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JPH0652348B2 - Light modulator - Google Patents

Light modulator

Info

Publication number
JPH0652348B2
JPH0652348B2 JP61080607A JP8060786A JPH0652348B2 JP H0652348 B2 JPH0652348 B2 JP H0652348B2 JP 61080607 A JP61080607 A JP 61080607A JP 8060786 A JP8060786 A JP 8060786A JP H0652348 B2 JPH0652348 B2 JP H0652348B2
Authority
JP
Japan
Prior art keywords
liquid crystal
diffraction grating
light modulation
state
modulation element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61080607A
Other languages
Japanese (ja)
Other versions
JPS62235924A (en
Inventor
正人 山野辺
泰之 渡部
肇 坂田
幸俊 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61080607A priority Critical patent/JPH0652348B2/en
Priority to US07/033,773 priority patent/US4850681A/en
Publication of JPS62235924A publication Critical patent/JPS62235924A/en
Publication of JPH0652348B2 publication Critical patent/JPH0652348B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Liquid Crystal (AREA)

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、光変調素子、特に回折格子と屈折率可変物質
とを組合せて屈折率可変物質の屈折率を制御することに
より入射光の所望の回折現象を生じせしめる光変調素子
に関する。
Description: TECHNICAL FIELD The present invention relates to a desired diffraction phenomenon of incident light by controlling a refractive index of a light modulation element, particularly a diffraction grating and a refractive index variable substance to control the refractive index variable substance. The present invention relates to a light modulation element that causes

〔従来技術〕[Prior art]

従来から良く知られている光変調素子としては、互いに
偏光方向が直交する様に配した一対の偏光板と、この一
対の偏光板間に配され一対の透明基板の相対する基板面
に互い直交する配向処理を施して液晶を封入した素子と
から成り、この液晶の配向状態をねじれた状態と基板面
に垂直に向いた状態との間でスイッチングを行ない入射
光の変調をする所謂TN(ツウイストネマチツク)型の
液晶表示素子がある。この種の表示素子は構成が簡便で
駆動が容易なことから多岐に亘り利用されているが、2
枚の偏光板を利用して光束の透過及び遮断を行なう為に
消色時、即ち光透過時の透過率が悪く光束利用効率の面
からは好ましい光変調素子とは言えなかった。
Conventionally well-known light modulators include a pair of polarizing plates arranged so that their polarization directions are orthogonal to each other, and a pair of transparent substrates disposed between the pair of polarizing plates are perpendicular to each other. And a so-called TN (two-way) which modulates the incident light by switching the orientation state of the liquid crystal between a twisted state and a state perpendicular to the substrate surface. There is an (istonematic) type liquid crystal display device. This type of display element is widely used because of its simple structure and easy driving.
Since the light flux is transmitted and blocked by using a single polarizing plate, the transmittance at the time of erasing, that is, at the time of light transmission is poor, and it cannot be said to be a preferable light modulator in terms of light flux utilization efficiency.

又、液晶を利用した同種の表示素子として、液晶分子に
色素を混入させて用いる所謂ゲスト−ホストモードの液
晶表示素子があるが、この表示素子に於ても色素が介在
する為に消色時の透過率は良くても75%程度であっ
た。
Further, as a display element of the same type using liquid crystal, there is a so-called guest-host mode liquid crystal display element in which a dye is mixed in a liquid crystal molecule. The transmittance was about 75% at best.

一方、特公昭53−3928号公報やUSP4,25
1,137等に於て反射型や透過型の位相回折格子と液
晶とを組合せた表示素子や可変減色フイルター素子が開
示されている。これらで開示されている素子は確かに光
束利用効率は優れているが、特公昭53−3928号公
報に開示されている素子は単なる装飾効果を示すのみで
あり、文字や画像を表示する表示素子や光束の透過、遮
断を行なう光変調素子としては満足出来るものではなっ
た。又、USP4,251,137に開示されている可
変減色フイルター素子は一対の対向する基板面に互いに
配列方向が直交する様に等方性材料にて、回折格子を形
成し、この基板間に液晶を充填して液晶分子の配向状態
を制御することにより屈折率を変え、回折格子を成す物
質と液晶との屈折率差を変えることで分光透過率特性を
可変にするもの等であり、光束利用効率に優れ且つ可変
色フイルターとして高性能を有する。しかしながら、こ
の種の従来の回折格子を用いた光変調素子は液晶がホモ
ジニアス配向しているため静的状態に於て入射光を回折
してしまっていた為、実際に表示素子として用いる際は
無表示状態即ち入射光束が全て透過する状態を維持する
為に常時電圧等を印加しておく必要があった(ノーマリ
ークローズ)。従って、電力を多く消費する。信頼性が
大巾に低下するなど表示素子として好ましくない問題点
をかかえていた。
Meanwhile, Japanese Patent Publication No. 53-3928 and USP 4,25
No. 1,137, etc., a display element and a variable subtractive color filter element in which a reflection type or transmission type phase diffraction grating and a liquid crystal are combined are disclosed. Although the elements disclosed in these are certainly excellent in luminous flux utilization efficiency, the elements disclosed in Japanese Patent Publication No. 53-3928 show only a decorative effect and are display elements for displaying characters and images. It has not been satisfactory as a light modulation element for transmitting and blocking light beams. The variable subtractive color filter element disclosed in US Pat. No. 4,251,137 has a pair of facing substrate surfaces, each of which is formed of a isotropic material with a diffraction grating so that the array directions thereof are orthogonal to each other. Is used to change the refractive index by controlling the alignment state of liquid crystal molecules, and to change the spectral transmittance characteristics by changing the refractive index difference between the substance forming the diffraction grating and the liquid crystal. It is highly efficient and has high performance as a variable color filter. However, since the light modulation element using the conventional diffraction grating of this kind diffracts the incident light in a static state because the liquid crystal is homogeneously aligned, it is not actually used as a display element. In order to maintain the display state, that is, the state in which all the incident light flux is transmitted, it is necessary to constantly apply a voltage or the like (normally closed). Therefore, a lot of power is consumed. However, it has a problem that it is not preferable as a display device, such as a drastic decrease in reliability.

〔発明の概要〕[Outline of Invention]

本発明の目的は、上記従来の問題点に鑑み、電界無印加
時に於て無表示状態を維持出来る回折光変調タイプの光
変調素子を提供することにある。
In view of the above-mentioned conventional problems, an object of the present invention is to provide a diffractive light modulation type light modulation element capable of maintaining a non-display state when no electric field is applied.

上記目的を達成する為に、本発明に係る光変調素子は、
一対の基板と該一対の基板の相対する少なくとも一方の
面に存する回折格子と該回折格子の溝部に配された液晶
と該液晶の配向状態を制御する制御手段とを有する素子
であって、前記制御手段を駆動しない静的状態に於いて
入射光を大略全透過させることを特徴としている。
In order to achieve the above object, the light modulation element according to the present invention,
An element having a pair of substrates, a diffraction grating existing on at least one surface of the pair of substrates facing each other, a liquid crystal arranged in a groove portion of the diffraction grating, and a control means for controlling an alignment state of the liquid crystal, It is characterized in that almost all incident light is transmitted in a static state where the control means is not driven.

尚、本発明の更なる特徴は以下に示す実施例より明らか
になるであろう。
Further features of the present invention will be apparent from the examples shown below.

〔実施例〕〔Example〕

第1図は本発明に係る光変調素子の基本構成図を示し、
本光変調素子の機能説明図を兼ねている。図中、1は液
晶に代表される屈折率可変物質、2は使用波長に対して
透明な物質から成る回折格子、3は透明電極、4は透明
光学部材から成る透明基板、5は任意の偏光特性を有す
る入射光、6及び6′は入射光5の互いに直交する偏光
成分で、6は紙面垂直方向、6′は紙面に平行な方向を
示している。
FIG. 1 shows a basic configuration diagram of an optical modulator according to the present invention,
It also serves as a functional explanatory view of the present light modulation element. In the figure, 1 is a refractive index variable substance represented by a liquid crystal, 2 is a diffraction grating made of a substance transparent to a used wavelength, 3 is a transparent electrode, 4 is a transparent substrate made of a transparent optical member, and 5 is any polarized light. Incident light having characteristics, 6 and 6'are polarization components of the incident light 5 which are orthogonal to each other, 6 is a direction perpendicular to the paper surface, and 6'is a direction parallel to the paper surface.

本光変調素子は一対の透明基板4の対向する面上に透明
電極3を形成して、一対の透明基板4の一方の透明電極
3上に透明物質から成る矩形状の回折格子2を設けてお
り、屈析率可変物質1が回折格子2の溝部(凹部)に配
され、透明電極3を介して電界を印加されることにより
その屈析率が可変となっている。
In the present light modulation element, a transparent electrode 3 is formed on opposite surfaces of a pair of transparent substrates 4, and a rectangular diffraction grating 2 made of a transparent material is provided on one transparent electrode 3 of the pair of transparent substrates 4. The refractive index variable substance 1 is arranged in the groove (concave portion) of the diffraction grating 2, and the refractive index is variable by applying an electric field through the transparent electrode 3.

以下、第1図を用いて本光変調素子の変調原理を説明す
るが、説明を容易にする為、屈析率可変物質1を以後液
晶1とし、電界印加により液晶1の配向状態を制御する
ことで所定の回折作用を生じせしめるものとする。
Hereinafter, the modulation principle of the present light modulation element will be described with reference to FIG. 1. For ease of explanation, the refractive index variable substance 1 will be referred to as liquid crystal 1 hereinafter, and the alignment state of the liquid crystal 1 is controlled by applying an electric field. This will cause a predetermined diffraction effect.

第1図に示す如く電界が印加されていない静的状態に於
て、液晶1は回折格子2の配列面と垂交する方向即ち紙
面上下方向に配向され、ホメオトロピツク配向の状態を
維持しているものとする。従って、この静的状態の本光
変調素子に入射する任意の偏光成分を有する入射光5の
偏光成分6,6′は液晶1の常屈析率noを感じる。
As shown in FIG. 1, in a static state in which no electric field is applied, the liquid crystal 1 is oriented in the direction perpendicular to the array surface of the diffraction grating 2, that is, in the vertical direction of the paper, and maintains the homeotropic alignment state. I shall. Therefore, the polarization components 6, 6 ′ of the incident light 5 having an arbitrary polarization component incident on the present light modulation element in the static state feel the ordinary refractive index no of the liquid crystal 1.

ここで、回折格子2を成す物質の屈析率をng,入射光
5の波長をλ、回折格子2の厚さをTとすれば矩形波の
回折格子の場合、入射光5の偏光成分6,6′の夫々に
対する零次透過回折光の回折効率ηoは、概略次の
(1)式で表わせる。
Here, if the diffraction rate of the substance forming the diffraction grating 2 is ng, the wavelength of the incident light 5 is λ, and the thickness of the diffraction grating 2 is T, in the case of a rectangular wave diffraction grating, the polarization component 6 of the incident light 5 is , 6 ', the diffraction efficiency ηo of the zero-order transmitted diffracted light can be roughly expressed by the following equation (1).

但し、Δnは回折格子2の屈析率ngと液晶1の屈析率
neもしくはnoとの屈析率差を示している。
However, Δn represents the difference in the diffraction rate between the diffraction rate ng of the diffraction grating 2 and the diffraction rate ne or no of the liquid crystal 1.

従って、(1)式からΔn=0時に零次透過回折光の回
折効率ηoはηo=1となり、 又、 (m=0,1,2,3,……)の時に回折効率ηoはη
o=0となる。
Therefore, from the equation (1), when Δn = 0, the diffraction efficiency ηo of the zero-order transmitted diffracted light is ηo = 1, and When (m = 0,1,2,3, ...), the diffraction efficiency ηo is η
o = 0.

次に、透明電極3を介して液晶1に電界を印加する場
合、液晶1の配向方向(光学軸方向)が徐々に変化する
ものとする。入射光5に於ける偏光成分6′は電界印加
に無関係に常時液晶1の常屈析率noを感じ、偏光成分
6は電界印加量に従って液晶1の異常屈析率neと常屈
析率noとが所定の比率で合成された合成屈析率nθ
感じる。言うまでもなく、液晶1の配向方向の変化に伴
なって合成屈析率nθは変化する。更に電界印加量を強
めると、液晶1は基板4(透明電極3)及び格子溝方向
に平行に配向され、ホモジニアス配向状態となる。
Next, when an electric field is applied to the liquid crystal 1 through the transparent electrode 3, the alignment direction (optical axis direction) of the liquid crystal 1 is gradually changed. The polarization component 6'in the incident light 5 always feels the ordinary refractive index no of the liquid crystal 1 irrespective of the application of the electric field, and the polarized component 6 shows the abnormal refractive index ne and the ordinary refractive index no of the liquid crystal 1 according to the applied electric field. Feel the synthetic diffractive index n θ that is synthesized at a predetermined ratio. Needless to say, the synthetic refractive index n θ changes as the alignment direction of the liquid crystal 1 changes. When the amount of applied electric field is further increased, the liquid crystal 1 is aligned parallel to the substrate 4 (transparent electrode 3) and the lattice groove direction, and is in a homogeneous alignment state.

このとき入射光5の偏光成分6,6′の内、液晶1の配
向方向と直交する成分である偏光成分6′は液晶1の常
屈析率noを感じ、又、液晶1の配向方向と平行な成分
である偏光成分6は液晶1の異常屈析率neを感じる。
At this time, among the polarization components 6 and 6 ′ of the incident light 5, the polarization component 6 ′, which is a component orthogonal to the alignment direction of the liquid crystal 1, feels the ordinary refractive index no of the liquid crystal 1, and also the alignment direction of the liquid crystal 1. The polarization component 6, which is a parallel component, feels the anomalous diffraction rate ne of the liquid crystal 1.

尚、この状態に於ても入射光5は前記(1)式に従い変
調される。
Even in this state, the incident light 5 is modulated according to the equation (1).

ここで ng=noとおけば (1)式より 静的状態において、入射光の偏光成分6,6′は非回折
状態、即ち全透過状態と成る。
Here, if ng = no, from the equation (1), in the static state, the polarization components 6 and 6'of the incident light are in the non-diffraction state, that is, in the total transmission state.

一方、電界をかけ飽和した状態において入射光の偏光成
分6,6′のうち、6′は非回折状態即ち透過状態。6
は回折状態と成る。
On the other hand, of the polarization components 6 and 6'of the incident light, 6'is in the non-diffraction state, that is, the transmission state when the electric field is saturated. 6
Becomes a diffracted state.

以上より原理的にはノーマリーオープンが達成される。From the above, a normally open is achieved in principle.

以下、本光変調素子の具体的構成例を述べて説明する。
通常の一対のガラス基板を用い、夫々のガラス基板の一
方の面にITO等の透明電極を形成し、各々のITO面
に対して、配向剤としてオクタデシルトリエトキシシラ
ン0.5wt%エタノール溶液をスピンコートにより塗
布し、100℃で1時間処理を施した後で、ラビング処
理を行った。次にラビング処理を行った一方の基板上に
電子線レジストで回折格子を形成して両基板を透明電極
が相対する様に貼り合せ、両基板間に負の誘電異方性を
示すネマチツク液晶即ちNr液晶を充填し、第1図で示
すが如く光変調素子を作成した。
Hereinafter, a specific configuration example of the present light modulation element will be described and described.
Using a pair of ordinary glass substrates, a transparent electrode such as ITO is formed on one surface of each glass substrate, and octadecyltriethoxysilane 0.5 wt% ethanol solution is spun on each ITO surface as an aligning agent. After coating with a coat and treatment at 100 ° C. for 1 hour, rubbing treatment was performed. Next, a diffraction grating is formed on one of the substrates that has been subjected to rubbing treatment with an electron beam resist, and the two substrates are bonded so that the transparent electrodes face each other. A Nr liquid crystal was filled to prepare a light modulation element as shown in FIG.

上述の如き製法で作成した光変調素子においては液晶分
子は回折格子の厚さ方向、即ち基板面に対して垂直方向
に配向され、静的状態に於て所謂ホメオトロピツク配向
を示した。
In the light modulation element produced by the above-mentioned manufacturing method, the liquid crystal molecules are oriented in the thickness direction of the diffraction grating, that is, in the direction perpendicular to the substrate surface, and in the static state, so-called homeotropic alignment is exhibited.

又、Nr液晶であるので電界を印加するに従い、入射光
が変調され電界飽和后所定の0次回折色を示した。
Further, since it was Nr liquid crystal, incident light was modulated as the electric field was applied, and after the electric field was saturated, a predetermined 0th order diffraction color was exhibited.

尚、本実施例で用いる配向剤や配向処理の程度は、一般
に回折格子の溝による物理的な配向規制力に打ち勝ち、
回折格子溝部に存する液晶をホモジニアス配向からホメ
オトロピツク配向へと強制配向させるだけの規制力が得
られるように選択された。
The orientation agent and the degree of orientation treatment used in this example generally overcome the physical orientation control force due to the grooves of the diffraction grating,
It was selected so as to obtain a regulation force sufficient to force the liquid crystal existing in the diffraction grating groove portion from the homogeneous alignment to the homeotropic alignment.

第2図は本発明に係る光変調素子の他の実施例を示す模
式図で、図中、第1図と同部材には同符号を符してあ
る。又、7及び7′は液晶の如き屈析率可変物質1の光
学軸の方向を示す。更に、2′は回折格子(不図示)、
3′は透明電極、4′は透明基板を示している。
FIG. 2 is a schematic view showing another embodiment of the optical modulator according to the present invention. In the figure, the same members as those in FIG. 1 are designated by the same reference numerals. Reference numerals 7 and 7'indicate the directions of the optical axes of the variable refractive index material 1 such as liquid crystal. Further, 2'is a diffraction grating (not shown),
3'denotes a transparent electrode and 4'denotes a transparent substrate.

本実施例では回折格子2,2′を配列方向が直交する様
に重畳して構成した素子を示し、第1図の光変調素子を
一対用いて形成したものである。この様な構成にするこ
とで第1図で示した入射光5の偏光成分6,6′を同時
に変調することが可能である。
In this embodiment, an element is shown in which the diffraction gratings 2 and 2'are superposed so that the arrangement directions thereof are orthogonal to each other, and is formed by using a pair of the light modulation elements shown in FIG. With such a configuration, it is possible to simultaneously modulate the polarization components 6 and 6'of the incident light 5 shown in FIG.

又、本光変調素子の回折格子の形状は矩形状に限らず種
々の形状を用いることが出来る。但し前記(1)式で示
した様子回折効率の式は回折格子の形状により異なる。
Further, the shape of the diffraction grating of the present light modulation element is not limited to the rectangular shape, and various shapes can be used. However, the equation of the diffraction efficiency shown in the above equation (1) differs depending on the shape of the diffraction grating.

以上説明した様に、本実施例に係る光変調素子に於て
は、電界無印加時には“明”状態、即ち全透過状態で、
電界印加時には“暗”、即ち変調状態(表示状態)が得
られる為、通常状態(“明”状態)での電流消費がな
く、素子を駆動する為に用いられる駆動回路の設計自由
度も増す。
As described above, in the light modulation element according to the present embodiment, when no electric field is applied, the "bright" state, that is, the total transmission state,
Since "dark", that is, a modulation state (display state) is obtained when an electric field is applied, current consumption in the normal state ("bright" state) is eliminated, and the degree of freedom in designing the drive circuit used to drive the element is increased. .

又、透明電極の電触速度も遅くなり、素子としての信頼
性が著しく向上する。従って、表示素子や色フイルタ
ー、光スイツチ等、本光変調素子の適用範囲は大きく拡
がっている。
In addition, the contact speed of the transparent electrode is slowed down, and the reliability as an element is significantly improved. Therefore, the applicable range of the present light modulation element such as a display element, a color filter, an optical switch, etc. is greatly expanded.

更に、当然の事ながら、従来の液晶を利用した表示素子
の様に偏光板や光吸収性物質(例えば色素)を用いない
為に光束利用効率に優れる。
Further, as a matter of course, unlike the display element using the conventional liquid crystal, the polarizing plate and the light absorbing substance (for example, dye) are not used, so that the luminous flux utilization efficiency is excellent.

本発明に係る光変調素子を成す回折格子は第1図から解
る様に、凹凸のレリーフパターンから成る所謂位相型の
回折格子であり、この種のレリーフパターンを形成する
方法としては、例えばフオトリソグラフイーとドライエ
ツチングを組み合わせた方法、熱硬化性樹脂あるいは紫
外線硬化性樹脂等を用いたレプリカ法、ルーリングエン
ジンを用いた切削法あるいはエンボス法等の各種方法が
挙げられる。
As can be seen from FIG. 1, the diffraction grating which constitutes the light modulation element according to the present invention is a so-called phase type diffraction grating which is composed of an uneven relief pattern. As a method for forming this kind of relief pattern, for example, a photolithographic method is used. Various methods such as a method combining E and dry etching, a replica method using a thermosetting resin or an ultraviolet curable resin, a cutting method using a ruling engine, an embossing method and the like can be mentioned.

〔発明の効果〕〔The invention's effect〕

以上、本発明に係る光変調素子は、静的状態に於て全透
過状態を得て、無表示状態の安定化を可能にした表示素
子や色フイルター等に好適な素子である。
As described above, the light modulation element according to the present invention is an element suitable for a display element, a color filter, or the like that can obtain a total transmission state in a static state and stabilize a non-display state.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明に係る光変調素子の基本構成原理を示す
図。 第2図は本発明に係る光変調素子の他の実施例を示す
図。 1……屈析率可変物質(液晶) 2,2′……回折格子 3,3′……透明電極 4,4′……透明基板 5……入射光 6,6′……互いに直交する偏光成分 7,7′……屈析率可変物質の光学軸
FIG. 1 is a diagram showing a basic configuration principle of an optical modulator according to the present invention. FIG. 2 is a diagram showing another embodiment of the light modulation element according to the present invention. 1 ... Variable refractive index material (liquid crystal) 2, 2 '... Diffraction grating 3, 3' ... Transparent electrode 4, 4 '... Transparent substrate 5 ... Incident light 6, 6' ... Component 7, 7 '... Optical axis of variable refractive index material

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】一対の基板と該一対の基板の相対する少な
くとも一方の面に存する回折格子と該回折格子の溝部に
配された液晶と該液晶の配向状態を制御する制御手段と
を有する素子であって、前記制御手段を駆動しない静的
状態に於いて入射光を大略全透過させる光変調素子。
1. An element having a pair of substrates, a diffraction grating existing on at least one surface of the pair of substrates facing each other, a liquid crystal arranged in a groove portion of the diffraction grating, and a control means for controlling an alignment state of the liquid crystal. A light modulation element that almost completely transmits incident light in a static state in which the control means is not driven.
【請求項2】前記基板と前記回折格子の溝部の少なくと
も一方に垂直配向処理を施した特許請求の範囲第(1)
項記載の光変調素子。
2. A vertical alignment treatment is applied to at least one of the substrate and the groove of the diffraction grating.
An optical modulator according to the item.
【請求項3】前記液晶が負の誘電性を有するネマチツク
液晶である特許請求の範囲第(1)項記載の光変調素
子。
3. The light modulation element according to claim 1, wherein the liquid crystal is a nematic liquid crystal having a negative dielectric property.
【請求項4】前記制御手段が電界印加を行なう手段であ
って、前記回折格子の配列面に略垂直な電界を印加する
特許請求の範囲第(3)項記載の光変調素子。
4. The light modulation element according to claim 3, wherein said control means is means for applying an electric field, and applies an electric field substantially perpendicular to the array surface of said diffraction grating.
JP61080607A 1986-04-07 1986-04-07 Light modulator Expired - Fee Related JPH0652348B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61080607A JPH0652348B2 (en) 1986-04-07 1986-04-07 Light modulator
US07/033,773 US4850681A (en) 1986-04-07 1987-04-03 Optical modulation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61080607A JPH0652348B2 (en) 1986-04-07 1986-04-07 Light modulator

Publications (2)

Publication Number Publication Date
JPS62235924A JPS62235924A (en) 1987-10-16
JPH0652348B2 true JPH0652348B2 (en) 1994-07-06

Family

ID=13723016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61080607A Expired - Fee Related JPH0652348B2 (en) 1986-04-07 1986-04-07 Light modulator

Country Status (1)

Country Link
JP (1) JPH0652348B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200638101A (en) * 2005-02-02 2006-11-01 Asahi Glass Co Ltd The devices of light flux changing and projected display apparatus

Also Published As

Publication number Publication date
JPS62235924A (en) 1987-10-16

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