JPH0557657U - Device for measuring optical properties of plate surface - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide an optical characteristic measuring device used for experimentally measuring optical characteristics such as light reflection, optical interference, and radiation on the surface of a flat plate-shaped material such as metal in a high temperature state. A plurality of pairs of a measurement chamber 8 having a heating means, a sample stage 9 for fixing the sample 1, an entrance window 22 for allowing radiated light to enter the sample 1, and a measurement window 23 for transmitting reflected light from the sample 1 are provided. By using the fixing member 30 including the outer fitting member 31 and the inner fitting member 32 when the radiant light source 3 and the optical sensor 4 are mounted in the heating furnace 7, the synchrotron light source can be changed with one touch when changing the measurement angle. 3 and optical sensor 4
Can be transferred.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a device for measuring optical characteristics of a plate material surface.

[0002]

[Prior Art]

 Experimental measurement of material surface properties is important when establishing a material inspection method by online measurement in the manufacturing process of the material, and especially in recent years, for example, optical reflection, optical interference, radiation, etc. Has attracted attention for its physical properties. The principle of measurement of this optical physical property will be described with reference to FIG.

In the figure, 1 is a sample of a plate-like material, 2 is a measurement target portion such as a surface defect to be detected, 3 is a radiation light source for measurement such as laser light, and 4 is an optical sensor. When the incident light 5a reaches the surface of the sample 1 from the synchrotron radiation source 3, an optical phenomenon such as reflection or interference occurs on the surface, and the characteristics of the surface of the sample 1 affect the reflected light 5b. Therefore, by observing the reflected light 5b with the optical sensor 4, it is possible to measure the information on the measurement target portion 2. Then, as shown in the drawing, the incident light 5a is incident on the measurement target portion 2 at an incident angle of θ ₁ with respect to the perpendicular line 6, and at the measurement angle of θ _{2 with} respect to the perpendicular line 6 on the surface of the measurement target portion 2. If it is reflected, it is clear that the influence characteristics of the measurement target portion 2 on the reflected light 5b depend on θ ₁ , θ ₂ , and the like.

FIG. 5 shows an outline of a heating furnace which has been conventionally used for measuring and experimenting the optical characteristics of the surface of the sample 1. As shown in the figure, the heating furnace 7 is composed of a measurement chamber 8, a sample stand 9 for fixing the sample 1 and an observation window unit 10. The measuring chamber 8 is a cylindrical furnace body 12 having a flange 11 having a plurality of holes 11a attached to the upper portion thereof, and a heat insulating material 13 is lined on the inner wall thereof. Inside the furnace body 12, a heater 14 such as a heating wire is arranged and power is supplied via a power supply wiring 15, and a temperature detector 16 is attached to the sample 1 and externally supplied via a measurement wiring 17. Is transmitted to. A gas pipe 18 and a cooling water pipe 19 are connected to the side wall of the furnace body 12.

In the observation window unit 10, a hemispherical lid 21 is attached to a flange 20 having a plurality of holes 20 a, and a plurality of incident windows 22 and measurement windows 23 are paired with the lid 21. Mounted as. A window member 24 made of, for example, a crystalline material that is transparent to the measurement wavelength, that is, has a high transmittance is attached to the entrance window 22 and the measurement window 23. Therefore, when performing an experiment for measuring the optical characteristics of the surface of the sample 1 of the flat plate-like material using this heating furnace 7, first fix the sample 1 on the sample table 9 and then cover the flange 11 of the measuring chamber 8 with the lid. The flange 20 of the portion 21 is covered, and bolts (not shown) are fixed through both holes 11a and 20a facing each other to make a sealed state. Then, the heater 14 is energized to heat the sample 1 to a predetermined temperature. At this time, the gas pipe 18 blows an inert gas into the furnace to prevent oxidation by the atmosphere, and the cooling water pipe 19 supplies cooling water to cool the furnace body 12. Then, the incident light 5a is made incident on the surface of the sample 1 from the radiant light source 3 attached to one of the incident windows 22, and the reflected light 5b from the measurement window 23 facing it is observed by the optical sensor 4.

[0006]

[Problems to be solved by the device]

By the way, in the optical physical property measurement using the heating furnace 7 as described above, the measurement data changes depending on the incident angle θ ₁ of the incident light 5a and the measuring angle θ ₂ of the reflected light 5b. The problem is that it takes a very long time to set the angle precisely.

Here, in order to simplify the explanation of this problem, it is assumed that the incident angle θ ₁ and the measurement angle θ ₂ are equal to each other, and that θ is θ _A , θ _B , θ _C (where θ _A < The setup change when the measurement is performed using the observation window unit 10 that can be changed in three stages of θ _B <θ _C ) will be described. First, FIG. 6 (a) shows a measurement state at an angle θ _{A. The} incident light 5a from the synchrotron radiation light source 3 is incident on the surface of the sample 1 through the incident window 22a with respect to the perpendicular 6 as the incident angle θ _A. It is assumed that the reflected light 5b is incident on the optical sensor 4 through the measurement window 23a. When changing from this state to a measurement at a different angle θ _B , as shown in FIG. 6 (b), the synchrotron radiation light source 3 and the optical sensor 4 are moved to the incident window 22b and the measurement window 23b, and the incident angle is changed. Change the measurement angle to θ _B , adjust the optical axis, and then measure. When the measurement is further changed to the angle θ _C , the incident window 22c and the measurement window 23c are used as shown in FIG. 6 (c).

As described above, it is necessary to adjust the optical axis each time the measurement optical axis is changed, and if a positioning mark corresponding to the measurement angle is attached in advance, a rough position can be determined. In that case, the optical axis may shift. In addition, there is a problem in that the measurement efficiency cannot be improved because it takes a lot of time and labor to align the optical axis.

An object of the present invention is to provide a device for measuring optical characteristics of a plate material, which solves the problems of the above-mentioned conventional techniques.

[0010]

[Means for Solving the Problems]

 The present invention is a heating furnace comprising a measurement chamber having a heating means, a sample stage for fixing a sample, and an observation window unit having a plurality of incident windows and measurement windows, and the sample is incident on the sample through the incident window. A device for measuring optical characteristics of a plate material surface, comprising a radiant light source for entering light and an optical sensor for measuring reflected light from the sample through the measurement window, the fixing device comprising an outer fitting member and an inner fitting member. An optical characteristic measuring device for a plate surface, characterized in that the radiation light source and the optical sensor are detachably fixed to the entrance window and the measurement window using members.

[0011]

[Work]

 According to the present invention, the fixing member including the outer fitting member and the inner fitting member is used, the outer fitting member is attached to the synchrotron radiation light source and the optical sensor, and the inner fitting member is detachably fixed to the incident window and the measurement window. However, the outer fitting member of the synchrotron radiation light source is fitted to the inner fitting member of the entrance window, and the outer fitting member of the optical sensor is fitted to the inner fitting member of the measurement window. In this case, with the outer fitting member pulled out, the inner fitting member is once removed and transferred to the entrance window and the measurement window having a predetermined angle, so that measurement can be performed without optical axis alignment. It is possible to perform quick measurement work.

[0012]

【Example】

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a side view showing an outline of an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA of FIG. In the drawing, the same members as those in the conventional example are designated by the same reference numerals. As shown in the figure, the measurement system of the radiation light source 3 and the optical sensor 4 uses a fixing metal fitting 30 composed of an outer fitting member 31 and an inner fitting member 32 which can be fitted to each other. 22 and measurement window 23, respectively. The outer fitting member 31 has a tubular shape, and is detachably fixed by a flange 34 attached to the measurement system side via a flange 33, a bolt 35, and a nut 36. On the other hand, the inner fitting member 32 has a cylindrical shape having an outer diameter slightly smaller than the inner diameter of the outer fitting member 31, and is attached / detached by a flange 38 on the entrance window 22 and the measurement window 23 side through a flange 37, a bolt 35, and a nut 36. It is fixed freely.

By mounting and fixing the radiant light source 3 and the optical sensor 4 to the incident window 22 and the measurement window 23 respectively using the fixing bracket 30 configured as described above, heating without optical axis alignment is performed. The optical properties of the sample 1 in the furnace 7 can be measured. When changing the measurement angle, first pull out the outer fitting member 31 to which the radiation source 3 and the optical sensor 4 are attached from the inner fitting member 32, and then remove the inner fitting member 32 to determine the measurement angle to be measured. After being transferred to the incident window 22 and the measurement window 23, respectively, the outer fitting member 31 of the radiation light source 3 is used as the inner fitting member 32 of the incident window 22, and the outer fitting member 31 of the optical sensor 4 is used as the inner fitting member of the measurement window 23. It suffices to fit each to 32, and the optical axis will be mechanically adjusted.

FIGS. 3A and 3B show another embodiment of the fixture 30. That is, as the external fitting member 31, a tubular body 40 having at least two concave portions 39 of, for example, a circular shape is attached to the flange 33 as shown in FIG. 3 (a). Further, as the inner fitting member 32, as shown in FIG. 3 (b), a circular convex portion 41 which can be fitted into the concave portion 39 of the outer fitting member 31 is fixed to the flange 37 with a screw 42 or the like. is there.

In the above embodiment, the fixing metal fitting 30 of the present invention has been described as applied to a vertical heating furnace, but it goes without saying that it can also be applied to a horizontal heating furnace.

[0016]

[Effect of the device]

 According to the present invention, since the measurement system is detachably fixed to the observation window unit, it is not necessary to align the optical axis each time the measurement angle is changed, and it is possible to improve the efficiency of the measurement work. Is.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

3A and 3B are side sectional views showing another embodiment of the present invention.

FIG. 4 is a perspective view showing an outline of a conventional principle of measuring optical characteristics of the surface of a flat plate-shaped material.

FIG. 5 is a schematic diagram of a heating furnace for measuring optical characteristics of the surface of a flat plate-shaped material.

FIG. 6 is an explanatory diagram of a work of changing the measurement angle θ.

[Explanation of symbols]

 1 sample 2 measurement part 3 radiation light source 4 optical sensor 5a incident light 5b reflected light 7 heating furnace 8 measurement chamber 9 sample stand 10 observation window unit 22 incident window 23 measurement window 24 window material 30 fixing metal fitting 31 external fitting member 32 Internal fitting member

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Susumu Moriya 1 Kawasaki-cho, Chiba-shi, Chiba Kawasaki Steel Co., Ltd. Technical Research Division

Claims (1)

[Scope of utility model registration request] 1. A heating furnace comprising a measuring chamber having heating means, a sample stage for fixing a sample, and an observation window unit having a plurality of pairs of an entrance window and a measurement window, and the sample is incident on the sample through the entrance window. A device for measuring optical characteristics of a plate material surface, comprising: a radiant light source that emits light; and an optical sensor that measures reflected light from the sample through the measurement window, the fixing member including an outer fitting member and an inner fitting member. An apparatus for measuring optical properties of a plate surface, wherein the synchrotron radiation light source and the optical sensor are detachably fixed to the entrance window and the measurement window by using the.