JPH08125483A - Oscillator - Google Patents

Abstract

PURPOSE: To prevent a vibration characteristic of a vibrator from being deteriorated by making a frame and upper and lower plates with glass and integrating them through direct adhesion of the glass plates so as to attain sealing configuration. CONSTITUTION: The oscillator is provided with a glass-made frame 5, upper and lower plates 6, 7 covering one and other opening faces of the frame 5 and adhered directly to the frame 5 and a vibrator 1 contained in the frame 5, and a throughhole 8 is made to at least one of the upper lower plates 6, 7 and the frame 5, and an external connection electrode 14 is provided to the outside of the throughhole 8 and a connection electrode 10 to the vibrator 1 is provided to an inner face of the throughhole 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oscillator such as a crystal oscillator.

[0002]

2. Description of the Related Art In a conventional oscillator of this type, its oscillator is housed in a frame which is sealed by an upper and a lower plate in order to protect it from the external atmosphere.

[0003]

In the above configuration,
The frame was made of ceramic, and the upper and lower plates were made of metal and were welded to form a sealed structure.
There was a problem that the droplets were scattered in the frame during welding and adhered to the vibrator, resulting in deterioration of vibration characteristics.

Therefore, the present invention is intended to prevent deterioration of the vibration characteristics of the vibrator.

[0005]

In order to achieve this object, the present invention provides a frame body made of glass, and glass which covers one end and the open end faces of the frame body and is directly bonded to the frame body, respectively. The upper and lower plates and the vibrator housed in the frame body, and at least one of the upper and lower plates and the frame body is provided with a through hole, and an outer surface side of the through hole is used for external connection. An electrode is provided, and an electrode for connecting to the vibrator is provided on the inner surface side of the through hole.

[0006]

With the above construction, since the frame body and the upper and lower plates are both made of glass and are integrated by direct bonding of the glasses, the sealing structure is formed. Sometimes the droplets do not adhere to the vibrator inside the frame, so that the vibration characteristics do not deteriorate.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, reference numeral 1 denotes a crystal oscillator, which has a rectangular parallelepiped shape as shown in FIG. 2, and is provided with an oscillation electrode 2 and a connection electrode 3 on the front and back respectively. These electrodes 2 and 3 are formed by vapor-depositing Au, and the electrodes 2 and 3 are connected by a pattern 4 thinner than both electrodes.

Referring again to FIG. 1, 5 is a frame body made of glass, and the upper and lower openings are made of glass, and the upper and lower plates 6, 7
Are integrated by direct bonding of the glass to each other, and the vibrator 1 is sealed inside. That is, through holes 8 and 9 are formed in two portions of the lower plate 7 corresponding to the electrodes 3 of the vibrator 1, as shown in FIG. The through holes 8 and 9 are formed so as to be displaced from the longitudinal direction thereof as shown in FIG. This is for connecting the upper and lower electrodes 3 of the vibrator 1. Therefore, first, the connecting electrodes 10 and 11 are formed on the through holes 8 and 9.
2 is placed thereon, and the vibrator 1 shown in FIG. 2 is placed thereon and heating is performed in this state, the tin forming the electrodes 10 and 11 and the Au forming the electrode 3 are crystal-bonded to form a strong integration. It can be achieved. As a result, as shown in FIG. 1, the vibrator 1 is fixed in a cantilever state on the electrode 3 side in the frame body. At that time, since the oscillation electrode side is in a free state, the vibration is appropriately performed without being disturbed.

The recess 12 of the lower plate 7 is provided to prevent the vibrator 1 from coming into contact with the lower plate 7 during this vibration, and may be provided on the lower surface of the upper plate 6 if necessary. As shown in FIG. 4, a plurality of vibrators 1 are arranged in parallel on a lower plate 13 and are cut out into individual pieces shown in FIG. 2 to be mounted on a lower plate 7 shown in FIG. At this time, as shown in FIG. 3, the lower plate 7 has, for example, three arranged in parallel. First, FIG. 3 shows that three frame bodies 5 are arranged in parallel as shown in FIG. The vibrator 1 which is mounted on the lower plate 7 and is separated into individual pieces from the one shown in FIG.
After that, the upper plate 6 having three flat plates arranged side by side is mounted on the frame body 5, and heated in this state to directly bond the upper and lower plates 6 and 7 to the upper and lower surfaces of the frame body 5. Let

In this state, the external connection electrode 14 is provided in the through holes 8 and 9 with the lower surface of the lower plate 7 facing upward.
Inflow as shown in Fig.
Two electrodes are formed on the lower surface side of the lower plate 7. Then, in this state, by cutting into three oscillators by dicing, the individual oscillator shown in FIG. 1 is completed.

6 and 7 show another embodiment. In this embodiment, a notch 15 is formed in a portion corresponding to the portion between the electrodes 2 and 3.
By forming the above, the oscillation electrode 2 portion of the vibrator 1 is easily vibrated.

FIG. 8 shows still another embodiment. In this embodiment, the external connection electrodes 14 are formed at both ends of the oscillator by providing the through hole 8 at the end opposite to the through hole 9 side. It is a thing.

FIG. 9 shows another embodiment. In this embodiment, since the electrode on the lower surface of the vibrator 1 is fixed to the lower plate 7 via the electrode 10, the electrode 3 on the upper surface has the same shape as the electrode 10. Fixed to the glass weight body 17 through the metal film 16 of
As a result, the state of the vibrator with respect to the upper and lower fixation is made small so that the vibration characteristic of the vibrator 1 due to the fixation can be prevented.

[0014]

As described above, according to the present invention, the frame body made of glass, the upper and lower plates which cover the one end and the end faces of the frame body and are directly joined to the frame body, and the frame are provided. A vibrator housed in the body, a through hole is provided in at least one of the upper and lower plates and the frame body, an electrode for external connection is provided on an outer surface side of the through hole, and an inner surface of the through hole An electrode for connecting to the vibrator is provided on the side.

Therefore, with the above construction, since the frame body and the upper and lower plates are both made of glass and are directly integrated with each other to form a hermetically sealed structure, the hermetically sealed structure is obtained. The droplets do not adhere to the vibrator inside the frame during the formation of the structure, so that the vibration characteristics do not deteriorate.

[Brief description of drawings]

FIG. 1 is a sectional view of an oscillator according to an embodiment of the present invention.

FIG. 2 is a perspective view of a vibrator of an oscillator according to an embodiment of the present invention.

FIG. 3 is a perspective view showing a manufacturing process of a lower plate of the vibrator of FIG.

FIG. 4 is a perspective view showing a manufacturing process of the vibrator of FIG.

FIG. 5 is a perspective view showing a manufacturing process of the frame body of the oscillator according to the embodiment of the invention.

FIG. 6 is a perspective view showing a manufacturing process of an oscillator of an oscillator according to another embodiment.

FIG. 7 is a perspective view of a vibrator of an oscillator according to another embodiment.

FIG. 8 is a perspective view showing a manufacturing process of a lower plate of an oscillator in still another embodiment.

FIG. 9 is a sectional view of an oscillator according to still another embodiment.

[Explanation of symbols]

 1 Vibrator 2 Electrode 3 Electrode 6 Upper Plate 7 Lower Plate 8 Through Hole 10 Electrode 14 Electrode

Claims (3)

[Claims] 1. A glass frame body, and glass upper and lower plates which are directly joined to the frame body and which cover one end and multiple end opening surfaces of the frame body and a vibration housed in the frame body, respectively. A through hole is provided in at least one of the upper and lower plates and the frame body, an electrode for external connection is provided on the outer surface side of the through hole, and the vibrator is provided on the inner surface side of the through hole. An oscillator provided with an electrode for connection with. 2. The oscillator according to claim 1, wherein the oscillator has an oscillation electrode and a connection electrode, and a notch is formed in a portion between these electrodes. 3. A through hole is provided in at least one of the upper and lower plates, and a vibrator is fixed to the upper plate or the lower plate on the through hole, and a glass surface is provided on the vibrator surface opposite to the fixing portion. The oscillator according to claim 1, wherein a weight body is fixed.