JPH0621110A - Assembling jig for semiconductor chip - Google Patents
Assembling jig for semiconductor chipInfo
- Publication number
- JPH0621110A JPH0621110A JP4174594A JP17459492A JPH0621110A JP H0621110 A JPH0621110 A JP H0621110A JP 4174594 A JP4174594 A JP 4174594A JP 17459492 A JP17459492 A JP 17459492A JP H0621110 A JPH0621110 A JP H0621110A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- jig
- substrate
- gap
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Die Bonding (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、半導体チップを銅電
極板などを有する回路基板にはんだ付けするために、こ
れらを位置決めし加熱炉に挿入して使用する組立治具に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an assembly jig for positioning and inserting a semiconductor chip on a circuit board having a copper electrode plate and inserting it in a heating furnace.
【0002】[0002]
【従来の技術】図4は従来例の要部の断面図である。図
において、この組立治具の構成は、基板1を位置決め可
能な凹部4を持つ下治具5と、半導体チップ2を落とし
込んで保持可能な穴6を持ち、下面が平坦な上治具7と
からなる。基板1と半導体チップ2との間に、はんだ板
3を挟んで加熱炉に挿入し、はんだ板3を溶解して基板
1に半導体チップ2を固着する。下治具5と上治具7と
の間には工作誤差などにより、わずかな隙8が存在す
る。図に表れないが、例えばDBC(direct bonding c
opper )基板などの回路基板1のための40mm×20
mm角の1つの凹部4に対して、2〜10mm角で0.
2mm厚さの半導体チップ2のための穴6が複数個設け
られ、はんだ板の厚さは0.1mmである。そして治具
5、7の材料はグラファイトカーボン又はステンレス鋼
のように溶融はんだに濡れないものが使用される。2. Description of the Related Art FIG. 4 is a sectional view of a main part of a conventional example. In the figure, the structure of this assembly jig includes a lower jig 5 having a concave portion 4 for positioning the substrate 1 and an upper jig 7 having a hole 6 for dropping and holding the semiconductor chip 2 and having a flat lower surface. Consists of. The solder plate 3 is sandwiched between the substrate 1 and the semiconductor chip 2 and inserted into a heating furnace to melt the solder plate 3 and fix the semiconductor chip 2 to the substrate 1. There is a slight gap 8 between the lower jig 5 and the upper jig 7 due to a working error or the like. Although not shown in the figure, for example, DBC (direct bonding c
40 mm × 20 for the circuit board 1 such as an opper board
With respect to one concave portion 4 having a square shape of 2 mm to 0 mm,
A plurality of holes 6 for the semiconductor chip 2 having a thickness of 2 mm are provided, and the thickness of the solder plate is 0.1 mm. The material for the jigs 5 and 7 is graphite carbon or stainless steel, which does not wet the molten solder.
【0003】[0003]
【発明が解決しようとする課題】前記の従来例では、薄
いはんだ板3に載せた薄い半導体チップ2を上治具7の
穴6が保持する必要があるので、上治具7の下面と基板
1との隙間は少ない。このため、部品を治具にセットし
て加熱炉に挿入してはんだ板3が溶融すると、溶融はん
だは毛管現象で基板1の上面を流れ電気的特性不良とな
る。場合により、溶融はんだが下治具5と上治具7との
間の隙8に浸透し、図示しない隣接する基板1や半導体
チップ2と導通して完全な製品不良となることもある。In the above-mentioned conventional example, since it is necessary to hold the thin semiconductor chip 2 mounted on the thin solder plate 3 in the hole 6 of the upper jig 7, the lower surface of the upper jig 7 and the substrate There are few gaps with 1. Therefore, when the component is set on the jig and inserted into the heating furnace and the solder plate 3 is melted, the molten solder flows on the upper surface of the substrate 1 due to a capillary phenomenon, resulting in poor electrical characteristics. In some cases, the molten solder may penetrate into the gap 8 between the lower jig 5 and the upper jig 7, and may be electrically connected to the adjacent substrate 1 or semiconductor chip 2 (not shown), resulting in a complete product failure.
【0004】この発明の目的は、半導体チップを保持す
る穴を持つ上治具の下面を溶融はんだが毛管現象で周囲
に浸透しないようにできる半導体チップの組立治具を提
供することにある。An object of the present invention is to provide a semiconductor chip assembling jig which can prevent molten solder from permeating the lower surface of an upper jig having a hole for holding a semiconductor chip into the surroundings by a capillary phenomenon.
【0005】[0005]
【課題を解決するための手段】この発明の半導体チップ
の組立治具は、基板を位置決め可能な凹部を持つ下治具
と、半導体チップを落とし込んで保持可能な穴を持つ上
治具とからなり、前記基板と前記半導体チップとの間に
はんだ板を挟んで加熱することにより前記基板に前記半
導体チップをはんだ付けする半導体チップの組立治具に
おいて、前記上治具の下面の前記穴の周囲に前記半導体
チップを保持する高さを確保する範囲で上に凹む隙間凹
部を形成するものである。このとき、前記隙間凹部の領
域を前記凹部の領域より大きくしたり、前記隙間凹部と
前記穴とは前記半導体チップを囲むエッジを形成すると
よい。A jig for assembling a semiconductor chip according to the present invention comprises a lower jig having a recess for positioning a substrate and an upper jig having a hole for dropping and holding the semiconductor chip. , A semiconductor chip assembly jig for soldering the semiconductor chip to the substrate by heating by sandwiching a solder plate between the substrate and the semiconductor chip, around the hole on the lower surface of the upper jig. A gap recessed upward is formed in a range that secures the height for holding the semiconductor chip. At this time, it is preferable that the area of the gap recess is made larger than the area of the recess, or the gap recess and the hole form an edge surrounding the semiconductor chip.
【0006】[0006]
【作用】図1を参照する。半導体チップ2やはんだ板3
の周囲において、上治具17の下面と基板1との間の隙
間が隙間凹部11で大きくなり、溶融はんだが毛管現象
で基板1の上面を流れることが防止される。このとき、
隙間凹部21の領域を前記凹部4の領域より大きくする
と、より確実にはんだ流れを防止するし、隙8に浸透す
ることもない。隙間凹部31と穴6とが半導体チップ1
を囲むエッジ31aを形成するようにすると、半導体チ
ップ2の保持で高さの制限がある穴6に対して、上治具
37の下面と基板1との間の隙間が隙間凹部31で更に
大きくなり、溶融はんだが毛管現象で基板1の上面を流
れることが確実に防止される。Operation Referring to FIG. Semiconductor chip 2 and solder plate 3
The gap between the lower surface of the upper jig 17 and the substrate 1 becomes larger in the gap concave portion 11 at the periphery of the area, and molten solder is prevented from flowing on the upper surface of the substrate 1 by the capillary phenomenon. At this time,
When the area of the gap concave portion 21 is made larger than the area of the concave portion 4, the solder flow is more surely prevented, and the gap 8 does not penetrate. The gap recess 31 and the hole 6 form the semiconductor chip 1
By forming the edge 31a that surrounds the semiconductor chip 2, the gap between the lower surface of the upper jig 37 and the substrate 1 becomes larger in the gap concave portion 31 with respect to the hole 6 whose height is limited for holding the semiconductor chip 2. Therefore, the molten solder is reliably prevented from flowing on the upper surface of the substrate 1 due to the capillary phenomenon.
【0007】[0007]
【実施例】図1は実施例1の要部の断面図、図2は実施
例2の要部の断面図、図3は実施例3の要部の断面図で
ある。図において、従来例及び各図において同一符号を
つけるものはおよそ同一機能を持ち、重複説明を省くこ
ともある。図1において、この組立治具の構成は、基板
1を位置決め可能な凹部4を持つ下治具5と、半導体チ
ップ2を落とし込んで保持可能な穴6を持つ上治具17
とからなる。基板1と半導体チップ2との間に、はんだ
板3を挟んで加熱することにより基板1に半導体チップ
2をはんだ付けする。FIG. 1 is a sectional view of an essential part of the first embodiment, FIG. 2 is a sectional view of an essential part of the second embodiment, and FIG. 3 is a sectional view of an essential part of the third embodiment. In the drawings, the conventional example and the parts to which the same reference numerals are attached have approximately the same function, and duplicated description may be omitted. In FIG. 1, the structure of this assembly jig is as follows: a lower jig 5 having a concave portion 4 for positioning the substrate 1 and an upper jig 17 having a hole 6 for holding the semiconductor chip 2 dropped therein.
Consists of. The semiconductor chip 2 is soldered to the substrate 1 by sandwiching and heating the solder plate 3 between the substrate 1 and the semiconductor chip 2.
【0008】以上の構造は従来例とおよそ同一である。
実施例1の特徴的な構造として、前記上治具17の下面
の前記穴6の周囲に半導体チップ2を保持する高さを確
保する範囲で上に凹む隙間凹部11を形成する。このよ
うな構造によれば、半導体チップ2やはんだ板3の周囲
において、上治具17の下面と基板1との間の隙間が隙
間凹部11で大きくなり、溶融はんだが毛管現象で基板
1の上面を流れることが防止される。The above structure is approximately the same as the conventional example.
As a characteristic structure of the first embodiment, a gap recess 11 is formed around the hole 6 on the lower surface of the upper jig 17 so as to be recessed upward within a range that secures a height for holding the semiconductor chip 2. According to such a structure, the gap between the lower surface of the upper jig 17 and the substrate 1 becomes large in the gap concave portion 11 around the semiconductor chip 2 and the solder plate 3, and the molten solder is capillarized to cause Flowing over the top surface is prevented.
【0009】このとき、実施例2のように、上治具27
の隙間凹部21の領域を前記凹部4の領域より大きくす
ると、より確実にはんだ流れを防止するし、隙8に浸透
することもない。実施例3のように、上治具37の隙間
凹部31と穴6とが半導体チップ1を囲むエッジ31a
を形成するようにすると、半導体チップ2の保持で高さ
の制限がある穴6に対して、上治具37の下面と基板1
との間の隙間が隙間凹部31で更に大きくなり、溶融は
んだが毛管現象で基板1の上面を流れることが確実に防
止される。At this time, as in the second embodiment, the upper jig 27
When the area of the gap concave portion 21 is larger than the area of the concave portion 4, the solder flow is more reliably prevented and the gap 8 does not penetrate. As in the third embodiment, the gap concave portion 31 of the upper jig 37 and the hole 6 surround the edge 31a surrounding the semiconductor chip 1.
When the semiconductor chip 2 is held, the lower surface of the upper jig 37 and the substrate 1 are formed in the holes 6 whose height is limited.
The gap between and becomes larger in the gap concave portion 31, and the molten solder is reliably prevented from flowing on the upper surface of the substrate 1 by the capillary phenomenon.
【0010】[0010]
【発明の効果】この発明の半導体チップの組立治具によ
れば、半導体チップやはんだ板の周囲において、上治具
の下面と基板との間の隙間が隙間凹部で大きくなり、溶
融はんだが毛管現象で基板の上面を流れることが防止さ
れるし、隙に浸透することもないという効果がある。こ
のとき、隙間凹部の領域を前記凹部の領域より大きくす
ると、より確実にはんだ流れを防止するし、隙間凹部と
穴とが半導体チップを囲むエッジを形成するようにする
と、上治具の下面と基板との間の隙間が隙間凹部で更に
大きくなり、溶融はんだが毛管現象で基板の上面を流れ
ることが確実に防止されるという効果がある。According to the semiconductor chip assembling jig of the present invention, the gap between the lower surface of the upper jig and the substrate becomes large in the gap concave portion around the semiconductor chip and the solder plate, and the molten solder is capillarized. It is possible to prevent the phenomenon from flowing on the upper surface of the substrate and to prevent the phenomenon from penetrating into the gap. At this time, if the region of the gap recess is larger than the region of the recess, solder flow is more reliably prevented, and if the gap recess and the hole form an edge surrounding the semiconductor chip, the lower surface of the upper jig is There is an effect that the gap between the substrate and the substrate becomes larger in the gap concave portion, and molten solder is reliably prevented from flowing on the upper surface of the substrate due to the capillary phenomenon.
【図面の簡単な説明】[Brief description of drawings]
【図1】実施例1の要部の断面図FIG. 1 is a cross-sectional view of a main part of a first embodiment.
【図2】実施例2の要部の断面図FIG. 2 is a cross-sectional view of a main part of the second embodiment.
【図3】実施例3の要部の断面図FIG. 3 is a cross-sectional view of a main part of the third embodiment.
【図4】従来例の要部の断面図FIG. 4 is a sectional view of a main part of a conventional example.
1 基板 2 半導体チップ 3 はんだ板 4 凹部 5 下治具 6 穴 7 上治具 8 隙 11 隙間凹部 17 上治具 21 隙間凹部 27 上治具 31 隙間凹部 37 上治具 39a エッジ 1 substrate 2 semiconductor chip 3 solder plate 4 recess 5 lower jig 6 hole 7 upper jig 8 gap 11 gap recess 17 upper jig 21 gap recess 27 upper jig 31 gap recess 37 upper jig 39a edge
Claims (3)
と、半導体チップを落とし込んで保持可能な穴を持つ上
治具とからなり、前記基板と前記半導体チップとの間に
はんだ板を挟んで加熱することにより前記基板に前記半
導体チップをはんだ付けする半導体チップの組立治具に
おいて、前記上治具の下面の前記穴の周囲に前記半導体
チップを保持する高さを確保する範囲で上に凹む隙間凹
部を形成することを特徴とする半導体チップの組立治
具。1. A lower jig having a recess for positioning a substrate and an upper jig having a hole for dropping and holding a semiconductor chip, wherein a solder plate is sandwiched between the substrate and the semiconductor chip. In a jig for assembling a semiconductor chip for soldering the semiconductor chip to the substrate by heating at, the upper surface of the lower surface of the upper jig is secured within a range that secures a height for holding the semiconductor chip around the hole. A jig for assembling a semiconductor chip, characterized in that a recess is formed.
おいて、前記隙間凹部の領域を前記凹部の領域より大き
くすることを特徴とする半導体チップの組立治具。2. The jig for assembling a semiconductor chip according to claim 1, wherein a region of the gap recess is larger than a region of the recess.
治具において、前記隙間凹部と前記穴とは前記半導体チ
ップを囲むエッジを形成することを特徴とする半導体チ
ップの組立治具。3. The jig for assembling a semiconductor chip according to claim 1, wherein the gap recess and the hole form an edge surrounding the semiconductor chip.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4174594A JP3008675B2 (en) | 1992-07-02 | 1992-07-02 | Jig for assembling semiconductor chips |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4174594A JP3008675B2 (en) | 1992-07-02 | 1992-07-02 | Jig for assembling semiconductor chips |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0621110A true JPH0621110A (en) | 1994-01-28 |
JP3008675B2 JP3008675B2 (en) | 2000-02-14 |
Family
ID=15981304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4174594A Expired - Lifetime JP3008675B2 (en) | 1992-07-02 | 1992-07-02 | Jig for assembling semiconductor chips |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3008675B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100321144B1 (en) * | 1998-06-29 | 2002-05-13 | 박종섭 | Flattening film coating device for semiconductor devices |
US6445084B1 (en) | 1998-08-28 | 2002-09-03 | Daimlerchrysler Ag | Immobilizing device for a motor vehicle |
JP2012164841A (en) * | 2011-02-08 | 2012-08-30 | Fuji Electric Co Ltd | Assembly jig of semiconductor device and assembling method of semiconductor device |
KR20140143609A (en) * | 2013-06-07 | 2014-12-17 | 엘지디스플레이 주식회사 | Apparatus and method for component mounting into printed circuit board |
JP2016111255A (en) * | 2014-12-09 | 2016-06-20 | 三菱電機株式会社 | Semiconductor device manufacturing method |
JPWO2022038700A1 (en) * | 2020-08-19 | 2022-02-24 |
-
1992
- 1992-07-02 JP JP4174594A patent/JP3008675B2/en not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100321144B1 (en) * | 1998-06-29 | 2002-05-13 | 박종섭 | Flattening film coating device for semiconductor devices |
US6445084B1 (en) | 1998-08-28 | 2002-09-03 | Daimlerchrysler Ag | Immobilizing device for a motor vehicle |
JP2012164841A (en) * | 2011-02-08 | 2012-08-30 | Fuji Electric Co Ltd | Assembly jig of semiconductor device and assembling method of semiconductor device |
KR20140143609A (en) * | 2013-06-07 | 2014-12-17 | 엘지디스플레이 주식회사 | Apparatus and method for component mounting into printed circuit board |
JP2016111255A (en) * | 2014-12-09 | 2016-06-20 | 三菱電機株式会社 | Semiconductor device manufacturing method |
JPWO2022038700A1 (en) * | 2020-08-19 | 2022-02-24 |
Also Published As
Publication number | Publication date |
---|---|
JP3008675B2 (en) | 2000-02-14 |
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