JPH07126827A - Composite film of metallic surface and its formation - Google Patents
Composite film of metallic surface and its formationInfo
- Publication number
- JPH07126827A JPH07126827A JP5294327A JP29432793A JPH07126827A JP H07126827 A JPH07126827 A JP H07126827A JP 5294327 A JP5294327 A JP 5294327A JP 29432793 A JP29432793 A JP 29432793A JP H07126827 A JPH07126827 A JP H07126827A
- Authority
- JP
- Japan
- Prior art keywords
- film
- coating
- ceramic
- sprayed
- titanium nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えばアルミニウム等
の金属の表面に形成された下地溶射皮膜及びセラミック
溶射皮膜からなる複合皮膜、及びその形成方法に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite coating composed of a thermal sprayed base coating and a ceramic sprayed coating formed on the surface of a metal such as aluminum, and a method for forming the composite coating.
【０００２】[0002]
【従来技術及びその問題点】金属表面にセラミック溶射
皮膜を形成する場合には、金属とセラミックとの熱膨張
係数の差を緩和して両者の密着性を向上させるために、
両者の中間の熱膨張係数を有する材料からなる下地溶射
皮膜を両者間に形成することが、一般に行なわれてい
る。そして、従来、下地溶射皮膜は金属からなるもので
あった。2. Description of the Related Art When forming a ceramic sprayed coating on the surface of a metal, in order to reduce the difference in the coefficient of thermal expansion between the metal and the ceramic and improve the adhesion between them,
It is generally practiced to form an undercoating spray coating made of a material having a coefficient of thermal expansion intermediate between the two. And, conventionally, the base thermal spray coating was made of metal.
【０００３】ところで、金属表面にセラミック溶射皮膜
を形成する目的は、絶縁性の向上、耐熱性の向上等、種
々ある。例えば、絶縁性の向上を図る場合には、所望の
絶縁性を呈する厚さ及び材料のセラミック溶射皮膜を形
成する。しかし、形成できるセラミック溶射皮膜の厚さ
には上限があるため、絶縁性の向上にも限界があった。
このような限界は、絶縁性に限らず、セラミック溶射皮
膜に基づく他の性質の発現においても同様であった。By the way, there are various purposes for forming a ceramic sprayed coating on the surface of a metal, such as improvement of insulation and heat resistance. For example, in order to improve the insulating property, a ceramic sprayed coating having a thickness and a material exhibiting a desired insulating property is formed. However, since there is an upper limit on the thickness of the ceramic sprayed coating that can be formed, there has been a limit to improving the insulating property.
Such a limitation was not limited to the insulating property, and was the same in the expression of other properties based on the ceramic sprayed coating.
【０００４】[0004]
【発明の目的】本発明者は、下地溶射皮膜の材質に着目
し、これを変えることにより、下地溶射皮膜の性質をセ
ラミック溶射皮膜に基づく性質に相加的又は相乗的に作
用させることを考えた。即ち、本発明は、セラミック溶
射皮膜のみに基づく性質を改善し又は改質することので
きる金属表面の複合皮膜を提供することを目的とし、ま
た、そのような複合皮膜を形成することのできる方法を
提供することを目的とする。OBJECT OF THE INVENTION The inventor of the present invention considers the material of the undercoating spray coating, and by changing it, it is considered that the properties of the undercoating spray coating act additively or synergistically on the properties based on the ceramic spray coating. It was That is, the present invention aims to provide a composite coating on a metal surface capable of improving or modifying properties based only on a ceramic spray coating, and a method capable of forming such a composite coating. The purpose is to provide.
【０００５】[0005]
【目的を達成するための手段】本発明の金属表面の複合
皮膜は、金属表面に形成された下地溶射皮膜と下地溶射
皮膜上に形成されたセラミック溶射皮膜とからなる複合
皮膜において、下地溶射皮膜が窒化チタンを主成分とす
ることを特徴としている。The composite coating on the metal surface of the present invention is a composite coating comprising a thermal sprayed base coating formed on the metal surface and a ceramic sprayed coating formed on the thermal sprayed base coating. Is characterized by containing titanium nitride as a main component.
【０００６】本発明の金属表面の複合皮膜の形成方法
は、金属表面に下地溶射皮膜を介してセラミック溶射皮
膜を形成して、両溶射皮膜からなる複合皮膜を形成する
方法において、チタンを大気中で溶射して下地溶射皮膜
を形成することを特徴としている。The method for forming a composite coating on a metal surface according to the present invention is a method for forming a ceramic spray coating on a metal surface via a thermal spray coating on a metal surface to form a composite coating consisting of both spray coatings. It is characterized in that a base thermal spray coating is formed by thermal spraying.
【０００７】[0007]
【作用】本発明の金属表面の複合皮膜においては、下地
溶射皮膜の大部分が窒化チタンからなっているので、下
地溶射皮膜はセラミックとしての性質を発現することと
なる。従って、複合皮膜の性質は、セラミック溶射皮膜
のセラミックとしての性質に、下地溶射皮膜のセラミッ
クとしての性質が作用したものとなる。In the composite coating on the metal surface of the present invention, most of the underlying thermal spray coating is made of titanium nitride, so that the underlying thermal spray coating exhibits the properties of ceramics. Therefore, the properties of the composite coating are those in which the properties of the ceramic sprayed coating as the ceramic act on the properties of the underlying sprayed coating as the ceramic.
【０００８】チタンは大気中にて反応して窒化チタンに
なりやすいので、本発明の金属表面の複合皮膜の形成方
法によれば、下地溶射皮膜の大部分は窒化チタンからな
るものとなる。Since titanium easily reacts to form titanium nitride in the atmosphere, according to the method of forming the composite coating on the metal surface of the present invention, most of the thermal sprayed base coating is made of titanium nitride.
【０００９】[0009]
【実施例】図１は本発明の方法により形成された複合皮
膜を示す断面図である。図において、１はアルミニウム
部材からなる基板、２は下地溶射皮膜、３はセラミック
溶射皮膜である。複合皮膜４は、両溶射皮膜２、３から
なっている。基板１のアルミニウム部材としてはＡ５０
５２を用い、セラミック溶射皮膜３のセラミックとして
はホワイトアルミナを用いた。また、基板１の厚さは６
ｍｍ、下地溶射皮膜２の厚さは５０〜１００μｍ、セラ
ミック溶射皮膜３の厚さは２００〜３００μｍとした。EXAMPLE FIG. 1 is a sectional view showing a composite coating formed by the method of the present invention. In the figure, 1 is a substrate made of an aluminum member, 2 is a base thermal spray coating, and 3 is a ceramic spray coating. The composite coating 4 is composed of both thermal spray coatings 2, 3. A50 as the aluminum member of the substrate 1
52, and white alumina was used as the ceramic of the ceramic sprayed coating 3. The thickness of the substrate 1 is 6
mm, the thickness of the base spray coating 2 was 50 to 100 μm, and the thickness of the ceramic spray coating 3 was 200 to 300 μm.
【００１０】次に、形成方法について説明する。基板１
表面に、ブラスト処理後、粒度が１０〜４４μｍの純チ
タン粉末をプラズマ溶射して下地溶射皮膜２を形成し
た。ブラスト処理は、アルミナグリッドを用いて行なっ
た。アルミナグリッドとしては具体的には、「アランダ
ム＃２４」を用いた。Next, the forming method will be described. Board 1
After the blasting treatment, pure titanium powder having a particle size of 10 to 44 μm was plasma sprayed on the surface to form a base spray coating 2. The blast treatment was performed using an alumina grid. Specifically, "Alundum # 24" was used as the alumina grid.
【００１１】次に、下地溶射皮膜２上に、粒度が１０〜
４５μｍのホワイトアルミナをプラズマ溶射してホワイ
トアルミナからなるセラミック溶射皮膜３を形成した。Next, a particle size of 10 to 10 is formed on the base thermal spray coating 2.
Plasma-sprayed 45 μm white alumina to form a ceramic sprayed coating 3 of white alumina.
【００１２】なお、下地溶射皮膜２及びセラミック溶射
皮膜３を形成する際の各プラズマ溶射は、出力６０ｋｗ
級の国産のプラズマ溶射装置を用いて、表１に示す条件
で行なった。Each plasma spray when forming the base spray coating 2 and the ceramic spray coating 3 has an output of 60 kw.
It carried out on the conditions shown in Table 1 using the domestic-grade plasma spraying apparatus.
【００１３】[0013]
【表１】 [Table 1]
【００１４】こうして、アルミニウム部材からなる基板
１表面に、下地溶射皮膜２を介してセラミック溶射皮膜
３が形成された。即ち、複合皮膜４が形成された。図２
は図１のＡ部の拡大写真である。In this way, the ceramic spray coating 3 was formed on the surface of the substrate 1 made of an aluminum member with the undercoat spray coating 2 interposed therebetween. That is, the composite film 4 was formed. Figure 2
1 is an enlarged photograph of part A of FIG.
【００１５】上記形成方法において、下地溶射皮膜２を
形成する際に、純チタンは大気中にて反応して殆んどが
窒化チタンに変わる。このため、下地溶射皮膜２は大部
分が窒化チタンからなっており、純チタンは少量であ
る。図３は下地溶射皮膜２の組成を示すＸ線回折図であ
る。図３からわかるように、窒化チタンと純チタンの含
有割合は約５：１である。In the above-mentioned forming method, pure titanium reacts in the atmosphere when forming the undercoating 2 and almost all of it is converted into titanium nitride. For this reason, most of the thermal spray coating 2 is made of titanium nitride, and the amount of pure titanium is small. FIG. 3 is an X-ray diffraction diagram showing the composition of the thermal spray coating 2. As can be seen from FIG. 3, the content ratio of titanium nitride and pure titanium is about 5: 1.
【００１６】窒化チタン及び純チタンの熱膨張係数は、
アルミニウムとアルミナの間に位置している。このた
め、セラミック溶射皮膜３の基板１に対する密着性は、
下地溶射皮膜２を介することによって向上している。密
着強度は、具体的には５ｋｇ・ｆ／ｍｍ2であった。特
に、チタンはアルミニウムと反応するので、下地溶射皮
膜２の基板１に対する密着性は向上している。The thermal expansion coefficients of titanium nitride and pure titanium are
It is located between aluminum and alumina. Therefore, the adhesion of the ceramic sprayed coating 3 to the substrate 1 is
It is improved by interposing the thermal spray coating 2. The adhesion strength was specifically 5 kg · f / mm 2 . In particular, since titanium reacts with aluminum, the adhesion of the thermal spray coating 2 to the substrate 1 is improved.
【００１７】セラミック溶射皮膜３は、セラミックであ
るホワイトアルミナからなっているため、絶縁性を有し
ている。下地溶射皮膜２も、大部分がセラミックである
窒化チタンからなっているため、絶縁性を有している。
従って、複合皮膜４は、セラミック溶射皮膜３のみに基
づく絶縁性よりも高い絶縁性を有することとなる。即
ち、セラミック溶射皮膜３のみに基づく絶縁性は改善さ
れたこととなる。Since the ceramic sprayed coating 3 is made of white alumina which is a ceramic, it has an insulating property. The base thermal spray coating 2 also has an insulating property because most of it is made of titanium nitride, which is a ceramic.
Therefore, the composite coating 4 has a higher insulation than the insulation based on only the ceramic sprayed coating 3. That is, the insulating property based on only the ceramic sprayed coating 3 is improved.
【００１８】以下に、絶縁破壊試験の方法及びその結果
を示す。結果から、絶縁性が改善されていることがわか
る。絶縁破壊試験 ・種類：気中試験 試験方法：ＪＩＳ−Ｃ２１１０（段階破壊試験）に準
じる。 印加周波数：８００Ｈｚ（方形波） 平板−平板電極（φ２５） なお、従来例は、下地溶射皮膜２としてＮｉ・Ａｌ合金
を用いた。The method of the dielectric breakdown test and the results thereof are shown below. The results show that the insulation is improved. Dielectric breakdown test / Type: Air test Test method: According to JIS-C2110 (stepwise breakdown test). Applied frequency: 800Hz (square wave) Flat plate-flat plate electrode (φ25) In the conventional example, a Ni / Al alloy was used as the base thermal spray coating 2.
【００１９】また、絶縁性以外に、耐熱性、耐高温腐食
等の特性を改善することができる。In addition to the insulating property, it is possible to improve properties such as heat resistance and high temperature corrosion resistance.
【００２０】なお、下地溶射皮膜２及びセラミック溶射
皮膜３を形成する際の各プラズマ溶射の条件を表２又は
表３に示すようにしても、上記実施例と略同じ複合皮膜
４が得られた。Even if the plasma spraying conditions for forming the base sprayed coating 2 and the ceramic sprayed coating 3 are shown in Table 2 or Table 3, a composite coating 4 substantially the same as that of the above-mentioned embodiment was obtained. .
【００２１】[0021]
【表２】 [Table 2]
【００２２】[0022]
【表３】 [Table 3]
【００２３】また、基板１の金属としては、例えば、種
々の鉄鋼材料、銅、銅合金、チタン、チタン合金、ニッ
ケル基合金、コバルト基合金等を用いてもよく、セラミ
ック溶射皮膜３のセラミックとしては、例えば、ジルコ
ニア、チタニア、スピネル、イットリア等を用いてもよ
い。As the metal of the substrate 1, for example, various steel materials, copper, copper alloys, titanium, titanium alloys, nickel base alloys, cobalt base alloys, etc. may be used. For example, zirconia, titania, spinel, yttria or the like may be used.
【００２４】[0024]
【発明の効果】以上のように本発明の金属表面の複合皮
膜によれば、下地溶射皮膜２の大部分が窒化チタンから
なっているので、下地溶射皮膜２にセラミックとしての
性質を持たせることができる。従って、複合皮膜４の性
質を、セラミック溶射皮膜３のセラミックとしての性質
に、下地溶射皮膜２のセラミックとしての性質を作用さ
せてなるものにでき、セラミック溶射皮膜３のみに基づ
く性質を改善し又は改質することができる。例えば、複
合皮膜４に、セラミック溶射皮膜３のみによる絶縁性よ
り高い絶縁性を持たせることができ、更には、耐熱性、
耐高温腐食等の特性を改善することができる。As described above, according to the composite coating on the metal surface of the present invention, most of the base thermal spray coating 2 is made of titanium nitride, so that the base thermal spray coating 2 has a ceramic property. You can Therefore, the properties of the composite coating 4 can be obtained by allowing the properties of the ceramic sprayed coating 3 as a ceramic to act on the properties of the base sprayed coating 2 as a ceramic to improve the properties based only on the ceramic sprayed coating 3. It can be modified. For example, the composite coating 4 can be made to have an insulating property higher than that of the ceramic sprayed coating 3 alone, and further, heat resistance,
Properties such as high temperature corrosion resistance can be improved.
【００２５】また、本発明の金属表面の複合皮膜の形成
方法によれば、大部分が窒化チタンからなる下地溶射皮
膜２を容易且つ確実に形成できる。Further, according to the method for forming a composite coating on a metal surface of the present invention, the base thermal spray coating 2 which is mostly made of titanium nitride can be formed easily and reliably.
【図１】 本発明の方法により形成された複合皮膜を示
す断面図である。FIG. 1 is a cross-sectional view showing a composite coating formed by the method of the present invention.
【図２】 結晶の構造を示す図面に代わる写真であっ
て、図１の一部を拡大して示す。2 is a photograph replacing a drawing showing a structure of a crystal, which is an enlarged view of a part of FIG. 1. FIG.
【図３】 下地溶射皮膜の組成を示すＸ線回折図であ
る。FIG. 3 is an X-ray diffraction diagram showing the composition of a thermal sprayed coating.
１ 基板 ２ 下地溶射皮膜 ３ セラミック溶射皮膜 ４ 複合皮膜 1 Substrate 2 Base thermal spray coating 3 Ceramic spray coating 4 Composite coating
Claims (2)
地溶射皮膜上に形成されたセラミック溶射皮膜とからな
る複合皮膜において、下地溶射皮膜が窒化チタンを主成
分とすることを特徴とする金属表面の複合皮膜。1. A composite coating consisting of a thermal sprayed base coating formed on a metal surface and a ceramic thermal sprayed coating formed on the thermal sprayed base coating, wherein the thermal sprayed base coating contains titanium nitride as a main component. Composite film on the surface.
ック溶射皮膜を形成して、両溶射皮膜からなる複合皮膜
を形成する方法において、チタンを大気中で溶射して下
地溶射皮膜を形成することを特徴とする金属表面の複合
皮膜の形成方法。2. A method of forming a ceramic sprayed coating on a metal surface via a sprayed undercoating to form a composite coating consisting of both sprayed coatings, wherein titanium is sprayed in the atmosphere to form the sprayed undercoat. And a method for forming a composite coating on a metal surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5294327A JPH07126827A (en) | 1993-10-28 | 1993-10-28 | Composite film of metallic surface and its formation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5294327A JPH07126827A (en) | 1993-10-28 | 1993-10-28 | Composite film of metallic surface and its formation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07126827A true JPH07126827A (en) | 1995-05-16 |
Family
ID=17806270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5294327A Pending JPH07126827A (en) | 1993-10-28 | 1993-10-28 | Composite film of metallic surface and its formation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07126827A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6783863B2 (en) | 1999-12-10 | 2004-08-31 | Tocalo Co., Ltd. | Plasma processing container internal member and production method thereof |
| US7494723B2 (en) | 2005-07-29 | 2009-02-24 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
| US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
| JP2010031317A (en) * | 2008-07-28 | 2010-02-12 | Tosoh Corp | Component for vacuum apparatus, and manufacturing method thereof |
| US7767268B2 (en) | 2005-09-08 | 2010-08-03 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
| US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |
| US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
| US11008653B2 (en) | 2016-07-15 | 2021-05-18 | Applied Materials, Inc. | Multi-layer coating with diffusion barrier layer and erosion resistant layer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60100657A (en) * | 1983-11-08 | 1985-06-04 | Toshiba Corp | Surface treatment of metal |
-
1993
- 1993-10-28 JP JP5294327A patent/JPH07126827A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60100657A (en) * | 1983-11-08 | 1985-06-04 | Toshiba Corp | Surface treatment of metal |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6783863B2 (en) | 1999-12-10 | 2004-08-31 | Tocalo Co., Ltd. | Plasma processing container internal member and production method thereof |
| US6884516B2 (en) * | 1999-12-10 | 2005-04-26 | Tocalo Co., Ltd. | Internal member for plasma-treating vessel and method of producing the same |
| US7364798B2 (en) | 1999-12-10 | 2008-04-29 | Tocalo Co., Ltd. | Internal member for plasma-treating vessel and method of producing the same |
| US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
| US7494723B2 (en) | 2005-07-29 | 2009-02-24 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
| US7767268B2 (en) | 2005-09-08 | 2010-08-03 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
| US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
| US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |
| JP2010031317A (en) * | 2008-07-28 | 2010-02-12 | Tosoh Corp | Component for vacuum apparatus, and manufacturing method thereof |
| US11008653B2 (en) | 2016-07-15 | 2021-05-18 | Applied Materials, Inc. | Multi-layer coating with diffusion barrier layer and erosion resistant layer |
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