JPH0924346A - Mist collecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely collect mist and also to prevent its release into the atmosphere by sucking a high concentration mist with a water seal type vacuum pump via a sucking pipe and discharging the sucked mist to a tank connected with a feed side of the water seal type vacuum pump. SOLUTION: The high concentration mist generated in a wet treating device 1 is sucked with the water seal type vacuum pump 19 via the sucking pipe 6. A discharge pipe 24 of this water seal type vacuum pump 19 is connected with a tank 27 for sealing liquid 21 via a heat exchanger 25. The sucked high concentration mist is conveyed to a heat exchanger 25 through the discharge pipe 24 together with the sealing liquid 21 and is cooled. After cooling, the liquid is returned to the tank 27. A drain piping 32 having a valve 31 is connected with the tank 27 and the sealing liquid 21 is collected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mist collecting device for collecting mist from a wet processing unit which is generated when wet processing an object to be cleaned (semiconductor substrate, liquid crystal substrate, etc.).

[0002]

2. Description of the Related Art FIG. 5 shows an example of a dry method of this kind of apparatus.
As shown in FIG. 3, a wet processing bath 3 containing the liquid 2 is provided inside the wet processing apparatus 1 to immerse the object 4 to be cleaned. Since the liquid 2 used is one that is heated or easily vaporized, it rises as a mist 5 as indicated by an arrow.

On the other hand, a suction pipe 6 is provided above the wet treatment tank 3 to suck the high-concentration mist 7, and the mist filter medium (dry method) 9 provided in the mist collection box 8 provided on the exhaust side absorbs it. However, the mist that could not be absorbed was released from the blower 10 because of its low concentration.

As another side of the wet method, as shown in FIG. 6, a mist collecting scrubber 11 is provided on the exhaust side of the suction pipe 6, and a spray nozzle 12 is provided in the mist collecting scrubber 11 to provide a liquid 13. Is sprayed and brought into contact with the mist, and the mist is melted and liquefied by the sprayed liquid 13, collected in the mist recovery scrubber 11, and the recovered liquid 13 is sent to the spray nozzle 12 by the pump 14 to be sprayed. There is. The low-concentration mist that has not been liquefied is discharged to the atmosphere through the blower 15. Since the others are the same as those in FIG. 5, the same reference numerals are given and the description thereof will be omitted.

[0005]

In any of the above-mentioned conventional devices, there is a problem that the mist, which has a low concentration but cannot be completely recovered, is released into the atmosphere and pollutes the environment. It was Therefore, the present invention is intended to provide a device that reliably collects mist and does not release it to the atmosphere.

[0006]

In order to solve the above-mentioned problems, the present invention is provided with a suction pipe for sucking high-concentration mist of a wet processing apparatus, and this suction pipe is a water-sealed vacuum in which a sealing liquid is sealed. Connected to the pump, connected to the supply side of the water-sealed vacuum pump on the discharge side of the water-sealed vacuum pump, and provided a heat exchanger for cooling the sealing liquid between the water-sealed vacuum pump and the tank. Configure a strike recovery device.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION The embodiment of the present invention will be described with reference to FIG. 1. Since the state of mist generation is the same as that of the conventional wet processing apparatus 1, the same reference numerals as in FIG. .

As another mist generating means, as shown in FIG. 2, a rotary pedestal 17 driven by a motor 16 is provided in the wet processing apparatus 1, and the object 4 to be cleaned is placed and fixed on the rotary pedestal 17, The treatment liquid is jetted from the spray nozzle or the high-pressure jet nozzle 18 to the object to be cleaned 4, and the generated high-concentration mist 7 is sucked by the suction pipe 6.

A water-sealed vacuum pump 19 as shown in FIG. 1 is provided on the exhaust side of the suction pipe 6. As shown in FIG. 4, the water-sealed vacuum pump 19 has a casing 20 in which a sealing liquid 21 is sealed and a suction port 2 communicating with a suction pipe 6.
The high-concentration mist 7 is sucked from 2, is dissolved in the sealing liquid 21 by driving the blade 23, and is discharged from the discharge pipe 24 together with the sealing liquid 21.

The discharge pipe 24 is connected to the heat exchanger 24 to cool the sealing liquid 21 as shown in FIG.
The cooled sealing liquid 21 is sent to the tank 27 via the. In the figure, 28 is a cooling water supply pipe and 29 is a cooling water discharge pipe.

In the tank 27, the sealing liquid 21 is connected to the water-sealing vacuum pump 19 through the supply pipe 30, and the sealing liquid 2 is constantly supplied.
1 is sent to the water-sealing vacuum pump 19, and the sealing liquid 21 can be collected by the drain pipe 32 having the valve 31.

The present invention is configured as described above, and the high-concentration mist generated in the wet processing apparatus 1 is sent from the suction pipe 6 to the water-sealed vacuum pump 19 and sealed inside. The high-concentration mist is dissolved by the working liquid 21 and mixed with the sealing liquid 21.

As a result, the sealing liquid 21 mixed with the high-concentration mist 7 is sent from the discharge pipe 24 to the heat exchanger 25, cooled, and sent to the tank 27. It is sent from the tank 27 to the water-sealed vacuum pump 19 and becomes the water-sealed sealing liquid 21 to dissolve the high-concentration mist 7. The excess sealing liquid 21 in the tank 27 is discharged to the outside through the drain pipe 32.

[0014]

As described above, according to the present invention, since the high-concentration mist is dissolved in the sealing liquid, it is possible to prevent the mist from being discharged to the outside without being polluted. In addition, since the sealing liquid is cooled during the circulation, it is possible to prevent air bubbles from being generated in the water-sealed vacuum pump due to the temperature rise of the sealing liquid and the suction ability from being lowered.

[0015]

[Brief description of drawings]

FIG. 1 is a layout view of an embodiment of the device of the present invention.

FIG. 2 is a sectional view showing another example of the wet processing apparatus.

FIG. 3 is a side view of a water-sealed vacuum pump.

FIG. 4 is a sectional view taken along line AA of FIG. 3;

FIG. 5 is a layout diagram of a conventional dry method apparatus.

FIG. 6 is a layout view of a conventional wet method apparatus.

[Explanation of symbols]

 1 Wet treatment device 2 Liquid 3 Wet treatment tank 4 Cleaning object 5 Mist 6 Suction tube 7 High concentration mist 8 Mist collection box 9 Mist filter medium 10 Blower 11 Mist recovery scrubber 12 Spray nozzle 13 Liquid 14 Pump 15 Blower 16 Motor 17 Rotation Base 18 Jet nozzle 19 Water-sealed vacuum pump 20 Casing 21 Sealing liquid 22 Intake port 23 Blade 24 Discharge pipe 25 Heat exchanger 26 Cooling pipe 27 Tank 28 Cooling water supply pipe 29 Cooling water discharge pipe 30 Supply and discharge pipe 31 Valve 32 drain piping

Claims (2)

[Claims] 1. A wet treatment device is provided with a suction pipe for sucking high-concentration mist, and the suction pipe is connected to a water-sealed vacuum pump in which a sealing liquid is sealed, and water is discharged to the discharge side of the water-sealed vacuum pump. A mist collecting device having a tank connected to the supply side of a sealed vacuum pump. 2. The mist recovery device according to claim 1, further comprising a heat exchanger provided between the water-sealed vacuum pump and the tank for cooling the sealing liquid.