JPH06306668A - Method and device for regenerating manganate to permanganate - Google Patents
Method and device for regenerating manganate to permanganateInfo
- Publication number
- JPH06306668A JPH06306668A JP5112492A JP11249293A JPH06306668A JP H06306668 A JPH06306668 A JP H06306668A JP 5112492 A JP5112492 A JP 5112492A JP 11249293 A JP11249293 A JP 11249293A JP H06306668 A JPH06306668 A JP H06306668A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- permanganate
- manganate
- electrolytic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes For Compound Or Non-Metal Manufacture (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、マンガン酸塩から過マ
ンガン酸塩への電解再生法およびその装置に関し、詳し
くは、アルカリ過マンガン酸塩溶液中に発生したマンガ
ン酸塩に対して電気的に酸化して過マンガン酸塩に再生
することに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for electrolytically regenerating manganate to permanganate and an apparatus therefor, and more specifically, it relates to an electric regeneration of manganate generated in an alkaline permanganate solution. Oxidization into permanganate to regenerate it into permanganate.
【0002】[0002]
【従来の技術】一般に、プリント基板の製造のための処
理工程で用いられる腐蝕溶液では、酸化剤として過マン
ガン酸塩を含むアルカリ性浴であるため腐蝕操作する
と、過マンガン酸塩が転化してマンガン酸塩の沈殿物が
分解副生物として蓄積され、腐蝕液の能力低下を来すこ
とが知れ、特に、プリント基板として多層配線回路板の
製造ではドリリングによる摩擦熱で、溶融した樹脂(ス
ミア)がホール内の内層回路断面に付着して接続障害を
生じる。そこでこのスミアを除去するためにアルカリ過
マンガン酸塩溶液を用いてスミアを除去するのである
が、プリント基板を処理することで過マンガン酸塩がマ
ンガン酸塩へと変化してしまい、さらに反応がすすむと
二酸化マンガンのスラッジとなってしまう。そこで、こ
の二酸化マンガンのスラッジを発生させないようマンガ
ン酸塩の段階で過マンガン酸塩に再生するように、数種
の方法が見出されてきた。その方法としては再生剤に
よる方法(米国特許第4592852号)単筒電極式
電解再生装置(図6に示すように多孔筒対a内に中心に
陰極棒bとその周囲に陽極棒cとを備えたもの)隔壁
電極式電解再生装置(特開平1−294882号公報)
などが知られている。2. Description of the Related Art Generally, a corrosive solution used in a processing step for manufacturing a printed circuit board is an alkaline bath containing permanganate as an oxidant, and therefore, when corrosive operation is performed, permanganate is converted into manganese. It is known that the precipitate of acid salt accumulates as a decomposition by-product, which lowers the ability of the corrosive liquid. In particular, in the production of a multilayer wiring circuit board as a printed circuit board, the molten resin (smear) is generated by the frictional heat caused by drilling. It adheres to the inner layer circuit cross section in the hole and causes a connection failure. Therefore, in order to remove this smear, smear is removed using an alkaline permanganate solution, but by treating the printed circuit board, permanganate is changed to manganate, and further reaction If you proceed, it will become manganese dioxide sludge. Therefore, several methods have been found to regenerate permanganate at the manganate stage so as not to generate this manganese dioxide sludge. As a method thereof, a method using a regenerant (U.S. Pat. No. 4,592,852) is provided with a single cylinder electrode type electrolytic regenerator (as shown in FIG. 6, a perforated cylinder pair a is provided with a cathode rod b at the center and an anode rod c around the same. Partition electrode type electrolytic regenerator (Japanese Patent Laid-Open No. 1-294882)
Are known.
【0003】[0003]
【発明が解決しようとする課題】ところが、従来の再生
剤による方法では同時にスラッジの発生も認められ、
また単筒電極式電解再生装置では電流に対する電解再
生効率が10〜15%と低く、また隔壁電極式電解再生
装置では再生効率はアップするが、陽極側の再生しよ
うとする溶液と陰極側のアルカリ金属水酸化物の水溶液
とが、だんだんと混ざっていってしまう等取扱いが難し
く再生効率も悪く問題であった。本発明は、これら従来
の諸欠点を容易に排除しようとするもので、マンガン酸
塩から過マンガン酸塩への電解再生効率を著しく向上さ
せ、かつ取扱いもすこぶる容易である電解再生法及びそ
の装置を提供することを目的とするものである。However, in the conventional method using the regenerant, the generation of sludge is recognized at the same time,
In addition, the electrolytic regeneration efficiency with respect to current is as low as 10 to 15% in the single-tube electrode type electrolytic regenerator, and the regeneration efficiency is improved in the partition electrode type electrolytic regenerator, but the solution to be regenerated on the anode side and the alkali on the cathode side are regenerated. It was difficult to handle such that the metal hydroxide solution was gradually mixed with the aqueous solution, and the regeneration efficiency was poor, which was a problem. SUMMARY OF THE INVENTION The present invention is intended to easily eliminate these conventional drawbacks, significantly improves the electrolytic regeneration efficiency from manganate to permanganate, and is also extremely easy to handle and its apparatus. It is intended to provide.
【0004】[0004]
【課題を解決するための手段】本発明は、アルカリ過マ
ンガン酸塩溶液中に浸漬されている陰極と陽極とに印加
して電解処理するに際し、前記陰極の一部を不電導体で
被覆して陰極対陽極の面積比を1:10〜1:1000
として接近対設すると共に、電解再生電極を並列接続し
て電流を流して電解再生することを特徴とするマンガン
酸塩から過マンガン酸塩への再生法である。また、本発
明の装置ではアルカリ過マンガン酸塩溶液を流入するタ
ンク本体内に陰極と陽極とからなる電極を複数溶液浸漬
状態下に対設配備した電解再生装置において、前記陰極
の一部を不電導体で被覆し、陰極対陽極の面積比を1:
10〜1:1000とするように陽極をハニカム形また
は筒形に棒状陰極の周囲に接近対設すると共に、陽極を
並列に接続配備し、液循環ポンプのある循環経路で前記
タンク本体をデスミア処理槽に連結したことを特徴とす
るマンガン酸塩から過マンガン酸塩への再生装置であ
る。According to the present invention, a part of the cathode is coated with a non-conductive material during electrolytic treatment by applying it to a cathode and an anode immersed in an alkaline permanganate solution. And the area ratio of cathode to anode is 1:10 to 1: 1000.
In addition, the method is a regeneration method from manganate to permanganate, which is characterized in that electrolytic regeneration is performed by connecting electrolytic regeneration electrodes in parallel with each other and passing an electric current. Further, in the apparatus of the present invention, in the electrolytic regenerator in which a plurality of electrodes consisting of a cathode and an anode are provided in a tank main body into which the alkaline permanganate solution is introduced in a state of being immersed in a plurality of solutions, a part of the cathode is not provided. Cover with a conductor and make the area ratio of cathode to anode 1:
The anodes are arranged in a honeycomb or tubular shape in the vicinity of a rod-shaped cathode close to each other so as to have a ratio of 10 to 1: 1000, and the anodes are connected and arranged in parallel, and the tank body is desmeared in a circulation path having a liquid circulation pump. A manganate to permanganate regenerator characterized by being connected to a tank.
【0005】[0005]
【作用】アルカリ過マンガン酸塩溶液中において、電気
酸化によって発生したマンガン酸塩を含む溶液を陰極と
陽極とのあるタンクに入れられ、両極を浸漬された状態
として電流を流す。即ち、単筒式の電解再生装置の場
合、陰極付近では発生した水素により過マンガン酸塩か
らマンガン酸塩になる反応が起こるので、陰極の一部を
不電導対で被覆し、水素の発生を一部押え、さらに、再
生量(マンガン酸塩から過マンガン酸塩)を増やすため
に陽極を並列につなぎ、同時に陰極も陽極と一対とな
り、陰極対陽極の面積比を1:10〜1:1000とし
て過マンガン酸塩を増加させることができ、かつ陰極と
陽極の距離を近づけることにより、低い電圧で電流を1
00Aまで流すことが容易に可能となり、取扱いも著し
く簡便化できる。In an alkaline permanganate solution, a solution containing manganate generated by electro-oxidation is placed in a tank having a cathode and an anode, and both electrodes are immersed and a current is passed. That is, in the case of a single-cylinder electrolytic regenerator, hydrogen generated near the cathode causes a reaction of converting permanganate to manganate, so that a part of the cathode is covered with a non-conductive pair to prevent generation of hydrogen. In order to increase the amount of regeneration (manganese salt to permanganate salt), the anodes were connected in parallel, and at the same time, the cathode also became a pair with the anode, and the area ratio of cathode to anode was 1:10 to 1: 1000. As a result, the permanganate can be increased and the current can be reduced to 1 at a low voltage by reducing the distance between the cathode and the anode.
It is possible to easily flow up to 00A, and handling can be significantly simplified.
【0006】[0006]
【実施例】本発明の実施例を図1乃至図5の例で説明す
ると、再生方法に用いられるタンク本体3に不電導体で
一部を被覆した陰極1と、ハニカム形または円筒形乃至
角筒形の陽極2とを対として、さらに陰極対陽極の面積
比を1:10乃至1:1000にして対設すると共に、
各陽極2を並列に接続するほか、陰極1と陽極2との距
離を可及的に接近させ、前記タンク本体3をアルカリ過
マンガン酸塩溶液5を含むデスミア処理槽4に液循環ポ
ンプ6のある経路7と、返送経路8とで配管接続してあ
る。(図1)EXAMPLE An example of the present invention will be described with reference to the examples of FIGS. 1 to 5. A tank body 3 used in a regeneration method has a cathode 1 partially covered with a non-conductive material, and a honeycomb shape or a cylindrical shape or a square shape. The pair of cylindrical anodes 2 are provided as a pair, and the area ratio of the cathodes to the anodes is set to 1:10 to 1: 1000, and the pair is arranged in pairs.
In addition to connecting the anodes 2 in parallel, the cathode 1 and the anode 2 are made as close as possible to each other, and the tank body 3 is placed in a desmear treatment tank 4 containing an alkaline permanganate solution 5 and a liquid circulation pump 6 is provided. A certain route 7 and a return route 8 are connected by piping. (Fig. 1)
【0007】前記陰極1は、銅などの電導材よりなる棒
状の電極で、一部をテフロンなどの不電導対11 でコー
ティングしたもの、例えば全長1000mmで3φの銅
棒の下方850mmにわたり、テフロンコーティング部
分43mmとコーティングなしの部分7mmとを断続的
に繰り返ししたものを複数本、テフロンなどのプラスチ
ックス製支持板10の嵌合孔14を貫通して、銅製−接
続板21に接続支持され、該陰極1に接近してハニカム
形の陽極2がネジ部のある接続棒20が溶着され、その
先端部は前記支持板10の嵌合孔15を貫通してナット
19で固着されている。(図2及び図3)この陽極2
は、ハニカム形或いは円筒形を多数集合したものを用
い、その各筒体中心部に陰極1が配備されるように配慮
されているが、必要に応じ陽極2はパンチング穴が多数
ある多孔板で筒形にしたものを用いてもよい。[0007] The cathode 1 is a rod-shaped electrode made of a conductive material such as copper, over a portion which is coated with a non-conductive to 1 1, such as Teflon, for example below 850mm of copper rod in 3φ full length 1000 mm, Teflon A plurality of products obtained by intermittently repeating a coated part 43 mm and a non-coated part 7 mm penetrates through the fitting holes 14 of the plastic support plate 10 such as Teflon, and is connected and supported by the copper-connecting plate 21. A honeycomb-shaped anode 2 is welded to a connecting rod 20 having a threaded portion in the vicinity of the cathode 1, and a tip portion thereof penetrates a fitting hole 15 of the support plate 10 and is fixed by a nut 19. (FIGS. 2 and 3) This anode 2
Is made up of a large number of honeycomb-shaped or cylindrical-shaped aggregates, and it is considered that the cathode 1 is arranged at the center of each cylinder, but the anode 2 is a perforated plate having a large number of punching holes as necessary. A cylindrical shape may be used.
【0008】なお、前記接続棒20及び−接続板21に
は、整流器9に接続される−+接続ケーブルが各ターミ
ナルに連接され、陰極1及び陽極2との電極維持を支持
板10で適確に行えるようになっていて、該支持板10
を上蓋体30に一体組込構造としてある。(図4)そし
て、この電極は前記タンク本体3に配備してアウトタン
ク形としてあるが、デスミア処理槽4に直接配備してタ
ンク本体3を省略してインタンク形態としてもよい。The connection rod 20 and the-connection plate 21 are connected to each terminal of a- + connection cable connected to the rectifier 9, so that the support plate 10 can properly maintain the electrodes of the cathode 1 and the anode 2. The support plate 10
Is integrated with the upper lid body 30. (FIG. 4) Then, although this electrode is provided in the tank body 3 and has an out-tank type, it may be provided directly in the desmear treatment tank 4 and the tank body 3 may be omitted to have an in-tank type.
【0009】前記支持板10には、図5に示すように棒
状陰極1及び陽極2の接続棒20を接続嵌挿する嵌合孔
14,15がそれぞれ設けられ、支持板10から貫通す
る棒状陰極1及び接続棒20に接続ケーブルが接続する
ようにしてあるが、ターミナル片を介在して各棒端部に
接続してもよい。なお、前記接続板21には棒状陰極1
がナット12 で固着されていて支持板10に組み込まれ
ている。As shown in FIG. 5, the support plate 10 is provided with fitting holes 14 and 15 for connecting and inserting the connecting rods 20 of the rod-shaped cathode 1 and the anode 2, respectively, and the rod-shaped cathode penetrating from the support plate 10. Although the connecting cable is connected to 1 and the connecting rod 20, it may be connected to the end of each rod through a terminal piece. The connecting plate 21 has a rod-shaped cathode 1
There is incorporated in the support plate 10 have been secured by a nut 1 2.
【0010】図中19は取付ナットで接続棒20を固定
するために用いられる。25はスラッジ排出弁、26,
27,28は制御弁、29は電極カバーで支持板10上
に必要に応じ配備される。30は上蓋体で支持板10お
よび−接続板21を支持タンク本体3にボルト止めされ
る。Reference numeral 19 in the figure is used for fixing the connecting rod 20 with a mounting nut. 25 is a sludge discharge valve, 26,
Reference numerals 27 and 28 are control valves, and 29 is an electrode cover, which is provided on the support plate 10 as required. Reference numeral 30 denotes an upper lid body, and the support plate 10 and the connection plate 21 are bolted to the support tank body 3.
【0011】実施例では、アルカリ過マンガン酸塩溶液
中に発生したマンガン酸塩に対して使用するが、発生し
たマンガン酸塩を電気的に酸化し、過マンガン酸塩に再
生するのに、電極の材質は電気の通りやすいものとする
ことが配慮され、電極の構造は陽極2をハニカム状の角
筒または円筒形のものとし、並列に接続し、それぞれの
陽極2の真ん中に陰極1を通すようにし、陰極1と陽極
2の距離を近づけることにより、低い電圧で電流を10
0Aまで流すことが可能となった。In the embodiment, the manganate generated in the alkaline permanganate solution is used. However, in order to electrically oxidize the generated manganate and regenerate it into permanganate, the electrode is used. It is taken into consideration that the material of the electrode should be easy for electricity to pass through, and the structure of the electrode is to make the anode 2 into a honeycomb-shaped rectangular tube or cylindrical shape, connect them in parallel, and pass the cathode 1 in the middle of each anode 2. In this way, by bringing the cathode 1 and the anode 2 closer to each other, the current is reduced to 10 at a low voltage.
It became possible to flow up to 0A.
【0012】この場合、図1の例で表1の初期条件で1
00Aで32.5時間、電解再生を続けた結果次の通り
となった。 タンク内の溶液の分析を行った結果 過マンガン酸カリウム 44.71g/l マンガン酸カリウム 5.52g/l となり、初期と比較すると過マンガン酸塩は9288g
(即ち25.24g/l)増加し、一方マンガン酸塩は
8721g(即ち23.70g/l)減少した。In this case, in the example of FIG.
As a result of continuing electrolytic regeneration at 00A for 32.5 hours, the results were as follows. As a result of analyzing the solution in the tank, potassium permanganate was 44.71 g / l, potassium manganate was 5.52 g / l, and as compared with the initial stage, 9288 g of permanganate was obtained.
(Ie 25.24 g / l) while manganate decreased by 8721 g (ie 23.70 g / l).
【0013】[0013]
【表1】 [Table 1]
【0014】また、表2に示すマンガン酸塩濃度におい
て、電流に対する電解再生効率は表2の通りであった。
従って、マンガン酸塩の濃度が15g/lまでは約50
%の電解再生効率が得られる。また、電解再生によるマ
ンガン酸塩濃度の平衡点が5g/lという低い濃度の押
さえられるため、マンガン酸塩からさらに反応して発生
する二酸化マンガンのスラッジも押さえることが出来
る。Further, at the manganate concentrations shown in Table 2, the electrolytic regeneration efficiency with respect to the electric current was as shown in Table 2.
Therefore, when the concentration of manganate is up to 15 g / l, it is about 50
% Electrolytic regeneration efficiency is obtained. Further, since the equilibrium point of the manganate concentration by electrolytic regeneration is suppressed to a low concentration of 5 g / l, manganese dioxide sludge generated by further reaction from the manganate can also be suppressed.
【0015】[0015]
【表2】 [Table 2]
【0016】[0016]
【発明の効果】本発明は、陰極の一部を不電導体で被覆
して陰極対陽極の面積比を1:10〜1:1000とし
て接近対設すると共に、電解再生電極を並列接続して電
流を流して電解再生することにより、電流に対する電解
再生効率が良く、なおかつ取扱いが容易であって、二酸
化マンガンのスラッジを低減し、満足すべき性能をした
処理ができると共に、デスミア処理の連続的処理が容易
にできるので、その生産性を大巾に向上できるし、低コ
ストで非常に有利な再生法およびその再生装置とするこ
とができる。According to the present invention, a part of the cathode is covered with a non-conductive material so that the area ratio of the cathode to the anode is 1:10 to 1: 1000, and the electrolytic regeneration electrodes are connected in parallel. By electrolytically regenerating by passing an electric current, the electrolytic regeneration efficiency against the electric current is good, and it is easy to handle, the sludge of manganese dioxide is reduced, the treatment with satisfactory performance can be performed, and the desmear treatment is continuously performed. Since the treatment can be facilitated, the productivity can be greatly improved, and the regeneration method and the regeneration device can be provided at a low cost and which is very advantageous.
【図1】本発明の実施例の系統説明図である。FIG. 1 is a system explanatory diagram of an embodiment of the present invention.
【図2】図1の例で用いられる再生装置の電極の平面図
である。FIG. 2 is a plan view of electrodes of a reproducing device used in the example of FIG.
【図3】図2の例の一部の切断側面図である。3 is a cutaway side view of a portion of the example of FIG.
【図4】図2の例の陰極部の分離状態の斜視図である。FIG. 4 is a perspective view of the cathode part of the example of FIG. 2 in a separated state.
【図5】図2の例の陽極部の分離状態の斜視図である。5 is a perspective view of the anode part of the example of FIG. 2 in a separated state.
【図6】従来例の単筒電極式電解再生装置の一部切欠し
た斜視図である。FIG. 6 is a partially cutaway perspective view of a conventional single-tube electrode type electrolytic regenerator.
1 陰極 2 陽極 3 タンク本体 4 デアミス処理槽 5 アルカリ過マンガン酸塩溶液 6 液循環ポンプ 7 経路 8 返送経路 9 整流器 10 支持板 20 接続棒 21 −接続板 30 上蓋体 1 Cathode 2 Anode 3 Tank body 4 Deamis treatment tank 5 Alkaline permanganate solution 6 Liquid circulation pump 7 Route 8 Return route 9 Rectifier 10 Support plate 20 Connecting rod 21-Connecting plate 30 Upper lid
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H05K 3/26 7511−4E ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H05K 3/26 7511-4E
Claims (2)
れている陰極と陽極とに印加して電解処理するに際し、
前記陰極の一部を不電導体で被覆して陰極対陽極の面積
比を1:10〜1:1000として接近対設すると共
に、電解再生電極を並列接続して電流を流して電解再生
することを特徴とするマンガン酸塩から過マンガン酸塩
への再生法。1. When applying electrolytic treatment by applying to a cathode and an anode immersed in an alkaline permanganate solution,
A part of the cathode is covered with a non-conductive material so that the area ratio of the cathode to the anode is close to and opposite to each other with the area ratio of the cathode to the anode being 1:10 to 1: 1000, and the electrolytic regeneration electrodes are connected in parallel to flow an electric current for electrolytic regeneration. A method for regenerating manganate to permanganate characterized by:
タンク本体内に陰極と陽極とからなる電極を複数溶液浸
漬状態下に対設配備した電解再生装置において、前記陰
極の一部を不電導体で被覆し、陰極対陽極の面積比を
1:10〜1:1000とするように陽極をハニカム形
または筒形に棒状陰極の周囲に接近対設すると共に、陽
極を並列に接続配備し、液循環ポンプのある循環経路で
前記タンク本体をデスミア処理槽に連結したことを特徴
とするマンガン酸塩から過マンガン酸塩への再生装置。2. In an electrolytic regenerator in which a plurality of electrodes composed of a cathode and an anode are placed in a tank body into which an alkaline permanganate solution is introduced so as to be immersed in a plurality of solutions, a part of the cathode is made of a non-conductive material. And the anodes are arranged in close proximity to each other around the rod-shaped cathode in a honeycomb shape or in a cylindrical shape so that the area ratio of the cathode to the anode is 1:10 to 1: 1000, and the anodes are connected and arranged in parallel. A manganate to permanganate regenerator characterized in that the tank body is connected to a desmear treatment tank through a circulation path having a circulation pump.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5112492A JP2835811B2 (en) | 1993-04-16 | 1993-04-16 | Method for regenerating manganate to permanganate and regenerator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5112492A JP2835811B2 (en) | 1993-04-16 | 1993-04-16 | Method for regenerating manganate to permanganate and regenerator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06306668A true JPH06306668A (en) | 1994-11-01 |
JP2835811B2 JP2835811B2 (en) | 1998-12-14 |
Family
ID=14588007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5112492A Expired - Lifetime JP2835811B2 (en) | 1993-04-16 | 1993-04-16 | Method for regenerating manganate to permanganate and regenerator |
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JP (1) | JP2835811B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6210643B1 (en) | 1998-07-12 | 2001-04-03 | Hirokazu Shiota | Ozonizer |
DE10025551A1 (en) * | 2000-05-19 | 2001-11-29 | Atotech Deutschland Gmbh | Cathode for the electrochemical regeneration of permanganate etching solutions, process for their preparation and electrochemical regeneration device |
CN102383139A (en) * | 2010-08-27 | 2012-03-21 | 上村工业株式会社 | Electrolytic regeneration device |
CN105112932A (en) * | 2015-08-28 | 2015-12-02 | 北大方正集团有限公司 | Regeneration device of potassium permanganate with chemical drill-dirt cleaning function |
CN105132937A (en) * | 2015-08-28 | 2015-12-09 | 北大方正集团有限公司 | Chemical regeneration method of drilling dirt removing potassium permanganate |
CN110438506A (en) * | 2019-07-08 | 2019-11-12 | 深圳市裕展精密科技有限公司 | The regenerative preparation of decoating liquid |
Citations (4)
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JPH01127700A (en) * | 1987-11-11 | 1989-05-19 | Shimano Ind Co Ltd | Device for regenerating plating liquid of plating cell |
JPH02267288A (en) * | 1989-04-07 | 1990-11-01 | Fuji Electric Co Ltd | Etching liquid regenerator |
JPH02301582A (en) * | 1989-05-05 | 1990-12-13 | Morton Internatl Inc | Method and apparatus for regeneration of permanganate salt bath |
JPH04362183A (en) * | 1991-06-07 | 1992-12-15 | Nippon Paint Co Ltd | Method for regenerating aluminum surface cleaning bath |
-
1993
- 1993-04-16 JP JP5112492A patent/JP2835811B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01127700A (en) * | 1987-11-11 | 1989-05-19 | Shimano Ind Co Ltd | Device for regenerating plating liquid of plating cell |
JPH02267288A (en) * | 1989-04-07 | 1990-11-01 | Fuji Electric Co Ltd | Etching liquid regenerator |
JPH02301582A (en) * | 1989-05-05 | 1990-12-13 | Morton Internatl Inc | Method and apparatus for regeneration of permanganate salt bath |
JPH04362183A (en) * | 1991-06-07 | 1992-12-15 | Nippon Paint Co Ltd | Method for regenerating aluminum surface cleaning bath |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6210643B1 (en) | 1998-07-12 | 2001-04-03 | Hirokazu Shiota | Ozonizer |
KR100804455B1 (en) * | 2000-05-19 | 2008-02-20 | 아토테크 도이칠란드 게엠베하 | Cathode for electrochemical regeneration of permanganate etching solutions |
WO2001090442A1 (en) * | 2000-05-19 | 2001-11-29 | Atotech Deutschland Gmbh | Cathode for electrochemical regeneration of permanganate etching solutions |
DE10025551C2 (en) * | 2000-05-19 | 2002-04-18 | Atotech Deutschland Gmbh | Cathode for the electrochemical regeneration of permanganate etching solutions, process for their preparation and electrochemical regeneration device |
JP2003534459A (en) * | 2000-05-19 | 2003-11-18 | アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | Cathode for electrochemical regeneration of permanganate etching solution |
US7056424B2 (en) | 2000-05-19 | 2006-06-06 | Atotech Deutschland Gmbh | Cathode for electrochemical regeneration of permanganate etching solutions |
DE10025551A1 (en) * | 2000-05-19 | 2001-11-29 | Atotech Deutschland Gmbh | Cathode for the electrochemical regeneration of permanganate etching solutions, process for their preparation and electrochemical regeneration device |
CN102383139A (en) * | 2010-08-27 | 2012-03-21 | 上村工业株式会社 | Electrolytic regeneration device |
JP2012067380A (en) * | 2010-08-27 | 2012-04-05 | C Uyemura & Co Ltd | Electrolytic regeneration device |
US9045836B2 (en) | 2010-08-27 | 2015-06-02 | C. Uyemura & Co., Ltd. | Electrolytic regeneration device |
CN102383139B (en) * | 2010-08-27 | 2016-11-16 | 上村工业株式会社 | Electrolytic recycling device |
CN105112932A (en) * | 2015-08-28 | 2015-12-02 | 北大方正集团有限公司 | Regeneration device of potassium permanganate with chemical drill-dirt cleaning function |
CN105132937A (en) * | 2015-08-28 | 2015-12-09 | 北大方正集团有限公司 | Chemical regeneration method of drilling dirt removing potassium permanganate |
CN110438506A (en) * | 2019-07-08 | 2019-11-12 | 深圳市裕展精密科技有限公司 | The regenerative preparation of decoating liquid |
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