JPH09248786A - Dust collecting case of single shaft robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To effectively prevent foreign matters from scattering into a clean room without providing any facility for sucking the foreign matters to a robot itself. SOLUTION: A dust collecting case 6 is constituted by forming the whole into a box shape, so as to cover the whole single shaft robot 5. Slits 22 for exposing attaching parts 15a of a movable member 15 of the single shaft robot 5 to the outside are provided over the moving range of the movable member 15. A plurality of pipes 25 on which may sucking holes are formed are arranged along the inner wall in the dust collecting case 6, and these pipes 25 are connected to a negative pressure generating source.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust collecting case of a single axis robot which is mounted on the single axis robot and collects foreign matters such as dust generated from the robot.

[0002]

2. Description of the Related Art Conventionally, there has been known a single-axis robot configured to move a movable member along a rail by a ball screw mechanism and attach various tools according to the purpose to the movable member to move the tool. ing.

In such a single-axis robot, the mechanism part is generally housed in a casing for the reason of scattering of foreign matters such as dust generated in the mechanism part, or appearance and safety, and a part of the movable part. In other words, only the tool mounting portion has a structure in which it projects outside from the opening formed in the casing.

Particularly, in the case of a robot used in a clean room in this kind of robot, since scattering of foreign matters to the outside of the casing is strictly prohibited, a facility for sucking and discarding the foreign matters generated in the casing is provided to the outside. A single-axis robot that prevents the scattering of foreign matter has also been proposed.

[0005]

In recent years, however, even single-axis robots of this kind have been diversified in response to market needs, and therefore, it is necessary to provide each robot with suction equipment suitable for its internal structure. Is required.

However, if the suction equipment suitable for the internal structure of each robot is provided as described above, the design efficiency is poor and the cost of the robot is increased.

The present invention has been made to solve the above problems, and can effectively prevent scattering of foreign matter into a clean room or the like without providing the robot itself with equipment for sucking foreign matter. It is intended to provide a dust collection case for a single-axis robot.

[0008]

SUMMARY OF THE INVENTION The present invention is a single-axis robot having a drive portion housed in a casing, and a part of the movable portion protruding outside from an opening formed in the casing. A dust collection case that is detachably mounted, and has a case body that covers the uniaxial robot in a state where a predetermined space is formed between the case body and the movable portion in the movable region. A pipe member having a slit for exposing to the outside and having a large number of suction holes is internally provided, and the pipe member is connected to a negative pressure supply pipe connected to a negative pressure supply source.

When the dust collecting case is attached to the single-axis robot, foreign matter such as dust generated in the drive section of the single-axis robot and scattered outside the casing is sucked and discharged through the suction hole of the pipe member. It Therefore, even if the single-axis robot does not have a facility for sucking foreign matter, it is possible to prevent scattering of foreign matter such as dust into a space where the robot is used, for example, a clean room.

Particularly, if the pipe member is arranged along the moving path of the movable part and the suction hole is formed corresponding to the movable region of the movable part, foreign matter generated from the single-axis robot can be prevented. It is possible to effectively suck.

When a plurality of independent unit pipes are provided in the case body, a closed space is formed in the case body, and each unit pipe and the negative pressure supply pipe are provided in the closed space. By connecting each of them, it is not necessary to connect a negative pressure supply pipe for each unit pipe, and it is possible to simplify the internal structure of the case body.

[0012]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 schematically shows an orthogonal robot using a single-axis robot equipped with a dust collecting case according to the present invention. As shown in this figure, the orthogonal robot 1 includes a first unit 2 fixed on a base and extending in the X-axis direction,
The second unit mounted on the first unit 2 and extending in the Y-axis direction
It is composed of a unit 3 and a working unit 4 mounted on the second unit 3. The second unit 3 is moved in the X-axis direction by the first unit 2 and the working unit 4 is moved in the Y-axis direction by the second unit 3, so that the working unit 4 moves in a plane. Has been done.

2 and 3 show a specific structure of the first unit 2.

As shown in these figures, the first unit 2
Is composed of a single-axis robot 5 and a dust collection case 6 of the present invention mounted on the single-axis robot 5.

The single-axis robot 5 has a box-shaped casing 10 fixed on a base, and is configured to move a movable member 15 mounted on the casing 10 in the X-axis direction. .

That is, a pair of fixed rails 14 extending in the X-axis direction and a ball screw shaft 13 rotatably driven by a servomotor 11 via a coupling 12 are provided in the casing 10, and the movable member 15 is provided. Is slidably mounted on the fixed rail 14, and the movable member 1
The nut portion 15b of No. 5 is screwed onto the ball screw shaft 13. The movable member 15 is moved in the X-axis direction along the fixed rail 14 by the operation of the servomotor 11.

The movable member 15 is formed with a pair of mounting portions 15a for mounting the second unit 3 on the first unit 2, and these mounting portions 15a are mounted on the casing 10.
It projects to the outside of the casing through an opening 16 formed in the. The openings 16 are formed on both upper sides of the casing 10 over the moving region of the movable member 15.

The dust collecting case 6 is a box-shaped case having a lower opening, covers the uniaxial robot 5 from above, and holds the cable 17 of the uniaxial robot 5 as shown in FIGS. 1 and 2. It is fixed to the base in a state of being released by a notch portion 20 formed on one end side (one end side in the X-axis direction). In addition,
As shown in FIGS. 2 to 4, a seal member 21 is interposed between the dust collection case 6 and the base and between the peripheral portion of the cutout portion 20 and the single-axis robot 5 for sealing.

A pair of slits 22 which are parallel to each other are formed on the upper portion of the dust collection case 6. These slits 22 are formed over the moving region of the movable member 15 of the single-axis robot 5, and the mounting portion 15a of the movable member 15 is exposed above the dust collection case 6 through this slit 22. ing. Then, the mounting member 30 is mounted on the mounting portion 15a thus exposed upward, and the second unit 3 is mounted on the mounting member 30.

On the other hand, inside the dust collection case 6, there are provided a plurality of pipes 25 having a large number of suction holes 25a and extending in the X-axis direction, as shown in FIGS. 25 is attached along the inner wall of the dust collection case 6, and both ends thereof communicate with sealed spaces 23 and 24 formed at both ends (both ends in the X-axis direction) of the dust collection case 6, respectively. In the present embodiment, as shown in FIGS. 3 and 4, each mounting portion 15 of the movable member 15 is near the upper wall.
The pipes 25 are provided at a total of eight places, ie, a place sandwiching a and a place in the vicinity of each side wall in the vertical direction and at a lower place.

The one closed space 23 is connected to a negative pressure supply source (not shown) via a nozzle 26 provided on the end side of the dust collection case 6 and a negative pressure supply pipe 27 attached thereto. Therefore, when the orthogonal robot 1 is operated, the negative pressure generated by the negative pressure supply source is supplied to each pipe 25 through the sealed space 23.

The above is the specific structure of the first unit 2, but the second unit 3 is also the first unit 2.
The single-axis robot 7 and the dust-collecting case 8 covering the same are included. The single-axis robot 7 and the dust-collecting case 8 have a specific configuration by the single-axis robot 5 and the dust-collecting case of the first unit 2. It has the same configuration as Case 6. However, the second
In the dust collecting case 8 of the unit 3, the portion corresponding to the lower opening of the dust collecting case 6 is closed by the lid, and in this respect, the configuration is different from the dust collecting case 6. .

According to the orthogonal robot 1 described above, the working unit 4 is moved on the XY plane by driving the single-axis robots 5 and 7 of the units 2 and 3, and such an orthogonal robot is also used. The negative pressure generated by the negative pressure generating source during the operation of 1 is supplied to the dust collecting cases 6 and 8 of the units 2 and 3. As a result, during operation of the orthogonal robot 1, negative pressure acts on the dust collection cases 6 and 8 through the closed space 23, the pipe 25, and the suction holes 25a, and the dust floating in the dust collection cases 6 and 8 is generated. Foreign matter such as dust and the like is sucked and exhausted through the pipe 25. That is, the foreign matter generated inside the single-axis robots 5 and 7 and scattered to the outside from the opening 16 of the casing 10 is sucked and discharged through the pipe 25. Therefore, scattering of foreign matter into a clean room or the like is effectively prevented.

By mounting the dust collecting case 6 on the single-axis robot 5 as described above, the single-axis robot 5 itself can be installed in a clean room or the like without providing a facility for sucking foreign matter such as dust. It is possible to prevent the scattering of foreign matter. Therefore, for example, in designing and manufacturing a single-axis robot, complicated and complicated designing and manufacturing corresponding to diversifying robot structures can be eliminated, and designing and manufacturing efficiency can be improved. It is possible to suppress cost increase.

Moreover, since the dust collecting case 6 as described above exhibits the dust collecting function only by being mounted so as to cover the single-axis robot 5 as described above, the size of the single-axis robot 5 is
Alternatively, if the movable range of the movable member 15 is the same, it can be mounted on an existing model.

The orthogonal robot 1 of the above embodiment.
Is an example of a robot using the dust collection case according to the present invention, and the specific configurations of the single-axis robots and the dust collection case can be appropriately changed without departing from the gist of the present invention.

For example, in the dust collecting case 6 of the above embodiment, eight pipes 25 in the X-axis direction having the suction holes 25a are provided therein, but the number, shape, and suction holes of the pipes 25 are provided. The dust collection case 6 is provided at the drilling position of 25a.
It may be appropriately selected so that foreign matter such as dust inside can be effectively sucked. For example, most of the foreign matter generated inside the robot is caused by the movement of the movable member 15 and the casing 10
Since it scatters into the dust collection case 6 through the opening 16 of
The suction holes 25a of the pipe 25 may be intensively arranged only in the vicinity of the movable region of the movable member 15 to enhance the dust collection efficiency. As for the pipe 25 disposed with the mounting portion 15a of the movable member 15 interposed therebetween, the suction hole 25a is opened toward the mounting portion 15a as shown in FIG. It is also possible to make it easier to suck in foreign matter.

In the above embodiment, both ends of each pipe 25 are communicated with the closed spaces 23 and 24 to supply a negative pressure to the closed spaces 23. However, for example, the closed spaces 23 and 24 are provided. Alternatively, both ends of the pipe 25 may be directly connected to both ends of the dust collection case 6 in the X-axis direction, and each pipe 25 may be individually connected to the negative pressure supply source. However, when negative pressure is supplied to the pipes 25 through the closed space 23 as in the above embodiment, the negative pressure can be uniformly supplied to each pipe 25 with a simple configuration.
There is an advantage that the structure of the dust collection case 6 can be simplified. In addition, when the end portions of the pipes 25 are communicated with the closed space 24, the other end portions (the right end portions in FIG. 4) of the pipes 25 are integrally closed ends. Eliminates the work of closing and facilitates production.

Further, the dust collection case 6 as described above is not limited to the single-axis robot 5 having no suction equipment for foreign matter such as dust, and should be attached to the single-axis robot 5 having suction equipment for foreign matter. May be. According to such a usage method, it is possible to suck the foreign matter that is not sucked inside the robot and is scattered to the outside in the dust collection case 6, and it is possible to more reliably prevent the foreign matter from scattering to the clean room or the like. it can.

[0031]

As described above, in the dust collecting case of the present invention, the case body covering the uniaxial robot is formed with the slit for exposing the movable part of the uniaxial robot to the outside in the movable area, and the inside thereof. Since a pipe member equipped with a suction hole is installed inside, and this pipe member is connected to a negative pressure supply source, by attaching to a single-axis robot, it is generated from the single-axis robot and scattered to the outside of the robot. Foreign matter such as dust can be effectively sucked and exhausted. Therefore, it is possible to prevent scattering of foreign matter such as dust into the clean room without providing the single-axis robot itself with equipment for sucking foreign matter.

Particularly, in the dust collecting case as described above,
By disposing the pipe member along the moving path of the movable part and forming the suction hole corresponding to the movable region of the movable part, the foreign matter generated from the uniaxial robot can be effectively collected to clean room. It is possible to more reliably prevent the particles from scattering.

When a plurality of independent unit pipes are provided in the case body, a closed space is formed in the case body, and each unit pipe and the negative pressure supply pipe are respectively provided in the closed space. If they are communicated with each other, negative pressure can be supplied to the unit pipe with a simple structure, and the structure inside the case body can be simplified.

[Brief description of drawings]

FIG. 1 is a perspective view showing an orthogonal robot in which a dust collecting case of a single-axis robot of the present invention is used.

FIG. 2 is a cross-sectional view showing a configuration of a first unit of the orthogonal robot.

FIG. 3 is a sectional view taken along line AA in FIG. 2;

FIG. 4 is a sectional view taken along line BB in FIG.

FIG. 5 is a cross-sectional view showing an example of suction holes formed in a pipe.

[Explanation of symbols]

 1 Orthogonal robot 2 1st unit 3 2nd unit 4 Working unit 5,7 Single axis robot 6,8 Dust collection case 10 Casing 15 Movable member 15a Mounting part 23,24 Sealed space 25 Pipe 21 Seal member 22 Slit 25a Suction Hole

Claims (3)

[Claims] 1. A dust collector detachably attached to a single-axis robot configured to have a drive unit housed in a casing, and a part of a movable unit protruding outside from an opening formed in the casing. The case has a case body that covers the uniaxial robot in a state where a predetermined space is formed between the case and the casing, and a slit that exposes the movable portion to the outside in the movable region is formed in the case body. A dust collecting case for a single-axis robot, characterized in that a pipe member having a large number of suction holes is internally provided, and the pipe member is connected to a negative pressure supply pipe connected to a negative pressure supply source. 2. The pipe member is arranged along a moving path of the movable portion, and the suction hole is formed corresponding to a movable region of the movable portion. Dust collection case for a single-axis robot. 3. The pipe member is composed of a plurality of independent unit pipes, and a closed space is formed in the case body, and the unit pipes and the negative pressure supply are provided in the closed space. The dust collection case for a single-axis robot according to claim 1 or 2, wherein the pipes are communicated with each other.