JPH0689905A - Thin film semiconductor device and its manufacture - Google Patents

Abstract

PURPOSE:To improve the crystallinity of a semiconductor film by irradiating the semiconductor film with pulsed laser light or similar strong light not by a thermally equilibrium process. CONSTITUTION:After a semiconductor film 103 is formed on an insulating substrate 101, a transparent protective film 104 is formed on the film 103. Then the surface of the film 103 is exposed by removing the film 104, and the exposed part of the film 103 is crystallized by irradiating the exposed part with pulsed laser light or the light of a halogen infrared lamp. After forming a gate insulating film 107 on the film 103, metallic wiring 122-124 is formed on the film 107 and ions are implanted at a high speed in a self-aligning way by using the wiring 122-124 as a mask. After implanting the ions, the film 107 is irradiated with pulsed laser light or the light of the halogen infrared lamp by using the wiring 122-124 as a mask. Therefore, a TFT excellent in characteristic and reliability can be manufactured at high yield.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an insulating gate type semiconductor device on an insulating substrate at a low temperature of 450.degree. Semiconductor device. The semiconductor device according to the present invention is used as a drive circuit such as an active matrix such as a liquid crystal display or an image sensor, or as a thin film transistor in an SOI integrated circuit or a conventional semiconductor integrated circuit (microprocessor, microcontroller, microcomputer, semiconductor memory, etc.). It is what is done.

[0002]

2. Description of the Related Art Recently, much research has been done on forming an insulating gate type semiconductor device (MOSFET) on an insulating substrate. Forming the semiconductor integrated circuit on the insulating substrate in this manner is advantageous for high-speed driving of the circuit. Because
This is because the speed of the conventional semiconductor integrated circuit is limited mainly by the capacitance (stray capacitance) between the wiring and the substrate, but such stray capacitance does not exist on the insulating substrate. A MOSFET having a thin film-like active layer formed on an insulating substrate in this manner is called a thin film transistor (TFT). Even in the conventional semiconductor integrated circuit, for example, SRA
A TFT is used as the M load transistor.

Further, recently, a product requiring the formation of a semiconductor integrated circuit on a transparent substrate has appeared. For example, it is a drive circuit for an optical device such as a liquid crystal display or an image sensor. A TFT is also used here. Since these circuits are required to be formed in a large area, it is required to lower the temperature of the TFT manufacturing process. Further, for example, in a device having a large number of terminals on an insulating substrate, even when it is necessary to connect the terminals to the semiconductor integrated circuit, in order to reduce the mounting density, the first stage of the semiconductor integrated circuit, Alternatively, it is considered that the semiconductor integrated circuit itself is monolithically formed on the same insulating substrate.

Conventionally, a TFT is provided with an amorphous, semi-amorphous, or microcrystalline semiconductor film 450.
It has been attempted to improve the crystallinity and improve the quality of the semiconductor film (that is, the mobility is sufficiently high) by annealing at a temperature of ℃ to 1200 ℃. Amorphous TFT using amorphous material for semiconductor film
However, mobility is 5 cm ² / Vs or less, usually 1 cm
Its use is greatly limited because it is as small as ² / Vs, the operating speed is low, and a P-channel TFT cannot be obtained. TFT with mobility of 5 cm ² / Vs or more
In order to obtain, it was necessary to anneal at the above temperature. Moreover, a P-channel TFT (PTFT) could be formed by such annealing.

[0005]

However, such thermal processes have severely constrained the substrate material. That is, in a so-called high temperature process (process with a maximum process temperature of 900 to 1200 ° C.), a high quality thermal oxide film can be used as a gate oxide film, but the substrate is expensive and has a large area like quartz, sapphire, or spinel. Only materials that are difficult to convert could be used.

On the other hand, in the low temperature process (the process in which the maximum process temperature is 450 to 750 ° C.), the range of selection of the substrate material is wider than that in the high temperature process, but long time annealing is required and the thermal factor is high. Distortion and shrinkage caused by the problem. The present invention has been made in view of the above problems, and has a maximum process temperature of 450 ° C. or less, and an object of the present invention is to overcome the problems of the substrate material and the problems of distortion and shrinkage as described above. .

[0007]

The present invention is characterized in that the crystallinity of a semiconductor film is improved not by a conventional thermal equilibrium process but by irradiation with pulsed laser light or intense light similar thereto. To do. As a result, the anneal to improve the crystallinity of the semiconductor coating no longer determines the maximum process temperature, but other factors (eg, hydrogenation anneal, gate oxide anneal, etc.) determine the maximum process temperature. As such, the breadth of substrate choice is significantly improved.

For example, soda glass or non-alkali glass (for example, Corning 7059 glass) has a low softening point, and it has heretofore been impossible to operate a TFT formed thereon by the present invention. The TFT can be operated by taking appropriate measures.

The process of the present invention comprises a step of forming a semiconductor film on an insulating substrate, a step of forming an insulating film transparent to a laser beam or similar strong light thereon, and a pulse on this laminated film. A step of irradiating laser light or strong light similar thereto to improve the crystallinity of the semiconductor film, a step of removing the insulating film and forming a gate insulating film on the surface of the semiconductor film, and a gate electrode. And a step of introducing the impurity element into the semiconductor film by a method such as ion implantation or ion doping in a self-aligning manner using this gate electrode as a main mask, and further irradiating with pulsed laser light or strong light similar thereto. And improving the crystallinity of the semiconductor film destroyed in the process of introducing the impurity element. Further, the latter two steps may be replaced by laser doping (for example, Japanese Patent Application No. 4-100479) filed by the present inventors. In the present invention, a low resistance metal material such as aluminum is preferable as a material for the gate electrode / wiring. Further, as the pulse laser used in the present invention, KrF, Ar
Ultraviolet lasers such as F, XeCl, XeF excimer lasers are preferred. Further, it is preferable that an insulating film made of a material selected from silicon nitride, aluminum oxide and aluminum nitride, or a laminated film of this insulating film and a silicon oxide film is provided on the insulating substrate and the semiconductor film. This silicon oxide film has a thickness of 300 to 3000Å, preferably 500 to 1500Å. The insulating film made of a material selected from silicon nitride, aluminum oxide and aluminum nitride is 300 to 3000 Å, preferably 1000 to 2
It is 000Å. Further, halogen infrared lamp light can be used as the strong light. Intense light (pulse light) equivalent to laser light means light energy or light energy for crystallization within a short time, generally 5 minutes or less, within a range where segregation of impurities is not sufficiently performed during crystallization. It means auxiliary energy of heat.

A feature of the present invention is that the protective layer provided when the crystallinity of the active layer is improved by irradiation with laser light or strong light similar thereto is removed, and the gate insulating film is replaced with another film. It means to use. By this step, various characteristics of the TFT could be remarkably improved. This is presumed as follows. That is, in the crystallization from such an amorphous state, the interface is not always clear, and a compound having a non-stoichiometric ratio is often formed at the interface. In this case, silicon oxide containing much silicon is likely to be formed near the interface. However, such a non-stoichiometric ratio of silicon oxide functions insufficiently both as an insulator and as a semiconductor. It is well known that the interface is important in the insulating gate type element, but sufficient characteristics cannot be obtained by leaving such a non-stoichiometric ratio of silicon oxide.

However, if irradiation with laser light or strong light similar thereto is carried out without any protective layer, the surface of the film will be highly uneven, and sufficient characteristics cannot be obtained. Removing the protective layer once provided as in the present invention also removes the above-mentioned non-stoichiometric ratio of silicon oxide, and as a result, it is possible to obtain purely good crystallinity. Silicon will appear at the interface. In particular, good results were obtained when wet etching was performed using hydrofluoric acid or the like to remove the protective layer. While dry etching damages the silicon film, wet etching does not cause such damage, and fluorine or hydrogen is generated before the dangling bond of the outermost silicon atom double bonds with another silicon atom. It is considered that the reason is that it ends up with and forms an extremely stable surface.

Further, in the present invention, the depth of a region having good crystallinity formed by annealing with laser light or strong light similar thereto is described in Japanese Patent Application No. 3-50793, which is the invention of the present inventors. As described above, the structure may be freely set / changed as necessary, and as a result, the active layer may have a two-layer structure to reduce the leak current between the source / drain. Further, in the present invention, when annealing with a laser or an infrared lamp,
Auxiliary heating at 0 to 500 ° C., typically 300 to 400 ° C., is preferable because the uniformity is improved.

A first application example of the present invention is a peripheral circuit of an active matrix (AM) type liquid crystal display device (LCD) using amorphous silicon (a-Si) TFTs. In the a-SiTFT-AMLCD, non-alkali glass (for example, Corning 7059) is used as a substrate, and the a-SiTFT is usually formed at a temperature of 400 ° C. or lower. However, the a-SiTFT has a high OFF resistance,
Although ideal as a switching element of an active matrix, the peripheral drive circuit uses a single crystal integrated circuit (IC) because the operation speed is slow and the CMOS cannot be formed as described above. The terminals of the matrix are connected to the terminals of the IC by a method such as TAB. However, such a mounting method becomes difficult as the size of the pixel becomes smaller, and the cost required for mounting becomes a large part of the module.

However, in the conventional process, it was difficult to form the peripheral circuit on the same substrate as the matrix because of a thermal problem. However, according to the present invention, it becomes possible to form a TFT having higher mobility at a temperature similar to that required for forming an a-Si TFT.

A second application example is to form a TFT on a material such as soda glass which is cheaper than alkali-free glass. In this case, if the TFT is formed in close contact with soda glass, mobile ions such as sodium contained in the glass will invade, so that silicon nitride or aluminum oxide or an insulating film containing aluminum nitride as a main component is formed on the glass. It is desired that the TFT is formed by applying the present invention after forming the underlayer and further forming the underlying insulating film with a material such as silicon oxide thereon. In order to further reduce defects, the matrix TFT should be NT
It is preferred to use PTFT rather than FT. This is because in the NTFT, when mobile ions enter from the substrate, a channel is formed and the TFT is always on, whereas in the PTFT, no channel is formed even when mobile ions enter.

A third application example is a peripheral circuit of a simple matrix LCD which performs static driving. For example, a ferroelectric liquid crystal material (FLC) has a memory property, and thus high contrast can be obtained even with a simple matrix, but conventionally, the peripheral circuit is a-SiTFT-AML.
Like the CD, the IC was connected by TAB or the like. Similarly, an LCD that performs static operation by utilizing the phase change between the cholesteric phase and the nematic phase of liquid crystal.
Also had a TAB connection to the peripheral circuits. In addition, an LCD that performs a static drive by combining a nematic liquid crystal and a ferroelectric polymer (see, for example, Japanese Patent Laid-Open No. 61
-1152) is also proposed, but the peripheral circuit is also T
It is assumed that an AB connection is made.

Since these LCDs are simple matrices, it is also characterized in that a large screen can be obtained by using an inexpensive substrate and at the same time, high definition can be obtained. In order to achieve high definition, it is necessary to reduce the pitch between terminals, but this causes a contradiction that IC mounting becomes difficult.
According to the present invention, peripheral circuits can be formed monolithically without worrying about thermal problems even with an inexpensive substrate.

As a fourth application example, a TFT is formed in a semiconductor integrated circuit after metal wiring is formed,
So-called three-dimensional ICs can be raised. Various other applications are possible.

[0019]

EXAMPLES Example 1 An example in which a peripheral circuit of an active matrix (AM) type LCD using a-SiTFT is formed by the present invention will be described. As described above, in the conventional s-Si TFT AMLCD, the peripheral circuits could not be integrally formed, so that the TAB connection was used. However, in the TAB method, the cost of the IC and the cost for the connection are enormous, and they account for 20% or more of the panel module. By monolithically forming this on the same glass substrate, the cost was reduced.

First, the substrate (Corning 7059, 300)
mm × 300 mm or 100 mm × 100 mm) 1
01 as a base oxide film 102 having a thickness of 100 to 300 n
m silicon oxide film was formed. As a method of forming this oxide film, a film obtained by decomposing and depositing TEOS by a plasma CVD method or a sputtering method in an oxygen atmosphere may be annealed at 450 to 650 ° C.

After that, the amorphous silicon film 103 is formed into a thickness of 30 to 1 by plasma CVD method or LPCVD method.
50 nm, preferably 50 to 100 nm is deposited, and further as a protective layer 104 by plasma CVD method.
A silicon oxide or silicon nitride film having a thickness of 20 to 100 nm, preferably 50 to 70 nm was formed. And FIG.
As shown in (A), the KrF excimer laser (wavelength 2
Irradiation with 48 nm and a pulse width of 20 nsec) was performed to improve the crystallinity of the silicon film 103. The energy density of the laser is 200 to 400 mJ / cm ² , preferably 25.
It was set to 0 to 300 mJ / cm ² . When the crystallinity of the silicon film 103 thus formed was examined by Raman scattering spectroscopy, the peak (521c) of single crystal silicon was obtained.
In contrast to m ⁻¹ ), a relatively broad peak was observed around 515 cm ⁻¹ . When laser irradiation, 100 ~
If the auxiliary heating is performed at 500 ° C., the uniformity of crystals is improved. Then, it was annealed in hydrogen at 350 ° C. for 2 hours.

Next, the protective layer 104 is removed to expose the silicon layer 103, and this is patterned into an island shape,
An NTFT region 105 and a PTFT region 106 were formed.
Further, the gate oxide film 107 was formed by a sputtering method in an oxygen atmosphere or a method in which a film obtained by decomposing and depositing TEOS by a plasma CVD method is annealed at 450 to 650 ° C. Especially when the latter method is adopted, due to the temperature of this process, the substrate may be distorted or shrunk, and it may be difficult to align the mask later.Therefore, be careful when handling a large area substrate. I have to. Although the substrate temperature can be set to 150 ° C. or lower by the sputtering method, it is desirable to anneal at about 450 ° C. in hydrogen in order to reduce dangling bonds in the film and reduce the influence of fixed charges.

Thereafter, an aluminum film having a thickness of 200 nm to 5 μm is formed by an electron beam evaporation method, and this is patterned to form a gate electrode 1 as shown in FIG. 1 (B).
08 and 109 were formed. At this time, the gate electrode 110 of the TFT (inverse stagger type) in the active matrix portion is also formed at the same time.

Further, as shown in FIG. 1C, the substrate was dipped in an electrolytic solution to pass a current through the gate electrode, and anodic oxide layers 111 to 113 were formed around it. At this time, Japanese Patent Application No. 4-3022, which is an invention of the present inventors,
0, 4-38637 and 4-54322, the anodic oxide film of the TFT in the peripheral circuit region (that is, the TFT on the left side of the drawing) is thinned to improve the mobility.
Further, it is desirable to adopt a configuration in which the anodic oxide film of the TFT in the active matrix portion (that is, the reverse stagger type TFT on the right side of the drawing) is thickened to prevent the gate leak. In each of the examples, the thickness of the anodic oxide film was 200.
˜250 nm.

After that, by ion doping, impurities were self-alignedly implanted into the island-shaped silicon film of each TFT by using the gate electrode portion (that is, the gate electrode and the anodic oxide film around it) as a mask. At this time, first, phosphine (PH ₃ ) is used as a doping gas to inject phosphorus over the entire surface, and then only island regions 105 in the figure are covered with a photoresist, and diborane (B ₂ H ₆ ) is used as a doping gas. Boron was implanted only in the island region 106. The dose is 2-8 × 10 ¹⁵ cm ^-2 for phosphorus and 4-10 × 1 for boron.
It was set to 0 ¹⁵ cm ^-2 and the dose amount of boron was set to exceed that of phosphorus.

Thereafter, as shown in FIG. 1D, a KrF excimer laser (wavelength 248 nm, pulse width 20 ns) was used.
By irradiating ec) and introducing the impurity region, the crystallinity of the portion where the crystallinity is deteriorated is improved. The energy density of the laser was 200 to 400 mJ / cm ² , preferably 250 to 300 mJ / cm ² . When this laser irradiation is performed, auxiliary heating to 100 to 500 ° C. improves crystal uniformity.

As a result, N-type regions 114 and 115 and P-type regions 116 and 117 were formed. The sheet resistance in these regions was 200 to 800 Ω / □. After that, a silicon oxide film having a thickness of 300 nm was formed as an interlayer insulator 118 over the entire surface by a sputtering method. This may be a silicon nitride film formed by the plasma CVD method. This film is merely an interlayer insulator in the peripheral circuit, but it becomes the gate insulating film of the TFT in the active matrix portion.
Care must be taken in its production.

After that, an amorphous silicon layer 119 having a thickness of 20 to 50 nm is formed on the gate electrode 110 of the active matrix portion, and further, a microcrystal silicon layer which becomes the source / drain of the a-Si TFT is formed by the plasma CVD method. (Thickness 50 to 100 nm)
Was formed and patterned to form source / drain 120 and 121.

After that, contact holes were formed in the source / drain of the TFT in the peripheral circuit portion, and aluminum wirings 122, 123 and 124 were formed. In this case, it is shown that an inverter circuit is formed by the NTFT and PTFT on the left side. Further, the pixel electrode 125 is formed of a transparent conductive material (ITO or the like) on the TFT of the active matrix portion. Finally, it was annealed in hydrogen at 350 ° C. for 2 hours to reduce dangling bonds in the silicon film. Through the above steps, the peripheral circuit and the active matrix circuit could be integrally formed. In this embodiment, an inverse stagger type TFT is used as the active matrix a-Si TFT. However, since the conductivity of a-Si is changed by light irradiation, light is prevented from entering the channel portion. This is because. It goes without saying that a normal planar type TFT may be used if sufficient measures are taken against external light.

FIG. 6 shows an example of the characteristics of the TFT of the peripheral drive circuit section manufactured in this embodiment. This has a thickness of 20 n on a silicon film with a thickness of 50 nm formed by the LPCVD method.
A protective layer of m was formed and crystallized by a KrF laser in vacuum. The energy density of the laser at this time was 250 mJ / cm ² , and 10 shots were irradiated.
Further, after removing the protective layer, a silicon oxide film having a thickness of 120 nm was formed by a sputtering method to form a gate oxide film. Then, after forming the gate electrode, an anodic oxide film having a thickness of 206 nm is formed by an anodic oxidation method. Using this as a mask, phosphorus ions are accelerated to 65 keV and boron ions are accelerated to 80 keV, and through implantation is performed. ,
Impurity regions are formed in a self-aligned manner, and further Kr in the atmosphere
F laser (energy density 300 mJ / cm ² , 10
(Shot) was irradiated and activated.

FIG. 6A shows NTFT, and FIG. 6B shows PT.
The characteristics of FT are shown respectively. The channel size of the TFT is 3.5 μm in length and 15 μm in width. The electric field mobility is 60 cm ² / Vs for NTFT and 30 for PTFT.
cm ² / Vs was reached. Further, the S value indicating the steepness of ON / OFF of the TFT is 0.42 V / digit for NTFT and PTF.
0.53 V / digit for T, 3.9 TFT for threshold voltage is NTFT
V and PTFT were -5.4V. Drain voltage 1
ON / OFF ratio when V or -1V is NT
The FT had 8.7 digits and the PTFT had 6.9 digits.

Example 2 An example in which an active matrix is formed on a soda glass substrate will be shown. As the substrate 201, a soda glass substrate (thickness 1.1 mm, 300 × 40
0 mm) was used. Since soda glass contains a large amount of sodium, a thickness of 5 to 50 nm is formed on the entire surface by plasma CVD so that this sodium does not diffuse into the TFT.
A silicon nitride film 202 having a thickness of preferably 5 to 20 nm was formed. As described above, a technique of coating a substrate with a film of silicon nitride or aluminum oxide and using this as a blocking layer is disclosed in Japanese Patent Application No. 3-2387, which is an application of the present inventors.
10 and 3-238714. The film 202 may also be aluminum nitride.

Then, after forming a base oxide film 203 (silicon oxide), a silicon film 204 (thickness: 30 to 150 nm, preferably 3) is formed by an LPCVD method or a plasma CVD method.
0 to 50 nm), and a protective layer 20 of silicon oxide is further formed.
5 was formed. Then, as shown in FIG.
The crystallinity of this silicon film 204 was improved by irradiating it with laser light. However, at this time, the energy density of the laser beam was set to 150 to 200 mJ / cm ^2, which was set to be slightly lower than that in Example 1, and the number of shots was 10 times. As a result, the crystallinity of the silicon film obtained at this time was closer to amorphous than that of Example 1. Actually, the electric field mobility of holes in the silicon film obtained in this state was 3 to 10 cm ² / Vs, which was smaller than that in Example 1.

Next, the protective layer was removed, the silicon film was patterned into island regions 206, and a gate oxide film 207 having a thickness of 50 to 300 nm, preferably 70 to 150 nm was formed by the sputtering method. Further, an aluminum gate electrode 208 was formed in the same manner as in Example 1, and the periphery thereof was covered with the anodic oxide 209. Figure 2
It shows in (B).

Thereafter, as a P-type impurity, boron is implanted into the silicon layer in a self-aligned manner by an ion doping method, and T
The source / drain 210 and 211 of FT are formed, and further, as shown in FIG. 2C, a KrF laser beam is irradiated on the source / drain 210, and the crystallinity of the silicon film whose crystallinity is deteriorated due to this ion doping is formed. Was improved. However, at this time, the energy density of the laser light is 250 to 30.
It was set as high as 0 mJ / cm ² . Therefore, this TF
Source / drain sheet resistance of T is 400-800Ω
/ □, which was equivalent to that of Example 1.

As described above, the electric field mobility of the active layer was small, which is convenient for use as an active matrix TFT. That is, the ON resistance is also high, but the OFF resistance is sufficiently higher than that, so that it is not necessary to provide an auxiliary capacitance as in the conventional case. In particular, mobile ions such as sodium caused a leak current in an N-channel type MOS, but since it is a P-channel type in this embodiment, there is no problem.

Further, in the present embodiment, the maximum process temperature is limited to 350 ° C. at the time of forming the silicon nitride film or the silicon oxide film, and the soda glass is softened at higher temperatures. When a process at such an extremely low temperature is required, a defect in the gate oxide film becomes a problem. In the case of Example 1, the heat resistance of the substrate was relatively good, so the gate oxide film could be annealed at a temperature of up to 450 ° C., but this is not possible with a soda glass substrate. As a result, many fixed charges are left in the gate oxide film.
The fixed charges in this case are mainly positive charges. Therefore, in the N-channel type MOS, the leakage between the source and the drain is large due to the influence of this fixed charge, and it cannot be actually used. However, in the P-channel type MOS, the fixed charge has an effect on the threshold voltage, but the characteristic of low leakage, which is indispensable for the operation of the active matrix, is protected. On the other hand, since the source / drain is annealed by the high energy laser, the sheet resistance is small and the signal delay is suppressed.

After that, the interlayer insulating film 2 is made of polyimide.
12 was formed, and further the pixel electrode 213 was made of ITO. Then, a contact hole is formed and T
Aluminum electrode 21 on the source / drain region of FT
4, 215 are formed, and one of the electrodes 215 is IT
I also tried to connect to O. Finally, 300 ℃ in hydrogen
Completed hydrogenation of silicon by annealing for 2 hours.

Four active matrices were formed on one substrate thus manufactured, and the four active matrix panels were taken out by dividing the active matrix. Since the peripheral circuit is not attached to the active matrix obtained in this embodiment, the peripheral circuit must be connected to a driving IC by a method such as TAB. However, the substrate is a
Since the soda glass is cheaper than the non-alkali glass substrate used in the -SiTFT-AMLCD, the cost is sufficiently profitable. In particular, the panel produced in this example was suitable for a large screen and high definition panel. Figure 11
A schematic diagram of the obtained active matrix is shown in FIG.
952 is an active matrix, and 951 is a peripheral circuit. The peripheral circuit 951 has a driver TFT and a shift register. Reference numeral 953 is an active matrix pixel, 956 is an active matrix TFT,
Reference numeral 954 is a liquid crystal layer, and 955 is a storage capacitor.

For example, since the mobility of the conventional a-Si TFT is about 0.5 to 1.0 cm ² / Vs, it cannot be used for a large-scale matrix having more than 1000 rows. However, in this embodiment, it is 3 more than a-Si.
Since the mobility is about 10 times higher, there is no problem, and it can sufficiently respond to analog gradation display. Further, since both the gate line and the data line are made of aluminum, the delay and the attenuation of the signal can be remarkably reduced especially on a large screen having a diagonal of more than 20 inches.

[Embodiment 3] In this embodiment, in a high-contrast LCD which utilizes the diode characteristic and the memory characteristic of the ferroelectric polymer, the peripheral circuit is integrally formed on the substrate to reduce the cost. An example is shown. An LCD having such a configuration is described in, for example, Japanese Patent Application No. 61-1152.

Since this LCD is capable of semi-static operation, display with very high contrast is possible even with a simple matrix using TN liquid crystal. Further, there are few problems in manufacturing such as the MIM type nonlinear element. This operating principle is shown in FIG.

As shown in FIG. 4A, a general ferroelectric substance has a hysteresis in E (electric field) -D (electric flux density) characteristics. That is, although a constant polarization is always generated in the ferroelectric until an external electric field of a certain magnitude is applied, the internal polarization is inverted when an electric field of a certain magnitude or more is applied. At this time, movement of electric charges, that is, electric current occurs in the electric circuit. For example, consider a circuit in which a capacitor (FE) sandwiching a ferroelectric substance and a capacitor (LC, capacitance C) sandwiching a material such as liquid crystal are connected in series. In reality, a ferroelectric capacitor often has a relatively large resistance R in parallel. Therefore, the actual circuit is as shown in FIG. Where F
It should be noted that E has not only a capacitor but also a nonlinear resistance component in parallel. And
When an alternating current is applied to such a circuit and the change in the current flowing into the circuit is examined, a nonlinear characteristic having hysteresis is obtained as shown in FIG. 4B.

If the potential of the counter electrode is -V ₀ or 0 on the one hand and 0 or + V ₀ on the other hand, the voltage applied to the cell is
It is either ± 2V ₀ , ± V ₀ , or 0. If the voltage becomes any of ± 2V ₀ , the resistance of the FE is remarkably reduced during the transition to that voltage, and sufficient charge is supplied to the LC, as shown in FIG. 4B. Becomes Then, even if the state transits to ± V ₀ or 0, FE
Resistance does not decrease so much, and in the end, only the leakage current from the parallel resistance R becomes a problem during this period. The charge of LC is lost by this leak current. That is, ± 2V ₀
Is a selected state, and the other states are non-selected states.

The straight line passing through the origin indicated by the dotted chain line in FIG. 4B is the current leakage due to R, and in reality, this R
The relationship between C and C is important for use as an LCD.
Although detailed discussion is omitted, the time constant τ of this pixel τ = RC
However, if it is extremely shorter than the period of one frame, the contribution of FE is small, that is, the contrast is lowered. On the other hand, τ
Is extremely longer than the cycle of one frame, an afterimage occurs when rewriting an image, which makes it very difficult to see. Therefore, τ should be as close as possible to the period of one frame.

An outline of the cell is shown in FIG. Like a normal LCD, it has a structure in which a liquid crystal material 512 is sandwiched between two substrates 501 and 502. A spacer 511 is interposed to make the cell thickness uniform. The liquid crystal material is TN liquid crystal, STN liquid crystal, non-twist mode nematic liquid crystal or ferroelectric liquid crystal using birefringence, and dispersion type liquid crystal (PDLC) in which liquid crystal such as nematic or cholesteric is dispersed in a polymer. Various things can be used.

ITO as in a general simple matrix
Striped electrodes 505 formed of transparent electrodes such as
And 506 are arranged so as to be orthogonal to each other, but different from the ordinary simple matrix is that a transparent conductive film such as an island-shaped ITO film is formed on one electrode 506 with a ferroelectric polymer 507 sandwiched therebetween. There is. Alignment films 509 and 510 are formed so as to cover these electrodes. Detail is,
It is described in Japanese Patent Application No. 61-1152.

In such an LCD, driving was performed by the TAB connection of the IC as in the conventional case, but this was limited in some points. First, in such a type of LCD, the voltage applied to the liquid crystal is either 1 or 0, and in order to achieve the high contrast which is a characteristic of this type, this voltage is almost 1 frame. It will be applied during. Therefore, if gradation display is to be performed, it is difficult to perform analog gradation display as is done with a TFT LCD, and the pulse modulation method and frame modulation method as done with an STN LCD cannot be adopted. As a result, the area gray scale is relied upon, and thus the number of pixels is greatly increased.

As such, it is not an essential difficulty in this LCD. Because this type of LCD has a simple structure, it is rather good at a large capacity matrix. However, in reality, the connection terminal density is 20 /
When the thickness becomes mm, the TAB method can no longer be used, and the COG (chip on glass) method is difficult to manufacture. Therefore, it has been required to form a peripheral drive circuit monolithically on the same substrate.

For example, in order to achieve an area gradation of 64 gradations, one pixel requires 6 sub-pixels, and the number of rows is required to be 2 to 3 times that of a normal matrix. Therefore, X
In the case of a high definition screen such as GA standard, the number of lines reaches 1500 to 3000 lines when this method is adopted, so 10 to 15 lines / mm are necessary even for a large screen with a diagonal size of 15 inches. If the screen becomes smaller, higher density packaging is required. In particular, when a projection type display is constructed using the LCD of this system and PDLC which is a high transmittance liquid crystal, the substrate size is 5 inches or less diagonally.

At this time, not only high density mounting but also high speed operation of the IC is required. In this case, the circuit on the insulating substrate has less loss than the circuit on the single crystal semiconductor substrate, and high-speed operation is possible. However, in this case, as in Example 2, if the electric field mobility is 10 cm ² / Vs or less, there is a problem in use, so the mobility is 30 cm ²
/ Vs or more, preferably 50 cm ² / Vs or more.

Therefore, a low temperature process by the laser annealing of the present invention or annealing by intense light similar to laser light is desired. The peripheral circuit manufacturing process described in FIG. 3 will be described below. As the substrate 301, Corning 7059 or an alkali-free glass substrate equivalent thereto was used. Substrate size is 300mm x 400mm
Met. A base oxide film (silicon oxide) 302 was formed thereon, a silicon layer 303 and a protective layer 304 were further formed, and laser irradiation was performed under the same conditions as in Example 1 as shown in FIG.

After that, the silicon layer was patterned into an island shape to form an NTFT region 305 and a PTFT region 306, and further a gate oxide film (silicon oxide) 307 was formed. Then, aluminum gate electrodes 308 and 309 were formed as shown in FIG. At this time, since aluminum needs to withstand laser irradiation later, aluminum formed by electron beam evaporation with high reflectance was used. The aluminum formed by the sputtering method had a grain size of about 1 μm and had a very rough surface, so that it was significantly damaged by laser irradiation. The surface of the aluminum film formed by electron beam evaporation was so flat that the presence of grains could not be confirmed by an optical microscope.
As a result of observation with an electron microscope, the grain size is 200.
It was less than or equal to nm. That is, the particle size must be smaller than the wavelength of the laser used.

Next, an N-type impurity (phosphorus) is introduced into the regions 310 and 311 and a P-type impurity (boron) is introduced into the regions 312 and 313 by the ion doping method, and laser annealing is performed as shown in FIG. 3C. It was The conditions of laser irradiation were the same as in Examples 1 and 2. The aluminum gate electrode was hardly damaged by this laser irradiation.

Finally, as shown in FIG. 3D, an interlayer insulator (silicon oxide) 314 is formed, a contact hole is formed in this, and aluminum wirings 315 to 317 form T.
The connection between FT was made. In this way, the peripheral circuit was formed. Although not shown in the figure, after that, a stripe-shaped ITO film is formed to form a pixel electrode and the substrate is formed into
Divided into two pieces and the size of one piece is 150 mm x 200 mm
Take out 4 of the above substrates, and for the 2 more substrates,
Ferroelectric polymer and the like were formed by the method described in 1-1152. Then, two substrates as shown in FIG. 5 were stuck together to complete the LCD.

Fourth Embodiment FIG. 7 shows this embodiment. In the present embodiment, the laser crystallized silicon TFT of the present invention is used in the peripheral circuit of the TFT type liquid crystal display device, but unlike the first embodiment, the TFT in the active matrix region is a top gate type (gate is Amorphous silicon (in the opposite direction to the substrate) is used. In this case, the active layers of both TFTs can be manufactured by the same process, but both the characteristics of laser crystallization and the characteristics as amorphous silicon are required to be excellent,
The conditions become a little strict.

First, a base oxide film 702 having a thickness of 20 to 20 is formed on a Corning 7059 substrate 701 by a sputtering method.
200 nm was deposited. Furthermore, by plasma CVD method using monosilane or disilane as a raw material,
An amorphous silicon film was deposited with a thickness of 50 to 150 nm. At this time, the amorphous silicon film is required to function as it is as an a-Si TFT, and at the same time, it is required to endure laser irradiation. According to the knowledge of the inventors of the present invention, when the substrate temperature is set to 300 to 400 ° C. when forming the amorphous silicon film, the amorphous silicon film having excellent characteristics can be obtained. A protective silicon oxide film (thickness: 10 to 50 nm) 705 was formed again on the amorphous silicon film by the sputtering method. afterwards,
The active matrix region was covered with a photoresist 706 or the like to irradiate only peripheral circuits with laser light.

In this state, laser irradiation was performed as shown in FIG. The type and conditions of the laser used were the same as in Example 1. However, the energy density of the laser at this time was more preferably 200 to 250 mJ / cm ² . This is because the amorphous silicon film formed by the plasma CVD method contains excessive hydrogen, and when irradiated with a strong laser beam, hydrogen is gasified and expanded, and the film is destroyed. Is. In this way, the silicon film was crystallized to form a crystallized region 704. On the other hand, since the laser light did not reach the portion covered with the photoresist, it remained amorphous silicon.

Thereafter, these Si films are patterned into islands, and, for example, as shown in FIG. 7B, the islands 707 of the peripheral circuit and the islands 70 of the active matrix region are formed.
8 was formed. Further, a silicon oxide film was formed by a sputtering method so as to cover these island regions, and this was used as a gate insulating film 709. Then, as in the first embodiment, the metal gate electrodes 710, 711, 71 covered with the anodic oxide film are formed.
Formed 2.

Next, as shown in FIG. 7C, N-type impurities are added to the regions 713 and 715, and P-type impurities are added to the region 714.
Then, the region where the impurities were injected was crystallized. The conditions are those of Example 1.
Same as In this case, the areas 716 and 717 are
Has already crystallized at the stage of FIG.
18 does not crystallize even in this step. That is, the TFT at the right end of FIG. 7 (TFT in the active matrix region)
Is an a-Si TFT in which the source / drain is crystallized but the active layer is in an amorphous state.

Finally, a silicon oxide film (having a thickness of 400 to 10) is formed as an interlayer insulator by the plasma CVD method of TEOS.
00 nm) 719 is deposited, and an ITO film 720 having a thickness of 100 to 300 nm is further formed in the active matrix region.
It was formed and patterned to form a pixel electrode, and a contact hole was formed in the interlayer insulator, and metal wirings 721 to 724 were formed thereon. by this,
A TFT active matrix type liquid crystal display device was produced. In this liquid crystal display device, the active region of the thin film transistor in the active matrix circuit has lower crystallinity than the active region of the thin film transistor in the peripheral circuit. The active region of the thin film transistor in the active matrix circuit is a film of substantially amorphous silicon having a resistivity in the dark of 10 ⁹ Ω · cm or more.

In the method shown in this embodiment, the a-Si TFT having a high OFF resistance is used for the TFT of the pixel as in the case of the first embodiment, whereas the one of the first embodiment is the reverse stagger type. In this embodiment, the top gate type is used. Further, in Example 1, the steps of manufacturing the peripheral circuit TFT and the active matrix TFT were different from the steps other than the gate electrode manufacturing step, so the number of steps increased, but in the present Example, the peripheral circuit TFT Since the active matrix TFTs are manufactured in parallel, the number of steps can be reduced.

However, while a Si film suitable for an a-Si TFT is desired to contain a large amount of hydrogen, it is desired that the hydrogen content be as small as possible for crystallization by laser. Since the characteristics are thus contradictory, it is a problem that the Si film must be formed so as to satisfy both conditions as much as possible. For example, even in the plasma CVD method, Si produced by using high energy plasma such as ECR plasma or microwave plasma
Since the film contains many crystallized clusters, it is ideal for the purpose of this example, but the problem is that the OFF resistance is rather low.

[Embodiment 5] This embodiment is shown in FIG. In Examples 1 to 4, the TFT regions were isolated from each other by being divided. On the other hand, in the present embodiment, the TF is formed by forming a silicon layer on one surface, selectively crystallizing the silicon layer, and using a thick insulating film.
It is to separate T.

First, an amorphous silicon film having a thickness of 50 to 150 nm or a silicon film having a crystallinity substantially the same as that of the underlying silicon oxide film 802 was deposited on the insulating substrate 801. In this embodiment, the amorphous silicon film is required to have sufficient laser resistance and high resistance.
The manufacturing conditions of the amorphous silicon film were the same as in Example 4. After that, a silicon oxide film having a thickness of 10 to 500 nm, preferably 10 to 50 nm is formed on the entire surface by a plasma CVD method, and a part of the silicon oxide film is etched,
A thick region 805 and a thin region 806 of the silicon oxide film were formed. At this time, by using an isometric etching method, the step was gentle as shown in FIG. 8A, and it was possible to prevent disconnection of the wiring due to the step.

Boron was lightly doped in such a state, and crystallization was performed by laser irradiation. As a result, as shown in FIG. 8A, the amorphous silicon layer was partly crystallized to become a region 804, and the other regions 803 remained amorphous silicon. The region 804 is substantially intrinsic or weak p-type due to boron doping.

This step may be performed by the method as shown in FIG. That is, after forming a silicon oxide layer, a film having a thickness of 20 to 500 nm is formed on the silicon oxide layer with a material such as aluminum, titanium, or chromium that reflects laser light or a material that does not transmit laser light, and is patterned. Then, the silicon oxide layer is isotropically etched using the coating 819 as a mask to form a thick region 817 and a thin region 818 in the silicon oxide layer. After that, laser irradiation is performed with the mask 819 left to selectively crystallize the amorphous silicon layer to form a crystallized region 816 and an amorphous silicon region 815.

Next, as shown in FIG. 8B, a gate oxide film (silicon oxide) 807 was formed and a metal gate electrode 808 having anodic oxide was formed. At this time, since the wet etching method was adopted for etching the metal gate, the side surface of the gate electrode was tapered. Such a shape was effective in preventing disconnection at the intersection of the wiring.

Further, as shown in FIG. 8C, an N-type region 809 and a P-type region 810 are formed by an ion doping method.
Was formed and activated by irradiation with laser light.
After that, as shown in FIG. 8D, an interlayer insulator 811 is deposited, a contact hole is formed in this, and the metal wiring 8 is formed.
The circuit was completed by forming 12-814. In this embodiment, since a large amount of opaque amorphous silicon remains on the substrate, it cannot be used, for example, in the active matrix area of an LCD, but can be used in the peripheral circuit area or the drive circuit of an image sensor. In the present embodiment, in a circuit that requires a relatively thick active layer (100 nm or more), the step difference for isolation between elements is small, and therefore disconnection of wiring can be significantly reduced. The effect is remarkable especially in high-density integrated circuits.

Sixth Embodiment FIG. 9 shows this embodiment. In this embodiment, as in the case of the fifth embodiment, a silicon layer is formed on one surface, and this is selectively crystallized to separate the TFTs. However, in order not to use the uneven oxide film used in Example 5,
It is possible to prevent disconnection of the wiring.

First, an amorphous silicon film having a thickness of 50 to 150 nm or a silicon film having substantially the same low crystallinity as the underlying silicon oxide film 902 (hereinafter referred to as an amorphous silicon film) is formed on the insulating substrate 901. Deposited. Also in this embodiment, the amorphous silicon film is required to have sufficient laser resistance and high resistance. Therefore, the manufacturing conditions of the amorphous silicon film are the same as those in the fourth embodiment. Furthermore, a thickness of 20 to 10 is formed on the surface of the amorphous silicon film.
A 0 nm protective silicon oxide layer 905 was deposited. The silicon oxide layer 905 may be left as it is and used as a gate insulating film of a TFT later, but it should be noted that the mobility of such a TFT is low as described above. After that, a film having a thickness of 20 to 500 nm was formed using a material that reflects laser light such as aluminum, titanium, or chromium, or a material that does not transmit laser light, and this was patterned. Then, as shown in FIG.
Laser irradiation is performed using the coating 906 as a mask to selectively crystallize the amorphous silicon layer, and the crystallized region 904 and the amorphous silicon region 9 are
03 was formed.

Next, as shown in FIG. 9B, metal gate electrodes 907 and 908 having anodic oxide were formed on the newly formed gate insulating film. At this time, since the wet etching method was adopted for etching the metal gate, the side surface of the gate electrode was tapered. Such a shape was effective in preventing disconnection at the intersection of the wiring. Further, a photoresist 909 was applied and patterned to expose only the N-channel TFT portion.

Further, with the photoresist as a mask, N
A type impurity was injected, and then laser light was irradiated in that state to activate the region 912 into which the N type impurity was injected. At this time, if the photoresist is not left in the region other than the region into which the impurities are injected, the amorphous silicon is crystallized, and a relatively thick oxide film cannot be used for element isolation as in this embodiment. In a situation, it causes a leak between elements, which is not preferable.

Similarly, regarding the P-channel type TFT,
Photoresist 910 is applied to form a P-channel TFT
A P-type impurity was implanted to form a P-type impurity region 913 so that only the above portion was exposed. Further, as shown in FIG. 9 (C), laser light was irradiated with the photoresist left to activate the region 913 in which the P-type impurity was previously implanted. In the above steps, for example, the region 914 between the N-type impurity region 912 and the P-type impurity region 912 is not irradiated with laser light, and thus remains amorphous silicon. Therefore,
Even if a wiring is formed on the insulating film 905 (which is also a gate insulating film) existing thereabove, this wiring causes
Even if the inversion layer is formed, the electric field mobility of the amorphous silicon is very small and the resistance is very large, so that the leakage current is very small, which is not a practical problem.

After that, as shown in FIG. 9D, an interlayer insulator 915 is deposited, contact holes are formed in the interlayer insulator 915, and metal wirings 916 to 918 are formed.
I have completed the circuit. In this example, as in Example 5, a large amount of opaque amorphous silicon remains on the substrate,
For example, although it cannot be used in the active matrix area of the LCD, it can be used in the peripheral circuit area and the drive circuit of the image sensor. In the present embodiment, unlike the fifth embodiment, there is almost no step difference in the gate electrode, and therefore it is possible to remarkably reduce the disconnection of the wiring. The effect is remarkable especially in high-density integrated circuits.

FIG. 9E shows a TFT manufactured in this example.
9 is another cross section of the circuit, which is a cross section taken along the dotted line AB of the N-channel TFT of FIG. As can be seen from the figure, since the crystallized impurity regions 912 and 913 'and the element isolation region 914 between them are on the same plane, the gate electrode 917 is flat. Further, the wiring 917 ′ that contacts the impurity region 913 ′ and the gate electrode 907 has only the step difference in the contact hole portion and the step difference in the interlayer insulating film portion, and the step difference in the island-shaped semiconductor region as in the first embodiment. Since there is no step in the thick insulating film for element isolation as in Example 5 and Example 5, it is advantageous in manufacturing a higher density integrated circuit with high yield.

Example 7 An example in which an active matrix is formed on a soda glass substrate will be shown. As the substrate 201, a soda glass substrate (thickness 1.1 mm, 300 ×
400 mm) was used. SiO ₂ film 2 on substrate 201
16 was formed (FIG. 10 (A)). After that, a film 202 made of AlN, SiN or Al ₂ O _{3 is formed on} the entire surface of the substrate.
Was formed (FIG. 10 (A)). After that, the same steps as in Example 2 were performed to complete the active matrix.
That is, after forming the base oxide film 203 (silicon oxide), L
The silicon film 20 is formed by the PCVD method or the plasma CVD method.
4 (thickness 30 to 150 nm, preferably 30 to 50 n
m) was formed, and a protective layer 205 of silicon oxide was further formed.

Then, as shown in FIG.
The crystallinity of this silicon film 204 was improved by irradiating it with laser light. However, at this time, the energy density of the laser beam was set to 150 to 200 mJ / cm ^2, which was set to be slightly lower than that in Example 1, and the number of shots was 10 times. As a result, the crystallinity of the silicon film obtained at this time was closer to amorphous than that of Example 1. Actually, the electric field mobility of holes in the silicon film obtained in this state was 3 to 10 cm ² / Vs, which was smaller than that in Example 1.

Next, the protective layer was removed, the silicon film was patterned into island regions 206, and a gate oxide film 207 having a thickness of 50 to 300 nm, preferably 70 to 150 nm was formed by the sputtering method. Further, an aluminum gate electrode 208 was formed in the same manner as in Example 1, and the periphery thereof was covered with the anodic oxide 209. This situation is shown in Figure 1.
It is shown in 0 (B).

Thereafter, as a P-type impurity, boron is implanted into the silicon layer in a self-aligned manner by an ion doping method, and T
Source / drain 210 and 211 of FT are formed, and further, as shown in FIG. 10C, KrF laser light is irradiated onto the source / drain 210, and the crystallinity of the silicon film whose crystallinity is deteriorated due to this ion doping. Was improved. But,
At this time, the energy density of the laser light is 250 to 3
It was set to a high value of 00 mJ / cm ² . Therefore, this T
FT source / drain sheet resistance is 400-800
Ω / □ was equivalent to that of Example 1.

As described above, the electric field mobility of the active layer was small, which is convenient for use as an active matrix TFT. That is, the ON resistance is also high, but the OFF resistance is sufficiently higher than that, so that it is not necessary to provide an auxiliary capacitance as in the conventional case. In particular, mobile ions such as sodium caused a leak current in an N-channel type MOS, but since it is a P-channel type in this embodiment, there is no problem.

Further, in the present embodiment, the maximum process temperature is limited to 350 ° C. at the time of forming the silicon nitride film or the silicon oxide film, and the soda glass is softened at higher temperatures. When a process at such an extremely low temperature is required, a defect in the gate oxide film becomes a problem. In the case of Example 1, the heat resistance of the substrate was relatively good, so the gate oxide film could be annealed at a temperature of up to 450 ° C., but this is not possible with a soda glass substrate. As a result, many fixed charges are left in the gate oxide film.
The fixed charges in this case are mainly positive charges. Therefore, in the N-channel type MOS, the leakage between the source and the drain is large due to the influence of this fixed charge, and it cannot be actually used. However, in the P-channel type MOS, the fixed charge has an effect on the threshold voltage, but the characteristic of low leakage, which is indispensable for the operation of the active matrix, is protected. On the other hand, since the source / drain is annealed by the high energy laser, the sheet resistance is small and the signal delay is suppressed.

After that, the interlayer insulating film 2 is made of polyimide.
12 was formed, and further the pixel electrode 213 was made of ITO. Then, a contact hole is formed and T
Aluminum electrode 21 on the source / drain region of FT
4, 215 are formed, and one of the electrodes 215 is IT
I also tried to connect to O. Finally, 300 ℃ in hydrogen
Completed hydrogenation of silicon by annealing for 2 hours.

Four active matrices were formed on one substrate thus manufactured, and the four active matrix panels were taken out by dividing the active matrix. Since the peripheral circuit is not attached to the active matrix obtained in this embodiment, the peripheral circuit must be connected to a driving IC by a method such as TAB. However, the substrate is a
Since the soda glass is cheaper than the non-alkali glass substrate used in the -SiTFT-AMLCD, the cost is sufficiently profitable. In particular, the panel produced in this example was suitable for a large screen and high definition panel. Figure 11
A schematic diagram of the obtained active matrix is shown in FIG.
952 is an active matrix, and 951 is a peripheral circuit. The peripheral circuit 951 has a driver TFT and a shift register. Reference numeral 953 is an active matrix pixel, 956 is an active matrix TFT,
Reference numeral 954 is a liquid crystal layer, and 955 is a storage capacitor.

For example, since the mobility of the conventional a-Si TFT is about 0.5 to 1.0 cm ² / Vs, it cannot be used for a large-scale matrix having more than 1000 rows. However, in this embodiment, it is 3 more than a-Si.
Since the mobility is about 10 times higher, there is no problem, and it can sufficiently respond to analog gradation display. Further, since both the gate line and the data line are made of aluminum, the delay and the attenuation of the signal can be remarkably reduced especially on a large screen having a diagonal of more than 20 inches.

[0086]

According to the present invention, a TFT can be manufactured at a low temperature with a very high yield. Then, as shown in the embodiments, various LCDs can be formed by utilizing the present invention. This is because in the present invention, the characteristics required by the TFT can be set freely. Although not shown in the examples, the present invention is not limited to single crystal ICs and other ICs.
It may be used to form a so-called three-dimensional IC in which semiconductor circuits are further stacked on the above.

[Brief description of drawings]

FIG. 1 shows a method for manufacturing a TFT according to the present invention.

FIG. 2 shows a method for manufacturing a TFT according to the present invention.

FIG. 3 shows a method for manufacturing a TFT according to the present invention.

FIG. 4 shows the operation principle of the LCD in the embodiment.

FIG. 5 shows a cell structure of an LCD in an example.

FIG. 6 shows characteristics of the TFT in the example.

FIG. 7 shows a method for manufacturing a TFT according to the present invention.

FIG. 8 shows a method for manufacturing a TFT according to the present invention.

FIG. 9 shows a method for manufacturing a TFT according to the present invention.

FIG. 10 shows a method for manufacturing a TFT according to the present invention.

FIG. 11 shows an active matrix and peripheral circuits according to the present invention.

[Explanation of symbols]

101 Insulating Substrate 102 Base Oxide Film 103 Semiconductor Region 104 Protective Insulating Film 105 Island Semiconductor Region (for NTFT) 106 Island Semiconductor Region (for PTFT) 107 Gate Insulating Film 108 Gate Electrode (for NTFT) 109 Gate Electrode (for PTFT) 110 Gate electrode (active matrix a
-For Si TFT) 111-113 Anodized film 114, 115 N-type impurity region 116, 117 P-type impurity region 118 Interlayer insulator 119 a-Si layer (active layer) 120, 121 N-type microcrystal region 122-124 Metal wiring 125 pixel electrodes (ITO)

Claims (21)

[Claims] 1. A step of forming a semiconductor film on an insulating substrate, a step of forming a transparent protective film on the semiconductor film, a step of removing the protective film to expose the surface of the semiconductor film, Crystallizing the semiconductor film by irradiating pulsed laser light or strong light similar thereto, forming an insulating film functioning as a gate insulating film on the semiconductor film, and metal element on the insulating film. Of the first wiring as a main component, a step of irradiating fast ions in a self-aligned manner using the first wiring as a main mask, and a step of using the first wiring as a main mask after the ion irradiation. And a step of irradiating pulsed laser light or intense light equivalent thereto, to a method for manufacturing a thin film semiconductor device. 2. A thin-film semiconductor device according to claim 1, wherein an insulating film mainly containing silicon nitride, aluminum oxide or aluminum nitride is formed between the insulating substrate and the semiconductor film. Manufacturing method. 3. The insulating substrate according to claim 1, wherein the insulating substrate is soda glass, non-alkali glass, or Corning 7059.
A method for manufacturing a thin film semiconductor device, which is glass. 4. The method for manufacturing a thin film semiconductor device according to claim 1, further comprising the step of forming an anodized film by energizing the first wiring in an electrolytic solution. 5. The multilayer structure of claim 1, wherein an insulating film made of a material selected from silicon nitride, aluminum oxide and aluminum nitride and a silicon oxide film are formed between the insulating substrate and the semiconductor film. A method for manufacturing a thin film semiconductor device, comprising: 6. The method for manufacturing a thin film semiconductor device according to claim 5, wherein the insulating coating film made of a material selected from silicon nitride, aluminum oxide and aluminum nitride has a thickness of 300 to 3000 Å. 7. The silicon oxide film according to claim 5, wherein the silicon oxide film is 3
A method for manufacturing a thin film semiconductor device, which has a thickness of 00 to 3000Å. 8. The method for manufacturing a thin film semiconductor device according to claim 1, wherein the strong light is halogen infrared lamp light. 9. An active matrix circuit having a plurality of thin film transistors formed on an insulating substrate and having a metal material containing aluminum as a main component as a gate electrode / wiring, wherein an active region of the thin film transistor in the active matrix portion is a pulse laser. Thin film characterized by being irradiated with light or strong light similar thereto for crystallization, and having source / drain regions of P-type conductivity type, and being irradiated with pulsed laser light after introduction of P-type impurities. Semiconductor device 10. The thin-film semiconductor device according to claim 9, wherein the insulating substrate is soda glass or non-alkali glass coated with a film having at least a layer made of silicon nitride, aluminum oxide, or aluminum nitride. 11. The thin film semiconductor device according to claim 9, wherein the strong light is halogen infrared lamp light. 12. A device having an active matrix circuit having a plurality of thin film transistors formed on an insulating substrate and having a metal material containing aluminum as a main component as a gate electrode / wiring and a peripheral drive circuit, wherein: The active region of the thin film transistor is crystalline silicon irradiated with pulsed laser light or strong light equivalent thereto, and the active region of the thin film transistor in the active matrix circuit is amorphous or has low crystallinity equivalent thereto or low as compared with peripheral circuits. A thin film semiconductor device having a degree of crystallinity. 13. A process for forming an amorphous or a silicon film having low crystallinity equivalent thereto on an insulating substrate, and selectively irradiating the silicon film with a laser beam or strong light similar thereto, thereby forming the silicon film. A silicon film having high crystallinity, in which a step of increasing the crystallinity of a part of the film, a step of forming a gate electrode containing aluminum as a main component, and a laser beam or strong light similar thereto is applied using the gate electrode as a mask A method for manufacturing a thin film semiconductor device, characterized in that an amorphous silicon TFT and a crystalline silicon TFT are simultaneously obtained on one substrate by performing the step of obtaining. 14. The method for manufacturing a thin film semiconductor device according to claim 13, wherein the strong light is halogen infrared lamp light. 15. An active layer under a gate electrode obtained by irradiating a pulsed laser beam or pulsed light equivalent thereto, which is formed on an insulating substrate with a metal material containing aluminum as a main component, as a gate electrode, and the active layer. A circuit having at least two thin film transistors having adjacent impurity regions, wherein the thin film transistors are separated by an amorphous silicon semiconductor having a low crystallinity equivalent thereto. 16. The thin-film semiconductor device according to claim 15, wherein the similar pulsed light is halogen infrared lamp light. 17. A process of forming an amorphous or a silicon film having low crystallinity equivalent thereto on an insulating substrate, and selectively irradiating the silicon film with a laser beam or a strong light similar thereto, thereby forming the silicon film. A step of increasing the crystallinity of a part of the film, a step of forming a gate electrode containing aluminum as a main component, and selectively using the gate electrode and the patterned mask material as a mask, one of N type and P type, Alternatively, it has a step of implanting both impurities, and a step of irradiating only a region substantially the same as the region into which the impurity is implanted with laser light or strong light similar thereto to obtain a silicon film with high crystallinity. A method for manufacturing a thin film semiconductor device, comprising: 18. The method for manufacturing a thin film semiconductor device according to claim 17, wherein the intense light is infrared lamp light. 19. The substrate according to claim 18, wherein the substrate is irradiated with the laser light or the intense light at 100 to 5 times.
A method for manufacturing a thin film semiconductor device, which comprises heating to 00 ° C. 20. A step of forming an amorphous or low-crystallinity silicon film on the insulating substrate, and a step of forming a thick insulating film on the silicon film.
The insulating film is selectively etched to remove the insulating film, or. Forming a thin region of the insulating film, and irradiating laser light or intense light similar thereto to increase crystallinity of the silicon film below the removed or thin region of the insulating film. ,
A step of forming a gate electrode containing aluminum as a main component; a step of selectively implanting one or both of N-type and / or P-type impurities using the gate electrode and the thick insulating film as a mask; And a step of activating the region into which the impurity is injected by irradiating the same strong light as that described above, and a method of manufacturing a thin film semiconductor device. 21. The method of manufacturing a thin film semiconductor device according to claim 20, wherein the strong light is halogen infrared lamp light.