JPH0722491A - Carriage control device for semiconductor manufacturing - Google Patents

Abstract

PURPOSE:To prevent the mismatch of a semiconductor wafer and process conditions by providing a semiconductor wafer processing cassette with ID. CONSTITUTION:A control device is provided with a processing cassette provided with ID, a semiconductor wafer setting device 8 provided with an ID recognition unit, storing shelves 4 for cassettes to be carried and cassettes to be processed, a semiconductor wafer processor 7 provided with an ID recognition unit, a cassette carrying cart 5, a computer 1 for controlling these and a host computer 2 which has the information of semiconductor wafer. These systems provide the processing cassette with ID and prevent the mismatch of the semiconductor wafer and processing conditions.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing transfer control device.

[0002]

2. Description of the Related Art Referring to FIG. 8 showing a block diagram of a conventional transfer control device, this transfer control device includes a transfer control computer 11, a host computer 12, a transfer cassette loading / unloading port 13, and a transfer cassette storage rack 14. , Transport cassette carrier 15, carrier track 16, wafer processing apparatus 1
7. A wafer sorter 18 is provided.

Referring to FIGS. 9 and 10 showing the operation of this apparatus, first, an operator identifies the semiconductor wafer transfer cassette (hereinafter referred to as a transfer cassette) to the control computer 11 by using a magnetic card ( Process 90), the control computer 11 communicates with the host computer 12 based on the ID information of the carrying cassette to obtain the processing conditions of the semiconductor wafer (hereinafter referred to as a wafer) housed in the carrying cassette (process). 91, 92).

The operator confirms the processing conditions with the control computer 11 and places the transport cassette on the loading / unloading port 13.

By the processes 93 and 94, the transfer cassette is moved to the storage rack 14, and the storage rack 14 communicates with the control computer 11 the rack number in which the transfer cassette is stored, and the control computer 11 transfers the wafer processing conditions and the cassette. Get the shelf number stored in.

The operator confirms the wafer processing conditions with the control computer 11 and places the transfer cassette on the loading / unloading port 13. The transfer cassette is moved to the storage shelf 14, and the storage shelf 14 communicates to the control computer 11 the shelf number in which the transfer cassette is stored, and the control computer 11 communicates the wafer processing conditions and the storage cassette storage shelf number. To get.

The control computer 11 is a wafer processing apparatus 1.
7, the processing conditions of the wafers stored in the transfer cassette in the storage shelf 14, and the position of the transfer vehicle 15,
The transfer order of the transfer cassette is optimized, the transfer destination is determined (process 95), the storage shelf 14 is communicated, and a transfer instruction is issued (process 96).

The storage shelf 14 communicates with the transfer vehicle 15 to issue a transfer instruction (process 97), and the transfer vehicle 15 transfers the transfer cassette from the storage shelf 14 to the wafer processing apparatus 17 according to the transfer instruction (process 98).

The transfer vehicle 15 is a wafer processing apparatus 17 at the transfer destination.
Then, the wafer processing device 17 is confirmed to be empty and transferred to the transfer device 18.

The wafer processing apparatus 17 confirms that the transport cassette has arrived at the transfer machine 18 (process 99), and communicates with the control computer 11 (process 100).

The control computer 11 sends the processing conditions for the wafers stored in the transfer cassette that has issued the transfer instruction to the wafer processing apparatus 17 (process 101).

Wafer processing apparatus 17 which has acquired processing conditions
In step S103, the wafer stored in the transfer cassette is transferred to the semiconductor wafer processing cassette (hereinafter referred to as a processing cassette) by the transfer device 18 (processing 103).

The processing cassette is moved to the wafer processing apparatus 17, and the wafer processing apparatus 17 starts processing based on the processing conditions (processing 104). The empty transport cassette is
It is moved to the money changing machine 18.

After completion of the processing of the processing 105, the processing cassette is moved from the wafer processing apparatus 17 to the transfer machine 18, and the wafer stored in the processing cassette is transferred to an empty transfer cassette by the transfer machine 18 (processing). 106).

The wafer processing apparatus 17 is a control computer 1.
The control computer 11 optimizes the transfer order and issues a transfer instruction to the storage shelf 14 (process 10).
8, 109).

The storage rack 14 which has received the transfer instruction is transferred to the transfer vehicle 1.
5, the transfer vehicle 15 transmits the transfer instruction, and the transfer vehicle 15 transfers the transfer cassette from the transfer device 18 of the instructed wafer processing apparatus 17,
It is conveyed to the storage shelf 14 (process 110).

The transport cassette is transferred to the storage shelf 14 (process 111) and moved to the loading / unloading port 13 (process 11).
2).

The worker takes out the transport cassette from the loading / unloading port 13 (process 113), and the work is completed (process 11).
4).

[0019]

In the conventional transfer control,
The transfer cassette and the transfer cassette are transferred because the transfer of the transfer cassette and the processing conditions of the wafers stored in the transfer cassette are not performed at the same time and the ID of the transfer cassette cannot be recognized by the wafer processing apparatus. There is a possibility that the processing conditions of the wafers stored in the storage cassette may not match.

[0020]

The structure of the transfer control device is
Wafer processing apparatus provided with a processing cassette having an ID, an extinguishing machine equipped with a unit for recognizing the ID, a transport cassette and a storage shelf for the processing cassette having the ID, and a unit for recognizing the ID of the processing cassette And a transport vehicle for transporting the processing cassette, a computer for controlling the transport cassette, and a host computer having information on wafers stored in the transport cassette.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the block diagram of FIG. 1 showing a first embodiment of the present invention, in this embodiment, a transfer control computer 1, a host computer 2, a transfer cassette loading / unloading port 3, and ID recognition. Semiconductor wafer sorting machine with unit 8
A transfer cassette and processing cassette storage rack 4, a processing cassette transfer vehicle 5, a transfer vehicle track 6, and a semiconductor wafer processing apparatus 7 with an ID recognition unit.

The operation of this embodiment will be described with reference to the control flow charts of FIGS.

First, an operator causes the control computer 1 to recognize the ID of the wafer stored in the transfer cassette using a magnetic card (step 20), and the control computer 1 uses the ID information to identify the host computer 2 (Processing 21), and the processing condition of the wafer stored in the transport cassette is acquired (Processing 22).

The operator uses the control computer 1 to set the wafer I
After confirming the D information and the processing conditions, the transport cassette is placed in the loading / unloading port 3 (processing 23).

The transport cassette is transferred to a wafer transfer device 8 equipped with an ID recognition unit (hereinafter referred to as a transfer device 8 with an ID recognition unit).

A processing cassette having an empty ID (hereinafter, referred to as an ID-added processing cassette) is arbitrarily selected from the storage rack 4 and transferred to the exchange 8 with an ID recognition unit (processing 24).

The ID recognizing unit equipped rectifier 8 replaces the wafer stored in the carrying cassette with an empty ID-equipped processing cassette and recognizes the ID of the ID-equipped processing cassette (process 25).

The exchange 8 with the ID recognition unit communicates the recognized ID information to the control computer 1, and the control computer 1 unifies the ID information and the processing condition information.

The control computer 1 determines the storage positions of the ID-added processing cassette and the empty transfer cassette in the storage shelf, and stores the ID information, the processing condition information, the ID-added processing cassette and the empty transfer cassette. The position information is unified (process 26).

The control computer 1, depending on the operating state of the processing device 7, the processing conditions of the wafers stored in the processing cassette with the ID in the storage shelf 4, and the operating state of the carrier 5,
The transfer order of the processing cassette with the ID is optimized, the transfer destination is determined, and a transfer instruction is issued to the storage shelf 4 (process 27, 2).
8).

The storage shelf 4 issues a transportation instruction to the transportation vehicle 5, and the transportation vehicle 5 transports the ID-equipped processing cassette to the processing device 7 in accordance with the transportation instruction, and performs transfer (processing 29, 30).

The processing device 7 is an I-type processing cassette I.
D is recognized (process 31), and the processing condition of the wafer is inquired to the control computer 1 based on the ID information (process 33).

The processing device 7 acquires the processing conditions (process 3).
4) The processing of the wafer is started (processing 35).

After the end of the process 36, the processing device 7 communicates to the control computer 1 that there is an ID-added processing cassette that has been processed (process 37).

The control computer 1 optimizes the transfer order (process 38) and issues a transfer instruction to the storage rack 4 (process 3).
9).

The storage shelf 4 that has received the transfer instruction issues a transfer instruction to the transfer vehicle 5, and the transfer vehicle 5 transfers the processed ID-added processing cassette from the processing device 7 to the storage shelf 4 (step 40).

The ID-equipped processing cassette transferred to the storage shelf 4 is transferred to the ID recognition unit-equipped advancement machine 8 to perform ID recognition (processing 41, 42).

The transfer device 8 with the ID recognition unit recognizes the ID information of the processing cassette with the ID which has been processed,
ID information is communicated to the control computer 1.

The control computer 1 retrieves the storage position information of the empty transport cassette that has been replaced from the ID information (process 43), and the storage rack 4 recognizes the ID of the empty transport cassette corresponding to the ID information. An instruction is issued to convey to the advance machine 8 with unit (process 44).

The empty carrier cassette is transferred to the ID recognition unit-equipped transfer device 8 and the wafers stored in the ID-equipped processing cassette are replaced with the carrier cassette (process 45).

Next, in step 46, the transfer cassette storing the wafer is transferred to the loading / unloading port 3, and the empty processing cassette with the ID is transferred to the storage rack 4. In step 47, the operator inserts the transfer cassette into the loading / unloading port. The work is finished by taking out from 3.

Next, the ID recognition method of this embodiment will be described with reference to FIG.
Has an ID pattern 83, and the light receiving unit 84 receives the light beam pattern generated by the light beam emitted from the light emitting unit 82 being blocked by the ID pattern 83 to recognize the ID.

Next, a second embodiment of the present invention will be described with reference to FIGS. 1, 4, 5 and 7. Since this embodiment is common to FIG. 1, it will be described with reference to FIG. 1 without separately preparing this drawing.

The operation of this embodiment will be described. First, an operator causes the control computer 1 to recognize the ID of the wafer stored in the transfer cassette by using a magnetic card, and the control computer 1 uses the ID information as a basis. First, the host computer 2 is communicated with to acquire the processing conditions for the wafers stored in the transport cassette (processes 50 to 52).

In step 53, the worker controls the control computer 1
Then, the wafer ID information and the processing conditions are confirmed, and the transfer cassette is placed in the loading / unloading port 3 (processing 53).

The transfer cassette is transferred to a wafer replacing machine 8 equipped with an ID recognition unit (hereinafter referred to as a displacing machine 8 with an ID recognition unit), and is transferred from the storage shelf 4 to a processing cassette having an empty ID (hereinafter, ID). (It will be referred to as an attached processing cassette)
Are arbitrarily selected and transferred to the advance machine 8 with the ID recognition unit (process 54).

The ID changer with an ID recognition unit 8 replaces the wafer stored in the transfer cassette with an empty ID-added processing cassette, recognizes the ID of the ID-added processing cassette, and writes the processing condition information in the ID (processing). 55).

The exchange 8 with the ID recognition unit communicates the recognized ID information to the control computer 1, and the control computer unifies the ID information and the processing condition information, and the ID
The attached processing cassette has ID information and processing conditions.

The control computer 1 determines the storage positions of the ID-added processing cassette and the empty transfer cassette in the storage shelf, and stores the ID information, the processing condition information, the ID-added processing cassette and the empty transfer cassette. Position information is unified (process 56).

The control computer 1, depending on the operating state of the processing apparatus 7, the processing conditions of the wafers stored in the processing cassette with the ID in the storage shelf 4, and the operating state of the carrier 5,
The transfer order of the processing cassette with the ID is optimized, the transfer destination is determined, and a transfer instruction is issued to the storage shelf 4 (process 57, 5).
8).

The storage shelf 4 issues a transportation instruction to the transportation vehicle 5, and the transportation vehicle 5 transports the ID-equipped processing cassette to the processing device 7 in accordance with the transportation instruction, and transfers it.

The processing unit 7 is an I-type processing cassette I.
D and the processing conditions are recognized, the processing apparatus 7 acquires the processing conditions, and starts the processing of the wafer (the above processing 59 to 6).
1).

After the end of the process 64, the processor 7 communicates to the control computer 1 that there is an ID-added processing cassette that has been processed (process 65).

The control computer 1 optimizes the transfer order and issues a transfer instruction to the storage rack 4 (processes 67 and 68).

The storage shelf 4 that has received the transfer instruction issues a transfer instruction to the transfer vehicle 5, and the transfer vehicle 5 transfers the processed ID-added processing cassette from the processing device 7 to the storage shelf 4 (steps 69 and 70). ).

The ID-equipped processing cassette transferred to the storage rack 4 is moved to the ID recognition unit-equipped advancement machine 8, where the ID is recognized and the processing condition information is erased (processing 71).

The exchange device 8 with the ID recognition unit recognizes the ID information of the processing cassette with the ID which has been processed,
Communicate the ID information to the control computer.

The control computer 1 retrieves the storage position information of the empty transfer cassette that has been replaced from the ID information (process 72), and recognizes the ID of the empty transfer cassette corresponding to the ID information to the storage rack 4. An instruction is issued to convey to the advance machine 8 with unit (process 73).

The empty transfer cassette is transferred to the ID recognizing unit-equipped transfer device 8 and the wafers stored in the ID-equipped processing cassette are replaced with the transfer cassette (process 74).

The transfer cassette containing the wafers is moved to the loading / unloading port 3, and the empty processing cassette with the ID is transferred to the storage shelf 4. The worker finishes the operation by taking out the transfer cassette from the loading / unloading port 3. (Process 75, 76, 77).

The ID recognition method for this embodiment will be described with reference to FIG. 7. The ID-equipped processing cassette 85 has a data carrier 86 and a read / write unit 87.
The ID information is read and the processing conditions are written by.

[0062]

As described above, according to the present invention,
Since the processing device can recognize the ID, there is no discrepancy between the wafer to be processed and its processing conditions. Also, by having a replacement device in the storage shelf, it is not necessary to have a replacement device for each processing device. Can be miniaturized.

[Brief description of drawings]

FIG. 1 is a block diagram of a first embodiment of the present invention.

FIG. 2 is a flowchart showing a first part of the operation of this embodiment.

FIG. 3 is a flowchart showing a second part following the first part.

FIG. 4 is a flowchart showing a first portion of the operation of the second exemplary embodiment of the present invention.

FIG. 5 is a flowchart showing a second part of the operation of the second embodiment.

FIG. 6 is a perspective view of an ID recognition unit according to the first embodiment.

FIG. 7 is a perspective view of an ID recognition unit according to a second embodiment.

FIG. 8 is a block diagram showing a conventional semiconductor manufacturing transfer control device.

FIG. 9 is a flowchart showing a first part of the operation of the conventional apparatus.

10 is a flowchart showing a second part following the first part of FIG. 9. FIG.

[Explanation of symbols]

 1,11 Transport control computer 2,12 Host computer 3,13 Transport cassette loading / unloading port 4 Transport cassette and processing cassette storage rack 5 Processing cassette storage rack 6,16 Transport vehicle track 7 Semiconductor wafer processing with ID recognition unit Device 8 Semiconductor wafer replacement machine with ID recognition unit 14 Transport cassette storage rack 15 Transport cassette carrier 17 Wafer processing device 18 Wafer replacement machine 81,85 Processing cassette with ID 82 Light emitting unit 83 ID pattern 84 Light receiving unit 86 Data carrier 87 read / write unit

Claims (1)

[Claims] 1. A semiconductor wafer processing apparatus, a storage shelf for managing a semiconductor wafer cassette, a carrier for the semiconductor wafer cassette, a computer unit for controlling these, and a host computer having information on the semiconductor wafer. In a semiconductor manufacturing transfer control device comprising:
A semiconductor manufacturing transfer control device, wherein the semiconductor wafer processing device comprises an ID recognition unit, and the semiconductor wafer cassette storage shelf comprises an ID recognition unit and a semiconductor wafer sorting machine.