in the biological reaction tank, will increase, and the activated carbon will carry over and mix with the treated water to cause the biological reaction tank to flow. There is a problem of spillage from. Further, in order to increase the amount of circulating water, the circulating pump P1 needs to have a large capacity, which increases the installation cost and running cost.
【0005】このため、酸素溶解槽からの循環水量を増
大することなく、生物反応槽での溶存酸素量を増大する
ため、水に分解して酸素を発生する酸化剤としてオゾン
O3を洗浄廃水に添加し、生物反応槽での反応性、酸素
溶解率を検討した。オゾンが水に分解して酸素を発生す
る反応は、O3 → O2 +O0 で、酸素溶解率は改善さ
れたが、それ自身の発生期の酸素(O0 )によって坦体
である活性炭の表面に付着した微生物(菌体)が活性炭
から剥離して生物反応槽から処理水に混ざって流出し、
処理水の水質が著しく悪化した。Therefore, in order to increase the amount of dissolved oxygen in the biological reaction tank without increasing the amount of circulating water from the oxygen dissolving tank, ozone O 3 is washed as wastewater to be decomposed into water to generate oxygen. , And the reactivity and oxygen dissolution rate in the biological reaction tank were investigated. The reaction in which ozone is decomposed into water to generate oxygen is O 3 → O 2 + O 0 , and the oxygen dissolution rate is improved, but the oxygen (O 0 ) of its own nascent stage causes the reaction of activated carbon as a carrier. Microorganisms (bacteria) adhering to the surface are separated from the activated carbon and mixed with treated water from the biological reaction tank and flow out,
The quality of the treated water deteriorated significantly.
【0006】[0006]
【課題を解決するための手段】そこで、本発明者等は、
酸化剤として過酸化水素(H2 O2 )を使用することに
より生物反応槽への酸素供給量が増大し、生物反応槽の
反応も変化がなく、処理水質も安定していることを確認
し、本発明を開発したのである。Means for Solving the Problems Accordingly, the present inventors have
By using hydrogen peroxide (H 2 O 2 ) as an oxidant, it was confirmed that the amount of oxygen supplied to the biological reaction tank increased, the reaction in the biological reaction tank did not change, and the treated water quality was stable. The present invention was developed.
【0007】[0007]
【発明の実施の形態】従って、この発明の流動床式生物
処理装置は、生物を付着した坦体を保有する流動床式生
物反応槽と、この生物反応槽に酸素を供給する手段とを
有する流動床式生物処理装置において、上記流動床式生
物反応槽に過酸化水素を供給する手段を設けたことを特
徴とする。Accordingly, the fluidized bed type biological treatment apparatus of the present invention has a fluidized bed type bioreactor holding a carrier having organisms attached thereto, and means for supplying oxygen to the biological reaction vessel. The fluidized bed biological treatment apparatus is characterized in that means for supplying hydrogen peroxide to the fluidized bed biological reaction tank is provided.
【0008】[0008]
【実施例】図1は、この発明による流動床式生物処理装
置の一実施例で、図3の従来装置と同様に生物反応槽6
と、酸素溶解槽8とからなり、生物反応槽6は微生物を
担持した粒状又はペレット状の活性炭による充填層7を
有し、処理されるべき排水は充填層中を上向流で通水
し、充填層を一定に展開する。そして、酸素溶解槽8中
には散気装置9を設け、散気装置が水中に空気を曝気し
て水に溶存させ、循環ポンプP1 が酸素溶解槽中の溶存
酸素を含む水を生物反応槽6の底部に供給し、生物反応
槽中の活性炭に付着した微生物に酸素を補給する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of a fluidized bed type biological treatment apparatus according to the present invention. As in the conventional apparatus shown in FIG.
And the oxygen dissolution tank 8, the biological reaction tank 6 has a packed bed 7 of activated carbon in the form of granules or pellets carrying microorganisms, and the wastewater to be treated passes through the packed bed in an upward flow. , The packed bed is developed uniformly. Then, an air diffuser 9 is provided in the oxygen dissolving tank 8, the air diffuser aerates air into the water and dissolves it in water, and the circulation pump P1 converts the water containing the dissolved oxygen in the oxygen dissolving tank into the biological reaction tank. Oxygen is supplied to the microorganisms adhering to the activated carbon in the bioreactor, which is supplied to the bottom of No. 6.
【0009】pH調整槽1からポンプで生物反応槽6の
底部にpHを調整した洗浄廃水を供給する供給管10の
途中に過酸化水素をタンク11からポンプP2 で注入す
る注入管12が接続してある。そして、その接続位置の
下流で、供給管10にはラインミキサー13を設け、供
給管10で生物反応槽に供給する洗浄廃水に、タンク1
1からの過酸化水素が均一に混合、溶解するようにして
ある。An injection pipe 12 for injecting hydrogen peroxide from a tank 11 by a pump P2 is connected in the middle of a supply pipe 10 for supplying pH-adjusted cleaning wastewater from the pH adjustment tank 1 to the bottom of the biological reaction tank 6 by a pump. There is. Then, a line mixer 13 is provided in the supply pipe 10 downstream of the connection position, and the cleaning wastewater supplied to the biological reaction tank through the supply pipe 10 is added to the tank 1
The hydrogen peroxide from 1 is mixed and dissolved uniformly.
【0010】供給する酸素は、基本的には酸素溶解槽か
らの溶存酸素を主とするが、洗浄廃水中のTOCを生物
反応槽で分解することができる程度の量を過酸化水素に
より補充して過剰量にするのが好ましい。例えば、注入
管12の接続位置の上流で、供給管10にTOCモニタ
ー14を接続し、洗浄廃水のTOCを該TOCモニター
で計測し、洗浄廃水のTOCに応じ注入管のポンプP2
を制御し、過酸化水素の注入量を加減してもよい。又、
洗浄廃水自身が含む溶存酸素量と、酸素溶解槽からの循
環水によって補給される溶存酸素量とでは洗浄廃水のT
OCを分解するのに不足する溶存酸素量を過酸化水素で
補うようにしてもよい。Basically, the oxygen to be supplied is mainly dissolved oxygen from the oxygen dissolving tank. However, hydrogen peroxide is replenished with hydrogen peroxide in an amount sufficient to decompose TOC in the cleaning wastewater in the biological reaction tank. It is preferable that the amount is excessive. For example, a TOC monitor 14 is connected to the supply pipe 10 upstream of the connection position of the injection pipe 12, the TOC monitor of the wash waste water is measured by the TOC monitor, and a pump P2 of the injection pipe is supplied according to the TOC of the wash waste water.
May be controlled to control the injection amount of hydrogen peroxide. or,
The amount of dissolved oxygen contained in the cleaning wastewater itself and the amount of dissolved oxygen supplemented by the circulating water from the oxygen dissolving tank are T of the cleaning wastewater.
Hydrogen peroxide may be used to supplement the amount of dissolved oxygen that is insufficient to decompose OC.
【0011】図1の実施例では、中和槽1から生物反応
槽6への洗浄廃水の供給管10に過酸化水素を注入した
が、過酸化水素を中和槽や、その手前の回収水槽、或い
は酸素溶解槽や、酸素溶解槽から生物反応槽への循環ポ
ンプP1 を有する管路に注入してもよい。更に、過酸化
水素を生物反応槽に注入しても、坦体に付着した微生物
に対して悪影響は殆ど無く、特に生物反応槽に過酸化水
素が連続的に供給されているときには生物の活性を阻害
することはないので生物反応槽に直接注入してもよい。In the embodiment shown in FIG. 1, hydrogen peroxide was injected from the neutralization tank 1 into the supply pipe 10 for washing wastewater to the biological reaction tank 6. However, the hydrogen peroxide was neutralized or a recovery water tank in front of it. Alternatively, it may be injected into an oxygen dissolution tank or a line having a circulation pump P1 from the oxygen dissolution tank to the biological reaction tank. Furthermore, even if hydrogen peroxide is injected into the biological reaction tank, there is almost no adverse effect on the microorganisms attached to the carrier, and especially when the hydrogen peroxide is continuously supplied to the biological reaction tank, the biological activity is reduced. Since it does not interfere, it may be directly injected into the bioreactor.
【0012】又、生物反応槽への酸素供給手段としては
酸素溶解槽を使用したが、前述した先願にも記載したよ
うに酸素をエジェクタで圧縮空気と水を混合して加圧タ
ンクに供給し、この加圧タンクから加圧水を生物反応槽
に供給するものなど、任意の装置を使用することができ
る。Although an oxygen dissolving tank is used as an oxygen supplying means to the biological reaction tank, oxygen is mixed with compressed air and water by an ejector and supplied to a pressure tank as described in the above-mentioned prior application. However, any device such as one that supplies pressurized water from this pressurized tank to the biological reaction tank can be used.
【0013】超純水の洗浄廃水として、超純水にイソプ
ロピルアルコール 10ppmasCを添加したものを
図1,図3の装置により処理を行った。尚、両装置の生
物反応槽の坦体には20〜40メッシュの石炭系粒状活
性炭を使用し、坦体量はHRTとして15分、洗浄廃水
の供給量と、酸素溶解槽から生物反応槽への循環水量は
1:1である。図1の本発明の装置では過酸化水素を供
給管10に50ppm注入した。この結果、図3の過酸
化水素を注入しない装置での処理水のTOCは、10p
pmから400〜800ppbになったが、図1の過酸
化水素を注入した場合の処理水のTOCは、10ppm
から250ppbに減少した。これにより図3の装置で
は溶存酸素の不足により処理水のTOCが変動悪化する
のに対し、過酸化水素を補給するとTOCを低減、安定
化できることが判明した。As cleaning wastewater of ultrapure water, ultrapure water to which 10 ppmasC of isopropyl alcohol was added was treated by the apparatus shown in FIGS. In addition, 20-40 mesh coal-based granular activated carbon is used as the carrier for the biological reaction tanks of both devices, the carrier amount is 15 minutes as HRT, the amount of washing wastewater supplied, and the oxygen dissolution tank to the biological reaction tank. The circulating water amount is 1: 1. In the apparatus of the present invention shown in FIG. 1, 50 ppm of hydrogen peroxide was injected into the supply pipe 10. As a result, the TOC of the treated water in the apparatus shown in FIG.
It became 400 to 800 ppb from pm, but the TOC of treated water when hydrogen peroxide in FIG. 1 was injected was 10 ppm.
To 250 ppb. As a result, it has been found that the TOC of the treated water deteriorates fluctuatingly in the apparatus of FIG. 3 due to the shortage of dissolved oxygen, while the TOC can be reduced and stabilized by adding hydrogen peroxide.
【0014】[0014]
【発明の効果】以上で明らかなように、生物反応槽への
循環水量を増大しないので、充填層を構成する坦体のキ
ャリーオーバーが生ぜず、坦体に付着する生物に悪影響
を及ぼすことなく過酸化水素で溶存酸素量を高め、処理
水質の悪化を防止できる。As is clear from the above, since the amount of circulating water to the biological reaction tank is not increased, carry-over of the carrier constituting the packed bed does not occur, and the organisms attached to the carrier are not adversely affected. Hydrogen peroxide can increase the amount of dissolved oxygen and prevent deterioration of treated water quality.
【図1】本発明による流動床式生物処理装置の説明図で
ある。FIG. 1 is an explanatory view of a fluidized bed type biological treatment apparatus according to the present invention.
【図2】超純水の洗浄廃水の回収、浄化装置のフローシ
ートである。FIG. 2 is a flow sheet of a device for collecting and purifying cleaning wastewater of ultrapure water.
【図3】従来の流動床式生物処理装置の説明図である。FIG. 3 is an explanatory view of a conventional fluidized bed type biological treatment apparatus.
6 生物反応槽 7 生物反応槽の充填層 8 酸素溶解槽(酸素供給手段) 9 酸素溶解槽の散気装置 10 生物反応槽への洗浄廃水の供給管 11 過酸化水素のタンク 12 過酸化水素の注入管(過酸化水素供給手段) 13 ラインミキサー 6 Bioreaction Tank 7 Packed Bed of Bioreaction Tank 8 Oxygen Dissolution Tank (Oxygen Supply Means) 9 Diffuser of Oxygen Dissolution Tank 10 Supply Pipe for Washing Wastewater to Bioreaction Tank 11 Hydrogen Peroxide Tank 12 Hydrogen Peroxide Injection tube (hydrogen peroxide supply means) 13 line mixer
Claims (1)
生物反応槽と、この生物反応槽に酸素を供給する手段と
を有する流動床式生物処理装置において、上記流動床式
生物反応槽に過酸化水素を供給する手段を設けたことを
特徴とする流動床式生物処理装置。1. A fluidized bed bioreactor comprising: a fluidized bed bioreactor holding a carrier having organisms attached thereto; and a means for supplying oxygen to the bioreactor. A fluidized bed-type biological treatment apparatus, characterized in that a means for supplying hydrogen peroxide is provided in the.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11112796A JP3454015B2 (en) | 1996-04-09 | 1996-04-09 | Fluid bed biological treatment equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11112796A JP3454015B2 (en) | 1996-04-09 | 1996-04-09 | Fluid bed biological treatment equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09271793A true JPH09271793A (en) | 1997-10-21 |
JP3454015B2 JP3454015B2 (en) | 2003-10-06 |
Family
ID=14553135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11112796A Expired - Lifetime JP3454015B2 (en) | 1996-04-09 | 1996-04-09 | Fluid bed biological treatment equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3454015B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007032104A1 (en) * | 2005-09-14 | 2007-03-22 | Sharp Kabushiki Kaisha | Water disposal apparatus and method of water disposal |
-
1996
- 1996-04-09 JP JP11112796A patent/JP3454015B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007032104A1 (en) * | 2005-09-14 | 2007-03-22 | Sharp Kabushiki Kaisha | Water disposal apparatus and method of water disposal |
JP2007075723A (en) * | 2005-09-14 | 2007-03-29 | Sharp Corp | Water treatment apparatus and water treatment method |
US7914677B2 (en) | 2005-09-14 | 2011-03-29 | Sharp Kabushiki Kaisha | Water treatment apparatus and water treatment method |
Also Published As
Publication number | Publication date |
---|---|
JP3454015B2 (en) | 2003-10-06 |
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