JPH0833994A - Laser beam machine - Google Patents

Abstract

PURPOSE:To provide a laser beam machine capable of freely driving a nozzle section for casting a laser beam without hindrance by a laser introducing path. CONSTITUTION:The nozzle section having an introducing section which executes connection with an optical fiber cable 67 for introduction of the laser beam and contains a reflection mirror for deflecting the introduced laser beam in a predetermined direction and having a connecting and supporting section 33 to a rotational driving mechanism 20 for rotating the nozzle section around a predetermined shaft is used as the nozzle section 30 for casting the laser. This introducing section is constituted rotatably with the connecting and supporting section by a bearing 34.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus,
In particular, the present invention relates to a laser processing apparatus capable of three-dimensionally driving a nozzle section that performs laser irradiation.

[0002]

2. Description of the Related Art As an example of this type of laser processing apparatus,
A first rotating body that is rotatably supported by a support frame;
A first motor for rotatably driving the rotating body, a second rotating body rotatably supported by the first rotating body, a second motor for rotationally driving the second rotating body, A nozzle portion provided on the tip side of the second rotating body, and a first reflection which is provided on the first rotating body and guides a laser beam radiated on the axis of the first rotating body to the second rotating body. Means and a second reflecting means which is provided on the second rotating body and guides the laser light radiated on the axis thereof toward the nozzle portion, and is reflected by the second reflecting means. A three-dimensional laser processing apparatus for irradiating a workpiece (workpiece) with laser light from the nozzle portion, wherein a swing frame is swingably provided on the support frame, and the swing frame is provided with the first frame. Rotatably rotatably supporting the rotating body of the
Rotating body, the second rotating body, the nozzle portion, the first reflecting means,
Holding means for integrally supporting the second reflecting means, the first motor and the second motor, and further holding the swing frame in a predetermined non-actuated position, is provided with the swing frame. There is known one provided with a detecting means for detecting that it has rocked from a non-operating position (for example, Japanese Patent Publication No. 3-55234).

[0003]

However, in the conventional devices including the above laser processing device, the laser introduction path from the laser oscillation source to the nozzle portion is fixed. For this reason, even though it can be driven three-dimensionally, the laser introduction path impedes the free movement of the nozzle portion, and the movement of the nozzle portion is restricted.

Further, an optical fiber cable is used for the laser introduction path, and in the past, a cable having a high flexibility is used in order to make the movement as flexible as possible. The flexibility of the cable is defined by the allowable bending radius and the allowable twist amount, and the larger these values are, the lower the mechanical strength is. Therefore, a cable with high flexibility means that the mechanical strength is low, and if the cable were to be cut, the laser could leak and cause an accident that could injure the human body. is there. For this reason, the optical fiber cable in the field of laser processing equipment needs to be reinforced with a protective coating in order to improve safety. However, if the protective coating is reinforced, the flexibility is reduced, and the free movement of the nozzle portion is further improved. It will interfere.

Therefore, an object of the present invention is to provide a laser processing apparatus capable of freely driving a nozzle section for irradiating a laser beam without being obstructed by a laser introduction path.

[0006]

According to the present invention, in a laser processing apparatus having a laser irradiation section having a nozzle section for laser irradiation, the nozzle section is connected to and introduced with an optical fiber for introducing laser light. It has an introduction part having a built-in reflecting mirror for deflecting the generated laser light in a predetermined direction, and a connection support part with a rotation drive mechanism for rotating the nozzle part around a predetermined axis. However, the introduction portion is configured to be rotatable with respect to the connection support portion.

The laser irradiation unit is attached to the apparatus frame, and has a first rotation drive mechanism for performing rotation drive about a first shaft extending in the vertical direction, and the first rotation drive mechanism.
With a connecting mechanism that is rotatably connected together with the rotary drive mechanism and a second shaft that is attached to the connecting mechanism and intersects the first shaft at an acute angle, with the predetermined shaft as the predetermined shaft. The rotary drive mechanism for performing the rotary drive.

Further, according to the present invention, in a laser processing apparatus having a nozzle portion for laser irradiation, the nozzle portion has a connection portion with an optical fiber for introducing laser light, and the introduced laser light is at a right angle. A first movable part having a first reflecting mirror for deflecting in a direction, and a laser beam connected to the first movable part and reflected by the first reflecting mirror for deflecting in a perpendicular direction. A second movable part having a second reflecting mirror, and the first movable part is configured to be rotatable around the laser light introduced from the optical fiber in the connection part to the optical fiber. And the second movable part is
Laser processing characterized in that it is configured to be rotatable about a laser beam reflected by the first reflecting mirror with respect to the first movable portion at a connection portion with the first movable portion. The device is obtained.

[0009]

According to the present invention, the introduction of the laser beam into the nozzle portion is directly performed by the optical fiber cable which is in a state of being separated from the peripheral mechanism of the nozzle portion, that is, the rotation driving mechanism, thereby restricting the movement of the nozzle portion. Is as low as possible.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a laser processing apparatus to which the present invention is applied will be schematically described with reference to FIG. In FIG. 3, a first bellows mechanism 61 allows a work table 65 to travel in one direction (herein referred to as the x-axis direction) on a gate-shaped movable frame 60, a second bellows mechanism 62, and a third bellows. A movable frame 64 that can be moved in the y-axis direction and the z-axis direction by the mechanism 63.
Is installed. A laser irradiation unit 100 including a nozzle unit for laser light irradiation and a drive mechanism for driving the nozzle unit for laser light irradiation in the three axial directions of x, y, and z is attached to the lower portion of the movable frame 64. An optical fiber cable 67 is led out from a drive unit 66 having a built-in laser oscillation source and the like, and the optical fiber cable 67 passes through the movement of the movable frame 64 and the laser irradiation unit 100 and is connected to the laser irradiation unit 100 in a deformable state. Has been done. Reference numeral 68 denotes an operation box in which a switch for starting and stopping the apparatus, a button for remote control operation, and the like are mounted, and is attached to the movable frame 60. Reference numeral 69 denotes an operation panel for inputting set values and the like for laser processing the work by numerical control and displaying various data.

Next, referring to FIG. 1, the laser irradiation unit 100, which is a main part of the present invention, will be described. The laser irradiation unit 100 includes a first rotation driving mechanism 1 for rotating the nozzle unit 30 for laser irradiation about the z axis (first axis).
0, the nozzle portion 30 is at an acute angle with respect to the z-axis (usually 45 °)
Second for rotation around the θ axis (second axis)
Between the second rotary drive mechanism 20 and the nozzle portion 30. The rotary drive mechanism 20 and the connection mechanism 40 for connecting the first rotary drive mechanism 10 and the second rotary drive mechanism 20 Are connected by a rotating arm 27.

The first rotary drive mechanism 10 includes a fixed base 11-1 fixed to the movable frame 64 shown in FIG.
11-2, and the motor 12 is attached to the fixed base 11-2. The output shaft of the motor 12 is connected to the reduction mechanism 14 via the coupling mechanism 13. The rotation reduced by the reduction mechanism 14 is transmitted to the rotating structure 15. The rotary structure 15 is a support plate 15 having a rotary plate 15-1 connected to the speed reduction mechanism 14 and a rotary plate 15-1 fixed to the rotary plate 15-1 and having an annular projecting portion 15-3 formed so as to project inward. -2 and. The inner peripheral surface of the projecting portion 15-3 is tapered so as to spread upward.

The connecting mechanism 40 has a taper structure 41 having a taper portion 41-1 which spreads upward in the center thereof and a flange 41-2 provided at the upper end of the taper portion 41-1. The taper structure 41 is a flange 41-
2 is supported while being mounted on the projecting portion 15-3. A rotation transmitting member 42 having a hollow connecting member 42-1 extending obliquely downward is provided below the taper structure 41.
Has been fixed. Rotation transmission member 42 and support plate 15-2
Between the four coil springs 43-1 to 43-4 with an angular interval of 90 ° about the z-axis in the circumferential direction.
Is provided in an inclined state. The coil springs 43-1 to 43-4 generate an urging force in the extension direction, and one ends of these are respectively transmitted to the rotation transmitting member 3.
2 is provided with a cylindrical support cylinder 44-1 to 44-4
And the other end is placed in contact with the support plate 15-2.

Coil springs 43-1 to 43-4 are moved by moving piston-shaped moving bodies, which are brought into contact with one ends of the coil springs 43-1 to 43-4, to the support cylinders 44-1 to 44-4. The adjusting mechanisms 45-1 to 45-4 for adjusting the urging force of are combined. The flange 41-2 of the taper structure 41 is pressed against the projecting portion 15-3 by the urging force of the coil springs 43-1 to 43-4, and the frictional force transmits the rotation of the rotary structure 15 to the taper structure 41. To be done.

The second rotary drive mechanism 20 is connected to the connecting member 42-1.
The motor 21 and the coupling mechanism 22 are housed in a hollow cylindrical body that is bent at an angle. Then, a first bevel gear 23 is provided on the output shaft of the coupling mechanism 22, and
By engaging the second bevel gear 24 with the bevel gear 23, the rotation of the motor 21 is converted into a rotational movement about the θ axis. Second bevel gear 2
A rotary body 26 is connected to the rotary shaft of No. 4 via a reduction mechanism 25, and the rotation of the rotary body 26 is transmitted to the nozzle unit 30 via a rotary arm 27.

The optical fiber cable 67 shown in FIG. 3 is connected to the upper portion of the nozzle portion 30 via the connector 31, and the laser light introduced through the connector 31 is incorporated in the upper portion of the nozzle portion 30 to form the reflecting mirror 32. Is reflected at an angle of 90 ° and goes downward along the central axis (z-axis in the state of FIG. 1).

The nozzle portion 30 is a portion below the connection support portion 33 connected to the rotating arm 27, and the connection support portion 33.
It is further divided into an introduction portion including a connector 31 and a reflecting mirror 32, and the introduction portion is connected to the connection support portion 33.
The bearing 34 is configured to be rotatable with respect to. In this way, the connector 31 and the reflecting mirror 32 are
The optical fiber cable 67 is integrally rotatably assembled to the connection support portion 33, and even if the rotary arm 27 rotates about the θ axis, the optical fiber cable 67 does not hinder the rotation, and the optical fiber cable 67 is always connected to the optical fiber cable 67. The laser light can be reflected in the central axis direction.

In addition to this, the nozzle portion 30 is combined with a means for focusing the laser light from the reflecting mirror 32 to the focal position 35 and a focus adjusting mechanism, but these are all well known and fixed and explained. Is omitted.

With the above configuration, in the state of FIG. 1, the nozzle portion 30 is driven by the first rotary drive mechanism 10.
Is driven to rotate about the z axis in a range smaller than 360 °. Further, when only the second rotary drive mechanism 20 is driven in the state of FIG. 1, the nozzle portion 30 is rotationally driven within a range smaller than 360 ° about the θ axis. By driving both the first and second rotary drive mechanisms 10 and 20, it is possible to perform so-called three-dimensional attitude control in which the tip of the nozzle portion 30 faces various directions. That is, the connection support portion 3
Even if 3 rotates about the z-axis or the θ-axis in accordance with the processing for the work, the introduction part can freely rotate with respect to the connection support part 33, so that the connection part of the optical fiber cable 67 is There is no big movement. In other words, the optical fiber cable 67 does not hinder the movement of the nozzle unit 30.

Therefore, by strengthening the protective coating as the optical fiber cable 67, it is possible to use an optical fiber cable having low flexibility, that is, a hard optical fiber cable, and it is possible to contribute to the improvement of safety.

By the way, in addition to the above construction, in the present embodiment, the following means are taken in consideration of the case where the nozzle portion 30 collides with the workpiece. The first means is to provide a pin 46 on the overhanging portion 15-3 facing upward, and insert the pin 46 into a through hole provided in the flange 41-2 of the taper structure 41. The second means is the projecting portion 15-adjacent to the taper portion 41-1 of the taper structure 41.
Three proximity sensors 47-1 (only one is shown) are arranged in the tapered portion 3 at an angular interval of 120 ° in the circumferential direction. The detection signals of these proximity sensors 47-1 are
It is sent to the control units of the first to third bellows mechanisms built in the drive unit 66 described above.

The functions of these first and second means will be described. For example, when the nozzle portion 30 collides with the work, a force of a predetermined value or more in the upward direction in the drawing, that is, the coil spring
When a force that exceeds the biasing force of 3-1 to 43-4 is applied, the taper structure 41 has its flange 41
-2 is displaced so as to separate from the overhanging portion 15-3 and float upward, so as to absorb the impact force applied to the nozzle portion 30, the second rotation drive mechanism 20, and the coupling mechanism 40, and move via the above-mentioned respective portions. It is possible to prevent an impact force from being applied to the frame 64.

Moreover, in the taper structure 41, the pin 46 is inserted into the through hole formed in the flange 41-2 of the taper structure 41, so that the positional deviation in the circumferential direction is restricted even if the pin 46 is displaced upward, and thus the taper structure is formed. This facilitates the restoration work when returning the body 41 to the original position. In addition, in the case of displacement as described above,
All of the three proximity sensors 47-1 are tapered structures 41.
The displacement is detected and a detection signal is sent out. The control unit that receives these detection signals determines that force is being applied to the nozzle unit 30 from below, and performs a control operation of the bellows mechanism that moves the laser irradiation unit 100 upward.

Next, when the nozzle portion 30 collides with the work and a force of a predetermined value or more is applied in the lateral direction in the drawing, the taper structure 41 is partially broken with the flange 41-2 tilted. By displacing away from the overhanging portion 15-3,
The impact force is absorbed as in the above case. Also in this case, the pin 46 does not come out of the through hole of the flange 41-2, so that the positional displacement of the tapered structure 41 in the circumferential direction is restricted.

Further, in the case of such a displacement, all the three proximity sensors 47-1 do not detect the displacement, and a detection signal is sent from one or two proximity sensors 47-1. It In this case, in the control unit, the proximity sensor 4
When there is one detection signal from 7-1, it is determined that the force is acting from the direction opposite to the location where the proximity sensor 47-1 is installed, and the laser irradiation unit is moved in the direction to avoid this force. Drive control of the bellows mechanism is performed so as to move 100.
On the other hand, when there are two detection signals from the proximity sensor 47-1, the control unit determines that the force is acting from the direction opposite to the intermediate portion of the installation location of these two proximity sensors 47-1. To do. Then, drive control of the bellows mechanism is performed so as to move the laser irradiation unit 100 in a direction in which such a force is avoided.

Next, a second example of the present invention will be described with reference to FIG. In this example, a hard optical fiber cable 67 is used. The optical fiber cable 67 supports the nozzle portion 50 in a suspended state, and the tip portion 51 of the nozzle portion 50 is rotatable about the z axis and the x axis. The nozzle section 50 has a connection section 52 with an optical fiber cable 67 for introducing a laser beam, and a first movable section 54 having a first reflecting mirror 53 for deflecting the introduced laser beam in a right angle direction.
And the first reflecting mirror 5 connected to the first movable portion 54.
And a second movable part 56 having a second reflecting mirror 55 for deflecting the laser light reflected by the laser light 3 in the right-angled direction.

The first movable portion 54 is connected to the connecting portion 52.
Fiber optic cable 67 by bearing 57 at
In contrast, the laser beam introduced from there is centered around 360 °
It is configured to be rotatable in a smaller range. On the other hand, the second movable portion 56 transmits the laser light reflected by the first reflecting mirror 53 to the first movable portion 54 by the bearing 58 arranged at the connecting portion with the first movable portion 54. 3 in the center
It is configured to be rotatable within a range smaller than 60 °. 5
Reference numerals 9a and 59b are condenser lenses. First movable part 5
The rotation driving mechanism for rotating the fourth and second movable portions 56 can be incorporated into the inside thereof by using a well-known technique, and therefore, illustration and description thereof will be omitted. In any case, the degree of freedom of the tip portion 51 can be further improved by making the tip portion 51 of the nozzle portion 50 rotatable about the z axis and the x axis.

If the bearing is changed to a hollow motor, the connection direction of the optical fiber cable 67 can be set to any direction. Further, as long as the bearing can be rotatably supported, other means may be substituted.

[0029]

As described above, according to the present invention, the movement of the nozzle portion is prevented as much as possible by the introduction of the laser beam to the nozzle portion through the optical fiber cable separated from the driving mechanism of the nozzle portion. By realizing the above, it is possible to control the posture of the nozzle portion in various ways. As a result, even an optical fiber cable with low flexibility can be used, so that the protective coating can be strengthened and the safety can be improved.

[Brief description of drawings]

FIG. 1 is a sectional view showing an internal structure of a laser irradiation section of a laser processing apparatus according to the present invention.

FIG. 2 is a sectional view showing another example of the nozzle portion of the laser processing apparatus according to the present invention.

FIG. 3 is a schematic perspective view showing an example of a laser processing apparatus to which the present invention is applied.

[Explanation of symbols]

 10 1st rotation drive mechanism 20 2nd rotation drive mechanism 30 Nozzle part 40 Coupling mechanism 100 Laser irradiation part

Claims (3)

[Claims] 1. A laser processing apparatus comprising a laser irradiation section having a laser irradiation nozzle section, wherein the nozzle section is connected to an optical fiber for introducing a laser beam and the introduced laser beam is predetermined. And a connection support portion for connecting the rotation driving mechanism for rotating the nozzle portion around a predetermined axis, and the introduction portion is connected to the connection portion. A laser processing apparatus, which is configured to be rotatable with respect to a support portion. 2. The laser processing apparatus according to claim 1, wherein the laser irradiating section is a first rotary drive for performing a rotary drive about a first shaft attached to the apparatus frame and extending in the vertical direction. The mechanism, a coupling mechanism rotatably coupled with the first rotary drive mechanism, and a second axis attached to the coupling mechanism and intersecting the first axis at an acute angle. A laser processing apparatus comprising: the rotation drive mechanism for performing rotation drive about the axis as a center. 3. A laser processing apparatus having a laser irradiation nozzle portion, wherein the nozzle portion has a connection portion with an optical fiber for introducing a laser beam, and for deflecting the introduced laser beam in a right angle direction. First movable part having a first reflective mirror, and a second reflective mirror connected to the first movable part for deflecting the laser light reflected by the first reflective mirror in a perpendicular direction. A second movable part having a second movable part having a second movable part having a laser beam introduced from the optical fiber to the optical fiber at the connection part. The movable part is configured to be rotatable with respect to the first movable part around the laser beam reflected by the first reflecting mirror at the connection part with the first movable part. Characteristic laser processing equipment.