JPH0735699A - Method and apparatus for detecting surface defect - Google Patents
Method and apparatus for detecting surface defectInfo
- Publication number
- JPH0735699A JPH0735699A JP5176819A JP17681993A JPH0735699A JP H0735699 A JPH0735699 A JP H0735699A JP 5176819 A JP5176819 A JP 5176819A JP 17681993 A JP17681993 A JP 17681993A JP H0735699 A JPH0735699 A JP H0735699A
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- difference
- sum
- gradation
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- Image Analysis (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本願発明は、表面欠陥検出方法お
よびその装置に関し、さらに詳しくはプレスワーク等の
表面に生ずる微少欠陥を画像処理により検出する表面欠
陥検出方法およびその装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface defect detecting method and an apparatus thereof, and more particularly to a surface defect detecting method and an apparatus thereof for detecting microscopic defects occurring on the surface of a press work or the like by image processing.
【0002】[0002]
【従来の技術】一般に、プレスワーク等に生じる微少な
欠陥の検出は、作業者の目視に頼ることが多く、検出作
業も作業者の官能に頼ることが多かった。従って、熟練
した作業者でなければ上記欠陥の検出が難しいという問
題があった。2. Description of the Related Art Generally, detection of a minute defect in a press work or the like often depends on the operator's visual inspection, and the detection work often depends on the operator's sensuality. Therefore, there is a problem that it is difficult for a skilled worker to detect the above-mentioned defects.
【0003】そこで、上記欠陥検出を作業者の目視に頼
ることなく的確に行い得るような方法および装置の開発
が待たれている。Therefore, development of a method and an apparatus capable of accurately performing the above defect detection without relying on the visual inspection of an operator is awaited.
【0004】上記のような要求に対応するものとして、
被検査対象物の状態を明るさの情報を持つ多数の画素の
集合によって構成される画像として取り込み、該画像に
基づいて欠陥検出を行う方法があるが、この場合、取り
込まれた画像における各画素の明度差が微少欠陥におい
ては鮮明にでないため、欠陥検出が難しいという問題が
存する。To meet the above demands,
There is a method in which the state of the object to be inspected is captured as an image composed of a large number of pixels having brightness information and defect detection is performed based on the image. In this case, each pixel in the captured image is There is a problem that it is difficult to detect a defect because the difference in brightness is not clear in a minute defect.
【0005】なお、被検査対象物の状態をカメラのレン
ズを介して複数のセンサーで像情報として検知して、該
センサーの数に対応した複数の像情報信号を集約するこ
とにより、明度階調を精緻に検知し得るようにしたもの
が提案されている(特開平3ー216768号公報参
照)。It should be noted that the state of the object to be inspected is detected as image information by a plurality of sensors through the lens of the camera, and a plurality of image information signals corresponding to the number of the sensors are aggregated to obtain a lightness gradation. It has been proposed to precisely detect (see Japanese Patent Laid-Open No. 216768/1990).
【0006】[0006]
【発明が解決しようとする課題】ところが、上記公知例
のものでは、複数のセンサーにより検知した像情報信号
を集約するようにしているため、非常に多くのセンサー
が必要となるとともに、情報量も極めて多くならざるを
得ず、装置の複雑化および情報処理作業の繁雑化が免れ
がたいという不具合が存する。However, in the above-mentioned known example, since image information signals detected by a plurality of sensors are integrated, a very large number of sensors are required and the amount of information is also increased. There is a problem that the number of devices must be extremely large, and it is difficult to avoid complicated devices and complicated information processing work.
【0007】本願発明は、上記の点に鑑みてなされたも
ので、極めて簡易な方法および手段により被検査対象物
の微少欠陥を的確に検出し得るようにすることを目的と
するものである。The present invention has been made in view of the above points, and an object of the present invention is to make it possible to accurately detect a minute defect of an object to be inspected by an extremely simple method and means.
【0008】[0008]
【課題を解決するための手段】請求項1の方法では、上
記課題を解決するための手段として、被検査対象物の表
面状態を明るさの情報を持つ多数の画素の集合によって
構成される画像として取り込み、該画像の所定領域に含
まれる各画素毎の階調値の総和平均と、前記領域を1画
素ずらした場合に含まれる各画素毎の階調値の総和平均
とを求め、両総和平均の差を1画素ずらす前の領域の中
央に総和平均階調差として入力する処理を前記画像の全
領域に対して繰り返して行い、前記総和平均階調差の集
合からなる処理画像に対して所定の抽出レベルを基準と
する抽出処理を行って表面欠陥を検出するようにしてい
る。According to the method of claim 1, as a means for solving the above-mentioned problems, an image formed by a set of a large number of pixels indicating the surface state of an object to be inspected has brightness information. And the sum total average of the gradation values of each pixel included in a predetermined area of the image and the sum average of the gradation values of each pixel included when the area is shifted by one pixel are obtained. The process of inputting the average difference as a total average gradation difference in the center of the region before shifting one pixel is repeatedly performed on all the regions of the image, and the processed image including the set of the total average gradation differences is processed. A surface defect is detected by performing an extraction process based on a predetermined extraction level.
【0009】請求項2の装置では、上記課題を解決する
ための手段として、被検査対象物の表面状態を明るさの
情報を持つ多数の画素の集合によって構成される画像と
して取り込む画像取込手段と、前記画像の所定領域に含
まれる各画素毎の階調値の総和平均と、前記領域を1画
素ずらした場合に含まれる各画素毎の階調値の総和平均
とを求め、両総和平均の差を1画素ずらす前の領域の中
央に総和平均階調差として入力する処理を前記画像の全
領域に対して繰り返して行う画像処理手段と、前記総和
平均階調差の集合からなる処理画像に対して所定の抽出
レベルを基準とする抽出処理を行う欠陥抽出手段とを備
えて構成するようにしている。According to a second aspect of the present invention, as a means for solving the above-mentioned problems, an image capturing means for capturing the surface condition of the object to be inspected as an image composed of a large number of pixels having brightness information. And a sum average of gradation values for each pixel included in a predetermined area of the image and a sum average of gradation values for each pixel included when the area is shifted by one pixel, and both sum averages Image processing means for repeatedly performing the process of inputting as the sum total average gradation difference in the center of the region before shifting the difference of 1 pixel for all the regions of the image, and the processed image composed of the set of the sum total average gradation differences. On the other hand, there is provided a defect extraction means for performing an extraction process based on a predetermined extraction level.
【0010】[0010]
【作用】請求項1の方法あるいは請求項2の装置では、
上記手段によって次のような作用が得られる。According to the method of claim 1 or the apparatus of claim 2,
The following actions are obtained by the above means.
【0011】即ち、被検査対象物の表面状態が取り込ま
れ、明るさの情報を持つ多数の画素の集合によって構成
される画像の所定領域に含まれる各画素毎の階調値の総
和平均と、前記領域を1画素ずらした場合に含まれる各
画素毎の階調値の総和平均とを求め、両総和平均の差を
1画素ずらす前の領域の中央に総和平均階調差として入
力する処理を前記画像の全領域に対して繰り返して行う
こととなっているため、得られた処理画像における総和
平均階調差は、取り込まれた画像における各画素に重み
付けされたものとなり、その後、所定の抽出レベルを基
準とした抽出処理を行った場合、欠陥部分が的確に抽出
されることとなる。That is, the surface state of the object to be inspected is taken in, and the sum average of the gradation values of each pixel included in a predetermined area of the image formed by a set of many pixels having the brightness information, A process of obtaining a sum average of gradation values for each pixel included when the region is shifted by one pixel and inputting the difference between the two sum averages as the sum average gradation difference in the center of the region before shifting by one pixel Since it is repeated for all regions of the image, the sum average gradation difference in the obtained processed image is weighted for each pixel in the captured image, and then the predetermined extraction is performed. When the extraction process is performed with the level as a reference, the defective portion is accurately extracted.
【0012】[0012]
【発明の効果】請求項1の方法あるいは請求項2の装置
によれば、被検査対象物の表面状態が取り込まれ、明る
さの情報を持つ多数の画素の集合によって構成される画
像の所定領域に含まれる各画素毎の階調値の総和平均
と、前記領域を1画素ずらした場合に含まれる各画素毎
の階調値の総和平均とを求め、両総和平均の差を1画素
ずらす前の領域の中央に総和平均階調差として入力する
処理を前記画像の全領域に対して繰り返して行うことと
なっているため、得られた処理画像における総和平均階
調差は、取り込まれた画像における各画素に重み付けさ
れたものとなるため、その後、所定の抽出レベルを基準
とした抽出処理を行った場合、欠陥部分が的確に抽出さ
れることとなり、極めて簡易な方法・装置によって被検
査対象物における欠陥を的確に検出することができると
いう優れた効果がある。しかも、欠陥の大きさに応じて
総和平均階調差を求めるための領域を設定することも可
能なので、総和平均階調差を求める処理が欠陥の大きさ
に適応させて行えるという効果もある。According to the method of the first aspect or the apparatus of the second aspect, the predetermined area of the image which is obtained by incorporating the surface state of the object to be inspected and which is composed of a large number of pixels having the brightness information. Before calculating the sum average of the gradation values of each pixel included in the above and the sum average of the gradation values of each pixel included in the case where the area is shifted by one pixel, the difference between the two sum averages is shifted by one pixel. Since the process of inputting the total average gradation difference in the center of the region is repeatedly performed for all the regions of the image, the total average gradation difference in the obtained processed image is Since each pixel is weighted, if the extraction process is performed with a predetermined extraction level as a reference, the defective portion will be accurately extracted, and the inspected object will be extracted by an extremely simple method / apparatus. Missing things An excellent effect that it is possible to accurately detect. Moreover, since it is possible to set an area for obtaining the total average gradation difference depending on the size of the defect, there is an effect that the processing for obtaining the total average gradation difference can be performed by adapting to the size of the defect.
【0013】[0013]
【実施例】以下、添付の図面を参照して本願発明の好適
な実施例を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.
【0014】本実施例は、本願発明をプレスワークWの
微少な欠陥を検出する場合に適用したものであり、図1
に示すように、治具1上に位置決めされたプレスワーク
Wに対してファイバー照明2を10〜20°の角度で照
射し、前記ファイバー照射2の反対側に位置するCCD
カメラ3により撮影して得られた画像を、以下に説明す
る手法により画像処理することにより欠陥検出を行うも
のである。In this embodiment, the present invention is applied to detect a minute defect in a press work W, and FIG.
As shown in FIG. 3, the press work W positioned on the jig 1 is irradiated with the fiber illumination 2 at an angle of 10 to 20 °, and the CCD positioned on the opposite side of the fiber irradiation 2 is irradiated.
An image obtained by shooting with the camera 3 is subjected to image processing by the method described below to detect defects.
【0015】本実施例の表面欠陥検出装置は、図2に示
すように、被検査対象物であるプレスワークWの表面状
態をCCDカメラ3により撮影し、これを明るさの情報
を持つ多数の画素a,a・・の集合によって構成される画
像A(図3参照)として取り込む画像取込手段11と、前
記画像Aの所定領域S(図4参照)に含まれる各画素a毎
の階調値の総和平均と、前記領域Sを1画素ずらした場
合に含まれる各画素a毎の階調値の総和平均とを求め、
両総和平均の差を1画素ずらす前の領域の中央に総和平
均階調差T(後に詳述する)として入力する処理を前記画
像Aの全領域に対して繰り返して行う画像処理手段12
と、前記総和平均階調差の集合からなる処理画像A′に
対して所定の抽出レベルを基準とする抽出処理を行う欠
陥抽出手段13とを備えて構成されている。符号14
は、前記欠陥抽出手段13により抽出された欠陥を表示
する表示手段(例えば、CRTあるいはハードコピー)で
ある。As shown in FIG. 2, the surface defect detecting apparatus of the present embodiment takes a photograph of the surface state of the press work W, which is the object to be inspected, by the CCD camera 3. An image capturing means 11 for capturing as an image A (see FIG. 3) composed of a set of pixels a, a ... And a gradation for each pixel a included in a predetermined area S (see FIG. 4) of the image A. The sum average of the values and the sum average of the gradation values of each pixel a included when the region S is shifted by one pixel are calculated,
An image processing unit 12 that repeatedly performs a process of inputting a total average gradation difference T (described in detail later) in the center of the region before shifting the sum total average by one pixel for all regions of the image A.
And a defect extraction means 13 for performing an extraction process using a predetermined extraction level as a reference for the processed image A'consisting of the set of the total average gradation differences. Reference numeral 14
Is a display means (for example, CRT or hard copy) for displaying the defects extracted by the defect extraction means 13.
【0016】上記構成の表面欠陥検出装置によるプレス
ワークWの表面欠陥検出方法を説明する。A method of detecting a surface defect of the press work W by the surface defect detecting device having the above structure will be described.
【0017】CCDカメラ3により撮影され、これを明
るさの情報を持つ多数の画素a,a・・の集合によって構
成される画像A(図3参照)として取り込む。該画像Aは
グレイレベルの生画像とされており、例えば256段階
の階調値に基づく明度差を保有している。An image is taken by the CCD camera 3 and is taken in as an image A (see FIG. 3) composed of a set of a large number of pixels a, a ... Having brightness information. The image A is a gray level raw image, and has a difference in brightness based on, for example, 256 gradation values.
【0018】ついで、図4および図5に示すように、前
記画像Aの所定領域S(例えば、i×j個の画素を含む領
域)に含まれる各画素a毎の階調値の総和平均と、前記領
域Xを横軸X方向に1画素ずらした場合に含まれる各画
素a毎の階調値の総和平均とを求め、両総和平均の差(即
ち、総和平均階調差)T=P{X+(j/2)、Y+(i/
2)}を次式により求める。Next, as shown in FIGS. 4 and 5, the sum total average of the gradation values for each pixel a included in a predetermined area S (for example, an area including i × j pixels) of the image A and , The sum average of the gradation values of each pixel a included when the region X is shifted by one pixel in the direction of the horizontal axis X, and the difference between both sum averages (that is, the sum average gradation difference) T = P {X + (j / 2), Y + (i /
2)} is calculated by the following equation.
【0019】[0019]
【数1】 [Equation 1]
【0020】ここで、P:1画素毎の階調値、Y:縦軸 上記のようにして求められた総和平均階調差Tを、図6
に示すように、1画素ずらす前の領域の中央に入力す
る。Here, P: gradation value for each pixel, Y: vertical axis, the sum average gradation difference T obtained as described above is shown in FIG.
As shown in, the input is made in the center of the area before shifting by one pixel.
【0021】上記した総和平均階調差Tの算出および入
力処理を前記画像Aの横軸X方向に1画素づつずらして
全画素に対して繰り返し行い、横軸X方向における全画
素に対する処理が終了すると、図7に示すように、縦軸
Y方向に1画素ずらして上記と同様な処理を行って画像
Aにおける全領域に対して総和平均階調差Tの算出およ
び入力処理を行う。上記処理は画像処理手段12により
実施される。The above-described calculation of the total average gradation difference T and the input processing are repeatedly performed for all pixels in the image A by shifting by one pixel in the horizontal axis X direction, and the processing for all pixels in the horizontal axis X direction is completed. Then, as shown in FIG. 7, by shifting one pixel in the Y direction of the vertical axis, the same process as described above is performed, and the calculation and the input process of the total average gradation difference T are performed for all the regions in the image A. The above processing is executed by the image processing means 12.
【0022】上記のようにして得られた総和平均階調差
Tを、その階調の違いを何段階かに分類して色差表現あ
るいは鳥瞰図表示すると、図8に示すような処理画像
A′が得られる。When the sum total average gradation difference T obtained as described above is classified into a color difference expression or a bird's-eye view by classifying the gradation difference into several stages, a processed image A'as shown in FIG. 8 is obtained. can get.
【0023】上記結果から、検出したい表面欠陥に対応
した抽出レベルを決定し、該抽出レベルを基準として表
面欠陥を抽出すると、図9に示すように、表面欠陥Nが
位置とともに的確に検出される。該処理は欠陥抽出手段
13により実施される。From the above results, when the extraction level corresponding to the surface defect to be detected is determined and the surface defect is extracted with the extraction level as a reference, the surface defect N is accurately detected together with the position as shown in FIG. . The processing is carried out by the defect extracting means 13.
【0024】上記したように本実施例によれば、プレス
ワークWの表面状態が取り込まれ、明るさの情報を持つ
多数の画素a,a・・の集合によって構成される画像Aの
所定領域Sに含まれる各画素a毎の階調値の総和平均
と、前記領域Sを1画素ずらした場合に含まれる各画素
毎の階調値の総和平均とを求め、両総和平均の差を1画
素ずらす前の領域の中央に総和平均階調差Tとして入力
する処理を前記画像Aの全領域に対して繰り返して行う
こととなっているため、得られた処理画像A′における
総和平均階調差Tは、取り込まれた画像Aにおける各画
素aに重み付けされたものとなる。従って、その後、所
定の抽出レベルを基準とした抽出処理を行った場合、欠
陥部分が的確に抽出されることとなり、極めて簡易な方
法・装置によって被検査対象物であるプレスワークWに
おける欠陥Nを的確に検出することができる。しかも、
欠陥Nの大きさに応じて総和平均階調差Tを求めるため
の領域Sを設定することも可能なので、総和平均階調差
Tを求める処理が欠陥の大きさに適応させて行える。As described above, according to the present embodiment, the surface state of the press work W is taken in, and the predetermined area S of the image A formed by a set of a large number of pixels a, a ... Having brightness information. Of the gradation values of the respective pixels a included in the above and the average of the gradation values of the respective pixels included in the case where the area S is shifted by one pixel, and the difference between the two total averages is calculated by one pixel. Since the process of inputting the total average gradation difference T in the center of the region before shifting is repeatedly performed for all the regions of the image A, the total average gradation difference in the obtained processed image A ′ is obtained. T is weighted for each pixel a in the captured image A. Therefore, after that, when the extraction process based on the predetermined extraction level is performed, the defective portion is accurately extracted, and the defect N in the press work W as the inspection object is detected by the extremely simple method and device. It can be detected accurately. Moreover,
Since it is possible to set the area S for obtaining the total average gradation difference T according to the size of the defect N, the processing for obtaining the total average gradation difference T can be performed by adapting to the size of the defect.
【図1】本願発明の実施例にかかる表面欠陥検出装置に
おける撮影状態を示す側面図である。FIG. 1 is a side view showing an image pickup state in a surface defect detecting apparatus according to an embodiment of the present invention.
【図2】本願発明の実施例にかかる表面欠陥検出装置の
内容を示すブロック図である。FIG. 2 is a block diagram showing the contents of a surface defect detection device according to an embodiment of the present invention.
【図3】本願発明の実施例にかかる表面欠陥検出装置に
おいて取り込まれた画像を示す平面図である。FIG. 3 is a plan view showing an image captured by the surface defect detection apparatus according to the embodiment of the present invention.
【図4】本願発明の実施例にかかる表面欠陥検出装置に
おいて取り込まれた画像に対して所定領域における総和
平均階調値を求める処理を説明する説明図である。FIG. 4 is an explanatory diagram illustrating a process of obtaining a total average gradation value in a predetermined area for an image captured by the surface defect detection apparatus according to the embodiment of the present invention.
【図5】本願発明の実施例にかかる表面欠陥検出装置に
おいて取り込まれた画像に対して所定領域を1画素ずら
した時の総和平均階調値を求める処理を説明する説明図
である。FIG. 5 is an explanatory diagram illustrating a process of obtaining a total average gradation value when a predetermined region is shifted by one pixel in an image captured by the surface defect detection apparatus according to the embodiment of the present invention.
【図6】本願発明の実施例にかかる表面欠陥検出装置に
おいて取り込まれた画像から求められた所定領域におけ
る総和平均階調値と前記領域を横軸方向に1画素ずらし
た時の総和平均階調値との差(即ち、総和平均階調差)の
入力状態を説明する説明図である。FIG. 6 is a sum average gradation value in a predetermined area obtained from an image captured by the surface defect detection apparatus according to the embodiment of the present invention and a sum average gradation when the area is shifted by one pixel in the horizontal axis direction. FIG. 9 is an explanatory diagram illustrating an input state of a difference from a value (that is, a total average gradation difference).
【図7】前記領域を縦軸方向に1画素ずらした時の総和
平均階調差の入力状態を説明する説明図である。FIG. 7 is an explanatory diagram illustrating an input state of a sum average gradation difference when the area is shifted by one pixel in the vertical axis direction.
【図8】前記総和平均階調差の集合として求められた処
理画像を示す説明図である。FIG. 8 is an explanatory diagram showing a processed image obtained as a set of the total average gradation differences.
【図9】前記処理画像に対して所定の抽出レベルを基準
とする抽出処理を行った結果を示す説明図である。FIG. 9 is an explanatory diagram showing a result of performing an extraction process on the processed image based on a predetermined extraction level.
3はCCDカメラ、11は画像取込手段、12は画像処
理手段、13は欠陥抽出手段、Aは画像、aは画素、
A′は処理画像、Nは欠陥、Sは領域、Tは総和平均階
調差、Wは被検査対象物(プレスワーク)。3 is a CCD camera, 11 is an image capturing means, 12 is an image processing means, 13 is a defect extracting means, A is an image, a is a pixel,
A'is a processed image, N is a defect, S is a region, T is a total average gradation difference, and W is an object to be inspected (press work).
Claims (2)
を持つ多数の画素の集合によって構成される画像として
取り込み、該画像の所定領域に含まれる各画素毎の階調
値の総和平均と、前記領域を1画素ずらした場合に含ま
れる各画素毎の階調値の総和平均とを求め、両総和平均
の差を1画素ずらす前の領域の中央に総和平均階調差と
して入力する処理を前記画像の全領域に対して繰り返し
て行い、前記総和平均階調差の集合からなる処理画像に
対して所定の抽出レベルを基準とする抽出処理を行って
表面欠陥を検出することを特徴とする表面欠陥検出方
法。1. A surface state of an object to be inspected is captured as an image composed of a large number of pixels having brightness information, and a sum average of gradation values of respective pixels included in a predetermined region of the image is acquired. And the sum average of the gradation values for each pixel included in the case where the area is shifted by one pixel, and the difference between the two sum averages is input as the sum average gradation difference in the center of the area before shifting by one pixel. The processing is repeatedly performed on the entire area of the image, and the surface defect is detected by performing the extraction processing based on a predetermined extraction level on the processed image including the set of the total average gradation differences. And a method for detecting surface defects.
を持つ多数の画素の集合によって構成される画像として
取り込む画像取込手段と、前記画像の所定領域に含まれ
る各画素毎の階調値の総和平均と、前記領域を1画素ず
らした場合に含まれる各画素毎の階調値の総和平均とを
求め、両総和平均の差を1画素ずらす前の領域の中央に
総和平均階調差として入力する処理を前記画像の全領域
に対して繰り返して行う画像処理手段と、前記総和平均
階調差の集合からなる処理画像に対して所定の抽出レベ
ルを基準とする抽出処理を行う欠陥抽出手段とを備えて
いることを特徴とする表面欠陥検出装置。2. An image capturing means for capturing a surface state of an object to be inspected as an image composed of a large number of pixels having brightness information, and a floor for each pixel included in a predetermined area of the image. The sum total average of the tone values and the sum average of the gradation values for each pixel included when the region is shifted by one pixel are obtained, and the difference between the two sum averages is shifted by one pixel. An image processing unit that repeatedly performs the process of inputting as a tone difference on the entire region of the image, and performs an extraction process with a predetermined extraction level as a reference for a processed image composed of a set of the total average gradation differences. A surface defect detecting apparatus comprising: a defect extracting means.
Priority Applications (1)
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JP5176819A JPH0735699A (en) | 1993-07-16 | 1993-07-16 | Method and apparatus for detecting surface defect |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5176819A JPH0735699A (en) | 1993-07-16 | 1993-07-16 | Method and apparatus for detecting surface defect |
Publications (1)
Publication Number | Publication Date |
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JPH0735699A true JPH0735699A (en) | 1995-02-07 |
Family
ID=16020403
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JP5176819A Pending JPH0735699A (en) | 1993-07-16 | 1993-07-16 | Method and apparatus for detecting surface defect |
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JP (1) | JPH0735699A (en) |
Cited By (5)
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---|---|---|---|---|
JP2000123176A (en) * | 1998-10-19 | 2000-04-28 | Dainippon Screen Mfg Co Ltd | Method for generating inspection reference image, recording medium, outputted object detector and output device with the same |
KR20110033076A (en) | 2009-09-24 | 2011-03-30 | 후지 쥬코교 가부시키가이샤 | Rotation cutting apparatus |
CN109852541A (en) * | 2018-12-09 | 2019-06-07 | 大连海事大学 | Cytoactive detection apparatus and method based on the total gray value of hologram fringe Yu gray scale difference ratio |
CN111127415A (en) * | 2019-12-19 | 2020-05-08 | 信利(仁寿)高端显示科技有限公司 | Mura quantification method based on excimer laser annealing |
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-
1993
- 1993-07-16 JP JP5176819A patent/JPH0735699A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000123176A (en) * | 1998-10-19 | 2000-04-28 | Dainippon Screen Mfg Co Ltd | Method for generating inspection reference image, recording medium, outputted object detector and output device with the same |
KR20110033076A (en) | 2009-09-24 | 2011-03-30 | 후지 쥬코교 가부시키가이샤 | Rotation cutting apparatus |
US8876442B2 (en) | 2009-09-24 | 2014-11-04 | Fuji Jukogyo Kabushiki Kaisha | Rotary cutter |
CN109852541A (en) * | 2018-12-09 | 2019-06-07 | 大连海事大学 | Cytoactive detection apparatus and method based on the total gray value of hologram fringe Yu gray scale difference ratio |
CN109852541B (en) * | 2018-12-09 | 2022-07-08 | 大连海事大学 | Cell activity detection device and method based on total gray value and gray difference ratio of holographic fringes |
CN111127415A (en) * | 2019-12-19 | 2020-05-08 | 信利(仁寿)高端显示科技有限公司 | Mura quantification method based on excimer laser annealing |
CN111127415B (en) * | 2019-12-19 | 2023-07-25 | 信利(仁寿)高端显示科技有限公司 | Mura quantification method based on excimer laser annealing |
CN113744274A (en) * | 2021-11-08 | 2021-12-03 | 深圳市巨力方视觉技术有限公司 | Product appearance defect detection method and device and storage medium |
CN113744274B (en) * | 2021-11-08 | 2022-02-08 | 深圳市巨力方视觉技术有限公司 | Product appearance defect detection method and device and storage medium |
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