JPH0651115A - Dyestuff for color filter - Google Patents
Dyestuff for color filterInfo
- Publication number
- JPH0651115A JPH0651115A JP20529892A JP20529892A JPH0651115A JP H0651115 A JPH0651115 A JP H0651115A JP 20529892 A JP20529892 A JP 20529892A JP 20529892 A JP20529892 A JP 20529892A JP H0651115 A JPH0651115 A JP H0651115A
- Authority
- JP
- Japan
- Prior art keywords
- color filter
- dye
- formula
- dyestuff
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Filters (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明はカラーフィルター、特に
固体撮像素子用のカラーフィルターに用いられる色素に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter, and more particularly to a dye used in a color filter for a solid-state image pickup device.
【0002】[0002]
【従来の技術】カラーフィルター、特に電荷結合素子
(CCD )もしくは液晶表示素子(LCD )等の固体撮像素
子用カラーフィルターは、一般的には、初めにフォトレ
ジストによりパターンを形成し、次いで染色する方法に
より作製されている。しかしながら、この方法において
は、染色工程の複雑さ及び工程管理の困難さ等の問題点
がある。そこで、例えば特開平4−163552号及び特開平
4−128703号公報には、各々、顔料及び染料等の色素を
添加したフォトレジストによりパターンを形成してカラ
ーフィルターを作製する方法が提案されている。しかし
ながら、前者の方法においては、顔料自体1μm前後の
粒子を含んでいるために高解像度が要求されるCCD 用カ
ラーフィルターの製作には不適である。又、後者の方法
においては、着色パターンの安定性等に問題がある。そ
して、これらの方法はさらに大きな問題点を含んでい
る。即ち、通常の色素はアルカリ現像可能なレジストに
とって異物として存在することである。つまり、半導体
作製用途の場合と異なり、カラーフィルター作製用途の
場合にはその膜厚が1μm以下であることが望ましいの
で、アルカリ可溶性樹脂及び有機溶剤を含むレジスト組
成物に多量の色素を添加しなければならない。しかしな
がら、本来、色素は有機溶剤に可溶であれば、殆どの場
合、アルカリ現像液(水溶液)に不溶であるから、多量
の色素を添加し、且つ高解像度を有するフォトレジスト
を得ることは実際にはできないのである。2. Description of the Related Art A color filter, particularly a color filter for a solid-state image pickup device such as a charge coupled device (CCD) or a liquid crystal display device (LCD), is generally formed by first forming a pattern with a photoresist and then dyeing it. It is made by the method. However, this method has problems such as complexity of the dyeing process and difficulty in process control. Therefore, for example, JP-A-4-163552 and JP-A-4-128703 propose methods of forming a color filter by forming a pattern with a photoresist to which pigments such as pigments and dyes are added. . However, the former method is not suitable for producing a CCD color filter that requires high resolution because the pigment itself contains particles of about 1 μm. In addition, the latter method has a problem in the stability of the coloring pattern. And, these methods have more serious problems. That is, a normal dye is present as a foreign substance in an alkali developable resist. That is, unlike the case of semiconductor production, in the case of color filter production, it is desirable that the film thickness is 1 μm or less. Therefore, a large amount of dye must be added to a resist composition containing an alkali-soluble resin and an organic solvent. I have to. However, originally, if the dye is soluble in an organic solvent, in most cases, it is insoluble in the alkaline developer (aqueous solution). Therefore, it is actually possible to add a large amount of the dye and obtain a photoresist having high resolution. It cannot be done.
【0003】[0003]
【発明が解決しようとする課題】本発明は上記問題点を
解決して、解像度及び着色パターンの安定性等の諸性能
に優れたカラーフィルター用色素を提供する。SUMMARY OF THE INVENTION The present invention solves the above problems and provides a dye for a color filter which is excellent in various properties such as resolution and stability of a coloring pattern.
【0004】[0004]
【課題を解決するための手段】本発明は、酸性染料のア
ミン塩であるか又は酸性染料のスルホンアミド化合物で
あり、且つ、有機溶剤及びアルカリ水溶液に可溶なカラ
ーフィルター用色素である。The present invention is a dye for a color filter which is an amine salt of an acid dye or a sulfonamide compound of an acid dye and which is soluble in an organic solvent and an alkaline aqueous solution.
【0005】このような色素としては、例えば一般式
(I) D−(SO3 - )m Xm (I) 〔式中、Dは色素母体を、Xは(R1')(R2')
(R3')(R4')N+又は下式[0005] As such a dye, for example, the general formula (I) D- (SO 3 - ) m X m (I) wherein, D is a dye matrix, X is (R 1 ') (R 2 ' )
(R 3 ') (R 4 ') N + or the following formula
【0006】[0006]
【化1】 [Chemical 1]
【0007】(式中、R5'及びR6'は各々独立して水素
原子、アラルキル基、複素環基或いは脂肪族もしくは芳
香族有機化合物残基を表わす。)で表わされる基を、m
は1以上の整数を各々表わす。R1'〜R4' は各々独立
して水素原子、アラルキル基、複素環基或いは脂肪族も
しくは芳香族有機化合物残基を表わす。〕で示される酸
性染料のアミン塩、並びに、一般式(II) Dy 〔(SO2 NHR7')q 〕〔(SO2 NHR8')q'〕〔(SO2 NHR9') q'' 〕 (II) 〔式中、Dy は色素母体を、R7'〜R9'は各々独立して
水素原子、炭素数1以上の(好ましくは炭素数5以上
の)有機化合物残基を、q 〜q'' は各々1以上の整数
を、それぞれ表わす。但し、q +q'+q'' ≦16であ
る。〕で示される酸性染料のスルホンアミド化合物が挙
げられる。(Where RFive'And R6'Each independently hydrogen
Atoms, aralkyl groups, heterocyclic groups or aliphatic or aromatic groups
Represents an aromatic organic compound residue. ) Is a group represented by m
Each represents an integer of 1 or more. R1'~ RFour' Each is independent
Hydrogen atom, aralkyl group, heterocyclic group or aliphatic
Or, it represents an aromatic organic compound residue. ] Acid
Salt of organic dye, and general formula (II) Dy[(SO2NHR7')q] [(SO2NHR8')q '] [(SO2NHR9') q '' ] (II) [wherein DyIs the dye matrix, R7'~ R9'Independently
Hydrogen atom, having 1 or more carbon atoms (preferably having 5 or more carbon atoms)
Of) organic compound residue,q~q ''Is an integer greater than or equal to 1
, Respectively. However,q+q '+q ''≤16
It ] The acid sulfone amide compound represented by
You can
【0008】R1'〜R6'で表わされるアラルキル基、複
素環基或いは脂肪族もしくは芳香族有機化合物残基とし
ては、例えばベンジルもしくはフェネチル基、芳香族性
を示す複素環基、炭素数1以上の脂肪族炭化水素基、炭
素数2以上の脂肪族エステル残基、炭素数2以上の脂肪
族エーテル基、炭素数6以上の芳香族炭化水素基、炭素
数12以上の芳香族エーテル基もしくは炭素数8以上の芳
香族エステル残基等が挙げられる。R1'〜R6'の中、少
なくとも1つは炭素数5以上の、アラルキルもしくは複
素環基或いは脂肪族もしくは芳香族有機化合物残基であ
ることが好ましい。一般式(I)中のXの具体例として
は、下式 (Cn H2n+1 NH3 )+ (i) 〔式中、nは1以上の(好ましくは5以上、20以下の)
整数である。〕 (Cs H2s+1 OCt H2tNH3 )+ (ii) 〔式中、s及びtは各々1以上の(好ましくは5以上、
20以下の)整数であり、好ましくはs+t≧5であ
る。〕 〔(Cn H2n+1 )(C6 H5 CH2 )2 NH〕+ (iii) (式中、nは上記と同じ意味である。) (Cn H2n+1 )Py (iv) (式中、nは上記と同じ意味であり、Py はピリジニウ
ム基を表わす。) (Cn H2n+1 )Py ' (v) (式中、nは上記と同じ意味であり、Py ' はメチルピ
リジニウム基を表わす。)で表わされる基等が挙げられ
る。The aralkyl group, heterocyclic group or aliphatic or aromatic organic compound residue represented by R 1 'to R 6 ' is, for example, benzyl or phenethyl group, heterocyclic group showing aromaticity, carbon number 1 The above aliphatic hydrocarbon groups, aliphatic ester residues having 2 or more carbon atoms, aliphatic ether groups having 2 or more carbon atoms, aromatic hydrocarbon groups having 6 or more carbon atoms, aromatic ether groups having 12 or more carbon atoms, or Examples thereof include aromatic ester residues having 8 or more carbon atoms. At least one of R 1 ′ to R 6 ′ is preferably an aralkyl or heterocyclic group having 5 or more carbon atoms, or an aliphatic or aromatic organic compound residue. Specific examples of X in the general formula (I), the following formula (C n H 2n + 1 NH 3) + (i) wherein, n represents 1 or more (preferably 5 or more, 20 or less)
It is an integer. ] (C s H 2s + 1 OC t H 2t NH 3) + (ii) wherein, s and t are each 1 or more (preferably 5 or more,
It is an integer (less than or equal to 20), and preferably s + t ≧ 5. ] [(Wherein, n is the same meaning as above.) (C n H 2n + 1) (C 6 H 5 CH 2) 2 NH ] + (iii) (C n H 2n + 1) P y ( iv) (wherein, n is as defined above, P y is. representing a pyridinium group) (C n H 2n + 1 ) P y '(v) ( wherein, n has the same meaning as above , P y 'represents a methylpyridinium group).
【0009】R7'〜R9'で表わされる炭素数1以上の有
機化合物残基としては、例えば炭素数1以上の脂肪族炭
化水素基、炭素数2以上の脂肪族エステル残基もしくは
炭素数2以上の脂肪族エーテル基等が挙げられる。R7'
〜R9'の具体例としては、下式 Cn H2n+1 (vi) (式中、nは上記と同じ意味である。) Cs H2s+1 OCt H2t (vii) (式中、s及びtは上記と同じ意味である。)で表わさ
れる基等が挙げられる。The organic compound residue having 1 or more carbon atoms represented by R 7 'to R 9 ' is, for example, an aliphatic hydrocarbon group having 1 or more carbon atoms, an aliphatic ester residue having 2 or more carbon atoms, or a carbon number. Examples thereof include two or more aliphatic ether groups. R 7 '
Examples of the to R 9 ', (wherein, n is the same meaning as above.) The formula C n H 2n + 1 (vi ) C s H 2s + 1 OC t H 2t (vii) ( wherein In the above, s and t have the same meanings as described above.) And the like.
【0010】D及びDy で表わされる色素母体はカラー
フィルターとして望ましいスペクトル及び性能を有する
ものを適宜選択すればよく、シアン色として好ましくは
フタロシアニン骨格を有する酸性染料の母体が用いられ
る。即ち、一般式(I)或いは(II)で示される染料
は、上記酸性染料或いはその誘導体と、一般式(I)中
のXに対応するアミン或いはNH2 R7'〜NH2 R9'で
示されるアミンとを、各々、反応させることにより製造
することができる。フォトレジスト用の有機溶剤として
は、例えばメチルセロソルブ、エチルセロソルブ、メチ
ルセロソルブアセテート、エチルセロソルブアセテー
ト、ジエチレングリコールジメチルエーテル、エチレン
グリコールモノイソプロピルエーテル、プロピレングリ
コールモノメチルエーテル、N,N−ジメチルアセトア
ミド、N−メチルピロリドン、γ−ブチロラクトン、メ
チルイソブチルケトン、メチルエチルケトン、シクロペ
ンタノン、シクロヘキサノン、酢酸エチル、酢酸n−ブ
チル、酢酸プロピレングリコールモノメチルエーテル、
酢酸プロピレングリコールモノエチルエーテル、乳酸メ
チル、乳酸エチル、ピルビン酸エチル、ジメチルスルホ
キシド、ジオキサンもしくはジメチルホルムアミド等が
挙げられる。これらの有機溶剤は単独で、或いは2種以
上組合わせて用いられる。本発明の色素はアルカリ可溶
性樹脂を含むアルカリ現像が可能なレジストに適用しう
る。これらのレジストとしては、アルカリ可溶性樹脂、
キノンジアジド化合物及び有機溶剤を含むポジ型レジス
ト(必要により架橋剤を含んでいてもよい)、或いはア
ルカリ可溶性樹脂、光酸発生剤、架橋剤及び有機溶剤を
含むネガ型レジストが挙げられる。The dye matrix represented by D and D y may be appropriately selected from those having a desired spectrum and performance as a color filter, and as the cyan color, a matrix of an acid dye having a phthalocyanine skeleton is preferably used. That is, the dye represented by the general formula (I) or (II) is composed of the above acid dye or its derivative and an amine corresponding to X in the general formula (I) or NH 2 R 7 ′ to NH 2 R 9 ′. Each of the amines shown can be prepared by reacting. Examples of organic solvents for photoresists include methyl cellosolve, ethyl cellosolve, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol dimethyl ether, ethylene glycol monoisopropyl ether, propylene glycol monomethyl ether, N, N-dimethylacetamide, N-methylpyrrolidone, γ-butyrolactone, methyl isobutyl ketone, methyl ethyl ketone, cyclopentanone, cyclohexanone, ethyl acetate, n-butyl acetate, propylene glycol monomethyl ether acetate,
Examples thereof include propylene glycol monoethyl ether acetate, methyl lactate, ethyl lactate, ethyl pyruvate, dimethyl sulfoxide, dioxane or dimethylformamide. These organic solvents may be used alone or in combination of two or more. The dye of the present invention can be applied to an alkali-developable resist containing an alkali-soluble resin. These resists include alkali-soluble resins,
A positive resist containing a quinonediazide compound and an organic solvent (which may optionally contain a crosslinking agent), or a negative resist containing an alkali-soluble resin, a photoacid generator, a crosslinking agent and an organic solvent can be mentioned.
【0011】アルカリ可溶性樹脂としてはフェノール性
水酸基を有する樹脂、例えばフェノール樹脂もしくはノ
ボラック樹脂等が挙げられる。ノボラック樹脂として
は、例えばフェノール類とアルデヒド類とを酸触媒の存
在下に縮合して得られるものが挙げられる。フェノール
類としては、例えばフェノール、クレゾール、エチルフ
ェノール、ブチルフェノール、キシレノール、フェニル
フェノール、カテコール、レゾルシノール、ピロガロー
ル、ナフトール、ビスフェノールCもしくはビスフェノ
ールA等が挙げられる。これらのフェノール類は単独
で、又は2種以上組合わせて用いられる。アルデヒド類
としては、例えばホルムアルデヒド、パラホルムアルデ
ヒド、アセトアルデヒド、プロピオンアルデヒドもしく
はベンズアルデヒド等の脂肪族又は芳香族アルデヒドが
挙げられる。フェノール性水酸基を有する樹脂は必要に
より、分別等の手段を用いて分子量分布を調節してもよ
い。又、ビスフェノールAもしくはビスフェノールC等
のフェノール類をフェノール性水酸基を有する樹脂に添
加してもよい。Examples of the alkali-soluble resin include resins having a phenolic hydroxyl group, such as phenol resin or novolac resin. Examples of the novolac resin include those obtained by condensing phenols and aldehydes in the presence of an acid catalyst. Examples of the phenols include phenol, cresol, ethylphenol, butylphenol, xylenol, phenylphenol, catechol, resorcinol, pyrogallol, naphthol, bisphenol C or bisphenol A. These phenols may be used alone or in combination of two or more. Examples of the aldehydes include aliphatic or aromatic aldehydes such as formaldehyde, paraformaldehyde, acetaldehyde, propionaldehyde or benzaldehyde. If necessary, the resin having a phenolic hydroxyl group may be adjusted in molecular weight distribution by means such as fractionation. Further, phenols such as bisphenol A or bisphenol C may be added to the resin having a phenolic hydroxyl group.
【0012】架橋剤としては、例えば下式 −(CH2 )p OR (式中、Rは水素原子又は低級アルキル基を表わし、p
は1〜4の整数を表わす。)で示される基を有する化合
物及びメラミンが挙げられる。上式で示される基を有す
る化合物としては、例えば下式Examples of the cross-linking agent include the following formula:-(CH 2 ) p OR (wherein R represents a hydrogen atom or a lower alkyl group, p
Represents an integer of 1 to 4. And a melamine having a group represented by the formula (1). As the compound having a group represented by the above formula, for example, the following formula
【0013】[0013]
【化2】 [Chemical 2]
【0014】〔式中、Zは−NR1 R2 又はフェニル基
を表わす。R1 〜R6 はこれらの中、少なくとも1つが
−(CH2 )p OH又は−(CH2 )p OR7 を表わす
という条件付きで各々、水素原子、−(CH2 )p OH
又は−(CH2 )p OR7 を表わす。R7 は低級アルキ
ル基を表わす。p は1〜4の整数を表わす。〕で示され
る化合物、或いは下式[In the formula, Z represents —NR 1 R 2 or a phenyl group. R 1 to R 6 are each a hydrogen atom, — (CH 2 ) p OH, provided that at least one of them represents — (CH 2 ) p OH or — (CH 2 ) p OR 7.
Or - represents a (CH 2) p OR 7. R 7 represents a lower alkyl group. p represents an integer of 1 to 4. ] The compound shown by the following, or the following formula
【0015】[0015]
【化3】 [Chemical 3]
【0016】[0016]
【化4】 [Chemical 4]
【0017】で示される化合物等が挙げられる。R及び
R1 〜R7 で表わされるアルキル基としてはメチル、エ
チル、n−プロピル又はn−ブチル基が挙げられ、好ま
しいアルキル基としてはメチル又はエチル基が挙げられ
る。式(i) 〜(ii)で示される化合物(架橋剤)は各々、
p−クレゾール又はt−ブチルフェノールを塩基性条件
下でホルムアルデヒドと縮合させることにより製造する
ことができる。又、式(iii) 〜(vi)で示される化合物
(架橋剤)は特開平1−293339号公報に記載された公知
化合物である。式−(CH2 )p ORで示される基を有
する、好ましい化合物としては、例えばヘキサメトキシ
メチロール化メラミン、ヘキサメトキシエチロール化メ
ラミン又はヘキサメトキシプロピロール化メラミン等が
挙げられる。Examples thereof include compounds represented by: The alkyl group represented by R and R 1 to R 7 includes a methyl, ethyl, n-propyl or n-butyl group, and the preferred alkyl group includes a methyl or ethyl group. The compounds (crosslinking agents) represented by formulas (i) to (ii) are
It can be produced by condensing p-cresol or t-butylphenol with formaldehyde under basic conditions. The compounds represented by formulas (iii) to (vi) (crosslinking agents) are known compounds described in JP-A-1-293339. Preferable compounds having a group represented by the formula:-(CH 2 ) p OR include, for example, hexamethoxymethylolated melamine, hexamethoxyethylolated melamine, hexamethoxypropyrolated melamine and the like.
【0018】光酸発生剤としては光により直接もしくは
間接的に酸を発生するものであれば特に限定されない
が、例えば特開平4−163552号公報に記載されているト
リハロメチルトリアジン系化合物、特開平1−57777 号
公報に記載されているジスルホン化合物、下式、 R8 −SO2 −SO2 −R9 −SO2 −SO2 −R10 (式中、R8 及びR10は各々独立して置換されていても
よいアリール、アラルキル、アルキル、シクロアルキル
又は複素環基を表わし、R9 は置換されていてもよいア
リールを表わす。)で示される化合物、特開平1−2933
39号公報に記載されているスルホン酸エステル基を含む
光酸発生剤、下式 CF3 −SO2 O−(CH2 )n'−Y (式中、Yは置換されていてもよいアリール基をn' は
0又は1を表わす。)で示される化合物、下式 CF3 −SO2 O−〔C(Y1 )(Y2 )〕m'−C(O)−Y3 (式中、Y1 及びY2 は各々独立して置換されていても
よいアルキル、アルコキシもしくはアリール基を、Y3
は置換されていてもよいアリール基を、m' は1又は2
を、各々表わす。)で示される化合物、下式 CF3 −SO2 O−N(Y4 )−C(O)−Y5 (式中、Y4 は置換されていてもよいアルキル基を、Y
5 は置換されていてもよいアリール基を、各々表わ
す。)で示される化合物、下式 CF3 −SO2 O−N=C(Y6 )(Y7 ) (式中、Y6 は水素原子又は置換されていてもよいアル
キルもしくはアリール基を、Y7 は置換されていてもよ
いアリール基を、各々表わす。)で示される化合物、下
式The photoacid generator is not particularly limited as long as it can generate an acid directly or indirectly by light. For example, a trihalomethyltriazine compound described in JP-A-4-163552, disulfone compounds described in 1-57777 JP, the formula, R 8 -SO 2 -SO 2 -R 9 -SO 2 -SO 2 -R 10 ( wherein, R 8 and R 10 are each independently A compound represented by optionally substituted aryl, aralkyl, alkyl, cycloalkyl or heterocyclic group, and R 9 represents optionally substituted aryl), JP-A-1-2933.
Photoacid generator containing a sulfonic acid ester group as described in 39 JP, the formula CF 3 -SO 2 O- (CH 2 ) n '-Y ( wherein, Y is an optionally substituted aryl group 'compounds, the formula CF 3 -SO 2 O- [C (Y 1) (Y 2 ) ] m represented by represents 0 or 1.)' -C (O) -Y 3 ( wherein n, the Y 1 and Y 2 are each independently an optionally substituted alkyl, alkoxy or aryl group, and Y 3
Is an optionally substituted aryl group, m ′ is 1 or 2
Are respectively represented. ), A compound represented by the formula: CF 3 —SO 2 O—N (Y 4 ) —C (O) —Y 5 (wherein Y 4 represents an optionally substituted alkyl group, and
5 represents an aryl group which may be substituted, respectively. ), A compound represented by the formula: CF 3 —SO 2 O—N═C (Y 6 ) (Y 7 ) (wherein Y 6 represents a hydrogen atom or an optionally substituted alkyl or aryl group, Y 7 Each represents an optionally substituted aryl group), a compound represented by the following formula:
【0019】[0019]
【化5】 [Chemical 5]
【0020】で示されるオニウム塩類等があげられる。Examples include onium salts represented by:
【0021】キノンジアジド化合物としては、例えばo
−ナフトキノンジアジド−5−スルホン酸エステル又は
スルホン酸アミド、或いはo−ナフトキノンジアジド−
4−スルホン酸エステル又はスルホン酸アミド等が挙げ
られる。これらのエステル又はアミドは、例えば特開平
2−84650 及び特開平3−49437 号公報に一般式(I)
で記載されているフェノール化合物等を用いて公知の方
法により製造することができる。Examples of the quinonediazide compound include o
-Naphthoquinone diazide-5-sulfonic acid ester or sulfonic acid amide, or o-naphthoquinone diazide-
4-sulfonic acid ester, sulfonic acid amide, etc. are mentioned. These esters or amides are represented by the general formula (I) in JP-A-2-84650 and JP-A-3-49437.
It can be produced by a known method using the phenol compound described in 1.
【0022】アルカリ可溶性樹脂は通常、有機溶剤中に
2〜50重量%程度の割合で溶解させる。キノンジアジド
化合物、架橋剤、光酸発生剤及び色素の使用量は通常、
アルカリ可溶性樹脂溶液に対して各々、2〜20、2〜2
0、2〜20及び0.1 〜20重量%程度の割合で添加する。
露光には、例えば水銀ランプ等の紫外線、遠紫外線、電
子線もしくはX線等が用いられる。The alkali-soluble resin is usually dissolved in an organic solvent in a proportion of about 2 to 50% by weight. The amount of the quinonediazide compound, the cross-linking agent, the photo-acid generator and the dye used is usually
2-20, 2-2 for alkali-soluble resin solution, respectively
It is added in a proportion of 0, 2 to 20 and 0.1 to 20% by weight.
For the exposure, for example, ultraviolet rays such as a mercury lamp, deep ultraviolet rays, electron beams or X-rays are used.
【0023】[0023]
【実施例】次に、実施例及び参考例により本発明を更に
具体的に説明する。実施例及び参考例中、部は重量部を
表わす。尚、以下の参考例における共通の条件は次のと
おりである。レジスト及びカラーフィルター(着色パタ
ーン)の製造方法については、シリコンウエハーに色
素、有機溶剤及びアルカリ可溶性樹脂、並びにキノンジ
アジド化合物(又は、架橋剤及び光酸発生剤)を含むレ
ジスト組成物をスピンコートし、加熱により溶剤を蒸発
させた後、マスクを通して露光を行い、キノンジアジド
化合物(又は光酸発生剤)を分解させた。次いで、加熱
後、現像して着色パターンを得た。露光は日立製作所
(株)製i線露光ステッパーHITACHI LD-5010-i(NA=0.
40) 或いはニコン社製g線露光ステッパーNSR1505 G3C
(NA=0.42) により行った。又、現像液は住友化学工業
(株)製SOPDを用いた。EXAMPLES Next, the present invention will be described more specifically by way of Examples and Reference Examples. In the examples and reference examples, parts represent parts by weight. The common conditions in the following reference examples are as follows. Regarding the method for producing the resist and the color filter (coloring pattern), a silicon wafer is spin-coated with a resist composition containing a dye, an organic solvent and an alkali-soluble resin, and a quinonediazide compound (or a crosslinking agent and a photo-acid generator), After the solvent was evaporated by heating, exposure was performed through a mask to decompose the quinonediazide compound (or photoacid generator). Then, after heating, development was performed to obtain a colored pattern. Exposure is Hitachi's i-line exposure stepper HITACHI LD-5010-i (NA = 0.
40) Or Nikon g-line exposure stepper NSR1505 G3C
(NA = 0.42). As the developing solution, SOPD manufactured by Sumitomo Chemical Co., Ltd. was used.
【0024】実施例1 銅フタロシアニンスルホン酸(C.I.アシッドブルー249
)2部を含む水溶液、これと当量のジベンジルドデシ
ルアミン及び2−ヘプタノンの混合物を攪拌した。攪拌
終了後、分液して有機層を得た。Example 1 Copper phthalocyanine sulfonic acid (CI Acid Blue 249
) An aqueous solution containing 2 parts, and a mixture of this and an equivalent amount of dibenzyldodecylamine and 2-heptanone were stirred. After completion of stirring, liquid separation was performed to obtain an organic layer.
【0025】実施例2 ジベンジルドデシルアミンに代えてドデシルアミンを用
いる以外は実施例1と同様に操作して有機層を得た。Example 2 An organic layer was obtained in the same manner as in Example 1 except that dodecylamine was used instead of dibenzyldodecylamine.
【0026】参考例1 m−クレゾール/p−クレゾール/ホルムアルデヒド
(反応モル比=5/5/7.5 )混合物から得られたクレ
ゾールノボラック樹脂(ポリスチレン換算重量平均分子
量4300)3.4 部、下式Reference Example 1 3.4 parts of cresol novolac resin (polystyrene-equivalent weight average molecular weight 4300) obtained from a mixture of m-cresol / p-cresol / formaldehyde (reaction molar ratio = 5/5 / 7.5)
【0027】[0027]
【化6】 [Chemical 6]
【0028】で示されるフェノール化合物を用いて製造
されたo−ナフトキノンジアジド−5−スルホン酸エス
テル(平均2個の水酸基がエステル化されている)1.8
部、並びに実施例1及び2で得た有機層の各々を混合し
てポジ型レジスト組成物をそれぞれ得た。上で得たそれ
ぞれのポジ型レジスト組成物を、シリコンウエハーにス
ピンコートした後、有機溶剤を蒸発させた。このシリコ
ンウエハーを露光後、アルカリ現像により露光部を除去
して、各々、1μmの解像度を有するポジ型着色パター
ンを得た。O-naphthoquinonediazide-5-sulfonic acid ester prepared by using the phenolic compound represented by the formula (on average, two hydroxyl groups are esterified) 1.8
Part and each of the organic layers obtained in Examples 1 and 2 were mixed to obtain a positive resist composition. A silicon wafer was spin-coated with each of the positive resist compositions obtained above, and then the organic solvent was evaporated. After exposing this silicon wafer, the exposed portion was removed by alkali development to obtain a positive colored pattern having a resolution of 1 μm.
【0029】実施例3 銅フタロシアニンスルホン酸(C.I.アシッドブルー249
)2部を常法によりスルホニルクロリド化後、実施例
2に準じてドデシルアミンと反応させてスルホンアミド
化合物を得た。Example 3 Copper phthalocyanine sulfonic acid (CI Acid Blue 249
) 2 parts of sulfonyl chloride was converted by a conventional method and then reacted with dodecylamine according to Example 2 to obtain a sulfonamide compound.
【0030】実施例4 ドデシルアミンに代えて3−デシロキシプロピルアミン
を用いる以外は実施例3と同様に操作してスルホンアミ
ド化合物を得た。Example 4 A sulfonamide compound was obtained in the same manner as in Example 3 except that 3-decyloxypropylamine was used in place of dodecylamine.
【0031】参考例2 実施例3及び4で得た各々のスルホンアミド化合物0.8
部、参考例1で用いたクレゾールノボラック樹脂3.4
部、参考例1で用いたo−ナフトキノンジアジド−5−
スルホン酸エステル1.8 部、エチルセロソルブアセテー
ト6部及び乳酸エチル15部を混合してポジ型レジスト組
成物をそれぞれ得た。上で得たそれぞれのポジ型レジス
ト組成物を、シリコンウエハーにスピンコートした後、
有機溶剤を蒸発させた。このシリコンウエハーを露光
後、アルカリ現像により露光部を除去して、各々、1μ
mの解像度を有するポジ型着色パターンを得た。Reference Example 2 Each sulfonamide compound obtained in Examples 3 and 4 0.8
Part, cresol novolac resin used in Reference Example 1 3.4
Part, o-naphthoquinonediazide-5 used in Reference Example 1
A positive resist composition was obtained by mixing 1.8 parts of sulfonic acid ester, 6 parts of ethyl cellosolve acetate and 15 parts of ethyl lactate. After spin-coating each of the positive resist compositions obtained above on a silicon wafer,
The organic solvent was evaporated. After exposing this silicon wafer, the exposed portion was removed by alkali development to obtain 1 μm each.
A positive colored pattern having a resolution of m was obtained.
【0032】実施例5 ヘキスト社製アミノールファストブリリアントピンクRL
(2部)水溶液、これと当量のジベンジルドデシルアミ
ン及び2−ヘプタノンの混合物を攪拌した。攪拌終了
後、分液して有機層を得た。Example 5 Aminor Fast Brilliant Pink RL manufactured by Hoechst
(2 parts) An aqueous solution, and a mixture of this and an equivalent amount of dibenzyldodecylamine and 2-heptanone were stirred. After completion of stirring, liquid separation was performed to obtain an organic layer.
【0033】実施例6 イエロー酸性染料〔住友化学工業(株)製スミノールミ
リングイエローMR〕2部を用いる以外は、実施例2と同
様に操作して有機層を得た。Example 6 An organic layer was obtained in the same manner as in Example 2 except that 2 parts of yellow acid dye [Suminol Milling Yellow MR manufactured by Sumitomo Chemical Co., Ltd.] was used.
【0034】参考例3 実施例5及び6で得た有機層を用いる以外は参考例1と
同様に操作して、各々、1μmの解像度を有するポジ型
のマゼンタ色及びイエロー色パターンを得た。Reference Example 3 The procedure of Reference Example 1 was repeated except that the organic layers obtained in Examples 5 and 6 were used to obtain positive type magenta and yellow color patterns having a resolution of 1 μm, respectively.
【0035】実施例7 アミノールファストブリリアントピンクRL(2部)及び
3−デシロキシプロピルアミンを用いる以外は、実施例
3と同様に操作してスルホンアミド化合物を得た。Example 7 A sulfonamide compound was obtained in the same manner as in Example 3 except that Aminol Fast Brilliant Pink RL (2 parts) and 3-decyloxypropylamine were used.
【0036】参考例4 実施例7で得たスルホンアミド化合物0.8 部、参考例1
で用いたクレゾールノボラック樹脂3.5 部、参考例1で
用いたo−ナフトキノンジアジド−5−スルホン酸エス
テル1.8 部、エチルセロソルブアセテート6部及び乳酸
エチル15部を混合してポジ型レジスト組成物を得た。上
で得たポジ型レジスト組成物を、シリコンウエハーにス
ピンコートした後、有機溶剤を蒸発させた。このシリコ
ンウエハーを露光後、アルカリ現像により露光部を除去
して1μmの解像度を有するポジ型マゼンタ色パターン
を得た。Reference Example 4 0.8 part of the sulfonamide compound obtained in Example 7, Reference Example 1
3.5 parts of the cresol novolac resin used in Example 1, 1.8 parts of o-naphthoquinonediazide-5-sulfonic acid ester used in Reference Example 1, 6 parts of ethyl cellosolve acetate and 15 parts of ethyl lactate were mixed to obtain a positive resist composition. . The positive resist composition obtained above was spin-coated on a silicon wafer, and then the organic solvent was evaporated. After exposing this silicon wafer, the exposed portion was removed by alkali development to obtain a positive type magenta color pattern having a resolution of 1 μm.
【0037】参考例5 実施例4で得たスルホンアミド化合物1部、参考例1で
用いたクレゾールノボラック樹脂3部、ヘキサメトキシ
メチロール化メラミン0.3 部、下式Reference Example 5 1 part of the sulfonamide compound obtained in Example 4, 3 parts of cresol novolac resin used in Reference Example 1, 0.3 part of hexamethoxymethylolated melamine, the following formula
【0038】[0038]
【化7】 [Chemical 7]
【0039】で示される光酸発生剤0.2 部、2−ヘプタ
ノン15部及びジメチルホルムアミド5部を混合してネガ
型レジスト組成物を得た。このネガ型レジスト組成物を
シリコンウエハーにスピンコートした後、有機溶剤を蒸
発させた。このシリコンウエハーを露光後、120 ℃・3
分加熱し、次いでアルカリ現像して1μmの解像度を有
するネガ型着色パターン(シアンカラーフィルター)を
得た。A negative resist composition was obtained by mixing 0.2 part of the photoacid generator represented by the formula (2), 15 parts of 2-heptanone and 5 parts of dimethylformamide. A silicon wafer was spin-coated with this negative resist composition, and then the organic solvent was evaporated. After exposing this silicon wafer, 120 ℃ ・ 3
It was heated for a minute and then alkali-developed to obtain a negative type colored pattern (cyan color filter) having a resolution of 1 μm.
【0040】[0040]
【発明の効果】本発明のカラーフィルター用色素を用い
れば、微細度及び着色パターンの安定性等の諸性能に優
れたカラーフィルターを容易に製造することができる。EFFECT OF THE INVENTION By using the color filter dye of the present invention, it is possible to easily produce a color filter which is excellent in various properties such as fineness and stability of a coloring pattern.
Claims (2)
のスルホンアミド化合物であり、且つ、有機溶剤及びア
ルカリ水溶液に可溶なカラーフィルター用色素。1. A dye for a color filter, which is an amine salt of an acid dye or a sulfonamide compound of an acid dye, and is soluble in an organic solvent and an aqueous alkaline solution.
料である請求項1に記載のカラーフィルター用シアン色
素。2. The cyan dye for a color filter according to claim 1, wherein the acidic dye is a dye having a phthalocyanine skeleton.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20529892A JP3476208B2 (en) | 1992-07-31 | 1992-07-31 | Dyes for color filters |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20529892A JP3476208B2 (en) | 1992-07-31 | 1992-07-31 | Dyes for color filters |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0651115A true JPH0651115A (en) | 1994-02-25 |
JP3476208B2 JP3476208B2 (en) | 2003-12-10 |
Family
ID=16504652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20529892A Expired - Lifetime JP3476208B2 (en) | 1992-07-31 | 1992-07-31 | Dyes for color filters |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3476208B2 (en) |
Cited By (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999029784A1 (en) * | 1997-12-09 | 1999-06-17 | Nippon Kayaku Kabushiki Kaisha | Novel salts and photosensitive colored resin compositions containing the same |
JP2002196481A (en) * | 2000-12-22 | 2002-07-12 | Sumitomo Chem Co Ltd | Coloring photosensitive resin composition with excellent storage stability |
JP2007094181A (en) * | 2005-09-29 | 2007-04-12 | Fujifilm Corp | Dyestuff-containing negative curing composition, color filter, and manufacturing method thereof |
EP1975702A2 (en) | 2007-03-29 | 2008-10-01 | Fujifilm Corporation | Colored photocurable composition for solid state image pick-up device, color filter and method for production thereof, and solid state image pick-up device |
EP2028544A2 (en) | 2007-08-22 | 2009-02-25 | FUJIFILM Corporation | Colored photosensitive composition, color filter, and method for manufacturing color filter |
EP2037323A2 (en) | 2007-07-17 | 2009-03-18 | FUJIFILM Corporation | Photosensitive compositions, curable compositions, novel compounds, photopolymerizable compositions, color filters, and planographic printing plate precursors |
WO2009038038A1 (en) | 2007-09-19 | 2009-03-26 | Fujifilm Corporation | Acetylene compound, salt thereof, condensate thereof, and composition thereof |
EP2055746A2 (en) | 2007-10-31 | 2009-05-06 | Fujifilm Corporation | Colored curable composition, color filter, method of producing the same, and solid state image pickup device. |
WO2009057523A1 (en) | 2007-11-01 | 2009-05-07 | Fujifilm Corporation | Pigment dispersion composition, curable color composition, color filter and method for producing the same |
EP2075632A1 (en) | 2007-12-28 | 2009-07-01 | FUJIFILM Corporation | Dye-containing negative curable composition, color filter, method of producing the same, and solid-state image sensor |
EP2085821A1 (en) | 2008-01-31 | 2009-08-05 | FUJIFILM Corporation | Dye-containing negative curable composition, color filter and method of producing color filter |
WO2009113447A1 (en) | 2008-03-10 | 2009-09-17 | 富士フイルム株式会社 | Colored curable composition, color filter and solid-state imaging device |
EP2105443A1 (en) | 2008-03-24 | 2009-09-30 | FUJIFILM Corporation | Oxime derivatives and their use in photopolymerizable compositions for colour filters |
EP2113807A2 (en) | 2008-04-30 | 2009-11-04 | Fujifilm Corporation | Optical material having a colored optically anisotropic layer |
EP2141206A1 (en) | 2008-06-30 | 2010-01-06 | FUJIFILM Corporation | Novel compound, polymerizable composition, color filter and production method thereof, solid-state imaging device, and planographic printing plate precursor |
EP2154568A1 (en) | 2008-08-14 | 2010-02-17 | FUJIFILM Corporation | Color filter and production method thereof, and solid-state image sensor using the same |
WO2010038675A1 (en) | 2008-09-30 | 2010-04-08 | 富士フイルム株式会社 | Negative-type dye-containing curable composition, color filter and method for production thereof both utilizing the composition, and solid imaging element |
WO2010119924A1 (en) | 2009-04-16 | 2010-10-21 | 富士フイルム株式会社 | Polymerizable composition for color filter, color filter, and solid imaging element |
EP2362266A2 (en) | 2010-02-26 | 2011-08-31 | Fujifilm Corporation | Colored curable composition, color filter and method of producing color filter, solid-state image sensor and liquid crystal display device |
US8212974B2 (en) | 2009-04-24 | 2012-07-03 | Toppan Printing Co., Ltd. | Blue color composition containing dye, color filter and liquid crystal display device and organic EL display provided with the color filter |
EP2472330A1 (en) | 2010-12-28 | 2012-07-04 | Fujifilm Corporation | Titanium black dispersion composition for forming light blocking film and method of producing the same, black radiation-sensitive composition, black cured film, solid-state imaging element, and method of producing black cured film |
KR20140006871A (en) | 2011-02-10 | 2014-01-16 | 후지필름 가부시키가이샤 | Colored curable composition, and color filter |
WO2014087901A1 (en) | 2012-12-03 | 2014-06-12 | 富士フイルム株式会社 | Ir-cut filter and manufacturing method thereof, solid state image pickup device, and light blocking film formation method |
WO2014087900A1 (en) | 2012-12-03 | 2014-06-12 | 富士フイルム株式会社 | Solid-state image capture element retaining substrate and fabrication method therefor, and solid-state image capture device |
KR20140122264A (en) | 2012-03-02 | 2014-10-17 | 후지필름 가부시키가이샤 | Colored curable composition and color filter |
WO2015033814A1 (en) | 2013-09-06 | 2015-03-12 | 富士フイルム株式会社 | Colored composition, cured film, color filter, color-filter manufacturing method, solid-state imaging element, image display device, polymer, and xanthene dye |
JPWO2014002335A1 (en) * | 2012-06-26 | 2016-05-30 | 保土谷化学工業株式会社 | Xanthene dye for color filter and color filter using the dye |
WO2019176409A1 (en) | 2018-03-13 | 2019-09-19 | 富士フイルム株式会社 | Method for manufacturing cured film, and method for manufacturing solid-state imaging element |
WO2020049930A1 (en) | 2018-09-07 | 2020-03-12 | 富士フイルム株式会社 | Vehicular headlight unit, light-shielding film for headlight, and method for producing light-shielding film for headlight |
-
1992
- 1992-07-31 JP JP20529892A patent/JP3476208B2/en not_active Expired - Lifetime
Cited By (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999029784A1 (en) * | 1997-12-09 | 1999-06-17 | Nippon Kayaku Kabushiki Kaisha | Novel salts and photosensitive colored resin compositions containing the same |
JP2002196481A (en) * | 2000-12-22 | 2002-07-12 | Sumitomo Chem Co Ltd | Coloring photosensitive resin composition with excellent storage stability |
JP4513208B2 (en) * | 2000-12-22 | 2010-07-28 | 住友化学株式会社 | Colored photosensitive resin composition with excellent storage stability |
JP2007094181A (en) * | 2005-09-29 | 2007-04-12 | Fujifilm Corp | Dyestuff-containing negative curing composition, color filter, and manufacturing method thereof |
JP4652197B2 (en) * | 2005-09-29 | 2011-03-16 | 富士フイルム株式会社 | Dye-containing negative curable composition, color filter and method for producing the same |
EP1975702A2 (en) | 2007-03-29 | 2008-10-01 | Fujifilm Corporation | Colored photocurable composition for solid state image pick-up device, color filter and method for production thereof, and solid state image pick-up device |
EP2037323A2 (en) | 2007-07-17 | 2009-03-18 | FUJIFILM Corporation | Photosensitive compositions, curable compositions, novel compounds, photopolymerizable compositions, color filters, and planographic printing plate precursors |
EP2207062A2 (en) | 2007-07-17 | 2010-07-14 | FUJIFILM Corporation | Photosensitive compositions, curable compositions, novel compounds, photopolymerizable compositions, color filters, and planographic printing plate precursors |
EP2028544A2 (en) | 2007-08-22 | 2009-02-25 | FUJIFILM Corporation | Colored photosensitive composition, color filter, and method for manufacturing color filter |
WO2009038038A1 (en) | 2007-09-19 | 2009-03-26 | Fujifilm Corporation | Acetylene compound, salt thereof, condensate thereof, and composition thereof |
EP2055746A2 (en) | 2007-10-31 | 2009-05-06 | Fujifilm Corporation | Colored curable composition, color filter, method of producing the same, and solid state image pickup device. |
WO2009057523A1 (en) | 2007-11-01 | 2009-05-07 | Fujifilm Corporation | Pigment dispersion composition, curable color composition, color filter and method for producing the same |
EP2075632A1 (en) | 2007-12-28 | 2009-07-01 | FUJIFILM Corporation | Dye-containing negative curable composition, color filter, method of producing the same, and solid-state image sensor |
EP2085821A1 (en) | 2008-01-31 | 2009-08-05 | FUJIFILM Corporation | Dye-containing negative curable composition, color filter and method of producing color filter |
WO2009113447A1 (en) | 2008-03-10 | 2009-09-17 | 富士フイルム株式会社 | Colored curable composition, color filter and solid-state imaging device |
EP2105443A1 (en) | 2008-03-24 | 2009-09-30 | FUJIFILM Corporation | Oxime derivatives and their use in photopolymerizable compositions for colour filters |
EP2113807A2 (en) | 2008-04-30 | 2009-11-04 | Fujifilm Corporation | Optical material having a colored optically anisotropic layer |
EP2141206A1 (en) | 2008-06-30 | 2010-01-06 | FUJIFILM Corporation | Novel compound, polymerizable composition, color filter and production method thereof, solid-state imaging device, and planographic printing plate precursor |
EP2154568A1 (en) | 2008-08-14 | 2010-02-17 | FUJIFILM Corporation | Color filter and production method thereof, and solid-state image sensor using the same |
WO2010038675A1 (en) | 2008-09-30 | 2010-04-08 | 富士フイルム株式会社 | Negative-type dye-containing curable composition, color filter and method for production thereof both utilizing the composition, and solid imaging element |
WO2010119924A1 (en) | 2009-04-16 | 2010-10-21 | 富士フイルム株式会社 | Polymerizable composition for color filter, color filter, and solid imaging element |
US8212974B2 (en) | 2009-04-24 | 2012-07-03 | Toppan Printing Co., Ltd. | Blue color composition containing dye, color filter and liquid crystal display device and organic EL display provided with the color filter |
EP2362266A2 (en) | 2010-02-26 | 2011-08-31 | Fujifilm Corporation | Colored curable composition, color filter and method of producing color filter, solid-state image sensor and liquid crystal display device |
EP2568338A1 (en) | 2010-02-26 | 2013-03-13 | Fujifilm Corporation | Colored curable composition, color filter and method of producing color filter, solid-state image sensor and liquid crystal display device |
EP2472330A1 (en) | 2010-12-28 | 2012-07-04 | Fujifilm Corporation | Titanium black dispersion composition for forming light blocking film and method of producing the same, black radiation-sensitive composition, black cured film, solid-state imaging element, and method of producing black cured film |
KR20140006871A (en) | 2011-02-10 | 2014-01-16 | 후지필름 가부시키가이샤 | Colored curable composition, and color filter |
KR20140122264A (en) | 2012-03-02 | 2014-10-17 | 후지필름 가부시키가이샤 | Colored curable composition and color filter |
JPWO2014002335A1 (en) * | 2012-06-26 | 2016-05-30 | 保土谷化学工業株式会社 | Xanthene dye for color filter and color filter using the dye |
WO2014087901A1 (en) | 2012-12-03 | 2014-06-12 | 富士フイルム株式会社 | Ir-cut filter and manufacturing method thereof, solid state image pickup device, and light blocking film formation method |
WO2014087900A1 (en) | 2012-12-03 | 2014-06-12 | 富士フイルム株式会社 | Solid-state image capture element retaining substrate and fabrication method therefor, and solid-state image capture device |
WO2015033814A1 (en) | 2013-09-06 | 2015-03-12 | 富士フイルム株式会社 | Colored composition, cured film, color filter, color-filter manufacturing method, solid-state imaging element, image display device, polymer, and xanthene dye |
WO2019176409A1 (en) | 2018-03-13 | 2019-09-19 | 富士フイルム株式会社 | Method for manufacturing cured film, and method for manufacturing solid-state imaging element |
WO2020049930A1 (en) | 2018-09-07 | 2020-03-12 | 富士フイルム株式会社 | Vehicular headlight unit, light-shielding film for headlight, and method for producing light-shielding film for headlight |
Also Published As
Publication number | Publication date |
---|---|
JP3476208B2 (en) | 2003-12-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3476208B2 (en) | Dyes for color filters | |
JP3837581B2 (en) | Azo dye for color filter and method for producing color filter | |
JPH06194828A (en) | Resist composition for color filter | |
JPH0635183A (en) | Positive type resist composition and production of color filter using the same | |
JPH0635182A (en) | Positive type resist composition and production of color filter using the same | |
JP2582578B2 (en) | Photosensitive resin composition | |
CN108027555B (en) | Positive photosensitive resin composition | |
JP3508199B2 (en) | Resist composition for black matrix, black matrix obtained by the composition | |
JP3387541B2 (en) | Dye for resist composition for forming color filter | |
JPS62153950A (en) | Positive type radiation sensitive resin composition | |
JP3575045B2 (en) | Color filter | |
JPH0651514A (en) | Negative type resist composition and production of color filter using the same | |
JP4569759B2 (en) | Dye-containing resist composition and color filter using the same | |
JPH0643637A (en) | Method for holding pattern | |
JP3203843B2 (en) | Resist composition for color filter | |
JP3393919B2 (en) | Positive resist composition for color filter formation | |
JPH07306309A (en) | Color filter element composition, microlens array composition, color filter element, microlens array and production of color filter having the element or array | |
JPH08220740A (en) | Positive type photosensitive composition | |
JPH06194826A (en) | Positive resist composition and production of color filter using the composition | |
JPH06194827A (en) | Resist composition for color filter | |
JPH07152154A (en) | Resist composition | |
JPH06148888A (en) | Positive photosensitive material for formation of color filter | |
JP3796759B2 (en) | Dye for green filter, resist composition containing the dye, method for producing green filter using the composition, and green filter obtained by the method | |
JP2006008789A (en) | Dyestuff, colored photosensitive composition containing the dyestuff, color filter using the colored photosensitive composition and image sensor equipped with the color filter | |
JPH07134207A (en) | Color filter |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080926 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080926 Year of fee payment: 5 |
|
RD05 | Notification of revocation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D05 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080926 Year of fee payment: 5 |
|
RD05 | Notification of revocation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D05 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080926 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090926 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100926 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110926 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110926 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120926 Year of fee payment: 9 |
|
EXPY | Cancellation because of completion of term |