JPH09251613A - Magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the lowering of the charactristic of a magnetoresistive(MR) film, to improve a magnetic recording efficiency and to suppress the flowing in of noise into an MR head in the magnetic recording and reproducing head using a yoke type MR head. SOLUTION: On the upper part of the magnetoresistive effect element 4 formed on the substrate 2, a magnetic gap 10 formed in the direction almost perpendicular to the surface of the substrate 2 is interposed at the side of a medium counter surface S and also first and second magnetic cores 8, 9 respectively magnetically coupled with both ends of the magnetoresistive element 4 are formed. A recording coil 12 supplying a magnetic flux to magnetic cores 8, 9 is formed at the upper surface side of the cores 8, 9. Moreover, one parts of cores 8, 9 constituting a yoke part are arranged at a side nearer to the medium counter surface S than the magnetoresistive element 4 so as to cover the magnetoresistive element 4 when it is seen from the medium counter surface S.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head utilizing a magnetoresistive effect used as a reproducing head of a magnetic disk device, and a recording / reproducing magnetic head using the same.

[0002]

2. Description of the Related Art In recent years, with the increase in density of magnetic recording, a magnetoresistive effect (hereinafter referred to as MR) is used in which the electric resistance of a certain kind of magnetic thin film or magnetic multilayer thin film is changed by an external magnetic field. The magnetic head (MR head) has attracted attention as a reproducing head in a high recording density system.

By the way, in a magnetic head for a hard disk or the like, recording and reproducing are conventionally carried out by levitating from a magnetic recording medium. However, as the recording density is improved, the flying height is lowered and the medium is closer to the medium. However, they are gliding and reading information. However, when the recording density of the information amount exceeds 10 Gbits per inch square, the spacing loss due to the flying of the magnetic head becomes too large. Therefore, the S / N ratio of the magnetic head is sufficient. However, problems such as damage to the magnetic head and recording medium due to extremely low flying height cannot be ignored. Therefore, it has been attempted to positively and negatively contact the magnetic head and the recording medium to perform recording and reproduction.

Also in the magnetic reproducing head using the MR element, the above-mentioned contact method is expected as a technology for high recording density, but in the structure in which the MR element is directly arranged on the medium facing surface, the MR element is worn out. The MR film itself may wear and disappear as well as the head output fluctuating due to a change in width in the depth direction.

Therefore, use of a so-called yoke type MR head in which a signal magnetic field is guided to an MR element arranged inside the head by a magnetic yoke composed of a pair of magnetic cores arranged facing each other via a magnetic gap has been studied. As such a yoke-type MR head, for example, a structure has been proposed in which an MR film is formed above a pair of magnetic cores that are arranged to face each other with a magnetic gap therebetween so that the stripe direction crosses the magnetic gap.

[0006]

By the way, in the above-mentioned yoke type MR head, it is conceivable that the MR film is formed after the upper surface of the magnetic core is flattened by etching back or the like. Since the unevenness of the MR film becomes large, the characteristics of the MR film are likely to deteriorate. In particular, when using a spin valve film made of a Co ₉₀ Fe ₁₀ / Cu / Co ₉₀ Fe ₁₀ laminated film or the like, the thickness of each film is as thin as several nanometers, and the characteristics are remarkably deteriorated due to surface irregularities. I will end up.

On the other hand, the magnetic core of the yoke type MR head is
Since it can also be used as a magnetic core of a magnetic recording head, it is conceivable to form a recording coil in the rear part of the magnetic core and use it as a magnetic recording / reproducing head. However, there is a possibility that the recording efficiency may be reduced depending on the formation position.

As described above, the magnetic recording / reproducing head using the yoke type MR head is required to have a structure capable of suppressing the deterioration of the characteristics of the MR film and improving the recording efficiency.

Further, the conventional yoke type MR head has a structure in which the MR element can be seen from the medium facing surface, and there is a possibility that the signal magnetic flux directly flows from the recording medium into the MR element. As described above, if the signal magnetic flux, which should originally flow through the magnetic gap, directly flows into the MR element, it causes noise and causes a reduction in reproduction sensitivity. As described above, the yoke type MR head is required to have a structure capable of preventing the signal magnetic flux from directly flowing into the MR element.

The present invention has been made to solve such a problem, and an object of the present invention is to provide a recording / reproducing type magnetic head capable of suppressing deterioration of characteristics of an MR film and improving recording efficiency. Further, it is an object of the present invention to provide a yoke type magnetic head utilizing a magnetoresistive effect capable of suppressing a decrease in reproduction sensitivity due to noise.

[0011]

According to a first magnetic head of the present invention, as described in claim 1, a magnetoresistive effect element formed on a substrate and a direction substantially perpendicular to the substrate surface are provided. A magnetic core formed on the magnetoresistive effect element so that the formed magnetic gap is interposed on the medium facing surface side and magnetically coupled to both ends of the magnetoresistive effect element, and an upper surface of the magnetic core. And a recording coil which is formed on the side and supplies a recording magnetic flux to the magnetic core.

The second magnetic head has a magnetoresistive effect element formed on a substrate and a magnetic gap formed in a direction substantially perpendicular to the surface of the substrate, as described in claim 3. A pair of magnetic cores formed on the magnetoresistive effect element so as to be magnetically coupled to the magnetoresistive effect element, and a part of the magnetic core faces the medium. It is characterized in that it is arranged on the medium facing surface side of the magnetoresistive effect element so as to cover the magnetoresistive effect element when viewed from the surface.

In the first magnetic head, the magnetoresistive effect element is formed on the flat substrate before the underlying surface is rough, that is, prior to the formation of the magnetic core, so that the characteristic deterioration of the magnetoresistive effect film is prevented. be able to. On the other hand, since the recording coil is formed on the upper surface side of the magnetic core where a sufficient area can be obtained through the flattening step, it is possible to sufficiently secure good recording efficiency of the recording coil. Furthermore, since the gap of the magnetic core is used for both recording and reproduction, the recording and reproduction tracks are the same. By these, it becomes possible to improve the recording / reproducing characteristics.

Further, in the second magnetic head, a part of the magnetic core is arranged on the medium facing surface side so as to cover the magnetoresistive effect element when viewed from the medium facing surface, and this portion is shielded. Since the effect is exhibited, it is possible to prevent the recording signal from flowing into the magnetoresistive effect element without passing through the magnetic core. This makes it possible to obtain a good S / N ratio.

[0015]

Embodiments of the present invention will be described below.

FIG. 1 and FIG. 2 are views showing a schematic configuration of an embodiment of a magnetic recording / reproducing head to which the first magnetic head of the present invention is applied, and FIG. 1 (a) is a plan view thereof.
FIG. 2B is a front view of the same as seen from the medium facing surface, and FIG.
FIG. 3 is a cross-sectional view taken along line AA of FIG.

[0017] In the magnetic recording reproducing head 1 shown in these figures, Al ₂ O ₃ · TiC mixed substrate (hereinafter, referred to as AlTiC substrate) on the substrate 2 is made of such, a thickness of about 10 [mu] m Al ₂ O ₃ film An insulating layer 3 made of, for example, is provided as a base layer. An MR element (magnetoresistive element) 4 is formed on the insulating base layer 3 at a position retracted from the medium facing surface S by a predetermined distance.

That is, the MR film (magnetoresistive film) 5
Is formed at a position retracted from the medium facing surface S by a predetermined distance such that the stripe direction thereof is substantially parallel to the medium facing surface S. A pair of leads 6 made of, for example, Cu for supplying a sense current in the stripe direction of the MR film 5 are connected and formed on both ends of the MR film 5 in the stripe direction. The MR element 4 is composed of the MR film 5 and the pair of leads 6.

The MR element 4 is preferably arranged at a position relatively close to the medium facing surface S in consideration of a short circuit, abrasion, etc. due to contact with the recording medium. However, the shapes of the MR film 5 and the leads 6 are not limited to these. For example, the MR film is formed so that the stripe direction is substantially perpendicular to the medium facing surface, and the MR film is formed.
Various shapes such as forming leads so as to supply a sense current in the stripe direction of the film can be applied.

As the MR film 5, for example, an anisotropic magnetoresistive effect film or magnetic film made of Ni ₈₀ Fe _20, whose electric resistance changes depending on the direction of the current and the angle formed by the magnetization moment of the magnetic layer. Co ₉₀ Fe ₁₀ / Cu / Co ₉₀ Fe ₁₀ laminated film having a laminated structure of a magnetic layer and a non-magnetic film, and exhibiting a so-called spin valve effect in which electric resistance changes depending on the angle formed by the magnetization of each magnetic layer. An example of the spin valve film is an artificial lattice film having a giant magnetoresistive effect.

The positional relationship between the MR film 5 and the leads 6 in the MR element 4 may be such that the leads 6 are formed below the MR film 5 as shown in FIG. With such a positional relationship, the magnetic coupling force between the MR film 5 and the magnetic cores 8 and 9 described later can be increased, that is, the magnetic resistance from the magnetic cores 8 and 9 to the MR film 5 can be reduced. be able to.

The surface of the MR element 4 described above has a thickness of 100 nm.
The MR element 4 and the magnetic cores 8 and 9 described later are electrically insulated from each other by the insulating layer 7 made of an Al ₂ O ₃ film or the like. This insulating layer 7
On the upper side, there is an L-shaped first magnetic core 8 and an inverted L-shaped second magnetic core 8.
And the magnetic core 9 are formed so that their upper surfaces form the same plane substantially parallel to the substrate surface. These first and second magnetic cores 8 and 9 are magnetically coupled to both ends of the MR film 5 in the stripe direction via the insulating layer 7.

The first and second magnetic cores 8 and 9 mainly constitute a magnetic yoke, and for example, Fe-
It is made of a soft magnetic material such as N, NiFe alloy or CoZrNb amorphous alloy. In addition, the first and second
Since the thickness of the magnetic cores 8 and 9 becomes the track width, these thicknesses are set according to the desired track width.
Between the first magnetic core 8 and the second magnetic core 9 on the medium facing surface S side, an Al ₂ O ₃ film or the like having a predetermined thickness formed in a direction substantially perpendicular to the substrate surface is formed. A magnetic gap 10 made of a non-magnetic film is interposed. The magnetic gap 10 functions as a reproducing gap during a reproducing operation, and the signal magnetic flux flowing from the recording medium into the first and second magnetic cores 8 and 9 through the magnetic gap 10 is guided to the MR element 4. , The signal magnetic field is reproduced.

A back gap 11 wider than the magnetic gap 10 is provided at the rear portion of the magnetic gap 10. The portion corresponding to the back gap 11 is flattened with the resist used in the manufacturing process of the first and second magnetic cores 8 and 9 described later.

The above-mentioned first and second magnetic cores 8 and 9
The upper part is flattened including the back gap 11, and the recording coil 12 is formed on the flattened surface. The recording coil 12 is a flat coil spirally wound around a back core 13 formed so as to magnetically couple the first and second magnetic cores 8 and 9 on the back gap 11 side. Is. Such a recording coil 1
The recording magnetic flux generated by energizing the second magnetic flux 2 is magnetically coupled to the first and second magnetic cores 8 and 9 by the back core 13.
The magnetic flux is supplied from the magnetic gap 10 to the recording medium as a leakage magnetic flux, and magnetic recording is performed.

As described above, the magnetic gap 10 functions as a reproducing gap and a recording gap, and the magnetic cores 8 and 9 including the back core 13 are magnetic circuits for guiding the signal magnetic flux from the recording medium to the MR element 4. At the same time, it also functions as a magnetic circuit for guiding the recording magnetic flux from the recording coil 12 to the recording medium.

Here, when an attempt is made to achieve a recording density of about 10 Gbits with the magnetic gap 10 formed in a direction substantially perpendicular to the substrate surface as described above, the gap length is 50.
It is required that the track width be about 500 nm as well as about nm. It is extremely difficult to form such a magnetic gap 10 by etching from a plane. Therefore, first, the first magnetic core 8 is formed by film formation and patterning of the soft magnetic film to form a gap facing surface by the first magnetic core 8, and then, including on the first magnetic core 8, the magnetic After a non-magnetic film serving as the gap 10 and a soft magnetic film serving as the second magnetic core 9 are sequentially stacked, the soft magnetic film for forming the second magnetic core formed on the first magnetic core 8 is formed. The method of removing by the planarization process is preferable in view of yield and manufacturing cost.

In the magnetic recording / reproducing head 1 of this embodiment, the first and second magnetic cores 8 and 9 and the magnetic gap 1 are provided.
No. 0 is produced by the above-mentioned laminated film formation and flattening process, and therefore a non-magnetic film to be the magnetic gap 10 is formed below the second magnetic core 9.
That is, a substrate prepared in advance in the step of forming the first magnetic core 8 by forming a non-magnetic film to be the magnetic gap 10 from the lower side of the second magnetic core 9 to the upper side of the first magnetic core 8. The magnetic gap 10 is arranged along a gap-opposing surface that is substantially orthogonal to the surface. In this way, the portion of the non-magnetic film arranged in the direction substantially perpendicular to the substrate surface forms the magnetic gap 10. In the flattening process, generally, an organic resist is applied on the uneven surface, and the resist surface is flattened to form the unevenness. In this case, the soft magnetic film to be the second magnetic core 9 and the resist are the same. It is general that ion milling is performed under conditions such that a milling rate is obtained to flatten the upper surfaces of the first and second magnetic cores 8 and 9. In this embodiment, such a flattening process is applied. ing.

At this time, the upper surfaces of the first and second magnetic cores 8 and 9 and the magnetic gap 10 become rough due to ion milling, and the surface roughness of these surfaces usually becomes large. Therefore, when the MR element 4 is formed on such a surface having a large surface roughness, the characteristics of the MR film 5 are deteriorated.
In particular, when a spin valve film made of a Co ₉₀ Fe ₁₀ / Cu / Co ₉₀ Fe ₁₀ laminated film or the like is used as the MR film 5, the thickness of each film is as thin as several nanometers, and therefore the characteristics depend on the surface roughness. Will be significantly reduced.

On the other hand, in the magnetic recording / reproducing head 1 of this embodiment, the MR film 5 is formed before the underlying surface is rough, that is, prior to the formation of the first and second magnetic cores 8 and 9. ing. In other words, the MR element 4 is formed on the flat insulating base layer 3. Thereby, MR
It is possible to prevent deterioration of the characteristics of the film 5. Thus M
By forming the R element 4 on the flat insulating underlayer 3, that is, below the first and second magnetic cores 8 and 9, the MR film 5 having good characteristics can be obtained.
The effect is particularly great when a spin valve film is used as the MR film 5. When the MR element 4 is arranged below the first and second magnetic cores 8 and 9, the lead 6 is M
If it exists on the upper side of the R film 5, it is MR by the thickness of the lead 6.
There is a risk that the distance between the film 5 and the first and second magnetic cores 8 and 9 will increase, the magnetic resistance will increase, and the reproduction output will decrease. For such a point, it is effective to form the lead 6 under the MR film 5 as shown in FIG.
As a result, the MR film 5 and the first and second magnetic cores 8 and 9 can be brought close to each other, so that the reproduced signal magnetic flux can be efficiently transmitted to the MR film 5.

On the other hand, in order to increase the magnetic recording efficiency of the recording coil 12, it is necessary to wind many times. In that case, a sufficient area is required to form a planar coil made of a thin film. Therefore, in the magnetic recording / reproducing head 1 of this embodiment, the recording coil 1 is provided above the first and second magnetic cores 8 and 9 which can secure a sufficient area.
2 are formed. That is, the recording coil 12 is formed after forming and flattening the first and second magnetic cores 8 and 9.

An example of the flattening process and the recording coil 12 forming process 3 will be described below. That is, first, the rise of the second magnetic core 9 formed on the first magnetic core 8 is made uniform by using an organic resist. Then 523K ×
The resist is cured by heat treatment under conditions such as 1 hour. Next, the cured resist and the first and second
The ion milling is performed by selecting an ion incident angle of a certain angle so that the material for forming the magnetic cores 8 and 9 of, for example, the FeN-based film has the same milling speed. By this ion milling, the surfaces of the first and second magnetic cores 8 and 9 and the back gap 11 sandwiched therebetween are uniformly flattened. Then, after forming an insulating layer on such a flat surface, the recording coil 12 is formed by a thin film method, the recording coil 12 is covered with a resist (not shown), and then a back core 13 is formed to form the first and second layers. The second magnetic cores 8 and 9 are connected.

As described above, in the magnetic recording / reproducing head of this embodiment, the MR element 4 is formed in advance under the first and second magnetic cores 8 and 9, and the recording coil 12 is formed in the first position. Since it is formed on the upper side of the first and second magnetic cores 8 and 9, the deterioration of the characteristics of the MR film 5 can be suppressed, and at the same time, the recording efficiency can be improved. Further, since the reproducing gap and the recording gap are shared by the single magnetic gap 10, the recording / reproducing alignment of the recording / reproducing track can be made zero. With these, it becomes possible to obtain excellent recording / reproducing characteristics even in a high recording density system.

Next, an embodiment of a yoke type MR head to which the second magnetic head of the present invention is applied will be described with reference to FIGS.

FIG. 4 shows a yoke type MR according to this embodiment.
FIG. 6 is a front view of the head seen from the medium facing surface, and FIG. 5 is a cross-sectional view taken along the line BB. The basic structure of the yoke type MR head 21 shown in these figures is the MR head (reproducing head) in the magnetic recording / reproducing head of the above-described embodiment.
It is the same as the part.

That is, the MR element 4 is provided on the insulating base layer 3 formed on the AlTiC substrate 2 or the like. 4 and 5 show the spin valve film 2 as the MR film.
2 shows an example in which a hard magnetic layer 23, for example, a laminated film of a Cr film and a CoPt film is formed below the spin valve film 22. The surface of the MR element 4 is covered with an insulating layer 7 made of an Al ₂ O ₃ film or the like, and a magnetic gap 10 is formed on the insulating layer 7 in a direction substantially perpendicular to the substrate surface. The first and second magnetic cores 8 and 9 are formed so as to be magnetically coupled to both ends of the spin valve film 22 in the stripe direction.

The yoke type MR head 2 according to this embodiment
The basic configuration of No. 1 is as described above, but in this embodiment, the first and second parts are provided on the medium facing surface S side of the MR element 4 so that the MR element 4 is covered when viewed from the medium facing surface S. The magnetic cores 8 and 9 are partially arranged.

That is, over-milling is performed on the insulating base layer 3 from the MR element 4 side to the medium facing surface S side, for example, in the ion milling process when patterning the hard magnetic layer 23, the spin valve film 22, the leads 6 and the like. Thus, the step 3a is provided. The step 3a of the insulating base layer 3
Is formed so that the region from the end of the MR element 4 where it is formed to the medium facing surface S has a concave shape. Here, it is preferable that the step 3a of the insulating base layer 3 is formed with a gentle taper so that the formation angle is, for example, 60 degrees or less. This is from the magnetic gap 10 to the first and second
This is to prevent the signal magnetic flux from flowing into the magnetic cores 8 and 9.

The insulating layer 7 located on the medium facing surface S side of the MR element 4 and parts of the first and second magnetic cores 8 and 9 are
Since it is formed on the step 3a described above, the MR element 4
Between the surface of the (spin valve film 22) facing the medium facing surface S and the medium facing surface S, the first and second magnetic cores 8,
Part of 9 is present. Therefore, when viewed from the medium facing surface S, the surface of the MR element 4 facing the medium facing surface S is covered with the first and second magnetic cores 8 and 9. In other words, the MR element 4 is present at a position that is not directly visible from the medium facing surface S due to the first and second magnetic cores 8 and 9.

Thus, by covering the surface of the MR element 4 facing the medium facing surface S with the first and second magnetic cores 8 and 9, the first and second magnetic cores 8 and 9 are shielded. It becomes effective. Therefore, the magnetic gap 10
It is possible to prevent the recording signals located before and after the track signal read via the recording medium from flowing into the MR element 4 without passing through the magnetic cores 8 and 9. That is, it is possible to suppress the noise from reaching the MR element 4, so that a good S / N ratio can be obtained.

The yoke type MR head 2 of the above embodiment
1 can be produced, for example, as follows.
A manufacturing process of the yoke type MR head 21 of this embodiment will be described with reference to FIGS. 6 is a cross-sectional view (A to D) viewed from the medium facing surface and a cross-sectional view similar to FIG. 5 (a to D).
The process steps for manufacturing the yoke type MR head 21 of this embodiment are shown in FIG.

First, as the hard magnetic layer 23, for example, a Cr film having a film thickness of 5 nm and a CoP film having a film thickness of 20 nm are formed on the alumina insulating base layer 3 having a thickness of about 10 μm formed on the AlTiC substrate 2.
The t film is sequentially formed. The laminated film of the Cr film and the CoPt film is patterned by ion milling so as to have a predetermined hard magnetic layer 23 shape. At this time, an appropriate distance, for example, 15 nm overmilling (indicated by an arrow x in the figure) is applied to the alumina insulating base layer 3.

Next, the spin valve film 22 including the hard magnetic layer 23 is formed. The specific structure of the spin valve film 22 is, for example, a 10 nm CoZrNb film or a 3 nm NiFe film.
Film, 2nm CoFe film, 3nm Cu film, 2nm CoFe
It is a laminated film including a film, a 10 nm IrMn film, and a 15 nm Τi film. This laminated film is formed into a predetermined stripe shape (for example,
Pattern by ion milling so that the size becomes 2 × 10 μm). At this time, 70 nm overmilling (indicated by arrow y in the figure) is applied (FIG. 6-A / a).

Next, a conductive film to be the lead 6, for example, 10 nm
After forming a laminated film of the Ta film, the Cu film of 80 nm, and the Ta film of 10 nm, patterning is performed by ion milling into a desired lead shape (lead interval 3 μm). At this time, 10 nm overmilling (indicated by arrow z in the figure) is applied (Fig. 6-
B / b).

Through the above steps, a total of 95 nm overmilling is performed on the medium facing surface S side of the insulating underlayer 3. That is, on the medium facing surface S side of the insulating base layer 3,
A step 3a of 120 nm including the film thickness of the hard magnetic layer 23 is formed from the lower side of the spin valve film 22.

Next, an insulating layer 7 for insulating between the leads 6 and the magnetic cores 8 and 9 is formed, for example, an Al ₂ O ₃ film having a film thickness of 100 nm is formed, and the first magnetic core 8 is formed thereon. After forming a resist having a shape, a soft magnetic film that becomes the first magnetic core 8, for example, a Cr film with a film thickness of 10 nm and Fe with a film thickness of 500 nm.
An N-type soft magnetic film is formed, and the resist is lifted off to perform patterning.

Next, a resist having a shape corresponding to the second magnetic core 9 is formed while filling the back gap 11 with a resist, and then a non-magnetic film to be the magnetic gap 10, for example, Al ₂ O having a film thickness of 50 nm is formed. ₃ films, a soft magnetic film to be the second magnetic core 9, for example, a Cr film with a film thickness of 10 nm and a film thickness 5
A FeN-based soft magnetic film of 00 nm is sequentially formed, and the resist is lifted off to perform patterning.

Finally, the raised portion of the soft magnetic film to be the second magnetic core 9 is removed by performing the above-mentioned flattening step by etch back. Through the above steps, the yoke type MR head 21 is completed.

According to the manufacturing process of the yoke type MR head 21 as described above, in the spin valve film 22 portion located below the first magnetic core 8, the spin valve film 22 is formed by subtracting 10 nm of the Cr film thickness. The first magnetic core 8 is formed at a position lower than 85 nm. Further, in the portion of the spin valve film 22 located below the second magnetic core 9, the film thickness of the Al ₂ O ₃ film to be the magnetic gap 10 is further reduced by 50 nm to be located 35 nm below the spin valve film 22. The second magnetic core 9 is formed.

By applying the above-described manufacturing method, the surface of the MR element 4 facing the medium facing surface S is covered with the first and second magnetic cores 8 and 9, and the first and second magnetic cores 8 and 9 are formed. 9 makes it possible to prevent the MR element 4 from being directly seen from the medium facing surface S. As a result, noise from other than the normal reproduction signal is suppressed from entering the spin valve film 22, and the S / N ratio can be improved.

In the above-described second magnetic head embodiment, only the yoke type MR head has been described.
It goes without saying that a magnetic recording / reproducing head can be constructed by forming a recording coil on this yoke type MR head as in the case of the first magnetic head described above. With such a magnetic recording / reproducing head, it is possible to further improve the recording / reproducing characteristics.

[0052]

As described above, according to the first magnetic head of the present invention, the deterioration of the characteristics of the MR film can be suppressed and the recording efficiency can be improved, so that good recording and reproducing characteristics can be obtained. It becomes possible to obtain. Further, according to the second magnetic head, it is possible to suppress a decrease in reproduction sensitivity due to noise.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of an embodiment of a magnetic recording / reproducing head to which a first magnetic head of the present invention is applied.

2 is a cross-sectional view taken along the line AA of the magnetic recording / reproducing head shown in FIG.

3 is a cross-sectional view showing a modified example of the magnetic recording / reproducing head shown in FIG.

FIG. 4 is a front view showing a schematic configuration of an embodiment of a yoke type MR head to which a second magnetic head of the present invention is applied.

5 is a sectional view taken along line BB of the yoke type MR head shown in FIG.

FIG. 6 is a cross-sectional view showing a main part of a manufacturing process of the yoke type MR head shown in FIG.

[Explanation of symbols]

 1 ... Magnetic recording / reproducing head 3 ... Insulating underlayer 4 ... MR element 8, 9 ... Magnetic core 10 ... Magnetic gap 12 ... Recording coil

Claims (3)

[Claims] 1. A magnetoresistive effect element formed on a substrate, and a magnetic gap formed in a direction substantially perpendicular to the substrate surface are interposed on the medium facing surface side, and both ends of the magnetoresistive effect element A magnetic core formed on the magnetoresistive effect element so as to be electrically coupled to each other, and a recording coil formed on the upper surface side of the magnetic core and supplying a recording magnetic flux to the magnetic core. And a magnetic head. 2. The magnetic head according to claim 1, wherein a part of the magnetic core covers the magnetoresistive effect element when viewed from the medium facing surface, and is closer to the medium facing surface than the magnetoresistive effect element. A magnetic head characterized in that it is arranged in. 3. A magnetoresistive effect element formed on a substrate and arranged to face each other with a magnetic gap formed in a direction substantially perpendicular to the surface of the substrate, and magnetically coupled to each of the magnetoresistive effect elements. As such, a pair of magnetic cores formed on top of the magnetoresistive effect element, and a part of the magnetic core, so as to cover the magnetoresistive effect element when viewed from the medium facing surface, A magnetic head arranged on the medium facing surface side of the magnetoresistive element.