JPH08276584A - Ink jet device and production thereof - Google Patents

Abstract

PURPOSE: To emit ink liquid droplets having a speed and vol. sufficient to form a character or image by low drive voltage and to enhance the reliability of electrical connection. CONSTITUTION: In an ink jet device 201 having ink liquid chambers 112 having side walls 111, 116 constituted of a piezoelectric material and electrodes 113, 114 generating electric fields in the side walls 111, 116 and displacing the side walls 111, 116 by the application of voltage to the electrodes 113, 114 to apply pressure to the ink in the ink liquid chambers 112 to emit ink, the electrodes 113, 114 are electrically connected by the melting and solidification of the thin layer 213 composed of a low m.p. metal formed on the electrodes 113, 114 and the side walls 111, 116 are bonded.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet device.

[0002]

2. Description of the Related Art Among the non-impact type printers, which are currently replacing the impact type printers that have been used up to now, and whose market is expanding greatly, the principle is the simplest, and multi-gradation and colorization are realized. As easy as
Inkjet printers are available. Drop-on that ejects only the ink droplets used for printing
The demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Of these, the former is difficult to miniaturize, and the latter requires a high heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A method proposed to solve the above defects at the same time is disclosed in Japanese Patent Laid-Open No. 63-247051.
JP-A-63-252750 and JP-A-2
It is a shear mode type disclosed in Japanese Patent Publication No. 150355. 2, FIG. 3, FIG. 4, FIG. 5 and FIG. 6 show schematic diagrams of these conventional examples.

FIG. 2 showing a cross-sectional view of the ink ejecting apparatus is shown below.
The configuration of the conventional example will be described in detail. The ink ejecting apparatus 1 is composed of an actuator plate 2, a cover plate 3 and a nozzle plate 31 (FIG. 4). The actuator plate 2 is formed of a piezoelectric material having ferroelectricity, for example, a lead zirconate titanate (PZT) -based ceramic material, etc., and is polarized in the direction of the arrow 5, and the plurality of grooves 15 and the grooves 15 are formed. It has a side wall 11 which separates 15. The cover plate 3 is made of a ceramic material, a resin material, or the like. By joining the actuator plate 2 and the cover plate 3 with the joining layer 4 made of an adhesive such as an epoxy adhesive, the groove 15 is formed into a plurality of ink liquid chambers 12 having a space between each other in the lateral direction. Become. The ink liquid chamber 12 has an elongated shape with a rectangular cross section, and the side wall 11 extends over the entire length of the ink liquid chamber 12. Electrodes 13 for applying a driving voltage are formed on both surfaces of the sidewall 11 near the bonding layer 4 from the upper portion of the sidewall 11 to the central portion of the sidewall 11. In the ink liquid chamber 12, from the ink supply port 21 (FIG. 4) to the manifold 22 (FIG. 4).
Ink 81 is introduced through.

Next, the operation of the conventional example will be described with reference to FIG. 3, which is a sectional view of the ink ejecting apparatus 1. In the ink ejecting apparatus 1, for example, when the ink liquid chamber 12b is selected according to desired print data, a positive drive voltage is rapidly applied to the electrodes 13c and 13d, and the electrodes 13b and 13e are grounded. As a result, the driving electric field in the direction of arrow 14a acts on the side wall 11a, and the driving electric field in the direction of arrow 14b acts on the side wall 11b. At this time, the driving electric field directions 14a and 14b
And the polarization direction 5 are orthogonal, the side walls 11a and 1
1b is an ink liquid chamber 12b due to the piezoelectric thickness sliding effect.
It deforms rapidly inward. Due to this deformation, the volume of the ink liquid chamber 12b is reduced, the pressure of the ink 81 inside the ink liquid chamber 12b is rapidly increased, a pressure wave is generated, and the nozzle 32 (FIG. 4) communicating with the ink liquid chamber 12b is generated. A part of the ink 81 is ejected as an ink droplet. Also,
When the application of the drive voltage is stopped, the side walls 11a and 11b return to the positions before the deformation (see FIG. 2), so that the ink liquid chamber 12
The pressure of the ink 81 in the inside b is decreased, and the ink supply port 21
Ink 81 is supplied from (FIG. 4) through the manifold 22 (FIG. 4) into the ink liquid chamber 12b.

However, the above operation is only the basic operation of the conventional example, and when it is embodied as a product, first, a driving voltage is applied in the direction in which the volume of the ink liquid chamber 12b increases, and then the ink liquid is first applied. In some cases, after the ink is supplied to the chamber 12b, the application of the drive voltage is stopped, the side walls 11a and 11b are returned to the positions before the deformation (see FIG. 2), and the ink is ejected.

In the ink ejecting apparatus 1, since it is not possible to eject ink droplets simultaneously from two nozzles communicating with two adjacent ink liquid chambers, for example, ink is ejected from the nozzles communicating with the ink liquid chambers 12b and 12d. After ejecting the liquid droplets, the ink droplets are ejected from the nozzles communicating with the ink liquid chambers 12c, and then the ink liquid chambers 12b and 12d again.
The ink droplets are ejected by dividing the ink liquid chamber 12 and the nozzles 32 into a plurality of groups such that the ink droplets are ejected from the nozzles communicating with.

Next, the construction and manufacturing method of the conventional example will be described with reference to FIG. 4 showing a perspective view of the ink jetting apparatus 1. The parallel grooves 1 that form the ink liquid chamber 12 having the above-described shape are formed on the actuator plate 2 that has been subjected to the polarization treatment by grinding or the like using a thin disk-shaped diamond blade.
5 is produced. The groove 15 is a parallel groove having the same depth over almost the entire area of the actuator plate 2, but is gradually shallowed toward the end face 17, and is formed so as to be a shallow parallel groove 18 near the end face 17. Electrodes are formed on the inner surfaces of the groove 15 and the shallow groove 18 by vacuum vapor deposition, sputtering or the like. At the time of forming this electrode, an electrode is also formed on the zenith of the side wall 11, so it is necessary to separate the electrodes on both sides of the side wall 11, and therefore the electrode on the zenith of the side wall 11 is removed by lapping or the like. Thereby,
The electrode 13 is formed on the inner surface of the groove 15 only on the upper half of the side surface thereof, and the electrode 19 is formed on the entire surface of the side surface and the bottom surface of the shallow groove 18. The electrodes 13 are electrically connected to the electrodes 13 formed on the sidewalls 11 on both sides of the groove 15.

Further, the ink inlet 21 and the manifold 22 are formed in the cover plate 3 made of a ceramic material or a resin material by grinding or cutting.

Next, the groove 15 of the actuator plate 2
Each groove 15 forms the ink liquid chamber 12 having the above-mentioned shape by the bonding layer 4 (FIG. 2) made of an epoxy adhesive or the like on the surface on the processing side and the surface on the processing side of the manifold 22 of the cover plate 3. So that it adheres. Next, a nozzle plate 31 having nozzles 32 provided at positions corresponding to the positions of the ink liquid chambers 12 is adhered to the end faces 16 of the actuator plate 2 and the cover plate 3. Each shallow groove 18 is formed on the surface of the actuator plate 2 opposite to the groove 15 processing side.
The substrate 41 on which the pattern 42 of the conductive layer is provided at a position corresponding to the position is attached by an epoxy adhesive or the like.

Then, the electrode 19 on the bottom surface of the shallow groove 18 and the pattern 42 of the conductive layer are connected by a conductive wire 43. Usually, a well-known method such as wire bonding is used for such connection. Since the diameter of the conductive wire 43 is usually very small and the mechanical strength is small, in order to prevent contact between adjacent conductive wires 43 and disconnection, and corrosion due to moisture and dust in the atmosphere, a resin such as epoxy is generally used. A protective film (not shown) is formed (potting) using this. The protective film is cured by heating.

Next, the configuration of the conventional control unit will be described with reference to FIG. 5, which shows a block diagram of the control unit. The conductive layer patterns 42 provided on the substrate 41 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54, and the ground line 55 are also connected to the LSI chip 51. Based on the continuous clock pulse supplied from the clock line 52, the LSI chip 51 determines from the data appearing on the data line 53
It is determined from which nozzle 32 the ink droplet should be ejected. Then, the LSI chip 51 applies the voltage V of the voltage line 54 to the pattern 42 of the conductive layer that is electrically connected to the electrode 13 in the ink liquid chamber 12 that ejects ink. In addition, the LSI chip 51 connects the ground line 55 to the pattern 42 of the conductive layer that is electrically connected to the electrodes 13 other than the ink liquid chamber 12.

Next, the construction and operation of the conventional example will be described with reference to FIG. 6 showing a perspective view of the printer. The ink ejecting device 1 and the nozzle plate 31 have the configurations and operations described in FIGS. 2, 3, 4, and 5. The ink ejecting apparatus 1 is fixed on the carriage 62, the ink supply tube 63 communicates with the ink supply port 21 (FIG. 4), and
The chip 51 (FIG. 5) is built in the carriage 62, and the flexible cable 64 is the clock line 5 shown in FIG.
2, corresponding to the data line 53, the voltage line 54 and the ground line 55. The carriage 62 has a slider 66.
Along the direction of arrow 65 over the entire width of the recording paper 71, and the ink ejecting device 61 holds the recording paper 7 held by the platen roller 72 while the carriage 62 is moving.
1, the nozzle 3 provided on the nozzle plate 31
Ink droplets are ejected from 2 (FIG. 4) to adhere the ink droplets onto the recording paper 71.

The recording paper 71 is stationary when the ink ejecting apparatus 1 ejects ink droplets, but the paper feeding rollers 73 and 7 are performed each time the carriage 62 performs a predetermined operation.
4, a constant amount is transferred in the direction of arrow 75. As a result, the ink ejecting apparatus 1 can form a desired character or image on the entire surface of the recording paper 71.

Next, another conventional ink ejecting apparatus disclosed in Japanese Unexamined Patent Publication No. 5-92561 is shown in FIGS.
Will be explained. The ink ejecting apparatus 101 is composed of actuator plates 102 and 103 and a nozzle plate (not shown). The actuator plate 102 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of the arrow 105, and has a plurality of grooves 11.
5 and a side wall 111 separating the groove 115. Side wall 1
Electrodes 113 for applying a driving voltage are formed on both side surfaces of 11 and a part of the zenith. The actuator plate 103 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of the arrow 106, and has a plurality of grooves 117 and side walls 116 separating the grooves 117.
Electrodes 114 for applying a driving voltage are formed on both side surfaces of the side wall 116 and a part of the zenith.

By joining the zenith of the side wall 111 of the actuator plate 102 and the zenith of the side wall 116 of the actuator plate 103 via the joining layer 104 made of an adhesive, the grooves 115 and 117 are laterally aligned with each other. A plurality of ink liquid chambers 112 are formed at intervals. Further, the electrode 113 and the side wall 11 formed on the zenith of the side wall 111
The electrode 114 formed on the zenith portion of No. 6 comes into contact with each other to form a conductive relationship. The ink liquid chamber 112 has an elongated shape with a rectangular cross section, and the side walls 111 and 116 have the ink liquid chamber 112.
Extends over the entire length of. In the ink liquid chamber 112,
Ink 181 is introduced from an ink supply port (not shown) through a manifold (not shown). The description of the electrical connection between the electrodes 113 and 114 and the drive circuit is omitted.

In the ink ejecting apparatus 101, a driving electric field acts on the side walls 111 and 116 by applying a driving voltage to the electrodes 113 and 114 on the surfaces of the side walls 111 and 116 on both sides of the ejected ink liquid chamber 112. At this time, since the driving electric field direction and the polarization directions 105 and 106 are orthogonal to each other, the side walls 111 and 116 are rapidly deformed toward the inside of the ink liquid chamber 112 due to the piezoelectric thickness sliding effect. Due to this deformation, the volume of the ink liquid chamber 112 is reduced, the pressure of the ink 181 inside the ink liquid chamber 112 is rapidly increased, a pressure wave is generated, and a nozzle (not shown) communicating with the ink liquid chamber 112 is generated. A part of the ink 181 is ejected as an ink droplet. Further, when the application of the drive voltage is stopped, the side walls 111 and 116 return to the positions before the deformation, so that the pressure of the ink 181 inside the ink liquid chamber 112 lowers, and the manifold (not shown) is supplied from the ink supply port (not shown). 18) through the ink 18 into the ink liquid chamber 112.
1 is supplied.

However, the above operation is only the basic operation of the conventional example, and when it is embodied as a product, first, a drive voltage is applied in the direction in which the volume of the ink liquid chamber 112 increases, and then the ink liquid is first applied. In some cases, after the ink is supplied to the chamber 112, the application of the drive voltage is stopped, the side walls 111 and 116 are returned to the positions before the deformation, and the ink is ejected.

[0020]

However, in the conventional ink ejecting apparatus 1 as described above, only the upper half of the side wall 11 undergoes the piezoelectric thickness slip deformation due to the drive voltage applied to the electrode 13, and the lower half of the upper half is the upper half. Since the displacement is caused by the deformation, the amount of deformation of the side wall 11 is smaller than that of the electric energy applied to the electrode 13, and the amount of decrease in the volume of the ink liquid chamber 12 is small. Therefore, in order to form a character or an image on the paper surface or the like where the speed and volume of the ejected ink droplets face the ink ejecting apparatus 1, it is necessary to increase the driving voltage. For this reason, the driving circuit becomes complicated and large in size, so that there is a limit to cost reduction and downsizing of the device.

In the conventional ink ejecting apparatus 101 as described above, since both the side walls 111 and 116 are driven by the drive voltage applied to the electrode 113, ink is ejected at a driving voltage which is half that of the ink ejecting apparatus 1. The same ink pressure as the device 1 can be generated. Therefore, the drive voltage can be made lower than that of the injection device 1.

However, in the ink ejecting apparatus 101, the electrical connection between the electrode 113 formed on the side wall 111 and the electrode 114 formed on the side wall 116 joins the zenith part of the side wall 111 and the zenith part of the side wall 116. Since the electrical connection by this contact,
If the surface roughness and undulations of the zeniths of the side walls 111 and 116 are large, the connection is not assured and the reliability is low. Further, the zenith of the side wall 111 and the side wall 11
There was a problem that the electrode 113 and the electrode 114 were not connected due to the protrusion of the adhesive that adheres to the zenith portion of No. 6. In addition, ink 1 is applied to the contact surface between the electrodes 113 and 114.
81 enters to hinder electrical connection, and the side wall 111
And electrodes 116 and 114 due to vibration caused by driving
Wear on the contact surface with and electrical connection is broken,
There is a problem in that the ejection of ink droplets stops during use, resulting in low reliability.

The present invention has been made to solve the above-mentioned problems, and it is possible to eject ink droplets at a speed and volume sufficient to form characters and images with a low driving voltage. It is an object of the present invention to provide an ink ejecting apparatus having high reliability of electrical coupling and a manufacturing method thereof.

[0024]

In order to achieve this object, according to claim 1 of the present invention, a plurality of first grooves are separated from each other, and at least a part of the first grooves is made of a piezoelectric material. A first actuator plate having a wall, a plurality of second grooves provided corresponding to the first groove, and a second wall that is separated from the second groove and at least a part of which is made of a piezoelectric material. A second actuator plate having, a first electrode formed on the side surface of the first wall and its zenith portion, and a second electrode formed on the side surface of the second wall and its zenith portion,
An ink ejecting apparatus that joins the zenith of the first wall of the first actuator plate and the zenith of the second wall of the second actuator plate to form an ink liquid chamber including the first groove and the second groove. The low melting point metal layer is formed on at least one of the first electrode formed on the zenith of the first wall and the second electrode formed on the zenith of the second wall.

In the ink jet apparatus of the second aspect, the low melting point metal layer is a solder alloy layer.

According to a third aspect of the present invention, there is provided a first actuator plate having a plurality of first grooves and a first wall which is separated from the first groove and at least a part of which is made of a piezoelectric material, and the first groove corresponds to the first groove. A second actuator plate having a plurality of second grooves provided with a second wall, at least a part of which is formed of a piezoelectric material, and a second side wall of the first wall and the ceiling thereof. In a method of manufacturing an ink ejecting apparatus including a first electrode formed on the top and a second electrode formed on the side surface and the zenith of the second wall, the ink is formed on the zenith of the first wall. Forming a low melting point metal layer on at least one of the second electrode formed on the first electrode or on the zenith of the second wall; and the zenith of the first wall of the first actuator plate. Second wall of the second actuator plate Contacting the zenith, heating the first actuator plate and the second actuator plate to melt the low melting point metal layer, cooling the first actuator plate and the second actuator plate And solidifying the melted low-melting-point metal layer to electrically connect the first electrode and the second electrode and to bond the first actuator plate and the second actuator plate. Is characterized by.

According to a fourth aspect of the present invention, there is provided a method of manufacturing an ink jet device, wherein the low melting point metal layer is formed of a solder alloy.

[0028]

In the ink jet device of the present invention having the above-mentioned structure, on the first electrode formed on the zenith of the first wall or on the second electrode formed on the zenith of the second wall. The first electrode and the second electrode are electrically connected by the low melting point metal layer formed on at least one of the above.

In the method of manufacturing an ink jet device of the present invention, first, the second electrode formed on the first electrode formed on the zenith of the first wall or on the zenith of the second wall. A low melting point metal layer is formed on at least one of the electrodes,
Next, the zenith of the first wall of the first actuator plate and the zenith of the second wall of the second actuator plate are brought into contact with each other. Then, the first actuator plate and the second actuator plate are heated to melt the low melting point metal layer, and then the first actuator plate and the second actuator plate are cooled to cause the melted low melting point. The metal layer is solidified. Thereby, the first electrode and the second electrode are electrically connected, and the first actuator plate and the second actuator plate are joined together.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The same members as those of the conventional technique are designated by the same reference numerals, and the description thereof will be omitted.

First, the configuration of an embodiment of the present invention will be specifically described with reference to FIG. 1 which is a partial cross-sectional view of the ink ejecting apparatus 201. The ink ejecting apparatus 201 is composed of actuator plates 102 and 103 and a nozzle plate (not shown). Actuator plate 1
Reference numeral 02 denotes a piezoelectric material having ferroelectricity, and arrow 1
It is polarized in the 05 (FIG. 7) direction and has a plurality of grooves 115 and side walls 111 separating the grooves 115. Side wall 111
Electrodes 113 for applying a driving voltage are formed on both side surfaces and a part of the zenith portion continuous with both side surfaces. The actuator plate 103 is formed of a piezoelectric material having ferroelectricity, is polarized in the direction of the arrow 106 (FIG. 7), and has a plurality of grooves 117 and side walls 116 separating the grooves 117.
Have. Electrodes 114 for applying a driving voltage are formed on both side surfaces of the side wall 116 and a part of the zenith portion continuous with the both side surfaces.

The electrodes 113 and 114 are formed of a conductive material such as nickel, aluminum, gold or carbon after forming a resist layer or the like on a part of the zenith portion of the side wall 111 and a part of the zenith portion of the side wall 116 by patterning or the like. A thin layer is formed on the entire surface of the side walls 111 and 116 by vacuum vapor deposition, sputtering, plating, screen printing or the like, and the resist layer is removed by mechanical peeling or chemical dissolution. Then, a thin layer 213 of a low melting point alloy such as a solder alloy (Pb—Sn alloy) is formed on the electrode 113 at the zenith of the side wall 111 and the electrode 114 at the zenith of the side wall 116 by sputtering, vapor deposition, plating, or screen. It is formed by printing.

Next, the zenith of the side wall 111 of the actuator plate 102 and the zenith of the side wall 116 of the actuator plate 103 are brought into contact with each other to bring the thin layer 213 on the electrode 113 into contact with the thin layer 213 on the electrode 114. Then, when the whole is heated to a temperature equal to or higher than the melting point of the low melting point alloy thin layer 213, the low melting point alloy thin layer 213 is melted. Then, when the whole is cooled to room temperature, the thin layer 2 of the low melting point alloy is formed.
At the same time that 13 is solidified and the electrodes 113 and 114 are electrically connected, the side walls 111 and 116 are mechanically joined. Here, the heating temperature is, for example, about 200 ° C. when the material of the thin layer 213 of the low melting point alloy is a Pb40% -Sn60% alloy. As a result, the actuator plate 102 and the actuator plate 103 are joined together, and the grooves 115 and 117 form a plurality of ink liquid chambers 112 having a space therebetween in the lateral direction. Ink liquid chamber 1
Reference numeral 12 is an elongated shape having a rectangular cross section, and the side walls 111 and 116 extend over the entire length of the ink liquid chamber 112.

In the ink jetting apparatus 201 of this embodiment, the thin layer 213 of the low melting point alloy electrically connects the electrodes 113 and 114 and at the same time mechanically joins the side walls 111 and 116. Reliable electrical connection between the electrode 113 and the electrode 114 can be obtained irrespective of the surface roughness and waviness of the zeniths of the side walls 111 and 116, and the electrical connection may be hindered by the ink introduced into the ink liquid chamber 112. Side wall 1
The electrical connection will not be broken due to the abrasion due to the vibration caused by driving 11 and 116, and the reliability of the electrical connection will be remarkably increased. Further, unlike the conventional case, since the bonding layer 104 (FIG. 7) is not provided, there is no electrical connection failure due to the protrusion of the adhesive, and the electrode 113 and the electrode 114 can be reliably electrically connected.

Further, since the ink is ejected by the deformation of the side wall 111 and the side wall 116, it is possible to eject ink droplets at a speed and volume sufficient to form characters and images with a low driving voltage.

Although the ink liquid chambers 112 are adjacent to each other in this embodiment, air chambers filled with air may be provided between the ink liquid chambers. In this case, ink droplets can be ejected simultaneously from two nozzles communicating with all ink liquid chambers.

Further, in this embodiment, after forming a resist layer or the like on a part of the zenith of the side wall 111 and a part of the zenith of the side wall 116, a thin layer of a conductive material is formed on the entire surfaces of the side walls 111 and 116. By removing the resist layer by mechanical peeling or chemical dissolution, the sidewall 1
The electrodes 113 and the sidewalls 11 are provided on both side surfaces of 11 and part of the zenith.
The electrodes 114 were formed on both side surfaces of 6 and a part of the zenith, but after a thin layer of a conductive material was formed on the entire surfaces of the sidewalls 111 and 116, the zenith of the sidewall 111 and the zenith of the sidewall 116 were formed. May be machined to remove some of the electrodes 113 and 114.

In this embodiment, the thin layer 2 of low melting point alloy is used.
Although 13 is formed on both the electrode 113 and the electrode 114, it may be formed on only one of the electrode 113 and the electrode 114.

In this embodiment, the thin layer 2 of low melting point alloy is used.
Although 13 is formed only on the electrode 113 on the zenith of the side wall 111 and on the electrode 114 on the zenith of the side wall 116, it may be formed on the side surface or the entire surface of the side walls 111 and 116.

Further, in this embodiment, the side walls 111 and 11 are formed.
6 are each formed of one piezoelectric material member (actuator plates 102 and 103), a plurality of piezoelectric material members laminated in parallel to the polarization direction, or a non-piezoelectric material and a piezoelectric material in the polarization direction. It may be formed of members laminated in parallel.

In this embodiment, three ink liquid chambers 112 are shown, but any number such as 50 or 100 may be used.

[0042]

As is apparent from the above description, according to the present invention, at least one of the zenith of the first wall of the first actuator plate or the zenith of the second wall of the second actuator plate is provided. Since the formed low melting point metal layer electrically connects the first electrode and the second electrode, the surface roughness and waviness of the zenith of the first wall and the second wall were used for conventional bonding. A reliable electrical connection can be obtained regardless of the protrusion of the adhesive, the electrical connection is hindered by the ink introduced into the ink liquid chamber, and the electrical connection is caused by the abrasion caused by the vibration of the first and second walls. There is no disconnection, and the reliability of electrical connection is significantly increased. Further, since the ink is ejected by the deformation of the first wall and the second wall, it is possible to eject ink droplets of a speed and volume sufficient to form a character or an image with a low driving voltage.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional view of an ink ejecting apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a conventional ink ejecting apparatus.

FIG. 3 is an explanatory diagram showing an operation of a conventional ink ejecting apparatus.

FIG. 4 is a perspective view showing a conventional ink ejecting apparatus.

FIG. 5 is a block diagram showing a control unit of a conventional example.

FIG. 6 is a perspective view showing a conventional printer.

FIG. 7 is a cross-sectional view showing a conventional ink ejecting apparatus.

FIG. 8 is a partial cross-sectional view of a conventional ink ejecting apparatus.

[Explanation of symbols]

 201 ink jetting device 111 side wall 116 side wall 112 ink liquid chamber 113 electrode 114 electrode 213 thin layer of low melting point alloy

Claims (4)

[Claims] 1. A first actuator plate having a plurality of first grooves and a first wall which is separated from the first grooves and at least a part of which is made of a piezoelectric material, and which is provided corresponding to the first grooves. A plurality of second grooves, and a second actuator plate having at least a part of the second wall, which is separated from the second groove, by a piezoelectric material, and formed on a side surface of the first wall and a zenith portion thereof. And a second electrode formed on a side surface of the second wall and a zenith portion thereof, and a zenith portion of the first wall of the first actuator plate and a second electrode of the second actuator plate. In an ink ejecting apparatus that joins a zenith portion of a wall to form an ink liquid chamber including the first groove and the second groove, on the first electrode formed on the zenith portion of the first wall, or The second electrode formed on the zenith of the second wall The ink jet apparatus characterized by having a low melting point metal layer formed on at least one of the above. 2. The ink ejecting apparatus according to claim 1, wherein the low melting point metal layer is a solder alloy layer. 3. A first actuator plate having a plurality of first grooves and a first wall which is separated from the first grooves and at least a part of which is made of a piezoelectric material, and which is provided corresponding to the first grooves. A plurality of second grooves, and a second actuator plate having at least a part of the second wall, which is separated from the second groove, by a piezoelectric material, and formed on a side surface of the first wall and a zenith portion thereof. And a second electrode formed on the side surface of the second wall and on the zenith portion thereof, wherein the first electrode formed on the zenith portion of the first wall is provided. Forming a low melting point metal layer on at least one of the one electrode or on the second electrode formed on the zenith of the second wall; and the zenith of the first wall of the first actuator plate and the second Zenith on the second wall of the two actuator plate A step of heating the first actuator plate and the second actuator plate to melt the low melting point metal layer, cooling the first actuator plate and the second actuator plate, Solidifying the melted low-melting-point metal layer to electrically connect the first electrode and the second electrode, and to bond the first actuator plate and the second actuator plate. Method for manufacturing an ink ejecting apparatus. 4. The method of manufacturing an ink ejecting apparatus according to claim 3, wherein the low melting point metal layer is formed of a solder alloy.