JPH06208070A - Biaxial driving device and rotational driving device - Google Patents

Abstract

PURPOSE:To provide the biaxial driving device which is small in size and light in weight and can make simultaneous driving in biaxial directions with one set of unit not requiring positional adjustment between the driving devices by driving an object to be driven by using coil groups for electromagnetic driving, etc., and providing 4 pieces or integer times 4 pieces of coils disposed with the coil groups for electromagnetic driving on four sides. CONSTITUTION:A gimbal spring 1 as an elastic supporting member for supporting a reflection mirror 1 as the object to be driven regulates the deviation within a plane. The coils 4a, 10a for electromagnetic driving formed by winding wires having low resistance values plural times to an approximately rectangular shape are bent approximately perpendicularly on their one side and are disposed to face each other to form one set. These coils are disposed in >=2 sets and the total number of the coils 4a, 10a consists of integer times 4. A moving yoke consisting of a ferromagnetic material concentrates the magnetic fluxes generated by stationary magnets 5 and shuts off the leakage thereof to the outside. The driving of the reflection mirror 1 as the object to be driven is controlled simultaneously in the biaxial directions by means of one set of the magnetic circuit system with high accuracy in such constitution.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a biaxial drive device and a rotary drive device, for example, a biaxial drive device suitable for laser beam printers, object reading devices, laser marking, laser trimming, image analysis, and various measurement fields. Further, the present invention relates to a swing drive device that suppresses swing of a rotation center axis for performing angle determination control, a rotary drive device suitable for an actuator for driving a head arm of a servo track writing device of a hard disk device, and the like.

[0002]

2. Description of the Related Art Conventionally, for example, there is a biaxial drive device as a drive means for two-dimensionally scanning a scanning surface with a light beam.

FIG. 7 is a schematic view of a main part of a conventional biaxial drive device.

In the figure, reference numeral 401 denotes a first reflecting mirror as a driving object, which is provided on a main shaft 406 and is rotationally driven by a driving device 403 capable of driving only one axis. Reference numeral 402 denotes a second reflection mirror as a drive target, which is provided on the main shaft 405 and is rotationally driven by a drive device 404 capable of driving only one axis. These one set of driving devices 403 and 404 are arranged so as to be orthogonal to each other within a predetermined plane.

By rotating each of the driving devices 403 and 404, a light beam 40 from a light source (not shown)
7 is a first reflection mirror 401 and a second reflection mirror 402.
Then, the light is sequentially reflected and guided onto the scanning surface 408.
08 is two-dimensionally scanned in the XY directions.

23, 24, and 25 are schematic views of the main part of a conventional rotary drive device.

In the rotary drive unit of FIG. 23, the rotary drive unit 1
01, the sliding bearings 104 and 105 are coaxially fixed, and the central shaft 103 is supported in the inner diameter of each sliding bearing 104, 105 with a minute gap. Central axis 10
A coil 109 is integrally attached to the unit 3. 1
Reference numerals 06 and 107 are yokes made of a ferromagnetic material, and 108 is a magnet.

In the rotary drive unit of FIG. 24, the rotary drive unit 2
01, the outer ring 202-1 of the ball bearing 202 is adhered and fixed, and the inner ring 202-2 of the ball bearing 202 is fixed to the central shaft 20.
It is adhesively fixed to 4. Outer ring 202-1 and inner ring 202
Between -2, a plurality of rolling balls 202-3 are held, whereby the ball bearing 202 serves as a bearing.

At the other end of the central shaft 204, a ball bearing 203
Are held by adhesively fixing the inner ring 203-2 to the central shaft 204, and the outer ring 203-1 is rotatably held via balls 203-3. Outer ring 203-1
Has a minute gap with the rotation drive unit 201.

A spring 207 is arranged on a pedestal 208 provided inside the rotary drive unit 201 to axially press the outer ring 203-3 of the ball bearing 203. The central shaft 204, the inner ring 203-2 of the ball bearing 203, and the inner ring 202-2 of the ball bearing 202 are integrally configured, and as a result, the axial play of the ball bearings 202, 203 is eliminated. 205
Is a coil and 210 is a magnet.

In the rotary drive unit of FIG. 25, the rotary drive unit 3
A ring-shaped belt 303 that presses in a direction perpendicular to the central axis 302 is wound around a central axis 302 supported by an arbitrary bearing 01 (internal detailed configuration is omitted), and the other end of the belt 303 A cylindrical pulley 306 is in contact with.

A through hole (not shown) is formed in the center of the pulley 306.
Is provided and the shaft 305 is inserted. The shaft 305 is fixed to a holding member 304 provided on the surface of the rotation driving unit 301 on the side of the central shaft 302. The belt 303 is tensioned. This suppresses the swinging of the central shaft 302.

[0013]

In the conventional two-axis drive device, the independent movement about the axis is driven by the two drive devices. For this reason, there is a problem in that a large space is taken due to the arrangement of each actuator, and the system of the entire device becomes large-scale. There is also a problem that it is difficult to adjust the position between the two driving devices.

A first object of the present invention is to provide a two-axis drive device in which the entire device is small and lightweight, and a set of units which does not require position adjustment between the drive devices can simultaneously drive in two axial directions. is there.

Of the conventional rotary drive devices, the rotary drive device shown in FIG. 23 uses a method of supporting the rotation center shaft by a sliding bearing, but this method uses a gap between the inner ring of the bearing and the center shaft to cause backlash. However, there is a problem in that the swing around the central axis becomes large and accurate rotational positioning is difficult.

Further, in the rotary drive device shown in FIG. 24, one of the two ball bearings is supported with a gap with the rotary drive part, but in this method, a swing around the gap occurs. On the other hand, there is also a method of removing the gap and fixing the bearing to the housing by a method such as adhesion, but in this method as well, it is said that a slight shaft whirling occurs due to backlash caused by the inner ring, balls, and outer ring of the ball bearing There was a problem.

Further, in the rotary drive device shown in FIG. 25, when the swing around the central axis is forcibly restrained by a contact type with a belt or the like, the swing around the axis can be sufficiently restrained.
The center axis is swung due to the shape of the contact portion such as the belt.
Further, there is a problem that the device becomes larger.

As described above, in the conventional rotary drive device, it has been very difficult to determine the rotation angle with extremely high accuracy.

A second object of the present invention is to provide a rotary drive device capable of removing a clearance at the time of rotation of a bearing and performing a highly accurate rotary drive without shaft shake.

[0020]

A biaxial drive device of the present invention comprises: (1-1) a group of coils for electromagnetic drive with respect to an object to be driven, a magnet for generating a magnetic flux in a regular manner, and the drive. An elastic support member that elastically supports the target object and a support portion for restricting the movement of the target object in the predetermined uniaxial direction are used to drive the target object in the two axial directions, and The electromagnetic drive coil group is characterized by having four or four multiples of coils arranged in four directions.

In particular, (1-1-1) a movable yoke made of a ferromagnetic material for concentrating the magnetic flux generated by the fixed magnet to block leakage to the outside, and concentrating the magnetic flux generated by the fixed magnet. A fixed yoke made of a ferromagnetic material for blocking leakage to the outside, the magnet is magnetized in a predetermined direction by the fixed magnet, and each coil is continuous on two substantially orthogonal predetermined planes. And each coil has a predetermined plane in common, and is arranged so as to wrap all surfaces except one surface by the fixed yoke. And a through hole formed in the center of the main body of the fixed yoke, and a support pin made of a ferromagnetic material serving as the support portion is inserted into the through hole to point-support the driven object.

(1-1-2) A movable yoke made of a ferromagnetic material is arranged in the holding portion for holding the driven object, and the movable yoke is pressed against the supporting portion by the attractive force of the magnet. It has a feature.

(1-2) A group of coils for electromagnetic driving with respect to the object to be driven, a fixed magnet for generating a magnetic flux in a regular manner, and a magnetic flux generated by the fixed magnet are integrated to block leakage to the outside. A fixed yoke made of a ferromagnetic material, an elastic support member for elastically supporting the driven object, and a support pin for restricting a predetermined one-axis movement of the driven object. Drive the driven object in two axial directions 2
In the shaft drive device, the electromagnetic drive coil group is composed of four or a multiple of four coils, and each coil is continuously wound on two predetermined orthogonal planes. At this time, each coil has one predetermined plane in common, and each coil is arranged so as to have a phase of 90 degrees.

In particular, (1-2-1) the fixed magnet for generating the magnetic flux is formed in a donut shape, and the surface facing the coil group for electromagnetic driving is divided into four parts, that is, N and S poles. Are arranged alternately, and a fixed yoke made of a ferromagnetic material is arranged on the surface opposite to the surface facing the coil group for electromagnetic drive. The fixed yoke has a through hole at the center of the main body, and the support pin is inserted into the through hole.

(1-2-2) An angle-measuring reflection mirror is provided in a holding portion for holding the driven object, and a light source and an optical position detecting element are provided on the fixed yoke side.
It is characterized by detecting the rotation angle around the axis.

(1-3) A substantially rectangular bobbin for holding the first reflecting mirror and the second reflecting mirror on both upper and lower surfaces and four surfaces orthogonal to the surface of the bobbin holding the reflecting mirror are integrally formed. A movable part composed of four coils arranged, a support part for rotatably supporting the movable part around two axes in the reflection surface of the first reflection mirror, and a part facing the four coils. A magnetic field generator having a magnet magnetized in two poles at a position
A fixed part for holding the magnetic field generation part, the fixed part is arranged so as to include the movable part via the support part, and the fixed part has a light source and a two-dimensional light receiving element. Means is provided, the luminous flux from the light source is projected onto the second reflecting mirror, the reflected luminous flux from the second reflecting mirror is received by a two-dimensional light receiving element, and the signal from the two-dimensional light receiving element is used to It is characterized in that the rotation angle about the two axes of the movable part is detected.

In particular, (1-3-1) the coil is characterized by being wound into a substantially circular shape.

The rotary drive device of the present invention has (1-4) a rotating shaft, a bearing for rotatingly supporting the rotating shaft, a housing for holding the bearing, a magnet, and a coil. In the rotation drive device for driving, the rotating shaft has a cylindrical first magnet magnetized substantially radially, and the housing has a cylindrical second magnet magnetized substantially radially, The first magnet attached to the rotating shaft and the second magnet attached to the casing are arranged to face each other.

In particular, (1-4-1) the rotating shaft has a cylindrical ferromagnetic body, and the housing has a cylindrical magnet magnetized substantially radially, and is attached to the rotating shaft. The ferromagnetic material and the magnet attached to the casing are arranged so as to face each other.

(1-4-2) A magnet attached to the rotating shaft, the rotating shaft having a cylindrical magnet magnetized substantially radially, and the housing having a cylindrical ferromagnetic material. And the ferromagnetic material attached to the casing is disposed so as to face each other.

(1-4-3) The outer peripheral length of the substantially cylindrical magnet or ferromagnetic body provided on the rotating shaft is the inner circumference of the substantially cylindrical magnet or ferromagnetic body provided on the casing. Longer.

(1-4-4) The outer circumferential length of the substantially cylindrical magnet or ferromagnetic material provided on the rotating shaft is the inner circumference of the substantially cylindrical magnet or ferromagnetic material provided on the casing. It is characterized by being shorter.

[0033]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1A is a front view of a main portion of a first embodiment of a biaxial drive device according to the present invention, FIG. 1B is a sectional view taken along line AA of FIG. 1A, and FIG. FIG.

In the figure, reference numeral 1 is a reflecting mirror as an object to be driven, and 2 is a gimbal spring as an elastic supporting member for supporting the reflecting mirror 1, which regulates a displacement in a plane in FIG. 1 (A). 4 (4a, 4b) and 10 (10a, 10
b) is a coil for electromagnetic drive in which a wire having a low resistance value is wound a plurality of times in a substantially rectangular shape, one side of which is bent at a substantially right angle, and two or more sets are provided as a set facing each other. There is. The total number of coils 4, 10 is an integral multiple of four.

The coils are two planes orthogonal to each other (XZ plane and X plane).
(Y plane) is continuously wound, and each coil is XY
The surfaces are arranged in common and each coil is arranged so as to have a phase of 90 degrees.

Reference numeral 5 is a fixed magnet. Reference numeral 15 denotes a moving yoke (movable yoke) made of a ferromagnetic material, which concentrates the magnetic flux generated by the fixed magnet 5 and blocks leakage to the outside.

Reference numeral 3 is a bobbin, which has a through hole 3a in the center thereof, and includes a reflection mirror 1, a gimbal spring 2, a coil 4,
10. Holds the moving yoke 15 and the like. A fixed yoke 6 made of a ferromagnetic material prevents leakage of the magnetic flux generated by the fixed magnet 5 and strengthens the magnetic flux density in a predetermined direction.

Through holes are provided in the fixed magnet 5 and the fixed yoke 6. Reference numeral 7 denotes a housing, which has a hole at the center of the bottom. Reference numeral 11 is a lid having a hole with a diameter larger than that of the reflection mirror 1 in the central portion. Reference numeral 8 denotes a support pin, which is inserted into the through hole of each component and is in contact with the back surface of the reflection mirror 1.
The gimbal spring 2 elastically supports the reflection mirror 1.

The gimbal spring 2 is made of a spring material and supports the rotation around the X axis and the Y axis in the figure.
Displacement in the X and Y directions is suppressed. Further, the displacement in the Z-axis direction is restricted by the support pin 8, the moving yoke 15 held by the bobbin 3, and the attraction force by the fixed magnet 5. The regulation around the Z axis is suppressed by the shape of the gimbal spring 2.

FIG. 3 shows the fixed magnet 5 and the fixed yoke 6 of FIG.
FIG. 6 is an explanatory diagram of magnetic flux generated by the moving yoke 15.

In FIG. 3, the fixed magnet 5 has a cylindrical outer shape and a spherical end surface. In the figure, it is magnetized in the Z direction. A fixed yoke 6 made of a ferromagnetic material such as electromagnetic soft iron or permendur is formed so as to cover all surfaces of the fixed magnet 5 except the upper surface, and holds the leakage magnetic field to the outside of the fixed magnet 5. .

A moving yoke 15 arranged on a bobbin (not shown) is arranged so as to face the opening of the fixed magnet 5. The moving yoke 15 has a role of concentrating the magnetic flux generated by the fixed magnet 5 and a leakage magnetic field to the outside.

In the present embodiment, with the above configuration, the total magnetic flux generated from the fixed magnet 5 is formed in the direction substantially parallel to the Z direction.

FIG. 4 is a schematic view of a main part of one coil 4a of FIG.

In the figure, reference numeral 4c is a lead wire. After the coil 4a wound in a flat square shape is fixed by molding, it is bent at a substantially right angle as shown in the right side of the figure. The bobbin is fixed along each side of a bobbin (not shown) having a substantially square bottom surface, and intersects the magnetic flux in a predetermined direction generated by the fixed magnet 5 or the like to move the bobbin in each of the X and Y directions. It is driving.

FIG. 5 is a cross-sectional view of an essential part when the reflecting mirror 1 is driven in the Y direction in this embodiment.

In the present embodiment, by setting each element as described above, the reflection mirror 1 as a driving object is simultaneously driven with high precision in two axial directions by one set of magnetic circuit system.

FIG. 6 is an exploded perspective view of Embodiment 2 of the biaxial drive device of the present invention.

In the figure, 21 is a reflecting mirror as a drive target, 22 is a gimbal spring as an elastic support member, 31 is a moving yoke (movable yoke), 23 is a bobbin, 24a is an X-axis direction driving coil, and 24b is 24b. Y-axis direction driving coil, 25 is a fixed magnet, 26 is a fixed yoke,
28 is a support pin. The case and lid are not shown.

The driving method and effects of this embodiment are similar to those of the first embodiment shown in FIG.

FIG. 8 is an exploded perspective view of a third embodiment of the biaxial drive device of the present invention, and FIG. 9 is an explanatory view of a part of FIG.

In the figure, 31 is a reflecting mirror as an object to be driven, and 32 is a gimbal spring as an elastic supporting member for supporting the reflecting mirror 1, which regulates the deviation in the plane. 33 (33a, 33b) and 39 (39a, 39)
b) is a coil for electromagnetic drive in which a wire having a low resistance value is wound a plurality of times in a substantially rectangular shape, one side of which is bent at a substantially right angle, and two or more sets are provided as a set facing each other. There is. The total number of coils 33, 39 is an integral multiple of four.

The coils 33 and 39 are continuously wound on two orthogonal planes (XZ plane and XY plane), each coil has a common XY plane, and each coil has a phase of 90 degrees. It is arranged to have.

Reference numeral 34 is a fixed magnet. Reference numeral 38 denotes a bobbin, which has a through hole 38a at the center thereof,
-Holds gimbal spring 32, coils 33, 39, etc. A fixed yoke 35 made of a ferromagnetic material prevents leakage of the magnetic flux generated by the fixed magnet 34 and strengthens the magnetic flux density in a predetermined direction.

Through holes are provided in the fixed magnet 34 and the fixed yoke 35. Reference numeral 36 denotes a housing, which has a hole at the center of the bottom. Reference numeral 37 is a support pin, which is inserted into the through hole of each component and is in contact with the back surface of the reflection mirror 31.
The gimbal spring 32 elastically supports the reflection mirror 31.

The fixed magnet 34 is formed into a substantially cylindrical shape, and the magnetic field is divided into four and the N and S poles are alternately arranged. A fixed yoke 35 made of a ferromagnetic material is arranged on one surface. As a result, the generated magnetic flux forms a magnetic circuit so that the poles are connected to each other as shown in FIG.

As described above, the fixed magnet 34 of the present embodiment is formed in a donut shape, and the electromagnetic drive coil group (3
(3, 39) is composed of a four-pole magnet in which N and S poles are alternately arranged so as to divide the surface facing the other side into four.

Then, a coil group for electromagnetic drive (33, 3
A fixed yoke 3 made of a ferromagnetic material on the surface opposite to the surface of 9).
5 are arranged. A through hole is provided in the central portion of the main body of the fixed magnet 34 and the fixed yoke 35. A support pin 37 made of a ferromagnetic material is inserted into the through hole to point-support the reflection mirror 31.

In the present embodiment, by setting each element as described above, the reflection mirror 31 as the driving object is set to 1
A pair of magnetic circuit systems drive and control the motor in two axes simultaneously with high precision.

FIG. 10 shows a biaxial drive device according to a fourth embodiment of the present invention.
11 is a cross-sectional view of the main part of FIG. 11, and FIG. 11 is a plan view of the main part of FIG.

In the figure, reference numeral 41 is a driving coil. As shown in FIG. 12, the coil 41 is wound in a substantially circular shape.

In this embodiment, four coils 41 (41a, 41b, 41c, 41d) are used (symmetrically about the central axis).

Reference numeral 42 is a magnet unit (magnetic field generator), which supplies magnetic flux to the coil 41. Magnet unit 4
No. 2, as shown in FIG. 13, two magnets 43 and 44 are arranged with their polarities reversed. At this time, the magnets 43 and 44 may be integrally formed.

The magnets 43 and 44 are attached to a yoke 45 made of a ferromagnetic material such as electromagnetic soft iron. This allows
The magnetic flux forms a semi-closed circuit as shown. Magnet 43,
44 and the yoke 45 form one element of the magnet unit 42.

Reference numeral 46 denotes a bobbin, which is supported by the magnet unit 42 via a support portion 56 which is rotatable about two axes. Reference numeral 52 is a fixed portion, which holds the magnet unit 42.

FIG. 14 is a schematic view showing the arrangement of the four coils 41, the four magnet units 42 (42a, 42b, 42c, 42d) and the bobbin 46.

The bobbin 46 has a substantially rectangular parallelepiped shape,
A first reflection mirror 47 is arranged on the upper surface, and a second reflection mirror 52 for angle measurement is arranged on the lower surface. The bobbin 46 also has four coils 41 arranged on four side surfaces.
The bobbin 46, the coil 41, the first reflection mirror 47, and the second reflection mirror 52 constitute one element of the movable part.

Reference numeral 46 designates the reflecting surface of the first reflecting mirror 47 as X.
It is rotatably supported around the X and Y axes when it is a Y plane (not shown). The magnet unit 42 is the bobbin 4
6 are arranged at a position facing the coil 41 arranged in FIG.

When the bobbin 46 is simultaneously driven in two directions, the coil shape is substantially circular, but even if the bobbin 46 rotates in one direction, the other coil rotates around the coil center. Therefore, stable drive torque is generated.

PL is a light source section for measuring the angle of the reflection mirror 47. As shown in FIG. 15, the light source unit PL includes a light source 48 such as a semiconductor laser and an LED, a pinhole plate 53 that limits light from the light source 48, and a collimator that shapes diffused light that has passed through the pinhole plate 53 into substantially parallel light. And a lens 55.

PD is a light receiving portion for the angle measurement of the first reflecting mirror 47. As shown in FIG. 16, the light receiving portion PD has an area sensor 51 and a lens 55 that molds a light beam that is incident on the area sensor 51 at an arbitrary angle so as to be incident perpendicularly to the surface of the area sensor 51. The area sensor 51 outputs XY coordinate values according to the position of the center of gravity of the emitted light.

The light source portion PL and the light receiving portion PD constitute a detecting means.

Reference numeral 56 is a supporting portion. The support portion 56 includes a shaft, a movable portion, and a fixed guide 57. The center of the support portion 56 and the centers of the four coils 41a, 41b, 41c, 41d are substantially aligned.

In the present embodiment, the reflection mirror 47 is irradiated with the light beam 49 which is deflected in the biaxial directions, and the reflected light 50 is obtained.
When the bobbin 46 is rotated by the driving means described above, the reflected light 50 is reflected and deflected by the reflected light 50a. This allows
The target surface is two-dimensionally scanned by the light flux 50.

At this time, the light beam from the light source 48 passes through the pinhole 53, is made into a substantially parallel light beam by the collimator lens 54, and is incident on the reflection mirror 52. The light flux reflected by the reflection mirror 52 is guided by the lens 55 onto the surface of the area sensor 51. And area sensor 5
The rotation angle of the bobbin 46, that is, the reflection mirror 47 in the biaxial direction is detected from the incident point of the light beam on one surface.

FIG. 17 is a flowchart of the biaxial drive device of this embodiment.

First, a target XY coordinate value is input. This is converted into the deflection angle of the bobbin 46 of the biaxial drive system, and the current supplied to each coil 41 provided on the bobbin 46 is calculated. With this value, current is supplied from the drive circuit of the biaxial drive device, and the bobbin 46 moves to a predetermined angle. With the movement of the bobbin 46, the angle-measuring reflection mirror 52 is tilted, the light flux from the angle-measuring light source 48 is deflected, and the light-receiving section PD is irradiated with the light. The light-receiving section PD outputs the XY coordinates in the area sensor 51 at that time, which is converted into the angle of the bobbin 46 and then fed back to the angle input.

The light source unit PL and the light receiving unit PD for detecting the rotation angle of the bobbin 46 of this embodiment can be similarly applied to the above-described first to third embodiments.

In the present embodiment, by setting the respective elements as described above, the first reflecting mirror 4 as the object to be driven is driven.
7 is controlled with high precision in the biaxial directions.

In particular, by providing the detecting means, it is possible to similarly measure the displacement angles of the driven object in the two directions.

FIG. 18 is a first embodiment of the rotary drive device of the present invention.
19 (A), (B) and FIG. 20 are partial explanatory views of FIG. 18, respectively.

An outer ring 87a of a ball bearing 87 is adhesively fixed to the housing 81, and an inner ring 87b of the ball bearing 87 is adhesively fixed to a central shaft (rotating shaft) 82. A plurality of rolling balls 87c are held between the outer ring 87a and the inner ring 87b, whereby the ball bearing 87 serves as a bearing.

At the other end of the central shaft 82, a ball bearing 86 is held by adhesively fixing the inner ring 86b to the central shaft 82, and rotatably holds the outer ring 86a via balls 86c. The outer ring 86a has a small gap with the housing 81 and is slidably supported. A spring 88 is arranged on a pedestal 91 provided inside the housing 81 to press the outer ring 86a of the ball bearing 86 in the axial direction.

The central shaft 82, the inner ring 86b of the ball bearing 86 and the inner ring 87b of the ball bearing 87 are integrally formed,
As a result, the axial play of the ball bearings 86, 87 is eliminated. Reference numeral 83 is a movable elastic member fixed to the central axis 82 and made of a ferromagnetic material. 84 is a magnet, 85 is the magnet 84
Is a yoke made of a ferromagnetic material for blocking the leakage magnetic flux and increasing the efficiency of the magnet 84. The magnet 84 is arranged in the housing 81 via a ferromagnetic material 85. 90 is a coil and 89 is a magnet.

FIGS. 19A and 19B are the first embodiment of FIG.
FIG. 3 is a front view of a main part and a side view of the main part showing a pressing mechanism part of a central shaft 82 of FIG.

In the figure, the movable magnetic member 8 formed on the side surface of the central shaft 82 by a ferromagnetic material such as a cylindrical electromagnetic soft iron.
4 are integrally bonded and fixed. The movable magnetic member 83 is formed within a range of about several tens of degrees. Case (not shown) 81
The magnet 84 and the magnet 8 magnetized in a predetermined direction are cylindrical.
The yoke 85 made of a ferromagnetic material and fixed to 4 is held and fixed at a position facing the outer circumference of the movable magnetic member 83.

In this embodiment, the outer peripheral length of the cylindrical magnetic member 83 provided on the central shaft 82 is set to be longer or shorter than the inner peripheral length of the cylindrical magnet 84 provided on the housing 21. .

In this embodiment, the outer peripheral length of the magnetic member 83 is longer than the inner peripheral length of the magnet 84.

FIG. 20 shows the movable magnetic member 83 of FIG.
FIG. 5 is an explanatory diagram of the vicinity of a magnet 84 and a yoke 85.

The magnet 84 is magnetized in the direction of the arrow in the figure, and the yoke 85 is arranged on the back surface of the magnet 84. The magnetic flux generated by the magnet 84 and the yoke 85 attracts the movable magnetic member 83, and the central shaft 82 is pressed in the F direction.

As described above, in this embodiment, in order to remove the rotational runout of the central axis, the central axis is pressed or sucked in a non-contact manner by using a magnet / ferromagnetic material, so that the clearance during rotation of the bearing is reduced. Achieving a highly accurate rotary drive device that eliminates shaft runout.

21 (A) and 21 (B) are a front view and a side view of a main part of a second embodiment of the rotary drive device of the present invention. The figure mainly shows the vicinity of the pressing mechanism portion of the central shaft 82.

In the same figure, two 72 radially magnetized cylindrical movable magnets are integrally bonded and fixed to the side surface of the central shaft 82 at a predetermined angle. Here, the central shaft 82 is formed of a ferromagnetic material like the yoke 85 and the movable magnetic member 83 in FIG. The movable magnet 72 is formed within a range of about several tens of degrees. A housing (not shown) holds and fixes a magnet 73 magnetized in a predetermined direction, a yoke 74 made of a ferromagnetic material fixed to the magnet 73, and a position facing the outer circumference of the movable magnet 72.

FIG. 22 is an explanatory diagram of the vicinity of the movable magnet 72, the magnet 73 and the yoke 74 of FIG. 21 (A).

In this embodiment, the outer peripheral length of the cylindrical movable magnet 72 provided on the central shaft 82 is longer than the inner peripheral length of the cylindrical magnet 73 provided on the housing (not shown). .

In this embodiment, as shown in the figure, the movable magnet 72 and the magnet 73 are magnetized so as to repel each other in the direction of the arrow in the figure, and the yoke 74 is arranged on the back surface of the magnet 73. . The magnetic flux generated by the magnet 73 / yoke 74 and the magnetic flux generated by the movable magnet 72 are a
A repulsive force is generated in the direction of
Repels in the direction of b, attracts the central shaft 82,
Is pressed in the F direction.

In this embodiment, with the above structure, the same effect as that of the first embodiment shown in FIG. 21 is obtained.

[0098]

As described above, according to the present invention, one unit can simultaneously drive in two axial directions, and the external shape of the device can be remarkably reduced in size and weight compared with the conventional one. Also, unlike the conventional two-axis drive device using two two-axis, position adjustment between the two-axis drive devices is unnecessary,
A simpler two-axis drive device can be achieved.

Further, if a light source and a sensor for angle measurement are further provided in addition to the biaxial drive, a biaxial drive device capable of simultaneously measuring displacement angles in two directions can be achieved.

According to the present invention, as described above, the cylindrical first magnet magnetized in a substantially radial shape is arranged on the central axis of rotation, and the housing holding the bearing has a substantially cylindrical radial shape. A magnetized second magnet is arranged, and the first magnet attached to the rotation center axis and the second magnet attached to the housing are arranged so as to face each other, and the rotation center axis is not contacted. By pressing and forcibly suppressing the whirling of the central axis, it is possible to achieve a rotary drive device capable of highly accurate rotary drive.

[Brief description of drawings]

FIG. 1 is a schematic view of a main part of a biaxial drive device according to a first embodiment of the present invention.

FIG. 2 is an exploded perspective view of a biaxial drive device according to a first embodiment of the present invention.

FIG. 3 is an explanatory view of a part of FIG.

FIG. 4 is an explanatory view of a part of FIG.

5 is a schematic view of a main part when the biaxial drive device of FIG. 1 is driven.

FIG. 6 is a schematic view of a main part of a second embodiment of a biaxial drive device according to the present invention.

FIG. 7 is a schematic view of a main part of a conventional biaxial drive device.

FIG. 8 is an exploded perspective view of a biaxial drive device according to a third embodiment of the present invention.

9 is an explanatory view of a part of FIG.

FIG. 10 is a cross-sectional view of the essential parts of Embodiment 2 of the biaxial drive device of the present invention.

FIG. 11 is a plan view of the essential portions of Embodiment 4 of the biaxial drive device of the present invention.

12 is an explanatory diagram of a part of FIG.

13 is an explanatory diagram of a part of FIG.

14 is an explanatory diagram of a part of FIG.

15 is an explanatory diagram of a part of FIG.

16 is an explanatory diagram of a part of FIG.

FIG. 17 is a flowchart of Embodiment 4 of the biaxial drive device of the present invention.

FIG. 18 is a cross-sectional view of the essential parts of Embodiment 1 of the rotation drive device of the present invention.

FIG. 19 is an explanatory diagram of a part of FIG.

FIG. 20 is an explanatory diagram of a part of FIG.

FIG. 21 is a schematic view of the essential portions of Embodiment 2 of the rotation drive device of the present invention.

FIG. 22 is a plan view of the essential portions of Embodiment 2 of the rotation drive device of the present invention.

FIG. 23 is a sectional view of a main part of a conventional rotary drive device.

FIG. 24 is a sectional view of a main part of a conventional rotary drive device.

FIG. 25 is a sectional view of a main part of a conventional rotary drive device.

[Explanation of symbols]

 1,31 Reflection mirror 2,32 Gimbal spring 3,38,46 Bobbin 4,33,39,41 Coil 5,34 Magnet 6,35 Fixed yoke 7,36 Housing 8,37 Support pin 42 Magnet unit 47 First reflection Mirror 52 Second reflection mirror PL Light source section PD Light receiving section 48 Light source 53 Pinhole 54 Collimator lens 55 Lens 51 Area sensor 82 Center axis 83 Ferromagnetic material member 84 Magnetic field 85 Yoke 86,87 Bearing

Claims (13)

[Claims] 1. A coil group for electromagnetically driving a driven object, a magnet for generating a magnetic flux in a regular manner, an elastic support member for elastically supporting the driven object, and the driven object. The target to be driven is driven in two axial directions by using a predetermined supporting portion for restricting the movement in one axial direction, and the electromagnetic driving coil groups are four or four respectively arranged in four directions. A biaxial drive device having a coil of an integral multiple of. 2. A movable yoke made of a ferromagnetic material for concentrating the magnetic flux generated by the magnet and blocking leakage to the outside, and a movable yoke for concentrating the magnetic flux generated by the magnet and blocking leakage to the outside. A fixed yoke made of a ferromagnetic material, the magnet is magnetized in a predetermined direction by the fixed magnet, and each coil is continuously wound on two substantially orthogonal predetermined planes. At this time, each coil has one predetermined plane in common, and is arranged so as to wrap all surfaces except one surface by the fixed yoke, and penetrates the fixed magnet and the fixed yoke at the center of the main body. 2. The biaxial drive device according to claim 1, wherein the biaxial drive device has a hole, and a support pin made of a ferromagnetic material as the support part is inserted into the through hole to point-support the drive target. 3. A movable yoke made of a ferromagnetic material is arranged in a holding portion for holding the driven object, and the movable yoke is pressed against the supporting portion by the attraction force of the magnet. 2-axis drive device. 4. A coil group for electromagnetically driving an object to be driven, a fixed magnet for generating a magnetic flux in a fixed manner, and a magnetic flux generated by the fixed magnet are integrated to shut off leakage to the outside. An object to be driven using a fixed yoke made of a ferromagnetic material, an elastic support member that elastically supports the object to be driven, and a support pin for restricting a predetermined one-axis movement of the object to be driven. In a biaxial drive device for driving the biaxial direction, the electromagnetic drive coil group is composed of four or an integral multiple of four coils, and each coil is continuous on two predetermined planes that are substantially orthogonal to each other. The two-axis driving device is characterized in that each coil has one predetermined plane in common, and each coil is arranged so as to have a phase of 90 degrees. 5. The fixed magnet for generating the magnetic flux is formed in a donut shape, and N and S poles are alternately arranged so as to divide a surface facing the electromagnetic drive coil group into four. A fixed yoke made of a ferromagnetic material is provided on the surface opposite to the surface facing the electromagnetically driven coil group, and the fixed magnet and the fixed yoke are provided at the center of the main body. The biaxial drive device according to claim 4, further comprising a through hole, wherein the support pin is inserted into the through hole. 6. A holding mirror for holding the driven object is provided with a reflection mirror for angle measurement, a light source and an optical position detecting element are provided on the fixed yoke side, and a rotation angle of the holding unit around two axes is set. The two-axis drive device according to claim 1 or 4, wherein the two-axis drive device is detected. 7. A substantially rectangular bobbin for holding the first reflection mirror and the second reflection mirror on both upper and lower surfaces and four surfaces orthogonal to the surface of the bobbin holding the reflection mirror are integrally formed. A movable part composed of four coils, a support part for rotatably supporting the movable part around two axes in the reflecting surface of the first reflecting mirror, and a position facing the four coils. A magnetic field generation unit having a magnet magnetized in two poles and a fixed unit for holding the magnetic field generation unit are provided, and the fixed unit is arranged so as to include the movable unit via the support unit. , A detecting means having a light source and a two-dimensional light receiving element is provided in the fixed part, and a light flux from the light source is projected onto the second reflecting mirror,
A reflected light beam from the second reflecting mirror is received by a two-dimensional light receiving element, and a rotation angle about two axes of the movable part is detected by using a signal from the two-dimensional light receiving element. Axle drive. 8. The biaxial drive device according to claim 7, wherein the coil is wound in a substantially circular shape. 9. A rotary drive device for electromagnetically driving a rotary shaft, a bearing for rotatably supporting the rotary shaft, a housing for holding the bearing, a magnet and a coil.
The rotating shaft has a first magnet magnetized in a substantially cylindrical shape and a second magnet magnetized in a substantially cylindrical shape in the casing.
And a second magnet attached to the rotation shaft and a second magnet attached to the housing are arranged so as to face each other. 10. A ferromagnetic material attached to the rotating shaft, the rotating shaft having a cylindrical ferromagnetic material, and the housing having a cylindrical magnet magnetized substantially radially. 10. The rotary drive device according to claim 9, wherein magnets attached to the housing are arranged so as to face each other. 11. A magnet attached to the rotating shaft, the rotating shaft having a cylindrical magnet magnetized substantially radially, the housing having a cylindrical ferromagnetic material, and the housing. 10. The rotation drive device according to claim 9, wherein the ferromagnetic materials attached to the are arranged so as to face each other. 12. The outer circumferential length of a substantially cylindrical magnet or ferromagnetic body provided on the rotating shaft is longer than the inner circumferential length of a substantially cylindrical magnet or ferromagnetic body provided on the housing. The rotation drive device according to claim 9. 13. The outer peripheral length of a substantially cylindrical magnet or ferromagnetic material provided on the rotating shaft is shorter than the inner circumference of a substantially cylindrical magnet or ferromagnetic material provided on the housing. The rotation drive device according to claim 9.