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JPH0714210A - Optical information recording medium - Google Patents

Optical information recording medium

Info

Publication number
JPH0714210A
JPH0714210A JP5153497A JP15349793A JPH0714210A JP H0714210 A JPH0714210 A JP H0714210A JP 5153497 A JP5153497 A JP 5153497A JP 15349793 A JP15349793 A JP 15349793A JP H0714210 A JPH0714210 A JP H0714210A
Authority
JP
Japan
Prior art keywords
recording medium
optical information
information recording
layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5153497A
Other languages
Japanese (ja)
Inventor
Yasuaki Morimoto
寧章 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIC Corp
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Dainippon Ink and Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd, Dainippon Ink and Chemicals Co Ltd filed Critical NKK Corp
Priority to JP5153497A priority Critical patent/JPH0714210A/en
Publication of JPH0714210A publication Critical patent/JPH0714210A/en
Pending legal-status Critical Current

Links

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  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

PURPOSE:To provide an optical information recording medium from which reproduced signals having very little inter-pit interference can be obtained and which can be applied to phase transition type disks also. CONSTITUTION:A magneto-optical type optical information recording medium has a multilayered dielectric film 2 the transmissivity of which depends upon the incident angle of light on a transparent substrate 1 in which grooves and phase pits are formed. The medium also has a protective film 3 and recording film 4 successively formed on the dielectric film 2 so that the interval between the films 3 and 2 can be kept constant by the protective film 3. In addition, a protective film 5 and reflecting film 6 are successively formed on the recording film 5.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、情報が高密度に記録さ
れた光情報記録媒体に関し、詳しくは、高密度に記録さ
れた情報を、高品質、高解像な光情報に変換する機能を
有する光情報記録媒体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical information recording medium in which information is recorded in high density, and more specifically, a function for converting information recorded in high density into high quality and high resolution optical information. And an optical information recording medium having

【0002】[0002]

【従来の技術】図5に、従来の光情報記録媒体の一例と
して、光磁気ディスクの模式断面図を示した。従来の光
磁気ディスクは、ポリカーボネート等の透明な基板1に
エンハンス効果を併せもつ第1の保護層3を形成し、そ
の上に、光磁気記録層4、第2の保護層5、および反射
層であるアルミニウム層6を有した構造を有する。ま
た、交換結合膜を利用した磁気超解像磁性膜を光磁気記
録膜4に応用した例が知られている。
2. Description of the Related Art FIG. 5 shows a schematic sectional view of a magneto-optical disk as an example of a conventional optical information recording medium. In a conventional magneto-optical disk, a first protective layer 3 having an enhancing effect is formed on a transparent substrate 1 such as polycarbonate, and a magneto-optical recording layer 4, a second protective layer 5, and a reflective layer are formed on the first protective layer 3. The structure has the aluminum layer 6 which is Further, an example is known in which a magnetic super-resolution magnetic film using an exchange coupling film is applied to the magneto-optical recording film 4.

【0003】[0003]

【発明が解決しようとする課題】従来の技術において、
光磁気ディスクの記録層は、該記録層に情報を記録再生
するために用いられる光ヘッドの対物レンズによって回
折限界に絞り込まれたビームウエスト位置に常に一致し
た状態で記録再生する形態をとっていたが、ビームウエ
ストの径は対物レンズの開口数とレーザーによる照射光
の波長で決まるので、当然解像度には限界があった。ま
た、磁気超解像を利用する場合、初期化磁石および再生
用バイアス磁石等が必要であった。さらに、再生時のレ
ーザーパワーが通常の再生方式に比べ高パワーのため、
記録された磁気ドメインが破壊され易いという問題があ
った。したがって、本発明が解決しようとする課題は、
照射光の波長および対物レンズの開口数で決まる解像限
界の向上させ、記録容量の増大を図ることにある。
SUMMARY OF THE INVENTION In the prior art,
The recording layer of the magneto-optical disk has a form in which recording and reproducing are always performed in a state in which the beam waist position narrowed down to the diffraction limit by the objective lens of the optical head used for recording and reproducing information on the recording layer is always matched. However, since the diameter of the beam waist is determined by the numerical aperture of the objective lens and the wavelength of light emitted by the laser, the resolution is naturally limited. Further, when utilizing the magnetic super-resolution, an initializing magnet, a reproducing bias magnet and the like were required. Furthermore, because the laser power during playback is higher than in the normal playback system,
There is a problem that the recorded magnetic domain is easily destroyed. Therefore, the problem to be solved by the present invention is
It is intended to improve the resolution limit determined by the wavelength of irradiation light and the numerical aperture of the objective lens to increase the recording capacity.

【0004】[0004]

【課題を解決するための手段】本発明者は上記課題を解
決するため、透過率が照射光の入射角に大きく依存する
誘電体多層層を用いることを見い出し、本発明に至っ
た。
In order to solve the above problems, the present inventor has found out to use a dielectric multi-layered layer whose transmittance greatly depends on the incident angle of irradiation light, and arrived at the present invention.

【0005】すなわち、本発明は上記課題を解決するた
め、(1)グルーブおよび位相ピットが形成された基板
上に、透過率が照射光の入射角に依存する誘電体多層膜
を設けたことを特徴とする光情報記録媒体、(2)該誘
電体多層膜の上に保護層および記録層を順次設け、該記
録層と該誘電体多層膜との間隔が、該保護層によって一
定に保たれることを特徴とする上記(1)記載の光情報
記録媒体、および(3)該記録層の上に、保護層および
反射層を順次設けたことを特徴とする光磁気形の上記
(2)記載の光情報記録媒体を提供する。
That is, in order to solve the above-mentioned problems, the present invention provides (1) a dielectric multilayer film whose transmittance depends on the incident angle of irradiation light on a substrate on which grooves and phase pits are formed. (2) A protective layer and a recording layer are sequentially provided on the dielectric multilayer film, and the distance between the recording layer and the dielectric multilayer film is kept constant by the protective layer. (3) The optical information recording medium according to (1) above, and (3) a magneto-optical recording medium according to (2) above, wherein a protective layer and a reflective layer are sequentially provided on the recording layer. An optical information recording medium as described above is provided.

【0006】本発明で使用する、透過率が照射光の入射
角に依存する誘電体多層膜を構成する材質としては、例
えば、SiNx、SiOx、ZnS等が挙げられ、図2に
示した照射光の入射角と透過率の関係を満足するもので
あり、真空蒸着法により形成する。なお、図2に示した
照射光と透過率の関係は、設定波長を780nm±10nm
とした場合であり、縦軸の透過率は垂直入射を100%
としたときの相対透過率である。図2から明らかなよう
に、透過率の入射角依存性は、透過率の波長依存性とほ
ぼ同等の振る舞いをするので、波長を固定した場合、入
射角が増加するに従い、透過率が減少する。
Materials used for the dielectric multilayer film of which transmittance depends on the incident angle of irradiation light used in the present invention include, for example, SiN x , SiO x , ZnS, etc., and are shown in FIG. It satisfies the relationship between the incident angle of irradiation light and the transmittance, and is formed by the vacuum deposition method. Note that the relationship between the irradiation light and the transmittance shown in FIG. 2 is that the set wavelength is 780 nm ± 10 nm.
And the transmittance on the vertical axis is 100% at vertical incidence.
Is the relative transmittance. As is clear from FIG. 2, since the incident angle dependence of the transmittance behaves almost the same as the wavelength dependence of the transmittance, when the wavelength is fixed, the transmittance decreases as the incident angle increases. .

【0007】本発明で使用する基板としては、例えば、
ポリカーボネート、ポリメチルメタクリレート、アモル
ファスポリオレフィンの如き樹脂またはガラスに直接案
内溝を形成した基板、ガラスまたは樹脂の平板上にフォ
トポリマー法により案内溝を形成した基板が挙げられ
る。
The substrate used in the present invention is, for example,
Examples thereof include a substrate in which a guide groove is directly formed in resin or glass such as polycarbonate, polymethylmethacrylate, and amorphous polyolefin, and a substrate in which a guide groove is formed on a flat plate of glass or resin by a photopolymer method.

【0008】樹脂製基板は、耐擦傷性が不十分であり、
このような欠点を克服するために、記録層とは反対側の
面に硬度の高い透明材質を用いてハードコート層を設け
ることが望ましい。ハードコートの手段としてはスピン
コート法、2P法等により多官能ウレタンアクリレート
および光重合開始剤を含有する紫外線硬化樹脂等の有機
高分子を塗布、硬化する方法、析出法やスパッタリング
法等により二酸化ケイ素等のセラミックハードコート層
を設ける方法が挙げられるが、セラミック製のハードコ
ート層は、生産性が悪いため、大量生産には不向きであ
るので、紫外線硬化樹脂を用いたハードコート層が好ま
しい。
The resin-made substrate has insufficient scratch resistance,
In order to overcome such a defect, it is desirable to provide a hard coat layer on the surface opposite to the recording layer using a transparent material having high hardness. As a means for hard coating, a method of applying and curing an organic polymer such as a UV-curable resin containing a polyfunctional urethane acrylate and a photopolymerization initiator by a spin coating method, a 2P method, or the like, silicon dioxide by a precipitation method, a sputtering method, or the like. And the like, a ceramic hard coat layer is not suitable for mass production due to poor productivity, and thus a hard coat layer using an ultraviolet curable resin is preferable.

【0009】本発明で使用する光磁気記録層を構成する
材質としては、例えば、TbFeCo、DyFeCo、
TbFe、GdTbFeCo、NdDyFeCo、Tb
Co等が挙げられ、これらの非晶質合金に耐酸化性の向
上等の目的でその他の金属を添加したものも使用でき
る。
Examples of the material forming the magneto-optical recording layer used in the present invention include TbFeCo, DyFeCo,
TbFe, GdTbFeCo, NdDyFeCo, Tb
Co and the like can be mentioned, and those obtained by adding other metals to these amorphous alloys for the purpose of improving oxidation resistance can also be used.

【0010】光磁気記録層を形成させる際のスパッタ条
件としては、スパッタガス圧を変化させる。この場合、
同一のターゲットを用いるが、スパッタガス圧により成
膜速度が異なるので、膜厚を制御するためには、予め成
膜速度を求めておき、各々のガス圧でのスパッタ時間を
決めておく。
As the sputtering conditions for forming the magneto-optical recording layer, the sputtering gas pressure is changed. in this case,
Although the same target is used, the film formation rate varies depending on the sputtering gas pressure. Therefore, in order to control the film thickness, the film formation rate is obtained in advance and the sputtering time at each gas pressure is determined.

【0011】本発明で使用する保護層の材料としては、
一般に光学定数および透過率が大きく、記録層を保護す
る効果の大きいSiNX、SiOX、AlSiON、Al
SiN、AlN、AlTiN、Ta25、ZnS等が挙
げられる。
The material of the protective layer used in the present invention is
In general the optical constants and the transmittance is large, large SiN X effect of protecting the recording layer, SiO X, AlSiON, Al
SiN, AlN, AlTiN, Ta 2 O 5, ZnS , and the like.

【0012】保護層は、スパッタリング、イオンプレー
ティング等の物理蒸着法(PVD)、プラズマCVD等
の化学蒸着法(CVD)等によって形成する。
The protective layer is formed by a physical vapor deposition method (PVD) such as sputtering or ion plating, or a chemical vapor deposition method (CVD) such as plasma CVD.

【0013】本発明で使用する反射層の材質としては、
Al、Alと他の金属との合金等が挙げられるが、記録
膜を保護する効果の大きいと思われるAlにTiを加え
た合金が特に好ましい。
As the material of the reflective layer used in the present invention,
Examples thereof include Al and alloys of Al and other metals. Among them, an alloy in which Ti is added to Al which is considered to have a large effect of protecting the recording film is particularly preferable.

【0014】反射層は、スパッタリング、イオンプレー
ティング等の物理蒸着法(PVD)、プラズマCVD等
の化学蒸着法(CVD)等によって形成する。
The reflective layer is formed by a physical vapor deposition method (PVD) such as sputtering or ion plating, a chemical vapor deposition method (CVD) such as plasma CVD, or the like.

【0015】このようにして製膜した光ディスクは、単
体で使用してもよく、2枚を貼り合わせて使用してもよ
い。
The optical disk thus formed into a film may be used alone or may be used by laminating two disks.

【0016】[0016]

【作用】照射光の入射角が大きくなるに従い透過率が低
下する誘電体多層膜を光情報記録媒体に用いることによ
り、光情報記録媒体に情報を記録再生するために用いら
れる光ヘッドの再生系において、該誘電体多層膜を透過
した照射光のビームウエストが、対物レンズの開口数と
照射光の波長のみで決まるビームウエストより鋭くなる
ために、記録ピットの再生解像度が向上する。
A reproducing system of an optical head used for recording / reproducing information on / from an optical information recording medium by using a dielectric multilayer film whose transmittance decreases as the incident angle of irradiation light increases, for an optical information recording medium. In the above, since the beam waist of the irradiation light transmitted through the dielectric multilayer film is sharper than the beam waist determined only by the numerical aperture of the objective lens and the wavelength of the irradiation light, the reproduction resolution of the recording pit is improved.

【0017】[0017]

【実施例】以下、本発明の実施例により、図面を用いて
本発明を詳しく説明する。
The present invention will be described in detail below with reference to the drawings according to the embodiments of the present invention.

【0018】図1は、本発明の光情報記録媒体の一例を
示した模式断面図である。図1に示した光情報記録媒体
は、グルーブおよび位相ピットを有するポリカーボネー
ト製の透明な基板1上に、図2に示した特性を有する、
照射光7の入射角が大きくなるに従い透過率が低下する
誘電体多層膜2、SiNからなる第1の保護層3、Te
FeCoからなる光磁気記録層4、SiNからなる第2
の保護層5、およびAlからなる反射層6が積層された
構造を有する光磁気ディスクである。
FIG. 1 is a schematic sectional view showing an example of the optical information recording medium of the present invention. The optical information recording medium shown in FIG. 1 has the characteristics shown in FIG. 2 on a transparent substrate 1 made of polycarbonate having grooves and phase pits.
The transmittance decreases as the incident angle of the irradiation light 7 increases, the dielectric multilayer film 2, the first protective layer 3 made of SiN, and Te.
Magneto-optical recording layer 4 made of FeCo, second layer made of SiN
The magneto-optical disk has a structure in which the protective layer 5 and the reflective layer 6 made of Al are laminated.

【0019】誘電体多層膜2は、図2に示した照射光の
入射角と透過率の関係を満足するものであり、フッ化マ
グネシウムおよび酸化ケイ素からなり、真空蒸着法によ
り形成したものである。
The dielectric multilayer film 2 satisfies the relationship between the incident angle of irradiation light and the transmittance shown in FIG. 2, is made of magnesium fluoride and silicon oxide, and is formed by the vacuum deposition method. .

【0020】保護層3は、光磁気記録層4と誘電体多層
層2との間隔を一定に保つために設けられる。該間隔
は、光磁気記録層4に情報を記録再生するために用いら
れる光ヘッドの対物レンズ(図示せず)の開口数と照射
光7の波長で決まる収束光のビームウエスト位置の平面
波が球面波に移行するのに必要な光学距離であり、照射
光7の波長をλ、対物レンズの焦点距離をf、対物レン
ズの半径をaとしたとき、λ/π(f/a)(f/a)
で表わされる。このような構成において、対物レンズよ
って回折限界に絞り込まれる照射光7は、球面波から平
面波に移行する直前の領域で、誘電体多層膜2に到達す
るように、対物レンズのフォーカス制御がなされてい
る。また、保護層3は、光磁気カー効果を増強する機能
を有する。
The protective layer 3 is provided to keep the gap between the magneto-optical recording layer 4 and the dielectric multilayer 2 constant. The spacing is determined by the numerical aperture of the objective lens (not shown) of the optical head used for recording / reproducing information on / from the magneto-optical recording layer 4 and the plane wave of the beam waist position of the convergent light determined by the wavelength of the irradiation light 7 is spherical. Λ / π (f / a) (f /, where λ is the wavelength of the irradiation light 7, f is the focal length of the objective lens, and a is the radius of the objective lens. a)
It is represented by. In such a configuration, the focus control of the objective lens is performed so that the irradiation light 7 narrowed down to the diffraction limit by the objective lens reaches the dielectric multilayer film 2 in the region immediately before the transition from the spherical wave to the plane wave. There is. Further, the protective layer 3 has a function of enhancing the magneto-optical Kerr effect.

【0021】図1において、誘電体多層膜2を透過した
照射光の光磁気記録層4でのビームプロファイルは、単
純に対物レンズの開口数と照射光7の波長で決まるビー
ムプロファイルを示した図3から図4のようになり、ビ
ームウエストは細くなる。
In FIG. 1, the beam profile of the irradiation light transmitted through the dielectric multilayer film 2 in the magneto-optical recording layer 4 simply shows the beam profile determined by the numerical aperture of the objective lens and the wavelength of the irradiation light 7. 3 to FIG. 4, and the beam waist becomes thin.

【0022】このように絞り込まれた照射光7の一部
は、光磁気記録層4で反射される。また、光磁気記録層
4に吸収されずに透過した光束は第2の保護層5を通過
し、反射層6により反射され、光磁気記録層4で反射さ
れた照射光7と共に再び対物レンズを通過し、光磁気信
号検出光学系(図示せず)に導かれ、高解像の信号検出
が達成される。
A part of the irradiation light 7 thus narrowed down is reflected by the magneto-optical recording layer 4. Further, the light flux which is not absorbed by the magneto-optical recording layer 4 and passes therethrough passes through the second protective layer 5, is reflected by the reflecting layer 6, and is irradiated with the irradiation light 7 reflected by the magneto-optical recording layer 4 again through the objective lens. After passing, it is guided to a magneto-optical signal detection optical system (not shown), and high-resolution signal detection is achieved.

【0023】[0023]

【発明の効果】図4に示したビームプロファイルを有す
る誘電体多層膜2によって絞り込まれた光束が、光磁気
記録層4に記録された磁気ドメインに照射されるのでピ
ット間干渉が非常に少ない再生信号が得られる。言い換
えれば、記録面密度を飛躍的に向上することができ、媒
体の小型化が可能になり、延いては媒体駆動装置の小型
化に寄与する。また、本発明においては媒体駆動装置に
何ら手を加えることなく従来の媒体駆動装置をそのまま
使用可能であるため、互換性の点においても非常に有利
である。さらに、本発明は記録層には直接関係ない方式
のため非常に汎用性が高く、相変化型デイスクにも適用
できる。したがって、本発明は、高密度記録再生に適し
た光情報記録媒体を提供できる。
The luminous flux narrowed by the dielectric multilayer film 2 having the beam profile shown in FIG. 4 is applied to the magnetic domain recorded in the magneto-optical recording layer 4, so that reproduction with very little inter-pit interference is performed. The signal is obtained. In other words, the recording areal density can be dramatically improved, the size of the medium can be reduced, and the medium drive device can be reduced in size. Further, in the present invention, since the conventional medium driving device can be used as it is without any modification to the medium driving device, it is very advantageous in terms of compatibility. Furthermore, the present invention is very versatile because it is not directly related to the recording layer, and can be applied to a phase change disk. Therefore, the present invention can provide an optical information recording medium suitable for high density recording / reproducing.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の光情報記録媒体の一例を示した模式断
面図である。
FIG. 1 is a schematic cross-sectional view showing an example of an optical information recording medium of the present invention.

【図2】本発明で使用する誘電体多層膜における照射光
の透過率の入射角依存性を示した図表である。
FIG. 2 is a chart showing the incident angle dependence of the transmittance of irradiation light in the dielectric multilayer film used in the present invention.

【図3】対物レンズの開口数と照射光の波長で決まる回
折限界に絞り込まれた光束のビームプロファイルであ
る。
FIG. 3 is a beam profile of a light flux narrowed down to a diffraction limit determined by a numerical aperture of an objective lens and a wavelength of irradiation light.

【図4】本発明の光情報記録媒体の記録層における照射
光のビームプロファイルである。
FIG. 4 is a beam profile of irradiation light on a recording layer of the optical information recording medium of the present invention.

【図5】従来の光情報記録媒体の一例を示した模式断面
図である。
FIG. 5 is a schematic cross-sectional view showing an example of a conventional optical information recording medium.

【符号の説明】[Explanation of symbols]

1 基板 2 誘電体多層膜 3 第1の保護層 4 光磁気記録層 5 第2の保護層 6 反射層 7 照射光 DESCRIPTION OF SYMBOLS 1 Substrate 2 Dielectric multilayer film 3 First protective layer 4 Magneto-optical recording layer 5 Second protective layer 6 Reflective layer 7 Irradiation light

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 グルーブおよび位相ピットが形成された
基板上に、透過率が照射光の入射角に依存する誘電体多
層膜を設けたことを特徴とする光情報記録媒体。
1. An optical information recording medium, characterized in that a dielectric multilayer film whose transmittance depends on an incident angle of irradiation light is provided on a substrate on which grooves and phase pits are formed.
【請求項2】 誘電体多層膜の上に保護層および記録層
を順次設け、該記録層と該誘電体多層膜との間隔が、該
保護層によって一定に保たれることを特徴とする請求項
1記載の光情報記録媒体。
2. A protective layer and a recording layer are sequentially provided on the dielectric multilayer film, and the gap between the recording layer and the dielectric multilayer film is kept constant by the protective layer. Item 1. The optical information recording medium according to item 1.
【請求項3】 記録層の上に、保護層および反射層を順
次設けたことを特徴とする光磁気形の請求項2記載の光
情報記録媒体。
3. An optical information recording medium according to claim 2, wherein a protective layer and a reflective layer are sequentially provided on the recording layer.
JP5153497A 1993-06-24 1993-06-24 Optical information recording medium Pending JPH0714210A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5153497A JPH0714210A (en) 1993-06-24 1993-06-24 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5153497A JPH0714210A (en) 1993-06-24 1993-06-24 Optical information recording medium

Publications (1)

Publication Number Publication Date
JPH0714210A true JPH0714210A (en) 1995-01-17

Family

ID=15563858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5153497A Pending JPH0714210A (en) 1993-06-24 1993-06-24 Optical information recording medium

Country Status (1)

Country Link
JP (1) JPH0714210A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003006872A (en) * 2001-04-20 2003-01-10 Tdk Corp Reproducing method and device of optical information medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003006872A (en) * 2001-04-20 2003-01-10 Tdk Corp Reproducing method and device of optical information medium
US7859968B2 (en) 2001-04-20 2010-12-28 Tdk Corporation Information readout method for non mask layer type optical information medium

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