JPH06258070A - Scanning probe microscope - Google Patents

Abstract

PURPOSE:To remove a slope of a sample placed on a moving stage in the stage using a cylindrical piezoelectric element. CONSTITUTION:A finely moving position regulator 20 for scanning a sample with respect to a probe of a scanning probe microscope for obtaining information of a sample surface by making the probe approach the surface of the sample and relatively scanning it by using a cantilever implanted with the probe has a cylindrical element 22 having divided electrodes disposed on a peripheral surface, a sample base 21 having an upper surface for placing the sample and a protruding bottom, and supports 24, 25 disposed at an upper part of the element 22 to tiltably hold the base 21 in contact with the bottom of the base 21.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning probe microscope for observing a fine surface shape of a sample. In particular, a movable stage using a scanner having a cylindrical piezoelectric element has a tilt correction function. The present invention relates to a scanning probe microscope that enables accurate observation.

[0002]

2. Description of the Related Art A scanning probe microscope is for observing a fine surface shape of a sample. Conventionally, a scanning tunnel microscope (STM),
Atomic force microscope (AFM), magnetic force microscope (MFM) and the like are known.

These hold a sample on a fine movement position adjusting device composed of a fine movement element such as a piezoelectric body, and scan the surface of the sample with a probe set up on the tip side of the cantilever. Depending on the tunnel current value flowing between the probe and the sample (in the case of a scanning tunneling microscope) or the probe, so that the distance between the probe and the sample surface is kept constant during scanning of the sample surface. Depending on the amount of displacement of the cantilever due to the attractive force or repulsive force acting between the atom at the tip of the needle and the atom on the sample surface (in the case of atomic force microscope), or by the magnetic force acting between the probe and the magnetic particles of the sample Depending on the displacement of the cantilever (in the case of a magnetic force microscope), the displacement of the fine movement position adjustment device is controlled, and the information of the surface roughness of the sample is reconstructed from the control amount at that time to reconstruct it as an image. Observe surface condition Those who wear way.

As described above, the fine movement position adjusting device scans the sample surface with respect to the probe and controls the displacement in the Z-axis direction. As an example, a configuration as shown in FIG. 11 is known.

In FIG. 11, an inner peripheral surface electrode 100a is formed on the entire inner peripheral surface of a cylindrical piezoelectric element body 100 formed of a cylindrical piezoelectric material, and an outer peripheral surface of the cylindrical piezoelectric element body 100 is formed. The outer peripheral electrode 100b is formed in each of the regions obtained by dividing the peripheral surface into four along the axial direction of the cylinder.

The inner peripheral surface electrode 100a is a common electrode, and when a voltage is applied between the common electrode 100a and the outer peripheral electrode 100b, the cylindrical piezoelectric element body 100 is deformed according to the applied voltage ( Distortion). The lower part of the cylindrical piezoelectric element body 100 is fixed and held by a solid board 100d.

Although not shown in FIG. 11, the sample stage 100c is not directly mounted on the upper portion of the cylindrical piezoelectric element body 100, but is placed on the upper portion of the cylindrical piezoelectric element body 100 as shown in FIG. It is placed on the support part 100e attached to the. The sample table 100c is a support part 100e
It's just listed above.

Therefore, by displacing the cylindrical piezoelectric element main body 100, the momentum at that time causes the sample stage 100c to be displaced, so that the target observation region of the sample on the sample stage 100c is probed. It is configured to be able to move to the position.

In the actual use of the moving stage having such a structure, of the four outer peripheral side electrodes 100b of the cylindrical piezoelectric element body 100, two electrodes facing each other are provided with a single period of one cycle so as to have opposite phases. A waveform voltage signal or a single waveform voltage signal for a plurality of cycles that are intermittently continuous is applied.

As a result, as shown in FIGS. 12 (a), 12 (b) and 12 (c), the cylindrical piezoelectric element body 100 is deformed (displaced) to utilize the shocking motion accompanied by acceleration. The sample table 100c on the support part 100e fixed to the upper end of the piezoelectric device body 100 is moved slightly. That is, FIG. 12A shows the state when the voltage is released, and the cylindrical piezoelectric element body 1 is upright without deformation. When a voltage is applied, it deforms according to the applied voltage as shown in FIG.
As shown in (c), there is no deformation and the original upright state is restored.

Since a series of these operations are instantaneously performed,
The sample table 100c slides on the support part 100e and minutely moves by a unit distance. And the sample table 10
0c is finely moved on the cylindrical piezoelectric element body 100 in this way to perform stage scanning.

Fine movement position adjusting device 1 having such a configuration
0A (moving scanner) is a sample table 100 in a two-dimensional plane.
It is used for minute position movement of c. Therefore, although it can be used for scanning a sample in a two-dimensional plane, the following problems occur.

That is, as shown in FIG. 13, in observing the sample surface in the scanning probe microscope, the entire surface of the measurement sample 12 placed on the scanner by the cylindrical piezoelectric element covers the tip of the cantilever 9. Side probe 9a
When the surface of the sample 12 is scanned by the probe 9a, the scanning line is inclined,
In some cases, the sensitivity at the time of data acquisition cannot be fully utilized.

This inclination is caused by the finishing condition of the surface of the sample 12 itself (difference in thickness), and even if there is no difference in the thickness of the sample itself, the upper surface side is displaced by the displacement of the cylindrical piezoelectric element. The tilt also causes the sample stand 100c to tilt.

Therefore, after data acquisition,
As shown in (a), with respect to the inclination of the scanning line SL,
A process of subtracting a vertical displacement from a line segment having a certain inclination to each obtained pixel and redrawing it as IMf in FIG. 14B to remove the influence of the inclination of the sample 12, the sample table 100c, or the like However, even with such a process, the surface shape and the like may not be reproduced accurately.

That is, the image IMf obtained by the correction is in a state in which the inclination of the scanning line SL is subtracted as it is, and the inclination itself is not corrected, so that the original image is IMr, but it is like IMf. Therefore, it cannot be said that the surface shape could be accurately reproduced.

Therefore, when observing with a scanning probe microscope, some inclination adjusting means is required to adjust the inclination of the sample so that the scanning plane and the sample surface coincide with each other.

The following may be considered as such an adjusting mechanism. For example, use of a goniometer stage that performs minute rotation of the spherical surface in an arbitrary direction.

That is, the gonio stage is a mechanism capable of performing minute rotation of a spherical surface in an arbitrary direction, and its structure is generally as shown in FIG.

In the figure, 30 is a gonio stage, 31 is a stage, 32 is a guide mechanism, 33 is a micrometer, 34 is an intermediate stage, 35 is an intermediate stage guide mechanism, and 36a and 36b are vernier.

The stage 31 and the guide mechanism 32, and the intermediate stage 34 and the intermediate stage guide mechanism 35 form a pair, and the lower surface of the stage 31 is a spherical convex surface, and the upper surface of the guide mechanism 32 is a spherical surface. -Shaped concave surface and dovetail groove movement guide 31 on the contact surface side of each other.
a and 32a are formed. This dovetail movement guide 3
1a and 32a are slidably fitted to each other and define a moving direction.

Similarly, the lower surface of the intermediate stage 34 is finished as a spherical convex surface, and the upper surface of the intermediate stage guide mechanism 35 is finished as a spherical concave surface, and dovetail groove movement guides 34a, 35a are provided on the contact surface sides of each other. Are formed. The dovetail groove movement guides 34a and 35a are slidably fitted to each other and define the movement direction.

Since the dovetail groove movement guides 31a and 32a and the dovetail groove movement guides 34a and 35a are arranged orthogonally to each other, and the spherical surfaces of them have the same curvature, the goniometer stage 30 has the same rotation. It has two axes having a center, and these two axes are configured to allow independent movement.

The stage 31 and the guide mechanism 32, and the intermediate stage 34 and the intermediate stage guide mechanism 35 respectively have micrometers 33a and 33b. By rotating the micrometers 33a and 33b, the dovetail groove is moved. The stage 31 and the intermediate stage 34 can be rotated with respect to the guide mechanism 32 and the intermediate stage guide mechanism 35 while being guided along the guide. The rotation amount (movement amount) can be read by the vernier 36a, 36b.

The amount of rotation by rotating the micrometers 33a and 33b is normally about ± 20 °,
The minimum value for reading the rotation is about 0.1 ° in the values of the verniers 36a and 36b.

The upper surface of the stage 31 is a flat surface that ensures horizontality, and the lower surface of the guide mechanism 32 that holds the stage 31 is also a flat surface that ensures horizontality. The upper surface of the intermediate stage 34 is a flat surface that ensures horizontality, and the guide mechanism 32 is held on the upper surface of the intermediate stage 34.

The goniometer stage 30 having such a structure is
By rotating the micrometers 33a and 33b, the inclination of the upper surface of the stage 31 with respect to the horizontal plane is increased by 20 degrees.
It can be tilted in any direction within a range of about °,
Even if the upper surface of the sample is entirely inclined, the inclined surface can be held so as to be horizontal to the scanning surface of the probe.

[0028]

However, since the goniometer stage uses a fine adjustment mechanism using a micrometer for tilt adjustment, it has a structure in which the tilt is changed by sliding on a spherical surface along the dovetail groove movement guide. It has weight and also volume.

On the other hand, in the scanning probe microscope, the state of the sample surface is known by scanning the sample surface with the probe and, for example, the amount of displacement of the cantilever due to the attractive force or repulsive force of the atoms of the sample acting on the probe. In principle, the probe and the sample are minute, and therefore the fine movement position adjusting device 10A is also small.

Then, a fine movement position adjusting device (moving stage) which uses a slight deformation of the cylindrical piezoelectric element for moving the sample.
Has appeared as a device that can be miniaturized in place of a direct-acting stage by a mechanical rotary drive operation system, let alone an inclination adjusting mechanism that is a fine movement position adjusting device 10A.
Since it will be attached to the upper part of the cylindrical piezoelectric element that constitutes the above, it is technically very difficult to incorporate a general goniometer stage having a large weight and volume on the upper part of the small cylindrical piezoelectric element. This is a technology that runs counter to the tide of the era of moving away from mechanical rotary drive operation systems.

Therefore, the object of the present invention is to
It is an object of the present invention to provide a scanning probe microscope having a fine movement position adjusting device capable of removing a tilt of a sample placed on the moving stage in a moving stage using a cylindrical piezoelectric element.

[0032]

In order to achieve the above object, the present invention is configured as follows. That is, in a scanning probe microscope that obtains information on the sample surface by using a cantilever in which the probe is erected and bringing the probe into close proximity to the surface of the sample, the sample is scanned with respect to the probe. The fine movement position adjusting device for making the cylindrical piezoelectric element in which the divided electrodes are arranged on the peripheral surface, the sample table having the upper surface part for mounting the sample and the convex bottom part, and the piezoelectric element The support unit is disposed on the upper portion and is in contact with the bottom portion of the sample table to hold the sample table in a tiltable manner.

[0033]

With this structure, the sample table can be rotated on the support part.

Therefore, when the cylindrical piezoelectric element is driven, the inclination of the sample table on the support part can be changed.

One end, that is, the lower end, of the piezoelectric element is fixed to the substrate, and the other end, that is, the upper end, is provided with a sample table (mounting table) via a support portion. Then, a single waveform voltage signal for one cycle or a single waveform voltage signal for a plurality of cycles that is intermittently continuous is applied to the piezoelectric element to displace and drive the piezoelectric element, but the displacement at that time is shocked with acceleration. In this case, the sample table is driven and the sample fixed on the sample table is slightly moved in the deformation direction of the piezoelectric element. It can function as a moving stage that moves a small amount or as a goniometer stage that changes its posture.

[0036]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 is a view for explaining the structure of a moving stage according to the first embodiment of the present invention, in which (a) is a front view of a sample stage portion of the moving stage, (b) ) Is a diagram showing a moving stage having a structure in which a sample stage is provided on a cylindrical piezoelectric element having a concave support portion, and (c) is a moving stage having a structure in which a sample stage is provided on a cylindrical piezoelectric element having a ring-shaped support portion. It is a figure which shows a stage.

A fine movement position adjusting device (moving stage) 20 for a scanning probe microscope according to the present invention has a circle having a convex lower surface 21a with a lower surface having a curvature, as shown in FIG. 1 (a). A column-shaped or thick-walled disk-shaped sample table (mounting table) 21 is used. An upper surface 21b of the sample table 21 is a sample mounting surface processed into a highly accurate horizontal surface, and the sample 12 is held on the sample mounting surface by a support agent 13 such as an adhesive or a double-sided tape.

The sample table 21 having such a shape is placed on the cylindrical piezoelectric element main body 22 via the support portion 23, as shown in (b) and (c).

The cylindrical piezoelectric element main body 22 constituting the fine movement position adjusting device 20 has an inner peripheral surface electrode formed on the entire inner peripheral surface of the cylindrical piezoelectric element main body 22 in which a piezoelectric material is formed in a cylindrical shape. On the outer peripheral surface of the cylindrical piezoelectric element body 22, outer peripheral electrodes 22a are formed in respective regions obtained by dividing the peripheral surface into four along the axial direction of the cylinder.

The lower portion of the cylindrical piezoelectric element body 22 is fixed and held by a solid board 23.

The support portion 24 shown in FIG. 1B has a columnar shape or a thick disk shape, and has a flat lower surface.
The upper surface 24a has a concave shape that matches the lower surface shape of the sample table 21, and the sample table 21 is held by placing the sample table 21 on the upper surface 24a. Since the sample table 21 is simply placed on the support 24,
The sample table 21 is movable on the support part 24.

The support portion 25 shown in FIG. 1 (c) has a columnar shape or a thick disk shape, and has a flat bottom portion.
The upper surface 25a side is hollowed out in a cylindrical shape, and the remaining side wall 25b forms a ring-shaped support portion. The sample table 21 is held by placing the sample table 21 on the ring-shaped side wall 25b. Also in this case, the sample table 2
Since 1 is simply placed on the support part 25, the sample table 21 can be moved on the support part 25.

Both support parts 24 and 25 are
In this embodiment, it is fixed to the upper end of the cylindrical piezoelectric element body 22.

Fine movement position adjusting device 2 having such a configuration
0 means that a voltage is applied between the common electrode on the inner peripheral side of the cylindrical piezoelectric element body 22 and the outer peripheral side electrode 22a on the outer peripheral side, and the cylindrical piezoelectric element body 22 responds to this applied voltage. By utilizing the deformation, the upper end side of the cylindrical piezoelectric element body 22 can be displaced in the facing direction of the facing outer peripheral side electrodes 22a.

In the structure of FIG. 1B in this embodiment, the upper surface 24a of the support portion 24 provided at the upper end of the cylindrical piezoelectric element body 22 is held by the lower surface 21b of the sample table 21. The sample table 21 has a concave surface conforming to the curvature, and the lower convex surface (lower surface 21a) of the sample table 21 is the concave surface 24
The concave surface 2 is formed by simply mounting it on a.
It can be tilted arbitrarily on 4a.

Now, a drive signal output for generating a single-waveform voltage signal for one period or a single-waveform voltage signal for a plurality of periods that is intermittently continuous and applying it as a drive signal to the electrode of the cylindrical piezoelectric element body 22. A device is provided, and a drive signal is applied to a desired electrode from the drive signal output device to forcefully bend the cylindrical piezoelectric element body 22.

Then, the lower surface 21a of the sample table 21 slides on the upper surface 24a of the support portion 24. Therefore, when the cylindrical piezoelectric element body 22 returns to the original posture, the sample table 2
The upper surface 21b of No. 1 stands still in an inclined state as compared with the original state.

The same applies to the case of the configuration of FIG. 1C, in which the lower convex surface (lower surface 21a) of the sample table 21 contacts only the upper end of the ring-shaped wall portion 25b, and similar to the case of the support portion 24. The sample table 21 can be tilted at a predetermined angle by driving the cylindrical piezoelectric element body 22.

When the upper surface of the sample 12 is entirely inclined with respect to the scanning plane of the probe, the posture of the upper surface of the sample table 21 is adjusted by performing such an operation. The entire upper surface of the probe should be aligned with the scanning plane of the probe.

The tilt adjustment will be described in more detail.

Electrode 22 on outer peripheral side of cylindrical piezoelectric element body 22
A single-waveform voltage signal for one cycle so as to have opposite phases to each two facing each other in a, or a single-waveform voltage signal for a plurality of cycles that is intermittently continuous as the drive signal as a drive signal output device ( (Not shown), the cylindrical piezoelectric element body 22 is displaced in a two-dimensional plane with reference to the surface of the substrate 23 to which it is fixed.

Then, this should be an impulsive displacement with acceleration given by the equation (1), and the equation (2)
Under such conditions, that is, the maximum value (maω ² ) of the inertial force acting on the sample table 21 is equal to the support parts 24 and 25 and the sample table 2
Under the condition that the static frictional force (Ff) between the two is larger than the static frictional force (Ff), the lower convex surface 21a of the sample table 21 mounted on the support portions 24 and 25 has the center of curvature of the cylindrical piezoelectric element body 22. It will be slightly rotated in the displacement direction (gonio stage operation). Thereby, the inclination of the sample can be adjusted.

X = −acos (ωt) + a (1) maω ² > Ff (2) where Ff is proportional to mgμ _o , x is the rotation amount of the sample table, m is the mass of the sample table 21, a is the amplitude when the stage is driven, μ _o is the coefficient of static friction between the supports 24 and 25 and the sample table 21, g is the gravitational acceleration, and ω is the cylindrical piezoelectric element body 2.
2 is the angular frequency that drives 2.

After adjusting the inclination of the sample table 21 by such an operation, normal observation by a scanning probe microscope (SPM) is performed.

In order to perform normal observation, in the case of the first embodiment, a voltage is applied to each of the two opposing electrodes 22a on the outer peripheral side electrode 22a of the cylindrical piezoelectric element body 22 to apply a voltage to the cylindrical piezoelectric element body 22. The upper position is displaced in the X-axis and Y-axis directions by a desired amount to change the position of the sample table 10 with respect to the probe, thereby causing scanning and functioning as a moving stage.
The applied voltage at this time is set so as to give a gentle displacement unlike when the tilt of the sample table 21 is adjusted.

By the above operation, the sample 12 on the sample table 21 is
Even if the upper surface of the sample 12 is entirely inclined due to uneven thickness of the sample 12, it can be solved by adjusting the inclination of the sample table 21. Therefore, the upper surface of the sample 12 is along the scanning plane of the probe, so that accurate observation is possible. Further, since there is no mechanical rotary drive operation system like the conventional goniometer, it is possible to reduce the size and weight, and the fine movement position adjusting device is optimal for combination with the cylindrical piezoelectric element.

[Structure as Scanning Probe Microscope] Here, the scanning probe microscope employing the fine movement position adjusting device (moving stage) 20 will be described.

FIG. 2 is a block diagram of a scanning probe microscope which employs the above-described fine movement position adjusting device 20, in which 1 is a host computer and 2 is a microcomputer (hereinafter, referred to as a computer).
Referred to as a microcomputer), 3 is an A / D converter, and 4 is a Z controller. Further, 5 is an XY scanning unit, 7 is a cantilever Z displacement detecting unit, 8 is a cantilever θ displacement detecting unit, 9 is a cantilever, 9a is a probe, 20 is a fine movement position adjusting device (moving stage), and is in the XYZ axis directions. You can adjust the position. Two
Reference numeral 1 is a sample table, and 12 is a sample.

The sample table 21 is for mounting and holding the sample 12, and the sample table 21 is a fine movement position adjusting device 20.
It is provided above. The fine movement position adjusting device 20 is configured by forming the piezoelectric body in a cylindrical shape as described above, and controls signals (Z control signal S3, X control signal S4, Y control signal S
According to 5), the sample table 21 can be moved in the X-axis, Y-axis, and Z-axis directions. As a result, the sample 12 is scanned in the X-axis and Y-axis directions with respect to the probe 9a of the cantilever 9, and the position of the sample 12 is controlled in the Z-axis direction.

The cantilever 9 has its base end side fixed to a fixed position. The cantilever 9 has a configuration in which the displacement in the Z-axis direction on the free end tip side is detected by the cantilever Z displacement detection section 7, and the twist on the free end tip side is detected by the cantilever θ displacement detection section 8. There is.

The cantilever Z displacement detecting section 7 detects the Z-axis direction displacement and generates a Z displacement signal S1 which is an output corresponding to the detected amount, and the cantilever θ displacement detecting section 8 indicates the twist amount. It detects and outputs the θ displacement signal S2 which is an output corresponding to the detected twist amount.

The microcomputer 2 plays a central role in control of the present system. In order to scan the sample table 21 in XY, a control signal satisfying the conditions of the above equations (1) and (2) is XY.
The scanning amount is given to the scanning unit 5, and the control amount is calculated and given to the Z control unit 4 to control the sample table 21 in the Z-axis direction.
Further, it has a function of converting data corresponding to the control amount into information of unevenness data of the sample surface and giving it to the host computer 1.

The XY scanning section 5 generates an X control signal S4 and a Y control signal S5 according to a command from the microcomputer 2 and gives them to the fine movement position adjusting device 20, and the fine movement position adjusting device 20 receives the X control signal S4, According to the Y control signal S5,
It is configured to be displaced in the X-axis direction and the Y-axis direction,
By such displacement of the fine movement position adjusting device 20, the sample 12 can be two-dimensionally scanned.

The Z control unit 4 is a cantilever Z displacement detection unit 7.
From the Z displacement signal S1 from the cantilever θ displacement detection unit 8 and a θ displacement signal S2 from the cantilever θ displacement detection unit 8 to maintain their respective reference values.
A Z control signal S3 for expanding and contracting in the axial direction is output.

The A / D converter 3 receives the Z from the Z controller 4.
The control signal S3 is A / D converted into digital data,
It is given to the microcomputer 2. This Z for the microcomputer 2
It has a function of taking in digital data of the control signal S3 and transferring it to the host computer 1 as unevenness data indicating unevenness information of the sample surface. Further, the host computer 1 forms an image of the surface unevenness of the sample 12 based on the unevenness data and the XY scanning command information, and outputs and displays it on an output device such as a display device or a printer.

Next, the operation of the apparatus having the above configuration will be described.
When the sample 12 is set on the sample table 21 and started, the microcomputer 2 causes the X control signal S through the XY scanning unit 5.
4, output the Y control signal S5 to the fine movement position adjusting device 20,
The sample 12 is two-dimensionally scanned as shown in FIG. As a result, the probe 9a of the cantilever 9 moves in the following Z direction so that the surface of the sample 12 is held at a predetermined distance.
XY scanning will be performed under the axis control.

That is, when the probe 9a is brought close to the surface of the sample 12 for scanning, the tip of the probe is attracted or repelled by the effect of atomic force or magnetic force according to the unevenness of the surface of the sample 12, and the cantilever 9 is displaced. To do.

The cantilever Z displacement detector 7 detects the displacement of the tip of the cantilever 9 in the Z-axis direction and outputs a Z displacement signal S1. The cantilever θ displacement detection unit 8 detects the torsional displacement of the tip of the cantilever 9 and outputs a θ displacement signal S2. The Z displacement signal S1 and the θ displacement signal S2 are input to the Z control unit 4, and the Z control unit 4 responds to the Z displacement signal S1 and the θ displacement signal S2 to maintain them at their respective reference values. The displacement amount of the shaft is obtained, and this is used as the Z control signal S3.
Output as.

In this way, the Z control unit 4 obtains the Z-axis displacement amount that keeps the Z displacement signal S1 and the θ displacement signal S2 at their respective reference values in accordance with the Z displacement signal S1 and the Z control signal S3.
Is output to the fine movement position adjusting device 20, and the fine movement position adjusting device 20 performs expansion / contraction control in the Z-axis direction according to the distance of the probe 9a with respect to the sample surface and the θ displacement of the cantilever 9 so that the cantilever 9 is not twisted. To sample 1
The distance between 2 and the tip of the probe 9a is controlled.

Further, the Z control signal S3 is A / D converted by the A / D converter 3 and taken into the microcomputer 2. The microcomputer 2 transfers the fetched data of the Z control signal S3 to the host computer 1 as uneven data, and X
The Y scanning position information is also combined and sent to the host computer 1 as position data. The host computer 1 forms an image of the surface irregularities of the sample 12 based on the information, and displays the image.

As described above, the cylindrical piezoelectric element body 22
The sample table 21 placed on the upper part of the cylinder can freely adjust its posture by the drive control of the cylindrical piezoelectric element body 22 in accordance with the conditions of the above-mentioned formulas (1) and (2), and after the posture adjustment, the cylinder can be adjusted. Normal scanning as a moving stage can be performed by gently controlling displacement of the piezoelectric element body 22.

Therefore, the posture of the sample table 21 is changed to the sample table 21.
It becomes possible to adjust the surface of the sample 12 held above so as to eliminate the overall inclination, and to align it with the scanning plane of the probe, and to perform scanning in that posture. Therefore, the upper surface of the sample 12 can be scanned as being along the scanning plane of the probe 9a, and an accurate image of the sample can be observed.

(Second Embodiment) The second embodiment is a sample table 21.
Is placed on the moving support portion, and the moving support portion is placed on the cylindrical piezoelectric element body 22 so as to move freely. By moving it on the piezoelectric body 22 of the die type, it has a function as a moving stage.
This will be specifically described.

In the embodiment shown in FIG. 3 (a), the support portion 24 having the concave upper surface and the support portion 25 having the ring-shaped upper surface (each of which has a mass of m ₂ ) shown in the first embodiment can be moved. In order to achieve the above, the support is not placed on the cylindrical piezoelectric element body 22, but is merely placed.
Below 25 and 25 are fixed support parts 2 using electromagnets.
6 is provided.

The fixed support portion 26 is fixed on the cylindrical piezoelectric element main body 22, and the support portions 24 and 25 are entirely made of a magnetic material or a magnetic material portion is provided on the lower surface and magnetic force is fixed by an electromagnet of the fixed support portion 26. It was made possible.

As shown in FIG. 3 (b), the fixed support portion 26 is a member having the same size as the support portions 24 and 25, and has a bottomed cylindrical shape and a main body 26A having an iron core 26a formed in the center thereof. , A coil 26b wound around an iron core 26a.

The fixed support portion 26 is fixed to the upper portion of the cylindrical piezoelectric element body 22, and the above-mentioned support portion 24 or 25 is placed on the upper portion of the fixed support portion 26. In the second embodiment, the support section 24
Or, since 25 is simply placed on the fixed support portion 26, when the coil 26b of the fixed support portion 26 is not energized to cause the fixed support portion 26 to act as an electromagnet, the fixed support portion 26 is placed above the fixed support portion 26. It can be moved freely.

A sample table 21 (mass: m ₁ ) having the same shape as that of the first embodiment is placed on the support part 24 or 25. The fixed support portion 26 fixed to the upper end of the cylindrical piezoelectric element body 22 has a structure in which a magnetic clamp including an electromagnet including an iron core 26a and a coil 26b is incorporated as shown in FIG. 3B.

The electromagnet can be magnetized by applying a rectangular voltage from an external power source so that residual magnetization remains, and demagnetized by applying a damping AC voltage that reduces the hysteresis of the magnetization. Can be done (magnetic clamp on / off). In addition, the static friction force (F) between the sample table 21 and the movable support portion 24 (or 25).
f ₁ ) is set to be larger than the static frictional force (Ff ₂ ) between the support portion 24 (or 25) and the fixed support portion 26.

The movable support 24 (or 25) on the fixed support 26 is magnetically fixed to the fixed support 26 by a magnetic clamp, so that the sample table 21 is magnetically fixed and movable. (Or 25) is manufactured using a material that is not affected by the magnetic force generated in ().

With the above configuration, when the cylindrical piezoelectric element body 22 is driven by the voltage of the frequency ω _{2 which} satisfies the condition of the expression (3) with the magnetic clamp of the fixed support portion 26 being off, the fixed support portion 26 is Since the upper support part 24 or 25 is only placed on the fixed support part 26, the sample support 21 and the support part 24 (or 25) slide on the fixed support part 26 and the cylindrical piezoelectric element main body 22.
4 (a), which is the initial position, changes to the state shown in FIG. 4 (b).

At this drive frequency, the sample table 21
The relative displacement of the movable support part 24 (or 25) does not occur. By such an operation, the movable support part 24 (or 25) can move on the fixed support part 26 to change its position, and therefore the sample table 21 can be moved without changing its posture. 24 (or 2
The position will change integrally with 5).

As a result, the sample table 21 for the probe 9a is
The position of the sample above can be adjusted (above, position adjustment of the sample with respect to the probe).

Next, the magnetic clamp of the fixed support portion 26 is turned on, the movable support portion 24 (or 25) is magnetically fixed to the fixed support portion 26 at the upper end of the cylindrical piezoelectric element body 22, and then The cylindrical piezoelectric element body 22 is driven at the frequency ω ₁ that satisfies the condition of the equation (3) shown in FIG.

Then, since the movable support part 24 (or 25) is fixed on the fixed support part 26 by the magnetic clamp, it is not displaced (FIG. 4C), and the support part 24 (or 25) is not displaced. Only the sample table 21 placed on the upper surface is minutely rotated. Therefore, the posture can be changed to a desired state by repeating such a minute rotation operation of the sample table 21 as necessary (the above is the sample posture adjustment; goniometer stage drive).

If the posture is changed in this way and the entire upper surface of the sample 12 on the upper surface of the sample table 21 becomes parallel to the scanning plane of the probe, the magnetic clamp is released, and the operation as the moving stage is started. , Observe the sample (observation by scanning).

In scanning of this sample, the cylindrical piezoelectric element body 22 is displaced and driven under the condition according to the above equation (3), and the support portion 24 (or 25) where the magnetic clamp is released is moved to the cylindrical piezoelectric element body 22. A small amount of sliding on the fixed support part 26 due to the reaction caused by the displacement allows the sample table 21 to be integrated with the support part 24 (or 25) without changing the posture.
It is realized by being able to move in the directions of the axis and the Y axis (FIG. 4 (d)).

To release the magnetic clamp, an alternating current may be applied to the coil 26b to erase the magnetic force of the iron core 26a.

[0090] ^{_{m 1 aω 1 2> Ff 1}} > (m 1 + m 2) aω 2 2> Ff 2> (m 1 + m 2) a s ω s 2 ... (3) _{However, Ff 2 = (m 1 +} m 2 ) Gμ ₂ and Ff ₁ is m
Proportional to ₁ gμ ₁ , where m ₁ is the mass of the sample table 21, m ₂ is the mass of the movable support part 24 (or 25), a is the amplitude when the stage is driven (amplitude of the cylindrical piezoelectric element body 22), a _s is the maximum amplitude during scanning, and μ ₁ is the sample table 21 and the movable support unit 2.
4 (or 25) between the static friction coefficient, μ ₂ is the static friction coefficient between the movable support portion 24 (or 25) and the fixed support portion 26, g is the gravitational acceleration, and ω ₁ and ω ₂ are the stage driving The angular frequency (angular frequency of the cylindrical piezoelectric element body 22), ω _s, is the scanning frequency of the probe 9a when performing observation with a scanning probe microscope (SPM).

In this embodiment, the cylindrical piezoelectric element body 22
A fixed support part 26 having a magnetic clamp mechanism using an electromagnet is provided on the upper part of the table, and a magnetic support part 24 (25) for holding the sample table 21 is movably arranged on the fixed support part 26. Further, the sample table 21 whose lower portion is formed into a curved convex surface is arranged on the support table 24 (25), and the support table 24 of the sample table 21 is arranged.
The holding structure for (25) is a concave surface or a ring shape matching the curved convex surface of the lower portion of the sample table 21, so that the sample table 21 is freely rotatably held by the cylindrical piezoelectric element body 22. When the magnetic clamping by the fixed support portion 26 is not performed with respect to the displacement of the cylindrical piezoelectric element main body 22, the support portion 24 (25) on the fixed support portion 26 is made movable and the support portion 24
By moving the sample table 21 together with (25) to enable scanning in the X-axis and Y-axis directions and fixing the support section 24 (25) on the fixed support section 26 with a magnetic clamp, the cylindrical piezoelectric element body can be obtained. With respect to the displacement of 22, the sample table 21 on the support part 24 (25) can be minutely rotated so that the posture can be adjusted.

Since the position and orientation of the sample table 21 can be automatically adjusted in this way, according to this embodiment, scanning for preparation and observation can be automated.

Therefore, even if the upper surface of the sample 12 on the sample table 21 is entirely inclined due to uneven thickness of the sample 12, it can be solved by adjusting the inclination of the sample table 21, The upper surface of the sample 12 is along the scanning plane of the probe. In addition, since there is no mechanical rotary drive operation system like the conventional goniometer stage, it is possible to make it smaller and lighter, which is optimal for combination with a cylindrical piezoelectric element, and is also capable of fine adjustment of the position and orientation. It becomes a device.

(Third Embodiment) Next, a third embodiment will be described.

In the third embodiment shown in FIG. 5, a tilt detecting mechanism for detecting the tilt of the sample table 21 is provided in the fine movement position adjusting device 20 of the first and second embodiments. In this embodiment, an optical angle detection including a semiconductor laser device (LD) 119, a collimator 130, a prism 120, a condenser lens 121, and a four-division photodetector 122 on a substrate 23 to which the cylindrical piezoelectric element body 22 is fixed. The system is provided as the tilt detection mechanism 123.

That is, the cylindrical piezoelectric element main body 22 is fixed upright on the base plate 23, and the base plate 23 has a hole 23a formed at the center axis position of the cylindrical piezoelectric element main body 22. Is arranged below the hole 23a so as to intersect with the central axis of the cylindrical piezoelectric element body 22, reflects the laser light from the LD 119 to the sample table 21 side along the central axis, and The four-division photo detector 12 that allows the reflected light from the 21 side to pass through
The configuration leads to 2.

The four-division photodetector 122 is an optical sensor, and the light receiving surface is divided into four equal parts in four directions with the center point as the origin, and the origin is aligned with the center axis of the cylindrical piezoelectric element body 22 to form a cylindrical shape. It is arranged so as to face the bottom of the piezoelectric element body 22. The prism 120 is a four-division photo detector 122.
And a bottom portion of the cylindrical piezoelectric element body 22.
The forward path of the laser light from D 119 and the reflected light path from the sample table 21 are secured.

The collimator 130 is for collimating the laser light from the LD 119 and guiding it to the prism 120 as a spot-shaped laser beam, and the condensing lens 121 is the sample stage 21 obtained via the prism 120. This is for converging and guiding the reflected light from the four-division photodetector 122.

The lower part 21a of the sample table 21 is basically the first
It is a curved convex surface as in the example, but a part of the bottom is a reference surface 124 parallel to the upper surface of the sample table 21,
The light from the LD 119 is reflected by the reference surface 124.

In the vicinity of the center of the cylindrical piezoelectric element body 22, the fixed support portion 26, and the movable support portion 24 (25) shown in the first and second embodiments, the LD
In order not to prevent the optical path of the parallel light incident on the reference surface 124 below the sample table 21 from 119, the hollow portion H
Is provided.

The laser light emitted from the LD 119 passes through the collimator 130 to become parallel light, and then the prism 12
0, and passes through the hole 23a of the substrate 23 and the hollow portion H of the cylindrical piezoelectric element body 22 and the support portions 26, 24 (25) and the like, and passes through the reference surface 124 below the sample table 21.
Incident on. Then, the reflected light returns on the outward path, passes through the prism 120, and the four-division photodetector 122 provided at the focal position of the lens by the condenser lens 121.
To reach.

In the tilt detecting mechanism 123, when the parallel light is vertically incident on the reference surface 124 below the sample table 21, the reflected light is incident on the center (origin position) of the quadrant photodetector 122 and is quadrantally divided. Photo detector 122
a to 122d are evenly incident, and the outputs of the four photodetectors 122a to 122d are equal to each other.

In this mechanism, from the prism 120 to the sample table 2
Since the distance to the reference plane 124 at the bottom of 1 can be arbitrarily set,
The inclination detection mechanism 123 can be fixed to the base 23 freely in consideration of three-dimensional interference in the device configuration.

From the above structure, the cylindrical piezoelectric element body 22
The tilt of the sample table 21 when driving as a gonio stage is detected as an output difference of each of the detectors 122a to 122d because the reflected light from the reference surface 124 below the sample table 21 deviates from the center of the four-division photodetector 122. It By calibrating this output, the angle of the reference surface 124 can be monitored.

Based on the above operation, the procedure for automatically correcting the inclination of the sample table 21 before observation with the scanning probe microscope will be described with reference to the state transition diagram of FIG.

(First Step) First, the center line of the X axis and the Y axis in the desired observation (scanning) range RMA of the sample 12 is set to the probe 9a.
(FIG. 6 (a)), and the surface images (concavo-convex images) IMX and IMY in the respective axial directions are captured (FIG. 6 (b),
(C)).

(Second Step) X-axis and Y-axis surface image I
Inclination of sample surface from MX, IMY (inclination in X direction: α, Y
Directional inclination: β) is calculated (FIGS. 6D and 6E). In this operation, when the unevenness image shows a relatively periodic unevenness structure, the first-order inclination may be obtained by the least square method, but normally the rotation angle from the horizontal line (X axis) can be set manually. Keep it.

(Third Stage) Four-division Photo Detector 1
While monitoring the inclination of the sample table 21 from the output of 22, the gonio stage is driven until the sample table 21 rotates Δα in the X direction and Δβ in the Y direction from the initial position, that is, the inclination (posture) of the sample table 21 is adjusted. To operate (Fig. 6 (f),
(G)). When this operation is completed, the surface of the sample 12 is scanned by the probe 9a of the scanning probe microscope.

As described above, the detection system for the inclination of the sample table 21 is provided, and the tendency of the unevenness of the surface of the sample 12 is X.
The inclination of the surface of the sample 12 is examined based on the results of the investigations in the axis and Y-axis directions, and the goniometer stage of the sample table 21 is driven so as to eliminate the inclination, and the angle at which the inclination is eliminated. After that, when the tilt adjustment of the sample table 21 is completed, the scanning as a microscope can be performed to observe the sample surface, so that a correct image can be obtained and the observation can be performed more accurately. In particular, being able to optimally correct the inclination of the sample before scanning leads to improvement in accuracy of the scanning probe microscope.

(Fourth Embodiment) Next, a fourth embodiment will be described.

In the embodiment shown in FIG. 7, the inclination of the sample table 21 shown in the third embodiment is detected by using an optical lever method. In this embodiment, a semiconductor laser device (LD) 140 which is a light source, a collimator 141 which collimates the laser light from the LD 140 and impinges it on the upper surface of the sample table 21, and detects reflected light from the upper surface of the sample table 21. An optical angle detection system 143 including a split photodetector 142 is used.

The two-divided photodetector 142 has a structure in which the photodetector portions 142a and 142b divided into two are arranged in parallel, and the reflected light of the sample table 21 is arranged in parallel as the sample table 21 tilts.
42a and 142b are moved across the alignment direction. When the upper surface 21b of the sample table 21 is horizontal, the two photodetector sections 142a, 142 are
The reflected light is evenly incident on b to generate the same detection output, and the detection output of the photodetector sections 142a and 142b is accompanied by the change of the crossing position of the photodetector sections 142a and 142b due to the tilt of the sample table 21. The difference in level is changed.

Such an angle detection system 143 is used for the sample table 2
The laser light from the LD 140 passes through the collimator 141 to become parallel light, and then is irradiated onto the upper surface of the sample table 21 and reflected by the upper surface of the sample table 21. The reflected light enters the two-divided photodetector 142 and is detected. The upper surface of the sample table 21 is mirror-finished so that the laser light is sufficiently reflected.

Therefore, similarly to the third embodiment, the sample table 21
The optical path of the laser light reflected on the upper surface of the sample table 21 moves in the direction parallel to the photodetector portions 142a and 142b according to the inclination of the photodetector portion 142a.
From a and 142b, detection outputs having a difference according to the inclination of the sample table 21 can be obtained.

Therefore, the tilt of the sample table 21 when the cylindrical piezoelectric element body 22 is driven as a goniometer stage is detected as the output difference of the two-divided photodetector 142, and this is used to detect the tilt angle of the sample table 21. Can be done.

In this embodiment, the reference surface 124 of the lower surface of the sample table 21 and the hole 23a of the base 23 and the hollow portion H of the support portions 26, 24 (25) which are required in the third embodiment are required. Instead, the inclination detection system can be configured, and thus the configuration is simple.

(Fifth Embodiment) Next, a fifth embodiment will be described.

This embodiment is a combination of the second embodiment and the third embodiment (or the fourth embodiment), and the gonio stage drive (posture adjustment) and the normal movement stage operation (scanning) are performed. They can be alternately performed and the tilt can be detected when the goniometer stage is driven. Also, in this example, the tilt adjustment is not the tilt state as the overall tendency of the sample,
The inclination of the target portion to be observed can be corrected so that an image of the target area can be obtained with high accuracy even when the surface of the sample has different degrees of inclination.

As shown in FIG. 8, the sample table 21 and the sample 12 are
In this combination, it is assumed that the local radius r of the sample table 21 and the distance d from the lower part of the sample table 21 to the surface of the sample 12 are known.

From the above r and d, the minute displacement ΔS in the rotation direction when the sample table 21 rotates Δθ in a certain direction is given by the following equation.

ΔS = (r−d) Δθ (4) Based on the above operation, the automatic inclination correction of the sample table 21 and the desired observation region RM of the sample 12 before the observation by the scanning probe microscope are performed. The manner in which positioning is performed will be described with reference to FIGS. 4, 6, and 9.

First, the sample table 21 holding the sample 12 is made horizontal, and the movable support part 24 (25) is magnetically clamped to the fixed support part 26.
In order to adjust the desired observation region RMA of No. 2 below the probe 9a, the fine movement position adjusting device 20 is driven normally (operation as a moving stage) (from the state of FIG. 9A to the state of FIG. 9B). Transition control to).

Then, similarly to the third embodiment, the center lines of the X axis and the Y axis in the desired observation (scanning) range RMA of the sample 12 are scanned by the probe 9a (FIG. 6 (a); FIG. 9 (b) stage operation)), and the surface images (concavo-convex images) IMX and IMY in the respective axial directions are taken in (FIG. 6 (b),
(C)).

Next, the surface images IMX, I in the X-axis and Y-axis directions.
The inclination of the sample surface (X-direction inclination: α, Y-direction inclination: β) is calculated from MY (FIGS. 6D and 6E).

While monitoring the inclination of the sample table 21 from the output of the four-division photo detector 122, the gonio stage is driven until the sample table 21 rotates Δα in the X direction and Δβ in the Y direction from the initial position, that is, the sample table 21. The tilt adjustment operation is performed (FIGS. 6 (f) and 6 (g)).

At this time, the first desired observation region RMA is X
The displacement is ΔSx (= (rd) Δα) in the direction and ΔSy (= (rd) Δβ) in the Y direction.

Here, −ΔSx in the X direction and −Δ in the Y direction.
Normal stage drive is performed so as to move Sy (FIG. 9).
(C)).

When this operation is completed, the surface of the sample 12 is scanned by the probe 9a of the scanning probe microscope (FIG. 9 (d)).

According to the above embodiment, first, the sample table 21
Is operated to move the target portion of the sample to the scanning area of the probe 9a. When the target portion comes to the scanning area of the probe 9a, the sample is scanned to obtain an uneven image. The degree of inclination of the surface of the sample observation target is examined, and the goniometer stage of the sample table 21 is driven while using the detection system for the inclination of the sample table 21 so as to eliminate the inclination, and the inclination angle is eliminated. After the tilt adjustment of the sample table 21 is completed, the scanning as a microscope is performed so that the sample surface can be observed. Therefore, the observation target area of the sample is relative to the scanning plane of the probe. It becomes possible to scan and observe in a parallel state, and it becomes possible to observe an image of a target portion with high accuracy. In particular, since the tilt is corrected centering on the target portion, it is possible to obtain an image of the target region with high accuracy even when the sample surface partially has different degrees of tilt.

(Sixth Embodiment) Next, a sixth embodiment will be described.

The embodiment shown in FIG. 10 shows a stage in which cylindrical members 132 and 133 rotatable on the X-axis and the Y-axis are provided on the upper end of the cylindrical piezoelectric element body 22. In the figure, the lower portion of the support member 131 is fixed to the upper end of the cylindrical piezoelectric element body 22, and the upper surface thereof is a cylindrical concave surface, for example, a kamaboko-shaped concave portion 131a.

On the upper surface of the support member 131, an intermediate member 132 having a lower convex surface portion (kamaboko-shaped convex surface) 132a, the lower portion of which is fitted to the semi-cylindrical concave surface portion 131a of the support member 131, contacts the lower convex surface portion 132a. The upper surface of the intermediate member 132 is a cylindrical concave portion (bend-shaped concave surface) 132b having an axis in a direction orthogonal to the axial direction of the lower convex surface.

On the concave surface portion 132b of the intermediate member 132, a sample table 133 having a lower convex surface portion (kamaboko-shaped convex surface) 133a whose lower surface matches the concave surface portion 132b is provided.
33a is placed in contact with the sample table 133.
The upper surface portion 133b of the
The sample 12 is attached to 33b with a double-sided adhesive tape, an adhesive, or the like and held.

Support member 131 and intermediate member 132
On the side surface of the claw portion 13 for restricting the movement of the intermediate member 132 and the sample table 133 in the direction perpendicular to the rotation direction.
4 are provided so as to project.

[0135] The apparatus having the above-mentioned structure is used in the support member 1
31 to the intermediate member 132, and the intermediate member 13
The sample table 133 is rotatable with respect to each of the two, and the respective rotation axes are in the directions of the X axis and the Y axis. Therefore, the rotation of the intermediate member 132 corresponding to the rolling direction and the rotation of the sample table 133 corresponding to the swinging direction enable the sample table 133 to freely change its upper surface orientation.

By controlling the driving of the cylindrical piezoelectric element body 22, the tip side of the cylindrical piezoelectric element body 22 is X-axis,
It can be arbitrarily shaken in the Y-axis direction. Further, since the intermediate member 132 and the sample table 133 are restricted by the claws 134, they are not displaced in the direction perpendicular to the curved surface, that is, in the directions of their respective rotation axes, and are not displaced.

Therefore, by controlling the driving of the cylindrical piezoelectric element body 22, the cylindrical piezoelectric element body 22 is swung to drive the sample stage 133 to the goniometer stage, and the stage is operated after adjusting it to a desired tilted state. You can

In this way, the intermediate member 132 and the sample table 133 are
Since the rotations of X and Y are independently performed along the cylindrical surface and are constrained by the cylindrical surfaces independently of each other, the rotations in the X direction and the Y direction do not interfere with each other. Due to this structure, the gonio stage drive operation only needs to be performed in the X-axis direction and the Y-axis direction.
33 can be adjusted to any angular position. Therefore, the drive control of the cylindrical piezoelectric element body 22 is simple, and the control system is simple.

[0139]

As described above in detail, according to the present invention, the inclination of the upper surface of the sample on the sample table can be adjusted by the gonio stage operation, and an accurate observation image can be obtained.

[Brief description of drawings]

1A and 1B are views for explaining the configuration of a moving stage according to a first embodiment of the present invention, in which FIG. 1A is a front view of a sample stage portion of the moving stage, and FIG. 1B is a cylinder having a concave support portion. The figure which shows the moving stage of the structure which provided the sample stand on the piezoelectric piezoelectric element, (c) is a figure which shows the moving stage of the structure which provided the sample stand on the cylindrical piezoelectric element which has a ring-shaped support part.

FIG. 2 is a block diagram showing the configuration of a scanning probe microscope using the moving stage of the present invention.

3A and 3B are views for explaining a second embodiment of the present invention, in which FIG. 3A is a diagram showing an overall configuration of a fine movement position adjusting device, and FIG. 3B is a diagram showing a structure of a fixed support portion. Fig.

4A and 4B are views for explaining an operation example of the second embodiment of the present invention, in which FIG. 4A is an initial state, and FIG. 4B is a diagram showing a state in which the position of the sample is adjusted by clamping off; FIG. 6C is a diagram showing a state in which the posture of the sample is adjusted by clamp-on, and FIG.

FIG. 5 is a diagram for explaining a configuration example of a third embodiment of the present invention.

FIG. 6 is a view for explaining a procedure for performing automatic tilt correction in the device of the third embodiment of the present invention, and FIGS.
(C) is the first stage, (d) and (e) is the second stage,
(F) And (g) is a figure which shows the 3rd step, respectively.

FIG. 7 is a diagram for explaining a fourth embodiment of the present invention.

FIG. 8 is a diagram for explaining a fifth embodiment of the present invention.

9A and 9B are views for explaining the operation of the fifth embodiment of the present invention, in which FIGS. 9A and 9B are views showing position adjustment of a sample, and FIG. 9C is a surface image in the axial direction (unevenness). Image) IMX, IMY
FIG. 3 is a diagram showing a process of taking in, inspecting the inclination to adjust the posture, and (d) a diagram showing a stage of scanning the sample surface.

FIG. 10 is a diagram for explaining the sixth embodiment of the present invention.

FIG. 11 is a schematic perspective view for explaining the configuration of a conventional fine movement position adjusting device.

12A and 12B are views for explaining the operation of the fine movement position adjusting device, wherein FIG. 12A is when the voltage is open, FIG.
(C) is a figure which shows the example of a state at the time of a voltage release.

FIG. 13 is a view for explaining an example in which the surface of the sample has an inclination with respect to the scanning surface of the probe.

FIG. 14 shows collected pixel data on a sample surface having an inclination,
It is a figure for explaining the state of the data after correction,
(A) is a figure for demonstrating the collection pixel data in case the surface of a sample has inclination with respect to the scanning surface of a probe, (b) is a figure for demonstrating the state of the pixel data after inclination correction.

FIG. 15 is a perspective view showing the structure of a general goniometer stage having two independent axes.

[Explanation of symbols]

 9 ... Cantilever 9a ... Probe 20 ... Fine movement position adjusting device 21, 133 ... Sample stage 22 ... Cylindrical piezoelectric element body 22a ... Outer peripheral side electrode 24, 25 ... Support part 26 ... Fixed support part

Claims (1)

[Claims] 1. A scanning probe microscope that obtains information on the surface of a sample by using a cantilever in which the probe is erected and bringing the probe close to the surface of the sample to perform relative scanning A fine movement position adjusting device for scanning with respect to the cylindrical piezoelectric element in which divided electrodes are arranged on the peripheral surface, a sample table having an upper surface part for mounting a sample and a convex bottom part, A scanning probe microscope, comprising: a support portion that is disposed on an upper portion of the piezoelectric element and that is in contact with the bottom portion of the sample stage to hold the sample stage tiltably.