JPH08334600A - Two-crystal spectroscope - Google Patents

Abstract

PURPOSE: To provide a two-crystal spectroscope which keeps tame parallelism and offset amount of the first and second crystals by easy operation and can adjust the position of each of them separately. CONSTITUTION: In orthogonal coordinates of X, Y and Z, a two-crystal spectroscope is equipped with a vacuum container 11 kept vacuum with the first crystal 1 and the second crystal 2 contained in it, the first Bragg angle adjustment mechanism 12b to rotate the first crystal around the principal axis Y, the second Bragg angle adjustment mechanism 12a to rotate the second crystal around the principal axis Y, an X-axis adjustment mechanism 15 to move each Bragg angle adjustment mechanism separately in the X, Y and Z directions, a Y-axis adjustment mechanism 16 and a Z-axis adjustment mechanism 18.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double crystal spectrometer for extracting monochromatic X-rays from synchrotron radiation.

[0002]

2. Description of the Related Art Synchrotron radiation (hereinafter simply referred to as radiation) emits infrared rays having a wavelength longer than that of visible light.
It is a collection of strong light having a wide wavelength range from ultraviolet rays having a short wavelength, soft X-rays, hard X-rays, and has a strong directivity. In order to extract monochromatic X-rays having a required energy width from the emitted light, a two-crystal spectroscope is widely used which reflects monochromatic X-rays on the surfaces of two crystal plates arranged in parallel.

FIG. 3 is a principle diagram of a conventional cam type fixed position emission type two-crystal spectroscope which is a typical two-crystal spectroscope. In this figure, the second crystal 2 is mounted with the main axis Y as the center of rotation, and the first crystal 1 is mounted on the main axis rotary stage 3 as a rotary shaft 2.
It is fixed between two translation stages (X stage 4 and Z stage 5). These two translation stages (X stage 4 and Z stage 5) have two guide rails (X stage 4).
The upper surface of the guide rail 6, Z guide rail 7) is guided by the upper surface of the guide rail, and the main shaft rotating stage 3 rotates about the main axis Y, and the Bragg angle θ B (incident radiation 8 and
Even if the angle formed by the crystal 1 changes, the parallel distance (offset amount) between the incident radiation 8 and the emission radiation 9 does not change. With this configuration, when the Bragg angle θB changes, the position of the first crystal 1 can be adjusted as shown by the solid line and the dotted line in the figure, and monochromatic X-rays (emitted radiation 9) can be emitted at a fixed position. . That is, the rotation of the first crystal 1 and the second crystal 2 is performed only by the rotation of the spindle rotation stage 3 about the main axis Y, and the adjustment of the crystal position is simultaneously performed by the guide rails 6 and 7. Therefore, if the translation stage accuracy and the guide rail accuracy are sufficient,
A fixed position emission type two-crystal spectroscope can be realized only by introducing the rotation of the main axis.

[0004]

However, the above-mentioned conventional cam type fixed position emission type two-crystal spectroscope has a problem that fine adjustment of each crystal position cannot be performed at all. That is, as described above, the parallelism between the first crystal and the second crystal can be maintained and the offset amount can be held constant by a simple operation of rotating the main axis within the accuracy range of the translation stage.
It was not possible to make adjustments with even higher precision.

On the other hand, an independent control type two-crystal spectrometer for moving the first crystal and the second crystal completely independently is also known.
The independent control type has a problem in that it is difficult to adjust the parallelism and the offset amount, and the operation becomes complicated.

The present invention was devised to solve such problems. That is, the object of the present invention is to maintain the parallelism between the first crystal and the second crystal and to keep the offset amount constant by a simple operation.
An object of the present invention is to provide a two-crystal spectroscope capable of independently adjusting the positions of the first crystal and the second crystal.

[0007]

According to the present invention, XYZ
In the Cartesian coordinate system, a vacuum container containing a first crystal and a second crystal and held in a vacuum, a first Bragg angle adjusting mechanism for rotating the first crystal around a principal axis Y, and a second crystal for the principal axis Y. The second Bragg angle adjusting mechanism for rotating around and the Bragg angle adjusting mechanism are independently operated for X, Y and Z.
X-axis adjusting mechanism, Y-axis adjusting mechanism, and Z for moving in the direction
And a second Bragg angle adjusting mechanism,
The reflecting surface of the crystal is supported along the main axis Y and is rotated about the main axis Y. The first Bragg angle adjusting mechanism includes a main axis rotating stage, and the main axis rotating stage is an X stage orthogonal to each other. And a Z stage, and an X guide rail and a Z guide rail for guiding each stage, respectively, and the upper surface position of each guide rail is parallel to the parallelism between the first crystal and the second crystal due to the rotation of the spindle rotation stage and the parallel spacing. Is provided so that it does not change.

According to a preferred embodiment of the present invention, each Bragg angle adjusting mechanism includes a drive shaft penetrating the vacuum vessel, a drive mechanism for hermetically rotating the drive shaft, and a metal bellows surrounding the drive shaft. The metal bellows is flexible, and one end is airtightly connected to the vacuum container and the other end is airtightly connected to the drive mechanism. Further, each Bragg angle adjusting mechanism further includes a tilt angle rotating mechanism and an inner surface angle rotating mechanism for rotating the first crystal and the second crystal about an x axis parallel to the reflecting surface and a z axis perpendicular to the reflection surface, respectively. It is preferable.

[0009]

According to the above-described structure of the present invention, the second Bragg angle adjusting mechanism is adapted to support the reflecting surface of the second crystal in alignment with the principal axis Y and rotate it about the principal axis Y.
The first Bragg angle adjusting mechanism includes a spindle rotating stage, and the spindle rotating stage includes an X stage and a Z stage that are orthogonal to each other.
Each stage has an X guide rail and a Y guide rail that guides each stage, and the upper surface position of each guide rail changes the parallelism and the parallel distance between the first crystal and the second crystal due to the rotation of the spindle rotation stage. Since it is formed so as not to do so, a simple operation of rotating the first Bragg angle adjusting mechanism and the second Bragg angle adjusting mechanism by the same angle,
Similar to the conventional cam type fixed-position emission two-crystal spectroscope, the parallelism between the first crystal and the second crystal can be maintained and the offset amount can be maintained constant. Further, since the first Bragg angle adjusting mechanism and the second Bragg angle adjusting mechanism are independently driven, the parallelism and the offset amount of the first crystal and the second crystal are finely adjusted by adjusting the rotation angles thereof. It can also be adjusted.

Furthermore, since an X-axis adjusting mechanism, a Y-axis adjusting mechanism, and a Z-axis adjusting mechanism for independently moving each Bragg angle adjusting mechanism in the X, Y, and Z directions are provided, a pair of each of them is provided. If the same amount is moved by the adjustment mechanism, the first
The entire crystal can be moved in the X, Y, and Z directions while maintaining the parallelism and the offset amount of the crystal and the second crystal, and the first crystal and the second crystal can be adjusted by adjusting the movement amounts independently. It is possible to finely adjust the relative X, Y, and Z positions of the.

Further, as in the preferred embodiment of the present invention,
By providing a metal bellows, one end of which is connected to the vacuum container and the other end of which is hermetically connected to the drive mechanism, around the drive shaft of each Bragg angle adjusting mechanism, the first crystal and the second crystal are kept in the vacuum container. The driving device for each adjusting mechanism can be installed outside the vacuum container, and it is not necessary to use an expensive driving device having a vacuum specification (for example, a stepping motor), and the adjustment and maintenance of the driving device can be facilitated. it can.

Further, by providing a tilt angle rotation mechanism and an inner surface angle rotation mechanism for respectively rotating the first crystal and the second crystal about an x-axis parallel to the reflection surface and a z-axis perpendicular to the reflection surface, each crystal is Bragged. A total of 6 degrees of freedom of the angle θB, X, Y and Z axis positions, and rotational positions θx and θy around the x and z axes can be finely adjusted, and the first crystal and the second crystal can be finely adjusted in all directions. be able to.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the drawings. In the drawings, common members are designated by the same reference numerals and used. FIG. 1 is an overall front view of a two-crystal spectroscope according to the present invention, and FIG. 2 is a partial sectional view taken along the line AA. 1 and 2, a two-crystal spectroscope 10 of the present invention has a vacuum container 11 in which a first crystal 1 and a second crystal 2 are contained and which is held in a vacuum in an XYZ orthogonal coordinate system shown in the drawings. A first Bragg angle adjusting mechanism 12b for rotating the first crystal 1 around the principal axis Y and a second Bragg angle adjusting mechanism 12a for rotating the second crystal 2 around the principal axis Y are provided.

As shown in FIG. 2, each of the Bragg angle adjusting mechanisms 12a and 12b respectively has drive shafts 21a and 21b penetrating the vacuum chamber 11 and drive mechanisms 22a and 22b that rotationally drive the drive shafts 21a and 21b. And the drive shaft 21
and metal bellows 23a and 23b surrounding a and 21b. The drive mechanisms 22a and 22b are composed of, for example, stepping motors, worm gears, rotary encoders, etc., and are configured to rotate the drive shafts 21a and 21b with high precision and to accurately detect their rotation angles. Further, a magnetic fluid seal is incorporated in the rotating parts of the drive shafts 21a and 21b so that the drive shafts 21a and 21b can be rotationally driven in an airtight manner.

The metal bellows 23a and 23b are flexible, and the drive shafts 21a and 21b have a rotation range (for example, about 9).
0 °) and at least about 10 mm in the X, Y, and Z directions. Further, one end (inside) of the metal bellows 23a, 23b is airtightly connected to the vacuum container 11, and the other end is airtightly connected to the drive mechanisms 22a, 22b.

With the above-described structure, the driving device of each adjusting mechanism can be installed outside the vacuum container while the first crystal 1 and the second crystal 2 are stored in the vacuum container 11, and the expensive vacuum specifications can be achieved. It is not necessary to use a drive device (for example, a stepping motor), and adjustment and maintenance of the drive device can be facilitated.

Further, as shown in FIGS. 1 and 2, the second Bragg angle adjusting mechanism 12a supports the reflecting surface of the second crystal 2 in alignment with the principal axis Y and rotates it about the principal axis Y. ing. On the other hand, the first Bragg angle adjusting mechanism 12b is provided with a spindle rotation stage 13a, and as shown in FIG. 1, the spindle rotation stage 13a includes an X stage 13b and a Z stage 13c which are orthogonal to each other, and each stage 13b,
X guide rails 13d and Z for guiding 13c respectively
And a guide rail 13e. Furthermore, the upper surface positions of the guide rails 13d and 13e are set to the spindle rotary stage 1
It is formed so that the parallelism and the parallel distance between the first crystal 1 and the second crystal 2 do not change due to the rotation of 3a. With such a configuration, the simple operation of rotating the first Bragg angle adjusting mechanism 12b and the second Bragg angle adjusting mechanism 12a by the same angle allows the same operation as in the conventional cam type fixed position emission type two-crystal spectrometer.
The parallelism between the first crystal 1 and the second crystal 2 can be maintained, and the offset amount can be maintained constant. In addition, the first Bragg angle adjusting mechanism 12b and the second Bragg angle adjusting mechanism 12a.
Are independently driven, the parallelism and offset amount of the first crystal 1 and the second crystal 2 can be finely adjusted by adjusting their rotation angles.

Further, in the two-crystal type spectroscope 10 of the present invention, the X-axis adjusting mechanisms 14a and 14 for independently moving the Bragg angle adjusting mechanisms 12a and 12b in the X, Y and Z directions, respectively.
b, Y-axis adjusting mechanisms 16a and 16b, and Z-axis adjusting mechanism 1
8a and 18b are provided. Similar to the Bragg angle adjusting mechanism, each of these adjusting mechanisms includes, for example, a stepping motor and a driving mechanism, and the Bragg angle adjusting mechanism 12a,
The entire 12b can be moved with high precision.
With this configuration, each of the pair of adjusting mechanisms allows
If the same amount is moved, the entire amount can be moved in the X, Y, and Z directions while maintaining the parallelism and the offset amount of the first crystal 1 and the second crystal 2, and these movement amounts can be independently set. By adjusting, the relative X, Y, and Z direction positions of the first crystal 1 and the second crystal 2 can be finely adjusted.

Further, as shown in FIG. 1, each of the Bragg angle adjusting mechanisms 12a and 12b includes a first crystal 1 and a second crystal 1, respectively.
Inclination angle rotating mechanisms 24a and 24b for rotating the crystal 2 about an x axis parallel to the reflecting surface and az axis perpendicular to the reflecting surface and inner surface angle rotating mechanisms 25a and 25b are provided. These rotating mechanisms also include, for example, a stepping motor, a driving mechanism, etc., and can rotate the first crystal 1 and the second crystal 2 with high accuracy. With this configuration, it is possible to finely adjust the Bragg angles θB, the X, Y and Z axis positions, and the rotational positions θx and θy about the x axis and the z axis for each crystal in a total of 6 degrees of freedom. The crystal can be fine-tuned in all directions.

The present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0021]

As described above, the two-crystal type spectrometer of the present invention can maintain the parallelism and the offset amount of the first crystal and the second crystal by a simple operation, and can also perform the first crystal and the second crystal. It is possible to adjust the position of each of them independently.

[Brief description of drawings]

FIG. 1 is an overall front view of a two-crystal spectrometer according to the present invention.

FIG. 2 is a partial cross-sectional view taken along the line AA of FIG.

FIG. 3 is a principle diagram of a conventional cam type fixed position emission type two-crystal spectroscope.

[Explanation of symbols]

 1 1st crystal 2 2nd crystal 3 Spindle rotation stage 4 X stage 5 Z stage 6 X guide rail 7 Z guide rail 8 Incident radiation light 9 Emission radiation light 10 2 Crystal-spectrometer 11 Vacuum container 12a 2nd Bragg angle adjusting mechanism 12b 1st Bragg angle adjustment mechanism 13a Main shaft rotation stage 13b X stage 13c Z stage 13d X guide rail 13e Z guide rail 14a, 14b X axis adjustment mechanism 16a, 16b Y axis adjustment mechanism 18a, 18b Z axis adjustment mechanism 21a, 21b Drive Shaft 22a, 22b Drive mechanism 23a, 23b Metal bellows 24a, 24b Inclination angle rotation mechanism 25a, 25b Inner surface angle rotation mechanism

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Motoharu Marushita 1 Shin-Nakahara-cho, Isogo-ku, Yokohama-shi, Kanagawa Ishi Kawashima Harima Heavy Industries Co., Ltd. Yokohama Engineering Center

Claims (3)

[Claims] 1. In a XYZ orthogonal coordinate system, a vacuum container containing a first crystal and a second crystal and held in a vacuum, and a first Bragg angle adjusting mechanism for rotating the first crystal around a main axis Y. Second rotation of the second crystal about the principal axis Y
Bragg angle adjusting mechanism and X-axis adjusting mechanism for moving each Bragg angle adjusting mechanism independently in the X, Y, and Z directions, Y
The second Bragg angle adjusting mechanism is provided with an axis adjusting mechanism and a Z-axis adjusting mechanism.
The first Bragg angle adjusting mechanism includes a spindle rotation stage, and the spindle rotation stage includes an X stage and a Z stage which are orthogonal to each other.
Each stage has a stage and an X guide rail and a Z guide rail that guides each stage, and the upper surface position of each guide rail changes the parallelism and the parallel distance between the first crystal and the second crystal due to the rotation of the spindle rotation stage. A two-crystal spectroscope characterized in that it is formed so as not to do so. 2. Each Bragg angle adjusting mechanism has a drive shaft that penetrates through the vacuum container, a drive mechanism that airtightly drives the drive shaft, and a metal bellows that surrounds the drive shaft. The two-crystal spectroscope according to claim 1, wherein the two-crystal spectroscope has flexibility and one end is airtightly connected to the vacuum container and the other end is airtightly connected to the drive mechanism. 3. Each Bragg angle adjusting mechanism has a first
The tilt angle rotating mechanism and the inner surface angle rotating mechanism for respectively rotating the crystal and the second crystal around an x-axis parallel to the reflecting surface and a z-axis perpendicular to the reflecting surface, further comprising an internal-angle rotating mechanism. Crystal spectrometer.