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JPH06283953A - Manufacture of piezoelectric resonance component - Google Patents

Manufacture of piezoelectric resonance component

Info

Publication number
JPH06283953A
JPH06283953A JP9258893A JP9258893A JPH06283953A JP H06283953 A JPH06283953 A JP H06283953A JP 9258893 A JP9258893 A JP 9258893A JP 9258893 A JP9258893 A JP 9258893A JP H06283953 A JPH06283953 A JP H06283953A
Authority
JP
Japan
Prior art keywords
piezoelectric
resonance component
capacitance
input
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9258893A
Other languages
Japanese (ja)
Inventor
Makoto Miyadera
誠 宮寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP9258893A priority Critical patent/JPH06283953A/en
Publication of JPH06283953A publication Critical patent/JPH06283953A/en
Withdrawn legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To prevent mis-sorting from occurring by enabling the characteristic of a piezoelectric element itself to be accurately measured without receiving the influence of a load capacitor after a load capacitor built-in type piezoelectric resonance component is assembled. CONSTITUTION:The piezoelectric resonance component is assembled in a state where an insulating material 12 is arranged between input/output terminals 9a, 9b mounted on the piezoelectric element 4 and the capacitance electrodes 6a, 6b of a capacitance element 8, and after the electrical characteristic of the component is measured, the insulating material 12 is eliminated, thereby, electrical continuity between the input/output terminals 9a, 9b and the capacitance electrodes 6a, 6b can be atained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、圧電共振部品に関
し、詳しくは、圧電フィルタなどに用いられる負荷容量
内蔵型の圧電共振部品の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonance component, and more particularly, to a method for manufacturing a load resonance built-in piezoelectric resonance component used in a piezoelectric filter or the like.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】図5
は、一般的な負荷容量内蔵型の圧電共振部品を示す斜視
図である。この圧電共振部品においては、圧電基板1の
両主面に振動電極2a,2bを配設するとともに、該振
動電極2a,2bから圧電基板1の端部に引出し電極3
a,3bを引き出してなる圧電素子4が用いられてお
り、圧電素子4には入出力端子9a,9bが取り付けら
れている。
Prior Art and Problems to be Solved by the Invention FIG.
FIG. 3 is a perspective view showing a general piezoelectric resonance component having a built-in load capacitance. In this piezoelectric resonance component, vibrating electrodes 2a and 2b are provided on both main surfaces of the piezoelectric substrate 1, and an extracting electrode 3 is provided from the vibrating electrodes 2a and 2b to an end portion of the piezoelectric substrate 1.
A piezoelectric element 4 obtained by drawing a and 3b is used, and input / output terminals 9a and 9b are attached to the piezoelectric element 4.

【0003】また、この圧電素子4には、誘電体基板5
の一方の主面に一対の負荷容量形成用の容量電極6a,
6bを配設し、他方の主面に対向電極7を配設してなる
コンデンサ素子8が、その容量電極6a,6bの形成さ
れた面が対向するように配置(接合)されており、圧電
素子4の引出し電極3a,3bとコンデンサ素子8の容
量電極6a,6bとが、入出力端子9a,9bを介して
導通している。また、コンデンサ素子8の対向電極7に
はアース端子10が接続されている。
The piezoelectric element 4 has a dielectric substrate 5
A pair of capacitive electrodes 6a for forming a load capacitance on one main surface,
A capacitor element 8 having 6b and a counter electrode 7 on the other main surface is arranged (bonded) so that the surfaces on which the capacitance electrodes 6a and 6b are formed face each other (piecing). The extraction electrodes 3a and 3b of the element 4 and the capacitance electrodes 6a and 6b of the capacitor element 8 are electrically connected via the input / output terminals 9a and 9b. A ground terminal 10 is connected to the counter electrode 7 of the capacitor element 8.

【0004】そして、圧電素子4の振動部近傍に振動空
間を確保しつつ、全体を外装樹脂11で外装することに
より図5に示すような圧電共振部品が形成されている。
なお、この圧電共振部品は、上記のように負荷容量内蔵
型の圧電共振部品であり、図4に示すような回路構成を
有している。
A piezoelectric resonance component as shown in FIG. 5 is formed by covering the whole with the exterior resin 11 while ensuring a vibration space in the vicinity of the vibrating portion of the piezoelectric element 4.
The piezoelectric resonance component is a load resonance built-in type piezoelectric resonance component as described above, and has a circuit configuration as shown in FIG.

【0005】ところで、上記のような負荷容量内蔵型の
圧電共振部品において、圧電素子の電気特性を測定する
場合、例えば、インピーダンスアナライザを用いた四端
子対測定や、ネットワークアナライザを用いた伝送法に
よる測定方法などが用いられる。
By the way, in the case of measuring the electrical characteristics of the piezoelectric element in the above-described load capacitance built-in type piezoelectric resonance component, for example, a four-terminal pair measurement using an impedance analyzer or a transmission method using a network analyzer is used. A measuring method or the like is used.

【0006】しかし、これらの測定方法においては、図
4に示す圧電素子4の容量及びコルピッツ型回路を構成
する第1及び第2の負荷容量C1,C2が大きくなると、
圧電素子4の電気特性がその影響を受けるため、圧電素
子4本来の電気特性を正確に測定することができなくな
るという問題点がある。また、圧電素子の電気特性を正
確に測定できなくなると、特性を選別する工程において
選別の誤り(誤選別)が生じるという問題点がある。
However, in these measuring methods, when the capacitance of the piezoelectric element 4 shown in FIG. 4 and the first and second load capacitances C 1 and C 2 forming the Colpitts type circuit become large,
Since the electric characteristics of the piezoelectric element 4 are affected by it, there is a problem that the original electric characteristics of the piezoelectric element 4 cannot be accurately measured. Further, if the electrical characteristics of the piezoelectric element cannot be accurately measured, there is a problem that a selection error (misselection) occurs in the step of selecting the characteristics.

【0007】この発明は、上記問題点を解決するもので
あり、負荷容量内蔵型の圧電共振部品を組み立てた(製
造した)後において、負荷容量の影響を受けることな
く、圧電素子自体の電気特性を正確に測定することが可
能な圧電共振部品の製造方法を提供することを目的とす
る。
The present invention solves the above-mentioned problems, and after assembling (manufacturing) a piezoelectric resonance component having a built-in load capacitance, the electric characteristics of the piezoelectric element itself are not affected by the load capacitance. It is an object of the present invention to provide a method of manufacturing a piezoelectric resonance component capable of accurately measuring

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、この発明の圧電共振部品の製造方法は、圧電基板の
両主面に振動電極を配設するとともに、該振動電極と導
通する引出し電極を配設してなる圧電素子に、前記引出
し電極と導通するように入出力端子を取り付けるととも
に、圧電素子に、誘電体基板の一方の主面に第1及び第
2の2つの負荷容量を形成するための一対の容量電極を
配設し、他方の主面に対向電極を配設してなるコンデン
サ素子を、その容量電極の形成された面を対向させて配
置することにより、前記入出力端子とコンデンサ素子の
容量電極とを導通させてなる負荷容量内蔵型の圧電共振
部品の製造方法であって、前記圧電素子に取り付けられ
た入出力端子と、前記コンデンサ素子の容量電極との間
に絶縁物質を配設した状態で圧電共振部品を組み立て、
電気特性の測定を行った後、前記絶縁物質を除去するこ
とにより、前記入出力端子と前記容量電極とを導通させ
ることを特徴とする。
In order to achieve the above object, a method of manufacturing a piezoelectric resonance component according to the present invention provides a vibrating electrode on both main surfaces of a piezoelectric substrate, and a drawer which is electrically connected to the vibrating electrode. An input / output terminal is attached to a piezoelectric element provided with an electrode so as to be electrically connected to the extraction electrode, and the first and second load capacitances are attached to the piezoelectric element on one main surface of the dielectric substrate. By arranging a capacitor element having a pair of capacitance electrodes for forming and a counter electrode on the other main surface so that the surfaces on which the capacitance electrodes are formed face each other, the input / output A method for manufacturing a piezoelectric resonance component having a built-in load capacitance, which comprises electrically connecting a terminal and a capacitance electrode of a capacitor element, wherein an input / output terminal attached to the piezoelectric element and a capacitance electrode of the capacitor element are provided. Insulation material provided Assembling the piezoelectric resonator component in the state,
After the electrical characteristics are measured, the insulating material is removed to electrically connect the input / output terminal and the capacitance electrode.

【0009】[0009]

【作用】圧電素子に取り付けられた入出力端子と、コン
デンサ素子の容量電極との間に絶縁物質が配設された状
態で圧電共振部品が組み立てられるため、組立後の完成
品においては、圧電素子と、コルピッツ型回路を構成す
る第1及び第2の2つの負荷容量とが電気的に絶縁され
ている。したがって、負荷容量の影響を受けることな
く、圧電素子自体の電気特性を正確に測定することが可
能になる。
Since the piezoelectric resonance component is assembled with the insulating material disposed between the input / output terminals attached to the piezoelectric element and the capacitive electrode of the capacitor element, the piezoelectric element is not assembled in the completed product. And a first and a second load capacitance forming the Colpitts type circuit are electrically insulated from each other. Therefore, the electrical characteristics of the piezoelectric element itself can be accurately measured without being affected by the load capacitance.

【0010】また、電気特性の測定を行った後に、絶縁
物質を除去することにより、入出力端子と容量電極とが
導通し、圧電共振部品は負荷容量を内蔵する圧電共振部
品として本来の機能を発揮する。
Further, by removing the insulating material after measuring the electric characteristics, the input / output terminals and the capacitance electrodes are electrically connected, and the piezoelectric resonance component functions as a piezoelectric resonance component incorporating a load capacitance. Demonstrate.

【0011】[0011]

【実施例】以下、この発明の実施例を図に基づいて説明
する。図1はこの発明の一実施例にかかる方法により製
造された圧電共振部品の、電気特性を測定する前の状態
を示す平面図である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing a state before measuring electrical characteristics of a piezoelectric resonance component manufactured by a method according to an embodiment of the present invention.

【0012】なお、圧電共振部品の全体的な構造は、前
述の従来例の説明において示した圧電共振部品(図5)
の構造と同じであるため、該当部分の説明を援用して圧
電共振部品の細部の構造についての説明を省略し、発明
の特徴部分を中心として説明を行う。
The overall structure of the piezoelectric resonance component is the same as the piezoelectric resonance component shown in the above description of the conventional example (FIG. 5).
Since the structure is the same as that of 1., the description of the detailed structure of the piezoelectric resonance component will be omitted with reference to the description of the corresponding part, and the description will focus on the characteristic part of the invention.

【0013】この実施例においては、図1に示すよう
に、コンデンサ素子8の容量電極6a,6bと、入出力
端子9a,9bの接触部に、180℃以上の温度で溶融
して外装樹脂に吸収されるようなワックスなどの絶縁物
質12が塗布されている。さらに、入出力端子9a,9
bと、圧電素子の引出し電極3a,3bの間には、18
0℃以上で流動し始めるような半田13が配設されてい
る。そして、入出力端子9a,9bの一部を除いて全体
を外装樹脂11により外装することにより図1に示すよ
うな圧電共振部品が形成されている。なお、上記圧電共
振部品は、図2に示すような回路構成を有している。
In this embodiment, as shown in FIG. 1, the contact portions between the capacitance electrodes 6a and 6b of the capacitor element 8 and the input / output terminals 9a and 9b are melted at a temperature of 180 ° C. or higher to form an exterior resin. An insulating material 12 such as wax that is absorbed is applied. Further, the input / output terminals 9a, 9
b between the piezoelectric element extraction electrodes 3a and 3b.
The solder 13 is arranged so that it starts to flow at 0 ° C. or higher. Then, the entire part of the input / output terminals 9a and 9b except the part is covered with the exterior resin 11 to form a piezoelectric resonance component as shown in FIG. The piezoelectric resonance component has a circuit configuration as shown in FIG.

【0014】図2に示すように、この圧電共振部品にお
いては、入出力端子9aとアース端子10、及び入出力
端子9bとアース端子10の間が、絶縁物質12により
絶縁されているため、入出力端子9a,9b間の電気的
特性を測定する場合に、負荷容量C1,C2が、圧電素子
4の電気特性に影響を与えることがない。
As shown in FIG. 2, in this piezoelectric resonance component, since the input / output terminal 9a and the ground terminal 10 and the input / output terminal 9b and the ground terminal 10 are insulated by the insulating material 12, When measuring the electrical characteristics between the output terminals 9a and 9b, the load capacitances C 1 and C 2 do not affect the electrical characteristics of the piezoelectric element 4.

【0015】したがって、例えば、インピーダンスアナ
ライザを用いた四端子対測定やネットワークアナライザ
を用いた伝送法による測定方法などにより、負荷容量C
1,C2の影響を受けることなく、圧電素子4の電気特性
を正確に測定することができる。
Therefore, for example, the load capacitance C is measured by a four-terminal pair measurement using an impedance analyzer or a transmission method using a network analyzer.
The electrical characteristics of the piezoelectric element 4 can be accurately measured without being affected by 1 and C 2 .

【0016】また、、圧電素子4の電気特性を測定した
後においては、圧電共振部品を180℃以上に加熱する
ことにより、絶縁物質12を外装樹脂11に吸収させて
除去することができる。このとき、入出力端子9a,9
bと、圧電素子4の引出し電極3a,3bの間の半田1
3が溶融し、図3に示すように、絶縁物質12(図1)
が溶融除去された後の空間に流れ込み、コンデンサ素子
8の容量電極6a,6bと、入出力端子9a,9bとを
電気的に接続させる。その結果、圧電共振部品の回路構
成は、図4に示すような回路構成となり、負荷容量内蔵
型の圧電共振部品として本来の機能を発揮する。
After measuring the electrical characteristics of the piezoelectric element 4, the insulating material 12 can be absorbed and removed by the exterior resin 11 by heating the piezoelectric resonance component to 180 ° C. or higher. At this time, the input / output terminals 9a, 9
b between the lead-out electrodes 3a and 3b of the piezoelectric element 4
3 melts and, as shown in FIG. 3, insulating material 12 (FIG. 1)
Flows into the space after being melted and removed, and the capacitance electrodes 6a and 6b of the capacitor element 8 are electrically connected to the input / output terminals 9a and 9b. As a result, the circuit configuration of the piezoelectric resonance component becomes as shown in FIG. 4, and the piezoelectric resonance component having the built-in load capacitance exhibits its original function.

【0017】なお、上記実施例においては、180℃に
加熱することにより外装樹脂11に吸収除去される絶縁
物質12及び180℃で溶融して流動する半田13を用
いた場合について説明したが、絶縁部質及び半田は、上
記特性を有するものに限らず、圧電共振部品の特性、用
途などを考慮して異なる特性のものを用いることも可能
である。
In the above embodiment, the case where the insulating material 12 which is absorbed and removed by the exterior resin 11 by heating to 180 ° C. and the solder 13 which melts and flows at 180 ° C. are used is described. The material and the solder are not limited to those having the above-mentioned characteristics, and it is possible to use those having different characteristics in consideration of the characteristics and applications of the piezoelectric resonance component.

【0018】また、上記実施例においては、絶縁物質1
2が溶融除去された後の空間に溶融した半田13が流れ
込み、コンデンサ素子8の容量電極6a,6bと、入出
力端子9a,9bとを電気的に接続させるようにした場
合について説明したが、例えば、絶縁物質が溶融除去さ
れた後に、ばねなどの付勢力により、入出力端子9a,
9bをコンデンサ素子8の容量電極6a,6bに接触
(接続)させるように構成することも可能である。
In the above embodiment, the insulating material 1
The case where the melted solder 13 flows into the space after the 2 is melted and removed and the capacitance electrodes 6a and 6b of the capacitor element 8 and the input / output terminals 9a and 9b are electrically connected has been described. For example, after the insulating material is melted and removed, the input / output terminals 9a, 9a,
It is also possible to make 9b contact (connect) with the capacitance electrodes 6a and 6b of the capacitor element 8.

【0019】なお、この発明は、その他の点においても
上記実施例に限定されるものではなく、圧電素子の構造
や振動モードの種類、コンデンサ素子の構造、入出力端
子及びアース端子の具体的形状などに関し、この発明の
要旨の範囲内において種々の応用、変形を加えることが
できる。
The present invention is not limited to the above embodiment in other respects, and the structure of the piezoelectric element, the type of vibration mode, the structure of the capacitor element, and the specific shapes of the input / output terminal and the ground terminal. With respect to the above, various applications and modifications can be added within the scope of the present invention.

【0020】[0020]

【発明の効果】上述のように、この発明の圧電共振部品
の製造方法は、圧電素子に取り付けられた入出力端子
と、コンデンサ素子の容量電極との間に絶縁物質を配設
した状態で圧電共振部品を組み立て、電気特性の測定を
行った後、絶縁物質を除去することにより、入出力端子
と容量電極とを導通させるようにしているので、負荷容
量の影響を受けることなく、圧電素子自体の電気特性を
正確に測定することが可能になる。
As described above, according to the method of manufacturing the piezoelectric resonance component of the present invention, the piezoelectric material is disposed between the input / output terminals attached to the piezoelectric element and the capacitance electrode of the capacitor element. After the resonant parts are assembled and the electrical characteristics are measured, the insulating material is removed so that the input / output terminals and the capacitance electrodes are electrically connected. Therefore, the piezoelectric element itself is not affected by the load capacitance. It becomes possible to accurately measure the electrical characteristics of the.

【0021】また、電気特性の測定を行った後に、絶縁
物質を取り除くことにより、容易に所定の負荷容量を内
蔵する圧電共振部品としての本来の機能を発揮させるこ
とができる。
Further, by removing the insulating material after measuring the electric characteristics, it is possible to easily exhibit the original function of the piezoelectric resonance component having a predetermined load capacitance.

【0022】したがって、この発明によれば、負荷容量
内蔵型の圧電共振部品を組み立てた後に、負荷容量の影
響を受けることなく、圧電素子自体の特性を正確に測定
することが可能になるとともに、誤選別を防止して、選
別信頼性を向上させることが可能になる。
Therefore, according to the present invention, after the piezoelectric resonance component having the built-in load capacitance is assembled, the characteristics of the piezoelectric element itself can be accurately measured without being affected by the load capacitance. It becomes possible to prevent erroneous selection and improve the selection reliability.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例にかかる方法により組み立
てられた圧電共振部品の、電気特性を測定する前の状態
を示す平面図である。
FIG. 1 is a plan view showing a state before measuring electrical characteristics of a piezoelectric resonance component assembled by a method according to an embodiment of the present invention.

【図2】図1の圧電共振部品の回路構成を示す図であ
る。
FIG. 2 is a diagram showing a circuit configuration of the piezoelectric resonance component of FIG.

【図3】この発明の一実施例にかかる方法により組み立
てられた圧電共振部品の、電気特性を測定した後に絶縁
物質を除去した状態を示す平面図である。
FIG. 3 is a plan view showing a state where the insulating material is removed after measuring the electrical characteristics of the piezoelectric resonance component assembled by the method according to the embodiment of the present invention.

【図4】図3の負荷容量内蔵型の圧電共振部品の回路構
成を示す図である。
FIG. 4 is a diagram showing a circuit configuration of a piezoelectric resonance component having a built-in load capacitance in FIG.

【図5】従来の負荷容量内蔵型の圧電共振部品を示す斜
視図である。
FIG. 5 is a perspective view showing a conventional piezoelectric resonance component having a built-in load capacitance.

【符号の説明】[Explanation of symbols]

1 圧電基板 2a,2b 振動電極 3a,3b 引出し電極 4 圧電素子 5 誘電体基板 6a,6b 容量電極 7 対向電極 8 コンデンサ素子 9a,9b 入出力端子 10 アース電極 11 外装樹脂 12 絶縁物質 13 半田 DESCRIPTION OF SYMBOLS 1 Piezoelectric substrate 2a, 2b Vibrating electrode 3a, 3b Extraction electrode 4 Piezoelectric element 5 Dielectric substrate 6a, 6b Capacitance electrode 7 Counter electrode 8 Capacitor element 9a, 9b Input / output terminal 10 Earth electrode 11 Exterior resin 12 Insulation material 13 Solder

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板の両主面に振動電極を配設する
とともに、該振動電極と導通する引出し電極を配設して
なる圧電素子に、前記引出し電極と導通するように入出
力端子を取り付けるとともに、圧電素子に、誘電体基板
の一方の主面に第1及び第2の2つの負荷容量を形成す
るための一対の容量電極を配設し、他方の主面に対向電
極を配設してなるコンデンサ素子を、その容量電極の形
成された面を対向させて配置することにより、前記入出
力端子とコンデンサ素子の容量電極とを導通させてなる
負荷容量内蔵型の圧電共振部品の製造方法であって、 前記圧電素子に取り付けられた入出力端子と、前記コン
デンサ素子の容量電極との間に絶縁物質を配設した状態
で圧電共振部品を組み立て、電気特性の測定を行った
後、前記絶縁物質を除去することにより、前記入出力端
子と前記容量電極とを導通させることを特徴とする圧電
共振部品の製造方法。
1. A piezoelectric element having vibrating electrodes provided on both main surfaces of a piezoelectric substrate and lead electrodes that are electrically connected to the vibrating electrodes, and an input / output terminal that is electrically connected to the lead electrodes. Along with the mounting, the piezoelectric element is provided with a pair of capacitance electrodes for forming the first and second load capacitances on one main surface of the dielectric substrate and the opposite electrode is provided on the other main surface. Of a capacitor element with a built-in load capacitance, by arranging the capacitor element with the surfaces on which the capacitance electrodes are formed facing each other to electrically connect the input / output terminals and the capacitance electrode of the capacitor element. A method, wherein a piezoelectric resonance component is assembled in a state in which an insulating material is arranged between the input / output terminal attached to the piezoelectric element and the capacitive electrode of the capacitor element, and after measuring the electrical characteristics, Excludes the insulating material It allows the production method of the piezoelectric resonance component for causing conduction between the capacitor electrode and the output terminal to.
JP9258893A 1993-03-26 1993-03-26 Manufacture of piezoelectric resonance component Withdrawn JPH06283953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9258893A JPH06283953A (en) 1993-03-26 1993-03-26 Manufacture of piezoelectric resonance component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9258893A JPH06283953A (en) 1993-03-26 1993-03-26 Manufacture of piezoelectric resonance component

Publications (1)

Publication Number Publication Date
JPH06283953A true JPH06283953A (en) 1994-10-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP9258893A Withdrawn JPH06283953A (en) 1993-03-26 1993-03-26 Manufacture of piezoelectric resonance component

Country Status (1)

Country Link
JP (1) JPH06283953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013224959A (en) * 2006-10-12 2013-10-31 Nextech Materials Ltd Hydrogen sensitive composite material, hydrogen gas sensor, and sensor for detecting hydrogen and other gases with improved baseline resistance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013224959A (en) * 2006-10-12 2013-10-31 Nextech Materials Ltd Hydrogen sensitive composite material, hydrogen gas sensor, and sensor for detecting hydrogen and other gases with improved baseline resistance

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