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JPH0575250A - Electrical connecting method - Google Patents

Electrical connecting method

Info

Publication number
JPH0575250A
JPH0575250A JP31401591A JP31401591A JPH0575250A JP H0575250 A JPH0575250 A JP H0575250A JP 31401591 A JP31401591 A JP 31401591A JP 31401591 A JP31401591 A JP 31401591A JP H0575250 A JPH0575250 A JP H0575250A
Authority
JP
Japan
Prior art keywords
circuit board
conductive particles
particles
electrical connection
terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31401591A
Other languages
Japanese (ja)
Other versions
JP3114162B2 (en
Inventor
Yukio Yamada
幸男 山田
Takashi Ando
尚 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dexerials Corp
Original Assignee
Sony Chemicals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Chemicals Corp filed Critical Sony Chemicals Corp
Publication of JPH0575250A publication Critical patent/JPH0575250A/en
Application granted granted Critical
Publication of JP3114162B2 publication Critical patent/JP3114162B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/11Manufacturing methods
    • H01L2224/11001Involving a temporary auxiliary member not forming part of the manufacturing apparatus, e.g. removable or sacrificial coating, film or substrate
    • H01L2224/11003Involving a temporary auxiliary member not forming part of the manufacturing apparatus, e.g. removable or sacrificial coating, film or substrate for holding or transferring the bump preform
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/0781Adhesive characteristics other than chemical being an ohmic electrical conductor
    • H01L2924/07811Extrinsic, i.e. with electrical conductive fillers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/36Assembling printed circuits with other printed circuits
    • H05K3/368Assembling printed circuits with other printed circuits parallel to each other

Landscapes

  • Manufacturing Of Electrical Connectors (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Combinations Of Printed Boards (AREA)

Abstract

PURPOSE:To connect two circuit boards positively and easily so as to obtain high reliability on continuity without generating short circuits even when a large number of terminals to be connected are formed on the circuit boards at short pitches when the two circuit boards are connected electrically. CONSTITUTION:A film 10 for electrical connection, in which conductive particles 3 and spacer particles 4 having heat resistance higher than the conductive particles and the grain size of 20-80% of the grain size of the conductive particles are held on a film 1 in one layer uniformly, is used. The terminal surface of a first circuit board 5 and a surface, on which the conductive particles and the spacer particles are held, in the film 10 for electrical connection are joined, both surfaces are primarily contact-bonded, and peeled, the conductive particles 3 are transferred onto the terminals 5a of the first circuit board, and the terminal surface of the first circuit board 5, on which the conductive particles 3 are transferred, and the terminal surface of the second circuit board 7 are mainly contact-bonded through adhesives 8 as a method, in which the terminals of the first circuit board and the terminals of the second circuit board are bonded electrically by employing the film for electrical connection.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、2つの回路基板間の
端子の電気的接続方法に関する。さらに詳しくは、この
発明は、回路基板に接続すべき端子が細密なピッチで多
数形成されている場合でも、端子間にショートを発生さ
せることなく2つの回路基板間の端子を確実にかつ容易
に接続できるようにする電気的接続方法、並びにこのよ
うな電気的接続方法に使用する電気的接続用フィルムお
よび電気的接続用回路基板に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for electrically connecting terminals between two circuit boards. More specifically, the present invention reliably and easily connects the terminals between the two circuit boards without causing a short circuit between the terminals even when a large number of terminals to be connected to the circuit board are formed at a fine pitch. The present invention relates to an electrical connection method that enables connection, and an electrical connection film and an electrical connection circuit board used in such an electrical connection method.

【0002】[0002]

【従来の技術】液晶パネルとTABとを接続する場合の
ように、2つの回路基板間の端子を電気的に接続する方
法としては、従来より、異方性導電性接着剤を使用する
方法が知られている。この方法においては、熱硬化性あ
るいは熱可塑性接着剤中に半田粒子、ニッケル粒子等の
金属粒子や樹脂粒子に金メッキを施した粒子等の導電粒
子を分散させた異方性導電性接着剤を使用し、このよう
な異方性導電性接着剤を2つの回路基板間に介在させ、
加熱加圧することにより相対する2端子間の電気的接続
が得られるようにする(特開昭51−114439号公
報)。
2. Description of the Related Art As a method of electrically connecting terminals between two circuit boards, such as a case of connecting a liquid crystal panel and a TAB, a method using an anisotropic conductive adhesive has hitherto been used. Are known. In this method, an anisotropic conductive adhesive is used in which conductive particles such as solder particles, metal particles such as nickel particles or resin particles plated with gold are dispersed in a thermosetting or thermoplastic adhesive. Then, such an anisotropic conductive adhesive is interposed between the two circuit boards,
By heating and pressurizing, electrical connection between two opposing terminals can be obtained (JP-A-51-114439).

【0003】このような異方性導電性接着剤に類する接
合材として、熱可塑性樹脂からなるシート状絶縁基材の
表面付近に導電粒子を埋設したものも知られている。こ
の接合材の使用方法としては、まず第1の回路基板の端
子面と接合材の導電粒子とを加熱溶着させ、次に加熱溶
着させた接合材上に第2の回路基板を加熱加圧してその
接合材のシート状絶縁基材を溶融させ、2つの回路基板
間を接合すると共に、第1の回路基板の端子に溶着して
いた導電粒子と第2の回路基板の端子とを接合させる
(特開昭64−14886号公報)。
As a bonding material similar to such an anisotropic conductive adhesive, one in which conductive particles are embedded near the surface of a sheet-shaped insulating base material made of a thermoplastic resin is also known. As a method of using this bonding material, first, the terminal surface of the first circuit board and the conductive particles of the bonding material are heat-welded, and then the second circuit board is heated and pressed on the heat-welded bonding material. The sheet-like insulating base material of the bonding material is melted to bond between the two circuit boards, and at the same time, the conductive particles welded to the terminals of the first circuit board are bonded to the terminals of the second circuit board ( JP-A-64-14886).

【0004】また、ICチップをTABに接続する方法
としては、バンプ形成用基板上にメッキによって金柱を
作成し、これをTABに位置合わせして転写し、接続す
る転写バンプ方式が知られている。
As a method of connecting the IC chip to the TAB, there is known a transfer bump method in which a gold pillar is formed on a bump forming substrate by plating, the gold pillar is aligned with the TAB and transferred, and then connected. There is.

【0005】さらに、印刷やディッピング等により導電
性接着剤を回路基板の接続すべきパターン上のみに載せ
る方法も知られている。
Further, a method is known in which a conductive adhesive is placed only on a pattern to be connected on a circuit board by printing or dipping.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、従来の
異方性導電性接着剤を使用する方法では、回路基板の接
続すべき端子を含む接着領域の全面に異方性導電性接着
剤を介在させるので、接続すべき端子間だけでなく他の
隣接する端子間にも導電粒子が存在することとなる。そ
のため、端子のピッチが細密になるとショートし易くな
るという問題があった。このような問題に対しては、異
方性導電性接着剤中の導電粒子の配合量を少なくするこ
とも考えられているが、導電粒子の配合量を少なくする
と接続すべき端子間に存在する導電粒子も少なくなるの
で導通信頼性が低下するという問題があった。
However, in the conventional method using the anisotropic conductive adhesive, the anisotropic conductive adhesive is interposed over the entire bonding area of the circuit board including the terminals to be connected. Therefore, the conductive particles are present not only between the terminals to be connected but also between other adjacent terminals. Therefore, there is a problem that short-circuiting is likely to occur when the pitch of the terminals is fine. For such a problem, it has been considered to reduce the amount of conductive particles blended in the anisotropic conductive adhesive, but if the amount of conductive particles blended is reduced, it exists between terminals to be connected. Since the conductive particles are also reduced, there is a problem that conduction reliability is lowered.

【0007】熱可塑性樹脂からなるシート状絶縁基材の
表面付近に導電粒子を埋設した接合材を使用する方法
(特開昭64−14886号公報)によれば導通信頼性
をある程度向上させることはできるが、接合材中の導電
粒子の粒径のばらつきが大きい等のために、回路基板と
接合材との加熱圧着時に僅かでも圧着面が傾くと均一に
圧着圧力がかからなくなり、導通不良が生じるという問
題があった。また、この方法においても、従来の異方性
導電性接着剤を使用する方法と同様に、回路基板の接続
すべき端子を含む接着領域の全面に導電粒子が存在する
こととなるので、端子のピッチが細密になるとショート
し易くなるという問題点は解消されなかった。
According to a method of using a bonding material in which conductive particles are embedded near the surface of a sheet-like insulating base material made of a thermoplastic resin (Japanese Patent Laid-Open No. 64-14886), it is possible to improve the conduction reliability to some extent. However, due to the large variation in the particle size of the conductive particles in the bonding material, even if the crimping surface is slightly tilted during heating and pressure bonding of the circuit board and the bonding material, the crimping pressure will not be applied uniformly and conduction failure will occur. There was a problem that it would occur. Also in this method, similar to the method using the conventional anisotropic conductive adhesive, the conductive particles are present on the entire bonding area including the terminals to be connected of the circuit board. The problem that a short pitch is likely to occur when the pitch becomes fine has not been solved.

【0008】また、転写バンプ方式においては、メッキ
によって金柱を作成する工程、及びこれをTABと位置
合わせする工程が必要となるので、工程数が多く作業性
も悪いという問題があった。
Further, the transfer bump method requires a step of forming a gold pillar by plating and a step of aligning this with the TAB, so that there is a problem that the number of steps is large and workability is poor.

【0009】さらに、印刷やディッピング等により導電
性接着剤を回路基板の接続すべきパターン上のみに載せ
る方法においては、所定のパターン上のみに導電性接着
剤を載せる技術が難しいという問題があった。また、2
つの回路基板間の接合を端子パターンどうしの接着のみ
で行うこととなるので接着強度や信頼性が低下するとい
う問題もあった。
Further, in the method of placing the conductive adhesive only on the pattern to be connected to the circuit board by printing, dipping or the like, there is a problem that the technique of placing the conductive adhesive only on a predetermined pattern is difficult. .. Also, 2
Since the two circuit boards are joined only by adhering the terminal patterns to each other, there is a problem that the adhesive strength and the reliability are lowered.

【0010】この発明は以上のような従来技術の課題を
解決しようとするものであり、2つの回路基板間の端子
を、接続すべき端子が回路基板に細密なピッチで多数形
成されている場合でも、ショートを発生させることな
く、高い導通信頼性が得られるように、均一な圧着によ
り確実にかつ容易に接続できるようにすることを目的と
している。
The present invention is intended to solve the above-mentioned problems of the prior art, and in the case where a large number of terminals to be connected to the two circuit boards are formed on the circuit board at a fine pitch. However, it is an object of the present invention to ensure reliable and easy connection by uniform pressure bonding so that high conduction reliability can be obtained without causing a short circuit.

【0011】[0011]

【課題を解決するための手段】上記の目的を達成するた
めに、この発明は、電気的接続方法に使用する接合材と
して、フィルム上に導電粒子と、導電粒子よりも耐熱性
でかつ導電粒子の粒径の20〜80%の粒径を有するス
ペーサー粒子とを均一に1層に保持させたことを特徴と
する電気的接続用フィルムを提供する。
In order to achieve the above object, the present invention provides a conductive material on a film and a heat-resistant and conductive particle more than the conductive particles as a bonding material used in an electrical connection method. And a spacer particle having a particle diameter of 20 to 80% of the above particle diameter are uniformly held in one layer.

【0012】また、電気的接続方法に使用する回路基板
として、回路基板上の端子面と、上記の電気的接続用フ
ィルムの導電粒子とスペーサー粒子が保持されている面
とを合わせ、両者を加熱圧着し、剥離することにより回
路基板の端子上に導電粒子を転写させて得られる、回路
基板の端子上のみに1層の導電粒子が融着している電気
的接続用回路基板を提供する。
Further, as a circuit board used for the electrical connection method, the terminal surface on the circuit board and the surface of the above-mentioned electrical connection film on which the conductive particles and the spacer particles are held are put together and heated. Provided is a circuit board for electrical connection, in which one layer of conductive particles is fused only on the terminals of the circuit board, which is obtained by transferring the conductive particles onto the terminals of the circuit board by pressure bonding and peeling.

【0013】そして、この発明の電気的接続方法とし
て、第1の回路基板の端子面と上記の電気的接続用フィ
ルムの導電粒子とスペーサー粒子が保持されている面と
を合わせ、両者を加熱圧着し、剥離して第1の回路基板
の端子上に導電粒子を転写させ、次いで、導電粒子を転
写させた第1の回路基板の端子面と第2の回路基板の端
子面とを接着剤を介して加熱圧着することを特徴とする
電気的接続方法を提供する。
As an electrical connection method of the present invention, the terminal surface of the first circuit board and the surface of the above-mentioned electrical connection film on which the conductive particles and the spacer particles are held are brought into contact with each other by heating and pressure bonding. Then, the conductive particles are transferred onto the terminals of the first circuit board by peeling, and then the terminal surface of the first circuit board on which the conductive particles are transferred and the terminal surface of the second circuit board are bonded with an adhesive. Provided is an electrical connection method characterized by performing thermocompression bonding via.

【0014】この発明が接合材として使用する電気的接
続用フィルムは、従来の異方性導電性接着剤あるいはそ
れに類する接合材と同様に、接合材中の導電粒子により
導通性を確保するものであるが、この発明の接合材は導
電粒子に加えて導電粒子よりも耐熱性のスペーサー粒子
を含有することを特徴としている。そして、導電粒子の
粒径のばらつきが大きい等のために回路基板と接合材と
の加熱圧着時に圧着面が傾いても、このスペーサー粒子
が存在することにより均一に加熱圧着がなされるように
し、回路基板間の導通信頼性を向上させる。
The film for electrical connection used as a bonding material in the present invention secures conductivity by the conductive particles in the bonding material as in the case of the conventional anisotropic conductive adhesive or a bonding material similar thereto. However, the bonding material of the present invention is characterized in that it contains, in addition to the conductive particles, spacer particles that are more heat resistant than the conductive particles. Then, even if the pressure-bonded surface is inclined during the heat-pressure bonding of the circuit board and the bonding material due to a large variation in the particle diameter of the conductive particles, the presence of the spacer particles enables uniform heat-pressure bonding. To improve the reliability of continuity between circuit boards.

【0015】以下、この発明の電気的接続方法を図面に
基づいて具体的に説明する。なお、図中、同一符号は同
一または同等の構成要素を表している。
The electrical connection method of the present invention will be specifically described below with reference to the drawings. In the drawings, the same reference numerals represent the same or equivalent constituent elements.

【0016】図1および図2は、それぞれこの発明の電
気的接続方法の工程説明図であり、図1の(a)および
図2の(a)は共にこの発明の電気的接続用フィルム1
0の一例の断面図である。これらの図のように、この電
気的接続用フィルム10は、フィルム1上に導電粒子3
およびスペーサー粒子4を均一に1層保持させたものと
なっている。このように導電粒子3およびスペーサー粒
子4を1層保持させることにより、後述するこの電気的
接続用フィルムと回路基板との1次圧着時に回路基板の
端子に均一に導電粒子を融着させることが可能となる。
FIGS. 1 and 2 are explanatory views of the steps of the electrical connection method of the present invention, and FIG. 1 (a) and FIG. 2 (a) are both the electrical connection film 1 of the present invention.
It is a sectional view of an example of 0. As shown in these figures, the film for electrical connection 10 has conductive particles 3 on the film 1.
And one spacer particle 4 is uniformly held. By holding one layer of the conductive particles 3 and the spacer particles 4 in this manner, the conductive particles can be evenly fused to the terminals of the circuit board at the time of the primary pressure bonding between the electrical connection film and the circuit board, which will be described later. It will be possible.

【0017】このような電気的接続用フィルム10の形
成方法としては、例えば、樹脂バインダー液中に導電粒
子3とスペーサー粒子4とを分散させ、そのバインダー
液をフィルム1上に厚さが導電粒子3の粒径以下となる
ように塗布すればよい。これにより図示したように、1
層の導電粒子3とスペーサー粒子4とがバインダー層2
によってフィルム1上に保持された形態の電気的接続用
フィルム10を得ることができる。
As a method of forming such a film 10 for electrical connection, for example, the conductive particles 3 and the spacer particles 4 are dispersed in a resin binder solution, and the binder solution is applied onto the film 1 in a thickness of the conductive particles. It may be applied so as to have a particle size of 3 or less. This results in 1
The conductive particles 3 and the spacer particles 4 of the layer are the binder layer 2
As a result, the film 10 for electrical connection held on the film 1 can be obtained.

【0018】また、この電気的接続用フィルムにおい
て、フィルム上に導電粒子およびスペーサー粒子を1層
保持させた形態としては種々の態様をとることができ、
例えば粘着テープ上に導電粒子やスペーサー粒子を付着
させたものとしてもよい。このような電気的接続用フィ
ルムの形成方法としては、剥離フィルム上に導電粒子と
スペーサー粒子を静電気により1層付着させ、これを耐
熱性粘着テープに転着させればよい。
Further, in this electrical connection film, various modes can be adopted as a form in which one layer of conductive particles and spacer particles is held on the film,
For example, the adhesive tape may have conductive particles or spacer particles attached thereto. As a method for forming such a film for electrical connection, one layer of conductive particles and spacer particles may be electrostatically attached onto a release film, and this may be transferred to a heat-resistant adhesive tape.

【0019】電気的接続用フィルム10に使用する導電
粒子3としては、金属表面を有する種々の粒子を使用す
ることができるが、接続する回路基板の端子の素材に応
じて選択することが好ましい。例えば、図1の(a)に
示すように、回路基板5の端子5a上に金メッキ層ある
いはニッケルメッキ層5bが形成されている場合や端子
がグリコートで処理されている場合には半田粒子、錫粒
子、インジウム粒子、その他これらの合金粒子、もしく
は半田メッキ、錫メッキ、インジウムメッキ等を施した
粒子を使用する。また、回路基板の端子がアルミニウム
からなる場合には、金粒子または金メッキ粒子を使用す
る。さらに、図2の(b)に示すように、回路基板5の
端子5a上に半田メッキ層あるいは錫メッキ層5cが形
成されている場合には、導電粒子3としては半田付け可
能な金属粒子または金属メッキ粒子を使用する。
As the conductive particles 3 used in the electrical connection film 10, various particles having a metal surface can be used, but it is preferable to select them according to the material of the terminal of the circuit board to be connected. For example, as shown in (a) of FIG. 1, when a gold plating layer or a nickel plating layer 5b is formed on the terminal 5a of the circuit board 5 or when the terminal is treated with glycoat, solder particles, tin Particles, indium particles, other alloy particles thereof, or particles plated with solder, tin, or indium are used. When the terminals of the circuit board are made of aluminum, gold particles or gold plated particles are used. Further, as shown in FIG. 2B, when the solder plating layer or the tin plating layer 5c is formed on the terminals 5a of the circuit board 5, the conductive particles 3 are solderable metal particles or Use metal plated particles.

【0020】また、導電粒子3の形状としては、球形、
針状、柱状、板状、不定形など種々のものを使用できる
が球形のものを使用するのが好ましい。また、粒径とし
ては、0.5〜50μmのものを使用することが好まし
く、粒径分布はできるだけ均一であることが好ましい。
The shape of the conductive particles 3 is spherical,
Various types such as needle-like, columnar, plate-like, and amorphous can be used, but spherical ones are preferably used. The particle size is preferably 0.5 to 50 μm, and the particle size distribution is preferably as uniform as possible.

【0021】スペーサー粒子4としては、導電粒子より
も耐熱性の粒子を使用する。すなわち、回路基板と電気
的接続用フィルムとの加熱圧着時に導電粒子と回路基板
の端子とが融着する際に、十分に当初の粒子形状を維持
する硬度を有するものを使用する。したがって、スペー
サー粒子4の種類は、導電粒子や回路基板の端子材料の
種類に応じて定められるが、一般には例えばポリスチレ
ン、ジビニルベンゼン、ベンゾグアナミン等の樹脂粒子
を使用することができる。また回路基板の端子に金メッ
キ、ニッケルメッキ等が施されている場合には、銅やニ
ッケル等の金属粒子を使用することができる。
As the spacer particles 4, particles that are more heat-resistant than conductive particles are used. That is, when the conductive particles and the terminals of the circuit board are fused with each other during thermocompression bonding of the circuit board and the electrical connection film, those having a hardness sufficient to maintain the original particle shape are used. Therefore, the type of the spacer particles 4 is determined according to the type of the conductive particles and the terminal material of the circuit board, but generally, resin particles such as polystyrene, divinylbenzene, benzoguanamine and the like can be used. When the terminals of the circuit board are plated with gold or nickel, metal particles such as copper or nickel can be used.

【0022】また、スペーサー粒子4の大きさとして
は、導電粒子の粒径の20〜80%の粒径とし、好まし
くは3μm以上とするが好ましい。スペーサー粒子4の
粒径がこの範囲外であると、回路基板と接合材との加熱
圧着時に圧着面が傾いた場合に、均一に圧着することが
困難となる。
The size of the spacer particles 4 is 20 to 80% of the particle size of the conductive particles, preferably 3 μm or more. If the particle size of the spacer particles 4 is out of this range, it becomes difficult to perform uniform pressure bonding when the pressure bonding surface is inclined during heat pressure bonding of the circuit board and the bonding material.

【0023】この発明の電気的接続方法においては、ま
ず、上記のような電気的接続用フィルム10を用いてこ
の発明の電気的接続用回路基板を作成する。すなわち、
図1の(b)あるいは図2の(b)に示したように、第
1の回路基板5の端子5aと電気的接続用フィルム10
の導電粒子3とスペーサー粒子4が保持されている面と
を合わせ、両者を加熱圧着(1次圧着)する。この1次
圧着の加熱加圧条件は、回路基板5の端子5aや導電粒
子3の種類に応じて、端子5aと導電粒子3とが融着す
るように適宜設定すればよい。例えば図1の(b)に示
したように、金メッキ処理されている端子5aに対し
て、導電粒子3として半田粒子を保持した電気的接続用
転写フィルム10を1次圧着する場合には、半田粒子か
らなる導電粒子3が溶融して端子5aと導電粒子3とが
融着するようにすればよく、また、図2の(b)に示し
たように、半田メッキ処理されている端子5aに対して
電気的接続用転写フィルム10を1次圧着する場合に
は、端子5a上の半田層5cが溶融して端子5aと導電
粒子3とが融着するようにすればよい。
In the electrical connection method of the present invention, first, the electrical connection circuit board of the present invention is prepared by using the electrical connection film 10 as described above. That is,
As shown in FIG. 1B or FIG. 2B, the terminals 5 a of the first circuit board 5 and the electrical connection film 10 are formed.
The conductive particles 3 and the surface on which the spacer particles 4 are held are combined, and both are thermocompression bonded (primary compression bonding). The heating and pressurizing conditions of the primary pressure bonding may be appropriately set depending on the types of the terminals 5a and the conductive particles 3 of the circuit board 5 so that the terminals 5a and the conductive particles 3 are fused. For example, as shown in FIG. 1B, when the transfer film 10 for electrical connection holding the solder particles as the conductive particles 3 is first pressure-bonded to the gold-plated terminal 5a, solder is used. It suffices that the conductive particles 3 made of particles are melted and the terminals 5a and the conductive particles 3 are fused together. Further, as shown in FIG. On the other hand, when the transfer film 10 for electrical connection is first pressure-bonded, the solder layer 5c on the terminal 5a may be melted and the terminal 5a and the conductive particles 3 may be fused.

【0024】1次圧着後は、図1の(c)あるいは図2
の(c)に示したように、第1の回路基板5と電気的接
続用フィルム10とを互いに剥離して第1の回路基板5
の端子5a上に導電粒子3を転写させ、端子5a上にの
み導電粒子3が存在している電気的接続用回路基板6を
得る。なお、この場合、スペーサー粒子4は電気的接続
用フィルム10のフィルム1に残存する。
After the primary pressure bonding, FIG. 1 (c) or FIG.
(C), the first circuit board 5 and the electrical connection film 10 are separated from each other to separate the first circuit board 5 from each other.
The conductive particles 3 are transferred onto the terminals 5a, and the circuit board 6 for electrical connection in which the conductive particles 3 are present only on the terminals 5a is obtained. In this case, the spacer particles 4 remain on the film 1 of the electrical connection film 10.

【0025】次いで、図1の(d)あるいは図2の
(d)に示したように、端子5a上にのみ導電粒子3が
存在している電気的接続用回路基板6と第2の回路基板
7とをそれらの端子面5a、7aを内側にし、間に接着
剤として接着フィルム8を置いて重ね合わせ、加熱圧着
(本圧着)する。これにより、第1の回路基板5と第2
の回路基板7とは、その全面が接着フィルムで接着され
るので強い接着強度で接続される。しかも、第1の回路
基板5には、その端子5aにのみ導電粒子3が存在して
いるので、第1の回路基板5の端子5aと第2の回路基
板7の端子7aとはショート等の導通不良を起こすこと
無く確実に接続される。
Next, as shown in FIG. 1D or FIG. 2D, the electrical connection circuit board 6 and the second circuit board 6 in which the conductive particles 3 are present only on the terminals 5a. 7 and the terminal surfaces 5a, 7a thereof are placed inside, an adhesive film 8 is placed as an adhesive between them, and they are superposed and thermocompression bonded (main compression bonding). As a result, the first circuit board 5 and the second circuit board 5
Since the entire surface of the circuit board 7 is adhered by an adhesive film, it is connected with a strong adhesive strength. Moreover, since the conductive particles 3 are present only on the terminals 5a of the first circuit board 5, the terminals 5a of the first circuit board 5 and the terminals 7a of the second circuit board 7 may be short-circuited or the like. Securely connected without causing conduction failure.

【0026】ここで、接着フィルム8としては、熱硬化
性あるいは熱可塑性の樹脂フィルムを使用することがで
きる。また、接着剤としてこのようなフィルムを使用す
ることなく、従来の異方性導電性接着剤に使用されてい
た熱硬化性あるいは熱可塑性の樹脂液を2つの回路基板
間に塗布してもよい。
Here, a thermosetting or thermoplastic resin film can be used as the adhesive film 8. Further, the thermosetting or thermoplastic resin liquid used in the conventional anisotropic conductive adhesive may be applied between two circuit boards without using such a film as the adhesive. ..

【0027】また、本圧着の加熱加圧条件は、両回路基
板の端子素材、導電粒子3の種類、接着剤の種類等に応
じて、適宜設定すればよい。
The heating and pressurizing conditions for the main pressure bonding may be appropriately set depending on the terminal materials of both circuit boards, the type of conductive particles 3, the type of adhesive, and the like.

【0028】[0028]

【作用】この発明が接合材として提供する電気的接続用
フィルムは、導電粒子の他にスペーサー粒子を有してい
るので、導電粒子の粒径のばらつきが大きい等のために
回路基板と接合材との加熱圧着時に圧着面が傾いた場合
でも均一に圧着がなされるようにし、導通信頼性を向上
させる。このスペーサー粒子の配合による導通信頼性の
向上の効果は、回路基板の端子が半田メッキや錫メッキ
等の柔らかい金属で処理されている場合には、導電粒子
が半田粒子のように柔らかい金属で構成されているとき
に顕著に発揮される。これは、回路基板の端子が柔らか
い金属で処理されている場合に、導電粒子が硬い粒子で
構成されていると回路基板の端子の金属が緩衝材となっ
て圧着面の傾きを吸収するが、導電粒子も柔らかい粒子
で構成されている場合には回路基板の端子の金属が緩衝
材とならないのでスペーサー粒子の果たす作用が大きく
なると考えられるからである。
The electrical connection film provided by the present invention as a bonding material has spacer particles in addition to the conductive particles, and therefore, the particle size of the conductive particles varies greatly. Even if the crimping surface is inclined during the heating and crimping, the crimping is performed uniformly, and the conduction reliability is improved. The effect of improving the conduction reliability by blending the spacer particles is that when the circuit board terminals are treated with a soft metal such as solder plating or tin plating, the conductive particles are composed of a soft metal such as solder particles. Demonstrate prominently when being. This is because when the terminals of the circuit board are treated with soft metal and the conductive particles are composed of hard particles, the metal of the terminals of the circuit board serves as a cushioning material to absorb the inclination of the crimping surface, This is because when the conductive particles are also composed of soft particles, the metal of the terminals of the circuit board does not serve as a buffer material, and the action of the spacer particles is considered to be large.

【0029】また、この発明の電気的接続用フィルム
は、熱可塑性樹脂からなるシート状絶縁基材の表面付近
に導電粒子を埋設した従来の接合材(特開昭64−14
886号公報)と同様に使用することができ、それによ
り従来の異方性導電性接着剤を使用していた電気的接続
方法よりも導通信頼性を向上させることが可能となる
が、この発明の電気的接続方法にしたがって使用するこ
とにより、回路基板に端子が細密なピッチで多数形成さ
れている場合でも、ショートを発生させることなく接続
することを可能とする。すなわち、この発明の電気的接
続方法によれば、フィルム上に導電粒子とスペーサー粒
子を1層に保持させた電気的接続用フィルムの導電粒子
を第1の回路基板の接続すべき端子上のみに転写し、次
いで、接着剤を介して第1の回路基板と第2の回路基板
とを接着するので、導電粒子は回路基板の接続すべき端
子以外の部分には存在しないこととなる。したがって、
ショートが起こらなくなる。また、電気的接続用フィル
ムの導電粒子の密度を上げることにより2つの回路基板
の端子間を接続する導電粒子の数を多くすることができ
るので、導通信頼性を一層向上させることが可能とな
る。
The electrical connection film of the present invention is a conventional bonding material in which conductive particles are embedded near the surface of a sheet-like insulating base material made of a thermoplastic resin (Japanese Patent Laid-Open No. 64-14).
No. 886), which makes it possible to improve the continuity reliability as compared with the electrical connection method using the conventional anisotropic conductive adhesive. Even if a large number of terminals are formed at a fine pitch on the circuit board, the connection can be made without causing a short circuit by using the electrical connection method described in (1). That is, according to the electrical connection method of the present invention, the conductive particles of the electrical connection film in which the conductive particles and the spacer particles are held in one layer on the film are provided only on the terminals to be connected of the first circuit board. Since the first circuit board and the second circuit board are adhered to each other via the transfer after the transfer, the conductive particles do not exist in the portions other than the terminals to be connected to the circuit board. Therefore,
Short circuit will not occur. Moreover, since the number of the conductive particles connecting the terminals of the two circuit boards can be increased by increasing the density of the conductive particles of the electrical connection film, it is possible to further improve the conduction reliability. ..

【0030】さらに、この発明の電気的接続方法によれ
ば、従来の転写バンプ方式と異なり、ICチップにバン
プを形成することやバンプと回路基板との位置合わせを
することが不要となるので、2つの回路基板の電気的接
続工程が容易となる。
Further, according to the electrical connection method of the present invention, unlike the conventional transfer bump method, it is not necessary to form bumps on the IC chip or to align the bumps and the circuit board. The process of electrically connecting the two circuit boards is facilitated.

【0031】[0031]

【実施例】以下、この発明を実施例に基づいて具体的に
説明する。 実施例1〜3、比較例1〜3 ポリエステル樹脂(VE3220、ユニチカ製)のME
K15%溶液100重量部に、イソシアネート(コロネ
ートL、日本ポリウレタン(株)製)0.15重量部、
半田粒子(平均粒径12μm、F1−635M、千住金
属製)6重量部、表1に示した種々のスペーサー粒子1
重量部を均一に分散し、この分散液を厚さ25μmのポ
リイミドフィルムに平均厚さが5μmとなるように塗布
し、図1の(a)と同様の電気的接続用フィルムを作成
した。
EXAMPLES The present invention will be specifically described below based on examples. Examples 1 to 3 and Comparative Examples 1 to 3 ME of polyester resin (VE3220, made by Unitika)
To 100 parts by weight of K15% solution, 0.15 parts by weight of isocyanate (Coronate L, manufactured by Nippon Polyurethane Co., Ltd.),
6 parts by weight of solder particles (average particle diameter 12 μm, F1-635M, made by Senju Metal), various spacer particles 1 shown in Table 1
By weight, the dispersion was uniformly dispersed, and this dispersion was applied to a polyimide film having a thickness of 25 μm so that the average thickness was 5 μm to prepare an electrical connection film similar to that shown in FIG.

【0032】次ぎに、この電気的接続用フィルムを適当
な大きさにカットしてTAB(厚さ75μmのポリイミ
ドフィルム基材上、厚さ35μmの銅に厚さ1μmの半
田メッキ(錫:鉛=8:2)を施した端子が0.1mm
ピッチで形成されているもの)の上に置き、190℃、
5Kg/cm、5秒で1次圧着した。この場合、図3
に示したようにプレスヘッド31、受け台32、マイク
ロジャッキ33からなるプレス機を使用し、プレスケー
ル(富士化学紙製)を用いて平面性を均一にした後、マ
イクロジャッキ33により図中右側を3μm上昇させ、
圧着面を傾かせた。
Next, this electrical connection film was cut to an appropriate size and TAB (on a polyimide film substrate having a thickness of 75 μm, copper having a thickness of 35 μm and solder plating having a thickness of 1 μm (tin: lead = 8: 2) terminal is 0.1mm
Placed on the pitch), 190 ℃,
Primary compression bonding was performed at 5 Kg / cm 2 for 5 seconds. In this case,
As shown in, a press machine consisting of a press head 31, a pedestal 32, and a micro jack 33 is used, and the flatness is made uniform by using a prescale (made by Fuji Chemical Paper Co., Ltd.). Is increased by 3 μm,
The crimp surface is tilted.

【0033】冷却後、TABから電気的接続用フィルム
を剥離し、半田粒子をTABの端子に転写させた。
After cooling, the electrical connection film was peeled from the TAB, and the solder particles were transferred to the TAB terminals.

【0034】ここで、画像処理装置(日本ピーシーシス
テム(株)製)を用いて、初期の電気的接続用フィルム
の200μm角中の半田粒子の面積率とTABへ半田粒
子を転写させた後の電気的接続用フィルムの200μm
角中の半田粒子の面積率とを測定し、次式(i) にて転写
率を測定した。結果を表1に示した。
Here, using an image processing apparatus (manufactured by Nippon PC System Co., Ltd.), the area ratio of the solder particles in 200 μm square of the initial electrical connection film and the solder particles transferred to the TAB were measured. 200μm of film for electrical connection
The area ratio of the solder particles in the corner was measured, and the transfer ratio was measured by the following formula (i). The results are shown in Table 1.

【0035】 また、TABへ転写前の半田粒子の形状は直径12μm
の球形であり、転写後は円柱であるとして、転写後の半
田粒子の直径(d)を顕微鏡で測定し、次式(ii)により
その円柱の高さを求めた。結果を表1に示した。
[0035] The shape of solder particles before transfer to TAB is 12 μm in diameter.
Assuming that the shape is a sphere and that after transfer, it is a cylinder, the diameter (d) of the solder particles after transfer was measured with a microscope, and the height of the cylinder was determined by the following equation (ii). The results are shown in Table 1.

【0036】 高さ=半田粒子の体積/(d/2)2 ・π (ii) 次ぎに、このTABに以下の組成のエポキシ系接着フィ
ルムを仮圧着し、その後0.1mmピッチのITOパタ
ーンが形成されているガラス基板と170℃、40Kg
/cm、20秒で本圧着した。
Height = volume of solder particles / (d / 2) 2 · π (ii) Next, an epoxy adhesive film having the following composition is temporarily pressure-bonded to this TAB, and then an ITO pattern with a pitch of 0.1 mm is formed. Glass substrate formed and 170 ℃, 40Kg
The main press-bonding was performed at / cm 2 for 20 seconds.

【0037】 エポキシ系接着フィルム組成 フェノキシ樹脂(YP50、東都化成製) 42.5部 ビスA型エポキシ(Ep828、油化シェル製) 42.5部 硬化剤(H×3748、旭化成製) 15.0部 その後、TABとITOパターンの初期導通抵抗とMI
L STD 202F106Eによる1000時間のエ
ージング後の導通抵抗、および絶縁抵抗をデジタルマル
チメーターを用いて測定した。結果を表1に示した。
[0037]Epoxy adhesive film composition  Phenoxy resin (YP50, manufactured by Tohto Kasei) 42.5 parts Bis-A type epoxy (Ep828, manufactured by Yuka Shell) 42.5 parts Curing agent (Hx3748, manufactured by Asahi Kasei) 15.0 parts After that, TAB and ITO pattern Initial conduction resistance and MI
1000 hours of energy with L STD 202F106E
Conduction resistance after insulation and insulation resistance are digitally
It was measured using a chymeter. The results are shown in Table 1.

【0038】表1の結果から、半田粒子の粒径の20〜
80%の粒径のスペーサー粒子を使用した実施例におい
ては、1次圧着時に圧着面を傾かせたにもかかわらず、
左右の転写粒子の高さがほぼ等しくなっており、均一に
圧着されたことが確認できた。また、MIL1000時
間後の導通抵抗も低く、導通信頼性の高いことが確認で
きた。
From the results shown in Table 1, the solder particle size of 20 to
In the example using the spacer particles having a particle size of 80%, although the pressure-bonded surface was inclined during the primary pressure-bonding,
The heights of the transfer particles on the left and right were almost the same, and it was confirmed that the transfer particles were pressed uniformly. It was also confirmed that the conduction resistance after 1000 hours of MIL was low and the conduction reliability was high.

【0039】[0039]

【表1】 実施例1 実施例2 実施例3 比較例1 比較例2 比較例3 スペーサー粒子 M*1 M 銅粉 − M M 粒径(μm) 3 5 3 2 10 転写率(%) 42 38 41 43 39 13 粒子高さ (μm) 左 5.1 4.8 5.2 6.5 6.0 9.5 右 3.8 4.3 3.9 2 2.5 2.2 導通抵抗Max(Ω) 初期 6 6.5 5.8 1.1 10.5 8 MIL1000hr 後 17 15.8 16.3 1.2k 0.8k 0.4k 絶縁抵抗 ○*2 ○ ○ ○ ○ ○ 注 *1 ベンゾグアナミン樹脂粒子(ミクロパール、触媒化学製) *2 1010Ω以上[Table 1] Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Comparative Example 3 Spacer particles M * 1 M Copper powder-MM Particle size (μm) 3 5 3 2 10 Transfer rate (%) 42 38 41 43 39 13 Particle height (μm) Left 5.1 4.8 5.2 6.5 6.0 9.5 Right 3.8 4.3 3.9 2 2.5 2.2 Conduction resistance Max (Ω) Initial 6 6.5 5.8 1.1 10.5 8 After MIL1000hr 17 15.8 16.3 1.2k 0.8k 0.4k Insulation resistance ○ * 2 ○ ○ ○ ○ ○ Note * 1 Benzoguanamine resin particles (Micropearl, manufactured by Catalysis) * 2 10 10 Ω or more

【0040】[0040]

【発明の効果】この発明によれば、2つの回路基板間の
端子を接続するにあたり、接続すべき端子が回路基板に
細密なピッチで多数形成されている場合でも、ショート
を発生させることなく、高い導通信頼性が得られるよう
に確実にかつ容易に接続することが可能となる。
According to the present invention, when connecting terminals between two circuit boards, even when a large number of terminals to be connected are formed on the circuit board at a fine pitch, a short circuit is not generated. It is possible to connect reliably and easily so as to obtain high conduction reliability.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の電気的接続方法の工程説明図であ
る。
FIG. 1 is a process explanatory diagram of an electrical connection method of the present invention.

【図2】この発明の電気的接続方法の工程説明図であ
る。
FIG. 2 is a process explanatory diagram of the electrical connection method of the present invention.

【図3】1次圧着に使用したプレス機の概略構成図であ
る。
FIG. 3 is a schematic configuration diagram of a press used for primary pressure bonding.

【符号の説明】[Explanation of symbols]

1 フィルム 2 バインダー層 3 導電粒子 4 スペーサー粒子 5 第1の回路基板 5a 第1の回路基板の端子 6 電気的接続用回路基板 7 第2の回路基板 7a 第2の回路基板の端子 8 接着フィルム 10 電気的接続用フィルム 1 Film 2 Binder Layer 3 Conductive Particles 4 Spacer Particles 5 First Circuit Board 5a Terminals of First Circuit Board 6 Circuit Board for Electrical Connection 7 Second Circuit Board 7a Terminals of Second Circuit Board 8 Adhesive Film 10 Film for electrical connection

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 フィルム上に導電粒子と、導電粒子より
も耐熱性でかつ導電粒子の粒径の20〜80%の粒径を
有するスペーサー粒子とを均一に1層保持させたことを
特徴とする電気的接続用フィルム。
1. A single layer of conductive particles and spacer particles having a heat resistance higher than that of the conductive particles and having a particle size of 20 to 80% of the particle size of the conductive particles are uniformly held on the film. Film for electrical connection.
【請求項2】 回路基板上の端子面と請求項1記載の電
気的接続用フィルムの導電粒子とスペーサー粒子が保持
されている面とを合わせ、両者を加熱圧着し、剥離する
ことにより回路基板の端子上に導電粒子を転写させて得
られる、回路基板の端子上のみに1層の導電粒子が融着
している電気的接続用回路基板。
2. The circuit board by aligning the terminal surface on the circuit board with the surface of the electrical connection film according to claim 1 on which the conductive particles and the spacer particles are held, and by thermocompression bonding and peeling. The circuit board for electrical connection, obtained by transferring the conductive particles onto the terminals, and in which one layer of the conductive particles is fused only on the terminals of the circuit board.
【請求項3】 第1の回路基板の端子と第2の回路基板
の端子とを電気的に接続する方法において、第1の回路
基板の端子面と請求項1記載の電気的接続用フィルムの
導電粒子とスペーサー粒子が保持されている面とを合わ
せ、両者を加熱圧着し、剥離して第1の回路基板の端子
上に導電粒子を転写させ、次いで、導電粒子を転写させ
た第1の回路基板の端子面と第2の回路基板の端子面と
を接着剤を介して加熱圧着することを特徴とする電気的
接続方法。
3. A method for electrically connecting a terminal of a first circuit board and a terminal of a second circuit board, wherein the terminal surface of the first circuit board and the film for electrical connection according to claim 1. The conductive particles and the surface on which the spacer particles are held are brought together, and both are heat-pressed and peeled off to transfer the conductive particles onto the terminals of the first circuit board, and then to transfer the conductive particles to the first An electrical connection method, characterized in that the terminal surface of the circuit board and the terminal surface of the second circuit board are thermocompression bonded via an adhesive.
JP31401591A 1991-07-14 1991-10-31 Electrical connection method Expired - Lifetime JP3114162B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3-199964 1991-07-14
JP19996491 1991-07-14

Publications (2)

Publication Number Publication Date
JPH0575250A true JPH0575250A (en) 1993-03-26
JP3114162B2 JP3114162B2 (en) 2000-12-04

Family

ID=16416534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31401591A Expired - Lifetime JP3114162B2 (en) 1991-07-14 1991-10-31 Electrical connection method

Country Status (1)

Country Link
JP (1) JP3114162B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1193757A2 (en) 2000-09-29 2002-04-03 JSR Corporation Conductive metal particles, conductive composite metal particles and applied products using the same
US6906427B2 (en) 1997-04-17 2005-06-14 Sekisui Chemical Co., Ltd. Conductive particles and method and device for manufacturing the same, anisotropic conductive adhesive and conductive connection structure, and electronic circuit components and method of manufacturing the same
JP2009238635A (en) * 2008-03-27 2009-10-15 Sony Chemical & Information Device Corp Joining body, its manufacturing method, anisotropic conductive material and its manufacturing method
JP2010199612A (en) * 2006-04-27 2010-09-09 Sumitomo Bakelite Co Ltd Semiconductor device and method of manufacturing the same
US9027822B2 (en) 2010-11-08 2015-05-12 Panasonic Intellectual Property Management Co., Ltd. Manufacturing method of solder transfer substrate, solder precoating method, and solder transfer substrate
KR20180114558A (en) * 2017-04-10 2018-10-19 한국과학기술원 Anisotropic conductive film using solder coated metal conducting particles

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6906427B2 (en) 1997-04-17 2005-06-14 Sekisui Chemical Co., Ltd. Conductive particles and method and device for manufacturing the same, anisotropic conductive adhesive and conductive connection structure, and electronic circuit components and method of manufacturing the same
EP1193757A2 (en) 2000-09-29 2002-04-03 JSR Corporation Conductive metal particles, conductive composite metal particles and applied products using the same
JP2010199612A (en) * 2006-04-27 2010-09-09 Sumitomo Bakelite Co Ltd Semiconductor device and method of manufacturing the same
JP2009238635A (en) * 2008-03-27 2009-10-15 Sony Chemical & Information Device Corp Joining body, its manufacturing method, anisotropic conductive material and its manufacturing method
US9027822B2 (en) 2010-11-08 2015-05-12 Panasonic Intellectual Property Management Co., Ltd. Manufacturing method of solder transfer substrate, solder precoating method, and solder transfer substrate
KR20180114558A (en) * 2017-04-10 2018-10-19 한국과학기술원 Anisotropic conductive film using solder coated metal conducting particles

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