JPH0785415A - Laminated magnetic head and its manufacture - Google Patents

Abstract

PURPOSE:To make a wiggle hard to occur without using ferrite for a magnetic core thereby to reproduce data correctly, by forming between a magnetic gap and one of winding grooves or the like a gap part magnetic film made of a magnetic material of a higher saturation magnetization than that of the magnetic core, and remarkably widening the allowance range of the recording current. CONSTITUTION:A metallic magnetic film of a high saturation density and a high magnetic permeability and an insulating film are layered on a non-magnetic block. The non-magnetic block is bonded via glass to a magnetic core produced similarly to the above lamination, which is cut in predetermined directions to obtain non- magnetic substrates 1a-1d. Winding grooves 4a and 4b are provided at end parts of the substrates 1a, 1b and 1c, 1d. Then, a magnetic material of a larger saturation magnetization than that of the metallic magnetic film of one of the magnetic cores is formed in the grooves 4a, thereby forming a gap part magnetic film 13. Non- magnetic gap materials 5a, 5b are vapor-deposited on the film 13 and the winding groove 4b. Thereafter, substrates 1a, 1b are bonded with substrates 1c, 1d by a glass 9. After the shape and the gap depth are determined in compliance with the purpose, this laminated magnetic head is obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated magnetic head used in a magnetic recording device and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, an external storage device for a computer, V
In a magnetic recording device such as a TR, a single metal magnetic film having a sufficiently high saturation magnetic flux density or an insulator such as SiO ₂ is sputtered in order to cope with a narrower track width and a higher frequency. There have been developed various laminated magnetic heads having a structure in which they are alternately laminated while forming films by a vacuum method, a vapor deposition method or the like, and these are sandwiched by non-magnetic substrates, and a manufacturing method thereof. Also, with the miniaturization and high capacity of magnetic recording devices,
There is a demand for higher performance of magnetic heads.
A metal-in-gap head (hereinafter referred to as MIG) in which a metal magnetic film having a high saturation magnetic flux density is formed on at least one of the facing surfaces of a ferrite core facing each other via a magnetic gap.
Various types have been developed.

The conventional laminated magnetic head will be described below.
Reveal FIG. 10 is an external perspective view of a conventional laminated magnetic head.
Is. 1a to 1d are non-magnetic substrates made of non-magnetic material, 2
a is a first magnetic coil sandwiched between the non-magnetic substrates 1a and 1b.
A and 2b are second magnetic layers sandwiched between the non-magnetic substrates 1c and 1d.
Magnetic cores 3 are non-magnetic substrates 1a and 1b and non-magnetic substrate 1
formed between the first magnetic core 2a and the second magnetic core 2a.
The magnetic gap 4a is separated from the magnetic core 2b of
Electromagnetic change is formed by cutting one end of the flexible substrates 1a and 1b.
A first winding around which a coil (not shown) for switching is wound.
The grooves 4b are the first windings formed on the non-magnetic substrates 1c and 1d.
Second winding groove similar to the wire groove 4a, 5a is SiO₂ From etc.
Is formed in the first winding groove 4a, etc., and the magnetic gap 3 is formed.
The constituent first non-magnetic gap material, 5b is the second winding groove
Similar to the first non-magnetic gap material 5a formed on 4b, etc.
The second non-magnetic gap material, 6a, has a high saturation magnetic flux density and high
Permeability Fe-Al-Si alloy, amorphous alloy, F
Formed on non-magnetic substrates 1a and 1c made of e-Ni alloy
First metal magnetic film formed, 7a is SiO₂ , Al₂ O
₃ And the like formed on the first metal magnetic film 6a.
Insulating film 6b is a first insulating film formed on the first insulating film 7a.
The second metal magnetic film similar to the metal magnetic film 6a of FIG.
The second insulating film 8 formed on the second metal magnetic film 6b is
Bonding the non-magnetic substrates 1b and 1d and the second insulating film 7b
Adhesive glass, 9 is non-magnetic substrate 1a, 1b and non-magnetic substrate 1
This is a bonding glass for bonding c and 1d.

A method of manufacturing the conventional laminated magnetic head having the above-described structure will be described below. Figure 11
FIGS. 12A to 12C and FIGS. 12A and 12B are perspective views showing a conventional method of manufacturing a laminated magnetic head. Reference numeral 10a denotes a first nonmagnetic block in which a magnetic core 2 made of a nonmagnetic material and having a first metal magnetic film 6a or the like laminated on one end thereof is provided.
Reference numeral 0b is a second non-magnetic block made of a non-magnetic material and adhered to the magnetic core 2 through the adhesive glass 8 to reinforce the magnetic core 2, 11 is the magnetic core 2 and the first non-magnetic block 10.
a, a magnetic core block composed of the second non-magnetic block 10b, and 12 a first magnetic core 2a and a second magnetic core 2b.
Is a facing surface indicating a surface facing with. First, Fig. 11
As shown in (a), a first metal magnetic film 6a, a first insulating film 7a, a second metal magnetic film 6b, and a second insulating film 7b are formed on the other end surface of the first non-magnetic block 10a. Then, the magnetic cores 2 are formed by sequentially stacking them by a sputtering method or the like. next,
As shown in FIG. 11B, in order to reinforce the magnetic core 2,
The second non-magnetic block 10b is adhered onto the second insulating film 7b via the adhesive glass 8 to form the magnetic core block 11. Next, as shown in FIG. 11C, the magnetic core block 11 is cut and separated in the direction of arrow A so as to be orthogonal to the longitudinal direction of the magnetic core 2 to form the nonmagnetic substrates 1a to 1d. Next, as shown in FIG. 12A, the non-magnetic substrate 1
A first winding groove 4a and a second winding groove 4b are formed by cutting at the ends of the a and 1b and the non-magnetic substrates 1c and 1d,
The facing surface 12 at this end is mirror-finished by lapping or the like. Here, only one of the first winding groove 4a and the second winding groove 4b may be formed. Next, as shown in FIG. 12B, on the first winding groove 4a, the second winding groove 4b, and the facing surface 12, the first non-magnetic gap member 5a made of SiO ₂ and the The second non-magnetic gap material 5b is formed. Next, as shown in FIG. 10, the non-magnetic substrate 1
The a and 1b and the non-magnetic substrates 1c and 1d are bonded and integrated while heating and bonding the bonding glass 9. After this,
A laminated magnetic head is manufactured by controlling the shape and gap depth according to the purpose.

The operation of the conventional laminated magnetic head manufactured as described above will be described below. FIG.
FIG. 13A is a graph showing the recording current-signal amplitude characteristic of the conventional laminated magnetic head, and FIG. 13B is a graph showing the recording current-overwrite characteristic of the conventional laminated magnetic head. As is clear from FIG. 13A, when the recording current is increased, the signal amplitude initially increases accordingly. However, when the recording current exceeds a certain current value Ip, the signal amplitude is increased. Is decreasing on the contrary. Similarly, FIG.
As is clear from (b), the overwrite characteristic also deteriorates when the recording current exceeds Ip.

[0006]

However, in the above-mentioned conventional configuration, when the recording current becomes larger than the specific current value Ip, the recording magnetic field distribution in the magnetic gap 3 widens,
Since the full width at half maximum of the signal waveform increases, the magnetic core 2 of the stacked magnetic head is saturated, the full width at half maximum of the signal amplitude increases, the signal amplitude decreases, and the SN ratio of the stacked magnetic head decreases. Resulting in. Therefore, there is a problem in that a data read error may occur and the reliability is poor. Similarly, the signal amplitude decreases and the overwrite characteristic also deteriorates. At the time of overwriting data, the previously recorded data may remain, resulting in a data read error, which is unreliable. Had the problem. Further, in order to prevent the above-described decrease in signal amplitude and deterioration in overwrite characteristics, the magnitude of the recording current has to be limited to around Ip, which has a problem of lacking versatility. On the other hand, in the conventional MIG head, the magnetic core is made of ferrite, and the wiggle of the reproduced waveform due to the nonuniform movement of the domain wall of the grains of the ferrite,
There is a problem that a pseudo pulse is generated by the magnetic deterioration layer at the boundary between the ferrite core and the metal magnetic film, which may cause a data read error, resulting in lack of reliability.

The present invention solves the above-mentioned conventional problems. Even when the recording current exceeds Ip,
The signal amplitude can be made substantially constant, the SN ratio can be improved and the data can be accurately read, and the overwrite characteristics can be improved to completely erase the previously recorded data when overwriting the data. It is possible to improve the reliability, the size of the recording current can be freely set, the versatility is excellent, the reproduction waveform is free from wiggle and pseudo pulse, and the SN ratio of the magnetic recording device is improved. A highly reliable laminated magnetic head capable of reading data accurately and a highly reliable laminated magnetic head capable of extremely easily manufacturing a highly reliable and versatile laminated magnetic head. It is intended to provide a manufacturing method.

[0008]

In order to achieve this object, a laminated magnetic head according to a first aspect of the present invention comprises:
A single metal magnetic film or a metal magnetic film with an insulating film in between 2
A laminated type including a magnetic core formed by stacking the above metal magnetic films, a non-magnetic substrate sandwiching the magnetic core, and a magnetic gap made of a non-magnetic material and dividing the magnetic core and the non-magnetic substrate into two parts. A magnetic head having a structure in which a gap magnetic film made of a magnetic material having a higher saturation magnetization than a metal magnetic film is provided between at least one of two non-magnetic substrates and a magnetic gap. The laminated magnetic head according to claim 2 has a structure according to claim 1, wherein the gap magnetic film has a step portion and a portion not in contact with the magnetic core is formed lower than the magnetic core. And the laminated magnetic head according to claim 3 is the same as in claim 1 or 2.
5. The laminated type structure according to claim 4, wherein any one of the layers has a structure including an underlayer formed of a metal thin film and an oxide thin film between the gap magnetic film and the nonmagnetic substrate. A magnetic head is manufactured by laminating two or more metal magnetic films on one non-magnetic substrate via a single metal magnetic film or an insulating film to form a magnetic core, and then forming another magnetic core on the magnetic core by glass or the like. A magnetic core block forming step of adhering a non-magnetic substrate to form a magnetic core block and a magnetic core block formed in the magnetic core block forming step are divided, and a winding groove is formed in at least one of the two divided cross sections. A winding groove forming step to be formed, and a magnetic material having a saturation magnetization higher than that of the metal magnetic film is formed on at least one of the two divided sections formed by the winding groove forming step by a sputtering method, a vapor deposition method, or the like. Then the gap part magnetic The step of forming the magnetic film of the gap portion for forming the magnetic field is performed, and the non-magnetic gap material is formed directly on the two cross sections or through the magnetic film of the gap section, and the two cross sections are brought into contact with each other to integrate them by glass welding or the like to form a magnetic field. And a magnetic gap forming step for forming a gap. The stacked magnetic head according to claim 5 has the magnetic gap formed in the magnetic gap forming step according to claim 4. 7. A structure including a step forming step of forming a step by removing a portion of the magnetic film of the gap portion that is not in contact with the magnetic core by a chemical etching method, an ion milling method, or the like. The laminated magnetic head according to claim 4 is characterized in that, in any one of claims 4 and 5, at least any one of the two cross sections formed in the winding groove forming step is sputtered or vaporized. A metal thin film or an oxide thin film to form an underlayer by a sputtering method or the like, and a magnetic material having a saturation magnetization higher than that of the metal magnetic film is formed on the underlayer by a sputtering method or a vapor deposition method to form a gap magnetic film. It has a structure including a step of forming a gap portion magnetic film for forming.

Here, as the metal magnetic film, Fe--Al is used.
-Si-based alloys, amorphous alloys, Fe-Ni-based alloys, etc. are preferably used. Further, as the insulating film, SiO ₂ ,
Al ₂ O ₃ is preferably used. Further, as the magnetic material to be the gap magnetic film, a Fe-based nitride alloy film, an amorphous alloy film, or the like having a saturation magnetization larger than that of the metal magnetic film described above is preferably used. In addition, a metal thin film to be an underlayer,
As the oxide thin film, silicon oxide, alumina, chromium, chromium nitride or the like is preferably used.

[0010]

With this configuration, a gap portion magnetic film made of a magnetic material having a higher saturation magnetization than the metal magnetic film forming the magnetic core is formed between at least one of the two non-magnetic substrates and the magnetic gap. Therefore, even if the recording current increases, the entire magnetic core including the magnetic film in the gap portion is less likely to be saturated, the recording magnetic field distribution in the magnetic gap becomes narrow, and the half-width of the signal waveform increases. Without doing so, the signal amplitude can be made substantially constant and the SN ratio of the magnetic recording device can be improved to read data accurately. Further, even when the recording current is increased, the overwrite characteristic is similarly improved, and the previously recorded data can be completely erased when overwriting the data.
Data can be reproduced accurately. In addition, even if the recording current is increased, the signal amplitude can be made substantially constant and the overwrite characteristic can be improved as described above, so that the magnitude of the recording current can be freely set. . Furthermore, since the magnetic core does not contain ferrite and there is no inhomogeneity in the domain wall movement unique to ferrite, there is no wiggle in the reproduced waveform, and the SN ratio of the magnetic recording device is improved, making it possible to save data. Can be read accurately. Further, by forming the step portion in the portion of the gap portion magnetic film that does not contact the magnetic core, it is possible to prevent signals from being picked up from the adjacent tracks and accurately reproduce the data. Further, by forming an underlayer between the winding groove and the gap magnetic film, a chemical reaction between the gap magnetic film and the magnetic core can be prevented. On the other hand, a magnetic material is deposited on at least one of the two pre-formed cross sections by a sputtering method, an evaporation method or the like to form a gap magnetic film, and the gap magnetic film is formed directly or on the two cross sections. By forming the non-magnetic material via the magnetic film, the magnetic film in the gap portion can be manufactured very easily. Further, the stepped portion is formed by removing the portion of the magnetic film of the gap portion forming the magnetic gap that is formed in advance, which is not in contact with the magnetic core, by a chemical etching method, an ion milling method, or the like. It can be manufactured very easily. Further, a metal thin film or an oxide thin film is formed on at least one of the two divided sections formed in advance by a sputtering method, a vapor deposition method or the like to form a base layer, and the sputter method or the vapor deposition method is formed on the base layer. By forming a magnetic material by a method such as the above to form the magnetic film in the gap portion, the underlayer can be manufactured extremely easily.

[0011]

【Example】

(Embodiment 1) A laminated magnetic head according to a first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an external perspective view of a main part of a laminated magnetic head according to a first embodiment of the present invention. 1a to 1d are non-magnetic substrates, 2a
Is a first magnetic core, 2b is a second magnetic core, 3 is a magnetic gap, 4a is a first winding groove, 4b is a second winding groove, 5
a is a first non-magnetic gap material, 5b is a second non-magnetic gap material, and 9 is a bonding glass. Since these are the same as in the conventional example, the same reference numerals are given and description thereof is omitted. Reference numeral 13 is made of a magnetic material having a saturation magnetization higher than those of the first magnetic core 2a and the second magnetic core 2b.
And a first non-magnetic gap material 5a.

A method of manufacturing the laminated magnetic head according to the first embodiment of the present invention constructed as above will be described below. 2 (a) to (c) and FIG. 3 (a),
FIG. 3B is a perspective view showing the method of manufacturing the laminated magnetic head according to the first embodiment of the invention. 6a is a first metal magnetic film, 6b is a second metal magnetic film, 7a is a first insulating film,
7b is a second insulating film, 8 is a bonding glass, 10a is a first non-magnetic block, 10b is a second non-magnetic block, 11
Is a magnetic core block, and 12 is a facing surface. Since these are the same as in the conventional example, the same reference numerals are given and description thereof is omitted. First, as shown in FIG. 2A, Fe− having a high saturation magnetic flux density and a high magnetic permeability is formed on the first non-magnetic block 10a.
Al-Si-based alloy, an amorphous alloy, a first metal magnetic film 6a consisting of Fe-Ni alloy or the like, SiO _2, Al
_The magnetic core 2 is formed by laminating the first insulating film 7a made of ₂ O ₃ or the like by a sputtering method or the like, and similarly laminating the second metal magnetic film 6b and the second insulating film 7b in order. Next, as shown in FIG. 2B, the second non-magnetic block 10 serving as a reinforcing material is provided on the magnetic core 2 with the adhesive glass 8 interposed therebetween.
b is bonded to form the magnetic core block 11. next,
As shown in FIG. 2C, the magnetic core block 11 is cut in the direction of arrow A so as to be orthogonal to the longitudinal direction of the magnetic core 2, and the nonmagnetic substrates 1a to 1d are manufactured. Next, FIG.
As shown in (a), the first winding groove 4a and the second winding groove 4b are formed by cutting or the like at the end portions of the nonmagnetic substrates 1a and 1b and the nonmagnetic substrates 1c and 1d. The facing surface 12 at this end is mirror-finished by lapping or the like. Here, only one of the first winding groove 4a and the second winding groove 4b may be formed. Next, as shown in FIG. 3B, a magnetic material such as Fe-based nitride alloy having a saturation magnetization larger than those of the first metal magnetic film 6a and the second metal magnetic film 6b forming the magnetic core 2 is used. A film is formed on the first winding groove 4a or the like by a sputtering method, a vapor deposition method, or the like, and the gap portion magnetic film 13 is formed.
And the first non-magnetic gap material 5a and the second non-magnetic gap material 5b made of SiO ₂ or the like are formed on the gap magnetic film 13 and the second winding groove 4b, respectively, by the sputtering method. , It is formed by using the vapor deposition method. Next, FIG.
, The non-magnetic substrate 1a, 1b and the non-magnetic substrate 1
c and 1d are bonded and integrated while heating and bonding the bonding glass 9. After that, the laminated magnetic head is manufactured by controlling the shape and the gap depth according to the purpose.

Performance comparison tests were carried out on the laminated magnetic head according to the first embodiment of the present invention manufactured as described above and the conventional laminated magnetic head. The results will be described below.

Experimental Example 1 The recording current-signal amplitude characteristic and recording current-overwrite characteristic of the laminated magnetic head of the first embodiment of the present invention were measured.
The laminated magnetic head used for this measurement is as follows. Gap length: 0.34 μm, Gap width: 9 μm,
Film thickness of the gap magnetic film 13; 1.5 μm, material of the first metal magnetic film 6a and the second metal magnetic film 6b; Fe—Al—Si alloy film with saturation magnetization of 1T, gap magnetic film 13 Material: Fe-based nitride alloy film with saturation magnetization of 1.5T,
Number of turns of coil (not shown): 40 times, material of magnetic recording medium; sputtered thin film medium with coercive force of 1450 (Oe), spacing between head and magnetic recording medium; 0.1 μm. It is as follows. Peripheral speed: 8.26m
/ S, recording frequency; 1.5 MHz to 6 MHz, recording current; 1 mA to 20 mA op The results obtained by the above measurement are shown in FIGS. 4 (a) and 4 (b). FIG. 4A is a graph showing the recording current-signal amplitude characteristic, and FIG. 4B is a graph showing the recording current-overwrite characteristic.

(Comparative Example 1) A recording current-signal amplitude characteristic was obtained in the same manner as in Experimental Example 1, except that a conventional laminated magnetic head having no gap portion magnetic film 13 as shown in FIG. 10 was used.
The recording current-overwrite characteristic was measured. The results are shown in FIGS. 4 (a) and 4 (b).

As is apparent from FIG. 4 (a), the signal amplitude of the experimental example is maintained at a substantially constant value even when the recording current is large, and is significantly larger than that of the comparative example. Therefore, even if the recording current becomes large, the S
It can be said that the N ratio does not change and the data can be read correctly. Further, as is clear from FIG. 4B, the overwrite characteristic of the experimental example maintains a substantially constant value even when the recording current becomes large, and is significantly improved as compared with the comparative example. Therefore, even if the recording current becomes large, the previously recorded data can be completely erased at the time of overwriting, and the data can be read accurately. Therefore, it can be said that the allowable range of the recording current can be greatly expanded. Furthermore, the reproduced waveform at this time is M
It was found that the Uighur and the pseudo pulse, which are seen in the IG head, are contained in a small amount, and the data can be reproduced correctly.

As described above, according to this embodiment, the gap portion magnetic film made of a magnetic material having a saturation magnetization higher than that of the magnetic core 2 is provided between the magnetic gap 3 and the first winding groove 4a on one side. By forming 13, the data can be correctly reproduced even when the recording current becomes large, and the previously recorded data can be completely erased at the time of overwriting, and the recording current is allowed. The range can be greatly expanded, and since ferrite is not used in the magnetic core, wiggle and the like are less likely to occur, and data can be reproduced correctly.

In this embodiment, the first magnetic core 2a and the second magnetic core 2b are connected to the first metal magnetic film 6a,
The second metal magnetic film 6b is laminated by way of the first insulating film 7a. This is a single metal magnetic film,
Alternatively, it may be composed of three or more metal magnetic films.

(Embodiment 2) A laminated magnetic head according to a second embodiment of the present invention will be described below with reference to the drawings. FIG. 5 is an external perspective view of a main portion of a laminated magnetic head according to the second embodiment of the present invention. The difference from the configuration of the first embodiment is that between the first winding groove 4a, the second winding groove 4b, etc. and the first non-magnetic gap material 5a, the second non-magnetic gap material 5b, This is that the first gap magnetic film 13a and the second gap magnetic film 13b made of a magnetic material having a higher saturation magnetization than the magnetic core 2 are formed.

A method of manufacturing the laminated magnetic head according to the second embodiment of the present invention having the above structure will be described below. In the laminated magnetic head according to the second embodiment of the present invention, the first gap magnetic film 13a and the second gap magnetic film 13a are provided on the first winding groove 4a and the second winding groove 4b, respectively.
Of the first non-magnetic gap material 5 is formed on the gap portion magnetic film 13b by sputtering, vapor deposition or the like.
a and the second non-magnetic gap material 5b are laminated respectively,
Manufactured as in Example 1.

A performance test was conducted on the laminated magnetic head according to the second embodiment of the present invention manufactured as described above. The result will be described.

(Experimental Example 2) Except that the gap length of the laminated magnetic head is 0.35 μm and the film thicknesses of the first gap part magnetic film 13a and the second gap part magnetic film 13b are both 1.5 μm. In the same manner as in Experimental Example 1, the recording current-signal amplitude characteristic and the recording current-overwriting characteristic were measured.

As a result, the same tendency as in Experimental Example 1 was obtained. In addition, in Experimental Example 2, the full width at half maximum of the signal waveform was reduced by 6 ns and the signal amplitude was also increased by 30 μV, as compared with Experimental Example 1. Therefore, it can be said that the experimental example 2 can increase the allowable range of the recording current even when the recording frequency is higher than that of the experimental example 1.

As described above, according to the present embodiment, the first gap magnetic film 13a and the second gap magnetic film 13b are provided in the first winding groove 4a and the second winding groove 4b, respectively. By forming it, the signal amplitude can be further increased, and the allowable range of the recording current can be increased even when the recording frequency becomes high.

(Third Embodiment) A laminated magnetic head according to a third embodiment of the present invention will be described below. FIG. 6 is an external perspective view of an essential part of a laminated magnetic head according to the third embodiment of the present invention, and FIG. 7 is an external perspective view of an essential part of an applied example of the laminated magnetic head according to the third embodiment of the present invention. Is. Figure 6
The difference from the configuration of the first embodiment is that the gap magnetic film 13 has a step portion 14 formed by lowering a portion of the gap magnetic film 13 that is not in contact with the first magnetic core 2a and the second magnetic core 2b. Is. In FIG. 7, the difference from the configuration of the first embodiment is that the first magnetic core 2a of the gap magnetic film 13 is
The point is that the stepped portion 15 is formed by lowering the portion that is not in contact with the second magnetic core 2b, the peripheral magnetic gap 3, and the nonmagnetic substrates 1a to 1d.

A method of manufacturing the laminated magnetic head according to the third embodiment of the present invention having the above structure will be described below. 8 (a) and 8 (b) are perspective views of essential parts showing a method of manufacturing a laminated magnetic head according to the third embodiment of the present invention. First, a photoresist (not shown) was applied to the magnetic recording medium facing surface of the laminated magnetic head manufactured in the same manner as in Example 1, and as shown in FIG. The photoresist (not shown) applied to the portion other than the magnetic core 2 is removed, and the photoresist layer 16 is formed on the magnetic core 2.
Next, using a chemical etching method using an acidic solution such as a hydrochloric acid solution, as shown in FIG. 8B, a portion of the gap magnetic film 13 where the photoresist layer 16 is not formed is eroded. The step portion 14 is formed. Next, the photoresist layer 16 is removed using an organic solvent such as acetone, and a laminated magnetic head according to the third embodiment of the present invention as shown in FIG. 6 is manufactured.

Here, if a hydrochloric acid solution having a pH of about 3 is used as the acidic solution, the Fe-based nitride alloy film forming the gap magnetic film 13 can be eroded at a speed of 1 μm / min, and a rapid treatment can be performed. It can be performed. At this time,
The non-magnetic substrates 1a to 1d are also slightly corroded, but these are generally made of a ceramic material, and the speed at which they are corroded is much smaller than that of the Fe-based nitride alloy film, so there is no problem. On the other hand, if an ion milling method or the like is used instead of the chemical etching method, the non-magnetic substrate 1a ...
1d can also be processed, and processing as shown in FIG. 7 is also possible.

As described above, according to this embodiment, the step portion 1 is formed in the portion of the gap portion magnetic film 13 which does not contact the magnetic core 2.
By forming 4 and 15, it is possible to prevent signals from being picked up from adjacent tracks and to reproduce the data accurately.

Although only one gap magnetic film 13 is formed in this embodiment, two magnetic films may be formed as in the second embodiment.

(Embodiment 4) A laminated magnetic head according to a fourth embodiment of the present invention will be described below with reference to the drawings. FIG. 9 is an external perspective view of the main part of a laminated magnetic head according to the fourth embodiment of the present invention. The difference from the configuration of the first embodiment is that an underlayer 17 made of silicon oxide, alumina, chromium, chromium nitride or the like is formed between the first winding groove 4a and the first nonmagnetic gap material 5a. Is.

A method of manufacturing the laminated magnetic head of the fourth embodiment of the present invention constructed as above will be described below. First, similarly to the first embodiment, the first winding groove 4a and the second winding groove 4b are formed, and the facing surface 12 is lapped. Next, on the first winding groove 4a, etc.,
The underlying layer 17 made of chromium nitride or the like is formed by using a sputtering method, a vapor deposition method, or the like. Next, the gap portion magnetic film 13 is formed on the underlayer 17, and thereafter, a laminated magnetic head as shown in FIG. 9 is manufactured in the same manner as in Example 1.

Performance comparison tests were carried out on the laminated magnetic head according to the fourth embodiment of the present invention manufactured as described above and the laminated magnetic head according to the first embodiment of the present invention. The results will be described below.

(Experimental Example 3) Experimental Example 1 was repeated except that an underlayer 17 made of chromium nitride having a thickness of 0.01 μm was formed between the first winding groove 4a and the gap magnetic film 13. A similar laminated magnetic head was manufactured and examined for the presence or absence of chemical reaction. The results are shown below.

(Comparative Example 2) Existence of a chemical reaction was examined in the same manner as in Experimental Example 3 except that the same laminated magnetic head as in Experimental Example 1 was used. The results are shown below.

As a result of this experiment, in Comparative Example 2, the contact between the gap magnetic film 13 and the first magnetic core 2a and the contact between the gap magnetic film 13 and the non-magnetic substrates 1a and 1b were chemically performed. It has been found that a reaction occurs and discoloration of the gap magnetic film 13 occurs. However, in Experimental Example 3, it was found that such a defect did not occur, and the gap portion magnetic film 1
It can be said that a chemical reaction between 3 and the first magnetic core 2a or the like can be prevented.

As described above, according to this embodiment, by forming the underlayer 17 between the first winding groove 4a and the gap magnetic film 13, the gap magnetic film 13 and the first magnetic film 13 are formed. It is possible to prevent a chemical reaction between the core 2a and the like.

In this embodiment, the number of the magnetic film 13 in the gap portion is one, but as shown in the embodiment 2, it is two.
Alternatively, the base layer 17 may be formed on each of them. In addition, as shown in the third embodiment, the step portions 14, 1
5 may be formed.

[0038]

As described above, according to the present invention, a gap made of a magnetic material having a saturation magnetization higher than that of the metal magnetic film forming the magnetic core is provided between at least one of the two non-magnetic substrates and the magnetic gap. Since the partial magnetic film is formed, even if the recording current increases, the entire magnetic core including the magnetic film in the gap portion is less likely to be saturated, and the half-width of the signal amplitude is suppressed from increasing. With the amplitude kept substantially constant, the SN ratio of the magnetic recording device can be improved to accurately read the data, and even when the recording current increases, the overwrite characteristic is similarly improved and the data is overwritten. At the time of writing, the previously recorded data can be completely erased, the data can be accurately reproduced and the reliability is high. Amplitude Since the write current can be made constant and the overwrite characteristic can be improved, the magnitude of the recording current can be freely set and is excellent in versatility. Since the magnetic core does not contain ferrite, the domain wall movement unique to ferrite can be prevented. Since the non-uniformity and the magnetic deterioration layer at the boundary between the ferrite and the metal magnetic film do not occur, it is difficult for wiggle and pseudo pulse to occur in the reproduced waveform, and the SN ratio of the magnetic recording device is improved, so that the data can be accurately recorded. It is possible to read, and by forming a step in the gap magnetic film that does not come into contact with the magnetic core, it is possible to prevent signals from picking up from adjacent tracks and reproduce data accurately. By forming an underlayer between the winding groove and the gap magnetic film, it is possible to prevent chemical reaction between the gap magnetic film and the magnetic core. And a laminated magnetic head, and a gap magnetic film is formed by depositing a magnetic material on at least one of the two pre-formed cross sections by sputtering, vapor deposition, etc. Alternatively, by forming a non-magnetic material through the gap magnetic film, the gap magnetic film can be manufactured very easily, and the gap magnetic film and the magnetic core of the gap magnetic film forming the preformed magnetic gap can be formed. By forming the step portion by removing the portions not in contact with each other by the chemical etching method, the ion milling method, or the like, the step portion can be formed extremely easily, and at least one of the two divided cross sections formed in advance can be formed. 1 or 2 to form a metal thin film or an oxide thin film by a sputtering method, a vapor deposition method or the like to form a base layer,
By forming a magnetic material on the underlayer by a sputtering method, a vapor deposition method, or the like to form a gap magnetic film,
It is possible to realize a method of manufacturing a laminated magnetic head with excellent productivity, which is capable of extremely easily forming an underlayer.

[Brief description of drawings]

FIG. 1 is an external perspective view of a main part of a laminated magnetic head according to a first embodiment of the invention.

2A is a perspective view showing a method of manufacturing a laminated magnetic head according to a first embodiment of the present invention, and FIG. 2B is a perspective view of a method of manufacturing a laminated magnetic head according to the first embodiment of the present invention. Perspective view (c) is a perspective view showing a method of manufacturing the laminated magnetic head according to the first embodiment of the present invention.

3A is a perspective view showing a method of manufacturing the laminated magnetic head according to the first embodiment of the present invention, and FIG. 3B is a perspective view of the method of manufacturing the laminated magnetic head according to the first embodiment of the present invention. Perspective view

FIG. 4A is a graph showing the recording current-signal amplitude characteristics of the laminated magnetic head in the first embodiment of the present invention and the conventional laminated magnetic head, and FIG. 4B is the graph of the first embodiment of the present invention. Graph showing recording current-overwrite characteristics of the laminated magnetic head and the conventional laminated magnetic head in FIG.

FIG. 5 is an external perspective view of a main part of a laminated magnetic head according to a second embodiment of the invention.

FIG. 6 is an external perspective view of a main part of a laminated magnetic head according to a third embodiment of the invention.

FIG. 7 is an external perspective view of an essential part of an application example of a laminated magnetic head according to a third embodiment of the invention.

FIG. 8A is a perspective view of a main part showing a method of manufacturing a laminated magnetic head according to a third embodiment of the present invention. FIG. 8B is a method of manufacturing a laminated magnetic head according to a third embodiment of the present invention. Perspective view showing

FIG. 9 is an external perspective view of an essential part of a laminated magnetic head according to a fourth embodiment of the invention.

FIG. 10 is an external perspective view of a conventional laminated magnetic head.

FIG. 11A is a perspective view showing a conventional method for manufacturing a laminated magnetic head. FIG. 11B is a perspective view showing a method for manufacturing a conventional laminated magnetic head. FIG. 11C is a method for manufacturing a conventional laminated magnetic head. Perspective view showing the method

FIG. 12A is a perspective view showing a conventional method for manufacturing a laminated magnetic head, and FIG. 12B is a perspective view showing a method for manufacturing a conventional laminated magnetic head.

FIG. 13A is a graph showing a recording current-signal amplitude characteristic of a conventional laminated magnetic head, and FIG. 13B is a graph showing a recording current-overwrite characteristic of a conventional laminated magnetic head.

[Explanation of symbols]

 1a, 1b, 1c, 1d non-magnetic substrate 2 magnetic core 2a first magnetic core 2b second magnetic core 3 magnetic gap 4a first winding groove 4b second winding groove 5a first non-magnetic gap material 5b Second non-magnetic gap material 6a First metal magnetic film 6b Second metal magnetic film 7a First insulating film 7b Second insulating film 8 Adhesive glass 9 Bonding glass 10a First non-magnetic block 10b Second Non-magnetic block 11 magnetic core block 12 facing surface 13 gap part magnetic film 13a first gap part magnetic film 13b second gap part magnetic film 14,15 step part 16 photoresist layer 17 underlayer

Claims (6)

[Claims] 1. A single metal magnetic film or an insulating film is interposed between the two.
A magnetic core formed by stacking the above metal magnetic films; a non-magnetic substrate sandwiching the magnetic core; and a magnetic gap made of a non-magnetic material and dividing the magnetic core and the non-magnetic substrate into two. And a gap portion magnetic film made of a magnetic material having higher saturation magnetization than the metal magnetic film between at least one of the two non-magnetic substrates and the magnetic gap. A laminated magnetic head characterized by the above. 2. The laminated magnetic head according to claim 1, wherein the gap magnetic film has a step portion and a portion not in contact with the magnetic core is formed lower than the magnetic core. 3. An underlayer formed of a metal thin film or an oxide thin film is provided between the gap magnetic film and the non-magnetic substrate, and any one of claims 1 and 2 is provided. The laminated magnetic head according to 1. 4. A magnetic core is formed by laminating two or more metal magnetic films on one non-magnetic substrate via a single metal magnetic film or an insulating film, and another magnetic film is formed on the magnetic core by using glass or the like. A magnetic core block forming step of adhering a magnetic substrate to form a magnetic core block, and dividing the magnetic core block formed in the magnetic core block forming step to form a winding groove in at least one of the two divided sections. A winding groove forming step to be formed, and a magnetic material having a saturation magnetization higher than that of the metal magnetic film on at least one of the two cross sections formed in the winding groove forming step by a sputtering method, an evaporation method or the like. And a gap magnetic film forming step of forming a gap magnetic film by forming a non-magnetic gap material on the two cross sections directly or through the gap magnetic film. Abut Method for manufacturing a laminated magnetic head is characterized by comprising a magnetic gap forming step, the forming a magnetic gap and integrated by the glass fusing and the like so. 5. A step portion is formed by removing a portion of the magnetic film of the gap portion forming the magnetic gap formed in the magnetic gap forming step, which is not in contact with the magnetic core, by a chemical etching method, an ion milling method or the like. 5. The method for manufacturing a laminated magnetic head according to claim 4, further comprising a step of forming a stepped portion. 6. An underlayer is formed by forming a metal thin film or an oxide thin film on at least one of the two cross sections formed in the winding groove forming step by a sputtering method, a vapor deposition method, or the like. A gap part magnetic film forming step of forming a gap part magnetic film by forming a magnetic material having a saturation magnetization higher than that of the metal magnetic film on the underlayer by a sputtering method, a vapor deposition method, or the like. Item 6. A method of manufacturing a laminated magnetic head according to any one of Items 4 and 5.