JPH07290011A - Work washing method and washing device - Google Patents

Abstract

PURPOSE:To carry out an efficient work washing by injecting a washing liquid to works in the washing liquid contg. a detergent and injecting pure water to the works in the pure water, then immersing the works in the pure water. CONSTITUTION:The washing liquid is first injected to the works W, such as printed circuit boards, immersed in the washing liquid to wash the works W in a washing section 3 in the case of washing the works W. Next, the works W are immersed into the pure water in first and second prerinsing sections 4, 5 and are vertically oscillated, by which the washing liquid, etc., sticking to the works W are washed off. Successively, the pure water is injected to the works W in the pure water to wash away the washing water, etc., from the works W in a first rinsing section 6 and the works W are immersed into the pure water and are vertically oscillated, by which the washing water, etc., sticking to the works W are washed away in a second rinsing section 7; thereafter, the works W are dried in a temp. rinsing atmosphere in a drying section 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work cleaning method and a cleaning device for cleaning a work such as a blind substrate, a liquid crystal panel, a semiconductor wafer.

[0002]

2. Description of the Related Art Conventionally known as such a method for cleaning a work is a method of spraying a cleaning liquid onto a suspended work to remove the deposits on the surface of the work. However, in this method, in order to spray the cleaning liquid evenly on the surface of the work, a mechanism such as changing the direction of spraying the cleaning liquid on the work is required. Further, since the cleaning liquid sprayed from the nozzles is scattered on the part other than the work, the cleaning efficiency is low relative to the amount of the cleaning liquid used. Furthermore, when the scattered cleaning liquid is flammable or has a strong odor, a mechanism for collecting the scattered cleaning liquid is required.

In view of the above points, the applicant of the present invention, as a method for cleaning a work, is a method of immersing a work in a cleaning liquid tank in which the cleaning liquid is stored, and spraying a jet of the cleaning liquid on the immersed work. Is proposed. According to this cleaning method, since the jet of the cleaning liquid is formed in the stored cleaning liquid, the cleaning liquid does not scatter to the outside,
Good cleaning liquid recovery efficiency. Further, since a vortex is formed in the cleaning liquid stored by the jet flow and hits the vortex flow or a part of the work surface that does not directly contact the jet flow, there is an advantage that cleaning efficiency is increased.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to efficiently wash a work using this novel work washing method and to efficiently wash off a washing liquid adhering to the washed work. It is to realize a cleaning method and a cleaning device.

[0005]

In order to solve the above problems, in the work cleaning method of the present invention, first, the work is immersed in the cleaning liquid, and the cleaning liquid is sprayed onto the work. I try to wash the work. Subsequent to this cleaning step, the work is immersed in pure water, and pure water is sprayed to the work in this immersed state to wash away the cleaning liquid adhering to the work. Further, after the rinsing step, the work is washed again by immersing the work in pure water or by spraying pure water on the work in the atmosphere. Thus, according to the method of the present invention,
The work is cleaned by performing the cleaning process, the first rinse process, and the second rinse process.

Here, in order to improve the cleaning efficiency and suppress the contamination of the pure water used in the first rinse step, the work should be immersed in the pure water after the cleaning step (preliminary rinse step). preferable. Further, in the cleaning process, when the work is pulled up after cleaning, in order to efficiently remove the cleaning liquid adhering to the work, a gas such as air is blown to the work pulled up from the cleaning liquid to remove the cleaning liquid. (Draining step) is preferable. Similarly, the pure water adhering to the work is wiped off by blowing a gas such as air to the work that is pulled up from the pure water after the second rinse step (draining step). Or preferable. In addition,
The work washed through the above steps is dried through a drying step.

Next, the work cleaning apparatus of the present invention is basically characterized by having a work cleaning section, a first rinse section, and a second rinse section. The work cleaning unit includes a cleaning tank in which the work cleaning liquid is stored, a work transfer means for loading and unloading the work into and from the cleaning tank, and a jet forming means such as a nozzle for injecting the cleaning liquid onto the work immersed in the cleaning tank. It is configured with. The first rinse unit has the same structure, and a pure water tank storing pure water, a work transfer means for loading and unloading the work into and from the pure water tank, and spraying rope water on the work immersed in the pure water tank. And a jet forming means such as a nozzle. On the other hand, the second rinsing section is configured to include a pure water tank that stores pure water, and a work transfer means for taking a work in and out of the pure water.

Here, in order to improve the cleaning efficiency and suppress the degree of contamination of the deionized water tank in the first rinse tank with the cleaning liquid, a preliminary rinse section is provided between the work cleaning section and the first rinse section. It is preferable that the cleaning liquid adhering to the work be preliminarily cleaned in this preliminary rinsing section. The structure of the preliminary rinse portion may be the same as that of the second rinse portion described above. Further, it is preferable that the work cleaning unit has a liquid draining unit for blowing a gas such as air to the work in order to brush off the cleaning liquid adhering to the work drawn from the cleaning tank. Similarly, it is preferable that the second rinse section also has a water draining means for blowing air or the like to the work in order to remove the pure water attached to the work pulled up from the pure water tank.

In the first rinse section and the second rinse section, a common recovery tank for recovering the pure water overflowing from each pure water tank is arranged, and the pure water recovered in this recovery tank is filtered. After that, it is possible to adopt a configuration in which the jet flow forming means in the first rinse portion and the pure water tank in the second rinse portion are carried.

Each of the jet forming means in the work cleaning section and the first rinsing section can be composed of, for example, a pump and a nozzle that blows out the cleaning liquid or gas pumped from the pump toward the work. Similarly, the cleaning liquid removing means and the water draining means can be composed of a pump and a nozzle that blows out the air pressure-fed from the pump toward the work.

The work transfer means can be composed of a work elevating mechanism for elevating the work and a lateral transfer mechanism for transferring the work toward the next stage. Instead of this, for example, a transport belt can be used to configure the transport means. In this case, the work transfer path by the transfer belt passes through the cleaning liquid tank and the pure water tank,
It suffices to set the transport route.

On the other hand, as a work to be cleaned by the apparatus of the present invention, a plate-like work such as a printed board and a liquid crystal panel is typical. In the case of cleaning such works, the works can be cleaned in a so-called batch manner by using a carrier that holds a large number of works in an aligned state.

[0013]

In the present invention, in the cleaning process or the work cleaning section, the jet of the cleaning liquid is sprayed onto the work in the cleaning liquid. When a jet flow of the cleaning liquid is formed in the cleaning liquid, the jet flow forms a vortex flow in each direction in the cleaning liquid. As a result, in the portion of the work directly hit by the jet of the cleaning liquid, the deposit is efficiently removed by the chemical action of the cleaning liquid and its spraying force. Also,
The vortex of the cleaning liquid hits the part of the work which is not directly contacted by the cleaning liquid jet, and similarly, the chemical action of the cleaning liquid and the physical action thereof remove the adhering substances efficiently. Further, since the cleaning liquid jet is formed during the cleaning, the cleaning liquid sprayed does not scatter into the atmosphere as in the case of spraying the cleaning liquid onto the work in the atmosphere.

The work from which the deposits have been removed in the cleaning liquid as described above is then immersed in pure water in the first rinsing step or the first rinsing section, and in this state, the pure water jet flow is generated. Be blown. Also in this case, as in the case of spraying the cleaning liquid jet described above, the pure water jet is sprayed onto the work, and the pure water jet is formed on the portion of the work not directly hit by the pure water jet. The eddy current is hit. As a result, the cleaning liquid attached to the work is surely washed off. After that, in the second rinsing step or the second rinsing section, the work is again immersed in pure water or sprayed with pure water. As a result,
The cleaning liquid adhering to the work is completely washed off.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. (Overall Configuration) FIG. 1 schematically shows the overall configuration of the workpiece cleaning apparatus of this example. The apparatus of this example is suitable for cleaning a printed circuit board for an electronic circuit, and is configured to clean a plurality of works (printed circuit boards) W by using the carrier 2.

As shown in FIG. 1, the device 1 of the present example.
Is a cleaning unit 3 and a first unit in order from the upstream side of the work transfer path.
The preliminary rinse section 4, the second preliminary rinse section 5, the first rinse section 6, the second rinse section 7, and the drying section 8 are arranged. The cleaning unit 3 cleans the work by spraying a cleaning liquid containing a cleaning agent for the printed circuit board onto the work in the cleaning liquid. In the first and second preliminary rinse portions 4 and 5, the work is immersed in water containing no impurities such as a cleaning agent, that is, pure water, and is shaken up and down to adhere to the work. Wash off the cleaning solution. In the 1st rinse section 6, the cleaning water and the like is washed off from the rework by injecting pure water onto the work in pure water. In the second rinse section 7, as in the case of the first or second preliminary rinse section, the work is immersed in pure water and rocked up and down, so that the cleaning water adhering to the work is washed. Wash off etc.

Finally, in the drying section 8, the work is exposed to a commercial temperature atmosphere to remove the pure water remaining therein. On the other hand, in the apparatus of the present example, in the cleaning unit 3, the first preliminary rinse unit 4 and the second rinse unit 7, air is jetted to the workpiece pulled from the cleaning liquid or pure water, respectively. An air blowing section 9 is provided to blow off the cleaning liquid or pure water from the rework.

The structure of the carrier 2 carrying the work W used in the apparatus of this embodiment will be described. As shown in FIG. 5, the carrier 2 has four frame support rods 23, 24, 25, 26 that define the bottom surfaces of the rectangular frames 21, 22 arranged at both ends.
And two rods with notches 27 and 28 each having a notch for attaching a workpiece are connected to each other. Notches 27l and 28l are formed on the inner side surfaces of the notched rods 27 and 28 at equal intervals along the material axis direction, and one work piece is provided between the corresponding notches 271 and 281. W can be inserted from the upper side. Further, the notched rods 27 and 28 can change the interval thereof, so that the works W having different widths can be carried. Furthermore, the rectangular frame 2
Handles 29, 29 (only one of which is shown in the figure) are attached to the upper surfaces of the l, 22 to facilitate handling of the carrier.

(Structure of Each Part) Carrier Conveying System With reference to FIGS. 2 to 5, the structure of the apparatus 1 of this example will be described focusing on the carrier conveying system.

In the apparatus 1 of this embodiment, as shown in FIGS. 2 and 3, a loader 11 is connected to an upstream side of the main body 12 in the carrying direction of the work W, and an unloader is provided downstream of the work carrying direction. 13 are connected.
The cleaning unit, the first and second preliminary rinse units, and the first and second rinse units described above are arranged in the main body unit 12. An opening / closing lid 122 is formed on the front side of the case 121 of the main body 12. The inside of the case can be accessed by opening the opening / closing lid 122 as shown by the imaginary line in FIG. Inside the case, in order from the upstream side in the work transfer direction, the cleaning liquid tank 31 of the cleaning unit,
A pure water tank 41 for the first preliminary rinse section, a pure water tank 51 for the second preliminary rinse section, a pure water tank 61 for the first rinse section, and a pure water tank 71 for the second rinse section are arranged in a line.

Above the respective tanks, the roller sliders 32, 42, 52, and 52 are arranged so as to straddle the adjacent tanks.
62 are arranged in a line at regular intervals. Between the roller slider 32 on the upstream side, the roller slider 62 on the downstream side, and between the roller sliders, work supporting portions 33, 43, 53, 63, which are also roller sliders, are provided.
73 are arranged. These work supporting portions are provided by the elevating mechanisms 34, 4 arranged on the back side of each tank in the case.
It is possible to move up and down by 4, 54, 64 and 74.

As can be seen from FIG. 4, the elevating mechanism 34 of the cleaning section is slidable on the elevating guide rod 341 mounted on the case so as to be vertical on the back side of the cleaning liquid tank 31 and the outer periphery of this rod 341. Sliding part 34 attached to
2 and a chain 3 for moving up and down the sliding portion 342.
43, a boat motion motor 344, and an L-shaped arm 345 attached to the sliding portion, and the work support portion 33 is supported at the tip of this arm. By the elevating mechanism 34 having this configuration, the work supporting portion 33 is at least
From the upper limit position (see FIG. 2) which is at the same height as the roller sliders 32, 42, 52 and 62, the work W supported by the work supporting part is completely immersed in the cleaning liquid tank 31. It is possible to move up and down to the lower limit position (see Fig. 4). Other lifting mechanisms 44, 54, 64, 7
The configuration of No. 4 is also the same as that of the elevating mechanism 34, and therefore its description is omitted.

Next, a carrier introduction port 123 is formed on the end surface of the main body case 121 on the upstream side in the carrying direction.
In a state of penetrating therethrough, the conveyor belts 111 that constitute the loader 11 are arranged in a line at the same height position as the internal roller slider. The transport belt 111 is supported on the electrical equipment box 202 by support legs 112. The transport belt 111 can be driven by a drive mechanism (not shown).

In the present example, a carrier engaging pawl (not shown) is attached to the chain which constitutes the conveyor belt 111 at a constant pitch, and is driven by the drive mechanism at a constant pitch. There is. The conveyor belt 111 in this example has three carriers 2 at a constant pitch.
Can be installed at the same time, of which the first carrier 2
As can be seen from FIG. 2, the part on which is mounted is arranged so as to be located inside the main body case.

A carrier outlet 124 is formed on the downstream end surface of the main body case 121, and a roller slider 131 constituting the unloader 13 is formed in a state of penetrating therethrough.
Are arranged so as to form a line at the same height position as the inner roller slider. This slider is also supported on the floor F by the support legs 132. In this example, three carriers 2 can be mounted on this unloader 13. And, when these three carriers are accumulated, the fact can be automatically displayed. Since such a display mechanism can be simply constructed, no further explanation will be given here.

On the other hand, in each of the processing sections 3 to 7, pushers 35, 45, and 45 are provided at positions upstream of the carrier support sections 33, 43, 53, 63, 73 in a state orthogonal to the transverse carrier transport path. 55, 65, and 75 are arranged. A pusher 115 is also arranged inside the carrier carry-in port 124. These pushers are supported by a pusher drive mechanism 36 arranged in parallel with the carrier lateral transport path on the front side of each tank. By this thigh movement mechanism 36, each busher can reciprocate between the initial operation position shown in FIG. 2 and the position of the adjacent pusher on the downstream side. Further, the pusher drive mechanism 36 supports each pusher so as to be rotatable from a position shown by a solid line to a retracted position shown by an imaginary line as shown in FIG. As will be described later, the carrier 2 sequentially laterally conveys to the processing unit on the next stage by these pushers.

Supply System of Cleaning Liquid and Pure Water Next, the structure of each processing section 3, 4, 5, 6, 7 will be described mainly with reference to the piping system of the apparatus of this example shown in FIG.

The cleaning liquid tank 31 of the cleaning unit 3 is composed of a cleaning liquid main body tank 311 having a substantially cubic shape with an open upper side, and an overflow tank 312 formed so as to surround the outer periphery thereof. A work cleaning liquid 313 containing an alkali saponifying agent is stored in the main body tank 311. The cleaning liquid 313 stored here is kept at a constant temperature, for example, 60 ° C. by a rod-shaped heater 315 arranged in the tank.

Inside the main body tank 311, a plurality of nozzles capable of spraying the cleaning liquid are arranged. In this example, the sixth
As shown in the drawings and FIG. 7, two rows of nozzle groups 316a and 316b are arranged horizontally on one side, and on the other side, two rows of nozzle groups 316a and 316b are horizontally arranged at a height position different from those of these nozzle groups. Nozzle groups 316c and 316d are arranged. As these nozzles, full cone type nozzles having an injection angle of 60 degrees can be used. These nozzle groups communicate with the bottom surface of the overflow tank 312 via the cleaning liquid circulation path 317.

A pump 318 is arranged in the circulation path 317, and a strainer 319 is arranged between the pump and the overflow tank. An alkaline saponifying agent replenishment tank 322 is connected to the circulation path upstream of the strainer 319 via an automatic opening / closing valve 321. The automatic on-off valve 321 is controlled to be opened and closed by a three-legged liquid level gauge 323 attached to the overflow tank 312, whereby the alkaline saponifying agent is automatically replenished in the circulation path. The nozzle group and the cleaning liquid circulation path 317 are connected via automatic opening / closing valves 324 and 325, and these opening / closing valves are automatically opened when the carrier 2 is detected, and are otherwise closed. In the state where these automatic opening / closing valves are closed, the cleaning liquid discharged from the pump 318 is automatically opened / closed by the automatic opening / closing valve 326 which performs the opening / closing operation opposite to the above-mentioned automatic opening / closing valve.
It is recirculated into the cleaning liquid main body tank 311 through the bypass passage 327 in which is inserted. An opening / closing valve 328 is inserted on the pump discharge side, and the dirty cleaning liquid is discharged as industrial waste liquid toward a predetermined processing section via the opening / closing valve 328.

The cleaning liquid main body tank 311 is provided with a pure water supply system 33 via an opening / closing valve. And a pure water recovery system 329. A pure water device 331 including an ion exchanger and a filter is inserted in the pure water supply system 330.

Next, the first and second preliminary rinse sections 4,
5 has the same structure. That is, the deionized water tanks 41 and 51 that store deionized water are provided, and the deionized water stored in these is circulated through the circulation paths 411 and 511.
Pumps 412, are provided in these circulation paths 411, 511.
512 and strainers 413 and 513 are inserted. On-off valves 414 and 514 are connected to the discharge side of each pump. When the opening / closing valve 414 of the first preliminary rinse section is opened, the dirty cleaning water is discharged via this as a waste industrial solution toward a predetermined processing section. On the other hand, when the opening / closing valve of the second preliminary rinse section is opened, the circulating water on the side of the second preliminary rinse section is supplied into the deionized water tank 41 of the first preliminary rinse section. Here, a rod-shaped heater 5l5 is arranged in the deionized water tank 5l of the second preliminary rinse section, and the temperature of deionized water in the deionized water tanks 41 and 51 is set to a predetermined temperature by this heater.
For example, the temperature is kept at 60 ° C. On the other hand, the pure water tanks 41, 51 in the first and second rinse parts
Is connected to the pure water supply system 3 via the automatic open / close valves 416 and 516.
It is connected to 30. These automatic open / close valves 416, 5
Opening and closing of 16 is controlled by float switches 417 and 517 attached to pure water tanks 41 and 51. Further, the pure water tanks 41 and 51 are connected to a pure water recovery system 329 via an open / close valve.

Next, the structure of the first and second rinse portions 6 and 7 will be described. Pure water tanks 61 and 71 for these rinse parts
Are partitioned and formed by partitioning the inside of a common case 611 having a rectangular parallelepiped shape whose upper side is open. That is, as shown in FIG. 8, the inside of the common case 611 is completely divided into two by the partition plate 612, and the compartment 613 on the narrower side serves as the deionized water tank 71 of the second rinse section. On the contrary,
By arranging a partition plate 615, which is a little smaller in the shape of a rectangular cylinder, in the compartment 614 on the wide side, the pure water tank 61 of the first rinse section and the pure water recovery tank 61 surrounding the pure water tank 61.
6 is formed. Here, a separate partition plate 617 is further arranged at the portion 616a of the pure water recovery tank 616 located between the pure water tank 61 and the pure water tank 71.
7, the upper half of this portion 616a is divided into the first rinse portion side and the second rinse portion side, and the lower half portion remains in the communicating state. A rod-shaped heater 618 is arranged in the pure water recovery tank 616, and
The temperature inside 1 and 71 is maintained at a predetermined temperature, for example, 60 ° C.

A plurality of nozzles are arranged in the pure water tank 61 of the first rinse section 6. In this example, the nozzle groups 621a and 6 arranged horizontally in two rows on one side.
21b and nozzle groups 621c and 621d horizontally arranged in two rows on the side facing them. The arrangement shape of the nozzles is the same as that in the cleaning liquid tank of the cleaning unit 3 described above. The nozzle groups on both sides of these pumps are respectively connected to the pump 624 via automatic opening / closing valves 622 and 623.
Is connected to the discharge side of the pump and the suction side of the pump is strainer 6
It is connected to a pure water recovery tank 616 via 25. The automatic opening / closing valves 622 and 623 are automatically opened when the carrier 2 is detected, and are otherwise held in the closed state. When these are in the closed state, the pure water discharged from the pump has a bypass passage 62 in which an automatic opening / closing valve 626 performing an opening / closing operation opposite to the above automatic opening / closing valve is inserted.
It is refluxed into the pure water tank 61 via 7.

Here, the pure water recovery tank 616 communicates with the pure water tank 71 of the second rinse section 7 via the pure water regenerator 627. The pure water regenerator 627 includes a pump 627a whose suction side is connected to the pure water recovery tank, a filter 627b made of activated carbon which is sequentially connected to the discharge side of the pump, an ion exchanger 627C, an ion exchanger 627d and a filter 62.
7e, and the pure water regenerated by the pure water regenerator is returned to the pure water tank 71.

Next, the deionized water tank 71 of the second rinse section is connected to the deionized water supply system 330 via the automatic opening / closing valve 711. The opening / closing operation of this automatic opening / closing valve 711 is controlled by a float switch 628 attached to the pure water recovery tank. On the other hand, both deionized water tanks 61 and 71 are connected to a deionized water recovery system 329 via open / close valves.

Air Blowing Section Next, the structure of the air blowing section 9 will be described mainly with reference to FIGS. 1 and 9. The air blowing unit 9 has a compressed air supply source 91, and the compressed air supplied from the compressed air supply source 91 passes through a filter and a regulator unit 92, the cleaning unit 3, the first preliminary rinse unit 4, and the second rinse unit 4. Air is supplied to the air blowing units 93, 94, and 95 arranged in the rinse unit 7, respectively. The air blowing part 93 of the cleaning part 3 is formed of two air blowing parts arranged in parallel above the pair of opposed side surfaces of the cleaning liquid body tank 311. Air blowing section 95 in the second rinse section 7
Has the same configuration. On the other hand, the air blowing portion 94 in the first preliminary rinse portion 4 is composed of one air blowing portion. Each air blowing section 93, 94, 95
Are connected to the compressed air supply source 91 side via manual on-off valves 931, 941, 951 and automatic on-off valves 932, 942, 952, respectively. Each automatic opening / closing valve is designed to be opened when the carrier is pulled up from the tank. A manual on-off valve is used for flow adjustment.

Control System FIG. 10 shows the main part of the control system in the apparatus of this example. In the figure, 201 is a controller for controlling the entire apparatus 1, and is mounted in an electric equipment box 202 arranged near the loader. Reference numeral 203 denotes a console panel, on which an input unit 203a including various input switch groups and a display unit 203b for displaying an operating state of each unit are arranged. On the input side of the controller 201, a pusher driving gap detection sensor 204 is connected, and an elevating mechanism driving upper limit sensor 205, an upper limit approach detection sensor 206, a lower limit sensor 207, and a lower limit approach detection sensor 208 are connected. ing. Further, a carrier detection sensor 209 used to control the cleaning liquid injection timing and the air injection timing in the cleaning unit 3, and a carrier detection sensor 21 used to control the air injection timing in the first preliminary rinse unit 4.
1, a carrier detecting sensor 212 used to control the injection timing of pure water in the first rinse section 6, and a carrier detecting sensor 213 used to control the air injection timing in the second rinse section 7. Etc. are connected.

The output side of the controller 201 is connected to each drive portion which constitutes the carrier transport system. That is, the pusher drive unit 36, the lifting mechanisms 34, 44, 5
4, 64, 74, the loader drive mechanism 113, and stoppers 37, 47, 57, 67, 77 for preventing the carrier from overrunning the carrier support portion.

On the output side of the controller, automatic opening / closing valves 324, 325 for controlling the injection of the cleaning liquid in the cleaning tank,
326 It is connected to automatic opening / closing valves 622, 623, 626 that control the pure water injection in the first rinse section. Furthermore, automatic opening / closing valves 932, 9 that control the air injection in the cleaning unit 3, the first preliminary rinse unit 4, and the second rinse unit 7.
42 and 952.

Washing Operation Next, the washing operation in the washing apparatus of this example performed under the control of the controller will be described.

FIG. 11 shows the timing chart of the cleaning operation of one cycle, and FIGS. 12 to 16 show the states at the time of each cleaning operation in sequence. Prior to driving, the carrier 2 having a large number of printed circuit boards W, which are works, is placed on the conveyor belt 111 of the loader 11. Now, it is assumed that the cleaning cycle starts from the state shown in FIG. In this state, three carriers 2 (n), 2 (n + 1), and 2 (n + Z) are mounted on the loader 11, and each lifting mechanism is also equipped with a carrier.

First, the carrying operation is started from this state (time T1 in FIG. 11). That is, pusher 11
5, 35, 45, 55, 65, and 75 are laterally moved by a certain distance by their transport mechanism 36, and the carriers that move laterally move the rollers to the roller slider 3.
2, 42, 52, 62, and moves forward until the vehicle is placed on the carrier support portions 33, 43, 53, 63, 73 of the next-stage lifting mechanism (time in FIG. 11). Tl
~ T2). FIG. 12 shows a state after the carrier 2 (n) on the loader 11 has been laterally conveyed to the carrier support part 33 of the cleaning part 3 in this way. When the carrier 2 advances to a predetermined position, the carriers detecting sensors 209 to 213 attached to the respective processing units detect the carrier.

After that, the lifting mechanisms 34, 44, 54,
64 and 74 are driven and descend toward the carrier 2 or the tank. When the descending carrier reaches a position near the lower limit, this is detected by the lower limit approach detection sensor 208 (No. 11).
Time T3 in the figure). After this, the carrier descends at a low speed. When the carrier reaches the lower limit position, this is detected by the lower limit sensor 207, and the lowering of the carrier by the elevating mechanism is stopped (time T4 in FIG. 11).

Here, during the above-mentioned carrier lateral transfer operation, the carrier 2 is supported by the supporting portions 33, 43, 43 of each elevating mechanism.
Stoppers 37, 47 installed in the roller slider insertion slots so as not to overrun 53, 63, 73.
Turn on 57, 67 and 77. In addition, a carrier guide 38 (shown only in FIG. 12) is provided in each tank so that the carrier does not move from the carrier supporting portion when the carrier 2 is moved up and down and immersed in the tank. Further, during the carrying operation, the by-pass passages 326 and 626 for the cleaning liquid and pure water in the cleaning unit 3 and the first rinse unit 6 are held in the open state.

After the carrying operation is completed, the stoppers 37, 4 are
7, 57 ,. 67 and 77 are turned off. In the cleaning unit 3 and the first rinse unit 6, the carrier detection sensors 209 and 212 are in the ON state, and the lower limit sensor 2
When 07 is turned on (time T4 in FIG. 11), the bypass passages 326 and 626 are closed and the automatic opening / closing valve 324,
325, 622, and 623 are opened, and the cleaning liquid injection and the pure water injection operations are started. FIG. 13 shows a state in which the cleaning liquid is sprayed onto the carrier 2 (n) in the cleaning unit 3. In this example, the nozzle group 3 on one side
16a, 316b and the nozzle groups 316C, 31 on the other side
The cleaning liquid is alternately jetted from 6d.

As shown in FIG. 13, the printed circuit board W mounted on the carrier 2 (n) in the cleaning liquid.
The cleaning liquid is sprayed on. Therefore, the cleaning liquid does not scatter into the atmosphere. Further, the jet of the cleaning liquid forms a vortex in the cleaning liquid. Therefore, the part of the printed circuit board which is not directly hit by the jet of the cleaning liquid is also washed by the vortex formed. Therefore, the cleaning unit 3 efficiently cleans the printed circuit board. Also in the l-th rinsing unit 6, pure water is similarly sprayed onto the printed circuit board W, so that the printed circuit board is efficiently cleaned in the pure water. On the other hand, in the first and second preliminary rinse parts 4, 5 and the second rinse part 7, the carrier 2 is simply kept in a state of being immersed in the pure water tank.

In synchronism with the start of the cleaning operation, the pushers 115, 35, 45, 55, 65, 75 turn upward (time T4 to T5 in FIG. 11), and then return to their original positions. To the initial retracted position (time T5 to T6 in FIG. 11). This state is shown in FIG. After that, the loader 11 is driven and the carriers 2 (n + 1) and 2 (n + 2) placed on the loader 11 are set to 1
It moves forward by the pitch (time T6 to T7 in FIG. 11).
FIG. 15 shows the state after the forward movement in this way. After the carrier on the loader has moved forward, the gap detection sensor 204 is used to detect the front carrier 2 on the loader.
When it is confirmed that a predetermined gap exists between (n + 1) and the next carrier 2 (n + 2), each pusher turns downward and returns to the initial operating position (first 11 times T7 to T8). FIG. 15 shows a state in which the busher 115 has returned to the initial operating position.

After the pusher returns to its original position, the elevating mechanisms 34, 44, 54, 64, 74 are driven to cause the carrier 2 in each tank to oscillate up and down for a certain period (FIG. 11). T8 to T9). By this swinging motion,
In each tank, the printed circuit board W mounted on the carrier is efficiently cleaned.

The swinging motion of the elevating mechanism stops after a certain period of time. Then, the bypass passages 327 and 627 in the cleaning unit 3 and the first rinse unit 6 are opened, and the automatic opening / closing valve 3
24, 325, 622, 623 are closed, and the injection of cleaning liquid and pure water is stopped (time T9 in FIG. 11). next,
Each elevating mechanism is driven to raise the carrier 2 from within each tank. After the upper-limit approach detection sensor 206 detects that the carrier has approached the upper-limit position, the ascending speed decreases (time T10 in FIG. 11), and when the carrier reaches the upper-limit position, it is detected by the upper-limit sensor. Detected by 205, driving of each lifting mechanism is stopped.

Here, in synchronization with the raising and lowering of the carrier, the automatic opening / closing valves 932, 942, 9 of the air blowing unit 9 are synchronized.
52 (see FIG. 9) opens. As a result, the compressed air is supplied to the air blowing portion 93 of the cleaning tank 3, the air blowing portion 94 of the first preliminary rinse portion 4, and the air blowing portion 95 of the first rinse portion 6, and is blown out from these. Therefore, air is blown to the carrier 2 drawn out from the tank in each of these parts 3, 4, and 6. By such an air blowing operation, the cleaning liquid or pure water attached to the printed circuit board W mounted on the carrier is efficiently blown off.

That is, when the cleaning liquid or water attached to the pulled up carrier and the printed circuit board is naturally dropped, the liquid or water accumulated in the uneven portions of these portions is unlikely to drop. If the liquid or water remains in such a portion and is sent to the next stage, the degree of contamination of the pure water stored in each tank is increased, and it is necessary to increase the frequency of exchanging the pure water. Further, if a large amount of water adheres to the drying section 8 and is carried in, it takes a long time to dry, which is not preferable. However, in this example, by blowing air, the liquid or water accumulated in the uneven portions of the carrier, the printed circuit board, etc. is blown off,
Removed from these. Therefore, the degree of contamination of pure water is reduced, and the frequency of water replacement can be reduced. Also,
The drying in the drying section can be shortened. First
FIG. 6 shows the carrier being pulled up while being blown with air.

Thereafter, the above operation is repeated, and each carrier 2 is carried out from the cleaning unit 3 through the second rinse unit 7 to the unloader 13. The cleaned carrier carried out onto the unloader is carried to the next drying section 8 by a robot hand or a human hand, and the pure water adhering thereto is dried and removed.

(Another Embodiment) The above example shows one example of the present invention, and is not intended to limit the present invention to the above configuration.

For example, FIGS. 17 and 18 show another work cleaning apparatus to which the present invention is applied. The apparatus 300 of this example includes a cleaning unit 301, a preliminary rinse unit 302, a first rinse unit 303, a second rinse unit 304, and a drying unit 305.

Like the cleaning unit 3 in the above example, the cleaning unit 301 cleans the work by spraying the cleaning liquid onto the work from the nozzle 301a in the cleaning liquid containing the work cleaning agent. . The preliminary rinse section 302 has the same configuration as the first preliminary rinse section 4 in the above example. Like the first rinse unit 6 in the above example, the first rinse unit 304 cleans the work by spraying pure water on the work in pure water. The second rinse section 304 cleans the work by injecting pure water from the nozzle group 304a onto the work in the atmosphere. On the other hand, the drying unit 305 has the same configuration as the drying unit 8 in the above example.

When the work cleaning apparatus 300 of this example is used, for example, as shown in FIG.
A cylindrical net cage 402 with a mark can be used as a carrier for the work. As the transport mechanism 403 for the net basket 402, the hook portion 4 for suspending the handle of the net basket 402 is used.
04 and an arm portion 405 supporting the hook portion 404,
It is possible to use the one composed of the moving portion 406 that moves the arm portion 405 in the horizontal direction and the vertical direction.
Various plastic products and metal products can be cited as the works that can be put into the net basket 402 and washed.

Next, FIG. 19 shows an example in which a work transfer system is constructed using a transfer belt. In this figure, the parts corresponding to the parts in FIG. 17 are assigned corresponding numbers. The apparatus of this example is configured so that the plate-shaped works W can be cleaned without being continuously conveyed.

[0059]

As described above, the work cleaning method and the cleaning apparatus of the present invention perform the cleaning by spraying the cleaning liquid on the work in the cleaning liquid containing the cleaning agent.
Cleaning is performed by injecting pure water onto a work in pure water, and then immersing the work in pure water or blowing pure water onto the work to perform cleaning. ing. Therefore, according to the present invention, the deposits such as oil and dust adhering to the work can be efficiently removed in the cleaning liquid, and the cleaning liquid used for removing the deposits can be removed completely. Efficiently performed in water. Therefore, according to the present invention, it is possible to realize a work cleaning method and a cleaning device capable of efficiently cleaning a work.

Further, in the present invention, the cleaning liquid or pure water adhering to the work is blown off by blowing a gas onto the work pulled up from the cleaning liquid or pure water. By doing so, it is possible to reliably remove the liquid or water as compared with the case where the liquid or water attached to the work is naturally dropped. Therefore, it is possible to largely avoid bringing the liquid or water adhering to the work into the tank on the next stage side, so that the degree of contamination of the liquid or water in each tank can be suppressed to a low level, and the liquid or water can be replaced. The frequency can be suppressed.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram schematically showing an overall configuration of a work cleaning apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic elevational view showing a specific configuration of the device shown in FIG.

FIG. 3 is a schematic plan view showing a specific configuration of the device shown in FIG.

FIG. 4 is a schematic cross-sectional view showing a portion taken along line IV-IV in FIG.

5 is a perspective view showing the carrier of FIG.

FIG. 6 is a piping diagram showing a piping system for a cleaning liquid and pure water in the apparatus shown in FIG. ．

FIG. 7 is a plan view showing a state where the cleaning liquid tank shown in FIG. 1 is viewed from above.

FIG. 8 is a plan view showing the state of the pure water tank in the first and second rinse parts shown in FIG.

9 is a configuration diagram showing a configuration of an air blowing section shown in FIG.

Figure l. FIG. 10 is a schematic block diagram showing a main part of a control system of the apparatus shown in FIG.

FIG. 11 is a timing chart showing the cleaning operation of the apparatus of FIG.

FIG. 12 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 13 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 14 is an explanatory diagram showing the operation of the apparatus shown in FIG.

FIG. 15 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 16 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 17 is an overall configuration diagram showing another embodiment of the present invention.

FIG. 18 is a schematic diagram showing a work carrier and its transport system used in the example shown in FIG. 17;

FIG. 19 is an overall configuration diagram showing a modified example of the embodiment shown in FIG. 17 and showing an example in which a work transfer system is configured using a transfer belt.

[Explanation of symbols]

 l Work cleaning device 2 Carrier 3 Cleaning part 4 1st preliminary rinse part 5 2nd preliminary rinse part 6 1st rinse part 7 2nd rinse part 8 Drying part 9 Air blowing part

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[Procedure amendment]

[Submission date] June 15, 1995

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Brief description of the drawing

[Correction method] Change

[Correction content]

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram schematically showing an overall configuration of a work cleaning apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic elevational view showing a specific configuration of the device shown in FIG.

FIG. 3 is a schematic plan view showing a specific configuration of the device shown in FIG.

FIG. 4 is a schematic cross-sectional view showing a portion taken along line IV-IV in FIG.

5 is a perspective view showing the carrier of FIG.

FIG. 6 is a piping diagram showing a piping system for a cleaning liquid and pure water in the apparatus shown in FIG. ．

FIG. 7 is a plan view showing a state where the cleaning liquid tank shown in FIG. 1 is viewed from above.

FIG. 8 is a plan view showing the state of the pure water tank in the first and second rinse parts shown in FIG.

9 is a configuration diagram showing a configuration of an air blowing section shown in FIG.

FIG. 10 is a schematic block diagram showing a main part of a control system of the apparatus shown in FIG.

FIG. 11 is a timing chart showing the cleaning operation of the apparatus of FIG.

FIG. 12 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 13 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 14 is an explanatory diagram showing the operation of the apparatus shown in FIG.

FIG. 15 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 16 is an explanatory diagram showing the operation of the apparatus of FIG.

FIG. 17 is an overall configuration diagram showing another embodiment of the present invention.

FIG. 18 is a schematic diagram showing a work carrier and its transport system used in the example shown in FIG. 17;

FIG. 19 is an overall configuration diagram showing a modified example of the embodiment shown in FIG. 17 and showing an example in which a work transfer system is configured using a transfer belt.

[Explanation of Codes] l Work cleaning device 2 Carrier 3 Cleaning part 4 1st preliminary rinse part 5 2nd preliminary rinse part 6 1st rinse part 7 2nd rinse part 8 Drying part 9 Air blowing part

Claims (17)

[Claims] 1. A cleaning step of immersing a work to be cleaned in a cleaning liquid containing a cleaning agent, and spraying a jet of the cleaning liquid onto the immersed work to remove adhered substances from the work. A first rinse step of immersing the work that has undergone this cleaning step in pure water and spraying a jet of pure water onto the immersed work to wash off the cleaning liquid adhering to the work. And a second rinse step of supplying pure water to the workpiece that has passed through the first rinse step to wash off the cleaning liquid adhering to the workpiece. 2. The method according to claim 1, wherein at least one preliminary rinsing step is provided between the cleaning food and the first rinsing step, and the preliminary rinsing step includes the work in the stored pure water. A method for cleaning a work, which is characterized in that the cleaning liquid adhering to the work is washed off by immersing. 3. The method according to claim 1, further comprising a draining step of removing pure water adhering to the work that has been subjected to the second rinse step, the draining step being performed in pure water in the second rinse step. A work cleaning method characterized in that it is a work that blows a gas onto a work that is pulled up from the work to remove the pure water adhering to the work. 4. The work cleaning method according to claim 3, further comprising a drying step of drying and removing pure water adhering to the work that has undergone the draining step. 5. The method according to claim 1, further comprising a draining step of blowing a gas onto a work to be lifted from the cleaning liquid in the cleaning step to remove the cleaning liquid adhering to the work. How to clean the work. 6. A cleaning liquid tank in which a cleaning liquid containing a work cleaning agent is stored, a work transfer means for loading and unloading a work to and from the cleaning liquid tank, and a work being put in the cleaning liquid tank by the work transfer means. To the work cleaning section, which has a jet forming means for blowing a jet of cleaning liquid, a pure water tank storing pure water, and a cleaned work received from the work cleaning section, and the work is put in and out of the pure water tank. And a first rinse portion having a jet forming means for spraying a jet of pure water onto the workpiece placed in the pure water tank by the work conveying means, Work transfer that receives a stored pure water tank and a workpiece that has been cleaned with pure water from the first rinse section, and takes the workpiece in and out of the pure water tank And a second rinse portion provided with a means. 7. The preliminary rinse section according to claim 6, comprising: a pure water tank storing pure water; and a work transfer means for receiving a cleaned work from the work cleaning section and for putting the work in and out of the pure water tank. A work cleaning apparatus having at least one of the above, and the first rinse section is adapted to receive the work after being cleaned by the preliminary rinse section. 8. The draining means according to claim 6, wherein a gas is blown to the work pulled up from the pure water tank of the second rinse portion to remove the pure water adhering to the work. A work cleaning device characterized in that 9. The work cleaning apparatus according to claim 8, further comprising a drying unit for drying and removing pure water attached to the work drained by the draining unit. 10. The liquid removing means according to claim 6, further comprising: a liquid draining unit for blowing a gas to a work to be pulled up from the cleaning tank of the cleaning unit to remove a cleaning liquid adhering to the work. Work cleaning device. 11. The pure water collecting tank according to claim 6, further comprising: a pure water collecting tank for collecting pure water overflowing from each of the pure water tank of the first rinse portion and the pure water tank of the second rinse portion, The jet flow forming means in the first rinse section pressure-feeds at least one pure water jet nozzle arranged toward the workpiece and the pure water collected in the pure water collecting tank toward each of the nozzles. And a pump for transporting the pure water collected in the pure water collecting tank to the pure water tank in the second rinse unit, and the second rinse unit is combined with the pure water to be refluxed. And a filtering means for removing impurities contained therein. 12. The cleaning liquid stored in the cleaning liquid tank of the cleaning unit, and at least one cleaning liquid injection nozzle arranged toward the work in the cleaning unit, and the cleaning liquid stored in the cleaning liquid tank in the cleaning unit. A work cleaning device, comprising: a pump that sends a pressure toward an injection nozzle. 13. The liquid draining means in the cleaning section and the water draining means in the second rinse section according to claim 8 or 10, wherein the liquid surface of the cleaning liquid stored in the cleaning tank or the pure water stored in the pure water tank. A work cleaning device, comprising: at least one air injection nozzle disposed above the water surface of the device, and an air pump that supplies compressed air to the air injection nozzle. 14. The work transfer means in each of the cleaning part, the preliminary rinse part, and the first and second rinse parts according to claim 6, wherein the work is laterally transferred toward the next stage. A work cleaning device comprising: a transfer mechanism; and a work elevating mechanism for moving a work received from the horizontal work transfer mechanism into and out of a cleaning liquid tank or a pure water tank. 15. The work carrier according to claim 14, wherein the work carrier is capable of holding a plurality of plate-shaped works, and the work carrier is capable of holding a plurality of works in a row in a standing state at predetermined intervals. The work cleaning device is characterized in that the work carrier is carried by each of the work carrying means. 16. The work cleaning apparatus according to claim 15, wherein the work lifting mechanism in each of the work transfer means is capable of swinging the work carrier up and down with a constant stroke. 17. A work according to claim 14, wherein each of the work transfer means is composed of a transfer belt means whose transfer path is partially immersed in the cleaning tank and the pure water tank. Cleaning device.