JPH056134A - Manufacture of holographic optical element - Google Patents
Manufacture of holographic optical elementInfo
- Publication number
- JPH056134A JPH056134A JP3156328A JP15632891A JPH056134A JP H056134 A JPH056134 A JP H056134A JP 3156328 A JP3156328 A JP 3156328A JP 15632891 A JP15632891 A JP 15632891A JP H056134 A JPH056134 A JP H056134A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive material
- optical element
- interference fringes
- holographic optical
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000000463 material Substances 0.000 claims abstract description 46
- 230000004907 flux Effects 0.000 claims abstract description 7
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RJDAWNNBHDXTNY-UHFFFAOYSA-N 1-(4-bromo-2,5-dihydroxyphenyl)-7-hydroxy-3,7-dimethyloct-2-en-1-one Chemical compound CC(O)(C)CCCC(C)=CC(=O)C1=CC(O)=C(Br)C=C1O RJDAWNNBHDXTNY-UHFFFAOYSA-N 0.000 description 1
- 238000004061 bleaching Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0402—Recording geometries or arrangements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0465—Particular recording light; Beam shape or geometry
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0402—Recording geometries or arrangements
- G03H2001/0413—Recording geometries or arrangements for recording transmission holograms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0402—Recording geometries or arrangements
- G03H2001/0415—Recording geometries or arrangements for recording reflection holograms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H2222/00—Light sources or light beam properties
- G03H2222/36—Scanning light beam
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H2270/00—Substrate bearing the hologram
- G03H2270/20—Shape
- G03H2270/22—Disc shaped
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Holo Graphy (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、微細なグレーティング
の集合からなる各種光学素子の製作方法に関し、特に、
感光材料の各局所領域で2本の光束を干渉させることに
より全体として所望の光学特性を得ることができるホロ
グラフィック光学素子の作製方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing various optical elements including a set of fine gratings, and
The present invention relates to a method for producing a holographic optical element that can obtain desired optical characteristics as a whole by causing two light beams to interfere with each other in each local region of a photosensitive material.
【0002】[0002]
【従来の技術】従来、計算機で干渉縞の形を計算して、
実際の光の干渉を用いずに、ホログラムをプロッター、
EB(電子ビーム)描画装置、レーザビーム描画装置等
で記録する方法は、コンピュータ・ジェネレイテッド・
ホログラム(CGH)として知られている。2. Description of the Related Art Conventionally, a computer calculates the shape of interference fringes,
Plot the hologram without using actual light interference,
A method of recording with an EB (electron beam) drawing device, a laser beam drawing device, etc. is described in Computer Generated.
Known as a hologram (CGH).
【0003】一方、干渉縞が感光材料の厚み方向にも分
布も持って記録される体積ホログラムやリップマンホロ
グラムも公知である。On the other hand, volume holograms and Lippmann holograms in which interference fringes are recorded with a distribution in the thickness direction of the photosensitive material are also known.
【0004】さらに、体積型のホログフィック光学素子
としては、集光素子等の外、ヘッドアップディスプレイ
用コンバイナ(「オプトロニクス」(1989)No.
2,pp.113〜118)、反射型ホログラム又は透
過型ホログラムによるモザイク状カラーフィルタ(特開
平2−89081号)等が知られている。Further, as a volume type holographic optical element, a combiner for a head-up display (“Opttronics” (1989) No.
2, pp. 113-118), a mosaic color filter using a reflection hologram or a transmission hologram (Japanese Patent Laid-Open No. 2-89081), and the like.
【0005】ところで、CGH及び体積ホログラムに
は、それぞれ下記のような利点がある。
〇CGHの特徴
・任意のホログラムが作製できる。
・正確なホログラムが作製できる。
・干渉法のように、レーザービームの分布、波長、コヒ
ーレンシー等の光源の制限を受けない。By the way, the CGH and the volume hologram have the following advantages, respectively. -Characteristics of CGH-Any hologram can be produced.・ It is possible to make accurate holograms. -Unlike interferometry, it is not limited by the light source such as laser beam distribution, wavelength, and coherency.
【0006】〇体積型ホログラムの特徴
・理論的に100%の回折効率が実現できる。
・波長選択性、入射角選択性があり、これらの機能を用
いた光学素子が実現できる。
・密着複製によりコピーができる。Features of volume hologram ・ A theoretically 100% diffraction efficiency can be realized. -It has wavelength selectivity and incident angle selectivity, and an optical element using these functions can be realized.・ Copies can be made by close copy.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、従来の
CGHは、2次元的ホログラムしか作製できず、体積型
ホログラムやリップマンホログラムの作製は不可能であ
った。すなわち、体積型のCGHは存在しえなかった。
そのため、CGH及び体積ホログラムの上記したような
利点を合わせ持ったホログラムの作製は不可能であっ
た。特に、CGHによって体積ホログラムからなるホロ
グラフィック光学素子を作製することはできなかった。However, the conventional CGH can only produce a two-dimensional hologram, and cannot produce a volume hologram or a Lippmann hologram. That is, volume CGH could not exist.
Therefore, it has been impossible to produce a hologram having the above-described advantages of CGH and volume hologram. In particular, it was not possible to manufacture a holographic optical element composed of a volume hologram by CGH.
【0008】本発明はこのような状況に鑑みてなされた
ものであり、その目的は、感光材料の各局所領域で2本
の光束を干渉させることにより、全体として所望の光学
特性のホログラフィック光学素子を作製する方法を提供
することである。The present invention has been made in view of such circumstances, and an object thereof is to cause two light beams to interfere with each other in each local region of a light-sensitive material so that holographic optics having desired optical characteristics as a whole. It is to provide a method for manufacturing an element.
【0009】[0009]
【課題を解決するための手段】上記目的を達成する本発
明のホログラフィック光学素子の作製方法は、同一光源
からの2本の光束を感光材料中の局所空間において干渉
させて局在する干渉縞を形成し、干渉領域を感光材料中
で相対的に移動させるとともにその位置に対応して少な
くとも前記2本の光束の入射方向を制御しながら、同様
に感光材料中に局在する干渉縞の形成を繰り返すことに
より、感光材料中に集合的な干渉縞を形成して、全体と
して所定の光学特性の光学素子を作製することを特徴と
する方法である。According to the method of manufacturing a holographic optical element of the present invention which achieves the above object, an interference fringe localized by causing two light beams from the same light source to interfere in a local space in a photosensitive material. And moving the interference region relatively in the photosensitive material and controlling the incident directions of at least the two light fluxes corresponding to the positions thereof, similarly forming interference fringes localized in the photosensitive material. Is repeated to form collective interference fringes in the photosensitive material to fabricate an optical element having predetermined optical characteristics as a whole.
【0010】この場合、2本の光束を感光材料に対して
相互に反対の側から入射させて干渉縞を形成するように
すると、リップマンタイプのホログラフィック光学素子
を作製することができる。なお、局在する干渉縞の大き
さが感光材料の厚みに比べて小さく、感光材料中の干渉
領域の移動が感光材料の面内方向と厚み方向の3次元的
移動であるようにすることで、体積型のホログラフィッ
ク光学素子を作製することができる。干渉領域の移動方
法としては、例えば、干渉縞の面の方向に連続的に移動
させる方法がある。In this case, a Lippmann type holographic optical element can be manufactured by causing two light beams to enter the photosensitive material from mutually opposite sides to form interference fringes. The size of the localized interference fringes is smaller than the thickness of the photosensitive material, and the movement of the interference region in the photosensitive material is a three-dimensional movement in the in-plane direction and the thickness direction of the photosensitive material. A volume holographic optical element can be manufactured. As a method of moving the interference region, for example, there is a method of continuously moving in the direction of the surface of the interference fringe.
【0011】なお、以上の方法により、2次元的ホログ
ラフィック光学素子を作製することもできる。A two-dimensional holographic optical element can be manufactured by the above method.
【0012】[0012]
【作用】本発明においては、同一光源からの2本の光束
を感光材料中の局所空間において干渉させて局在する干
渉縞を形成し、干渉領域を感光材料中で相対的に移動さ
せるとともにその位置に対応して少なくとも前記2本の
光束の入射方向を制御しながら、同様に感光材料中に局
在する干渉縞の形成を繰り返すことにより、感光材料中
に集合的な干渉縞を形成して、全体として所定の光学特
性の光学素子を作製するので、CGH及び体積ホログラ
ムの利点を合わせ持った任意の特性のホログラフィック
光学素子を容易に作製することができる。In the present invention, two light fluxes from the same light source are caused to interfere in a local space in the photosensitive material to form localized interference fringes, and the interference area is moved relatively in the photosensitive material. By forming the interference fringes that are localized in the photosensitive material in the same manner while controlling the incident directions of at least the two light beams corresponding to the positions, collective interference fringes are formed in the photosensitive material. Since an optical element having predetermined optical characteristics is manufactured as a whole, it is possible to easily manufacture a holographic optical element having arbitrary characteristics that have the advantages of CGH and a volume hologram.
【0013】[0013]
【実施例】次に、図面を参照にして本発明の実施例につ
いて説明する。まず、本発明に基づくホログラフィック
光学素子の基本的な作製法について説明する。図1
(a)及びその部分拡大図(b)に示すように、同一レ
ーザからの2本のビームA、Bをそれぞれレンズ3、4
を通して集光させ、この2つの集光ビームを基板2上の
感光材料1中の局在空間5において干渉させると、その
部分5に空間的な干渉縞が形成される。ビームA、Bの
相対角度を変えながら、光学系3、4若しくは感光材料
1あるいはその両方を、干渉縞が繋がるようにして、局
在空間5を感光材料1内で矢印6のように移動させて、
感光材料1中に予め計算したような干渉縞分布に記録し
て行く。この移動は、感光材料1の面の方向の間欠的な
移動でもよく、また、連続的な移動でもよい。また、形
成される干渉縞の面方向に連続的に移動させるようにし
てもよい。なお、干渉縞の領域5が感光材料1の膜厚よ
りも小さければ、その膜厚方向への移動も行う。この場
合、移動と同時に2本のレーザビームA、Bの相対角度
を変えることにより、干渉縞のピッチを、また、両者の
なす角の中心線と感光材料面の法線とがなす角度を変え
ることにより、干渉縞の感光材料中の角度を変えること
ができる。Embodiments of the present invention will now be described with reference to the drawings. First, a basic manufacturing method of the holographic optical element according to the present invention will be described. Figure 1
As shown in (a) and its partially enlarged view (b), two beams A and B from the same laser are respectively fed to the lenses 3 and 4, respectively.
When these two focused beams are made to interfere with each other in the localized space 5 in the photosensitive material 1 on the substrate 2, spatial interference fringes are formed in the part 5. While changing the relative angles of the beams A and B, the localized spaces 5 are moved in the photosensitive material 1 as shown by arrows 6 so that the optical systems 3 and 4 and / or the photosensitive material 1 or both are connected by interference fringes. hand,
The interference fringe distribution as previously calculated is recorded in the photosensitive material 1. This movement may be intermittent movement in the direction of the surface of the photosensitive material 1 or continuous movement. Alternatively, the interference fringes may be continuously moved in the surface direction. If the area 5 of the interference fringes is smaller than the film thickness of the photosensitive material 1, the movement in the film thickness direction is also performed. In this case, by changing the relative angle between the two laser beams A and B at the same time as the movement, the pitch of the interference fringes and the angle formed by the center line of the angle between them and the normal line of the photosensitive material surface are changed. Thus, the angle of the interference fringes in the photosensitive material can be changed.
【0014】このようにして、レーザビームA、Bの強
度、レーザビームA、Bの相対角度、両者のなす角の中
心線と感光材料面の法線とがなす角度を、感光材料中の
干渉領域の位置と関係付けて、例えばコンピュータを用
いて精密に制御しながら記録することにより、集光素
子、ヘッドアップディスプレイ用コンバイナ、空間分布
カラーフィルタ等の任意の回折角分布特性、波長透過乃
至反射分布特性、透過率乃至反射率分布特性を有する光
学素子を作製することができる。In this way, the intensities of the laser beams A and B, the relative angles of the laser beams A and B, and the angle formed by the center line of the angles formed by the two and the normal line of the surface of the photosensitive material are determined by the interference in the photosensitive material. By recording with precise control using a computer, for example, by correlating with the position of the area, arbitrary diffraction angle distribution characteristics of the condensing element, combiner for head-up display, spatial distribution color filter, etc., wavelength transmission or reflection An optical element having distribution characteristics and transmittance or reflectance distribution characteristics can be manufactured.
【0015】このような記録を実際に行うには、例えば
図2に模式的に示したように、感光材料を回転テーブル
7上に載置し、このテーブル7の矢印10方向の回転
角、矢印11で示した半径方向の位置、矢印12で示し
た高さを精密に制御して、干渉領域の位置を精密に制御
しながら、その位置と関連付けてレーザビームA、Bの
強度を図示していない光源側で制御し、かつ、レーザビ
ームA、Bを矢印8、9方向の角度を制御して、両者の
相対角度、両者の感光材料面の法線となす角度を所定な
値になるように制御して、感光材料中に順次記録するこ
とにより行われる。なお、図2では回転テーブルを用い
ているが、X−Yステージでもよく、また、レーザビー
ムを移動させる方法でもよい。To actually perform such recording, for example, as schematically shown in FIG. 2, a photosensitive material is placed on a rotary table 7, and the rotation angle of the table 7 in the direction of arrow 10 and the arrow. The positions of the laser beams A and B are illustrated in association with the positions while precisely controlling the position of the interference region by precisely controlling the position in the radial direction indicated by 11 and the height indicated by the arrow 12. The light source side is controlled and the angles of the laser beams A and B in the directions of arrows 8 and 9 are controlled so that the relative angle between them and the angle between the laser beam A and B and the normal to the surface of the photosensitive material become predetermined values. Control is performed to sequentially record in the light-sensitive material. Although a rotary table is used in FIG. 2, an XY stage may be used, or a method of moving a laser beam may be used.
【0016】次に、具体例について説明する。光源とし
てHe−Neレーザ、感光材料としてAgfa−Gev
aert社製8E74HDプレートを用いて、図2のよ
うな装置により、10×10mmの透過型ホログラムレ
ンズを作製した。Next, a specific example will be described. He-Ne laser as the light source, Agfa-Gev as the photosensitive material
A transmission hologram lens of 10 × 10 mm was manufactured by using an apparatus as shown in FIG. 2 using 8E74HD plate manufactured by aert.
【0017】現像液CWC−2と漂白液PBQ2により
公知の方法で現像処理することにより、通常のCGHや
干渉による撮影では得られない低ノイズで明るいホログ
ラムレンズを得ることができた。By developing with the developing solution CWC-2 and the bleaching solution PBQ2 by a known method, it was possible to obtain a low noise and bright hologram lens which cannot be obtained by ordinary CGH or photographing by interference.
【0018】以上、本発明の方法を実施例に基づいて説
明してきたが、本発明はこれら実施例に限定されず種々
の変形が可能である。例えば、同一の局在領域に2つ以
上の異なる干渉縞を多重に記録することもできる。ま
た、本発明の方法は、体積型のホログラフィック光学素
子の作製だけでなく、2次元的なホログラフィック光学
素子の作製にも適用できる。なお、2次元的なホログラ
フィック光学素子を作製する場合は、同時に複数本の線
を記録できるので描画時間が速く、また、ビーム径に制
限されずに微細なパターンを作製することができる。The method of the present invention has been described above based on the embodiments, but the present invention is not limited to these embodiments and various modifications can be made. For example, two or more different interference fringes can be recorded in the same localized region in a multiplexed manner. The method of the present invention can be applied not only to the production of a volume holographic optical element but also to the production of a two-dimensional holographic optical element. In the case of producing a two-dimensional holographic optical element, a plurality of lines can be recorded at the same time, so that the drawing time is short and a fine pattern can be produced without being limited by the beam diameter.
【0019】[0019]
【発明の効果】以上説明したように、本発明のホログラ
フィック光学素子の作製方法によると、同一光源からの
2本の光束を感光材料中の局所空間において干渉させて
局在する干渉縞を形成し、干渉領域を感光材料中で相対
的に移動させるとともにその位置に対応して少なくとも
前記2本の光束の入射方向を制御しながら、同様に感光
材料中に局在する干渉縞の形成を繰り返すことにより、
感光材料中に集合的な干渉縞を形成して、全体として所
定の光学特性の光学素子を作製するので、CGH及び体
積ホログラムの利点を合わせ持った任意の特性のホログ
ラフィック光学素子を容易に作製することができる。As described above, according to the method of manufacturing a holographic optical element of the present invention, two light beams from the same light source are caused to interfere with each other in a local space in the photosensitive material to form localized interference fringes. Then, while the interference region is relatively moved in the photosensitive material and the incident directions of at least the two light fluxes are controlled corresponding to the position, formation of interference fringes similarly localized in the photosensitive material is repeated. By
Since collective interference fringes are formed in the photosensitive material to produce an optical element having a predetermined optical characteristic as a whole, a holographic optical element having an arbitrary characteristic having the advantages of CGH and a volume hologram can be easily produced. can do.
【図1】本発明に基づくホログラフィック光学素子の基
本的な作製法を説明するための図である。FIG. 1 is a diagram for explaining a basic manufacturing method of a holographic optical element according to the present invention.
【図2】実際に作製する場合の配置を示す模式図であ
る。FIG. 2 is a schematic diagram showing an arrangement when actually manufactured.
A、B…レーザビーム 1…感光材料 2…基板 3、4…レンズ 5…局在空間 7…回転テーブル A, B ... Laser beam 1 ... Photosensitive material 2 ... Substrate 3, 4 ... Lens 5 ... local space 7 ... Rotary table
Claims (5)
の局所空間において干渉させて局在する干渉縞を形成
し、干渉領域を感光材料中で相対的に移動させるととも
にその位置に対応して少なくとも前記2本の光束の入射
方向を制御しながら、同様に感光材料中に局在する干渉
縞の形成を繰り返すことにより、感光材料中に集合的な
干渉縞を形成して、全体として所定の光学特性の光学素
子を作製することを特徴とするホログラフィック光学素
子の作製方法。1. Two light fluxes from the same light source interfere with each other in a local space in the photosensitive material to form localized interference fringes, and the interference region is relatively moved in the photosensitive material and corresponds to its position. By repeating the formation of interference fringes localized in the photosensitive material in the same manner while controlling the incident directions of at least the two light beams, collective interference fringes are formed in the photosensitive material, and as a whole. A method for producing a holographic optical element, which comprises producing an optical element having predetermined optical characteristics.
対の側から入射させて干渉縞を形成することを特徴とす
る請求項1記載のホログラフィック光学素子の作製方
法。2. A method of manufacturing a holographic optical element according to claim 1, wherein two light beams are made incident on the photosensitive material from mutually opposite sides to form interference fringes.
みに比べて小さく、感光材料中の干渉領域の移動が感光
材料の面内方向と厚み方向の3次元的移動であることを
特徴とする請求項1又は2記載のホログラフィック光学
素子の作製方法。3. The size of the localized interference fringes is smaller than the thickness of the photosensitive material, and the movement of the interference region in the photosensitive material is a three-dimensional movement in the in-plane direction and the thickness direction of the photosensitive material. The method for producing a holographic optical element according to claim 1, which is characterized in that.
連続的な移動であることを特徴とする請求項1から3の
何れか1項記載のホログラフィック光学素子の作製方
法。4. The method for producing a holographic optical element according to claim 1, wherein the movement of the interference region is continuous movement in the direction of the plane of the interference fringes.
次元的ホログラムからなる光学素子であることを特徴と
する請求項1記載のホログラフィック光学素子の作製方
法。5. A holographic optical element to be produced is 2
The method for producing a holographic optical element according to claim 1, wherein the optical element is a three-dimensional hologram.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15632891A JP3287472B2 (en) | 1991-06-27 | 1991-06-27 | Method of manufacturing holographic optical element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15632891A JP3287472B2 (en) | 1991-06-27 | 1991-06-27 | Method of manufacturing holographic optical element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH056134A true JPH056134A (en) | 1993-01-14 |
JP3287472B2 JP3287472B2 (en) | 2002-06-04 |
Family
ID=15625386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15632891A Expired - Fee Related JP3287472B2 (en) | 1991-06-27 | 1991-06-27 | Method of manufacturing holographic optical element |
Country Status (1)
Country | Link |
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JP (1) | JP3287472B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6995882B2 (en) | 1998-02-27 | 2006-02-07 | Optware Corporation | Apparatus for recording optical information |
-
1991
- 1991-06-27 JP JP15632891A patent/JP3287472B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6995882B2 (en) | 1998-02-27 | 2006-02-07 | Optware Corporation | Apparatus for recording optical information |
US7085025B2 (en) | 1998-02-27 | 2006-08-01 | Optware Corporation | Apparatus for recording optical information |
US7085026B2 (en) | 1998-02-27 | 2006-08-01 | Optware Corporation | Apparatus and method for recording and reproducing optical information |
US7130092B1 (en) | 1998-02-27 | 2006-10-31 | Optware Corporation | Apparatus and method for recording and reproducing optical information |
US7474447B2 (en) | 1998-02-27 | 2009-01-06 | Optware Corporation | Apparatus and method for recording and reproducing optical information |
Also Published As
Publication number | Publication date |
---|---|
JP3287472B2 (en) | 2002-06-04 |
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