JPH09165232A - Non-iridescent transparent electroconductive film and glass having the same - Google Patents
Non-iridescent transparent electroconductive film and glass having the sameInfo
- Publication number
- JPH09165232A JPH09165232A JP7326795A JP32679595A JPH09165232A JP H09165232 A JPH09165232 A JP H09165232A JP 7326795 A JP7326795 A JP 7326795A JP 32679595 A JP32679595 A JP 32679595A JP H09165232 A JPH09165232 A JP H09165232A
- Authority
- JP
- Japan
- Prior art keywords
- film
- glass
- transparent conductive
- conductive film
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、建築用窓や車輌用
窓等の被膜付き熱線遮蔽ガラス等に使用する無光彩透明
導電膜及び該膜付きガラスであって、とりわけ熱暑感を
防止して遮断でき冷暖房効果を向上せしめるとともに人
や環境に優しく、かつ比較的高い可視光透過率とニュ−
トラル(無色化あるいは無色ムラ化)色調を有する無光
彩透明導電膜付きガラス薄膜であり、例えば保護膜、反
射低減膜、帯電防止あるいは低放射率を付与した無光彩
のコ−ティング膜を有するガラス等多機能化を可能とす
る無光彩透明導電膜及び該膜付きガラスに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an achromatic transparent conductive film and a glass with a film, which are used for a film-coated heat ray-shielding glass such as a window for a building or a window for a vehicle. It is possible to block the light and improve the heating and cooling effect, and it is friendly to people and the environment, and has a relatively high visible light transmittance and
A glass thin film with an achromatic transparent conductive film having a toral (colorless or colorless unevenness) tone, for example, a glass having a protective film, a reflection reduction film, an antistatic coating film with antistatic property or low emissivity. The present invention relates to an achromatic transparent conductive film and a glass with the film, which enables multi-functionalization.
【0002】[0002]
【従来の技術】近年、建築用窓ガラスや車輌用窓ガラス
等を通して室内や車内に流入する太陽輻射エネルギーを
遮蔽し、室内や車内の温度上昇、冷房負荷を低減させる
目的から熱線遮蔽ガラスが建築用窓ガラスや車輌用窓ガ
ラス等に採用されている。2. Description of the Related Art In recent years, heat ray shielding glass has been constructed for the purpose of shielding solar radiation energy flowing into a room or a vehicle through a building window glass, a vehicle window glass or the like to reduce a temperature rise in the room or the vehicle and a cooling load. It is used as window glass for vehicles and window glass for vehicles.
【0003】また最近は高熱線遮蔽性能等に加えて各種
機能性を有するガラスを種々の膜構成でもって付与する
ことができるなかで、大面積のガラスにおける膜厚変動
や干渉等による反射色調の色ムラを目に感知しないよう
にしようとすることが人や環境に優しくする必要から望
まれ、各種提案がなされている。In addition, recently, glass having various functions in addition to high heat ray shielding performance can be provided by various film constitutions, and a reflection color tone due to film thickness variation and interference in a large area glass can be provided. Since it is necessary to be gentle to people and the environment, it is desired to prevent color unevenness from being perceived by the eyes, and various proposals have been made.
【0004】例えば、特公昭63-39535号公報には、無光
彩ガラス構造物が記載されており、少なくとも1枚の透
明なガラスシ−ト及びシ−ト上に設置される赤外反射性
物質の第1の無機質被覆層を含み、赤外反射性物質が透
明な半導体であって昼光照明で光彩色を示す型の物質で
あるところの構造物において、第2の被覆層がガラスシ
−トと第1の被覆層との間に設置され、かつ第2の被覆
層が昼光照明で第1の被覆層の光彩色が見えることを実
質的に減少させるように光を反射しかつ屈折するための
手段を第2の被覆層の本体と共に形成する少なくとも2
つの界面を与えることによって光彩色を実質的に減少さ
せる手段となること、第2の被覆層が、ガラスシ−トの
屈折率と第1の被覆層の屈折率との積の平方根として定
義される屈折率を有すること、及び第2の被覆層が500n
m の真空中の波長を有する光の1/4波長の厚さを有す
ることが開示されている。For example, Japanese Examined Patent Publication (Kokoku) No. 63-39535 discloses an achromatic glass structure, which is composed of at least one transparent glass sheet and an infrared-reflecting substance installed on the sheet. In the structure including the first inorganic coating layer, wherein the infrared reflective material is a transparent semiconductor and is a type of material exhibiting a chromatic color in daylight illumination, the second coating layer is a glass sheet. Located between the first cover layer and for reflecting and refracting light such that the second cover layer substantially reduces the visible color of the first cover layer in daylight illumination. Means for forming with the body of the second cover layer at least 2.
A second coating layer is defined as the square root of the product of the index of refraction of the glass sheet and the index of refraction of the first coating layer to provide a means of substantially reducing the chromatic color by providing two interfaces. Having a refractive index, and the second coating layer is 500n
It is disclosed to have a quarter wavelength thickness of light having a wavelength in m 2 of vacuum.
【0005】そのなかで、例えば第2の被覆層が1.7 〜
1.8 の屈折率を有し、かつ厚さが64〜80nmであり、第1
の被覆層の屈折率が2、ガラスシ−トの屈折率が1.5 で
あること、また例えば第2の被覆層が金属酸化物、金属
窒化物又はこれらの混合物であって、Al2O3 、SiO2、Zn
O 、MgO 、SnO2、In2O3 、GeO2、Ga2O3 及びSi3N4 の群
から選ばれること、また例えば酸化第2スズである半導
体層の厚みが0.4 μ未満であり、第1の被覆層と第2の
被覆層との合計膜厚が0.1 〜1μであること等が記載さ
れている。Among them, for example, the second coating layer is 1.7-
It has a refractive index of 1.8 and a thickness of 64-80 nm.
The coating layer has a refractive index of 2, and the glass sheet has a refractive index of 1.5. For example, the second coating layer is a metal oxide, a metal nitride or a mixture thereof, and Al 2 O 3 , SiO 2 , Zn
O, MgO, SnO 2 , In 2 O 3 , GeO 2 , Ga 2 O 3 and Si 3 N 4 is selected from the group, and the thickness of the semiconductor layer, for example, stannic oxide, is less than 0.4 μ, It is described that the total film thickness of the first coating layer and the second coating layer is 0.1 to 1 μm.
【0006】また例えば、特公平3-72586 号公報には、
非光彩性のガラス構造体が記載されており、(a) 透明な
基材、(b)0.1〜1.0 ミクロンの厚さを有する赤外反射性
透明半導体コ−テイング、および(c) 基材と赤外反射性
透明半導体コ−テイングとの間の光彩を抑制する中間層
部材、を含む型の非光彩性の、透明なシ−ト構造体にお
いて、この構造体が、赤外反射性透明半導体コ−テイン
グと透明な基材との間に第1中間層成分および第2中間
層成分の2成分、すなわち(1) 基材に近い、かつ式 d1
=(1/720)cos -1[(r1 2+r2 2-r3 2)/2r1r2]〔式中r1=(n1-n
g )/(n1+n g ), r2=(n1-n2 /(n1+n2), r3=(n c -n2 /(n
c +n2) ng = 基体の屈折率, n1= 第1中間層成分の屈折率,n2=
第2中間層成分の屈折率, nc = 赤外反射性透明半導
体コ−テイングの屈折率) 〕によって与えられる光学的
厚さd1を有する第1中間層成分、および(2) 第1中間層
成分と半導体との間にあつて式d2=(1/720)cos -1[(r2 2+
r3 2-r1 2)/2r2r3] によって与えられる光学的厚さd2を有
する第2中間層成分。〔第1中間層成分の屈折率(n1)は
第2中間層成分の屈折率(n2)よりも高く、n1>n2であ
り、かつd1およびd2は500 ナノメ−タ−設計波長の単位
で与えられている〕から本質的になる中間層を含むもの
が開示されている。[0006] For example, Japanese Patent Publication No. 3-72586 discloses that
A non-glazing glass structure is described, comprising: (a) a transparent substrate, (b) an infrared reflective transparent semiconductor coating having a thickness of 0.1 to 1.0 micron, and (c) a substrate. A non-irractive, transparent sheet structure of the type including an intermediate layer member that suppresses irritation between the infrared-reflective transparent semiconductor coating and the infrared-reflective transparent semiconductor coating. Two components, a first intermediate layer component and a second intermediate layer component, between the coating and the transparent substrate, that is, (1) close to the substrate and of the formula d 1
= (1/720) cos -1 [(r 1 2 + r 2 2 -r 3 2 ) / 2r 1 r 2 ] [where r 1 = (n 1 -n
g ) / (n 1 + n g ), r 2 = (n 1 -n 2 / (n 1 + n 2 ), r 3 = (n c -n 2 / (n
c + n 2 ) n g = Refractive index of substrate, n 1 = Refractive index of first intermediate layer component, n 2 =
The refractive index of the second intermediate layer component, n c = the refractive index of the infrared reflective transparent semiconductor coating)], and the first intermediate layer component having an optical thickness d 1 given by The equation d 2 = (1/720) cos -1 [(r 2 2 +
r 3 2 −r 1 2 ) / 2r 2 r 3 ], the second intermediate layer component having an optical thickness d 2 . [The refractive index (n 1 ) of the first intermediate layer component is higher than the refractive index (n 2 ) of the second intermediate layer component, n 1 > n 2 and d 1 and d 2 are 500 nanometers. Given in units of design wavelength] is disclosed.
【0007】また例えば、特開平3-164449号公報には、
無光彩ガラスが記載されており、ガラス基板上に屈折率
nが1.8 以上で厚みdが0.15μm以上の高屈折率透明薄
膜が形成され、高屈折率透明薄膜とガラス基板との間に
n=1.65〜1.8 の透明下層膜が光学膜厚nd=0.1 〜0.18
μmの厚みに形成されている無光彩ガラスであって、透
明下層膜が、Zr,Ti,Ta,Hf,Mo,W,Nb,Sn,La,Crのうち少な
くとも1種とSiを含む複合酸化物を主成分とする膜であ
ることが開示されている。Further, for example, in Japanese Patent Laid-Open No. 3-164449,
A non-glare glass is described, and a high refractive index transparent thin film having a refractive index n of 1.8 or more and a thickness d of 0.15 μm or more is formed on a glass substrate, and n = n is provided between the high refractive index transparent thin film and the glass substrate. 1.65 ~ 1.8 transparent underlayer film has an optical film thickness nd = 0.1 ~ 0.18
It is an achromatic glass formed to a thickness of μm, and the transparent underlayer film is a composite oxide containing at least one of Zr, Ti, Ta, Hf, Mo, W, Nb, Sn, La and Cr and Si. It is disclosed that the film is mainly composed of a substance.
【0008】そのなかで、無光彩(無色ムラ)ガラスに
おいて、高屈折率透明薄膜としてはインジウムスズ酸化
物、フッ素ド−プ酸化スズ、酸化亜鉛等であることが記
載されている。[0008] Among them, it is described that in the case of non-colored (colorless unevenness) glass, indium tin oxide, fluorine-doped tin oxide, zinc oxide and the like are used as the high refractive index transparent thin film.
【0009】また例えば、特開平4-270136号公報には、
アルミニウム及びスズまたはチタンの酸化物から成るフ
イルムの作製方法、及びその製品が記載されており、非
加水分解性アルミニウムキレ−トと、少なくとも1種の
有機スズ化合物、またはチタンキレ−ト及びチタンアル
コラ−ト、とから成る溶液を、高温のガラス上で熱分解
させることにより、Al2O3-SnO2(例えば屈折率1.66〜1.
76)またはAl2O3-TiO2(例えば屈折率1.73〜1.80)のフ
イルムを得ることが開示され、ガラス支持体と半導体金
属酸化物フイルム(例えば厚さ100 〜800nm )との間に
これらのAl2O3-SnO2またはAl2O3-TiO2のフイルム(例え
ば厚さ80〜100nm )を用いることで反射光が無彩色であ
る半導体フイルムを有する窓ガラスを得られることが記
載されている。Further, for example, in Japanese Patent Laid-Open No. 4-270136,
A method for making a film composed of aluminum and an oxide of tin or titanium, and a product thereof are described, wherein a non-hydrolyzable aluminum chelate and at least one organotin compound, or a titanium chelate and a titanium alcoholate are described. By thermally decomposing a solution consisting of, and on high temperature glass, Al 2 O 3 --SnO 2 (for example, refractive index 1.66 to 1.
76) or Al 2 O 3 —TiO 2 (eg 1.73 to 1.80 refractive index) films are disclosed between the glass support and the semiconducting metal oxide film (eg 100 to 800 nm thick). It is described that a window glass having a semiconductor film whose reflected light is achromatic can be obtained by using a film of Al 2 O 3 -SnO 2 or Al 2 O 3 -TiO 2 (for example, a thickness of 80 to 100 nm). There is.
【0010】また例えば、特開平5-116992号公報には、
光彩防止透明体が記載されており、透明基体上に屈折率
が1.6 以上で膜厚0.15μm以上の透明薄膜が形成され、
透明薄膜と透明基体との界面に下地層が形成された光彩
防止透明体となって、下地層は消衰係数kが0でない吸
収性の膜であること。また透明基体上に屈折率が1.6以
上で膜厚0.15μm以上の透明薄膜が形成され、透明薄膜
上に上地層が形成された光彩防止透明体であって、上地
層は消衰係数kが0でない吸収性の膜であること。また
透明基体上に屈折率が1.6 以上で膜厚0.15μm以上の透
明薄膜が形成され、透明薄膜と透明基体との界面に下地
層が形成され、透明薄膜上に上地層が形成された光彩防
止透明体であって、下地層及び上地層は消衰係数kが0
でない吸収性の膜であることがそれぞれ開示されてい
る。Further, for example, in Japanese Patent Laid-Open No. 5-116992,
An anti-glare transparent body is described, in which a transparent thin film having a refractive index of 1.6 or more and a film thickness of 0.15 μm or more is formed on a transparent substrate,
An underlayer is formed at the interface between the transparent thin film and the transparent substrate to form an antiglare transparent body, and the underlayer is an absorptive film having an extinction coefficient k of not 0. Further, the antiglare transparent body comprises a transparent substrate on which a transparent thin film having a refractive index of 1.6 or more and a film thickness of 0.15 μm or more is formed, and an upper layer is formed on the transparent thin film. The upper layer has an extinction coefficient k of 0. Not an absorbent membrane. In addition, a transparent thin film with a refractive index of 1.6 or more and a film thickness of 0.15 μm or more is formed on the transparent substrate, an underlayer is formed at the interface between the transparent thin film and the transparent substrate, and an upper layer is formed on the transparent thin film. The extinction coefficient k of the transparent layer is 0 for the underlayer and the upper layer.
It is each disclosed to be a non-absorbent membrane.
【0011】そのなかで、例えば透明基体の屈折率ngが
1.4 〜1.6 であり、「透明薄膜」とは消衰係数kが、光
学計算の際kを無視できる程度の小さな値(k≒0)で
ある膜であって、屈折率nfが1.6 〜2.3 であり、具体的
にはITO 、SnO2:F、ZnO:Al、ZnO 等が挙げられる。また
吸収性の下地層または上地層としては、膜厚が10〜500
Åであり、金属単体、窒化物、炭化物、またはこれらの
複合体であって、好ましくはチタン、クロム、ジルコニ
ウムのうち少なくとも一種の金属単体、窒化物、炭化
物、またはこれらの複合体であり、具体的には上下両地
層としてTiN 、CrN 、CrC 、ZrN 、下地層としてTiN/C
r、TiN/Ti/TiN、上地層としてCr/TiN、Cr/ZrN等が挙げ
られている。Among them, for example, the refractive index ng of the transparent substrate is
1.4 to 1.6, and the "transparent thin film" is a film whose extinction coefficient k is a small value (k≈0) such that k can be ignored in optical calculation, and the refractive index nf is 1.6 to 2.3. Specific examples thereof include ITO, SnO 2 : F, ZnO: Al, and ZnO. As the absorbent underlayer or upper layer, the film thickness is 10 to 500.
Å, a metal simple substance, a nitride, a carbide, or a composite thereof, preferably at least one metal simple substance selected from titanium, chromium, and zirconium, a nitride, a carbide, or a composite thereof, and The upper and lower layers are TiN, CrN, CrC, ZrN, and the underlying layer is TiN / C.
r, TiN / Ti / TiN, Cr / TiN, Cr / ZrN, etc. are mentioned as the upper layer.
【0012】また例えば、特開平5-193994号公報には、
虹色防止及び光学的機能性被覆の厚さ及び屈折率の偏差
に対し許容性のある虹色防止被覆を有する虹色防止透明
嵌込み窓ガラス物品。ならびに特開平5-193995号公報に
は、虹色防止層及び光学的機能性層の厚さ及び屈折率の
変動に許容性のある虹色防止層を有する傾斜屈折率を有
する虹色防止被覆透明嵌込み窓ガラス物品がそれぞれ開
示されている。Further, for example, in Japanese Patent Laid-Open No. 5-193994,
An anti-iridescent transparent inlaid glazing article having an anti-iridescent coating that is tolerant to deviations in the thickness and refractive index of the anti-iridescent and optically functional coating. Also, JP-A-5-193995 discloses a transparent iridescent coating having a gradient refractive index, which has an iridescent preventing layer that is tolerant to variations in the thickness and refractive index of the iridescent preventing layer and the optically functional layer. Inlaid glazing articles are each disclosed.
【0013】さらに例えば、特開平7-41337 号公報に
は、光彩防止透明体が記載されており、透明基体上に透
明導電膜を有し、かつ透明基体と透明導電膜の間に下地
膜を有する透明体において、透明導電膜と下地膜との間
に、透明導電膜と下地膜との構成成分からなる混合層が
介在されており、混合層は下地膜と透明導電膜の間で下
地膜に近い方から透明導電膜に近い方へといくにつれて
徐々に屈折率が増加するように形成されていることが開
示されている。Further, for example, Japanese Patent Application Laid-Open No. 7-41337 discloses an anti-glare transparent body, which has a transparent conductive film on a transparent substrate and has a base film between the transparent substrate and the transparent conductive film. In the transparent body, a mixed layer composed of the constituent components of the transparent conductive film and the underlying film is interposed between the transparent conductive film and the underlying film, and the mixed layer is the underlying film between the underlying film and the transparent conductive film. It is disclosed that the refractive index gradually increases from the one closer to the transparent conductive film.
【0014】さらにまた例えば、特開平7-10607 号公報
には、低放射率を与える無色コ−テイングを有するガラ
ス物品及びその製造方法が記載されており、低放射率を
与える無色コ−テイングを有するガラス物品において、
a.約1.5 〜1.6 の範囲の屈折率を有する透明な基体と、
b.約1.66〜1.73の範囲の屈折率及び約400 〜600 Åの範
囲の厚みを有する第1の透明コ−テイング層と、c.約1.
76〜1.83の範囲の屈折率及び約350 〜550 Åの範囲の厚
みを有する第2の透明コ−テイング層と、d.少なくとも
1.86の屈折率及びコ−テイングされていない基体の放射
率以下にコ−テイングされた基体の放射率を低下させる
のに充分な厚みを有する金属酸化物コ−テイング層とか
らなるものが開示されている。Further, for example, Japanese Patent Application Laid-Open No. 7-10607 describes a glass article having a colorless coating giving a low emissivity and a method for producing the same, and a colorless coating giving a low emissivity is disclosed. In a glass article having
a. a transparent substrate having a refractive index in the range of about 1.5 to 1.6,
b. a first transparent coating layer having a refractive index in the range of about 1.66 to 1.73 and a thickness in the range of about 400 to 600Å; c.
A second transparent coating layer having a refractive index in the range of 76 to 1.83 and a thickness in the range of about 350 to 550Å, and d.
Disclosed is a metal oxide coating layer having a refractive index of 1.86 and a thickness sufficient to reduce the emissivity of a coated substrate below the emissivity of an uncoated substrate. ing.
【0015】また他に、少なくとも無光彩をうるため
に、下地層として例えばSiO2等の酸化物膜をコ−テイン
グするものとして、他に特公平3-48145 号公報、特開平
1-201046号公報、特開平5-294672号公報ならびに特開平
4-265253号公報等がある。In addition, in order to obtain at least achromatic color, a coating of an oxide film such as SiO 2 as a base layer is disclosed in Japanese Patent Publication No. 3-48145.
1-201046, JP-A-5-294672 and JP-A-5-294672
There is a 4-265253 publication.
【0016】[0016]
【発明が解決しようとする課題】前述したような、例え
ば特公昭63-39535号公報等に記載の無光彩ガラス構造物
をはじめ、上記した各公報に記載の無光彩機能を有する
ガラスはいずれも下地層に無光彩化するための膜を施し
ているものであり、該下地層に無光彩化するための膜を
施したとしても上層にある導電性膜や赤外反射性膜など
機能性膜の各種強度アップあるいは/ならびに反射低減
等の性能を付与することはできなく、したがって無光彩
とこれら付与機能をうるためには、機能性膜を無光彩用
の下地層膜と付与機能用の上層膜とでサンドイッチする
必要があってコスト的に高騰を招くこととなるものであ
った。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention As described above, for example, the achromatic glass structure described in Japanese Patent Publication No. 63-39535 and the like, and any glass having an achromatic function described in each of the above publications The underlying layer is provided with a film for achromatic rendering, and even if the underlying layer is provided with a film for achromatic rendering, a functional film such as a conductive film or an infrared reflective film in the upper layer. It is not possible to impart various strengths and / or properties such as reflection reduction of the above, and therefore, in order to obtain achromaticity and these imparting functions, a functional film is used as an underlayer film for achromaticity and an upper layer for imparting functions. It was necessary to sandwich with the membrane, which resulted in a cost increase.
【0017】[0017]
【課題を解決するための手段】本発明は、従来のこのよ
うな課題に鑑みてなしたものであり、透明な基板上に透
明導電膜、次いで該透明導電膜の屈折率に係わる特定の
屈折率、ならびに特定波長の光の特定した倍値以下の波
長の厚さを有するオ−バ−コ−ト膜を被覆積層すること
によって、無光彩透明導電膜及び該膜付きガラスとした
ことにより、前記無光彩化膜であるオ−バ−コ−ト膜が
本来の機能を発揮するのみではなく、例えば保護膜的機
能や反射低減機能、帯電防止機能等を持たせることも同
時に可能として、熱線遮断性に優れ、しかも透明な基板
の屈折率に関係せしめることなく、バランスよくその特
性を発揮し、より優れた無光彩透明導電膜及び該膜付き
ガラスをうることができ、単板でかつ各種機能性能を備
えるようなものを含む各種自動車用窓材にも充分使用で
き、最近のニーズに最適なものとなる有用な無光彩透明
導電膜及び該膜付きガラスを提供するものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art. A transparent conductive film is provided on a transparent substrate, and then a specific refractive index relating to the refractive index of the transparent conductive film is provided. Rate, and by covering and laminating an overcoat film having a thickness of a wavelength equal to or less than a specified multiple of light of a specific wavelength, by providing an achromatic transparent conductive film and glass with the film, Not only the overcoat film, which is a non-lighting film, exhibits its original function, but it is also possible to simultaneously provide, for example, a protective film function, a reflection reduction function, an antistatic function, and the like. It has excellent barrier properties, and can exhibit its characteristics in a well-balanced manner without being related to the refractive index of a transparent substrate, and it is possible to obtain a more excellent achromatic transparent conductive film and glass with the film, which is a single plate and various types. Something with functional performance No various also be sufficiently used in automotive window material, and provides a useful non-glow transparent conductive film and the film-coated glass to be optimal for recent needs.
【0018】すなわち、本発明は、透明な基板表面に、
基板面側から第1層として透明導電膜、次いで第2層と
してオ−バ−コ−ト膜を成膜することでなる無光彩透明
導電膜において、オ−バ−コ−ト膜が前記透明導電膜の
屈折率の値の平方根として得られる屈折率を有し、かつ
500nm 以上600nm 以下の波長を有する光の0.15倍以上0.
35倍以下波長の厚さを有することを特徴とする無光彩透
明導電膜。That is, the present invention provides a transparent substrate surface,
In an achromatic transparent conductive film formed by depositing a transparent conductive film as the first layer and then an overcoat film as the second layer from the substrate surface side, the overcoat film is transparent. Has a refractive index obtained as the square root of the value of the refractive index of the conductive film, and
0.15 times or more of light having a wavelength of 500 nm or more and 600 nm or less 0.
An achromatic transparent conductive film having a wavelength thickness of 35 times or less.
【0019】ならびに、前記オ−バ−コ−ト膜が、酸化
物薄膜、ハロゲン化物薄膜、硫化物薄膜もしくはこれら
から選択した2種以上の混合物薄膜であって、膜厚が45
nm以上160nm 以下でかつ屈折率が1.3 以上1.7 以下であ
る透明膜からなることを特徴とする上述した無光彩透明
導電膜。Further, the overcoat film is an oxide thin film, a halide thin film, a sulfide thin film or a mixed thin film of two or more kinds selected from these, and the film thickness is 45.
The achromatic transparent conductive film described above, which is made of a transparent film having a wavelength of not less than 160 nm and not more than 160 nm and a refractive index of not less than 1.3 and not more than 1.7.
【0020】また、前記透明導電膜が、膜厚が80nm以上
800nm 以下でかつ屈折率が1.6 以上2.8 以下であること
を特徴とする上述した無光彩透明導電膜。さらに、前記
透明導電膜が、波長0.38μm〜0.70μmにおける平均可
視光透過率が70%以上であって、波長10μmにおける赤
外反射率が60%以上であることを特徴とする上述した無
光彩透明導電膜。The transparent conductive film has a film thickness of 80 nm or more.
The achromatic transparent conductive film described above, which is 800 nm or less and has a refractive index of 1.6 or more and 2.8 or less. Further, the transparent conductive film has an average visible light transmittance of 70% or more at a wavelength of 0.38 μm to 0.70 μm and an infrared reflectance of 60% or more at a wavelength of 10 μm. Transparent conductive film.
【0021】さらにまた、前記無光彩透明導電膜をガラ
ス基板表面に成膜したことを特徴とする無光彩透明導電
膜付きガラス板をそれぞれ提供するものである。Furthermore, the present invention provides a glass plate with an achromatic transparent conductive film, characterized in that the achromatic transparent conductive film is formed on the surface of a glass substrate.
【0022】[0022]
【発明の実施の態様】前記したように、透明な基板表面
に、基板面側から第1層として透明導電膜、次いで第2
層としてオ−バ−コ−ト膜を成膜することでなる無光彩
透明導電膜において、オ−バ−コ−ト膜が前記透明導電
膜の屈折率の値の平方根として得られる屈折率を有し、
かつ500nm 以上600nm 以下の波長を有する光の0.15倍以
上0.35倍以下波長の厚さを有する無光彩透明導電膜は、
下記のようにして得る。BEST MODE FOR CARRYING OUT THE INVENTION As described above, a transparent conductive film is formed on the transparent substrate surface from the substrate surface side as the first layer, and then the second conductive film.
In an achromatic transparent conductive film formed by forming an overcoat film as a layer, the overcoat film has a refractive index obtained as a square root of the value of the refractive index of the transparent conductive film. Have,
And an achromatic transparent conductive film having a thickness of 0.15 times or more and 0.35 times or less of light having a wavelength of 500 nm or more and 600 nm or less,
Obtain as follows.
【0023】先ず、前記透明な基板としては、ソ−ダラ
イム系ガラス、ホウケイ酸系ガラス、無アルカリ系ガラ
ス、石英等無機質の透明な基板であり、特に所謂フロー
ト法で製造された透明な無色または着色の板ガラス、例
えばグリーン系ガラスやブロンズ系ガラス、グレー系ガ
ラス、ブルー系ガラス等、あるいは各種透明導電膜、例
えば熱線遮蔽膜、Low-E 膜などを被膜したガラス等であ
る。First, the transparent substrate is an inorganic transparent substrate such as soda lime type glass, borosilicate type glass, non-alkali type glass, and quartz. Particularly, a transparent colorless or transparent substrate manufactured by the so-called float method. Colored plate glass, for example, green glass, bronze glass, gray glass, blue glass, or various transparent conductive films, such as glass coated with a heat ray shielding film or a Low-E film, is used.
【0024】次いで、第1層である透明導電膜として
は、例えばITO (In2O3+SnO2ド−プ)膜、NESA(SnO2、
SnO2+Sb2O5、SnO2+F2 )膜、各種フッ素化合物膜、AZO
(亜鉛にAl2O3 ド−プ)膜、その他ZnInO4-x膜、MgInO
4-x膜、MgGaO4-x膜、SbInO4-x膜、ZrGa2O4 膜、Cd2SnO4
膜、CdGa2O4 膜、CdSb2O4 膜、Zn4InSbO8 系膜、SbZn2
O 4 系膜、Sb2Zn7O12 系膜、ZnSb2O6 系膜、ZnO-Ga系
膜、MgIn2O4 膜、ZnO-In2O3F系膜等が挙げられ、前記熱
線遮蔽膜やLow-E 膜などの機能性を発現するような膜等
を含むいずれかの透明導電膜である。Next, as a transparent conductive film which is the first layer
For example, ITO (InTwoOThree+ SnOTwoDope film, NESA (SnOTwo,
SnOTwo+ SbTwoOFive, SnOTwo+ FTwo) Membrane, various fluorine compound membranes, AZO
(Zinc to AlTwoOThreeDope) film, other ZnInO4-xMembrane, MgInO
4-xMembrane, MgGaO4-xMembrane, SbInO4-xMembrane, ZrGaTwoOFourMembrane, CdTwoSnOFour
Membrane, CdGaTwoOFour Membrane, CdSbTwoOFourMembrane, ZnFourInSbO8System film, SbZnTwo
O FourSystem film, SbTwoZn7O12System film, ZnSbTwoO6System film, ZnO-Ga system
Membrane, MgInTwoOFourMembrane, ZnO-InTwoOThreeExamples include F-based membranes and the like.
Films that exhibit functionality such as line-shielding films and Low-E films
Which is any of the transparent conductive films.
【0025】なかでも例えば、該透明導電膜の膜厚が約
80nm以上800nm 程度以下で、かつ該透明導電膜の屈折率
が1.6 以上2.8 以下であることが好ましく、しかもさら
に波長約0.38μm〜0.70μm程度の間における平均可視
光透過率が約70%程度以上であって、波長が約10μmに
おける平均赤外反射率が約60%以上、さらには約70%程
度以上であることがより好ましく、さらに加えて例えば
シ−ト抵抗値が1×10 4 Ω/口〜1×105 Ω/口程度の
透明導電膜が透明導電膜として最適であり、該膜でその
機能を活かしつつ最も無光彩化の作用効果を発揮するこ
ととなるものである。Above all, for example, the film thickness of the transparent conductive film is about
80 nm or more and 800 nm or less, and the refractive index of the transparent conductive film
Is preferably 1.6 or more and 2.8 or less, and more
Average visible in the wavelength range of 0.38μm to 0.70μm
The light transmittance is about 70% or more, and the wavelength is about 10 μm.
Average infrared reflectance of about 60% or more, and about 70%
It is more preferable that the degree is not less than,
Sheet resistance is 1 x 10 FourΩ / mouth ~ 1 x 10FiveΩ / mouth
The transparent conductive film is most suitable as the transparent conductive film, and
The most achromatic effect can be achieved while utilizing the functions.
It will be
【0026】続いて、第2層であるオ−バ−コ−ト膜と
しては、前記透明導電膜の屈折率の値の平方根として得
られる屈折率を有し、かつ500nm 以上600nm 以下の波長
を有する光の0.15倍以上0.35倍以下波長の厚さを有する
ものである。Subsequently, the overcoat film as the second layer has a refractive index obtained as a square root of the value of the refractive index of the transparent conductive film and has a wavelength of 500 nm or more and 600 nm or less. It has a wavelength thickness of 0.15 times or more and 0.35 times or less.
【0027】すなわち、前記オ−バ−コ−ト膜として
は、x=√n ;xはオ−バ−コ−ト膜の屈折率、n は透
明導電膜の屈折率(例えば、n=1.6 〜2.8 )、オ−バ−
コ−ト膜の膜厚=〔(2n-1)λ×(0.15 〜0.35) 〕/xで
あって好ましくは膜厚=〔(2n-1)λ×0.25 〕/xであ
り、λは設計波長(500nm 〜 600nm)であって好ましく
は550 nm程度であり、n:1、2、3・・・(小さいほ
ど望ましい)である。That is, as the overcoat film, x = √n; x is the refractive index of the overcoat film, and n is the refractive index of the transparent conductive film (for example, n = 1.6). ~ 2.8), over
The film thickness of the coat film = [(2n-1) λ × (0.15 to 0.35)] / x, preferably the film thickness = [(2n-1) λ × 0.25] / x, where λ is the design The wavelength (500 nm to 600 nm) is preferably about 550 nm, and n: 1, 2, 3, ... (The smaller the value, the more preferable).
【0028】図2に示すように、本発明の無光彩透明導
電膜付きガラス1は、基板であるガラス2の上に、透明
導電膜3を形成し、次いで該透明導電膜3の表面に、光
学膜であるオ−バ−コ−ト膜4として基板ガラスおよび
透明導電膜より屈折率が低い薄膜を被覆積層し、入射光
Yに対し、透明導電膜3とオ−バ−コ−ト膜4の界面か
らの反射光b(透明導電膜表面での反射光)、オ−バ−
コ−ト膜4と空気の界面での表面反射光a(オ−バ−コ
−ト膜表面での反射光)を各々位相をずらして反射光同
志を打ち消すようにした2層膜構成でなるものを示し、
本発明の無光彩透明導電膜付きガラス1における無光彩
を発現する現象を単純化して説明することができる。す
なわち、反射光aとbの位相のずれ(bは光路長が長い
分波長がずれる)により反射光aとbの光が打ち消しあ
って無光彩となる。As shown in FIG. 2, the glass 1 with an achromatic transparent conductive film of the present invention has a transparent conductive film 3 formed on a glass 2 which is a substrate, and then on the surface of the transparent conductive film 3. As the overcoat film 4 which is an optical film, a substrate glass and a thin film having a refractive index lower than that of the transparent conductive film are laminated by coating, and the transparent conductive film 3 and the overcoat film with respect to the incident light Y are laminated. 4 reflected light b (reflected light on the transparent conductive film surface) from the interface,
The surface reflection light a at the interface between the coat film 4 and air (reflected light at the surface of the overcoat film) is shifted in phase to cancel out the reflected light. Show things,
It is possible to simplify and explain the phenomenon of expressing achromaticity in the glass 1 with an achromatic transparent conductive film of the present invention. That is, due to the phase shift of the reflected lights a and b (the wavelength of b is shifted due to the longer optical path length), the lights of the reflected lights a and b cancel each other out to become achromatic.
【0029】具体的なオ−バ−コ−ト膜としては、酸化
物薄膜、ハロゲン化物薄膜、硫化物薄膜もしくはこれら
から選択した2種以上の混合物薄膜等が挙げられ、膜厚
が45nm以上160nm 以下でかつ屈折率が1.3 以上1.7 以下
である透明膜からなる膜である。オ−バ−コ−ト膜が45
nm未満では、オ−バ−コ−ト面上での反射光と下面(透
明導電膜上面)での反射光の位相のずれが小さく、干渉
により打ち消し合うことができず(反射光aとbの光路
長に差がなく位相のずれが小さく打ち消せない)無光彩
化が不可能であり、また160nm を超えると、干渉により
打ち消し合う波長の幅が狭く(反射光が平らになる部分
が狭く両側が立ち上がる)、可視光波長内で大きな振動
が起こり無光彩化にならない。Specific overcoat films include an oxide thin film, a halide thin film, a sulfide thin film, or a thin film of a mixture of two or more selected from these, and the like, and the film thickness is 45 nm or more and 160 nm or more. It is a film made of a transparent film having a refractive index of 1.3 or more and 1.7 or less. Overcoat film is 45
When the thickness is less than nm, the phase difference between the reflected light on the overcoat surface and the reflected light on the lower surface (the upper surface of the transparent conductive film) is small and it is impossible to cancel each other due to interference (reflected light a and b Since there is no difference in the optical path length and the phase shift is small and it cannot be canceled, it is impossible to achromatize, and when it exceeds 160 nm, the width of the wavelengths that cancel each other due to interference is narrow (the part where the reflected light becomes flat is narrow). Both sides stand up), large vibration occurs in the visible light wavelength and it does not become achromatic.
【0030】さらに、屈折率が1.3 未満では、安定な物
理的強度の高い実用的な耐久性のある膜が存在しない
(例えば、MgF2膜:n=1.39程度)し、無光彩化膜上面の
反射光強度が下面の反射光強度に比べて弱く、打ち消し
合いきれないため無光彩化ができない(反射光a<b
で、bが残ることとなる)。また屈折率が1.7 を超える
と、無光彩化膜上面の反射光強度が下面の反射光強度に
比べて強くなりすぎ、打ち消し合いきれず無光彩化がで
きないこととなる(反射光a>>b)。Further, when the refractive index is less than 1.3, there is no practically durable film having high stable physical strength (for example, MgF 2 film: n = 1.39), and the non-irradiated film has an upper surface. The intensity of the reflected light is weaker than the intensity of the reflected light on the lower surface, and it is impossible to cancel each other out.
Then, b will remain). When the refractive index exceeds 1.7, the intensity of the reflected light on the upper surface of the achromatic film becomes too strong as compared with the intensity of the reflected light on the lower surface, and it is impossible to cancel each other out (achromatic light a >> b). ).
【0031】また単板で使用できることはもとより、各
種の複層ガラスあるいは合せガラス、シェ−ドバンド付
きガラス、バイレイヤ−ガラス、強化ガラス等、さらに
平板あるいは曲げ板等はもちろん、無光彩透明導電膜付
きガラス板として既存の各種板ガラス製品として使用で
きることは言うまでもない。また板厚としては例えば約
0.5mm 程度以上約10mm程度以下が好ましく、より好まし
くは約2.0mm 程度以上約5.0mm 程度以下の無色または着
色ガラスである。Not only can it be used as a single plate, but it can also be used with various types of laminated glass or laminated glass, glass with a shade band, bilayer glass, tempered glass, etc. It goes without saying that it can be used as various existing flat glass products as a glass plate. The plate thickness is, for example, about
It is preferably about 0.5 mm or more and about 10 mm or less, and more preferably about 2.0 mm or more and about 5.0 mm or less, a colorless or colored glass.
【0032】前述したとおり、本発明の無光彩透明導電
膜及び該膜付きガラスは、透明な基板上に透明導電膜、
次いで該透明導電膜の屈折率に係わる特定の屈折率、な
らびに特定波長の光の特定した倍値以下の波長の厚さを
有するオ−バ−コ−ト膜を被覆積層することによって、
無光彩透明導電膜及び該膜付きガラスとしたことによ
り、前記無光彩化膜であるオ−バ−コ−ト膜が本来の機
能を発揮するのみではなく、例えば保護膜的機能や反射
低減機能等を持たせることも同時に可能として、熱線遮
断性に優れ、しかも透明な基板の屈折率に関係せしめる
ことなく、バランスよくその特性を発揮し、より優れた
無光彩透明導電膜及び該膜付きガラスをうることがで
き、単板でかつ各種機能性能を備えるようなものを含む
各種自動車用窓材にも充分使用でき、さらに単板でも2
層構成において高耐摩耗性、高耐久性を保持し、可視光
透過率、可視光反射率、日射透過率ならびに反射の刺激
純度とをバランスよく顕著にする作用を与えるものであ
る。As described above, the achromatic transparent conductive film of the present invention and the glass with the film are obtained by forming a transparent conductive film on a transparent substrate,
Then, by coating and laminating an overcoat film having a specific refractive index relating to the refractive index of the transparent conductive film, and a thickness of a wavelength not more than a specified multiple of light of a specific wavelength,
By using the non-glare transparent conductive film and the glass with the film, the overcoat film which is the non-glazing film not only exhibits its original function but also has, for example, a protective film function or a reflection reducing function. It is also possible to have such properties as at the same time, and it has excellent heat ray-shielding properties, and exhibits its properties in a well-balanced manner without being related to the refractive index of the transparent substrate, and a more excellent achromatic transparent conductive film and glass with the film. Can be obtained, and can be sufficiently used for various automobile window materials including those that are single-paneled and have various functional performances.
The layer structure has high abrasion resistance and high durability, and has an effect of making visible light transmittance, visible light reflectance, solar radiation transmittance, and stimulation stimulus of reflection in a well-balanced manner.
【0033】しかも日射透過率を向上し、可視光反射率
等光学特性も適宜バランスし得ることができて、優れた
熱線遮蔽性能を有することとなり、熱暑感を緩和し冷暖
房の効果を高め居住性を向上し、例えば車輌内外での快
適な環境を確保することができ、単板で使用可能な優れ
た最近のニーズに最適なものとなる有用な無光彩透明導
電膜及び該膜付きガラスを提供するものである。Moreover, the solar radiation transmittance can be improved and the optical characteristics such as the visible light reflectance can be appropriately balanced, and the excellent heat ray shielding performance can be obtained, which reduces the feeling of heat and heat and enhances the effect of cooling and heating. And a useful achromatic transparent conductive film and a glass with the film which can be used as a single plate and can be secured in a comfortable environment inside and outside the vehicle, and which is optimal for the recent needs. It is provided.
【0034】[0034]
【実施例】以下、実施例により本発明を具体的に説明す
る。ただし本発明は係る実施例に限定されるものではな
い。The present invention will be described below in detail with reference to examples. However, the present invention is not limited to such an embodiment.
【0035】実施例1 大きさ約300mmx300mm 、厚さ約3mmのフロ−トガラス板
(FL5)を中性洗剤、水すすぎ、イソプロピルアルコー
ルで順次洗浄し、乾燥して、膜付け用のガラス板とし
た。 Example 1 A float glass plate (FL5) having a size of about 300 mm × 300 mm and a thickness of about 3 mm was sequentially washed with a neutral detergent, water rinse, isopropyl alcohol, and dried to obtain a glass plate for film formation. .
【0036】先ず、モノブチルトリクロロスズ〔(C4H9)
SnCl3〕約 100gおよびふっ化水素アンモニウム3g
を、ジクロロメタン 550gとエタノ−ル約 300gと純水
約50gとの混合溶媒で溶解し、さらに約1000gにした液
をフッ素ド−プした酸化錫膜(以下、NESA膜という。)
用の塗布液Aとした。First, monobutyltrichlorotin [(C 4 H 9 )]
SnCl 3 ] about 100 g and ammonium hydrogen fluoride 3 g
Was dissolved in a mixed solvent of 550 g of dichloromethane, about 300 g of ethanol, and about 50 g of pure water, and the solution made up to about 1000 g was fluorine-doped tin oxide film (hereinafter referred to as NESA film).
Was used as a coating liquid A.
【0037】続いて、該NESA膜用の塗布液Aを、予め約
550℃程度に加熱しておいた前記フロ−トガラス板に、
二流体式スプレ−ガンによって、塗布量約250 g/分で
約10秒間程度スプレ−し、膜厚が約 280nmでかつ屈折率
が約2.0 のフッ素ド−プした酸化錫膜を得た。Subsequently, the coating solution A for the NESA film is pre-approx.
On the float glass plate that has been heated to about 550 ° C,
A two-fluid spray gun was used to spray at a coating amount of about 250 g / min for about 10 seconds to obtain a fluorine-doped tin oxide film having a film thickness of about 280 nm and a refractive index of about 2.0.
【0038】次に、モノメチルトリエトキシシラン〔 C
H3Si(OC2H5)3〕約 120gにエタノ−ル約 880gを加え計
約1000gにした液をオ−バ−コ−ト用(無光彩化用)の
塗布液Bとした。Next, monomethyltriethoxysilane [C
About 120 g of H 3 Si (OC 2 H 5 ) 3 ] and about 880 g of ethanol were added to make a total of about 1000 g, which was designated as coating liquid B for overcoat (for non-lighting).
【0039】次いで、前記フッ素ド−プした酸化錫膜付
きガラス板の該フッ素ド−プした酸化錫膜上に、前記し
たと同様の方法でオ−バ−コ−ト用の塗布液Bを約7秒
間程度スプレ−をし、膜厚が約98nmでかつ屈折率が約1.
41のSiO2膜をオ−バ−コ−ト膜として得た。Then, the coating solution B for the overcoat is applied onto the fluorine-doped tin oxide film of the glass plate with the fluorine-doped tin oxide film by the same method as described above. After spraying for about 7 seconds, the film thickness is about 98 nm and the refractive index is about 1.
The SiO 2 film of 41 was obtained as an overcoat film.
【0040】得られたフッ素ド−プした酸化錫膜とSiO2
膜の2層でなる透明導電膜付きガラスについて、下記の
測定をして評価した。 (測定および評価法) 光学特性: 可視光透過率(380nm〜780nm)、可視光反射率(380nm〜780nm) ならびに日射透過率(340nm〜1800nm) 、放射率ε等について は340 型自記分光光度計(日立製作所製)とJISZ8722、JISR 3106によってそれぞれの光学的特性を求めた。The obtained fluorine-doped tin oxide film and SiO 2
The glass with a transparent conductive film having two layers of films was evaluated by the following measurements. (Measurement and evaluation method) Optical characteristics: Visible light transmittance (380 nm to 780 nm), visible light reflectance (380 nm to 780 nm), solar radiation transmittance (340 nm to 1800 nm), emissivity ε, etc. (Hitachi Ltd.) and JIS Z8722, JIS R 3106 were used to determine the respective optical characteristics.
【0041】 なお、放射率εとしては約0.3 程度以下を合格とした。 機械的特性: (トラバース試験) (耐摩耗性) ブロード布#40、荷重100g/cm2 、ストローク:100mm、回数 5000回後のヘ−ズ(曇り具合)値の変化量(△H%)。An emissivity ε of about 0.3 or less was regarded as acceptable. Mechanical properties: (Traverse test) (Abrasion resistance) Broad cloth # 40, load 100g / cm 2 , stroke: 100mm, change amount of haze (fog condition) value after 5000 times (HH%).
【0042】 *いずれも△H%が4%以下を合格とした。 化学的特性: (耐酸性) (耐薬品性) 常温で0.1 規定のH2SO4 溶液中に試験片を約24時間浸漬した 後、外観を目視判定。* In all cases, the ΔH% was 4% or less, and the result was passed. Chemical characteristics: (Acid resistance) (Chemical resistance) After immersing the test piece in 0.1N H 2 SO 4 solution at room temperature for about 24 hours, the appearance is visually judged.
【0043】 (耐アルカリ性) 常温で0.1 規定のNaOH溶液中に試験片を約24時間浸漬した後 、外観を目視判定。(Alkali resistance) After the test piece was immersed in a 0.1N NaOH solution at room temperature for about 24 hours, the appearance was visually judged.
【0044】 *いずれも外観を目視し変化が見られないものを合格とした 。 電気的特性: 三菱油化製表面抵抗計(ロレスタ-AP )によって測定。* In both cases, the appearance was visually inspected and no change was observed, and the result was regarded as acceptable. Electrical characteristics: Measured by Mitsubishi Yuka's surface resistance meter (Loresta-AP).
【0045】 (表面抵抗値) (Ω/口)。 なお、各薄膜の膜厚については、それぞれの薄膜につい
て被膜時に、被膜しない部分を作り、その段差を表面粗
さ計(SLOAN 社製、DEKTAK30-30)で測定した。(Surface resistance value) (Ω / mouth). Regarding the film thickness of each thin film, an uncoated portion was formed at the time of coating each thin film, and the step difference was measured with a surface roughness meter (DEKTAK30-30, manufactured by SLOAN).
【0046】その結果、放射率εについては0.25、可視
光の透過率については70%以上、可視光の反射率につい
ては 7.0%、日射の透過率については65%前後以下、刺
激純度については 3.2%であった。As a result, the emissivity ε was 0.25, the visible light transmittance was 70% or more, the visible light reflectance was 7.0%, the solar radiation transmittance was about 65% or less, and the stimulation purity was 3.2%. %Met.
【0047】特に波長380 〜780 (nm)の間における反射
率(%)の状態を示す図1に示すように無光彩となっ
て、しかも充分優れた熱線遮蔽性等の光学特性、充分安
定な耐酸性、耐冷熱性ならびに優れた耐摩耗性を示し、
各物性をバランスよく示し、優れた居住性をもちかつ運
転者や搭乗者あるいは環境に優しく安全性も保持され、
自動車用窓ガラスに対しても充分採用できる、本発明が
めざす所期の無光彩透明導電膜付きガラスであった。In particular, as shown in FIG. 1, which shows the state of reflectance (%) in the wavelength range of 380 to 780 (nm), it becomes achromatic and has sufficiently excellent optical characteristics such as heat ray shielding property and sufficiently stable. Shows acid resistance, cold heat resistance and excellent wear resistance,
It shows each physical property in a well-balanced manner, has excellent habitability, is friendly to the driver, passengers, and the environment, and maintains safety.
It was the intended glass with an achromatic transparent conductive film, which was intended by the present invention and can be sufficiently applied to automobile window glasses.
【0048】なお、耐アルカリ性、耐候性(例、サンシ
ヤインウエザーメーターで約1000時間:外観上異常がな
いこと)、耐湿性(例、約30℃、約95%RHで約15日間:
外観上異常がないこと)、その他種々の特性をも評価し
たところ、いずれも合格するものであった。It should be noted that alkali resistance, weather resistance (eg, about 1000 hours with a Sunshine weather meter: no abnormality in appearance), humidity resistance (eg, about 30 ° C., about 95% RH for about 15 days:
When there were no abnormalities in appearance) and other various characteristics were evaluated, all passed.
【0049】なお、フロ−トガラス(約3mm厚)につい
ては、放射率εが0.90、可視光反射率が 8.2%、刺激純
度が 1.7%程度であり、その可視光の反射率は図1に示
すようになる。Regarding the float glass (thickness of about 3 mm), the emissivity ε was 0.90, the visible light reflectance was 8.2%, and the stimulus purity was about 1.7%. The visible light reflectance is shown in FIG. Like
【0050】比較例1 実施例1の酸化錫膜用の塗布液Aを用い、実施例1と同
様の方法で成膜し、フッ素ド−プ酸化錫膜のみの単層膜
とした。 Comparative Example 1 Using the coating solution A for tin oxide film of Example 1, a film was formed in the same manner as in Example 1 to obtain a single layer film of only fluorine-doped tin oxide film.
【0051】得られたフッ素ド−プ酸化錫膜のみの単層
膜付きガラスについて、その評価を実施例1で示した測
定法によって同様の評価手段で行った。その結果、放射
率εについては0.23、可視光反射率については13.4%、
刺激純度については27.1%であった。The obtained glass with a single layer film containing only a fluorine-doped tin oxide film was evaluated by the same evaluation means as the measuring method shown in Example 1. As a result, the emissivity ε is 0.23, the visible light reflectance is 13.4%,
The stimulation purity was 27.1%.
【0052】また、その可視光の反射率(%)は図1に
示すようになり、到底本発明がめざす所期の無光彩透明
導電膜付きガラスではなかった。比較例2 先ず、チタンテトライソポキシド〔Ti(OC2H5)4〕255 g
およびテトラエトキシシラン〔Si(OC2H5)4〕45gをエタ
ノ−ル 700gに溶解し、これを下地層用の塗布液Cとし
た。Further, the reflectance (%) of visible light was as shown in FIG. 1, which was far from the desired glass with a non-transparent transparent conductive film aimed at by the present invention. Comparative Example 2 First, titanium tetraisopoxide [Ti (OC 2 H 5 ) 4 ] 255 g
45 g of tetraethoxysilane [Si (OC 2 H 5 ) 4 ] was dissolved in 700 g of ethanol, and this was used as a coating liquid C for the underlayer.
【0053】続いて、予め約200 ℃に加熱しておいた前
記フロ−トガラス板に、該下地層用の塗布液Cを二流体
式スプレ−ガンによって、塗布量約250 g/分で約2秒
間程度スプレ−し、その後、約500 ℃で約30分間焼成す
ることにより、膜厚約80nm、屈折率約1.74のTiO2-SiO2
膜を得た。Subsequently, the coating liquid C for the underlayer was applied to the above-mentioned float glass plate which had been heated to about 200 ° C. in advance by a two-fluid spray gun at an application amount of about 250 g / min. After spraying for about 2 seconds, and then baking at about 500 ℃ for about 30 minutes, TiO 2 -SiO 2 with a film thickness of about 80 nm and a refractive index of about 1.74.
A film was obtained.
【0054】次に、該TiO2-SiO2 膜の表面上に、実施例
1のフッ素ド−プ酸化錫膜用の塗布液Aを用い、実施例
1と同様の方法で成膜し、実施例1と同様の膜厚と屈折
率でなるフッ素ド−プ酸化錫膜を被覆積層した。Then, the coating solution A for the fluorine-doped tin oxide film of Example 1 was used to form a film on the surface of the TiO 2 —SiO 2 film in the same manner as in Example 1, and the film was formed. A fluorine-doped tin oxide film having the same film thickness and refractive index as in Example 1 was coated and laminated.
【0055】得られたTiO2-SiO2 膜とフッ素ド−プ酸化
錫膜の2層膜付きガラスについて、その評価を実施例1
で示した測定法によって同様の評価手段で行った。その
結果、放射率εについては0.23、可視光反射率について
は14.2%、刺激純度については 7.6%であった。The obtained glass with a two-layer film of TiO 2 —SiO 2 film and fluorine-doped tin oxide film was evaluated in Example 1.
The same evaluation method was performed by the measuring method shown in. As a result, the emissivity ε was 0.23, the visible light reflectance was 14.2%, and the stimulus purity was 7.6%.
【0056】また、その可視光の反射率(%)は図1に
示すようになり、到底本発明がめざす所期の無光彩透明
導電膜付きガラスではなかった。比較例3 先ず、実施例1のフッ素ド−プ酸化錫膜用の塗布液Aを
用い、実施例1と同様の方法で成膜し、実施例1と同様
の膜厚と屈折率でなるフッ素ド−プ酸化錫膜を第1層と
して得た。The reflectance (%) of the visible light was as shown in FIG. 1, which was not the desired glass with a non-transparent transparent conductive film aimed at by the present invention. Comparative Example 3 First, using the coating solution A for fluorine-doped tin oxide film of Example 1, a film was formed in the same manner as in Example 1, and fluorine having the same film thickness and refractive index as in Example 1 was formed. A doped tin oxide film was obtained as the first layer.
【0057】次に、チタンテトラプロポキシド〔Ti(i-O
C3H7)4〕270 gおよびテトラエトキシシラン〔Si(OC
2H5)4〕30gをエタノ−ル 700gに溶解し、これを上層
用の塗布液Dとした。Next, titanium tetrapropoxide [Ti (iO
C 3 H 7) 4] 270 g and tetraethoxysilane [Si (OC
30 g of 2 H 5 ) 4 ] was dissolved in 700 g of ethanol, and this was used as coating liquid D for the upper layer.
【0058】続いて、予め約200 ℃に加熱した前記該フ
ッ素ド−プ酸化錫膜付きフロ−トガラス板のフッ素ド−
プ酸化錫膜の表面上に、前記上層用の塗布液Dを二流体
式スプレ−ガンによって、塗布量約250 g/分で約2秒
間程度スプレ−し、その後、約500 ℃で約30分間焼成す
ることにより、膜厚約76nm、屈折率約1.8 のTiO2-SiO 2
膜を被覆積層した。Subsequently, the foil previously heated to about 200 ° C.
Fluorine doping of float glass plate with fluorine doped tin oxide film
On the surface of the tin oxide film, two fluids of the coating liquid D for the upper layer are formed.
With a spray gun, the coating amount is about 250 g / min for about 2 seconds.
Spray for about 30 minutes and then bake at about 500 ° C for about 30 minutes.
As a result, TiO with a film thickness of about 76 nm and a refractive index of about 1.8Two-SiO Two
The membrane was overlaid.
【0059】得られたフッ素ド−プ酸化錫膜とTiO2-SiO
2 膜の2層膜付きガラスについて、その評価を実施例1
で示した測定法によって同様の評価手段で行った。その
結果、放射率εについては0.23、可視光反射率について
は13.6%、刺激純度については25.4%であった。The obtained fluorine-doped tin oxide film and TiO 2 -SiO
For a two-layer film-coated glass of 2 film, carrying out the Evaluation Example 1
The same evaluation method was performed by the measuring method shown in. As a result, the emissivity ε was 0.23, the visible light reflectance was 13.6%, and the stimulus purity was 25.4%.
【0060】また、その可視光の反射率(%)は図1に
示すようになり、到底本発明がめざす所期の無光彩透明
導電膜付きガラスではなかった。比較例4 前記実施例1と同様の塗布液AおよびBを用い、塗布液
Bのみ約20秒間ともっと長くスプレ−し変えて行った以
外は前記実施例1と同様の方法で成膜し、オ−バ−コ−
ト膜として膜厚約320nm 、屈折率1.41のSiO2膜を得た。Further, the visible light reflectance (%) was as shown in FIG. 1, which was not the desired glass with a non-transparent transparent conductive film aimed at by the present invention. Comparative Example 4 A film was formed in the same manner as in Example 1 except that the same coating liquids A and B as in Example 1 were used and only the coating liquid B was sprayed for a longer period of about 20 seconds. Over-co
A SiO 2 film having a film thickness of about 320 nm and a refractive index of 1.41 was obtained as a coating film.
【0061】得られたフッ素ド−プ酸化錫膜とSiO2膜の
2層膜付きガラスについて、その評価を実施例1で示し
た測定法によって同様の評価手段で行った。その結果、
放射率εについては0.30、可視光反射率については 4.6
%、刺激純度については74.7%であった。The glass having a two-layer film formed of the fluorine-doped tin oxide film and the SiO 2 film was evaluated by the same evaluation means as the measuring method shown in Example 1. as a result,
Emissivity ε is 0.30 and visible light reflectance is 4.6.
%, And the stimulation purity was 74.7%.
【0062】また、その可視光の反射率(%)は図1に
示すようになり、到底本発明がめざす所期の無光彩透明
導電膜付きガラスではなかった。Further, the visible light reflectance (%) was as shown in FIG. 1, which was not the desired glass with an achromatic transparent conductive film that the present invention aimed at.
【0063】[0063]
【発明の効果】以上前述したように、本発明によれば、
透明導電膜の屈折率値の平方根として得られる屈折率を
有し、かつ500nm 以上600nm 以下の波長を有する光の0.
15倍以上0.35倍以下の波長の厚さを有するものに特定し
たオ−バ−コ−ト膜を用いた2層積層膜と、該膜を成膜
したガラスとしたことにより、無光彩である導電性、熱
線遮断性、反射低減性、帯電防止性等の機能性を発揮
し、耐摩耗性、耐食性ならびに耐久性に優れ保護性を高
め、かつバランスよく優れる光学特性を有し、合わせガ
ラスあるいは複層ガラス等はもちろん単板ガラスとして
使用し得る、建築用窓ガラスはもちろん、特に自動車用
窓ガラスとして有用な無光彩透明導電膜及び該膜付きガ
ラスを効率よく提供するものである。As described above, according to the present invention,
The light having a refractive index obtained as the square root of the refractive index value of the transparent conductive film and having a wavelength of 500 nm or more and 600 nm or less.
A two-layer laminated film using an overcoat film specified to have a thickness of 15 times or more and 0.35 times or less, and a glass on which the film is formed are achromatic. It exhibits functionality such as conductivity, heat ray blocking property, reflection reduction property and antistatic property, has excellent abrasion resistance, corrosion resistance and durability, enhances protection, and has well balanced optical properties. The present invention efficiently provides an achromatic transparent conductive film and a glass with the film, which can be used not only as a double glazing or the like but also as a single plate glass and is particularly useful as a window glass for an automobile as well as a window glass for an automobile.
【図1】本発明の無光彩透明導電膜付きガラスに係わる
実施例1、および非無光彩膜付きガラスに係わる比較例
1〜4、およびフロ−トガラスについて、波長380 〜78
0 (nm)の間における反射率(%)の状態を示す説明図で
ある。FIG. 1 shows wavelengths of 380 to 78 for Example 1 relating to the glass with a non-glare transparent conductive film of the present invention, Comparative Examples 1 to 4 relating to glass with a non-glare transparent conductive film, and Float glass.
It is explanatory drawing which shows the state of reflectance (%) between 0 (nm).
【図2】本発明の無光彩透明導電膜付きガラスにおい
て、入射光Yと反射光a(オ−バ−コ−ト膜表面での反
射光)および反射光b(透明導電膜表面での反射光)で
もって、無光彩が発現する現象を説明する説明図であ
る。FIG. 2 shows incident light Y, reflected light a (reflected light on the surface of the overcoat film) and reflected light b (reflection on the surface of the transparent conductive film) in the glass with an achromatic transparent conductive film of the present invention. It is explanatory drawing explaining the phenomenon which achromaticity develops by (light).
【符号の説明】1 無光彩透明導電膜付きガラス 2 ガラス 3 透明導電膜 4 オ−バ−コ−ト膜[Explanation of reference numerals] 1 glass with a non-transparent transparent conductive film 2 glass 3 transparent conductive film 4 overcoat film
フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01B 1/00 9459−5L H01B 1/00 Z 5/14 5/14 A Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display location H01B 1/00 9459-5L H01B 1/00 Z 5/14 5/14 A
Claims (5)
として透明導電膜、次いで第2層としてオ−バ−コ−ト
膜を成膜することでなる無光彩透明導電膜において、オ
−バ−コ−ト膜が前記透明導電膜の屈折率の値の平方根
として得られる屈折率を有し、かつ500nm 以上600nm 以
下の波長を有する光の0.15倍以上0.35倍以下波長の厚さ
を有することを特徴とする無光彩透明導電膜。1. An achromatic transparent conductive film formed by depositing a transparent conductive film as a first layer and then an overcoat film as a second layer on the transparent substrate surface from the substrate surface side, The overcoat film has a refractive index obtained as a square root of the value of the refractive index of the transparent conductive film, and has a thickness of 0.15 times or more and 0.35 times or less of light having a wavelength of 500 nm or more and 600 nm or less. An achromatic transparent conductive film having:
ハロゲン化物薄膜、硫化物薄膜もしくはこれらから選択
した2種以上の混合物薄膜であって、膜厚が45nm以上16
0nm 以下でかつ屈折率が1.3 以上1.7 以下である透明膜
からなることを特徴とする請求項1記載の無光彩透明導
電膜。2. The oxide film is an oxide thin film,
A halide thin film, sulfide thin film, or a mixture thin film of two or more selected from these, with a film thickness of 45 nm or more 16
The achromatic transparent conductive film according to claim 1, comprising a transparent film having a thickness of 0 nm or less and a refractive index of 1.3 or more and 1.7 or less.
m 以下でかつ屈折率が1.6 以上2.8 以下であることを特
徴とする請求項1乃至2記載の無光彩透明導電膜。3. The transparent conductive film has a film thickness of 80 nm or more and 800 n or more.
The achromatic transparent conductive film according to claim 1 or 2, wherein the transparent conductive film has a refractive index of 1.6 or more and 2.8 or less and m or less.
μmにおける平均可視光透過率が70%以上であって、波
長10μmにおける赤外反射率が60%以上であることを特
徴とする請求項1乃至3記載の無光彩透明導電膜。4. The transparent conductive film has a wavelength of 0.38 μm to 0.70.
The achromatic transparent conductive film according to claim 1, wherein the average visible light transmittance at 70 μm is 70% or more, and the infrared reflectance at a wavelength of 10 μm is 60% or more.
電膜をガラス基板表面に成膜したことを特徴とする無光
彩透明導電膜付きガラス板。5. A glass plate with an achromatic transparent conductive film, wherein the achromatic transparent conductive film according to claim 1 is formed on the surface of a glass substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7326795A JPH09165232A (en) | 1995-12-15 | 1995-12-15 | Non-iridescent transparent electroconductive film and glass having the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7326795A JPH09165232A (en) | 1995-12-15 | 1995-12-15 | Non-iridescent transparent electroconductive film and glass having the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09165232A true JPH09165232A (en) | 1997-06-24 |
Family
ID=18191798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7326795A Pending JPH09165232A (en) | 1995-12-15 | 1995-12-15 | Non-iridescent transparent electroconductive film and glass having the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09165232A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006112371A1 (en) * | 2005-04-15 | 2006-10-26 | Asahi Glass Company, Limited | Heat insulating plate material for window |
DE102004040887B4 (en) | 2004-08-24 | 2018-03-29 | Volkswagen Ag | Glass pane with at least one transparent coating for vehicles |
WO2019189109A1 (en) * | 2018-03-26 | 2019-10-03 | 日本板硝子株式会社 | Substrate with thin film and production method thereof |
CN112789249A (en) * | 2018-10-04 | 2021-05-11 | 中央硝子株式会社 | Anti-reflection light control glass structure |
-
1995
- 1995-12-15 JP JP7326795A patent/JPH09165232A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004040887B4 (en) | 2004-08-24 | 2018-03-29 | Volkswagen Ag | Glass pane with at least one transparent coating for vehicles |
WO2006112371A1 (en) * | 2005-04-15 | 2006-10-26 | Asahi Glass Company, Limited | Heat insulating plate material for window |
JPWO2006112371A1 (en) * | 2005-04-15 | 2008-12-11 | 旭硝子株式会社 | Insulating window plate |
WO2019189109A1 (en) * | 2018-03-26 | 2019-10-03 | 日本板硝子株式会社 | Substrate with thin film and production method thereof |
CN112789249A (en) * | 2018-10-04 | 2021-05-11 | 中央硝子株式会社 | Anti-reflection light control glass structure |
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