JPH08327570A - Sample holder - Google Patents

Abstract

PURPOSE: To provide a sample holder which allows accurate fine adjustment of the height position of an analytical surface where analysis of a sample surface is performed using an analytical device which surface analysis, etc. CONSTITUTION: This sample holder 1 used in observing an analytical surface such as the cross section of a sample is provided with a vertical fine adjustment device 5 consisting of a male screw for adjusting the height of a sample S from the lower surface of a base 11, and with a sample stand 2 mounted on the upper end face of the adjustment 5. The sample S is placed on the sample stand 2 and is held in position while pressing against a fixing plate 14 with a sample retaining plate 18 being pressed by the resilient force of a spring 16, and the vertical fine adjustment device 5 is finely turned so that the analytical surface of the sample S mounted has its horizontal plane set to a reference height-regulating thin plate 15 for the adjustment of its height.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a sample holder, and more particularly, to enabling the height position of the surface of a sample to be accurately adjusted by using an analyzer for surface analysis. It is a thing.

[0002]

2. Description of the Related Art First, an example of an analyzer capable of surface analysis will be described with reference to FIGS.
FIG. 4 is a conceptual configuration diagram of a current Auger electron spectroscopic analyzer which is one of the analyzers, FIG. 5 is an adjusting device for adjusting the set position of the sample set on the sample stage, and FIG. 6 is FIG. 7 is an explanatory diagram of the error generation in the depth direction analysis due to the improper setting position of the sample set in the Auger electron spectroscopic analysis device, and FIG. 7 shows the error occurrence due to the change of the setting position of the sample set in the Auger electron spectroscopic analysis device. FIG. 8 is a schematic diagram showing a state in which a high-height sample is mounted on a current sample holder for setting in the Auger electron spectroscopy analyzer shown in FIG. 4. FIG. 9A is a plan view of the same, FIG. 9B is a cross-sectional side view taken along the line AA of FIG. 9A, and FIG. 9A is a height of a current sample holder for setting in the Auger electron spectroscopic analyzer shown in FIG. A sample with a low FIG. A is a plan view of the same, FIG. B is a sectional side view taken along the line AA in FIG. A, and FIG. 10 shows a magnetic head device as an example of a sample to be surface-analyzed. 11 is a perspective view, and FIG. 11 is FIG.
FIG. 6 is a cross-sectional side view of a current sample holder equipped with the magnetic head device shown in FIG.

First, referring to FIG. 4, the structure and operation of an Auger electron spectroscopic analyzer capable of observing or analyzing a surface such as a cross section (hereinafter simply referred to as "analysis") will be described. Examples of the Auger electron spectroscopic analyzer 50 include JAMP-30 type manufactured by JEOL Ltd. When the Auger electron spectroscopic analyzer 50 irradiates a sample, which is a substance to be analyzed, with electrons, secondary electrons are emitted from a surface of the sample to be analyzed (hereinafter simply referred to as “analysis surface”) along with characteristic X-rays. , Reflected electrons, and Auger electrons are emitted. Since the Auger electrons have energy specific to the type of element on the solid surface, elemental analysis of the sample can be performed by measuring the energy.

As shown in FIG. 4, the Auger electron spectroscopy analyzer 50 is provided with an analysis chamber 51 and a sample exchange chamber 52 arranged adjacent to the analysis chamber 51 for exchanging samples. . Titanium getter pump 5 in analysis room 51
3. An analysis room ion pump 55 consisting of a baking heater 54 is provided, and the inside of the analysis room 51 is 10 ^{−6 to} 1 during analysis.
An ultrahigh vacuum of 0 ^-7 Pa is used. A sample stage 56, on which the sample holder 10 described later is installed, is provided in the analysis chamber 51. The sample stage 56 is adjusted by the setting position adjusting device 80 for accurately adjusting the setting position of the sample shown in FIG. It is configured so that it can be moved in the X and Y axis directions, the vertical Z axis direction, the rotation direction around the Z axis, and the tilt direction in which the sample surface is tilted from the horizontal plane.

An electron gun 57 for generating an electron beam for Auger electron excitation, a secondary electron detector 58 for detecting a signal emitted from the sample S, an Auger electron detector 59 and a sample are provided in the analysis chamber 51. Ion gun 6 for sputtering S
0 appears, and these action center axes intersect at one point (analysis point) on the sample surface using a standard substance (for example, a thermal oxide film SiO ₂ formed on a silicon wafer) on the sample stage 56. It is adjusted in advance. During normal analysis, the position of the sample stage 56 is adjusted so that the sample surface to be analyzed is located at this analysis point.

The electron gun 57 has an electron gun chamber ion pump 61.
The electron beam emitted from the electron gun 57, which is evacuated by the electron gun chamber ion pump 61, is irradiated onto the sample S on the sample stage 56 via the Faraday cup 62, and the auger emitted from the sample S is emitted. The electrons are detected by the Auger electron detector 59, amplified by the preamplifier 63, and the required measurement is performed.

Between the analysis chamber 51 and the sample exchange chamber 52,
An opening / closing valve 64 is provided, and the opening / closing valve 64 connects and disconnects the analysis chamber 51 and the sample exchange chamber 52. A turbo molecular pump 66 and a rotary pump 67 are connected to the sample exchange chamber 52 via a valve 65.
By these, the sample exchange chamber 52 is depressurized to a vacuum of about 10 ⁻⁶ Pa.

A sample exchanging device 68 is disposed in the sample exchanging chamber 52. By opening a door (not shown) of the sample exchanging chamber 52, a sample exchanging rod 69 of the sample exchanging device 68 is used to externally open the sample exchanging device 68. The sample holder 10 can be attached and detached. The sample exchange device 68 is configured to exchange the sample holder 10 with respect to the sample stage 56 by being operated from the outside by remote operation using a magnet or the like with the door closed.

Further, the Auger electron spectroscopic analyzer 50 is appropriately provided with a Pirani gauge 70, an ion gauge 71, and a valve 72.

When replacing the sample holder 10, the inside of the sample exchange chamber 52 is set to atmospheric pressure and the door of the sample exchange chamber 52 is opened.
The sample exchange rod 69 of the sample exchange device 68 is attached to the tip end of the sample holder 10 by using the sample exchange rod attachment female screw (not shown) of the sample holder 10 to be newly exchanged, and it is put into the sample exchange chamber 52 and the door is closed. Next, after decompressing the sample exchange chamber 52, the open / close valve 64 between the sample exchange chamber 52 and the analysis chamber 51 is opened, and the sample exchange rod 69 of the sample exchange device 68 is remotely operated through the open / close valve 64. The sample holder 10 is extended into the analysis chamber 51, and the sample holder 10 is placed on the sample stage 56. After that, the sample exchange rod 69 is retracted into the sample exchange chamber 52, the opening / closing valve 64 is closed, and the inside of the analysis chamber 51 is depressurized to an ultrahigh vacuum. Further, when the sample holder 10 is taken out from the sample stage 56, the procedure reverse to the above procedure is performed.

Next, the structure of the sample holder 10 used in the Auger electron spectroscopy analyzer 50 will be described with reference to FIG. The sample holder 10 has a substantially rectangular outer shape when viewed from above, and a base 1 on which a horizontal surface 11A is formed.
1 and one end thereof, a vertical surface 12A is formed with respect to a horizontal surface 11A of the base 11, and the base 12 and the base 11 are raised.
A spring fixing block 13 for fixing the base end of the coiled spring 16 is screwed to the other end of the. The vertical surface 12 is formed on the upper surface of the base 12.
A vertical surface 14A forming the same vertical surface as A is formed, and a sample fixing plate 14 composed of a U-shaped height regulating thin plate 15 formed in parallel with the horizontal surface 11A of the base 11 is integrated. Has been formed. The height control thin plate 15
Has a thickness of about 0.2 to 0.4 mm. Further, the base of the rod 17 on which the spring 16 is mounted is loosely fitted in the central portion of the spring fixing block 13, and the tip of the rod 17 has a vertical surface 18A parallel to the vertical surface 12A of the sample fixing plate 14. The formed sample holding plate 18 is fixed, and the sample holding plate 18 is constantly pressed toward the sample fixing plate 14 by the elastic force of the spring 16.

In FIG. 8, a sample exchange rod mounting female screw 19 is formed at the center of the left end of the sample holder 10.
A sample exchange rod 69 (FIG. 4) is screwed into and attached to the female screw 19 for attaching the sample exchange rod, and as described above, the sample holder 10 on which the sample S is attached is attached to the Auger electron spectroscopy analyzer 50.
The sample exchange chamber 52 can be set on the upper surface of the sample stage 56 or can be taken out therefrom.

Reference numeral Sa is a sample. When the sample Sa is mounted on the sample holder 10, the sample holding plate 18 is moved to the right so as to contract the spring 16 in FIG. 8, that is, the sample is fixed. Open from the plate 14, insert the sample Sa between them, and attach the sample holding plate 18 to the spring 1
6 is moved toward the sample fixing plate 14 by the elastic force of 6, and the vertical surface 12A of the base 12 and the vertical surface 14 of the sample fixing plate 14 are moved.
It is sandwiched and fixed between a vertical surface integrally formed from A and the vertical surface 18A of the sample pressing plate 18. In this case, the spring 16 expands and contracts depending on the thickness of the sample Sa. Further, when mounting the sample Sa to be analyzed on the sample holder 10, it is desirable to mount the analysis surface on the upper side and the analysis surface on the same plane as the upper surface of the height regulating thin plate 15. However, when the width of the analysis surface of the sample is wider than the height regulating thin plate 15, the analysis surface is set to the height regulating thin plate 15.
The width of the analysis surface of the sample is brought into contact with the lower surface of the
If the width is smaller than the width of the U-shape of 5, the analysis surface is mounted so as to face the U-shape of the height-regulating thin plate 15 and be flush with the upper surface of the height-regulating thin plate 15. The reason for this will be described later.

The analysis surface of the sample on the sample holder 10 set on the sample stage 56 is subjected to a predetermined set surface adjustment by adjusting the sample stage 56. Not only is the sample stage 56 movable in the X-axis, Y-axis, and Z-axis directions, but the sample stage 56 is provided with a table rotatable about the Z-axis, and the upper surface of the table is the sample. It is set to a predetermined setting position of the sample holder 10 of the stage 56. Sample holder 1 on the sample stage 56
After 0 is set, the sample exchange rod 69 is rotated in a direction to unscrew the screw so as to be unscrewed from the female screw 19 for mounting the sample exchange rod, and the sample exchange rod 69 is moved to the sample exchange chamber as shown in FIG. Retreat to 52.

The analysis surface of the sample on the sample holder 10 set on the sample stage 56 is the Auger electron spectroscopic analyzer 5.
As shown in FIG. 5, the adjustment device 80 provided in the Auger electron spectroscopic analysis device 50 itself is positioned so as to be located at the analysis point 0. This adjustment of the set position is a time-consuming operation and is performed in the following procedure.

Using a scanning electron microscope (SEM) attached to the Auger electron spectroscopic analyzer 50, an appropriate mark (for example, dust adhering to the surface, scratches, etc.) can be seen from the analysis surface of the sample.
Find out what becomes. Using this mark as a reference, the sample is tilted in the range of ± 5 ° around the tilt angle at the time of analysis, the height is adjusted while observing the moving SEM image, and this is repeated until the SEM image does not move. That is, when the analysis surface of the sample is not on a predetermined analysis point, tilting the sample moves the analysis surface in the Z-axis direction.
If this disappears, it can be considered that the position adjustment has been performed.

For actual position adjustment, the X-axis knob 81, the Y-axis knob 82, the Z-axis knob 83, and the tilt knob 84 of the adjusting device 80 are used to move the sample stage 56 to the X-axis and Y-axis, respectively.
It is performed by moving in the axis, Z axis, and tilt directions. For example, when analyzing the sample with the analysis surface inclined by 40 °,
First, with the tilt knob 84, the sample stage 56 is moved to 35 ° (4
(0 ° -5 °), observe the SEM image, and align with the X-axis knob 81 and the Y-axis knob 82 so that the mark comes to the center (analysis point). Next, the sample stage 56 is tilted at 45 ° (40 ° + 5 °) by the tilt knob 84, and the deviation of the SEM image is adjusted by the Z-axis knob 83 for adjusting the height. This operation must be repeated at least ten or more times, and finally the SEM magnification is set to 3000 times so that when the tilt angle is moved, the SEM image does not move in agreement with the analysis point. Since the height changes in the process of this operation, it is necessary to always adjust the focus and the astigmatism to make the image clear.

By the way, there is depth direction analysis as an analysis method peculiar to Auger electron spectroscopy. This is the sample S using the ion gun 60 together with ion etching.
The position adjustment is particularly important when performing this analysis, and if the sample position does not match the analysis point, the following adverse effects occur.

Now, let us consider analysis of a sample S having two types of layers having different compositions of A and B in the thickness direction as shown in FIG. 6A. FIG. 6B shows a state in which the analysis surface position of the sample S coincides with the analysis point of the Auger electron spectroscopic analysis device 50. In this case, as shown in FIG. 6C, the composition of A and B at a certain depth. It is possible to obtain a profile that clearly shows the difference.

However, as shown in FIG. 6D, when the analysis surface position of the sample S does not coincide with the analysis point of the Auger electron spectroscopy analyzer 50 (in the example of FIG. 6D, the sample S is relative to the analysis point). However, the irradiation of the ion beam and the irradiation of the electron beam obliquely does not coincide with each other on the analysis surface of the sample S, and the electron beam irradiates the edge portion of the etching by the ion beam. . As a result, the profile has a reduced depth resolution as shown in FIG. 6E, and accurate information cannot be obtained.

FIG. 7 is an explanatory view schematically showing the occurrence of this error. As an example, as shown in FIG. 7, the electron beam is vertically irradiated with a width of 100 μm, and the ion beam is irradiated at an angle inclined by 35 ° from the horizontal direction, and 5
An etching surface having a width of 00 μm is formed. Here, as shown by (0) in FIG. 7, when the analysis surface of the sample is located on a predetermined analysis point, the electron beam is 50
It is located at the center of the etched surface having a width of 0 μm.

As shown by (+) in FIG. 7, when the analysis surface of the sample is 120 μm higher than the analysis point, the electron beam reaches the edge of the etched portion of the sample, and accurate analysis is not possible. become unable. Similarly, as shown by (-) in FIG. 7, the analysis surface of the sample is 12 degrees from the analysis point.
At 0 μm lower, the electron beam reaches the edge of the etched part of the sample opposite to the said edge, which again does not allow accurate analysis. Therefore,
In this example, it is necessary to adjust the position of the analysis surface of the sample so that it falls within an error of less than 120 μm above and below the analysis point.

As described above, after the sample holder 10 is installed on the sample stage 56 of the Auger electron spectroscopy analyzer 50, it is necessary to adjust the position of the analysis surface of the sample prior to the analysis. In the sample holder 10 having the structure shown in FIG. 8, when the sample Sa is mounted on the sample holder 10, the operation of aligning the sample Sa with the height of the upper surface of the height regulating thin plate 15 of the fixed plate 14 and the analysis surface of the sample Sa is visually performed. However, it must be adjusted within a range of ± 1.5 mm which can be adjusted by the Z-axis knob 83 of the adjusting device 80. It is important to adjust the height of the analysis surface of the sample Sa, and if this adjustment is not performed accurately, it becomes difficult to adjust the position in the Auger electron spectroscopy analyzer 50.
As described above, the adjustable range by the Z-axis knob 83 is ± 1. With reference to the upper surface of the height regulating thin plate 15 of the fixed plate 14.
Since it is in the range of 5 mm, at the stage of mounting and fixing the sample Sa on the sample holder 10, as described above, whether the upper surface of the height regulating thin plate 15 of the fixing plate 14 and the analysis surface of the sample Sa match, If the analysis surface is not in contact with the lower surface of the height-regulating thin plate 15, it may be out of the mechanically adjustable range.

[0024]

When the height of the analysis surface of the sample is adjusted, as shown in FIG. 8, the height (length) of the sample Sa is from the horizontal surface 11A of the base 11 to the fixing plate 14.
There is no problem as long as it is the same as the height (dimension X in FIG. 8) to the lower surface of the height regulating thin plate 15, but as shown in FIG. It is very difficult to align the analysis surface, which is the upper surface of the sample Sb, with the lower surface of the height regulating thin plate 15 of the fixed plate 14 in a state of being floated from the horizontal surface 11A of the table 11, and the sample Sb
The fixation of is also unstable. When fixing such a sample Sb having a low height to the sample holder 10, a soft metal such as indium is laid under the sample Sb to adjust the height, but even in the case of this adjusting method as well. ,
It is necessary to repeat the operation of folding and stacking the indium to adjust the height and perform height alignment. This adjustment method has a problem that it takes time and it is difficult to match the analysis surfaces.

In the case of a block-shaped sample having a smooth surface as shown in FIGS. 8 and 9, it can be fixed relatively easily by pressing the sample surface against the fixing plate 14, but in reality, the sample surface is Does not analyze only smooth samples. As an example thereof, a magnetic head Sm fixed to the substrate Sp as shown in FIG. 10 can be cited. FIG. 11 shows a cross-sectional view when the magnetic head Sm is mounted and fixed on the sample holder 10. The magnetic head Sm has a step between the portions A and B of the base 11, and the analysis surface to be actually analyzed is the portion C which is the magnetic gap portion of the magnetic head Sm indicated by the arrow. A magnetic head Sm which is such a sample
Also, the surface of the portion C, which is the analysis surface, must be made to face from between the U-shaped portions of the height regulating thin plate 15 of the fixing plate 14, and the upper surface of the height regulating thin plate 15 must be aligned. It is extremely difficult to perform the height adjustment without a smooth surface to be brought into contact with. The present invention is intended to solve such a problem, and can accurately and easily mount and fix a sample holder regardless of the height or other shape of the sample to be analyzed. The purpose is to obtain.

[0026]

Therefore, the sample holder of the present invention comprises a base on which a horizontal plane serving as a horizontal reference is formed,
A fixed plate having a reference vertical surface formed perpendicular to the horizontal plane at one end of the base, and a fixed plate formed at the upper end of the fixed plate at a right angle to the reference vertical surface and integrally with the fixed plate. A height-regulating thin plate and a horizontal plane of the base are provided. While sliding one end edge on a reference vertical plane of the fixed plate, the vertical movement of the base can be made parallel to the horizontal plane of the base, A sample mounting table having a small area, a vertical movement fine adjustment device located below the sample mounting table and penetrating from a lower surface of the base, and vertically moving the sample mounting table in a fine manner. A sample pressing plate for pressing the sample against the vertical surface of the plate, one end fixed to the back surface of the sample pressing plate, the other end loosely fitted to a fixing member formed at the other end of the base, Coil-shaped sprue mounted on the rod between the back surface of the sample holding plate and the fixing member. And constituted by a grayed, solved the above problems.

[0027]

Therefore, according to the sample holder of the present invention, the sample to be analyzed is mounted on the sample mounting table irrespective of the height dimension of the sample, the shape of the analysis surface, or any other shape. Accurate positioning of the height of the analysis surface by finely adjusting from the lower surface of the sample mounting table with the vertical movement fine adjustment device while controlling the height position with the height control thin plate while pressing with the pressing force of the holding plate You can

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the sample holder of the present invention will be described with reference to FIGS. FIG. 1 shows a state in which a sample is mounted and fixed on one embodiment of the sample holder of the present invention.
2A is a plan view thereof, and FIG. 2B is a cross-sectional side view taken along the line AA of FIG. 2A. FIG. 2A and FIG. 3A and 3B are views for explaining the structure of the adjusting device, FIG. A being a cross-sectional view showing the coupling structure of the sample mounting table and the vertical fine adjustment device, and FIG. B being one end of the vertical fine adjusting device. FIG. 3 is a side view and FIG. 3C is a bottom view showing the other end surface of the vertical movement fine adjustment device, and FIG. 3 shows a state in which a plurality of samples are mounted and fixed on the sample holder of the present invention shown in FIG. FIG. The same components as those of the conventional sample holder 10 will be designated by the same reference numerals.

First, an embodiment of the sample holder of the present invention will be described with reference to FIGS. The sample holder 1 of the present invention has a substantially rectangular outer shape when viewed from the top, and a base 11 on which a horizontal plane 11A serving as a horizontal reference is formed is a central member, and one end of the base 11 has the above-mentioned structure. Horizontal 11
A reference vertical surface 12A formed perpendicular to A is formed. In addition, the sample fixing plate 14 having the same reference vertical surface 14A as the reference vertical surface 12A is the base 11
And are formed integrally with it. Further, a U-shaped height regulating thin plate 15 is integrally formed at the upper end of the sample fixing plate 14 at a right angle to the reference vertical surface 14A. The height regulating thin plate 15 has a thickness of about 0.2 to 0.4 mm.

In the sample holder 1 of the present invention, a metal sample mounting table 2 having an area smaller than that of the base 11 is provided on the horizontal surface 11A of the base 11, and The base 11 is slid at its one end from the reference vertical surface 12A to the reference vertical surface 14A of the sample fixing plate 14.
It is configured so that it can move up and down in parallel with the horizontal plane 11A. In addition, one or a plurality of guide rods 3 are provided at an end portion of the sample mounting table 2 opposite to the one end edge in order to stably ensure the parallel movement of the vertical movement of the sample mounting table 2. It is desirable to plant it so that it can slide up and down through the base 11.

A penetrating female screw 4 is formed on the base 11 at the center of the lower surface of the sample mounting table 2, and the penetrating female screw 4 penetrates the base 11 from the lower surface of the base 11.
The vertically moving fine adjustment device 5 of the screwed male screw is connected, and by rotating the vertically movement fine adjustment device 5, the sample mounting table 2 can be finely moved up and down.

Furthermore, the vertical surface 14A of the fixed plate 14
A sample pressing plate 18 for pressing the sample S is disposed on the back surface of the base 11. The sample pressing plate 18 has one end fixed to the back surface and the other end on the horizontal surface 11A at the other end of the base 11. A rod 17 loosely fitted in an elongated hole formed in a spring fixing block 13 fixed with a screw, and attached to the rod 17,
A pressing force is applied to the sample pressing plate 18, and the base end portion is held by the coil-shaped spring 16 fixed to the spring fixing block 13. The spring 16 constantly presses the sample holding plate 18 toward the sample fixing plate 14 by its elastic force.

The sample mounting table 2 and the vertical movement fine adjustment device 5
The structure and the connecting structure between the two are shown in a sectional view in FIG. A vertical movement fine adjustment device 5 is connected to the central portion of the lower surface of the metal sample mounting table 2. At the center of the lower surface of the sample mounting table 2,
As shown in FIG. 2A, a connection hole 2B with a flange 2A is formed, and the flat head 5A of the vertical movement fine adjustment device 5 shown in FIG. 2B is loosely fitted in the connection hole 2B. . A constriction 5C is formed between the flat head portion 5A of the vertical movement fine adjustment device 5 and the male screw portion 5B. The collar 2A of the connection hole 2B is fitted into the constriction 5C, and the sample mounting table 2 is attached. And the vertical fine adjustment device 5 are connected so as not to separate from each other. As shown in FIG. 2C, a fine groove 5D is formed in the diametrical direction on the lower surface of the vertical movement fine adjustment device 5, and the tip of a screwdriver such as a screwdriver is inserted into the fine groove 5D in the clockwise direction. The vertical movement fine adjustment device 5 is vertically moved by finely rotating it in the counterclockwise direction, and thus the sample mounting table 2 can be finely moved up and down.

In FIG. 1, a sample exchange rod mounting female screw 19 is formed in the center of the left end of the sample holder 1. The sample exchange rod 69 (FIG. 4) is screwed into this sample exchange rod mounting female screw 19 to mount the sample. The structure is such that the sample holder 1 equipped with S can be set on the upper surface of the sample stage 56 from the sample exchange chamber 52 of the Auger electron spectroscopic analyzer 50 or taken out therefrom.

Next, a method of mounting and fixing the sample S for analysis on the sample holder 1 will be described. In FIG.
According to the height (length) of the sample S to be analyzed, the sample mounting table 2 is adjusted in advance to a height position close to a predetermined height position by using the vertical movement fine adjustment device 5, and then, The sample holding plate 18 is moved to the right so as to contract the spring 16, that is, opened from the sample fixing plate 14, and the sample S
Is mounted on the sample mounting table 2 with its analysis surface facing upward, and then the sample pressing plate 18 is moved toward the sample fixing plate 14 by the elastic force of the spring 16. The vertical surface formed integrally with the vertical surface 12A of the base 12 and the vertical surface 14A of the sample fixing plate 14 and the vertical surface 18A of the sample restraining plate 18 are sandwiched and fixed. In this case, the spring 16 expands and contracts depending on the thickness of the sample S.

Next, it is desirable to mount the sample S so that the analysis surface of the sample S is flush with the upper surface of the upper thin plate 15. The width of the analysis surface of the sample S is the height-regulating thin plate 15. If the width of the analysis surface of the sample is larger than the width of the height control thin plate 15, the analysis surface is brought into contact with the lower surface of the height control thin plate 15.
If the width of the U-shape is narrower, the analysis surface is exposed from the U-shape of the height-regulating thin plate 15, and the vertical movement fine adjustment is performed so that the height is the same as the upper surface of the height-regulating thin plate 15. The device 5 is rotated for fine adjustment. In this way, the sample S is mounted on the sample mounting table 2 and can be mounted and fixed at a predetermined height position of the sample holder 1.

The sample holder 1 having the sample S mounted and fixed at the predetermined height position in this manner is then replaced by the sample exchange rod 69.
Is set from the sample exchange chamber 52 to the sample stage 56, and the analysis surface of the sample on the sample holder 1 is further adjusted by the adjusting device 8
By using 0, the sample stage 56 is moved in the X-axis, Y-axis, and Z-axis directions by the method already described, and is then rotated around the Z-axis for adjustment, whereby a predetermined set surface is obtained. Since the height position adjustment in the Z-axis direction can be performed within a range of ± 1.5 mm, the thickness of the sample pressing plate 18 can be absorbed. The sample holder 56 is attached to the sample stage 56.
After setting, the sample exchange rod 69 is rotated in the direction of unscrewing to unscrew the sample exchange rod mounting female screw 19,
As shown in FIG. 4, the sample exchange rod 69 is attached to the sample exchange chamber 5 as shown in FIG.
Set back to 2.

As shown in FIG. 3, if the sample holders 1 have the same height, a plurality of samples Sc and Sd are mounted at once by the same method as described above. Can be fixed.

In the above embodiments, the sample holder of the present invention has been described as a sample holder used in an Auger electron spectroscopy analyzer, but it can also be used in an X-ray photoelectron spectrometer, an electron probe micro-partial analyzer, etc. it can.

[0040]

As described above, by using the sample holder of the present invention, various excellent effects described below were obtained. 1. Even when the height dimension of the sample is shorter than the height position of the height-regulating thin plate, the height adjustment of the sample fixing plate with the height-regulating thin plate surface becomes easy. 2. By using the male screw vertical movement fine adjustment device to adjust the height position of the sample, it is possible to adjust even minute differences in height. 3. By fixing the sample from below in addition to the conventional lateral fixing, it prevents movement due to vibration or thermal shock or dropping when tilting the sample, and firmly fixes it so that it does not cause a predetermined displacement. can do. 4. Since the height position of the analysis surface of the sample is adjusted using the vertical movement fine adjustment device consisting of the metal sample mounting table and the male screw, the analysis surface of the sample can be adjusted without contaminating the analysis chamber even in ultra-high vacuum. Can be fixed. 5. If the heights of the samples are the same, several samples can be placed and fixed at one time.

[Brief description of drawings]

FIG. 1 shows a state in which a sample is mounted and fixed on an embodiment of a sample holder of the present invention, FIG. 1A is a plan view thereof, and FIG. 1B is a cross-sectional side view on line AA of FIG. 1A. It is a figure.

FIG. 2 is a view for explaining the structure of a sample mounting table and a vertical movement fine adjustment device which constitute the sample holder of the present invention shown in FIG. 1, and FIG. 2A shows the sample mounting table and the vertical movement fine adjustment device. FIG. 6 is a sectional view showing a coupling structure of the adjusting device, FIG. 9B is a side view showing one end of the vertical movement fine adjusting device, and FIG. 7C is a bottom view showing the other end face of the vertical movement fine adjusting device.

FIG. 3 is a sectional side view showing a state in which a plurality of samples are mounted and fixed on the sample holder of the present invention shown in FIG.

FIG. 4 is a conceptual configuration diagram of a current Auger electron spectroscopy analyzer which is one of the analyzers.

FIG. 5 is an adjusting device for adjusting the set position of the sample set on the sample stage.

FIG. 6 is an explanatory diagram of an error occurrence in the depth direction analysis due to the improper setting position of the sample set in the Auger electron spectroscopy analyzer.

FIG. 7 is an explanatory diagram schematically showing the occurrence of an error due to a change in the setting position of the sample set in the Auger electron spectroscopy analyzer.

8 shows a state in which a high sample is mounted on an active sample holder for setting in the Auger electron spectroscopic analyzer shown in FIG. 4, and FIG. 8A is its plan view and FIG.
FIG. 3B is a sectional side view taken along the line AA in FIG.

9 shows a state in which a low sample is mounted on a current sample holder for setting in the Auger electron spectroscopic analyzer shown in FIG. 4, FIG.
FIG. 3B is a sectional side view taken along the line AA in FIG.

FIG. 10 is a perspective view of a magnetic head device which is an example of a sample to be surface-analyzed.

11 is a cross-sectional side view of a current sample holder equipped with the magnetic head device shown in FIG.

[Explanation of symbols]

 1 sample holder 2 of this invention 2 sample mounting table 3 guide rod 4 penetrating female screw 5 vertical fine adjustment device 11 base 11A horizontal surface of base 11 12 base portion 13 spring fixing block 14 sample fixing plate 15 height of sample fixing plate 14 Regulation thin plate 16 Spring 17 Rod S Sample to be analyzed Sc Sample to be analyzed Sd Sample to be analyzed

Claims (1)

[Claims] 1. A base on which a horizontal plane serving as a horizontal reference is formed, a fixing plate having a reference vertical plane formed perpendicular to the horizontal plane on one end of the base, and an upper end of the fixing plate. , At a right angle to the reference vertical plane,
The height-regulating thin plate integrally formed with the base is provided on the horizontal plane of the base, and can slide up and down in parallel with the horizontal plane of the base while sliding one end edge on the reference vertical plane of the fixed plate. A sample mounting table having an area smaller than the area of the base, and a vertical movement finer that is provided below the sample mounting table and penetrates from the lower surface of the base to finely move the sample mounting table up and down. An adjusting device, a sample holding plate that presses the sample against the vertical surface of the fixing plate, and one end fixed to the back surface of the sample holding plate, the other end of which is attached to a fixing member formed at the other end of the base. A sample holder, comprising: a fitted rod; and a coiled spring mounted on the rod between the back surface of the sample pressing plate and the fixing member.