JPH0659794U - Drying device in single-wafer cleaning device with variable feed width mechanism - Google Patents

Abstract

(57) [Summary] (Correction) [Purpose] To sufficiently adjust the installation angle of the air knife for draining water. [Structure] A plurality of flanged conveyance rollers for conveying an object to be cleaned and a plurality of holding rollers located above the flanged conveyance rollers are installed at intervals, and a flanged conveyance roller is provided at a position where upper and lower draining air knives are positioned. The presser roller is a cantilevered transport shaft 27,
27 'and a cantilevered shaft are pivotally attached, one side of the flanged conveying roller parallel to the conveying direction and the holding roller are moved to make the conveying width variable, and the objects to be cleaned are conveyed with both sides of the collared conveying roller. A drying device in a single-wafer cleaning apparatus having a roller, a pressing roller, and a feed width varying mechanism formed in a tapered shape.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a drying device in a single wafer cleaning device.

[0002]

[Prior art]

 In the conventional apparatus, as shown in FIGS. 7 to 10, a large number of transport shafts 2, 2, ... Are rotatably laterally installed in the splash water receiving tank 1 at intervals and each transport shaft 2, 2 ,. A worm 3 is rotatably attached to one end of the worm 3, and a worm wheel 5 rotatably attached to a drive shaft 4 intersecting with the transport shafts 2, 2, ... The worm wheel 5 located at the end is meshed with the worm 7 driven by the rotation transmission motor 6, and the drive shaft 4 is rotated by the worm 7. Further, above the conveying shafts 2, 2, ..., Holding shafts 8, 8, ... Are laid horizontally, and gears that come into contact with the conveying shafts 2 and the holding shafts 8 located outside the splashing water tank 1 respectively. 9 and 10 are mounted on the shaft so that the rotation of the conveying shaft 2 is transmitted to the pressing shaft 8 to rotate the pressing shaft 8 in the opposite direction.

The transport shafts 2, 2, ... Are provided with flanged transport rollers 12, 13 having flat contact surfaces for supporting the glass substrate 11 on both sides, and the pressing shafts 8, 8 ,. Pressing rollers 14 and 15 having a flat contact surface for pressing the glass substrate 11 are attached to the roller. It should be noted that one of the collar-equipped conveying rollers 13 and each of the pressing rollers 15 cooperates with each other by one piece of metal fitting 16 for moving the rollers to adjust the distance between the opposing collar-equipped conveying rollers 12 and the pressing rollers 14. The width direction of the glass substrate 11 can be dealt with. The roller moving metal fitting 16 is screwed with the roller moving screws 17 and 18 provided on both sides, and the toothed pulleys 19 and 20 are axially attached to the shaft ends, respectively, and the timing belt 21 is hung on the roller moving metal fittings. By rotating the handle 22 provided on the screw 17 for rotation, the screws 17, 18 for moving both rollers are rotated to move the metal fitting 16 for roller movement.

As shown in FIG. 8, draining air knives 23 and 24 are provided between the two transport shafts 2 and 2 so as to drain the glass substrate 11.

[0005]

[Problems to be solved by the device]

 The conventional apparatus is configured as described above, and since the transport rollers 12 and 13 supporting the glass substrate 11 are attached to one transport shaft 2, there is a restriction on the mounting position of the water knives 23 and 24. receive. For example, when transporting the glass substrate 11 having a length of 240 mm, the installation angles of the water draining air knives 23 and 24 were only 4 degrees. Therefore, there is a problem that the draining air knives 23 and 24 do not have good draining performance and water drops remain on the glass substrate 11. Further, since the contact surfaces of the transport rollers 12 and 13 for transporting the glass substrate 11 and the pressing rollers 14 and 15 are formed to be flat, the contact area with the glass substrate 11 is large, and the pressing roller and the transport roller are large. Could not prevent contamination from

Therefore, in the present invention, it is possible to provide a device capable of increasing the installation angle of the water-draining air knife and reducing the contact between the glass substrate and the roller to prevent the glass substrate from being contaminated. It is what

[0007]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the present invention installs a large number of flanged transfer rollers for transferring an object to be cleaned and a plurality of holding rollers located above the flanged transfer rollers at intervals to provide an upper and lower draining air knife. The flanged conveying roller and the pressing roller at the locations to be positioned are respectively attached to the cantilever conveying shaft and the cantilever pressing shaft, and the one side of the flanged conveying roller parallel to the conveying direction and the pressing roller are moved on the shaft. Thus, a drying device in a single-wafer cleaning device having a variable feed width mechanism with a variable feed width is configured.

Further, a drying device in a single-wafer cleaning apparatus having a feed width variable mechanism in which each of the flanged conveying rollers and the pressing roller for conveying the object to be cleaned is formed in a tapered shape is configured.

[0009]

[Action]

 The present invention is configured as described above, and the object to be cleaned is conveyed by the tapered flanged conveying roller and the tapered pressing roller, and is provided between the cantilever conveying shaft and the cantilever pressing shaft. Adjust the angle of inclination with the upper and lower draining air knives to spray air and dry.

[0010]

【Example】

 An embodiment of the present invention will be described in detail with reference to FIGS. Bearings 25, 25 ', 26, and 26' are fixed to both ends of both side surfaces parallel to the transport direction of the splash water tank 1, and drive shafts 4 and 4'are rotatably supported. Then, the worm wheel 5 is attached to the bearing 25 side of the drive shaft 4 as in the conventional case, and the drive shaft 4 is rotated by meshing with the worm 7 provided on the rotation transmission motor 6. The drive shaft 4 has a worm wheel 5 at the end and a similar worm wheel 5 at two positions spaced apart from each other. The worm wheel 5 meshed with the worm wheel 5 at the end on the loading side. 3 is rotatably mounted on a transport shaft 2 which is horizontally mounted on a splashing water tank 1. A worm 3'is also mounted on the other shaft end of the transport shaft 2 so as to mesh with a worm wheel 5'mounted on the drive shaft 4 '. Worms 3 meshing with the other two worm wheels 5 are rotatably mounted on short cantilever transfer shafts 27, 27 supported only by one side wall of the splash water tank 1.

Between the transport shaft 2 located on the carry-in side and the cantilever transport shafts 27, 27, the transport shafts 2, 2 are laid across the sprinkling water tank 1, and the cantilever transport shaft 27 located on the carry-out side. On the carry-out side as well, a transport shaft 2 is horizontally installed in the splash water tank 1. Similarly to the transport shaft 2 at the loading-side end, worms 3 ', 3'are attached to the shaft ends of the other transport shafts 2, 2, ... The transport shafts 2, 2, ... Are rotated by meshing with the respective worm wheels 5 ′ axially mounted on 4 ′. Further, short cantilever transfer shafts 27 ', 27' facing the cantilever transfer shafts 27, 27 are rotatably supported only on one side wall of the splash water tank 1, and both cantilever transfer shafts 27 ', 27' are supported. Also, the worms 3'and 3'are attached to the respective shafts and mesh with the worm wheels 5'and 5'of the drive shaft 4 '.

The holding shafts 8, 8, ... Are laid horizontally above the respective conveying shafts 2, 2, ... And, similarly above the respective cantilever conveying shafts 27 ', 27'. 28 ', 28' are laterally arranged and are located outside the splash water tank 1 on the side of the drive shaft 4 ', the transfer shafts 2, 2, ... ,, and the cantilever press shafts 28 ', 28', respectively, by attaching gears 9 ', 10' that are in contact with each other to the presser shafts 8, 8, ... and the cantilever press shafts 28 ', 2'. 8'are rotated in the opposite directions of the transport shafts 2, 2 ... And the cantilever transport shafts 27 ', 27', respectively.

Further, the cantilever conveying shafts 27, 27 and the cantilever pressing shafts 28, 28 supported by the cantilever above the cantilever carrying shafts 27, 27 are located outside the splashing water tank 1 and have gears 9, 9, respectively abutting against each other. 10 and 10 are pivotally attached and the rotation of the cantilever conveying shaft 27 is transmitted to the cantilever holding shaft 28 so as to rotate in the opposite direction.

Further, taper-shaped flanged conveying rollers 29, 29, ... Are axially attached to the drive shafts 4 ′ of the conveying shafts 2, 2, ... .. and cantilevering shafts 28 ', 28' are provided with tapered pressing rollers 30, 30 ..

On the other hand, as shown in FIG. 3, key grooves 31, 31, ... Are provided on the drive shaft 4 side of the transfer shafts 2, 2, ..., And tapered transfer rollers 32, 32 ,. , Pins (not shown) to be inserted into the key grooves 31, 31, ... Are provided on the inner side of the flanged conveying rollers 32, 32, ..., and the cantilever conveying shaft 27 is also shown in FIG. As described above, the same key groove 33 is provided, the tapered conveying rollers 32 'and 32' having the sliding tube 34 at one end are fitted, and the pins 35 and 35 to be inserted into the key groove 33 are projected on the inner surface, respectively. It is provided so that the flanged conveying rollers 32 ', 32' can slide on the cantilever conveying shaft 27.

Further, key grooves 36, 36 are provided in the pressing shafts 8, 8 provided above the tapered conveying rollers 32 ', 32' with which the tapered pressing rollers 37, 37 are fitted. A pin (not shown) provided on the inner surface is fitted into the key groove 36 so that the tapered pressing roller 37 can slide on the pressing shaft 8. Further, as shown in FIG. 5, the cantilever holding shafts 28, 28 provided above the taper-shaped flanged conveying rollers 32 ', 32' are provided with a key groove 38, and a slide tube 39 is provided at one end thereof. A presser roller 40 having a tapered shape is fitted, and a pin 41 is projectingly provided on the inner surface of the presser roller 40 and inserted into the key groove 38 so that the presser roller 40 can slide on the cantilever press shaft 28. Is formed.

Further, moving grooves 42, 42, ... Are provided in the flanged conveying rollers 32, 32 'and the pressing rollers 37, 40, respectively, and the fitting portions 43, 43 ,. It matches.

Further, both moving screws 17 and 18 which are laid horizontally on the lower side of the splashing water tank 1 are screwed into the roller moving fitting 16, and the toothed pulleys 19 and 20 are respectively fitted to the moving screws 17 and 18. Is fixed, the timing belt 21 is hung, and the roller moving metal fitting 16 is moved by the driving of the moving motor 44 attached to the one moving screw 17, so that each of the flanged conveying rollers 32, 32 '. The pressing rollers 37 and 40 are moved to correspond to the width of the glass substrate 11.

The upper and lower draining air knives 23 and 24 are located between the cantilever conveying shafts 27 and 27 'and the cantilever holding shafts 28 and 28', respectively, so that a sufficient inclination angle can be obtained. .

The present embodiment is configured as described above, and the metal fitting 16 for moving the roller is moved according to the width of the glass substrate 11 to be dried to move the flanged conveying rollers 32, 32 'and the pressing roller. By changing the positions of 37 and 40, the distance between the flanged conveyance roller 29 and the pressing roller 30 which face each other is adjusted. After that, after adjusting the angles of the upper and lower draining air knives 23 and 24, the rotation transmission motor 6 is driven to convey the glass substrate 11, and the air jetted from the upper and lower draining air knives 23 and 24 in the middle thereof. Drain with.

[0021]

[Effect of device]

 The present invention has the above-described structure and operation, and the glass substrate is conveyed by the tapered conveying roller and the tapered pressing roller, and the glass substrate is supported only by the end faces on both sides. Therefore, it is possible to prevent contamination by the rollers. Further, since the upper and lower draining knives are located at the position where the shaft does not exist, the inclination angle can be greatly adjusted, and the draining effect can be sufficiently obtained.

[0022]

[Brief description of drawings]

FIG. 1 is a plan view of an embodiment of a drying device in a single-wafer cleaning apparatus having a variable feed width mechanism according to the present invention.

FIG. 2 is a sectional view taken along the line AA ′ in FIG.

3 is a sectional view taken along line BB ′ in FIG.

FIG. 4 is a side view showing a carrying roller with a collar and a pressing roller.

FIG. 5 is an enlarged cross-sectional view showing a cantilevered conveyance roller for cantilevering and a pressing roller on the moving side.

FIG. 6 is a side view showing a cantilevered conveying roller for cantilevering and a pressing roller on the fixed side.

FIG. 7 is a plan view of a conventional device.

8 is a cross-sectional view taken along the line AA ′ of FIG.

9 is a sectional view taken along line BB ′ of FIG. 7.

FIG. 10 is a side view showing a carrying roller with a collar and a pressing roller.

[Explanation of symbols]

 1 Splashing Water Tank 2 Transport Axis 3 Worm 3'Worm 4 Drive Axis 4'Drive Axis 5 Worm Wheel 5'Worm Wheel 6 Rotation Transmission Motor 7 Worm 8 Presser Shaft 9 Gear 9'Gear 10 Gear 10 'Gear 11 Glass Substrate 12 tsuba Conveyor roller with flange 13 Conveyor roller with collar 14 Presser roller 15 Presser roller 16 Roller moving metal fitting 17 Roller moving screw 18 Roller moving screw 19 Toothed pulley 20 Toothed pulley 21 Timing belt 22 Handle 23 Draining air knife 24 For draining Air knife 25 Bearing tool 25 'Bearing tool 26 Bearing tool 26' Bearing tool 27 Cantilever transfer shaft 27 'Cantilever transfer shaft 28 Cantilever press shaft 28' Cantilever press shaft 29 Collar transfer roller 30 Presser roller 31 Key Groove 32 Conveyor roller with collar 32 'Conveyor roller with collar 33 Key groove 34 Sliding tube 5-pin 36 keyway 37 pressing roller 38 keyway 39 sliding tube 40 pressing roller 41 pin 42 moving motor moving groove 43 fitting portion 44

Continuation of front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI technical display location // B08B 5/02 Z 2119-3B (72) Inventor Setsuo Shibuya 2-1, Shibasaki, Chofu-shi, Tokyo 3 Shimada Rika Kogyo Co., Ltd. (72) Inventor Takayuki Nagura 12117 Ohbuchi, Osuka Town, Ogasa District, Shizuoka Prefecture Corning Japan Co., Ltd. Shizuoka Business Center

Claims (2)

[Scope of utility model registration request] Claims: 1. A flanged transfer roller for transferring an object to be cleaned, wherein a plurality of flanged transfer rollers and pressing rollers located above the flanged transfer rollers are installed at intervals, and upper and lower draining air knives are positioned. The roller and the presser roller are axially attached to the cantilever carrying shaft and the cantilever presser shaft, respectively, and the one-sided flanged carrying roller and the holding roller parallel to the carrying direction are moved on the shaft to make the carrying width variable. A drying device in a single-wafer cleaning device having a variable feed width mechanism. 2. A single-wafer cleaning apparatus having a feed width varying mechanism according to claim 1, wherein each of the flanged conveying rollers and the pressing roller on both sides for conveying the object to be cleaned is formed in a tapered shape. Drying device.