JPH05314518A - Galvanomirror device - Google Patents

Abstract

PURPOSE:To suppress the angle change of a mirror at the time of position adjustment and to surely execute the position adjustment in a short period by providing a restricting part coupling to a mirror holding body. CONSTITUTION:After a galvanomirror device 21 is position-adjusted to its own optical axis, is position-adjusted to the optical axis of other optical parts. In the case of any position adjustment, a supporting part 23 is supported by a deforming part 28 and the restricting part 29 and the atitude of the member 23 to a fixed member 25 is restricted by the restricting part 29 and held constantly. After the position adjustment of the device 21 to the optical axis of other optical parts is ended, the restricting member 29 of the hinge part 24 is cut at both ends. Then the restricting part 29 is eliminated from between the holding body 23 and the fixed part 25 and the holding body 23 is supported by only the deforming part 28. Then, after the restricting part 29 is eliminated, the member 23 receives magnetic force generated according to current flows through a coil 26 and is rotated and displaced freely within the prescribed range while elastic-deforming the deforming part 28 without damaging an original function.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a galvano mirror device used in, for example, an optical information recording / reproducing device.

[0002]

2. Description of the Related Art In recent years, optical recording media such as compact discs, write-once optical discs, and rewritable magneto-optical discs, and optical information recording / reproducing for recording / reproducing information on / from these recording media. The research and development of the device is active.

Generally, in an optical recording / recording / reproducing apparatus, a focusing mechanism for keeping a distance between a medium and an objective lens of an optical head constant according to a surface wobbling of a recording medium and an information track deviation on the medium. A tracking mechanism (fine movement mechanism) that causes the light spot to follow the core and the like, and a feed mechanism (coarse movement mechanism) that moves the optical head over the entire area of the medium are required. Conventionally, for example, an actuator for driving an objective lens in two degrees of freedom is used for an optical head, and another voice coil motor is used for driving a carriage on which the optical head is mounted.

In the optical recording / reproducing apparatus, the weight of the head portion is larger than that in the magnetic recording / reproducing apparatus, so that there is a problem that the access is slow. In particular, if a magnetic circuit of a 2-DOF actuator is placed in the movable part, the weight of the movable part will increase and access will be delayed.

In order to solve this problem, only the objective lens, the actuator for the objective lens, and the start-up mirror are arranged in the movable part, and the other optical parts are arranged on the fixed side. There is an optical system. According to this optical system, the weight of the movable portion can be reduced. There is also an optical system in which the actuator mounted on the movable portion is used only for focusing and tracking is performed by a galvano mirror to further reduce the weight.

Galvano mirrors such as those mentioned above are, for example,
JP-A-1-200322 and JP-A-3-11384
No. 0 publication. These galvanomilas are shown in FIGS. 12 and 14.

Both galvano mirrors-1 and 2 are moving coil type actuators that drive the mirrors-3 and 4 by utilizing the force generated by passing an electric current through a coil in a magnetic field.
Is adopted. Mirrors 3 and 4 are mirror holders 5 and 6
, And the mirror holders 5 and 6 are supported by fixing members 7 and 8. In the example of FIG. 12, a resin hinge 9 is formed between the mirror holding body 5 and the fixing member 7, and in the example of FIG. 14, the mirror holding body 6 is a metal leaf spring.

FIG. 13 shows the resin hinge 9, and FIG. 15 shows the mirror holder 5. In the galvano mirror-1 of FIG. 12, the mirror-3 rotates around the resin hinge 9. In addition, in the galvano mirror-2 of FIG. 14, the mirror-4 rotates with the torsional deformation of the mirror holding body 6.

[0009]

By the way, each of the above-mentioned galvano mirrors 1 and 2 adopts a moving coil type actuator, and a lead wire is drawn from the movable portion. Since the lead wire has elasticity, the mirrors 5 and 6 may react depending on the lead length of the lead wire, the shape, and the like, and the position may be displaced. Therefore, even if the positions of the galvano mirrors-1 and 2 are adjusted with respect to their own optical axes, the initial angles of the mirrors-5 and 6 sometimes deviate from the original neutral position.

Even after the adjustment of the galvano mirrors-1 and 2 is completed, the mirrors-5 and 6 are always rotatable, so that the galvano-mirrors-1 and 2 and other optical parts (for example, lenses and prisms) Etc.) and the position adjustment
The angles of 5 and 6 sometimes changed. For this reason, it was difficult to adjust the positions of the Galvano mirrors-1 and 2 and other optical components.

It is an object of the present invention to provide a galvano mirror device which is less likely to change the angle of a mirror during position adjustment and can perform position adjustment reliably in a short time.

[0012]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a mirror, a mirror holding body for holding the mirror, and a mirror holding body for fixing the mirror. And a fixing member for fixing the mirror holding body to the mirror holding body by elastically changing the attitude of the mirror holding body with respect to the fixing member to change the angle of the mirror. This is to provide a restraint portion that restrains the posture of the member and releases the mirror holding body that is removed after the position adjustment.

In the present invention, the mirror holding body is restrained by the restraining portion so that the angle change of the mirror is prevented during the position adjustment. Then, the position adjustment of the galvano mirror device can be accurately performed in a short time.

[0014]

Embodiments of the present invention will be described below with reference to FIGS. The same parts as those described in the section of the conventional technique are designated by the same reference numerals, and the description thereof will be omitted.

1 to 6 show a first embodiment of the present invention, in which reference numeral 21 denotes a galvano mirror device used in, for example, an optical information recording / reproducing device. In this galvano mirror device 21, a rectangular mirror 22 is fixed to a mirror holding body (hereinafter referred to as a holding body) 23, and the holding body 23 has two hinges 24, 24 arranged near both ends thereof. It is rotatably supported by. The lower ends of the hinges 24, 24 are fixed to a fixing member 25. The holder 23, the hinges 24, 24, and the fixing member 25 may be integrally formed by injection molding of resin or the like.

On the other hand, a coil 26 is wound around and fixed to the holding body 23. Then, a magnetic field is applied by the permanent magnet 27 fixed to the fixing member 25 with the magnetization direction oriented in the direction shown in FIG.

Here, a member having a high magnetic permeability such as a yoke is not used to guide the magnetic flux from the permanent magnet 27,
A magnetic path is formed so that the flow of magnetic flux from the N pole of the permanent magnet 27 returns to the S pole through the outside of the device. Further, with respect to the coil 26 and the permanent magnet 27, the holding body 23 has the hinge 2
The coil 26 is arranged so as to always include a part of the coil 26 in the magnetic path regardless of the position of rotation around the axes 4 and 24.

The hinge 24 is shown in FIG. 4 (a). The hinge 24 is formed between the holding body 23 and the fixing member 25, and connects the holding body 23 and the fixing member 25. Further, the hinge 24 has a deforming portion 28 and a restraining portion 29.
It is composed of and.

Of these, the deforming portion 28 is located between the symmetrically formed notches 30 and 30, and the holding portion 23.
And the fixing member 25 are connected. Then, the deformation unit 28
Is thinner than the holding body 23 and the fixing member 25. The restraint portion 29 is formed in the one notch 30,
The holding body 23 and the fixing member 25 are connected.

That is, the holding member 23 and the fixing member 25 are
The deformable portion 28 and the restraint portion 29 are connected to each other, and the posture of the holding body 23 with respect to the fixing member 25 is kept constant by the deformable portion 28 and the restraint portion 29. Further, the rigidity of the deformable portion 28 is set so that the holding body 23 can be displaced according to the magnetic force generated with the energization of the coil 26.

The galvano mirror device 21 is adjusted in position with respect to its own optical axis, and then adjusted in position with respect to the optical axes of other optical components. In any position adjustment, the supporting member 23 is supported by the deforming portion 28 and the restraining portion 29, and the posture of the supporting member 23 with respect to the fixing member 25 is restrained by the restraining portion 29 and kept constant. .. Therefore, the angle of the mirror 22 is also kept constant.

After the position adjustment of the galvano mirror device 21 with respect to the optical axes of the other optical components is completed, the restraint member 29 of the hinge 24 is cut at both ends as shown in FIG. 4 (b). Then, the restraint portion 29 is removed from between the holding body 23 and the fixing portion 25, and the holding body 23 is supported only by the deforming portion 28. Therefore, after the restraint portion 29 is removed, the support member 23 receives the electromagnetic force generated by the energization of the coil 26 and is freely deformed within a predetermined range while elastically deforming the deformable portion 28 without impairing the original function. Is rotated and displaced.

Here, the rigidity of the restraint portion 29 depends on the deformation portion 28.
At the same time, it is set to such an extent that the posture of the holding body 23 can be restricted. Further, the width of the boundary between the restraint 29 and the holding body 23 and the width of the boundary between the restraint 29 and the fixing member 25 are narrowed down so as to facilitate the cutting of the restraint 29.

6 (a) and 6 (b) show an example of an optical system using the above-mentioned galvano mirror device 21. As shown in FIG. This optical system is a separation type optical system, and the right side of the broken line 31 is a fixed optical system 32 and the left side is a moving optical system 33.

As shown in FIG. 6A, the laser diode
The light emitted from the beam 34 passes through the collimator lens 35 and is reflected by the galvano mirror device 21. The reflected light is split into two by a beam splitter 36, and a part of the light is incident on a front monitor / galvano mirror angle detection photodiode (PD) 37. The remaining light is shaped prism 38
It is shaped by and is emitted to the movable part. A movable mirror 39 and an objective lens 40 are mounted on the movable part,
As shown in FIG. 6B, the surface of the medium 41 is irradiated with light.

On the other hand, the light reflected from the medium 41 again includes the objective lens 40, the rising mirror 39, and the shaping prism 3.
The beam passes through 8 and is reflected by the beam splitter 36 toward the detecting section 42. The detector 42 detects the focus error signal, the track error signal, and the magneto-optical signal, but the description of the signal detection is omitted.

That is, in the galvano mirror device 21 as described above, the hinge 24 is provided with the restraint portion 29, and the restraint portion 29 together with the deformable portion 28 holds the holder 2.
Maintains the posture of 3. Therefore, the holder 23 cannot change its posture even when the position of the galvano mirror device 21 itself is adjusted or when the position of the galvano mirror device 21 is adjusted with other optical components.

Therefore, the posture of the support member 23 can be kept constant, and the angle of the mirror 22 can be prevented from changing during the adjustment. Then, there is no variation in the initial angle of the mirror 22, and the position of the mirror 22 can be adjusted accurately.

Further, since the holder 23 does not change its angle during various position adjustments, the time required for position adjustment is shortened. Further, the restraint portion 29 is attached to the holding body 23 and the fixing member 25.
If it is integrally molded with, the structure and manufacturing method will not be so complicated. Although the restraint portion 29 is formed only in the one notch 30 in the present embodiment, for example, the restraint portion 29 is formed.
May be formed in both notches 30, 30. 7 to 1
1 shows a second embodiment of the present invention.

7 to 10, reference numeral 51 is a galvanometer mirror device. Further, reference numeral 52 is a fixing member made of a non-magnetic material, and a conductive leaf spring 53 as a mirror holding member is fixed to the fixing member 52. The leaf spring 53 is fixed by known means such as adhesion or screwing. The leaf spring 53 bridges the deforming portion 55 and the restraining portions 56 and 56 between the fixing portions 54 and 54 which are parallel to each other. The leaf spring 53 is fixed to the fixed portion 54,
54 is fixed to the fixing member 52.

The deforming portion 55 and the restraining portions 56, 56 extend at right angles to the fixing portions 54, 54 and in parallel with each other. Further, the deformable portion 55 is located between the restraint portions 56, 56. The mirror 57 is adhered to one surface of the deformed portion 55 of the leaf spring 53, and the coil 58 is fixed to the other surface by means such as adhesion.

On the other hand, a yoke member 59 is fixed to the fixing member 52, and a nonmagnetic spacer 60 is fixed to the yoke member 59. A permanent magnet 61 is fixed to the spacer 60. Further, for fixing each of the members 59 to 61, a means such as adhesion is adopted.

The leaf spring 53 is shown in FIGS. 11 (a) and 11 (b). The leaf spring 53 is made by processing a metal material such as beryllium copper into a desired shape by etching.
FIG. 11A shows a state immediately after the etching of the leaf spring 53, and the leaf spring 53 is integrally formed with restraint portions 56, 56. After the molding, the restraint portions 56, 56 are arbitrarily removed as shown in FIG. 11 (b).

The galvano mirror device 51 described above can be used in an optical system as shown in FIG. 6, for example, as in the first embodiment. Also in this galvano mirror device 51, position adjustment with respect to the optical axis of itself and position adjustment with other optical components are performed. When these positions are adjusted, the leaf springs 53 have the restraint portions 56 and 56 left, and the mirror 57 is supported by the deformable portion 55 and the restraint portions 56 and 56. Therefore, the posture of the Mira-57 is kept constant.

Here, as shown in FIGS. 11A and 11B, a rectangular mirror fixing portion 62 is provided at the center of the deforming portion 55.
The mirror 57 is fixed to one surface of the mirror fixing portion 62. The restraint portions 56, 56 are integrally connected to the mirror fixing portion 62. Here, for example, the intermediate portion of the deformable portion 55 may be separated without providing the mirror fixing portion 62, and the mirror 57 may be supported by the two leaf springs.

After various position adjustments, FIGS.
As shown in (b), the restraint portions 56, 56 are removed.
The mirror 57 is supported only by the deformable portion 55. In this state, the deformable portion 55 is allowed to be twisted originally. That is, when an electromagnetic force is generated by energizing the coil 57, the deformable portion 55 of the leaf spring 53 receives the electromagnetic force and is twisted and deformed. Then, the mirror 57 is rotated and positioned at a predetermined angle.

That is, the galvano mirror device 51 described above.
Also, since the restraint portions 56, 56 are provided as in the first embodiment, the attitude of the leaf spring 53 can be kept constant during various position adjustments, and the angle of the mirror 57 can be changed. Can be prevented. Then, there is no variation in the initial angle of the mirror 57, and the position of the mirror 57 can be adjusted accurately. The present invention can be variously modified without departing from the scope of the invention.

[0038]

As described above, the present invention is a mirror
And a mirror holder for holding this mirror, and this mirror
In a galvano-mirror device that has a fixing member to which a holding member is fixed and elastically changes the posture of the mirror holding member with respect to the fixing member to change the angle of the mirror, the mirror is connected to the mirror holding member. A restraint portion is provided for restraining the posture of the holding body with respect to the fixing member and for removing the mirror holding body which is removed after the position adjustment. Therefore, the present invention has an effect that the angle of the mirror does not easily change, and the position of the galvano mirror device can be adjusted accurately in a short time.

[Brief description of drawings]

FIG. 1 is a perspective view showing a state in which a constraining portion of a galvanometer mirror device according to a first embodiment of the present invention remains.

FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 3 is a sectional view taken along line BB in FIG.

FIG. 4A is a front view showing a state in which a restraint portion of a hinge portion remains, and FIG. 4B is a front view showing a state in which a restraint portion of a hinge portion is removed.

FIG. 5 is a perspective view showing a state in which the restraint portion of the galvano mirror device of the first embodiment of the present invention is removed.

6A and 6B are configuration diagrams showing an example of an optical system including a galvano mirror device.

FIG. 7 is a perspective view showing a state in which the restraint portion of the galvano mirror device of the second embodiment of the present invention remains.

FIG. 8 is a cross-sectional view taken along the line CC in FIG.

FIG. 9 is a sectional view taken along the line D-D in FIG. 7;

FIG. 10 is a perspective view showing a state in which the constraining portion of the galvanometer mirror device according to the second embodiment of the present invention is removed.

11A is a perspective view showing a state in which a restraint portion of a leaf spring remains, and FIG. 11B is a perspective view showing a state in which the restraint portion of a leaf spring is removed.

FIG. 12 is a perspective view showing a conventional galvanometer device.

FIG. 13 is a front view showing a hinge of a conventional galvano mirror device.

FIG. 14 is a perspective view showing a conventional galvano mirror device.

FIG. 15 is a perspective view showing a mirror holder of a conventional galvano mirror device.

[Explanation of symbols]

21, 51 ... Galvano mirror device, 22, 57 ... Mirror, 23 ... Mirror holder, 25, 52 ... Fixing member, 2
9, 56 ... Restraint portion, 53 ... Leaf spring (mirror holder).

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] March 23, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction content]

[0008] Figure 13 shows the resin hinge 9, Mi 15
The Ra carrier 6 is shown. In the Galvano mirror 1 of FIG. 12, the mirror 3 rotates around the resin hinge 9. Further, in the galvano mirror 2 of FIG. 14, the mirror 4 rotates as the mirror holder 6 is twisted and deformed.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction content]

[0009]

By the way, each of the galvano mirrors 1 and 2 described above employs a moving coil type actuator, and a lead wire is drawn out from the movable portion. Since the lead wire has elasticity, the mirrors 5 and 6 are not stressed depending on the lead length of the lead wire and the shape.
It was sometimes received and misaligned. Therefore, even if the positions of the Galvano mirrors 1 and 2 are adjusted with respect to their own optical axes, the initial angles of the mirrors 5 and 6 may deviate from the original neutral position.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0015

[Correction method] Change

[Correction content]

1 to 6 show a first embodiment of the present invention, in which reference numeral 21 denotes a galvano mirror device used in, for example, an optical recording / recording / reproducing apparatus. In this galvanometer mirror device 21, a rectangular mirror 22 is fixed to a mirror holder (hereinafter referred to as a holder) 23, and the holder 23 is rotated by two hinges 24, 24 arranged near both ends thereof. Supported as possible. The lower ends of the hinges 24, 24 are fixed to a fixing member 25. The holder 23, the hinges 24, 24, and the fixing member 25 may be integrally formed by injection molding of resin or the like.

[Procedure amendment 4]

[Document name to be amended] Statement

[Name of item to be corrected] 0027

[Correction method] Change

[Correction content]

In the galvano mirror device 21 as described above, the hinge 24 is provided with the restraint portion 29, and the restraint portion 29 holds the posture of the holder 23 together with the deformable portion 28. Therefore, the holder 23 cannot change its posture even when the position of the galvanometer mirror device 21 itself is adjusted or when the position of another galvano mirror device 21 is adjusted.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Name of item to be corrected] 0030

[Correction method] Change

[Correction content]

In FIGS. 7 to 10, reference numeral 51 is a galva.
It is a Nomira over apparatus. Further, reference numeral 52 is a fixing member made of a non-magnetic material, and a plate spring 53 as a mirror holder is fixed to the fixing member 52. The leaf spring 53 is fixed by known means such as adhesion or screwing. The leaf spring 53 has fixing portions 54, 5 which are parallel to each other.
The deformation portion 55 and the restraint portions 56, 56 are bridged between the four. Then, the leaf spring 53 fixes the fixing portions 54, 54 to the fixing member 52.

[Procedure Amendment 6]

[Document name to be amended] Statement

[Correction target item name] Figure 8

[Correction method] Change

[Correction content]

FIG. 8 is a sectional view taken along line D-D in FIG.

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] Figure 9

[Correction method] Change

[Correction content]

FIG. 9 is a sectional view taken along the line CC in FIG.

[Procedure Amendment 8]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 4

[Correction method] Change

[Correction content]

[Figure 4]

[Procedure Amendment 9]

[Document name to be corrected] Drawing

[Correction target item name] Figure 12

[Correction method] Change

[Correction content]

[Fig. 12]

[Procedure Amendment 10]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 13

[Correction method] Change

[Correction content]

[Fig. 13]

Claims (1)

[Claims] 1. A mirror and a mirror for holding the mirror.
A galvanometer mirror device having a holding body and a fixing member to which the mirror holding body is fixed, wherein the attitude of the mirror holding body with respect to the fixing member is elastically changed to change the angle of the mirror. The galvano mirror is provided with a restraining portion which is connected to the mirror holding body to restrain the posture of the mirror holding body with respect to the fixing member and which is removed after position adjustment to release the mirror holding body. -Device.