JPH05238844A - Porous ceramic material and its production - Google Patents
Porous ceramic material and its productionInfo
- Publication number
- JPH05238844A JPH05238844A JP4162492A JP4162492A JPH05238844A JP H05238844 A JPH05238844 A JP H05238844A JP 4162492 A JP4162492 A JP 4162492A JP 4162492 A JP4162492 A JP 4162492A JP H05238844 A JPH05238844 A JP H05238844A
- Authority
- JP
- Japan
- Prior art keywords
- porous ceramic
- dense
- porous
- ceramic body
- porosity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
- C04B38/0058—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity open porosity
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00241—Physical properties of the materials not provided for elsewhere in C04B2111/00
- C04B2111/00344—Materials with friction-reduced moving parts, e.g. ceramics lubricated by impregnation with carbon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、真空吸着装置等に利用
する多孔質セラミック体およびその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a porous ceramic body used in a vacuum adsorption device or the like and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】従来より、真空吸着装置の吸着面、エア
ースライドやエアーベアリングの軸受面、ハニカム構造
体、各種フィルタなどのさまざまな分野において、多孔
質セラミック体が用いられている。2. Description of the Related Art Conventionally, porous ceramic bodies have been used in various fields such as suction surfaces of vacuum suction devices, bearing surfaces of air slides and air bearings, honeycomb structures, and various filters.
【０００３】例えば、真空吸着装置としては、図６に示
すように多孔質セラミックスの板状体２１を緻密質セラ
ミックスの枠体２２にガラスなどで接合し、真空吸引す
ることによって上記多孔質セラミックスの板状体２１上
にシリコンウェハ等の被吸着物２３を固定するようにな
っている（特開昭６３−１６９２４３号、実公昭５９−
３４１４３号公報等参照）。For example, as a vacuum adsorption device, as shown in FIG. 6, a porous ceramic plate 21 is joined to a dense ceramic frame 22 with glass or the like, and vacuum suction is performed to form the porous ceramic. An object to be adsorbed 23 such as a silicon wafer is fixed on the plate-like body 21 (Japanese Patent Laid-Open No. 63-169243, Japanese Utility Model Publication 59-59).
34143 gazette etc.).
【０００４】このような用途に用いる多孔質セラミック
スは、所定の気孔率、気孔径を有し、しかも各気孔が互
いに連通している必要がある。例えばボーキサイトを電
気炉で溶融し結晶化させ粉砕、精製、整粒した電融アル
ミナをガラス融着することによって、各電融アルミナ粒
子の隙間を連通気孔としたものが用いられており、この
多孔質セラミックスは、電融アルミナの粒径を調整する
ことによって隙間の気孔の大きさを変化させられるもの
であった。The porous ceramics used for such an application must have a predetermined porosity and pore diameter, and the respective pores must be in communication with each other. For example, bauxite is melted in an electric furnace to be crystallized, pulverized, refined, and fused to obtain fused glass, and fused glass particles are used to form interstitial pores between the fused alumina particles. The fine ceramics can change the size of pores in the gaps by adjusting the particle size of the fused alumina.
【０００５】その他の多孔質セラミックスとしては、セ
ラミック原料中に繊維状の樹脂などを混合した状態で成
形し、焼成することによって上記繊維状の樹脂などを焼
失させて気孔を形成したもの、あるいはセラミックスの
成形や焼成の条件を調整して不完全焼結状態にし、多孔
質体としたものなども用いられている。As other porous ceramics, a ceramic raw material mixed with fibrous resin and the like is molded and fired to burn out the fibrous resin to form pores, or ceramics. A porous material is also used by adjusting the molding and firing conditions to obtain an incompletely sintered state.
【０００６】[0006]
【従来技術の課題】ところが、上記の如き従来の電融ア
ルミナをガラス融着した多孔質セラミックスでは、電融
アルミナの粒子が脱落しやすく、表面を滑らかな面とす
ることができないという問題点があった。また、この多
孔質セラミックスは、気孔率を低くすることができず、
強度が低いという問題点もあった。However, in the conventional porous ceramics obtained by glass-fusing fused alumina as described above, there is a problem that the fused alumina particles easily fall off and the surface cannot be made smooth. there were. In addition, this porous ceramics cannot reduce the porosity,
There was also the problem of low strength.
【０００７】そのため、この電融アルミナからなる多孔
質セラミックスを真空吸着装置に用いると、被吸着物で
あるシリコンウェハに傷を付けやすいという不都合があ
った。また、図６に示すように真空吸着装置として用い
る場合は、多孔質セラミックスの板状体２１を緻密質セ
ラミックスの枠体２２に接合し、両者の表面を同時に研
摩することが行われるが、その際に多孔質セラミックス
部分が大きく研摩されてしまい段差が生じるという問題
点もあった。Therefore, when the porous ceramics made of this fused alumina is used in a vacuum adsorption device, there is a disadvantage that a silicon wafer, which is an object to be adsorbed, is easily scratched. Further, as shown in FIG. 6, when it is used as a vacuum suction device, the plate-like body 21 made of porous ceramics is bonded to the frame body 22 made of dense ceramics, and both surfaces are polished at the same time. At this time, there is also a problem that the porous ceramics portion is largely polished to cause a step.
【０００８】さらに、他の多孔質セラミックスとして、
セラミック原料中に繊維状の樹脂などの焼失物を混合し
ておいて焼成したものでは、各気孔を連通させるために
は相当量の焼失物を混合しなければならず、その結果得
られた多孔質セラミックスは気孔率の高いものとなり、
強度が低く、表面を滑らかにできないなどの不都合があ
った。また、成形、焼成条件で多孔質としたものでも、
各気孔を連通させるためには気孔率を高くしなければな
らず、強度が低く、表面を滑らかにできないなどの不都
合があった。Further, as other porous ceramics,
When the ceramic raw material is mixed with burned material such as fibrous resin and fired, a considerable amount of burned material must be mixed in order to connect each pore, and the resulting porosity Quality ceramics have high porosity,
There were inconveniences such as low strength and inability to smooth the surface. In addition, even if it is made porous by molding and firing conditions,
The porosity must be increased in order to make the pores communicate with each other, and there are inconveniences such as low strength and smooth surface.
【０００９】このように、従来の多孔質セラミックスで
は、気孔を連通させるためには気孔率を２０〜３０％程
度にしなければならず、その結果、強度や表面平滑性な
どの点で問題のあるものであった。これに対し、気孔率
１０％以下で、かつ各気孔が連通しているような多孔質
セラミックスを得ることはできなかった。As described above, in the conventional porous ceramics, the porosity must be about 20 to 30% in order to make the pores communicate with each other, and as a result, there are problems in strength and surface smoothness. It was a thing. On the other hand, it was not possible to obtain a porous ceramic having a porosity of 10% or less and in which the respective pores communicate with each other.
【００１０】[0010]
【課題を解決するための手段】上記に鑑みて本発明は、
平均径０．５〜１０ｍｍの緻密質部の集合体であって、
これら緻密質部同士の間隙を連続気孔として多孔質セラ
ミック体を形成したものである。In view of the above, the present invention provides:
An aggregate of dense parts having an average diameter of 0.5 to 10 mm,
A porous ceramic body is formed with the gaps between the dense parts as continuous pores.
【００１１】また、このような多孔質セラミック体の製
造方法は、まずセラミック原料を平均径０．５〜１０ｍ
ｍの球状成形体とし、次にこの球状成形体を所定形状の
型に充填して加圧成形し、最後に得られた成形体を焼成
すればよい。なお、上記球状成形体とは、鋭いエッジが
なく全体的に滑らかな球状をした成形体のことであり、
これらの球状成形体部分は緻密質部となり、かつ球状成
形体の間隙は連続する気孔となって、上記のような多孔
質セラミック体とすることができる。Further, in the method for producing such a porous ceramic body, first, the ceramic raw material is made to have an average diameter of 0.5 to 10 m.
The spherical molded body of m may be formed, then the spherical molded body may be filled in a mold having a predetermined shape, pressure-molded, and finally the molded body may be fired. The spherical molded body is a molded body having a smooth spherical shape without sharp edges,
These spherical molded parts become dense parts, and the voids of the spherical molded parts become continuous pores, so that the porous ceramic body as described above can be obtained.
【００１２】[0012]
【作用】本発明の多孔質セラミックスは、大部分が緻密
質部であり、気孔率１０％以下とできるため、表面を滑
らかな面とできるとともに、強度、硬度を高くできる。
しかも、本発明の多孔質セラミック体は各気孔が連続し
ていることから、真空吸着装置などに好適に用いること
ができる。The porous ceramics of the present invention are mostly dense parts and can have a porosity of 10% or less, so that the surface can be made smooth and the strength and hardness can be increased.
Moreover, since the porous ceramic body of the present invention has continuous pores, it can be suitably used in a vacuum adsorption device or the like.
【００１３】[0013]
【実施例】以下本発明の実施例を説明する。EXAMPLES Examples of the present invention will be described below.
【００１４】図１（Ａ）（Ｂ）に示すように、本発明の
多孔質セラミック体１は、複数の緻密質部２の集合体で
あって、これらの緻密質部２の間隙を互いに連続する気
孔３としたものである。また、各緻密質部２は互いに完
全に焼結しているが、その境界を確認することができ、
各緻密質部２の平均径は０．５〜１０ｍｍの範囲内とな
っている。このように、本発明の多孔質セラミック体１
は、大部分が緻密質部２から成り、各緻密質部２が完全
に焼結しているため、強度、硬度が高く、しかも表面１
ａを研摩することによって、中心線平均粗さ（Ｒａ）
０．１μｍ以下の極めて滑らかな面とすることが可能で
ある。また、この多孔質セラミックス１の気孔率は１０
％以下と低いが、気孔３は各緻密質部２の間隙に存在
し、互いに連通していることから、フィルターや真空吸
着装置などに好適に用いることができる。As shown in FIGS. 1 (A) and 1 (B), the porous ceramic body 1 of the present invention is an assembly of a plurality of dense portions 2, and the gaps between these dense portions 2 are continuous with each other. The porosity 3 is defined as In addition, although the dense parts 2 are completely sintered to each other, the boundaries can be confirmed,
The average diameter of each dense part 2 is within the range of 0.5 to 10 mm. Thus, the porous ceramic body 1 of the present invention
Has a high strength and hardness since most of the dense parts 2 are completely sintered, and the surface 1
By polishing a, the center line average roughness (Ra)
It is possible to form an extremely smooth surface of 0.1 μm or less. The porosity of this porous ceramics 1 is 10
Although it is as low as 0.1% or less, since the pores 3 are present in the gaps between the dense parts 2 and communicate with each other, they can be suitably used for a filter, a vacuum adsorption device, or the like.
【００１５】さらに、この多孔質セラミック体１を形成
するセラミック材としては、アルミナ、ジルコニア、ム
ライト、コージライトなどの酸化物セラミックスや、炭
化珪素、窒化珪素、窒化アルミニウムなどの非酸化物セ
ラミックスなどさまざまなものを用いることができる。Further, various ceramic materials for forming the porous ceramic body 1 include oxide ceramics such as alumina, zirconia, mullite and cordierite, and non-oxide ceramics such as silicon carbide, silicon nitride and aluminum nitride. Anything can be used.
【００１６】次に、本発明の多孔質セラミック体１の製
造方法を説明する。Next, a method of manufacturing the porous ceramic body 1 of the present invention will be described.
【００１７】まず、所定のセラミック原料にＰＶＡ、Ｐ
ＥＧなどのバインダーを添加混合したものを直径０．５
〜１０ｍｍの球状成形体１１とする。ここで、球状成形
体１１とは、鋭いエッジのない滑らかな曲面状の表面を
持った成形体のことであり、この球状成形体１１を得る
ためには、例えばセラミック原料を球状にプレス成形し
たり、あるいはセラミック原料を連続的に造粒し続け
て、直径０．５〜１０ｍｍの大きさとなるようにすれば
良い。First, PVA and P are added to predetermined ceramic raw materials.
A diameter of 0.5 is obtained by adding and mixing a binder such as EG.
The spherical molded body 11 having a size of 10 mm is used. Here, the spherical molded body 11 is a molded body having a smooth curved surface without sharp edges. In order to obtain the spherical molded body 11, for example, a ceramic raw material is pressed into a spherical shape. Alternatively, the ceramic raw material may be continuously granulated to have a diameter of 0.5 to 10 mm.
【００１８】次に、図２に示すように、この球状成形体
１１をさらにＰＶＡ、ＰＥＧなどの水溶性バインダーと
混合して、例えばラバープレス用のゴム型１２に充填し
た後、各球状成形体１１が互いに密着し、かつその間に
隙間が存在する程度に加圧して押し固め、所定形状に成
形する。最後に、得られた成形体を所定条件で焼成すれ
ば、球状成形体１１部分は緻密質部２となり、各球状成
形体１１の間隙に気孔３が生じることとなり、図１に示
すような本発明の多孔質セラミック体１を得ることがで
きる。なお、上記ラバープレス成形に代えて、金型を用
いた乾式プレス成形法やその他の加圧成形を行っても良
い。Next, as shown in FIG. 2, this spherical molded body 11 is further mixed with a water-soluble binder such as PVA or PEG and filled in a rubber mold 12 for rubber pressing, for example, and then each spherical molded body. 11 are pressed against each other and pressed to such an extent that a gap exists between them, and molded into a predetermined shape. Finally, when the obtained molded body is fired under predetermined conditions, the spherical molded body 11 part becomes the dense portion 2, and the pores 3 are generated in the gaps between the spherical molded bodies 11, and as shown in FIG. The porous ceramic body 1 of the invention can be obtained. Instead of the above rubber press molding, a dry press molding method using a mold or other pressure molding may be performed.
【００１９】上記本発明の製造方法において、球状成形
体１１を型中で再度加圧成形する際に、さらにバインダ
ーを添加する点、および各球状成形体１１同士を密着さ
せるとともに、その間に隙間を残す程度の加圧力とする
点が重要であり、このときの加圧力を変化させることに
よって多孔質セラミック体１の気孔率等を調整すること
ができる。実際には、この時の加圧力は５００〜１５０
０ｋｇ／ｃｍ2 程度としたものが好適である。In the above-mentioned manufacturing method of the present invention, when the spherical molded body 11 is pressure-molded again in the mold, a point at which a binder is further added and the spherical molded bodies 11 are brought into close contact with each other and a gap is formed therebetween. It is important to set the pressing force to such an extent that it can be left, and the porosity of the porous ceramic body 1 can be adjusted by changing the pressing force at this time. Actually, the pressing force at this time is 500 to 150
It is preferably about 0 kg / cm 2 .
【００２０】また、本発明の製造方法では、鋭いエッジ
のない球状成形体１１を押し固めて成形するため、各球
状成形体１１の隙間を連続気孔とすることができる。そ
のため、気孔率１０％以下と気孔率が低くても、連続し
た気孔を持った多孔質セラミック体とできるのである。Further, in the manufacturing method of the present invention, since the spherical molded body 11 having no sharp edge is pressed and molded, the gap between the spherical molded bodies 11 can be made into continuous pores. Therefore, even if the porosity is as low as 10% or less, a porous ceramic body having continuous porosity can be obtained.
【００２１】なお、上記球状成形体１１の平均径は０．
５〜１０ｍｍの範囲内が良い。これは球状成形体１１の
平均径が０．５ｍｍ以下であると加圧成形時に間隙がつ
ぶれて多孔質体となりにくく、一方平均径が１０ｍｍ以
上であると焼結しにくくなるためである。また、球状成
形体１１の平均径は好ましくは０．５〜５ｍｍ程度、さ
らに好ましくは２〜３ｍｍ程度が良い。The average diameter of the spherical molded body 11 is 0.
The range of 5 to 10 mm is preferable. This is because if the average diameter of the spherical molded body 11 is 0.5 mm or less, the gap is crushed during pressure molding and it becomes difficult to form a porous body, while if the average diameter is 10 mm or more, it becomes difficult to sinter. The average diameter of the spherical molded body 11 is preferably about 0.5 to 5 mm, more preferably about 2 to 3 mm.
【００２２】また、上記球状成形体１１は、混合時や、
加圧成形時につぶれるため、図１に示す最終的な多孔質
セラミック体１中の緻密質部２は完全な球状とはならな
い。ただし、各緻密質部２は明確に区別することがで
き、その平均径を測定すると０．５〜１０ｍｍの範囲内
であった。Further, the spherical molded body 11 is mixed at the time of mixing,
The dense portion 2 in the final porous ceramic body 1 shown in FIG. 1 does not have a perfect spherical shape because it collapses during pressure molding. However, each dense part 2 was clearly distinguishable, and the average diameter thereof was within the range of 0.5 to 10 mm.
【００２３】上記本発明の多孔質セラミック体１は、連
通気孔を有することから、静圧軸受やフィルタなどに用
いることができるが、特に真空吸着装置に好適に用いる
ことができる。そして、真空吸着装置に用いる場合は、
この多孔質セラミック体１の周囲に緻密質セラミックス
を一体的に形成して隔壁部となすこともできる。Since the porous ceramic body 1 of the present invention has the continuous ventilation holes, it can be used for a static pressure bearing, a filter, etc., but can be particularly preferably used for a vacuum adsorption device. And when used in a vacuum suction device,
It is also possible to integrally form dense ceramics around the porous ceramic body 1 to form partition walls.
【００２４】例えば、図３に示すように中央が緻密質部
２と気孔３からなる多孔質セラミック体１であり、周辺
部が緻密質セラミック体４であり、両者が一体的に形成
された複合体５とすることができる。このような複合体
５の製造方法は、まず、図２に示すものと同様に、０．
５〜１０ｍｍのセラミックス球状成形体１１をゴム型１
２中に充填してラバープレス法により加圧成形した後、
図４に示すように得られた成形体を取り出さずに、成形
体とゴム型１２との隙間に球状成形体１１と同じセラミ
ック原料の微粉末１３を充填し、再度加圧した後、焼成
し、切断すればよい。このようにすれば、図３に示すよ
うな中央部が多孔質セラミック体１で、周辺部が緻密質
セラミック体４となり、しかも両者が完全に焼結一体化
された複合体５を得ることができる。For example, as shown in FIG. 3, a central portion is a porous ceramic body 1 composed of a dense portion 2 and pores 3, and a peripheral portion is a dense ceramic body 4, both of which are integrally formed into a composite. It can be the body 5. The manufacturing method of such a composite 5 is as follows.
A rubber mold 1 is used to attach a ceramic spherical molded body 11 of 5 to 10 mm
After being filled in 2 and pressure-molded by the rubber press method,
As shown in FIG. 4, without taking out the molded body obtained, the fine powder 13 of the same ceramic raw material as that of the spherical molded body 11 was filled in the gap between the molded body and the rubber mold 12, and the pressure was applied again, followed by firing. , Just cut it. By doing so, it is possible to obtain a composite body 5 in which the central portion is the porous ceramic body 1 and the peripheral portion is the dense ceramic body 4, and both are completely sintered and integrated as shown in FIG. it can.
【００２５】図６に示すように、この複合体５を枠体２
２に固着して真空吸着装置を構成すると、多孔質セラミ
ックス１が吸着部となり、周囲の緻密質セラミックス４
を隔壁とすることができる。このとき、真空吸着部を構
成する多孔質セラミック体１は滑らかな表面とすること
ができ、粒子脱落もないことから、シリコンウェハなど
の被吸着物に傷をつけることがない。さらに、真空吸着
部の表面を研摩する場合は多孔質セラミック体１と緻密
質セラミック体４を同時に研摩するが、両者が同程度の
研摩特性を有しており、一体形成されていることから、
同時研摩しても段差が生じることはない。As shown in FIG. 6, the composite body 5 is attached to the frame body 2
When it is adhered to 2 to form a vacuum adsorption device, the porous ceramics 1 serves as an adsorption portion, and the surrounding dense ceramics 4
Can be a partition. At this time, since the porous ceramic body 1 forming the vacuum suction portion can have a smooth surface and particles do not fall off, the object to be attracted such as a silicon wafer is not damaged. Further, when polishing the surface of the vacuum suction portion, the porous ceramic body 1 and the dense ceramic body 4 are polished at the same time, but since both have similar polishing characteristics and are integrally formed,
Even if they are simultaneously polished, no step occurs.
【００２６】実験例 図５に示すように、本発明の多孔質セラミック体を真空
吸着装置に用いて、さまざまな実験を行った。 Experimental Example As shown in FIG. 5, various experiments were conducted by using the porous ceramic body of the present invention in a vacuum adsorption device.
【００２７】９９．５％のＡｌ2 Ｏ3 と残部がＳｉ
Ｏ2 、ＭｇＯなどからなるセラミック原料にバインダー
を添加混合したものを直径２ｍｍの球状成形体１１とし
た。この球状成形体１１にさらに水溶性バインダーを添
加混合したものを、ゴム型１２に充填し、ラバープレス
法により圧力８００、１０００、１２００ｋｇ／ｃｍ2
の３通りで加圧した。加圧後の成形体とゴム型１２の隙
間に上記セラミック原料の微粉末１３を充填し、再度加
圧成形した。得られた成形体を所定条件で焼成した後、
切断、研削することにより、図３に示す多孔質セラミッ
ク体１と緻密質セラミク体４の複合体５を得ることがで
きた。この複合体５を用いて図５に示す真空吸着装置を
形成した。99.5% Al 2 O 3 and the balance Si
A spherical raw material 11 having a diameter of 2 mm was obtained by adding and mixing a binder to a ceramic raw material made of O 2 , MgO or the like. A rubber mold 12 was filled with a mixture of the spherical molded body 11 and a water-soluble binder, and the pressure was 800, 1000, 1200 kg / cm 2 by a rubber press method.
The pressure was applied in three ways. The ceramic material fine powder 13 was filled in the gap between the pressed body and the rubber mold 12, and pressure molding was performed again. After firing the obtained molded body under predetermined conditions,
By cutting and grinding, the composite body 5 of the porous ceramic body 1 and the dense ceramic body 4 shown in FIG. 3 could be obtained. Using this composite 5, a vacuum adsorption device shown in FIG. 5 was formed.
【００２８】比較例として、図６に示す従来の電融アル
ミナ（＃１００）をガラス融着した多孔質セラミックス
を用いた真空吸着装置を用意した。これらの真空吸着装
置において、多孔質部分の見掛比重、気孔率、平均細孔
径、表面粗さ（中心線平均粗さＲａ）、硬度を測定し
た。なお、平均細孔径の測定は水銀圧入法で行ったが、
気孔率が１０％以下では正確な評価が行えないことか
ら、本発明実施例の平均細孔径の値はあくまでも参考値
である。As a comparative example, there was prepared a vacuum adsorption device shown in FIG. 6 which uses porous ceramics obtained by glass-melting a conventional fused alumina (# 100). In these vacuum adsorption devices, the apparent specific gravity, porosity, average pore diameter, surface roughness (center line average roughness Ra) and hardness of the porous portion were measured. The measurement of the average pore diameter was performed by the mercury porosimetry,
Since the accurate evaluation cannot be performed when the porosity is 10% or less, the value of the average pore diameter in the examples of the present invention is merely a reference value.
【００２９】結果は表１に示す通り、本発明の多孔質セ
ラミックスは、気孔率が１〜２％と低く、緻密質部が多
いことから、表面の硬度が高く、表面粗さも極めて滑ら
かにできることがわかる。The results are shown in Table 1. The porous ceramics of the present invention have a low porosity of 1 to 2% and a large number of dense parts, so that the surface hardness is high and the surface roughness can be made extremely smooth. I understand.
【００３０】[0030]
【表１】 [Table 1]
【００３１】次に、これらの真空吸着装置を用いて、４
インチのシリコンウェハの吸着テストを行った。それぞ
れ吸着前、吸着後の真空度を大気圧（７６０ｍｍＨｇ）
との差で表２に示す。この結果より、本発明の多孔質セ
ラミックスは気孔率が小さいことから、吸着前後での真
空度の差がやや小さいが、吸着後の真空度を充分低くで
きることから、真空吸着装置として好適に使用できるこ
とがわかる。Next, using these vacuum suction devices, 4
An inch silicon wafer adsorption test was performed. The degree of vacuum before and after adsorption is atmospheric pressure (760 mmHg).
Table 2 shows the difference. From this result, since the porous ceramics of the present invention has a small porosity, the difference in the degree of vacuum before and after adsorption is slightly small, but the degree of vacuum after adsorption can be made sufficiently low, so that it can be suitably used as a vacuum adsorption device. I understand.
【００３２】[0032]
【表２】 [Table 2]
【００３３】[0033]
【発明の効果】このように本発明によれば、平均径０．
５〜１０ｍｍの緻密質部の集合体であって、これら緻密
質部同士の間隙を連続気孔として多孔質セラミック体を
構成したことによって、高硬度、高強度で滑らかな表面
を持った多孔質セラミック体とできることから、真空吸
着装置などに好適に用いることができる。また、このよ
うな多孔質セラミック体は、セラミック原料を球状圧粉
体とし、この球状圧粉体を所定形状に押し固め、焼成す
ることによって、所定の気孔率を持ったものを容易に製
造することができる。As described above, according to the present invention, the average diameter is 0.
A porous ceramic body having a dense surface of 5 to 10 mm and having a high hardness, a high strength, and a smooth surface by configuring a porous ceramic body with the gaps between the dense parts being continuous pores. Since it can be formed into a body, it can be suitably used in a vacuum adsorption device or the like. In addition, such a porous ceramic body can be easily manufactured with a spherical porosity by using a ceramic raw material as a spherical green compact and pressing the spherical green compact into a predetermined shape and firing it. be able to.
【図１】（Ａ）は本発明の多孔質セラミック体を示す斜
視図、（Ｂ）は（Ａ）中のＸ−Ｘ線断面図である。FIG. 1A is a perspective view showing a porous ceramic body of the present invention, and FIG. 1B is a sectional view taken along line XX in FIG.
【図２】図１に示す多孔質セラミック体の製造方法を説
明するための図である。FIG. 2 is a diagram for explaining a method for manufacturing the porous ceramic body shown in FIG.
【図３】（Ａ）は本発明の多孔質セラミック体と緻密質
セラミック体の複合体を示す斜視図、（Ｂ）は（Ａ）中
のＹ−Ｙ線断面図である。3A is a perspective view showing a composite of a porous ceramic body and a dense ceramic body of the present invention, and FIG. 3B is a sectional view taken along line YY in FIG.
【図４】図３に示す複合体の製造方法を説明するための
図である。FIG. 4 is a diagram for explaining a method for producing the composite body shown in FIG.
【図５】本発明の多孔質セラミック体を用いた真空吸着
装置を示す縦断面図である。FIG. 5 is a vertical sectional view showing a vacuum adsorption device using the porous ceramic body of the present invention.
【図６】従来の多孔質セラミック体を用いた真空吸着装
置を示す縦断面図である。FIG. 6 is a vertical cross-sectional view showing a vacuum adsorption device using a conventional porous ceramic body.
１・・・多孔質セラミック体 ２・・・緻密質部 ３・・・気孔 ４・・・緻密質セラミック体 ５・・・複合体 １１・・・球状成形体 １２・・・ゴム型 １３・・・微粉末 DESCRIPTION OF SYMBOLS 1 ... Porous ceramic body 2 ... Dense part 3 ... Porosity 4 ... Dense ceramic body 5 ... Composite body 11 ... Spherical molded body 12 ... Rubber mold 13 ...・ Fine powder
Claims (2)
体であって、これら緻密質部同士の間隙を連続気孔とし
て具備して成る多孔質セラミック体。1. A porous ceramic body which is an aggregate of dense parts having an average diameter of 0.5 to 10 mm, and which has gaps between the dense parts as continuous pores.
の球状成形体とし、これら未焼成の球状成形体の多数個
を型中に充填して所定形状に成形した後、焼成する工程
からなる多孔質セラミック体の製造方法。2. A ceramic raw material having an average diameter of 0.5 to 10 mm.
The method for producing a porous ceramic body, comprising the steps of filling a mold with a large number of these unsintered spherical compacts, molding them into a predetermined shape, and then firing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4162492A JP3228546B2 (en) | 1992-02-27 | 1992-02-27 | Vacuum suction device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4162492A JP3228546B2 (en) | 1992-02-27 | 1992-02-27 | Vacuum suction device and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05238844A true JPH05238844A (en) | 1993-09-17 |
| JP3228546B2 JP3228546B2 (en) | 2001-11-12 |
Family
ID=12613487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4162492A Expired - Lifetime JP3228546B2 (en) | 1992-02-27 | 1992-02-27 | Vacuum suction device and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3228546B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004315358A (en) * | 2003-03-31 | 2004-11-11 | Nippon Tungsten Co Ltd | Porous alumina sintered compact and method for manufacturing the same |
| JP2007514306A (en) * | 2003-12-09 | 2007-05-31 | シュンク・コーレンストッフテヒニーク・ゲーエムベーハー | Support for receiving workpiece and method for manufacturing the support |
| JP2007176788A (en) * | 2005-11-29 | 2007-07-12 | Gako Imai | Composition for porous ceramic, porous ceramic using the same and method for manufacturing the same |
| JP2009147384A (en) * | 2009-03-26 | 2009-07-02 | Taiheiyo Cement Corp | Vacuum suction device and method of manufacturing the same |
-
1992
- 1992-02-27 JP JP4162492A patent/JP3228546B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004315358A (en) * | 2003-03-31 | 2004-11-11 | Nippon Tungsten Co Ltd | Porous alumina sintered compact and method for manufacturing the same |
| JP4502683B2 (en) * | 2003-03-31 | 2010-07-14 | 日本タングステン株式会社 | Porous alumina sintered body and method for producing the same |
| JP2007514306A (en) * | 2003-12-09 | 2007-05-31 | シュンク・コーレンストッフテヒニーク・ゲーエムベーハー | Support for receiving workpiece and method for manufacturing the support |
| JP2007176788A (en) * | 2005-11-29 | 2007-07-12 | Gako Imai | Composition for porous ceramic, porous ceramic using the same and method for manufacturing the same |
| JP2009147384A (en) * | 2009-03-26 | 2009-07-02 | Taiheiyo Cement Corp | Vacuum suction device and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3228546B2 (en) | 2001-11-12 |
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