JPH059639U - Double heating bath - Google Patents

Abstract

(57) [Summary] [Purpose] It is an object of the present invention to provide a double heating constant temperature bath which eliminates the drawbacks of the hot air circulating constant temperature bath and the non-circulating constant temperature bath. A heater 9 is provided in a space 15 between the outer tub 1 and the inner tub 2, a hot air is circulated in the space 15 and the inner tub 2 by a blower 11, and a hot plate is provided in the inner tub 2. 14 is provided, and the heater 9 in the space 15 and the hot plate 14 in the inner tank 2 perform double heating.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a constant temperature bath used for environmental tests of semiconductor devices and for drying and baking electronic parts such as glass surfaces of wafers and liquid crystals.

[0002]

[Prior Art]

 2. Description of the Related Art Conventionally, an example of a generally used constant temperature oven has a double structure as shown in the sectional view of FIG. This constant-temperature bath is a hot-air circulation type and consists of an outer bath 1 and an inner bath 2. A temperature-controlled heater 9 is provided in a space 15 between the outer bath 1 and the inner bath 2, and a blower is provided at one end of the upper portion of the space 15. 11 is provided and is configured to be driven by an external motor 10.

A duct 13 is formed between the outer tank 1 and the inner tank 2 in the lateral direction of the blower 11. A filter 12 is provided at the inlet of the air from the blower 11 of the duct 13, and a plurality of ventilation holes 8 are formed in the lower surface of the duct 13 that contacts the inner tank 2 to blow air into the inner tank 2. Is configured.

Further, an exhaust hole 7 for exhausting air into the space 15 is formed in a lower portion of the side surface 2 a of the inner tank 2 opposite to the blower 11.

A receiving stand 3 is provided inside the inner tank 2 at a position above the exhaust hole 7, and an object to be tested such as a glass substrate 4 is placed on the space 15 by the blower 11. Also, it is configured to be heated by hot air circulating in the duct 13 and maintained at a constant temperature.

FIG. 3 shows another type of constant temperature bath, which is a non-circulating type. A hot plate 14 whose temperature is controlled is provided inside the constant temperature bath, and an object to be tested such as a glass substrate 4 is placed on the upper surface of the hot plate 14 and heated by radiant heat from the hot plate 14 to maintain a constant temperature. Is configured to.

[0007]

[Problems to be solved by the device]

 However, the above-mentioned hot air circulation type needs to increase the wind speed when used at a high temperature, and it is difficult to keep the direction and pressure of the hot air from the ventilation holes 8 of the duct 13 constant.

Further, since the hot air is required to be clean, the amount of air is limited because it passes through the filter 12, and it takes too much time to heat the DUT such as the glass substrate 4 to a predetermined temperature.

Further, when the area of the DUT such as the glass substrate 4 is increased, heating with hot air causes a temperature difference between the central portion and the peripheral portion.

Further, in the non-circulation type using the hot plate 14, the object to be tested such as the glass substrate 4 is rapidly heated directly by the high radiant heat from the hot plate 14, so that the heating time up to a predetermined temperature can be shortened. However, since it is heated rapidly, distortion occurs in the test object such as the glass substrate 4 during heating, and the gap between the test object such as the glass substrate 4 and the hot plate 14 is not constant, so that a uniform temperature distribution can be obtained. Is difficult.

Further, in heating the DUT such as the glass substrate 4 to a predetermined temperature, the set temperature of the hot plate 14 needs to be set higher by the amount of heat loss, and the electric capacity needs to be increased.

An object of the present invention is to solve the above-mentioned problems and provide a constant temperature bath with rapid heating and stable temperature distribution.

In order to solve the above-mentioned problems, in a constant temperature bath comprising an outer bath 1 and an inner bath 2, a heater 9 provided in a space 15 between the outer bath 1 and the inner bath 2, and the heater 9 A blower 11 that blows the heated air in the space 15 downward from the upper surface of the inner tank 2 and a hot plate 14 are provided inside the inner tank 2.

[0014]

【Example】

 FIG. 1 is a sectional view of a double heating constant temperature bath of the present invention. The structure is almost the same as that of the hot air circulation type constant temperature bath of FIG. 2 described above, but the hot plate 14 is also used as a cradle for mounting the test object or the like inside the inner bath 2.

As a result, when the air heated by the heater 9 is circulated by the blower 11, the hot air blown from the ventilation holes 8 of the duct 13 into the inner tub 2 has a flow velocity that can maintain a laminar flow state. As a result, the shortage of the amount of heat for raising the DUT such as the glass substrate 4 to a predetermined temperature is supplied from the hot plate 14.

[0016]

[Effect of the device]

 As described above, since the heating of the test object such as the glass substrate 4 uses both hot air and radiant heat from the hot plate 14, the heating of the test object such as the glass substrate 4 is stable at a constant temperature in a short time. It can be easily realized in a distributed state.

Further, the temperature adjustment of the heater 9 and the hot plate 14 is reduced by the mutual heat circulation, the amount of heat loss is reduced, and the time during which the heater 9 and the hot plate 14 are energized is short and the efficiency is high. Therefore, electricity consumption is saved.

[Brief description of drawings]

FIG. 1 is a sectional view of a double heating constant temperature bath of the present invention.

FIG. 2 is a cross-sectional view of a conventional hot air circulation type constant temperature bath.

FIG. 3 is a cross-sectional view of a conventional non-circulation type constant temperature bath.

[Explanation of symbols]

 1 Outer Tank 2 Inner Tank 4 Glass Substrate 7 Exhaust Hole 8 Ventilation Hole 9 Heater 11 Blower 12 Filter 13 Duct 14 Hot Plate 15 Space

Claims (1)

[Claims for utility model registration] 1. In a constant temperature bath comprising an outer bath and an inner bath, a heater provided in a space between the outer bath and the inner bath, and the space heated by the heater. A blower that blows the air from the upper surface of the inner tank downward into the inner tank, and a hot plate inside the inner tank, which rapidly dries and bake the DUT by hot air and radiant heat. Double heating bath.