JPH0524516Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to the structure of a thermocompression bonding device that can perform lamination processing by thermocompression bonding.

[Problems to be solved by conventional techniques and ideas]

Conventionally, as this type of thermocompression bonding apparatus, there are a hot roller type laminator shown in FIG. 5 and a hot platen type laminator shown in FIG. 6. In the heat roller type laminator, the laminate materials W ₁ and W ₂ are bonded together by heating and pressurizing the object W to be laminated by upper and lower heat rollers 11 and 12 each having a built-in heater. However, the object W to be laminated is heated by the heat rollers 11 and 12.
There is a problem in that air bubbles are generated at the joint between the laminate materials W ₁ and W 2 because the inside of the laminate materials W 1 and W ₂ are not vented during the passage between the materials. (For example, in an EL element, an ITO transparent electrode film is provided on the upper surface and an A electrode is provided on the lower surface.), the laminate materials W ₁ and W ₂ may be misaligned or curled, as shown in FIG. There was an inconvenience that the laminate W after the lamination process was warped. On the other hand, in a hot platen type laminator (Fig. 6), the workpiece W to be laminated is placed between the upper and lower hotplates 13 and 14 via a seal rubber 15, and the workpiece W is once sealed by an exhaust passage 16. While the chamber 17 defined by the seal rubber 15 is evacuated, the upper and lower heating plates 13 and 14 with the heaters 18 and 19 turned on are overlapped, thereby heating and pressurizing the object W to be laminated.
However, in the case of such a hot plate type laminator, when exhausting through the exhaust passage 16, the seal rubber 15 is deformed by the exhaust and atmospheric pressure, and the exhaust passage 16 is deformed.
The opening 16a of the room 17 is closed.
In addition, due to the structure, the parallelism between the upper and lower heating plates 13 and 14 significantly affected the crimp accuracy of the object W to be laminated. Further, thermal bonding cannot be performed during exhaustion through the exhaust passage 16, and during this time the temperature of the lower heating plate 14 must be kept below the bonding temperature of the laminate materials W ₁ and W ₂ by the heater 19. The temperature required for bonding after exhaust is secured by the heater 18 on the upper heating plate 13 side, but since the heating by the upper heating plate 13 is performed via the seal rubber 15, the heating start-up speed is slow, which reduces productivity. This was a problem.

In view of the above-mentioned circumstances, the present invention aims to provide a thermocompression bonding apparatus of this type that can improve product quality and production efficiency.

[Means and actions for solving problems]

In the thermocompression bonding apparatus according to the present invention, the objects to be laminated are placed between the upper and lower heating plates and the objects are bonded together by thermocompression. An elastic sheet on which the object to be laminated can be placed is laid on the upper surface of the lower heating platen in which the heating fluid passage is opened. The elastic sheet is adsorbed and fixed in advance, and then the upper and lower heating plates are brought together, and while exhaust is being exhausted between the upper and lower heating plates through the exhaust passage, the material to be laminated is laminated by the elastic sheet using fluid pressure from the pressurized fluid passage. The laminate material is bonded by pressing the material into the concave portion of the upper heating plate and further heating the object to be laminated by the upper and lower heating plates. In this case, the object to be laminated is uniformly pressed by the elastic sheet and directly pressed against the upper heating plate, so that the object to be laminated is uniformly heated and pressurized regardless of the accuracy of the parallelism etc. of the upper and lower heating plates. is carried out to ensure proper adhesion of the laminate material,
Generation of air bubbles and warping of the object to be laminated are reliably prevented.

〔Example〕

An embodiment of the thermocompression bonding apparatus according to the present invention will be described below with reference to FIGS. 1 to 4. FIG. 1 shows a state in which a workpiece to be laminated W is set in the device of the present invention to be laminated. , 2 is a heater installed in the lower heating plate 1, and 3 is a pressurized fluid passage having an opening 3a formed at a suitable position on the upper end surface of the lower heating plate 1 and communicating with a pressurized fluid source (not shown). , 4 is an elastic sheet made of a material such as rubber having heat resistance and flexibility, and having an area larger than at least the area of the upper end surface of the lower heating plate 1 and laid on the lower heating plate 1; 5 is lower heating plate 1
The upper heating plate 6 is attached to the apparatus frame so as to be able to move up and down in alignment with the temperature, and the inner area of the lower end surface of the upper heating plate 5 is formed into a concave shape, so that at least the thickness Tw of the object W to be laminated and A recess having a depth D greater than the sum of the thicknesses T _{and 4} of the elastic sheet 4, 7 a heater installed in the upper heating plate 5, 8 a heater that is once opened into the recess 6, and the other end a vacuum source (not shown). ) is an exhaust passage that communicates with the In the above case, the heater 2 and the heater 7 are connected to a control circuit (not shown), and the heater 2 and the heater 7 are connected to a control circuit (not shown).
is turned on so that the set temperature is the preheating temperature for the object W to be laminated, and the heater 7 is turned on.
At least the object to be laminated W as the set temperature
The temperatures of the laminate materials W ₁ and W ₂ (hereinafter referred to as bonding temperature (>preheating temperature)) are controlled to be higher than the melting point of the laminate materials W 1 and W 2 . It is configured such that pressurized fluid such as air is inflow and outflow or connection with a vacuum source is performed in accordance with a predetermined sequence through control valves and the like that are not connected to each other. An EL (Electro Luminescence) element or the like may be selected as the object W to be laminated, but in this case, the laminate materials W ₁ and W ₂ made of synthetic resin or the like come into contact with each other along the outer periphery of the object W to be laminated. A lamination process is performed on the object W to be laminated.

Since the thermocompression bonding device according to the present invention is constructed as described above, its operation will first be explained. The object W to be laminated shown in FIG. 1 is placed on the elastic sheet 4, and the With the elastic sheet 4 set at a predetermined position between 1 and 5, negative pressure is applied to the inside of the pressurized fluid passage 3 to attract the elastic sheet 4 through the opening 3a, thereby fixing the elastic sheet 4 to the lower heating plate 1. It is done. This allows heaters 2 and 7 to
When the temperature is set to the set temperature by turning on the temperature and then lowering the upper heating plate 5, the recess 6 is kept airtight from the outside of the upper and lower heating plates 1 and 5, as shown in FIG. At this time, since an appropriate gap is defined between the upper surface of the laminate material W ₁ and the inner wall surface of the recess 6, the object W to be laminated is prevented from being deformed due to contact with the upper heating plate 5. Next, connect the exhaust passage 8 to a vacuum source and
By creating a vacuum inside the object W to be laminated
Fluid such as high pressure air is allowed to flow into the pressurized fluid passage 3 while sufficiently deaerating the air. As a result, the elastic sheet 4 presses the object W to be laminated against the inner wall surface of the recess ₆ as shown in _FIG . Since it is heated almost directly by the heater 7 and has already been preheated by the heater 2, the laminate material can be heated in a short time.
W ₁ and W ₂ are bonded to each other. Thereafter, when the pressurized fluid introduced into the recess 6 via the pressurized fluid passage 3 is exhausted and the exhaust passage 8 is disconnected from the vacuum source, the elastic sheet 4 is separated from the inner wall surface of the recess 6. The material to be laminated is placed on the lower heating plate 1 again, and the upper heating plate 5 is further raised, so that the laminated object W subjected to thermocompression bonding is placed on the elastic sheet 4 as shown in FIG. Complete. The elastic sheet 4 can be easily removed from between the upper and lower heating plates 1 and 5 by blowing out relatively low pressure air from the opening 3a of the pressurized fluid passage 3 to make the elastic sheet 4 float above the lower heating plate 1. can be done.

In this way, the object to be laminated W placed on the elastic sheet 4 (see Fig. 2) is pressed against the inner wall surface of the recess 6 in that state, so that the laminate materials W ₁ and W ₂ are misaligned. First, since the pressing force is uniform over the entire surface of the object W to be laminated, uniform thermocompression bonding is achieved, and warping of the object W after the lamination process is reliably prevented. The vacuum treatment performed through the exhaust passage 8 during thermocompression bonding prevents the generation of air bubbles in the object W to be laminated, and therefore no defective bonding due to the air bubbles or the like occurs. These effects are based on the fact that the object W to be laminated is pressurized by fluid pressure through the relatively thin elastic sheet 4, but in addition, the elastic sheet 4 improves the precision of the device, especially This eliminates the influence of parallelism between the upper and lower heating plates 1 and 5, which is extremely convenient for manufacturing this type of device. Furthermore, the elastic sheet 4 can apply uniform pressure to the object W to be laminated regardless of its shape due to its elasticity and flexibility, making it possible to expand the applicable range of the device. Since the structure is simple, it is easy to handle, and can also be used as a carrier for the object W to be laminated, thereby improving workability and productivity.
On the other hand, since the heaters 2 and 7, especially the heater 7, directly heats the object W to be laminated via the upper heating plate 5, it brings about effects such as shortening the heating time and preventing loss of heating energy.

In addition, the same effect can be obtained for the lamination process in which organic EL elements or various cards, etc. are used as the workpieces W to be laminated in the above embodiments,
Furthermore, the present device can be effectively applied to the lamination process of printed circuit boards and the bonding process of liquid crystal cells.

[Effect of idea]

As mentioned above, the thermocompression bonding apparatus of the present invention has the advantage that it can be applied to lamination processing to obtain products of excellent quality without deformation or bubbles, and can also improve productivity. .

[Brief explanation of the drawing]

Fig. 1 is a sectional view of the main part of an embodiment of the present device showing a state in which a workpiece is set between the upper and lower heating plates, and Fig. 2 is a sectional view of the main part in a state where the upper and lower heating plates are combined. Fig. 3 is a cross-sectional view of the main part showing the pressurizing action of the elastic sheet according to the present invention on the workpiece, Fig. 4 is a cross-sectional view of the main part showing the state in which the lamination process is completed by the device of the present invention, and Fig. 5 is the conventional one. FIG. 6 is a side view of a heated roller type laminator, and FIG. 6 is a sectional view of a main part of a conventional heated platen type laminator. 1... Lower heating plate, 2, 7... Heater, 3... Pressurized fluid passage, 4... Elastic sheet, 5... Upper heating plate, 6
...Recessed portion, 8...Exhaust passage, W...Object to be laminated, _W1 , _W2 ...Laminated material.

Claims (1)

[Scope of utility model registration request] In a thermocompression bonding apparatus configured to interpose a workpiece between upper and lower heating plates and bond the workpiece by thermocompression, there is provided a recess in the upper heating plate that communicates with an exhaust passage and has a depth at least equal to or greater than the thickness of the workpiece. Along with forming the
A thermocompression bonding device characterized in that an elastic sheet on which the workpiece can be placed is laid on the upper surface of a lower heating platen in which a pressure passage is opened.