JPH0835074A - Member made of titanium or titanium alloy excellent in wear resistance and erosion resistance and its production - Google Patents
Member made of titanium or titanium alloy excellent in wear resistance and erosion resistance and its productionInfo
- Publication number
- JPH0835074A JPH0835074A JP16954494A JP16954494A JPH0835074A JP H0835074 A JPH0835074 A JP H0835074A JP 16954494 A JP16954494 A JP 16954494A JP 16954494 A JP16954494 A JP 16954494A JP H0835074 A JPH0835074 A JP H0835074A
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- Prior art keywords
- coating layer
- metal
- boron
- resistance
- alloy
- Prior art date
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、耐摩耗性及び耐溶損性
に優れたTiまたはTi合金製部材及びその製造方法に
関し、詳細には、摺動摩耗や転動摩耗、線間摩耗等に対
する耐摩耗性に優れたTiまたはTi合金製部材であっ
て、例えば自転車のペダル軸受けやクランクシャフト、
自動車のエンジンバルブ,シリンダー,コイルスプリン
グ,リテーナー,コンロッド等の部材、ベアリングと接
触する軸材、歯車等の動力伝達部と接触する部材、更に
は高面圧下で使用されるフォーミングロール、または高
温域で使用されるジェットエンジン用部材等として好適
なTiまたはTi合金製部材およびその製造方法に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Ti or Ti alloy member excellent in wear resistance and melting resistance and a method for manufacturing the same, and more particularly to sliding wear, rolling wear, line-to-line wear and the like. A member made of Ti or a Ti alloy having excellent wear resistance, such as a bicycle pedal bearing or a crankshaft,
Members such as automobile engine valves, cylinders, coil springs, retainers, connecting rods, shaft materials that come into contact with bearings, members that come into contact with power transmission parts such as gears, and forming rolls used under high surface pressure, or high temperature regions The present invention relates to a Ti or Ti alloy member suitable for use as a jet engine member and the like and a method for manufacturing the same.
【0002】さらに上記TiまたはTi合金製部材は、
ダイカスト用の金型及びその部品、例えばプランジャー
スリーブ、プランジャーチップ、中子ピン及び湯口等の
様な金型材料に用いれば、優れた耐溶損性を発揮する。Further, the above Ti or Ti alloy member is
When it is used for a die casting die and its parts, for example, a die material such as a plunger sleeve, a plunger tip, a core pin, and a sprue, it exhibits excellent erosion resistance.
【0003】[0003]
【従来の技術】自動車、航空機等の輸送機分野において
は、より一層の軽量化が要求されており、軽量で耐食性
に優れるTi及びTi合金の使用が検討されている。但
し、Ti及びTi合金製部材は表面の硬度が低いことか
ら耐摩耗性の点で問題がある。2. Description of the Related Art In the field of transportation machines such as automobiles and airplanes, further weight reduction is required, and use of Ti and Ti alloys which are lightweight and have excellent corrosion resistance is being studied. However, since Ti and Ti alloy members have low surface hardness, there is a problem in terms of wear resistance.
【0004】また最近では、例えばダイカスト製品の歩
留まり及び品質向上の観点から、軽量性及び保温性に優
れるTi−6Al−V等のTi合金が、金型材料として
有望視されている。しかしながら、上記Ti合金は溶融
アルミとの反応性が高く、耐溶損性に乏しいという問題
を有している。In recent years, Ti alloys such as Ti-6Al-V, which are excellent in lightness and heat retention, have been regarded as promising as a die material from the viewpoint of improving the yield and quality of die cast products. However, the Ti alloy has a problem that it has a high reactivity with molten aluminum and is poor in melting resistance.
【0005】耐摩耗性及び耐溶損性を向上させる技術と
しては、浸炭処理、窒化処理やホウ化処理等の表面硬化
処理方法が挙げられるが、中でもホウ化処理は、金属表
面に形成されるホウ化層の硬度が高く、優れた耐摩耗性
及び耐溶損性を発揮することから好ましい。しかしなが
ら、TiまたはTi合金にホウ化処理を施して得られる
ホウ化層の厚みは、例えば、純Tiの場合で10μm程
度であり、またTi−6Al−V等のTi合金の場合で
は数μm程度の厚さしかなく、せっかくTiまたはTi
合金にホウ化処理を行っても十分な耐摩耗性及び耐溶損
性が得られないという問題点があった。Techniques for improving wear resistance and erosion resistance include surface hardening treatment methods such as carburizing treatment, nitriding treatment and boration treatment. Among them, the boration treatment is a method of forming a boron on a metal surface. The hardness of the chemical conversion layer is high, and excellent abrasion resistance and melting resistance are exhibited, which is preferable. However, the thickness of the boride layer obtained by subjecting Ti or Ti alloy to the boration treatment is, for example, about 10 μm in the case of pure Ti, and about several μm in the case of Ti alloy such as Ti-6Al-V. It has only the thickness of Ti or Ti or Ti
There is a problem that sufficient abrasion resistance and melting resistance cannot be obtained even if the alloy is subjected to boration treatment.
【0006】[0006]
【発明が解決しようとする課題】本発明は上記の事情に
着目してなされたものであって、耐摩耗性及び耐溶損性
に優れたTiまたはTi合金製部材及びその製造方法を
提供しようとするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a Ti or Ti alloy member excellent in wear resistance and melt damage resistance, and a manufacturing method thereof. To do.
【0007】[0007]
【課題を解決するための手段】上記課題を解決した本発
明のTiまたはTi合金製部材とは、TiまたはTi合
金よりなる母材の表面に、ホウ素の拡散速度が母材金属
より大きい金属材料とホウ素からなる被覆層が10μm
以上の厚みで形成されてなることを要旨とするものであ
る。The Ti or Ti alloy member of the present invention which has solved the above-mentioned problems is a metal material having a diffusion rate of boron higher than that of the base metal on the surface of the base material made of Ti or Ti alloy. Coating layer consisting of boron and boron is 10 μm
The gist of the invention is to be formed with the above thickness.
【0008】尚、上記被覆層を構成する金属材料として
は、Fe,Co,Ni,Cr,Mo,Wよりなる群から
選ばれる1種または2種以上の金属が好ましく、さら
に、Fe,Co,Niの含有率が90原子%以上にする
ことが望まれる。The metal material forming the coating layer is preferably one or more metals selected from the group consisting of Fe, Co, Ni, Cr, Mo and W. Further, Fe, Co, It is desired that the Ni content be 90 atomic% or more.
【0009】また、上記被覆層に含有されたホウ素の濃
度は、1原子%以上であることが望ましく、しかも前記
被覆層に含有されたホウ素の濃度は、上記被覆層の表面
側が母材側より高くすることが好ましい。The concentration of boron contained in the coating layer is preferably 1 atomic% or more, and the concentration of boron contained in the coating layer is higher on the surface side of the coating layer than on the base metal side. It is preferable to raise it.
【0010】上記TiまたはTi合金製部材を製造する
にあたっては、以下の(1)〜(3)の方法が推奨され
る。 (1) 母材表面にホウ素の拡散速度が母材金属より大
きい金属材料からなる金属被覆層を、湿式めっき法また
はマグネトロンスパッタリング法により形成した後に、
ホウ化処理を行うことによって上記金属被覆層中にホウ
素を拡散させる方法。 (2) 上記金属材料とホウ素からなる被覆層を、該被
覆層に対応する組成を有するターゲットを用いてマグネ
トロンスパッタリング法により形成する方法。 (3) 上記金属材料とホウ素からなる被覆層を、該被
覆層を構成する金属材料をターゲットとして、ホウ化物
ガス雰囲気下で反応性スパッタリング法により形成する
方法。The following methods (1) to (3) are recommended for manufacturing the above Ti or Ti alloy member. (1) After forming a metal coating layer made of a metal material having a diffusion rate of boron higher than that of the base metal on the surface of the base material by a wet plating method or a magnetron sputtering method,
A method of diffusing boron into the metal coating layer by performing boration treatment. (2) A method of forming a coating layer composed of the above metal material and boron by a magnetron sputtering method using a target having a composition corresponding to the coating layer. (3) A method of forming a coating layer made of the above metal material and boron by a reactive sputtering method in a boride gas atmosphere, using the metal material forming the coating layer as a target.
【0011】[0011]
【作用】本発明者らは、耐摩耗性及び耐溶損性に優れた
TiまたはTi合金製部材の開発を目的として、表面硬
化処理について種々検討を重ねた結果、TiまたはTi
合金はホウ素の拡散速度が非常に小さいことに着目し、
上記TiまたはTi合金からなる母材表面にホウ化処理
を直接行うのではなく、まず母材表面にTiまたはTi
合金よりホウ素拡散速度の大きい金属材料の被覆層を形
成してこの被覆層にホウ化処理を行えば、TiまたはT
i合金製部材の表面に厚さ10μm以上のホウ化処理層
が形成でき、十分な耐摩耗性及び耐溶損性を発揮できる
TiまたはTi合金製部材を得ることができることを見
出した。但し、本発明のTiまたはTi合金製部材は、
上記の製造方法によって限定されるものではなく、Ti
またはTi合金よりなる母材の表面に、上記母材よりホ
ウ素拡散速度の大きい金属材料とホウ素からなる被覆層
が形成されていればよい。The present inventors conducted various studies on the surface hardening treatment for the purpose of developing a Ti or Ti alloy member excellent in wear resistance and melting resistance, and as a result, Ti or Ti alloy
Focusing on the very low diffusion rate of boron in the alloy,
Rather than directly subjecting the surface of the base material made of Ti or Ti alloy to boration treatment, first, Ti or Ti is applied to the surface of the base material.
If a coating layer made of a metal material having a higher boron diffusion rate than the alloy is formed and the coating layer is subjected to a boriding treatment, Ti or T
It was found that a borated layer having a thickness of 10 μm or more can be formed on the surface of the i alloy member, and a Ti or Ti alloy member that can exhibit sufficient wear resistance and melt damage resistance can be obtained. However, the Ti or Ti alloy member of the present invention,
It is not limited by the above manufacturing method, but Ti
Alternatively, a coating layer made of boron and a metal material having a higher boron diffusion rate than the base material may be formed on the surface of the base material made of a Ti alloy.
【0012】上記TiまたはTi合金よりホウ素拡散速
度の大きい金属材料としては、Fe,Co,Ni,C
r,Mo,W等が例示でき、特に好ましいのはFe,C
o,Niであり、これらの3元素の含有量は上記金属材
料中90原子%であることが望ましく、95原子%以上
であることがより好ましい。Fe, Co, Ni and C are metallic materials having a higher boron diffusion rate than Ti or Ti alloy.
r, Mo, W and the like can be exemplified, and particularly preferable are Fe and C.
O and Ni, and the content of these three elements is preferably 90 atom% in the metal material, and more preferably 95 atom% or more.
【0013】本発明において十分な耐摩耗性及び耐溶損
性を発揮できるホウ化処理層の厚みとは、10μm以上
をいうが、面圧の高い部材として用いることを考える
と、20μm以上が好ましく、50μm以上がより望ま
しい。In the present invention, the thickness of the borated layer capable of exhibiting sufficient wear resistance and erosion resistance is 10 μm or more, but considering that it is used as a member having a high surface pressure, 20 μm or more is preferable, 50 μm or more is more desirable.
【0014】また、本発明において十分な耐摩耗性及び
耐溶損性を発揮させる為には、被覆層中に十分な量のホ
ウ化物を形成することが必要であり、被覆層中のホウ素
の濃度は1原子%以上とすることが望ましい。尚より望
ましくは5原子%以上であり、一方上限としては30原
子%が望ましく、50原子%以下がより望ましい。Further, in the present invention, in order to exert sufficient wear resistance and erosion resistance, it is necessary to form a sufficient amount of boride in the coating layer, and the boron concentration in the coating layer. Is preferably 1 atomic% or more. Incidentally, it is more preferably 5 at% or more, while the upper limit is preferably 30 at% and more preferably 50 at% or less.
【0015】さらに被覆層中に含まれるホウ素は表面に
行くほど段階的または傾斜的に高濃度とすることが望ま
しく、被覆層の表層部は硬度を高くして優れた耐摩耗性
を発揮させると共に、母材との界面ではホウ素濃度を低
くして母材との密着性に優れた被覆層とすることができ
る。Further, it is desirable that the concentration of boron contained in the coating layer is gradually or gradually increased toward the surface, and the surface layer portion of the coating layer has high hardness to exhibit excellent wear resistance. The boron concentration at the interface with the base material can be reduced to form a coating layer having excellent adhesion to the base material.
【0016】本発明は、上記TiまたはTi合金製部材
の製造方法を限定するものではないが、まず金属層を被
覆した後にホウ化処理を行なう方法が推奨される。この
方法によればホウ化処理時に被覆金属層とTi合金母材
との界面に拡散層が形成され、著しく密着性が向上する
と共に熱サイクル性も改善される。The present invention does not limit the method of manufacturing the above Ti or Ti alloy member, but it is recommended to first coat the metal layer and then perform the boration treatment. According to this method, a diffusion layer is formed at the interface between the coating metal layer and the Ti alloy base material during the boration treatment, so that the adhesiveness is remarkably improved and the heat cycle property is also improved.
【0017】尚本発明は上記被覆金属層にホウ化処理を
施す方法を限定するものでもなく、溶融塩や粉末ペース
トによるホウ化処理、BCl3 等のガスを利用したホウ
化処理など公知のホウ化処理方法を採用すればよい。ま
たホウ化処理は600〜1100℃の温度範囲で行うこ
とができ、加熱時間としては2〜10時間加熱すればよ
い。その他イオン注入によってホウ素を金属層内に拡散
させてもよい。Note that the present invention does not limit the method of subjecting the above-mentioned coated metal layer to the boration treatment, and well-known boron treatment such as boration treatment with a molten salt or powder paste, boration treatment using a gas such as BCl 3 or the like. A chemical treatment method may be adopted. The boration treatment can be performed in the temperature range of 600 to 1100 ° C., and the heating time may be 2 to 10 hours. Alternatively, boron may be diffused into the metal layer by ion implantation.
【0018】さらに本発明は金属層を被覆する方法を限
定するものでもなく、湿式めっき法の他、スパッタリン
グ、イオンプレーティング、CVD及び溶射等の気相コ
ーティングが挙げられるが、湿式めっき法が以下の理由
で好適である。即ち耐摩耗部品として使用されるものに
はエンジンバルブ、シリンダー、コイルスプリング、リ
テーナー、コンロッド等、複雑な形状を有するものが多
い。湿式めっき法を採用することによって複雑な形状を
有する部材に対して均一に被膜を形成することが容易と
なる。尚湿式めっき法は無電解めっきと電気めっきに大
別でき、無電解めっきは被覆層の密着性が高い点で優
れ、一方電気めっきは膜厚コントロールの点で有利であ
る。Further, the present invention does not limit the method for coating the metal layer, and includes wet plating, as well as vapor phase coating such as sputtering, ion plating, CVD and thermal spraying. It is suitable for the reason. That is, many parts used as wear resistant parts have complicated shapes such as engine valves, cylinders, coil springs, retainers, connecting rods, and the like. By adopting the wet plating method, it becomes easy to uniformly form a film on a member having a complicated shape. The wet plating method can be roughly divided into electroless plating and electroplating. Electroless plating is excellent in that the adhesion of the coating layer is high, while electroplating is advantageous in controlling the film thickness.
【0019】本発明のTiまたはTi合金製部材を製造
するにあたっては、金属材料とホウ素からなる被覆層
を、該被覆層に対応する組成を有するターゲットを用い
てマグネトロンスパッタリング法により形成する方法
や、上記被覆層を構成する金属材料をターゲットとし
て、ホウ化物ガス雰囲気下で反応性スパッタリング法に
より形成する方法等を採用してもよい。In producing the Ti or Ti alloy member of the present invention, a method of forming a coating layer composed of a metal material and boron by a magnetron sputtering method using a target having a composition corresponding to the coating layer, A method of forming the coating layer by a reactive sputtering method in a boride gas atmosphere using a metal material as a target may be adopted.
【0020】尚、母材上に形成する金属被覆層には、皮
膜の諸特性(硬度、耐食性等)を向上させることを目的
として、ホウ素の拡散速度をTiより低下させない範囲
で添加元素を加えてもよい。For the purpose of improving various characteristics of the coating (hardness, corrosion resistance, etc.), an additive element is added to the metal coating layer formed on the base material within a range not lowering the diffusion rate of boron as compared with Ti. May be.
【0021】[0021]
【実施例】実施例1 Ti−6Al−4Vを母材として以下の成膜方法により
表1に示す化学組成の皮膜を形成した。最表面の化合物
組成及び皮膜の厚さも表1に併記する。 Example 1 A film having the chemical composition shown in Table 1 was formed by the following film forming method using Ti-6Al-4V as a base material. The compound composition of the outermost surface and the thickness of the film are also shown in Table 1.
【0022】成膜方法(1) :試験片No.1〜3は、母
材表面に被覆する金属ホウ化物に対応する組成を有する
ターゲットを用い、RFマグネトロンスパッタリング法
によって皮膜を形成した。No.1はホウ化Niターゲ
ットを用い、No.2はホウ化Moターゲットを用い、
No.3はFe−Coホウ化物ターゲットを用いて表1
に併記する組成の金属ホウ化物の被覆層を母材表面に形
成した。Film forming method (1): Test piece No. For Nos. 1 to 3, films were formed by the RF magnetron sputtering method using targets having a composition corresponding to the metal boride coating the surface of the base material. No. No. 1 uses a boride Ni target, and No. 1 is used. 2 uses a borated Mo target,
No. No. 3 using the Fe-Co boride target
A coating layer of a metal boride having the composition described in 1) was formed on the surface of the base material.
【0023】成膜方法(2) :試験片No.4〜6は、反
応性スパッタリング法を用いて成膜時にBCl3 ガスの
分圧を制御することによって表面側ほどホウ素濃度の高
いホウ化物層を形成した。No.4はNiターゲットを
用い、No.5はFeターゲットを用い、No.6はN
i−W合金ターゲットを用いて表1に併記する組成の金
属ホウ化物の被覆層を母材表面に形成した。Film forming method (2): Test piece No. In Nos. 4 to 6, a boride layer having a higher boron concentration on the surface side was formed by controlling the partial pressure of BCl 3 gas during film formation using the reactive sputtering method. No. No. 4 uses a Ni target, and No. 4 No. 5 uses a Fe target, and No. 5 6 is N
Using the i-W alloy target, a metal boride coating layer having the composition shown in Table 1 was formed on the surface of the base material.
【0024】成膜方法(3) :試験片No.7〜9はマグ
ネトロンスパッタリング法によって金属層を形成後、溶
融塩中において900℃で2時間ホウ化処理を行った。
上記マグネトロンスパッタリング法によって形成された
金属層は、No.7がCr皮膜、No.8はMo皮膜、
No.9はFe−Ni合金皮膜であり、ホウ化処理を行
なうことによって表1に併記する組成の金属ホウ化物と
した。Film forming method (3): Test piece No. In Nos. 7 to 9, after forming a metal layer by a magnetron sputtering method, a boration treatment was performed in a molten salt at 900 ° C. for 2 hours.
The metal layer formed by the magnetron sputtering method is No. No. 7 is a Cr film, No. 7 8 is Mo film,
No. Reference numeral 9 is an Fe-Ni alloy film, and a metal boride having the composition shown in Table 1 was obtained by performing a boration treatment.
【0025】成膜方法(4) :試験片No.10〜12は
湿式電気めっきによって金属層を形成後、溶融塩中で9
00℃で2時間ホウ化処理を行った。上記湿式電気めっ
きにより形成された金属層は、No.10がNi−Cr
皮膜、No.11はFe−W皮膜、No.12はCr−
Fe合金皮膜であり、ホウ化処理を行なうことによっ
て、表1に併記する組成の金属ホウ化物とした。Film forming method (4): Test piece No. 10 to 12 are 9 in molten salt after forming a metal layer by wet electroplating.
Boring treatment was performed at 00 ° C. for 2 hours. The metal layer formed by the wet electroplating is No. 10 is Ni-Cr
Film, No. No. 11 is a Fe-W film, No. 11 12 is Cr-
It was an Fe alloy film and was subjected to a boring treatment to obtain metal borides having the compositions shown in Table 1.
【0026】成膜方法(5) :試験片No.13〜19は
湿式無電解めっきによって金属層を形成した後、溶融塩
中で900℃で2時間ホウ化処理を行った。上記湿式無
電解めっきによって形成された金属層は、No.13が
Ni皮膜、No.14はFe皮膜、No.15はFe−
Ni合金皮膜、No.16はCo皮膜、No.17はF
e−Co合金皮膜、No.18はCo−Ni合金皮膜、
No.19はFe−Co−Ni合金皮膜であり、ホウ化
処理を行なうことによって、表1に併記する組成の金属
ホウ化物とした。Film-forming method (5): Test piece No. In Nos. 13 to 19, after forming a metal layer by wet electroless plating, a boration treatment was performed in a molten salt at 900 ° C. for 2 hours. The metal layer formed by the wet electroless plating is No. 13 is a Ni film, No. 13 No. 14 is an Fe film, No. 14 15 is Fe-
Ni alloy coating, No. No. 16 is a Co film, No. 16 17 is F
e-Co alloy coating, No. 18 is a Co-Ni alloy film,
No. Reference numeral 19 is an Fe-Co-Ni alloy film, and a boride treatment was performed to obtain a metal boride having the composition shown in Table 1.
【0027】また試験片No.20〜23は、母材に実
施例と同様Ti−6Al−4Vを用いた比較例であっ
て、No.20は表面硬化処理が一切施されていない場
合の比較例、No.21は母材に直接ホウ化処理を施し
た比較例、No.22は母材に直接窒化処理を施した比
較例、No.23は母材にCrめっきを施した場合の比
較例である。Test piece No. Nos. 20 to 23 are comparative examples in which Ti-6Al-4V was used as the base material as in the example, and No. 20 to No. 23 were used. No. 20 is a comparative example in which no surface hardening treatment is applied, No. 20. No. 21 is a comparative example in which the base material is directly subjected to the boring treatment, No. 21. No. 22 is a comparative example in which the base material is directly subjected to the nitriding treatment. Reference numeral 23 is a comparative example in which the base material is plated with Cr.
【0028】上記試験片について、以下に示す方法によ
って、表面硬化層厚みを測定すると共に、密着性及び耐
摩耗性を調べた。 <表面硬化層厚み>ホウ化処理後に切断、断面観察を行
なった。 <密着性>スクラッチ試験機の臨界荷重の測定より評価
した。 <耐摩耗性>ピンオンディスク型の摺動摩耗試験機を用
いて、ピンには窒化処理を施したSKD61を使用し、
荷重1kg/cm2 で試験を行なった。 ◎ :摩耗なし ○○:摩耗量 10μm未満 ○ :摩耗量 50μm未満 × :摩耗量 100μm未満 ××:摩耗量 100μm以上 結果は表1に併記する。With respect to the above test pieces, the thickness of the surface-hardened layer was measured by the following method, and the adhesion and wear resistance were examined. <Surface Hardened Layer Thickness> After the boring treatment, cutting and cross-section observation were performed. <Adhesion> It was evaluated by measuring the critical load of a scratch tester. <Abrasion resistance> Using a pin-on-disc type sliding abrasion tester, the pins are nitrided SKD61,
The test was conducted under a load of 1 kg / cm 2 . ◎: No wear ○ ○: Abrasion amount less than 10 μm ○: Abrasion amount less than 50 μm ×: Abrasion amount less than 100 μm XX: Abrasion amount 100 μm or more The results are also shown in Table 1.
【0029】[0029]
【表1】 [Table 1]
【0030】No.1〜19は本発明に係る実施例であ
り、いずれも密着性及び耐摩耗性に優れている。特に湿
式無電解めっきによって金属層を形成した後ホウ化処理
を行ったNo.13〜19は密着性及び耐摩耗性の両特
性において非常に優れている。これに対して、表面処理
が施されていないか、或いは従来の表面処理が施された
比較例20〜23はいずれも耐摩耗性に乏しいことが分
かる。No. Examples 1 to 19 are examples according to the present invention, and all have excellent adhesiveness and wear resistance. In particular, No. 1 was obtained by forming a metal layer by wet electroless plating and then performing boration treatment. 13 to 19 are very excellent in both properties of adhesion and abrasion resistance. On the other hand, it can be seen that Comparative Examples 20 to 23, which are not surface-treated or are conventionally surface-treated, have poor wear resistance.
【0031】実施例2 実施例1と同様にして試験片No.1〜23を作製し、
表面硬化層の厚みを測定すると共に、以下の方法により
耐溶損性と耐熱サイクル性を調べた。<耐溶損性>75
0℃、AC8Cの溶湯に3時間浸漬を行い、皮膜の肉厚
減少を測定した。 <耐熱サイクル性>高温(650℃)槽および低温(水
冷)槽を有する熱サイクル試験機を用いて、1サイクル
を約2分間として上記高温槽及び低温槽の往復を繰り返
し行うことによって、試験片に熱サイクルを負荷した。
評価は表面のクラック発生に至るまでの回数で行った。
皮膜の組成と評価結果は表2に併記する。 Example 2 In the same manner as in Example 1, the test piece No. 1 to 23,
The thickness of the surface-hardened layer was measured, and the melt damage resistance and heat cycle resistance were examined by the following methods. <Melting resistance> 75
Immersion was performed in a molten metal of 0 ° C. and AC8C for 3 hours, and the reduction in the thickness of the film was measured. <Heat-resistant cycle property> Using a heat cycle tester having a high-temperature (650 ° C.) tank and a low-temperature (water-cooled) tank, a cycle of the above-mentioned high-temperature tank and low-temperature tank is repeated for about 2 minutes, and thus a test piece Was subjected to a thermal cycle.
The evaluation was performed by the number of times until the occurrence of cracks on the surface.
The composition of the coating and the evaluation results are also shown in Table 2.
【0032】[0032]
【表2】 [Table 2]
【0033】No.1〜19は本発明に係る実施例であ
るが、特に金属層を形成した後にホウ化処理を行ったN
o.7〜19は耐溶損性に優れ、しかも耐熱サイクル性
に優れており、とりわけ湿式無電解めっきによって金属
層を形成したNo.13〜19は耐溶損性及び耐熱サイ
クル性の両特性において非常に優れている。一方No.
20〜23は従来方法による比較例であり、耐溶損性及
び耐熱サイクル性に劣っているか、少なくとも耐熱サイ
クル性に乏しい。No. 1 to 19 are examples according to the present invention, and in particular, N which was subjected to boration treatment after forming a metal layer.
o. Nos. 7 to 19 are excellent in melting resistance and thermal cycle resistance, and particularly No. 7 in which a metal layer is formed by wet electroless plating. Nos. 13 to 19 are very excellent in both melting resistance and heat cycle resistance. On the other hand, No.
Nos. 20 to 23 are comparative examples according to the conventional method, and are inferior in melting resistance and heat cycle resistance, or at least poor in heat cycle resistance.
【0034】[0034]
【発明の効果】本発明は以上の様に構成されているの
で、TiまたはTi合金製部材の表面に密着性に優れ硬
質なホウ化処理層を形成でき、耐摩耗性及び耐溶損性に
優れたTiまたはTi合金製部材およびその製造方法が
提供できることとなった。EFFECTS OF THE INVENTION Since the present invention is constituted as described above, it is possible to form a hard borated layer having excellent adhesion on the surface of a Ti or Ti alloy member, and it is excellent in wear resistance and erosion resistance. It is now possible to provide a Ti or Ti alloy member and a manufacturing method thereof.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C23C 14/34 N 8939−4K ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location C23C 14/34 N 8939-4K
Claims (9)
に、ホウ素の拡散速度が母材金属より大きい金属材料と
ホウ素からなる被覆層が10μm以上の厚みで形成され
てなることを特徴とする耐摩耗性及び耐溶損性に優れた
TiまたはTi合金製部材。1. A coating layer made of a metal material having a boron diffusion rate higher than that of the base metal and boron and having a thickness of 10 μm or more is formed on the surface of the base material made of Ti or a Ti alloy. A Ti or Ti alloy member with excellent wear resistance and melting resistance.
e,Co,Ni,Cr,Mo,Wよりなる群から選ばれ
る1種または2種以上の金属である請求項1に記載のT
iまたはTi合金製部材。2. The metal material constituting the coating layer is F
The T according to claim 1, which is one or more metals selected from the group consisting of e, Co, Ni, Cr, Mo and W.
A member made of i or Ti alloy.
て、Fe,Co,Niの含有率が90原子%以上である
請求項1または2に記載のTiまたはTi合金製部材。3. The Ti or Ti alloy member according to claim 1 or 2, wherein the content of Fe, Co, and Ni in the metal material forming the coating layer is 90 atomic% or more.
が、1原子%以上である請求項1〜3に記載のTiまた
はTi合金製部材。4. The Ti or Ti alloy member according to claim 1, wherein the concentration of boron contained in the coating layer is 1 atomic% or more.
を、上記被覆層の表面側が母材側より高くしてなる請求
項1〜4に記載のTiまたはTi合金製部材。5. The Ti or Ti alloy member according to claim 1, wherein the concentration of boron contained in the coating layer is higher on the surface side of the coating layer than on the base material side.
金製部材の製造方法であって、母材表面にホウ素の拡散
速度が母材金属より大きい金属材料からなる金属被覆層
を形成した後に、ホウ化処理を行うことによって上記金
属被覆層中にホウ素を拡散させることを特徴とする耐摩
耗性及び耐溶損性に優れたTiまたはTi合金製部材の
製造方法。6. The method for manufacturing a Ti or Ti alloy member according to claim 1, wherein a metal coating layer made of a metal material having a boron diffusion rate higher than that of the base metal is formed on the surface of the base material. A method for producing a Ti or Ti alloy member excellent in wear resistance and melt damage resistance, characterized by diffusing boron into the metal coating layer by performing a boration treatment later.
グネトロンスパッタリング法により形成する請求項6に
記載の製造方法。7. The method according to claim 6, wherein the metal coating layer is formed by a wet plating method or a magnetron sputtering method.
金製部材の製造方法であって、上記被覆層に対応する組
成のターゲットを用いマグネトロンスパッタリング法に
より前記被覆層を形成することを特徴とする耐摩耗性及
び耐溶損性に優れたTiまたはTi合金製部材の製造方
法。8. The method for manufacturing a Ti or Ti alloy member according to claim 1, wherein the coating layer is formed by a magnetron sputtering method using a target having a composition corresponding to the coating layer. And a method for producing a Ti or Ti alloy member having excellent wear resistance and melting resistance.
金製部材の製造方法であって、上記被覆層を構成する金
属材料をターゲットとして、ホウ化物ガス雰囲気下で反
応性スパッタリング法により前記被覆層を形成すること
を特徴とする耐摩耗性及び耐溶損性に優れたTiまたは
Ti合金製部材の製造方法。9. The method for producing a Ti or Ti alloy member according to claim 1, wherein the metallic material forming the coating layer is used as a target in a boride gas atmosphere by a reactive sputtering method. A method for producing a Ti or Ti alloy member having excellent wear resistance and melt damage resistance, which comprises forming a coating layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16954494A JPH0835074A (en) | 1994-07-21 | 1994-07-21 | Member made of titanium or titanium alloy excellent in wear resistance and erosion resistance and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16954494A JPH0835074A (en) | 1994-07-21 | 1994-07-21 | Member made of titanium or titanium alloy excellent in wear resistance and erosion resistance and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0835074A true JPH0835074A (en) | 1996-02-06 |
Family
ID=15888453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16954494A Withdrawn JPH0835074A (en) | 1994-07-21 | 1994-07-21 | Member made of titanium or titanium alloy excellent in wear resistance and erosion resistance and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0835074A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016108608A (en) * | 2014-12-05 | 2016-06-20 | 株式会社シマノ | Titanium member |
CN114875408A (en) * | 2022-05-23 | 2022-08-09 | 成都科宁达材料有限公司 | Selective laser melting TC4 alloy-based composite material and preparation method and application thereof |
-
1994
- 1994-07-21 JP JP16954494A patent/JPH0835074A/en not_active Withdrawn
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016108608A (en) * | 2014-12-05 | 2016-06-20 | 株式会社シマノ | Titanium member |
CN114875408A (en) * | 2022-05-23 | 2022-08-09 | 成都科宁达材料有限公司 | Selective laser melting TC4 alloy-based composite material and preparation method and application thereof |
CN114875408B (en) * | 2022-05-23 | 2023-09-22 | 成都科宁达材料有限公司 | Selective laser melting TC4 alloy-based composite material and preparation method and application thereof |
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