[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPH05298918A - Conductive paste composition - Google Patents

Conductive paste composition

Info

Publication number
JPH05298918A
JPH05298918A JP4129602A JP12960292A JPH05298918A JP H05298918 A JPH05298918 A JP H05298918A JP 4129602 A JP4129602 A JP 4129602A JP 12960292 A JP12960292 A JP 12960292A JP H05298918 A JPH05298918 A JP H05298918A
Authority
JP
Japan
Prior art keywords
conductive paste
piezoelectric
paste composition
glass frit
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4129602A
Other languages
Japanese (ja)
Other versions
JP2985503B2 (en
Inventor
Akira Nagai
昭 長井
Tamotsu Tokuda
有 徳田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP4129602A priority Critical patent/JP2985503B2/en
Publication of JPH05298918A publication Critical patent/JPH05298918A/en
Application granted granted Critical
Publication of JP2985503B2 publication Critical patent/JP2985503B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Parts Printed On Printed Circuit Boards (AREA)
  • Paints Or Removers (AREA)
  • Conductive Materials (AREA)

Abstract

PURPOSE:To improve the vibration resistance and the impact resistance of a piezoelectric element and improve its reliability by using a conductive paste containing an Ag powder, glass frit, and silicides or borides of Cr, Nb, Ti, and Ta containing an inorganic component in a specified wt.%. CONSTITUTION:A conductive paste containing an Ag powder, lead borosilicate type glass frit, with silicides or borides of Cr, Nb, Ti, and Ta containing 2-4wt.% inorganic component is prepared. The conductive paste is printed on both sides of Pb(Zr, Ti)O3 sintered body, fired at 750-800 deg.C for 10 minutes in air to form Ag thick film electrodes. After that, electricity at 2-5kV/mm voltage is applied to the sintered body to carry out polarization treatment and give a piezoelectric element. As a result, without deteriorating the piezoelectric property, the lectromechanical coupling coefficient, the adhesion strength, and the contact point strength of the element is improved and its reliability is remarkably improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、導電ペースト組成物
に関し、詳しくは、圧電体セラミックス上に電極などを
形成するために用いられる導電ペースト組成物に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive paste composition, and more particularly to a conductive paste composition used for forming electrodes and the like on piezoelectric ceramics.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】Pb
(Zr,Ti)O3焼結体などの圧電体セラミックス
(圧電素子)上に、その特性を損うことなく電極を形成
する方法として、例えば、蒸着法やスパッタリング法に
よりAg薄膜電極を形成する方法がある。
Prior Art and Problems to be Solved by the Invention Pb
As a method for forming an electrode on a piezoelectric ceramic (piezoelectric element) such as a (Zr, Ti) O 3 sintered body without impairing its characteristics, for example, an Ag thin film electrode is formed by a vapor deposition method or a sputtering method. There is a way.

【0003】しかし、蒸着法や、スパッタリング法など
により形成されたAg薄膜電極は、圧電体セラミックス
との密着強度(接合強度)が必ずしも十分ではなく、半
田付けなどの方法による端子加工には適していないとい
う問題点がある。
However, the Ag thin film electrode formed by the vapor deposition method or the sputtering method does not always have sufficient adhesion strength (bonding strength) with the piezoelectric ceramics and is suitable for terminal processing by a method such as soldering. There is a problem that it does not exist.

【0004】この問題点を解決する方法として、Ag粉
末とガラスフリットを混合した導電ペースト(Agペー
スト)を圧電体セラミックスに塗布、焼付けすることに
より、圧電体セラミックスとの密着強度が大きいAg厚
膜電極を形成する方法があるが、この方法の場合、ガラ
スフリットの添加量を増加して密着強度を向上させよう
とすると、Ag厚膜電極による圧電体セラミックス(圧
電素子)に対する振動抑制力が働き、圧電特性の低下を
招くという問題点があり、圧電特性と密着強度とのバラ
ンスをとることが必要であるとされている。
As a method for solving this problem, a conductive paste (Ag paste), which is a mixture of Ag powder and glass frit, is applied to piezoelectric ceramics and baked to form a Ag thick film having a high adhesion strength with the piezoelectric ceramics. Although there is a method of forming electrodes, in this method, when the amount of glass frit added is increased to improve the adhesion strength, the vibration suppressing force on the piezoelectric ceramics (piezoelectric element) by the Ag thick film electrode works. However, there is a problem that the piezoelectric characteristics are deteriorated, and it is said that it is necessary to balance the piezoelectric characteristics and the adhesion strength.

【0005】しかし、圧電特性と密着強度とのバランス
を考慮したとしても、Ag厚膜電極の硬度が必ずしも十
分ではないため、例えば、圧電素子をスプリング端子で
固定するような構造の電子部品(圧電部品)の場合、A
g厚膜電極の表面と端子の接点で凝着摩耗が起りやす
く、Ag厚膜電極の接点部に穴があいて接続不良を起こ
すという問題点がある。
However, even if the balance between the piezoelectric characteristics and the adhesion strength is taken into consideration, the hardness of the Ag thick film electrode is not always sufficient, so that, for example, an electronic component (piezoelectric element having a structure in which a piezoelectric element is fixed by a spring terminal) is used. In case of parts), A
Adhesive wear is likely to occur at the surface of the g thick film electrode and the contact point of the terminal, and there is a problem in that there is a hole at the contact part of the Ag thick film electrode and connection failure occurs.

【0006】この発明は、上記問題点を解決するもので
あり、圧電体セラミックス(圧電素子)の特性(圧電特
性)を損わず、圧電体セラミックスへの密着強度に優れ
ているとともに、端子との接点強度の大きい厚膜電極を
形成することが可能な導電ペースト組成物を提供するこ
とを目的とする。
The present invention solves the above-mentioned problems, and does not impair the characteristics (piezoelectric characteristics) of the piezoelectric ceramics (piezoelectric element), is excellent in the adhesion strength to the piezoelectric ceramics, and can be used as terminals. An object of the present invention is to provide a conductive paste composition capable of forming a thick film electrode having a high contact strength.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、発明者等は種々の実験、検討を行い、Ag粉末と、
ガラスフリットと、Cr,Nb,Ti及びTaのケイ化
物またはホウ化物を含有する導電ペースト組成物を用い
て電極を形成することにより、圧電特性を損わず、圧電
体セラミックスへの密着強度に優れているとともに、端
子との接点強度の大きい電極を形成することが可能であ
ることを知り、さらに実験、検討を重ねてこの発明を完
成した。
[Means for Solving the Problems] In order to achieve the above object, the inventors have conducted various experiments and studies, and
By forming an electrode using a glass frit and a conductive paste composition containing a silicide or boride of Cr, Nb, Ti and Ta, piezoelectric characteristics are not impaired and excellent adhesion strength to piezoelectric ceramics is achieved. In addition, it was found that it is possible to form an electrode having a high contact strength with the terminal, and further experiments and studies were conducted to complete the present invention.

【0008】すなわち、この発明の導電ペースト組成物
は、圧電体セラミックス上に電極などを形成するために
用いられる導電ペースト組成物であって、Ag粉末と、
ガラスフリットと、無機成分の2〜4重量%を占めるC
r,Nb,Ti及びTaのケイ化物またはホウ化物の少
なくとも一種を含有することを特徴としている。
That is, the conductive paste composition of the present invention is a conductive paste composition used for forming electrodes and the like on piezoelectric ceramics, and comprises Ag powder and
Glass frit and C, which accounts for 2 to 4% by weight of the inorganic component
It is characterized by containing at least one of silicides or borides of r, Nb, Ti and Ta.

【0009】この発明の導電ペースト組成物において
は、ケイ化物、ホウ化物を構成するケイ素(Si)及び
ホウ素(B)の一部が圧電体セラミックスの構成成分
(例えば、チタン酸ジルコン酸鉛(Pb(Zr,Ti)
3)と反応して、ガラスとは異なる中間物を形成する
ことにより、電気的特性(圧電特性)を損うことなく密
着強度を向上させることが可能になるとともに、Cr,
Nb,Ti及びTaがAg層中に残留することにより、
形成される厚膜電極の硬度を向上させ、端子との凝着摩
耗を防止して接点強度を向上させることが可能になる。
In the conductive paste composition of the present invention, a part of silicon (Si) and boron (B) constituting the silicide or boride is a constituent component of the piezoelectric ceramic (for example, lead zirconate titanate (Pb). (Zr, Ti)
By reacting with O 3 ) to form an intermediate different from glass, it becomes possible to improve the adhesion strength without deteriorating the electrical characteristics (piezoelectric characteristics),
Since Nb, Ti and Ta remain in the Ag layer,
It is possible to improve the hardness of the formed thick film electrode, prevent the adhesive wear with the terminal, and improve the contact strength.

【0010】なお、Cr,Nb,Ti及びTaのケイ化
物またはホウ化物の含有量は、その含有量が無機成分の
2重量%未満の場合、密着強度を向上させる効果が不十
分になり、また、4重量%を越えて添加しても添加効果
に著しい改善が認められないことから、無機成分の2〜
4重量%の範囲が好ましい。
When the content of the silicide or boride of Cr, Nb, Ti and Ta is less than 2% by weight of the inorganic component, the effect of improving the adhesion strength becomes insufficient, and If the addition amount exceeds 4% by weight, no significant improvement in the addition effect is observed.
A range of 4% by weight is preferred.

【0011】[0011]

【実施例】以下、この発明の実施例を比較例とともに示
してその特徴をさらに詳しく説明する。
EXAMPLES Hereinafter, examples of the present invention will be shown together with comparative examples to further explain the features thereof.

【0012】Ag粉末100重量部、ホウケイ酸鉛系の
ガラスフリット4重量部、エチルセルロースをブチルカ
ルビトール及びα−テレピネオールで溶解した有機ビヒ
クル45重量部を配合するとともに、この配合原料に対
して、表1に示す含有率になるように、CrSi2,C
rB,NbSi2,NbB,TiSi2,TiB,TaS
2,及びTaBの粉末を添加して、試料番号1〜19
の各導電ペーストを調製した。なお、試料番号20,2
1は、添加成分として、ZrB2、WSi2を用いてい
る。
100 parts by weight of Ag powder, 4 parts by weight of lead borosilicate type glass frit, and 45 parts by weight of an organic vehicle in which ethyl cellulose was dissolved in butyl carbitol and α-terpineol were added. CrSi 2 , C so that the content ratio shown in FIG.
rB, NbSi 2 , NbB, TiSi 2 , TiB, TaS
i 2 and TaB powder were added, and sample numbers 1 to 19 were added.
Each conductive paste was prepared. Sample numbers 20 and 2
No. 1 uses ZrB 2 and WSi 2 as additive components.

【0013】この導電ペーストを、圧電体セラミックス
(Pb(Zr,Ti)O3焼結体)の両主面に印刷し、
大気中で、750〜850℃の温度条件下に10分間焼
成してAg厚膜電極を形成した後、焼結体に2〜5kV/
mmの電圧を印加して分極処理を施した。
This conductive paste is printed on both main surfaces of piezoelectric ceramics (Pb (Zr, Ti) O 3 sintered body),
In the atmosphere, the Ag thick film electrode is formed by firing at a temperature of 750 to 850 ° C. for 10 minutes, and then the sintered body is heated to 2 to 5 kV /
A polarization process was performed by applying a voltage of mm.

【0014】それから、上記のようにして作成した試料
(圧電素子)について、電気機械結合係数、密着強度、
接点強度などの特性を調べた。その結果を表1に示す。
Then, for the sample (piezoelectric element) prepared as described above, the electromechanical coupling coefficient, the adhesion strength,
The characteristics such as contact strength were investigated. The results are shown in Table 1.

【0015】[0015]

【表1】 [Table 1]

【0016】なお、表1において、試料番号に*印を付
したものは、この発明の範囲外の比較例を示しており、
その他は、この発明の範囲内の実施例を示している。
In Table 1, the sample numbers marked with * indicate comparative examples outside the scope of the present invention.
Others indicate embodiments within the scope of the present invention.

【0017】表1において、「電気機械結合係数」は、
各試料の特性レベルを比較するために、正方形板の各試
料の拡がり振動のインピーダンス周波数をインピーダン
スアナライザを用いて測定し、その共振応答から電気機
械結合係数を算出したものである。
In Table 1, "electromechanical coupling coefficient" is
In order to compare the characteristic level of each sample, the impedance frequency of the spreading vibration of each sample of the square plate was measured using an impedance analyzer, and the electromechanical coupling coefficient was calculated from its resonance response.

【0018】また、「密着強度」は、平面寸法が3mm×
3mmになるようにカットした試料(チップ)の両主面側
の電極上に直径0.8mmの半田引軟銅線を半田付けし、
これを電極表面に垂直に引張ることにより測定した値
(垂直引張強度)である。
The "adhesion strength" has a plane dimension of 3 mm ×
Solder a 0.8mm diameter soldered annealed copper wire on the electrodes on both major surfaces of the sample (chip) cut to 3mm,
It is a value (vertical tensile strength) measured by pulling this perpendicularly to the electrode surface.

【0019】さらに、表1の「接点強度」は、Agメッ
キした金属ボールを電極表面に1.0kgの荷重で押圧し
て複数回摺動させ、凝着摩耗などによる電極表面の傷の
発生状態を観察、比較し、損傷が殆ど認められなかった
ものを(○)、損傷が認められたものを(△)、明らか
に損傷が認められたものを(×)と相対的に評価したも
のである。
Further, the "contact strength" in Table 1 is the state in which a metal ball plated with Ag is pressed against the electrode surface with a load of 1.0 kg and slid a plurality of times to cause scratches on the electrode surface due to adhesive wear and the like. The results were evaluated by observing and comparing, and those with almost no damage were evaluated (○), those with damage were evaluated (△), and those with obvious damage were evaluated with (×). is there.

【0020】表1に示すように、この発明の範囲外の導
電ペースト(組成物)を用いた場合、電気機械結合係数
が小さいか、あるいは、密着強度、接点強度が不十分で
あり、総合的に見て好ましい特性を有する電極を形成す
ることができないのに対して、この発明の実施例の導電
性ペースト(組成物)を用いた場合には、電気機械結合
係数、密着強度及び接点強度のそれぞれについて好まし
い特性を有する電極を形成することができた。
As shown in Table 1, when a conductive paste (composition) outside the scope of the present invention is used, the electromechanical coupling coefficient is low, or the adhesion strength and contact strength are insufficient. However, when the conductive paste (composition) of the embodiment of the present invention is used, the electromechanical coupling coefficient, the adhesion strength and the contact strength can be reduced. It was possible to form electrodes with favorable properties for each.

【0021】なお、上記実施例では、Cr,Nb,T
i,Taのケイ化物またはホウ化物を単独で添加した場
合について説明しているが、これらのうちの2種以上の
混合物をこの発明の範囲で添加した場合にも、上記実施
例と同様の効果が得られることが確認されている。
In the above embodiment, Cr, Nb, T
Although the case where a silicide or boride of i or Ta is added alone has been described, the same effect as in the above embodiment can be obtained when a mixture of two or more of these is added within the scope of the present invention. It has been confirmed that

【0022】また、上記実施例では、圧電体セラミック
スとしてPb(Zr,Ti)O3焼結体を用いた場合に
ついて説明したが、この発明の導電ペースト組成物は、
Pb(Zr,Ti)O3の一部を他の元素で置換した
り、あるいは他の成分を添加したりしたPb(Zr,T
i)O3系の圧電体セラミックスや、さらには、Pb
(Zr,Ti)O3以外の他の種類の圧電体セラミック
スからなる素子上に電極を形成する場合にも用いること
が可能であり、その場合にも良好な特性を有する電極を
形成することができる。
In the above embodiment, the case where the Pb (Zr, Ti) O 3 sintered body is used as the piezoelectric ceramics has been described, but the conductive paste composition of the present invention is
Pb (Zr, T) obtained by substituting a part of Pb (Zr, Ti) O 3 with another element or adding another component.
i) O 3 -based piezoelectric ceramics and Pb
It can be used also when forming an electrode on an element made of a piezoelectric ceramic other than (Zr, Ti) O 3 , and in that case, an electrode having good characteristics can be formed. it can.

【0023】なお、上記実施例では、圧電体セラミック
ス上に電極を形成する場合について説明したが、この発
明の導電ペースト組成物は、電極に限らず、圧電体セラ
ミックス上に配線などの導体パターンを形成する場合に
も有効に使用することが可能である。
In the above embodiments, the case where the electrodes are formed on the piezoelectric ceramics has been described, but the conductive paste composition of the present invention is not limited to the electrodes, and a conductor pattern such as wiring may be formed on the piezoelectric ceramics. It can be effectively used even when formed.

【0024】[0024]

【発明の効果】上述のように、この発明の導電ペースト
組成物は、Ag粉末と、ガラスフリットと、無機成分の
2〜4重量%を占めるCr、Nb、Ti及びTaのケイ
化物またはホウ化物の少なくとも一種を含有させるよう
にしているので、圧電体セラミックス(圧電素子)の特
性(圧電特性)を損うことなしに、圧電体セラミックス
への密着強度及び端子との接点強度を向上させることが
できる。
As described above, the conductive paste composition of the present invention comprises Ag powder, glass frit, and a silicide or boride of Cr, Nb, Ti and Ta, which accounts for 2 to 4% by weight of the inorganic components. Since at least one of the above is contained, it is possible to improve the adhesion strength to the piezoelectric ceramics and the contact strength with the terminals without impairing the characteristics (piezoelectric characteristics) of the piezoelectric ceramics (piezoelectric element). it can.

【0025】その結果、圧電部品の耐振性、耐衝撃性を
向上させて、信頼性を大幅に向上させることが可能にな
る。したがって、この発明は、自動車搭載用の機器など
のように高い信頼性が要求される機器に使用される圧電
部品の電極を形成する場合に特に有意義である。
As a result, it is possible to improve the vibration resistance and shock resistance of the piezoelectric component and to greatly improve the reliability. Therefore, the present invention is particularly significant in the case of forming an electrode of a piezoelectric component used in a device requiring high reliability such as a device mounted on a vehicle.

【0026】また、接点強度を向上させることができる
ため、圧電素子をスプリング端子などの端子により保持
する場合に、接点面積を縮小することが可能になり、波
形不良の発生を防止して、共振特性を向上させることが
できる。
Further, since the contact strength can be improved, when the piezoelectric element is held by a terminal such as a spring terminal, the contact area can be reduced, the occurrence of waveform defects can be prevented, and resonance can be prevented. The characteristics can be improved.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧電体セラミックス上に電極などを形成
するために用いられる導電ペースト組成物であって、A
g粉末と、ガラスフリットと、無機成分の2〜4重量%
を占めるCr,Nb,Ti及びTaのケイ化物またはホ
ウ化物の少なくとも一種を含有することを特徴とする導
電ペースト組成物。
1. A conductive paste composition used for forming electrodes and the like on piezoelectric ceramics, comprising:
g powder, glass frit, 2 to 4% by weight of inorganic components
A conductive paste composition containing at least one of a silicide or a boride of Cr, Nb, Ti, and Ta that occupy the above.
JP4129602A 1992-04-22 1992-04-22 Conductive paste composition Expired - Lifetime JP2985503B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4129602A JP2985503B2 (en) 1992-04-22 1992-04-22 Conductive paste composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4129602A JP2985503B2 (en) 1992-04-22 1992-04-22 Conductive paste composition

Publications (2)

Publication Number Publication Date
JPH05298918A true JPH05298918A (en) 1993-11-12
JP2985503B2 JP2985503B2 (en) 1999-12-06

Family

ID=15013520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4129602A Expired - Lifetime JP2985503B2 (en) 1992-04-22 1992-04-22 Conductive paste composition

Country Status (1)

Country Link
JP (1) JP2985503B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006278579A (en) * 2005-03-28 2006-10-12 Fuji Xerox Co Ltd Piezoelectric element, droplet discharge head and droplet discharge device
JP2014192186A (en) * 2013-03-26 2014-10-06 Ngk Insulators Ltd Piezoelectric/electrostrictive element and wiring board
WO2016114118A1 (en) * 2015-01-13 2016-07-21 日本特殊陶業株式会社 Circuit board and production method therefor
JP2016193401A (en) * 2015-03-31 2016-11-17 日本碍子株式会社 Honeycomb structure and method for manufacturing the same
CN113161037A (en) * 2021-04-28 2021-07-23 佛山市顺德区百锐新电子材料有限公司 Acid-resistant atomizer silver paste and preparation method thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2978301B1 (en) 2011-07-18 2013-08-02 Renault Sa METHOD FOR ASSEMBLING AN ULTRASONIC TRANSDUCER AND TRANSDUCER OBTAINED BY THE METHOD
US10784383B2 (en) 2015-08-07 2020-09-22 E I Du Pont De Nemours And Company Conductive paste composition and semiconductor devices made therewith

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006278579A (en) * 2005-03-28 2006-10-12 Fuji Xerox Co Ltd Piezoelectric element, droplet discharge head and droplet discharge device
US9455396B2 (en) 2013-03-26 2016-09-27 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and wiring substrate
JP2014192186A (en) * 2013-03-26 2014-10-06 Ngk Insulators Ltd Piezoelectric/electrostrictive element and wiring board
JPWO2016114121A1 (en) * 2015-01-13 2017-04-27 日本特殊陶業株式会社 Method for manufacturing ceramic substrate, ceramic substrate and silver-based conductor material
WO2016114121A1 (en) * 2015-01-13 2016-07-21 日本特殊陶業株式会社 Method for manufacturing ceramic substrate, ceramic substrate, and silver-based conductor material
WO2016114120A1 (en) * 2015-01-13 2016-07-21 日本特殊陶業株式会社 Ceramic substrate
JPWO2016114119A1 (en) * 2015-01-13 2017-04-27 日本特殊陶業株式会社 Ceramic substrate and manufacturing method thereof
WO2016114118A1 (en) * 2015-01-13 2016-07-21 日本特殊陶業株式会社 Circuit board and production method therefor
JPWO2016114118A1 (en) * 2015-01-13 2017-04-27 日本特殊陶業株式会社 Circuit board and manufacturing method thereof
CN107211535A (en) * 2015-01-13 2017-09-26 日本特殊陶业株式会社 Circuit substrate and its manufacture method
US10375837B2 (en) 2015-01-13 2019-08-06 Ngk Spark Plug Co., Ltd. Method of manufacturing a ceramic substrate
CN107211535B (en) * 2015-01-13 2019-08-16 日本特殊陶业株式会社 Circuit substrate and its manufacturing method
US10524365B2 (en) 2015-01-13 2019-12-31 Ngk Spark Plug Co., Ltd. Ceramic substrate
US10785879B2 (en) 2015-01-13 2020-09-22 Ngk Spark Plug Co., Ltd. Circuit board and production method therefor
JP2016193401A (en) * 2015-03-31 2016-11-17 日本碍子株式会社 Honeycomb structure and method for manufacturing the same
CN113161037A (en) * 2021-04-28 2021-07-23 佛山市顺德区百锐新电子材料有限公司 Acid-resistant atomizer silver paste and preparation method thereof

Also Published As

Publication number Publication date
JP2985503B2 (en) 1999-12-06

Similar Documents

Publication Publication Date Title
US7339781B2 (en) Electronic component and electronic device
JP2001035739A (en) Laminated ceramic electronic component and manufacture of the same
US6370015B2 (en) Laminated ceramic electronic device
JPWO2015045625A1 (en) Multilayer ceramic electronic components
JPH06349314A (en) Conductive paste
JPH06318403A (en) Copper paste for forming conductive coating film
JPH05298918A (en) Conductive paste composition
JP3152065B2 (en) Conductive paste and multilayer ceramic capacitors
JPH097878A (en) Ceramic electronic part and manufacture thereof
JPS6253031B2 (en)
JPH0950708A (en) Conductive paste and layered ceramic electronic components
JP3324253B2 (en) Conductive paste for forming terminal electrodes of electronic components
JP3493665B2 (en) Conductive paste
JP2550630B2 (en) Copper paste for conductive film formation
JP3003405B2 (en) Conductive paste and method for forming electrodes of ceramic electronic component using the same
JPH0917232A (en) Conductor paste composition
JP2968316B2 (en) Multilayer ceramic capacitors
CN114284665B (en) High-power microwave load sheet and preparation method thereof
JP2813447B2 (en) Conductor paste for aluminum nitride sintered substrate
JP4815828B2 (en) Conductive paste, electronic component, and electronic device
JP4359267B2 (en) Conductor paste, multilayer chip varistor and manufacturing method thereof
JPH0864464A (en) Manufacture of chip type ceramic electronic component
JP2760035B2 (en) Thick film circuit board
JP2892220B2 (en) Manufacturing method of ceramic wiring board
JPH07335471A (en) Conductive paste for external electrode of electronic component and formation of external electrode using this paste

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19990831

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071001

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081001

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091001

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101001

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101001

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111001

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121001

Year of fee payment: 13

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121001

Year of fee payment: 13