JPH08320191A - Heat exchange system - Google Patents

Abstract

PURPOSE: To abruptly and accurately control the temperature with excellent followability by setting a first heat exchanger to a sufficiently lower or higher set temperature than a target temperature, driving first, second heat exchangers in the case of cooling or heating to the target temperature, and operating a second heat exchanger when the target temperature is stabilized. CONSTITUTION: The set temperature of a first heat exchanger 4 is set to sufficiently lower or higher than a target temperature T0, and the set temperature of a second heat exchanger 6 is so set as to become substantially coincident with the target temperature T0. In the case of cooling or heating to the temperature T0, the first and second exchangers are simultaneously used, and in the case of stabilizing at the temperature T0, the exchanger 6 is used. In order to stabilize the temperature, the thermomodule of the exchanger 6 so formed as to vary the cooling or heating by supplying a current may be used. Thus, the temperature can be efficiently, rapidly and accurately controlled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat exchange system, and more particularly to a heat exchange system capable of performing high speed and highly accurate temperature control.

[0002]

2. Description of the Related Art A heating / cooling device for controlling the temperature of a semiconductor processing liquid requires extremely accurate temperature control and stabilization of the processing liquid to a target temperature in a short time. In this case, it is required that the temperature rises and falls rapidly.

On the other hand, in order to maintain the target temperature with high accuracy, the purpose can be achieved by using a heat exchanger having a set temperature close to the target temperature, but it takes time to reach the target temperature and the followability There is a problem that is bad.

For example, as shown in a system diagram and a control flow chart of the heat exchange system in FIGS. 9 and 10, in a processing tank 101, in a circulation path 103 for circulating a processing liquid,
Thermo module 106 for cooling or heating the treatment liquid
And a heat exchanger 104 that controls the temperature on the other side of the thermo module, and there is a direct heat exchange system that controls the temperature of the processing liquid in the processing tank 101. In this method, since the part to be heated and cooled in the device has a large heat capacity,
As shown in FIG. 10, it takes time to reach the target temperature T0, and there is a problem that the followability is poor. Therefore, a large number of heat exchangers may be used in order to perform rapid temperature control, but in order to sufficiently reduce the time, it is necessary to use 4 to 5 heat exchangers, which results in a large size. There is a problem of high costs.

Further, as shown in the system diagram and control flowchart of the heat exchange system in FIGS. 11 and 12,
A heat exchanger 104 that cools or heats the treatment liquid is disposed in a circulation path 103 that circulates the treatment liquid in the treatment tank 101, and the temperature of the heat exchanger 104 is set to the temperature of the heat medium in the constant temperature bath 111. There is an indirect heat exchange method in which the temperature of the processing liquid in the processing tank 101 is indirectly controlled by controlling the temperature. In this method, as shown in FIG. 12, the target temperature cannot be accurately maintained, and if the target temperature is to be maintained with high accuracy, the purpose is to use a heat exchanger having a set temperature close to the target temperature. Although achieved, this method also has a problem that it takes time to reach the target temperature and the followability is poor.

[0006]

As described above, there is a demand for a low-cost heat exchanging system that can perform temperature control with good rapidity and high accuracy, which can follow the temperature change. There was no device that could do it.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a heat exchange system which can perform temperature control with good followability, rapidness and high accuracy.

[0008]

The first feature of the present invention is to:
A treatment tank, a circulation passage for circulating a treatment liquid in the treatment tank, and first and second heat exchangers arranged in the circulation passage for cooling or heating the treatment liquid circulating in the circulation passage. And the first heat exchanger is set to a first preset temperature that is sufficiently higher or lower than the target temperature to rapidly heat or cool the treatment liquid to the target temperature. That is, the first and second heat exchangers are driven when cooling or heating to the target temperature, and the second heat exchanger is operated when stabilizing at the target temperature.

Preferably, the second heat exchanger is composed of a thermo module constructed so that its heating or cooling capacity can be changed by supplying an electric current.

A second feature of the present invention is that a treatment tank, a circulation passage for circulating a treatment liquid in the treatment tank, and a cooling treatment liquid disposed in the circulation passage and circulating in the circulation passage are cooled. Or a first and a second heat exchanger for heating, wherein the first heat exchanger is set to a first preset temperature that is sufficiently higher or lower than the target temperature to target the treatment liquid. Is configured to heat or cool rapidly to temperature,
Upon stabilization at the target temperature, the cooling and heating functions of the first and second heat exchangers are respectively activated as needed.

Preferably, the second heat exchanger is composed of a thermo module configured so that its heating or cooling capacity can be changed by supplying an electric current.

Preferably, the second heat exchanger is composed of a heater whose heating capacity is variable by the supply of electric current.

A third feature of the present invention is that a treatment tank, a circulation passage for circulating a treatment liquid in the treatment tank, and a treatment liquid arranged in the circulation passage and cooled in the circulation passage are cooled. Or a first and second heat exchanger for heating, wherein the first heat exchanger is set to a first preset temperature sufficiently higher than a target temperature, and the second heat exchanger is provided. The vessel is
It is set to a second set temperature which is sufficiently lower than the target temperature, and when heating or cooling to the target temperature, the first or second heat exchanger is driven, respectively, to stabilize at the target temperature. Is characterized in that the first and second heat exchangers are driven alternately.

A fourth feature of the present invention is that a treatment tank, a circulation passage for circulating a treatment liquid in the treatment tank, and a treatment liquid disposed in the circulation passage and circulating in the circulation passage. A first and a second heat exchanger for cooling or heating,
Desirably, the first heat exchanger is composed of a heater whose heating capacity is generated by supplying an electric current, and the second heat exchanger is set to a set temperature sufficiently lower than a target temperature, and
When heating to the target temperature, the first heat exchanger is driven, when cooling to the target temperature, the second heat exchanger is driven, and when stabilizing at the target temperature, the first and the second heat exchangers are driven. The second heat exchangers are driven alternately.

[0015]

According to the first aspect, the set temperature of the first heat exchanger is set sufficiently lower or higher than the target temperature, and the set temperature of the second heat exchanger is set substantially equal to the target temperature. Set so that they coincide with each other, and use the first and second heat exchangers at the same time when cooling or heating to the target temperature, and use the second heat exchanger when stabilizing at the target temperature. As a result, it becomes possible to perform temperature control more efficiently, at high speed, and with high accuracy.

Further, for this stabilization, it is possible to easily perform control with high accuracy by using a thermo module configured so that the heating or cooling capacity can be changed by supplying an electric current.

According to the second aspect of the present invention, the first heat exchanger is set to a first preset temperature higher than the target temperature, and the second heat exchanger is substantially equal to the target temperature. The first and second heat exchangers are used for cooling or heating from the initial temperature to the target temperature, and the first and second heat exchangers are cooled for stabilization at the target temperature. Alternatively, it becomes possible to easily perform high-speed and stable temperature control by operating the heating functions respectively as needed.

Desirably, the second heat exchanger can be controlled more easily by using a contact heat source such as a heater or a thermomodule.

According to a third aspect of the present invention, the first heat exchanger is set to a first set temperature higher than the target temperature, and the second heat exchanger is set to a temperature higher than the target temperature. It is set to a low second set temperature, the first or second heat exchanger is used for cooling or heating from the initial temperature to the target temperature, and the first and second heat exchangers are used for stabilization at the target temperature. By alternately driving the exchangers, high-speed and stable temperature control can be easily performed.

Further, according to a fourth aspect of the present invention, the first heat exchanger is composed of a heater having a heating ability by the supply of an electric current, and the second heat exchanger is set sufficiently lower than a target temperature. The first heat exchanger is driven when the temperature is set to the target temperature, and the second heat exchanger is driven when the temperature is cooled to the target temperature, and stabilization at the target temperature is achieved. In this case, if the first and second heat exchangers are driven alternately, the range of usable initial temperatures is increased, and the target temperature is universally and easily controlled at high speed and stably. It becomes possible.

The first heat exchanger in the first and second aspects of the invention, the first and second heat exchangers in the third aspect of the invention, and the second heat in the fourth aspect of the invention. In an exchanger or the like, the drive is performed by controlling the flow of the heat exchanger medium flowing through it, and in particular, the switching of driving / stopping of the heat exchanger can be instantaneously performed by a valve operation. The use of the device enables temperature control with excellent controllability at extremely high speed.

Further, in the above-mentioned construction, when a liquid is used as the heat medium and a heat exchanger constructed so as to circulate the liquid is used, particularly high-speed temperature control with excellent controllability is possible.

[0023]

The first embodiment of the present invention will now be described in detail with reference to the drawings.

As shown in the system diagram of FIG. 1, this heat exchange system is provided with a treatment tank 1, a circulation passage 3 for circulating a treatment liquid 2 in the treatment tank 1, and a circulation passage 3. Is
A first heat exchanger 4 for rapidly cooling or heating the treatment liquid 2 circulating in the circulation path 3 to a desired temperature; a first temperature sensor 5 for detecting the temperature in the treatment tank 1; A second heat exchanger 6 comprising a thermomodule for controlling the temperature of the treatment liquid 2 cooled or heated to the desired temperature, the first and second heat exchangers being provided. 4 and 6 are arranged so that they can be driven alternately or simultaneously. A first temperature controller including a thermo module control device 7a and a valve control device 7b that control the first heat exchanger 4 and the second heat exchanger 6 in accordance with the output of the first temperature sensor 5, respectively. Equipped with 7.

The circulation path 3 is equipped with a new liquid tank 8 for supplying the new liquid into the processing tank 1. The temperature of the new liquid tank 8 is constantly detected by the third temperature sensor 9. ing. The output of the third temperature sensor is input to the second temperature controller 10 together with the output of the first temperature controller 7, and the second temperature controller 10 controls the temperature of the first heat exchanger 4. The constant temperature control device 12 for controlling the temperature of the constant temperature bath 11 is controlled, and the temperature is adjusted for the next operation when the first heat exchanger 4 is stopped. This constant temperature bath 11
The temperature of the heat exchange liquid inside is determined by the temperature of the new liquid tank, that is, the output of the third temperature sensor and the target temperature T0,
When T3> T0, T2 is set to T0> T2,
The larger the difference T0-T2, the more the heat exchange capacity of the first heat exchanger increases, and the treatment liquid 2 reaches the target temperature rapidly. Reference numeral 13 is a second temperature sensor for detecting the temperature T2 of the constant temperature bath 11. Further, the first heat exchanger 4 circulates the heat exchange liquid in the constant temperature bath 11 through the valve device 14 including the first and second valves V1 and V2. Here, the first heat exchanger 4 uses a SiC substrate as a heat exchange plate, and the heat resistance of the heat exchanger is 0.01 ° C./W.
It is a degree.

Here, the amount of the processing liquid is 100 liters, the new liquid temperature T3 is 30 ° C., and the target temperature T0 of the processing liquid is 20 ° C.
And

The first heat exchanger has cooling / heating of 1600 W / 700 W, and
The second heat exchanger has a maximum of 4 cooling / heating
It consists of 00W / 1300W. Further, the set temperature T20 of the cooling heating constant temperature bath 11 of the first heat exchanger is 10 ° C., and the liquid amount in the constant temperature bath is 10 liters.

Next, the heat exchange steps using this heat exchange system will be described in detail with reference to the time chart shown in FIG.

First, the cooling mode is entered at the same time as the replacement of the old solution and the new solution, and the thermomodule is set to the cooling mode in the second heat exchanger. At the same time, the first valve V1 of the valve device is opened and the second valve is opened. V2 is closed, the heat exchange liquid is circulated from the constant temperature bath 11 to the first heat exchanger 4, and the treatment liquid flowing through the circulation path 3 is rapidly cooled from T3 to T0.

When the output of the first temperature sensor 5 reaches the target temperature T0, the cooling mode shifts to the control mode, the first valve V1 of the valve device is closed, and the second valve V2 is opened. As the heat exchange liquid circulates in the lever circulation path, the first heat exchanger 4 becomes inoperative.

On the other hand, in the second heat exchanger 6, the supply current to the thermo module is automatically controlled to stably control the temperature of the treatment liquid in the circulation path.

Then, the old liquid and the new liquid are replaced again,
When the measured temperature T3 of the third temperature sensor 9 is higher than the target temperature T0, the cooling mode is entered simultaneously with the replacement of the old liquid and the new liquid, and the second heat exchanger 6 and the first heat exchanger 4 are connected.
Simultaneously operate to bring the new liquid to the target temperature T0 promptly.

In this way, it becomes possible to stabilize the temperature at a high speed when the new liquid is supplied to the processing tank. here,
The time required for stabilization is 37 minutes, and the stabilization temperature is 20 ± 0.1 ° C., which enables extremely highly accurate control.

Although the control mode of the constant temperature bath of the first heat exchanger is switched from the cooling mode to the control mode in the above-mentioned embodiment, any one of them may be left as it is. If the cooling mode is left as it is, the time to reach T1 = T0 can be further shortened. Further, if the control mode is left as it is, the time to reach T1 = T0 is slightly extended, but it is possible to prevent the excessive decrease of T2.

The set temperature of the constant temperature bath may be determined as follows. That is, when T3> T0, T20 = T0-a
(T3 -T0) When T3 <T0, T20 = T0 + a (T0 -T3) However, it may be appropriately determined as a constant of a> 0, and T3 = T0.
In this case, T20 = T0 is sufficient.

Although the second heat exchanger is composed of a thermo module in the above-mentioned embodiment, it is not limited to the thermocodule, and like the first heat exchanger, the heat exchange using the liquid as the heat medium is carried out. It can be appropriately changed by using a container or a heater.

Next, a second embodiment of the present invention will be described. This heat exchange system is shown in FIG.
It is constructed in exactly the same way as the
The control is performed in exactly the same manner as in the first embodiment, but at the time of stabilization, the first and second heat exchangers are simultaneously activated as needed without constantly deactivating the first heat exchanger. As a result, even if there is a rapid change in temperature, it can be quickly stabilized.

In this case as well, the second heat exchanger is composed of a thermo module, but it is not limited to the thermo module and may be a heat exchanger using a liquid as a heat medium like the first heat exchanger. , A heater may be used as appropriate.

Next, a third embodiment of the present invention will be described. This heat exchange system has a first heat exchanger 26 set to a temperature T2 lower than the target temperature T0 and a temperature T3 higher than the target temperature T0 as shown in the system diagram of FIG.
By alternately operating the second heat exchanger 24 set to, the temperature is rapidly lowered to and maintained at the target temperature.

That is, similar to the heat exchange system described in the first embodiment, the treatment tank 1, the circulation passage 3 for circulating the treatment liquid 2 in the treatment tank 1, and the circulation passage 3 are arranged. In the processing tank 1, a first heat exchanger 26 for rapidly cooling the processing liquid 2 circulating in the circulation path 3 to a desired temperature and a second heat exchanger 24 for heating are provided. A first temperature sensor 5 that detects a temperature, and a first valve control device 27a that controls the first heat exchanger 26 and the second heat exchanger 24 in accordance with the output of the first temperature sensor 5, respectively. And a temperature controller 27 having a second valve control device 27b.

The first and second heat exchangers are provided with first and second constant temperature baths 21 and 22, respectively, and are driven and controlled by the first and second valve devices 34a and 34b, respectively. The temperature of the heat exchange liquid in the first and second constant temperature baths 21 and 22 is the temperature of the new liquid, that is, the initial temperature T1 = 30.
C. and the target temperature T0 = 20.degree. C., where T20 = 10.degree. C. and T30 = 30.degree. Also,
The first heat exchanger 26 has first and second valves V11, V
The first constant temperature chamber 2 through the first valve device 34a composed of 12
The heat exchange liquid 1 is circulated. Furthermore, the second heat exchanger 2
Reference numeral 4 denotes a heat exchange liquid 10 in the second constant temperature bath 22 via a second valve device 34b including first and second valves V21 and V22.
Circulating liters. Here, the first and second heat exchangers use a SiC substrate as a heat exchange plate, and the heat resistance of the heat exchanger is about 0.01 ° C./W.

The first heat exchanger has heating of 16
The second heat exchanger has a cooling power of 1600W.

Next, the heat exchange steps using this heat exchange system will be described in detail with reference to the time chart shown in FIG.

First, the cooling mode is set at the same time as the initial setting, for example, the replacement of the old liquid and the new liquid, and the first heat exchanger 26
The first valve V11 is opened, the second valve V12 is closed to enter the heat exchange operation state, and the rapid cooling step is entered. On the other hand, at this time, in the second heat exchanger 24, the first valve V21 of the valve device is closed, the second valve V22 is opened, and the heat exchange is stopped.

The first temperature sensor detects that the temperature of the treatment liquid has reached the target temperature and is slightly deviated from the target temperature, and the valve device is switched by the operation of the valve controller based on the output of the temperature controller 27. The operation of the first and second heat exchangers is automatically switched and repeated to maintain a stable temperature with high accuracy.

As a fourth embodiment, as shown in FIG. 5, the second heat exchanger 24 constituting the heater section in the second embodiment is replaced with a heat exchanger including a heater 44, and the temperature is changed. It may be controlled by the heating control device 27a 'controlled by the controller 27. Here, the first heat exchanger 26
Is the temperature T lower than the target temperature T0, as in the second embodiment.
It is set to 2, and water is used as the heat medium.

Next, as a modification of the third embodiment, as shown in FIG. 6, instead of the first and second heat exchangers,
The first heat exchange section 20a as a cooling section is formed on one side of the heat exchange section 20, and the second heat exchange as a heating section is arranged so as to face the first heat exchange section with respect to the circulation path 3. The part 20b may be formed. These 1st and 2nd heat exchange parts 20a and 20b are controlled by the 1st and 2nd valve devices 34a and 34b, respectively. Other parts are formed in the same manner as in the second embodiment, and the same parts are designated by the same reference numerals. This makes it possible to greatly simplify the device.

As still another modification, as shown in FIG. 7, one pump P is provided, valve devices 54a and 54b are arranged upstream and downstream of the pump, and heat exchangers having two set temperatures are provided. You may make it circulate by switching alternately to each corresponding heat exchange part. 27 is a temperature controller and 34 is a valve control device.

In addition, the fourth embodiment described with reference to FIG.
The same heat exchange section may be modified so that heating and cooling are alternately performed, and the configuration may be as shown in FIG. With this configuration, the heat exchange section has an extremely compact structure.

In the above embodiment, the heat exchange liquid is controlled by opening and closing the valve, but in addition to this, a throttle valve, a flow rate controllable pump, or the like can be appropriately changed. .

Further, although the heat exchange liquid is used in the above embodiment, a gas (heat exchange medium) may be circulated.

[0052]

As described above, according to the heat exchange system of the present invention, it is possible to perform temperature control with rapid and high accuracy.

[Brief description of drawings]

FIG. 1 is a diagram showing a heat exchange system according to first and second embodiments of the present invention.

FIG. 2 is a diagram showing a time chart of switching by the heat exchanger system according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a heat exchange system according to a third embodiment of the present invention.

FIG. 4 is a diagram showing a time chart of switching by the system.

FIG. 5 is a diagram showing a heat exchange system according to a fourth embodiment of the present invention.

FIG. 6 is a diagram showing a heat exchange system of a modification of the third embodiment of the present invention.

FIG. 7 is a diagram showing a heat exchange system of a modified example of the third embodiment of the present invention.

FIG. 8 is a diagram showing a heat exchange system of a modified example of the fourth embodiment of the present invention.

FIG. 9 is a diagram showing a conventional heat exchange system.

FIG. 10 is a diagram showing a time chart of switching by the system.

FIG. 11 is a diagram showing a conventional heat exchange system.

FIG. 12 is a diagram showing a time chart of switching by the system.

[Explanation of symbols]

 1 Treatment Tank 2 Treatment Liquid 3 Circulation Path 4 Second Heat Exchanger 5 First Temperature Sensor 6 Second Heat Exchanger 7 First Temperature Controller 8 New Liquid Tank 9 Third Temperature Sensor 10 Second Temperature controller 11 Constant temperature bath 12 Constant temperature control device 13 Second temperature sensor 21 First constant temperature bath 22 Second constant temperature bath 24 Second heat exchanger 26 First heat exchanger 27a First valve control device 27b Second valve control device 27 Temperature controller 21 First constant temperature bath 22 Second constant temperature bath 34a First valve device 34b Second valve device 34 Valve control device 54a First valve device 54b Second valve device 101 Processing Tank 103 Circulation Path 104 Heat Exchanger 106 Thermo Module 111 Constant Temperature Tank

Continued Front Page (72) Inventor Hideaki Kaito 2597 Shinomiya, Hiratsuka, Kanagawa Komatsu Electronics Co., Ltd.

Claims (7)

[Claims] 1. A processing tank, a circulation path for circulating a processing liquid in the processing tank, and first and second cooling paths for cooling or heating the processing solution disposed in the circulation path and circulating in the circulation path. And a second heat exchanger, wherein the first heat exchanger is set to a first preset temperature sufficiently higher or lower than a target temperature to rapidly heat or cool the processing liquid to the target temperature. The first and second heat exchangers are driven when cooling or heating to the target temperature, and the second heat exchanger is operated when stabilizing at the target temperature. A heat exchange system characterized by being configured as follows. 2. The heat exchange according to claim 1, wherein the second heat exchanger is a thermo module configured to have a variable heating or cooling capacity by supplying an electric current. system. 3. A processing tank, a circulation path for circulating a processing liquid in the processing tank, and first and first cooling circuits arranged in the circulation path for cooling or heating the processing liquid circulating in the circulation path. And a second heat exchanger, wherein the first heat exchanger is set to a first preset temperature sufficiently higher or lower than a target temperature to rapidly heat or cool the processing liquid to the target temperature. In addition, the cooling and heating functions of the first and second heat exchangers are configured to be activated as necessary during stabilization at a target temperature. Heat exchange system. 4. The heat exchange according to claim 3, wherein the second heat exchanger is composed of a thermo module configured so that the heating or cooling capacity can be changed by supplying an electric current. system. 5. The heat exchange system according to claim 3, wherein the second heat exchanger includes a heater configured to have a variable heating capacity by supplying an electric current. 6. A processing tank, a circulation path for circulating a processing solution in the processing tank, and first and first cooling circuits arranged in the circulation path for cooling or heating the processing solution circulating in the circulation path. Two heat exchangers, wherein the first heat exchanger has a first temperature sufficiently higher than a target temperature.
And the second heat exchanger is set to a second preset temperature sufficiently lower than the target temperature, and when heating to the target temperature, the first heat exchanger is set. The second heat exchanger is driven during cooling, and the first and second heat exchangers are driven alternately during stabilization at the target temperature. A heat exchange system characterized in that 7. A processing tank, a circulation path for circulating a processing solution in the processing tank, and first and second cooling paths for cooling or heating the processing solution arranged in the circulation path and circulating in the circulation path. And a second heat exchanger, wherein the first heat exchanger is composed of a heater having a heating capacity by supplying an electric current, and the second heat exchanger is set to a set temperature sufficiently lower than a target temperature. At the same time, when heating to the target temperature, the first heat exchanger is driven, when cooling to the target temperature, the second heat exchanger is driven, and when stabilizing at the target temperature, the first heat exchanger is driven. A heat exchange system characterized in that the first and second heat exchangers are driven alternately.