JPH0628799U - Hinge device for inspection door for vacuum chamber in electron beam irradiation device - Google Patents
Hinge device for inspection door for vacuum chamber in electron beam irradiation deviceInfo
- Publication number
- JPH0628799U JPH0628799U JP6915492U JP6915492U JPH0628799U JP H0628799 U JPH0628799 U JP H0628799U JP 6915492 U JP6915492 U JP 6915492U JP 6915492 U JP6915492 U JP 6915492U JP H0628799 U JPH0628799 U JP H0628799U
- Authority
- JP
- Japan
- Prior art keywords
- hinge
- inspection door
- inspection
- ring
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Abstract
(57)【要約】
【目的】 真空チャンバ点検扉の開閉によるシール用Ｏ
リングの損傷を防止すること。
【構成】 真空チャンバ１の点検口２を開閉する点検扉
３はヒンジ機構５によって取り付けられている。ヒンジ
機構の扉側ヒンジ６にはヒンジピン７が固定されてお
り、チャンバ側ヒンジ８に設けられたピン孔９’は長孔
に形成されている。点検扉を閉じる際には、点検扉のヒ
ンジ機構側部分が点検口から離れる方向に動くから、ヒ
ンジ機構に近いシール用Ｏリング１０の部分が点検扉で
局部的に押しつぶされることがなくなり、ボルト１２の
締め付けにより、Ｏリング全体を均等に押しつぶしシー
ルすることができる。Ｏリングの寿命が延び、シール機
能も良好になる。
(57) [Summary] [Purpose] O for sealing by opening and closing the vacuum chamber inspection door
Prevent ring damage. [Constitution] An inspection door 3 for opening and closing an inspection port 2 of a vacuum chamber 1 is attached by a hinge mechanism 5. A hinge pin 7 is fixed to the door side hinge 6 of the hinge mechanism, and a pin hole 9 ′ provided in the chamber side hinge 8 is formed as an elongated hole. When the inspection door is closed, the hinge mechanism side portion of the inspection door moves in the direction away from the inspection port, so that the portion of the sealing O-ring 10 close to the hinge mechanism is not locally crushed by the inspection door, and the bolt By tightening 12, the entire O-ring can be uniformly crushed and sealed. The life of the O-ring is extended and the sealing function is improved.
Description
【０００１】[0001]
本考案は、エリアビーム型電子線照射装置における真空チャンバ点検扉のヒン ジに関する。 The present invention relates to a hinge for a vacuum chamber inspection door in an area beam type electron beam irradiation apparatus.
【０００２】[0002]
エリアビーム型電子線照射装置にあっては、照射室の上部に、全体として円筒 状をなし、電子ビーム発生部を収容する真空チャンバが設けられており、真空チ ャンバの下部に設けられた照射窓を通して照射室内に電子ビームが取り出され、 照射室内に搬送される被照射物に電子ビームが照射されるように構成されている 。電子ビーム発生部を収容する真空チャンバの端部には内部が点検できるように 点検扉が設けられている。 In the area beam type electron beam irradiation device, a vacuum chamber that has a cylindrical shape as a whole and houses the electron beam generator is provided above the irradiation chamber, and the irradiation chamber provided below the vacuum chamber is used. The electron beam is taken out through the window into the irradiation chamber, and the irradiation object conveyed into the irradiation chamber is irradiated with the electron beam. An inspection door is provided at the end of the vacuum chamber that houses the electron beam generator so that the inside can be inspected.
【０００３】 点検扉がボルトで真空チャンバの端部に閉塞固定される点検扉部の一例につい て、図３はその概略正面図、そして図４は図３のＡ−Ａ線における一部を断面で 示す構成図である。真空チャンバ１の端部に形成される点検口２を閉塞する点検 扉３は、真空チャンバの端部のフランジ部４にヒンジ機構５によって開閉できる ように取り付けられており、このヒンジ機構における扉側ヒンジ６にはヒンジピ ン７が固定されており、このヒンジピンはチャンバ側ヒンジ８の丸いピン孔９に 嵌合している。点検口２の周囲には真空シール用のＯリング１０が溝１１内に配 設されており、点検扉３を閉じ、例えば４本のボルト１２を挿通孔１３からフラ ンジ部４のボルトネジ孔１４に螺合して均等に締め付け、Ｏリングを押しつぶし て、点検口２をシール閉塞する。FIG. 3 is a schematic front view of an example of the inspection door portion in which the inspection door is closed and fixed to the end portion of the vacuum chamber with a bolt, and FIG. 4 is a sectional view taken along line AA of FIG. It is a block diagram shown by. The inspection door 3 that closes the inspection port 2 formed at the end of the vacuum chamber 1 is attached to the flange portion 4 at the end of the vacuum chamber so that it can be opened and closed by the hinge mechanism 5. A hinge pin 7 is fixed to the hinge 6, and this hinge pin is fitted in a round pin hole 9 of the chamber side hinge 8. An O-ring 10 for vacuum sealing is provided in the groove 11 around the inspection port 2, the inspection door 3 is closed, and, for example, four bolts 12 are inserted from the through hole 13 to the bolt screw hole 14 of the flange portion 4. And tighten it evenly, crush the O-ring, and seal off the inspection port 2.
【０００４】[0004]
上述の従来技術によれば、点検扉３を閉じる際、Ｏリング１０のヒンジ機構４ に近い側の部分が常に先に押しつぶれることになり、Ｏリング全体を均等につぶ すことができず、ヒンジ機構に近い部分が局部的に損傷しやすい。また、点検扉 を閉扉位置にしたときに、扉は図４の状態になるから、ボルト１２の挿通孔１３ とボルトネジ孔１４の軸線が一致せず、ボルトが締めにくいという欠点をも有す る。 According to the above-mentioned conventional technique, when the inspection door 3 is closed, the portion of the O-ring 10 on the side closer to the hinge mechanism 4 is always crushed first, so that the entire O-ring cannot be crushed evenly. The part close to the hinge mechanism is easily damaged locally. In addition, when the inspection door is in the closed position, the door is in the state shown in FIG. 4, so that the axis of the insertion hole 13 of the bolt 12 and the axis of the bolt screw hole 14 do not coincide with each other, which makes it difficult to tighten the bolt. .
【０００５】 本考案は、真空シール用のＯリング１０を均等に押し付けてシールすることが でき、Ｏリングに局部的に無理な力が掛からないようにしたエリアビーム型電子 線照射装置における点検扉のヒンジ装置の提供を目的とするものである。According to the present invention, an O-ring 10 for a vacuum seal can be pressed uniformly for sealing, so that an unnecessary force is not locally applied to the O-ring. The purpose of the present invention is to provide a hinge device.
【０００６】[0006]
かかる目的を達成するために、本考案は、電子線照射装置における真空チャン バの点検口を閉塞する点検扉のヒンジ装置において、ヒンジのピン孔が、その周 囲に真空シール用Ｏリングが設けられている点検口の開口面と垂直の方向に長孔 に形成されていることを特徴とするものである。 In order to achieve such an object, the present invention provides a hinge device for an inspection door that closes the inspection port of a vacuum chamber in an electron beam irradiation device, in which a pin hole of the hinge is provided and a vacuum sealing O-ring is provided around the pin hole. It is characterized in that it is formed as a long hole in the direction perpendicular to the opening surface of the inspection port.
【０００７】[0007]
ヒンジのピン孔が、点検口の開口面と垂直の方向に長孔になっているから、点 検扉を閉じるときに、点検扉のヒンジ機構取付部分が点検口から離れる方向に移 動することができ、Ｏリングに局部的に無理な力が加わらない。 Since the pin hole of the hinge is elongated in the direction perpendicular to the opening surface of the inspection door, when the inspection door is closed, the hinge mechanism mounting part of the inspection door should move away from the inspection opening. The O-ring does not exert excessive force locally.
【０００８】[0008]
本考案の一実施例について図面を参照して説明する。図１は点検扉部の一部を 断面で示す構成図であり、図３と同一符号は同等部分を示す。真空チャンバ１の 端部に形成される点検口２を閉塞する点検扉３は、真空チャンバの端部のフラン ジ部４にヒンジ機構５によって開閉できるように取り付けられている。このヒン ジ機構における扉側ヒンジ６にはヒンジピン７が固定されており、このヒンジピ ンはチャンバ側ヒンジ８のピン孔９’に嵌合している。このピン孔９’は、点検 口２の開口面２1と垂直の方向Ｘにヒンジピン７が移動できるように長孔に形成 されており、Ｘ方向と直交するＹ方向にはヒンジピンが移動しないように余裕を 持たせずに形成されている。An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing a part of the inspection door section in cross section, and the same reference numerals as those in FIG. 3 denote the same parts. An inspection door 3 that closes an inspection port 2 formed at the end of the vacuum chamber 1 is attached to a flange portion 4 at the end of the vacuum chamber so as to be opened and closed by a hinge mechanism 5. A hinge pin 7 is fixed to the door side hinge 6 in this hinge mechanism, and this hinge pin is fitted into a pin hole 9 ′ of the chamber side hinge 8. This pin hole 9'is formed as a long hole so that the hinge pin 7 can move in the direction X perpendicular to the opening surface 2 1 of the inspection port 2, and the hinge pin does not move in the Y direction orthogonal to the X direction. It is formed without any margin.
【０００９】 点検扉３を閉める際には、ピン孔９’が長孔になっているから、図２（ａ）に 示すように、ヒンジピン７が点検口２から離れる方向に移動し、点検扉とＯリン グ１０との間に全体に余裕を有する状態で、点検扉を点検口の前面に位置させる ことができる。そこで各ボルト１２をボルトネジ孔１４に螺合し、均等に締める ことにより、図２（ｂ）に示すように、Ｏリング１０全体を均等に押しつぶして 点検口２を点検扉３で閉じることができる。When the inspection door 3 is closed, since the pin hole 9 ′ is a long hole, the hinge pin 7 moves in the direction away from the inspection port 2 as shown in FIG. The inspection door can be located in front of the inspection port with a sufficient margin between the inspection ring and the O-ring 10. Therefore, by screwing each bolt 12 into the bolt screw hole 14 and tightening it uniformly, the entire O-ring 10 can be crushed evenly and the inspection port 2 can be closed by the inspection door 3 as shown in FIG. 2B. .
【００１０】 また、点検扉３を閉める際に、図２（ｃ）に示すようにヒンジピン７がピン長 孔９’に位置していても、点検扉３がＯリング１０のヒンジ機構に近い部分に当 ることにより、点検扉はＯリングの弾撥力を受けて、ヒンジピン７はピン長孔９ ’内を移動し、点検扉のヒンジ機構側部分が点検口２から逃げる方向に動いて、 点検扉は図２（ｄ）に示す閉扉位置に達する。そこで、点検扉３のヒンジ機構側 部分を押して図１の状態にするか、扉の反ヒンジ機構側部分を少し戻して、扉を 点検口２の開口面２1と平行にすることにより、ボルトを容易にボルトネジ孔１ ４に螺合させることができ、Ｏリング１０全体を均等に押しつぶすことができる 。Further, when the inspection door 3 is closed, even if the hinge pin 7 is located in the pin slot 9 ′ as shown in FIG. 2C, the inspection door 3 is close to the hinge mechanism of the O-ring 10. When the inspection door is hit by the O-ring, the hinge pin 7 moves in the pin long hole 9 ′, and the hinge mechanism side portion of the inspection door moves in the direction to escape from the inspection port 2. The inspection door reaches the closed position shown in FIG. Then, push the hinge mechanism side part of the inspection door 3 to the state shown in FIG. 1, or slightly return the anti-hinge mechanism side part of the door to make the door parallel to the opening surface 2 1 of the inspection port 2, Can be easily screwed into the bolt screw hole 14, and the entire O-ring 10 can be uniformly crushed.
【００１１】 なお、上述の実施例では、ヒンジ機構５におけるヒンジピン７は扉側ヒンジ６ に、ピン孔９’はチャンバ側ヒンジ８に設けているが、ヒンジピンをチャンバ側 ヒンジに、ピン孔を扉側ヒンジに設けてもよく、機能に変わりはない。In the above embodiment, the hinge pin 7 in the hinge mechanism 5 is provided in the door side hinge 6 and the pin hole 9 ′ is provided in the chamber side hinge 8. It may be provided on the side hinge and the function is not changed.
【００１２】[0012]
本考案は、以上説明したように構成したので、点検扉を閉じる際にＯリングを 局部的に継続して作用する無理な力によって押しつぶすことがないから、Ｏリン グが傷つきにくくなり、寿命が延びると共に、真空シール機能も良好になる。ま た、点検扉を、閉位置に移動させたときに、点検口の開口面に平行に位置させる ことができるから、締め付けボルトがボルトネジ孔に螺合しやすくなり、締め付 けも容易になる。 Since the present invention is configured as described above, when the inspection door is closed, the O-ring is not crushed by the excessive force that locally acts continuously, so that the O-ring is less likely to be damaged and the life is shortened. As it extends, the vacuum sealing function becomes better. Also, when the inspection door is moved to the closed position, it can be positioned parallel to the opening surface of the inspection port, so that the tightening bolt can be easily screwed into the bolt screw hole and tightened easily. .
【図１】本考案の一実施例について一部を断面で示す構
成図である。FIG. 1 is a partial cross-sectional view of an embodiment of the present invention.
【図２】実施例の動作説明図である。FIG. 2 is an operation explanatory diagram of the embodiment.
【図３】エリアビーム型電子線照射装置の概略正面図で
ある。FIG. 3 is a schematic front view of an area beam type electron beam irradiation apparatus.
【図４】従来の点検扉部の一部を断面で示す構成図であ
る。FIG. 4 is a cross-sectional view showing a part of a conventional inspection door portion.
1 真空チャンバ 2 点検口 21 点検口の開口面 3 点検扉 6,8 ヒンジ 7 ヒンジピン 9' ピン孔 10 Ｏリング 12 ボルト1 Vacuum chamber 2 Inspection port 2 1 Inspection port opening surface 3 Inspection door 6,8 Hinge 7 Hinge pin 9'Pin hole 10 O-ring 12 Bolt
Claims (1)
点検口を閉塞する点検扉のヒンジ装置において、ヒンジ
のピン孔が、その周囲に真空シール用Ｏリングが設けら
れている点検口の開口面と垂直の方向に長孔に形成され
ていることを特徴とする真空チャンバ用点検扉のヒンジ
装置。1. A hinge device for an inspection door that closes an inspection port of a vacuum chamber in an electron beam irradiation apparatus, wherein a pin hole of the hinge and an opening face of the inspection port around which an O-ring for vacuum sealing is provided. A hinge device for an inspection door for a vacuum chamber, characterized in that it is formed as an elongated hole in a vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6915492U JPH0628799U (en) | 1992-09-09 | 1992-09-09 | Hinge device for inspection door for vacuum chamber in electron beam irradiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6915492U JPH0628799U (en) | 1992-09-09 | 1992-09-09 | Hinge device for inspection door for vacuum chamber in electron beam irradiation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0628799U true JPH0628799U (en) | 1994-04-15 |
Family
ID=13394478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6915492U Pending JPH0628799U (en) | 1992-09-09 | 1992-09-09 | Hinge device for inspection door for vacuum chamber in electron beam irradiation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628799U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011077541A (en) * | 1999-07-13 | 2011-04-14 | Nordson Corp | High-speed symmetrical plasma treatment system |
| JP2020065949A (en) * | 2018-10-22 | 2020-04-30 | 住友金属鉱山エンジニアリング株式会社 | Inspection hole |
-
1992
- 1992-09-09 JP JP6915492U patent/JPH0628799U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011077541A (en) * | 1999-07-13 | 2011-04-14 | Nordson Corp | High-speed symmetrical plasma treatment system |
| JP2020065949A (en) * | 2018-10-22 | 2020-04-30 | 住友金属鉱山エンジニアリング株式会社 | Inspection hole |
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