JPH0783951A - Angular velocity sensor - Google Patents

Abstract

PURPOSE:To provide an angular velocity sensor which can be self-diagnosed regarding the angular velocity sensor which is used in an inertial navigation apparatus or the like. CONSTITUTION:An angular velocity sensor is constituted of a detection element part 1, of a sensor-signal processing circuit part 2 which converts a detected signal from the detection element part into signal information on an angular velocity and of an electromagnetic generation part 4 which moves the detection element part 1. Thereby, the detection element part 1 is made movable by the electromagnetic generation part 4, a pseudo-Coriolis' force is given to the element part, and the operating state of the angular velocity sensor is confirmed by checking the output of the sensor-signal processing circuit part 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity sensor using vibration used in inertial navigation systems and the like.

[0002]

2. Description of the Related Art Conventionally, a mechanical gyro has been mainly used as an inertial navigation system using a gyroscope for knowing the direction of a moving object such as an airplane or a ship. However, the size of the device is large, the cost is high, and it is difficult to apply the device to a device that requires miniaturization.

Further, there is a vibrating angular velocity sensor for detecting [Coriolis force] from a vibrating detection element by vibrating an object without using a rotational force. Most of the structures have piezoelectric and electromagnetic mechanisms. These are vibrations in which the motion of the mass that constitutes the gyro is not a constant speed motion.

Therefore, when an angular velocity is applied, the Coriolis force is generated as a vibration torque having a frequency equal to the frequency of the mass. The principle of these vibration-type angular velocity sensors is to measure the angular velocity by detecting the vibration caused by the torque, and many sensors using a piezoelectric body have been devised (Journal of Japan Aerospace Society, Vol. 23, 257).
Nos. 239-350P). Such sensors and sensor devices are increasingly used for applications such as airplanes and ships that require high reliability.

[0005]

However, in the control system of the above angular velocity sensor, when the angular velocity is zero, the angular velocity DC output signal from the angular velocity sensor is zero and does not occur even if the angular velocity sensor is driven. , If it is not possible to judge whether the sensor device is normal or abnormal, and if there is more than one in the angular velocity sensor device including the sensor part,
In the control system on the system side using this, there was a risk that it could not be found even if a wrong big mistake control was committed.

The present invention has been made paying attention to such a point, and when the input angular velocity is zero, it is detected whether or not the sensor device is normally operating, and fail-safe to the control device system using the angular velocity signal is performed. It is intended to be done.

[0007]

In order to solve the above-mentioned problems, the present invention is provided with a movable means for driving an angular velocity detecting element, and causes the detecting element portion to carry out a pseudo drive corresponding to the angular velocity, thereby performing sensor signal processing. It is provided with a fail-safe function of detecting an abnormal operation by performing self-diagnosis check as to whether the output signal from the circuit is operating normally.

[0008]

In the angular velocity sensor of the present invention configured as described above, a pseudo Coriolis force is applied to the detecting element portion of the sensor to extract angular velocity signal information from the detecting element portion in the signal processing circuit portion,
By checking the extracted output signal, an abnormality of the drive system or the detection system of the detection element part of the sensor or the signal processing circuit part of the sensor is detected, and error control to the system control system using these is detected in advance. To prevent.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the angular velocity sensor of the present invention will be described with reference to the block diagram of FIG.

Reference numeral 1 is a detection element section made of a magnetic material of an angular velocity sensor, which is a driving and detection section, 2 is a signal processing circuit section for processing a detection signal 102 from the detection element section 1, and 3 is an electromagnetic wave generation section. 4 is a driving circuit for driving the driving circuit 4.

Next, the operation of the angular velocity sensor will be described. When detecting a normal angular velocity, the angular velocity 106 is applied to the detection element unit 1 and the Coriolis force generated in the detection element unit 1 is converted into an electric signal, which is obtained. The detected signal 102 thus obtained is processed by the signal processing circuit unit 2 into a signal corresponding to the angular velocity, and the output signal 101 is output.

Explaining the self-diagnosis function which is the gist of the present invention, reference numeral 103 is a drive signal input from the signal processing circuit section 2 to the drive section of the training T-element section 1, and the switch SW1 is closed. The drive signal 103 output from the signal processing circuit 2 is input to the drive circuit 3.

At this time, the drive circuit 3 is synchronized with the closing of the switch SW1 by means not particularly shown.
Then, the driving circuit 3 sends another driving signal 104 to the electromagnetic generator 4 to generate a pseudo angular velocity from the outside in synchronization with the driving signal 103.

The electromagnetic generator 4 receives another drive signal 1
A pseudo angular velocity signal 105 synchronized with the drive signal 103 is applied as an electromagnetic force to the detection element unit 1 by 04 to drive the detection element unit 1.

That is, the other drive signal 104 which is a specific Coriolis force in the drive circuit 3 is supplied to the electromagnetic generator 4.
Output signal 1 by presetting
01 can be detected and the self-diagnosis can be determined by the signal value level.

As described above, in the angular velocity sensor of the present invention, by closing the switch SW1, the detection element section 1, the signal processing circuit section 2 and the self-diagnosis additional function section (switch SW1, drive section 3, electromagnetic generation) can be very easily performed. The entire device including part 4) can be checked.

The specific structure of the detection element section 1 and the electromagnetic generation section 4 will be described with reference to FIG.

FIG. 2 shows a tuning fork type detecting element section and an electromagnetic wave generating section 4.
2 shows the relationship with the electromagnetic coils 16 and 17, which are shown in the figure. 10 is a vibrating member of a tuning fork obtained by bending a metal plate made of a magnetic material mainly composed of Fe and Ni,
On the vibrating member 10, the piezoelectric elements 11, 12, 13, 1
There is also a case where 4 is attached with an adhesive, the piezoelectric elements 11 and 12 are used for detection, and the piezoelectric elements 13 and 14 are used for driving. The piezoelectric elements 13 and 14 are driven by applying a drive signal to the piezoelectric elements 11 and 14. The sensor signal is taken out from 12. Further, 15 is a terminal base for taking out a sensor signal.

Numerals 16 and 17 are piezoelectric elements 11 for detection,
An electromagnetic coil provided in the vicinity of 12 is attracted when a magnetic field is applied by the electromagnetic coils 16 and 17 to move the sensor detection element unit 1, and by the drive signal 103 in FIG.
A magnetic field synchronized with the tuning fork signal can be applied to the detection element 1 by the electromagnetic coils 16 and 17, and a Coriolis force equivalent to that when an angular velocity is applied to the sensor section can be applied.

That is, it becomes possible to apply a pseudo force equivalent to the Coriolis force generated when an actual angular velocity is applied to the angular velocity sensor, and self diagnosis can be performed.

2 has been described with reference to FIG. 2 as a concrete structure of the detecting element section 1 and the electromagnetic wave generating section 4, which has the tuning fork type detecting element section 1. However, referring to FIGS. A specific configuration of the used one will be described.

FIG. 3 shows a case of using a syllable-type prism.
Reference numeral 18 denotes a sound piece type prismatic vibrating body made of a magnetic material, and the piezoelectric element 1
8a is attached. Reference numeral 19 is an electromagnetic coil which serves as the electromagnetic generator 4.

Further, FIG. 4 shows a case where a triangular prism of a voice unit type is used, and 20 is a triangular prism vibrating body made of a magnetic material, and the piezoelectric element 20
a is attached, and 21 is an electromagnetic coil that serves as the electromagnetic generator 4.

Further, FIG. 5 shows a case where a sound piece type cylinder is used, 22 is a vibrating body which also serves as a cylindrical piezoelectric body made of a magnetic material, and 23 is an electromagnetic coil which becomes the electromagnetic wave generating section 4. is there.

In any of the above-mentioned speech piece type angular velocity sensors, Y-dust is applied to any one of the electromagnetic coils 19, 21, 23.
A pseudo Coriolis force is applied to the prismatic vibrating body 18, the triangular prism vibrating body 20 or the vibrating body 22 which also serves as a cylindrical piezoelectric body as a detection element, and the obtained output signal is used to calculate the angular velocity as described with reference to FIG. The self-diagnosis check of the sensor can be performed.

[0026]

As described above, even if the input angular velocity is zero, the angular velocity sensor device operates normally by providing the D-year generation portion near the detection element portion and applying the pseudo Coriolis force. Since it is possible to detect whether or not it is present, system control having a fail-safe function using a safer angular velocity sensor can be realized.

[Brief description of drawings]

FIG. 1 is a block diagram of an embodiment of an angular velocity sensor of the present invention.

FIG. 2 is a perspective view of the vicinity of a detection element portion, which is the main part of the same.

FIG. 3 is a perspective view of another embodiment in the vicinity of the detection element portion, which is the main portion of the same.

FIG. 4 is a perspective view of another embodiment near the detection element portion, which is the main portion of the same.

FIG. 5 is a perspective view of another embodiment near the detection element portion, which is the main portion of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 detection element part 2 signal processing circuit part 3 drive circuit 4 electromagnetic generation part 10 vibrating member 11, 12, 13, 14 piezoelectric element 16, 17, 19, 21, 23 electromagnetic coil 18 prismatic vibrating body 20 triangular prism vibrating body 22 cylindrical column Vibrating body

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Juniyoshi Yoshida 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Katsumi Takatsu, 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd.

Claims (2)

[Claims] 1. A detection element unit for at least an angular velocity, a sensor processing circuit unit for processing the output thereof, and a movable means for moving the detection element unit provided in the vicinity of the detection element unit. An angular velocity sensor for performing self-diagnosis based on a signal from the sensor processing circuit section that is output by moving the detection element section by means. 2. The angular velocity sensor according to claim 1, wherein a magnetic material is used for the detection element section, and an electromagnetic generation section is provided as a movable means.