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JPH05194298A - Fluorine-containing alcohol - Google Patents

Fluorine-containing alcohol

Info

Publication number
JPH05194298A
JPH05194298A JP2607992A JP2607992A JPH05194298A JP H05194298 A JPH05194298 A JP H05194298A JP 2607992 A JP2607992 A JP 2607992A JP 2607992 A JP2607992 A JP 2607992A JP H05194298 A JPH05194298 A JP H05194298A
Authority
JP
Japan
Prior art keywords
formula
fluorine
compound
ppm
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2607992A
Other languages
Japanese (ja)
Other versions
JP2603171B2 (en
Inventor
Toshio Takaai
俊雄 鷹合
Yasushi Yamamoto
靖 山本
Koichi Yamaguchi
浩一 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
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Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2607992A priority Critical patent/JP2603171B2/en
Publication of JPH05194298A publication Critical patent/JPH05194298A/en
Application granted granted Critical
Publication of JP2603171B2 publication Critical patent/JP2603171B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

PURPOSE:To provide a new compound having excellent softness, low-temperature characteristics, low refractive index, etc., and useful as a water and oil repellent, fluorine-containing acrylic rubber material, optical material, etc. CONSTITUTION:The compound of formula I (R is CF2CF2 or group of formula II; n is 2-7 when R is CF2CF2 and n is 1-7 when R is group of formula II), e.g. the compound of formula III. The compound of formula I can be produced by reacting a perfluoroalkyl iodide of formula IV with fuming sulfuric acid and hydrolyzing the obtained sulfuric acid ester.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、新規な含フッ素アルコ
ールに関するものであり、特には撥水、撥油剤として用
いられる(メタ)アクリレート用の原料や、他の含フッ
素化合物への中間原料として非常に有用な化合物に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel fluorine-containing alcohol, particularly as a raw material for (meth) acrylate used as a water and oil repellent and as an intermediate raw material for other fluorine-containing compounds. It relates to very useful compounds.

【0002】[0002]

【従来の技術】含フッ素アルコールは、含フッ素アルキ
ルアクリレート及びメタクリレートの原料として用いら
れ、更に単独で、またはアルキルアクリレート、メタク
リレート等と共に重合させて得られる重合体は、撥水撥
油剤として用いられる。従来知られている含フッ素アル
コールは、直鎖状パーフロロアルキル基を含フッ素基と
して有するタイプである為、剛直かつ結晶性である。こ
の含フッ素アルコールから誘導されるアクリレート、メ
タクリレートの重合体は、撥水撥油剤に用いた場合、繊
維の風合いをそこねるという欠点がある。
Fluorine-containing alcohols are used as raw materials for fluorine-containing alkyl acrylates and methacrylates, and polymers obtained by polymerizing them alone or with alkyl acrylates, methacrylates and the like are used as water- and oil-repellent agents. The conventionally known fluorine-containing alcohol is a type having a linear perfluoroalkyl group as a fluorine-containing group, and is therefore rigid and crystalline. The polymer of acrylate or methacrylate derived from this fluorine-containing alcohol has a drawback that the texture of the fiber is impaired when it is used as a water and oil repellent.

【0003】[0003]

【発明が解決しようとする課題】本発明は、従来知られ
ていない後述の一般式(I) で表される、有用な新規含フ
ッ素アルコールを提供することを課題とする。この含フ
ッ素アルコールは、上述した従来の含フッ素アルコール
の有する欠点が解消された含フッ素重合体の製造に有用
である。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a useful novel fluorine-containing alcohol represented by the general formula (I), which has been heretofore unknown and is described below. This fluorine-containing alcohol is useful for producing a fluorine-containing polymer in which the above-mentioned drawbacks of the conventional fluorine-containing alcohol are eliminated.

【0004】[0004]

【課題を解決するための手段】即ち、本発明は、一般式
(I):
That is, the present invention has the general formula
(I):

【化4】 (式中、Rは−CF2 CF2 −又は[Chemical 4] (In the formula, R is —CF 2 CF 2 — or

【化5】 であり;nはRが−CF2 CF2 −である場合には2〜7の
整数であり、Rが
[Chemical 5] N is an integer of 2 to 7 when R is —CF 2 CF 2 —, and R is

【化6】 である場合には1〜7の整数である)で示される新規な
含フッ素アルコールを提供するものである。
[Chemical 6] Is an integer of 1 to 7).

【0005】本発明の一般式(I) で示される含フッ素ア
ルコールはドイツ特許第 1214660号明細書記載の方法な
ど公知の方法で容易に合成する事が出来る。即ち、下記
式(II)
The fluorine-containing alcohol represented by the general formula (I) of the present invention can be easily synthesized by a known method such as the method described in German Patent No. 1214660. That is, the following formula (II)

【化7】 (ここでm及びRは前記のとおり)で示されるパーフロ
ロアルキルヨウ化物を発煙硫酸と反応させ対応する硫酸
エステルに変え、それを加水分解する事により、上記一
般式(I) の含フッ素アルコールを得ることが出来る。こ
の場合、パーフロロアルキルヨウ化物1モルに対して、
発煙硫酸中の無水硫酸が1〜5モル、特には、 1.5〜2.
5 モルとなるように発煙硫酸を用いる事が好ましい。ま
た、反応条件は適宜調整する事が望ましいが、反応温度
0〜100 ℃、特には15〜50℃で1〜50時間特には2〜20
時間反応させることが好ましい。加水分解反応を行う場
合の水の使用量は、発煙硫酸に対し、体積で2〜50倍、
特には、5〜20倍用いる事が好ましい。また、反応条件
は反応温度20〜150 ℃特には70〜100 ℃で2〜50時間、
特には5〜25時間反応させる事が好ましい。
[Chemical 7] (Where m and R are as described above), a perfluoroalkyl iodide represented by the above general formula (I) is hydrolyzed by reacting it with a fuming sulfuric acid to convert it into a corresponding sulfuric ester. Can be obtained. In this case, with respect to 1 mol of perfluoroalkyl iodide,
1-5 mol of sulfuric acid anhydride in fuming sulfuric acid, especially 1.5-2.
It is preferable to use fuming sulfuric acid so as to be 5 mol. The reaction conditions are preferably adjusted as appropriate, but the reaction temperature is 0 to 100 ° C, particularly 15 to 50 ° C for 1 to 50 hours, especially 2 to 20 ° C.
It is preferable to react for a time. The amount of water used for the hydrolysis reaction is 2 to 50 times the volume of fuming sulfuric acid,
It is particularly preferable to use 5 to 20 times. The reaction conditions include a reaction temperature of 20 to 150 ° C., particularly 70 to 100 ° C. for 2 to 50 hours,
It is particularly preferable to react for 5 to 25 hours.

【0006】尚、上記式(II)で示されるパーフロロアル
キルヨウ化物は下記の公知の方法により合成する事が出
来る。 オリゴマー化
The perfluoroalkyl iodide represented by the above formula (II) can be synthesized by the following known method. Oligomerization

【化8】 ヨウ素化 1)ヨードエーテル化[Chemical 8] Iodination 1) Iodoetherification

【化9】 2)ハロゲン交換/脱カルボニル[Chemical 9] 2) Halogen exchange / decarbonylation

【化10】 エチレン付加[Chemical 10] Ethylene addition

【化11】 (nはRが−CF2 CF2 −の場合には2〜7の整数であ
り、Rが
[Chemical 11] (N is R is -CF 2 CF 2 - is a 2-7 integer if the, R is

【化12】 の場合には〜7の整数)[Chemical formula 12] In the case of, an integer of ~ 7)

【0007】ここでのオリゴマー化は、例えば(a) 式
のヘキサフルオロプロピレンオキサイド(HFPO)をフッ
化セシウム(CsF )、フッ化カリウム(KF)等の金属フ
ッ化物−非プロトン性溶媒系に低温下で吹き込む事によ
り式(b) のHFPOオリゴマー酸フッ化物を得ることができ
る。の末端ヨウ素化の方法は2通りあり、1)のヨード
エーテル化では分離した式(b) のオリゴマー酸フッ化物
を非プロトン性溶媒中、前記と同様のアルカリ金属フッ
化物存在下に、テトラフルオロエチレン及びヨウ素を反
応させる事により式(C) の末端ヨウ化物を得る事が出来
る。また、2)のハロゲン交換/脱カルボニル反応では式
(b) のオリゴマー酸フッ化物を LiI、 MgI2 等のアルカ
リ金属ヨウ化物もしくはアルカリ土類金属ヨウ化物−非
プロトン性溶媒中でハロゲン交換反応させて式(d) の酸
ヨウ化物に転換し、次に紫外線照射により脱カルボニル
させる事により式(e) の末端ヨウ化物を得る事ができ
る。のエチレン付加反応はアゾビスイソブチルニトリ
ル等のアゾ化合物又はパーオキサイドのラジカル付加触
媒存在下、末端ヨウ化物にエチレンを吹き込むことによ
り式(II)のパーフロロアルキルヨウ化物を得ることがで
きる。
The oligomerization here is carried out, for example, by adding hexafluoropropylene oxide (HFPO) of the formula (a) to a metal fluoride-aprotic solvent system such as cesium fluoride (CsF) and potassium fluoride (KF) at low temperature. By blowing under, the HFPO oligomeric acid fluoride of formula (b) can be obtained. There are two methods for the terminal iodination of (1), and the oligomeric acid fluoride of the formula (b) separated in the iodoetherification of 1) is treated with tetrafluoromethane in the presence of the same alkali metal fluoride as described above in an aprotic solvent. The terminal iodide of the formula (C) can be obtained by reacting ethylene and iodine. In 2) halogen exchange / decarbonylation reaction, the formula
The oligomeric acid fluoride of (b) is converted to the acid iodide of the formula (d) by a halogen exchange reaction in an alkali metal iodide such as LiI or MgI 2 or an alkaline earth metal iodide-aprotic solvent, Next, the terminal iodide of the formula (e) can be obtained by decarbonylation by ultraviolet irradiation. In the ethylene addition reaction, the perfluoroalkyl iodide of the formula (II) can be obtained by blowing ethylene into the terminal iodide in the presence of an azo compound such as azobisisobutylnitrile or a peroxide radical addition catalyst.

【0008】[0008]

【実施例】 実施例−1 500ml4ツ口フラスコに下記式(IIa)EXAMPLES Example-1 A 500 ml four-necked flask was charged with the following formula (IIa)

【化13】 で示されるパーフロロアルキルエチルヨウ化物 200g
(0.33モル)を仕込み、温度を10〜25℃にコントロール
しながら25%発煙硫酸 211gを滴下ロートより1時間を
かけて滴下した。滴下終了後、室温にて3時間後撹拌を
行った。次いで5リットル4ツ口フラスコに水2リット
ルを仕込み、次いで上記反応混合物を滴下ロートにより
2時間かけて滴下した。滴下収量後、70〜90℃で5時間
加熱撹拌した。冷却後分離された有機層を3回水洗し、
減圧蒸留することにより沸点 103℃/80mmHgの留分 132
g(収率81%)が得られた。次にこの化合物を元素分析
に供し、またIRスペクトル及び 1H−NMR、19F−
NMRを測定した所下に示す結果が得られた。これらの
結果から得られた化合物の構造は、
[Chemical 13] 200 g of perfluoroalkylethyl iodide
(0.33 mol) was charged and 211 g of 25% fuming sulfuric acid was added dropwise from the dropping funnel over 1 hour while controlling the temperature at 10 to 25 ° C. After completion of dropping, the mixture was stirred at room temperature for 3 hours. Then, 2 liters of water was charged into a 5 liter 4-necked flask, and then the above reaction mixture was added dropwise by a dropping funnel over 2 hours. After the dropping yield, the mixture was heated and stirred at 70 to 90 ° C for 5 hours. After cooling, the separated organic layer was washed with water three times,
Distillation under reduced pressure produces a distillate of boiling point 103 ℃ / 80mmHg 132
g (yield 81%) was obtained. Next, this compound was subjected to elemental analysis, IR spectrum and 1 H-NMR, 19 F-
The results shown below were obtained when the NMR was measured. The structures of the compounds obtained from these results are

【化14】 と確認された。[Chemical 14] Was confirmed.

【0009】元素分析 計算値* (%) 24.2 1.0 9.7 65.1 実測値 (%) 24.3 1.0 9.6 65.1 ( * C105 3 17として) IRスペクトル (図1参照) 特性吸収: 3,350cm-1 (−OH) 1,100〜1,340 cm-1(C−F) 1H−NMRスペクトル (溶媒: CCl4 、内部標準:CH
Cl3 ) 2.3〜2.9 (m, 2H, −C−CH2 −O) 2.8 (s, 1H, −C−OH) 3.8〜4.1 (k, 2H, C−CH2 −C) 19F−NMRスペクトル (内部標準:CF3 COOH)
[0009] Elemental analysis C H O F Calcd * (%) 24.2 1.0 9.7 65.1 Found (%) 24.3 1.0 9.6 65.1 (* as C 10 H 5 O 3 F 17 ) IR spectrum (see Figure 1) characteristic absorption: 3,350 cm -1 (-OH) 1,100 to 1,340 cm -1 (C-F) 1 H-NMR spectrum (solvent: CCl 4 , internal standard: CH
Cl 3 ) 2.3 to 2.9 (m, 2H, -C-CH 2 -O) 2.8 (s, 1H, -C-OH) 3.8 to 4.1 (k, 2H, C-CH 2 -C) 19 F-NMR spectrum (Internal standard: CF 3 COOH)

【化15】 (式中、a〜fは各フッ素原子を示す) a:− 3.05 ppm b:− 4.64 ppm c:− 6.96 ppm d:−50.12 ppm e:−52.25 ppm f:−67.03 ppm[Chemical 15] (In the formula, a to f represent each fluorine atom) a: -3.05 ppm b: -4.64 ppm c: -6.96 ppm d: -50.12 ppm e: -52.25 ppm f: -67.03 ppm

【0010】実施例−2 実施例−1において式(IIa) で示すパーフロロアルキル
エチルヨウ化物の代りに下記式(IIb):
Example-2 Instead of the perfluoroalkylethyl iodide represented by the formula (IIa) in Example-1, the following formula (IIb):

【化16】 で示されるパーフロロアルキルエチルヨウ化物 255g
(0.33モル)を用いた以外は実施例−1と同様に操作し
た。その結果沸点 151℃/100mmHg の留分 157g(収率
72%)が得られた。この化合物について元素分析、IR
スペクトル、 1H−NMR、19F−NMRを測定した
所、下に示す結果が得られた。これらの結果から得られ
た化合物の構造は、
[Chemical 16] 255 g of perfluoroalkylethyl iodide
The procedure of Example 1 was repeated except that (0.33 mol) was used. As a result, 157 g of a fraction with a boiling point of 151 ° C / 100 mmHg (yield
72%) was obtained. Elemental analysis, IR of this compound
When the spectrum, 1 H-NMR and 19 F-NMR were measured, the results shown below were obtained. The structures of the compounds obtained from these results are

【化17】 と確認された。[Chemical 17] Was confirmed.

【0011】元素分析 計算値* (%) 23.5 0.8 9.7 66.0 実測値 (%) 23.7 0.7 9.9 65.7 ( * C135 4 23として) IRスペクトル (図2参照) 特性吸収: 3,350cm-1 (−OH) 1,100〜1,340 cm-1(C−F) 1H−NMRスペクトル (溶媒: CCl4 、内部標準:CH
Cl3 ) 2.3〜2.9 (m, 2H, −C−CH2 −O) 2.6 (s, 1H, −C−OH) 3.9〜4.1 (t, 2H, C−CH2 −C) 19F−NMRスペクトル (内部標準:CF3 COOH)
[0011] Elemental analysis C H O F Calcd * (%) 23.5 0.8 9.7 66.0 Found (%) 23.7 0.7 9.9 65.7 (* as C 13 H 5 O 4 F 23 ) IR spectrum (see Figure 2) characteristic absorption: 3,350 cm -1 (-OH) 1,100 to 1,340 cm -1 (C-F) 1 H-NMR spectrum (solvent: CCl 4 , internal standard: CH
Cl 3 ) 2.3 to 2.9 (m, 2H, -C-CH 2 -O) 2.6 (s, 1H, -C-OH) 3.9 to 4.1 (t, 2H, C-CH 2 -C) 19 F-NMR spectrum (Internal standard: CF 3 COOH)

【化18】 (式中、a〜fは各フッ素原子を示す) a:− 3.05 ppm b:− 4.62 ppm c:− 6.97 ppm d:−50.10 ppm e:−52.28 ppm f:−67.01 ppm[Chemical 18] (In the formula, a to f represent each fluorine atom) a: -3.05 ppm b: -4.62 ppm c: -6.97 ppm d: -50.10 ppm e: -52.28 ppm f: -67.01 ppm

【0012】実施例−3 実施例−1において、式(IIa) で示すパーフロロアルキ
ルエチルヨウ化物の代りに下記式(IIc):
Example-3 In Example-1, instead of the perfluoroalkylethyl iodide represented by the formula (IIa), the following formula (IIc):

【化19】 で示されるパーフロロアルキルエチルヨウ化物 200g
(0.33モル)を用いた以外は実施例−1と同様に操作し
た。その結果、沸点 124℃/98mmHgの留分 124g(収率
76%)が得られた。この化合物について元素分析、IR
スペクトル、 1H−NMR、19F−NMRを測定した
所、下に示す結果が得られた。これらの結果から得られ
た化合物の構造は、
[Chemical 19] 200 g of perfluoroalkylethyl iodide
The procedure of Example 1 was repeated except that (0.33 mol) was used. As a result, 124 g of a fraction having a boiling point of 124 ° C / 98 mmHg (yield
76%) was obtained. Elemental analysis, IR of this compound
When the spectrum, 1 H-NMR and 19 F-NMR were measured, the results shown below were obtained. The structures of the compounds obtained from these results are

【化20】 と確認された。[Chemical 20] Was confirmed.

【0013】元素分析 計算値* (%) 24.2 1.0 9.7 65.1 実測値 (%) 24.5 1.1 9.5 64.9 ( * C105 3 17として) IRスペクトル (図3参照) 特性吸収: 3,350cm-1 (−OH) 1,100〜1,340 cm-1(C−F) 1H−NMRスペクトル (溶媒: CCl4 、内部標準:CH
Cl3 ) 1.9〜2.8 (m, 2H, −C−CH2 −O) 3.1 (s, 1H, −C−OH) 3.7〜4.2 (t, 2H, C−CH2 −C) 19F−NMRスペクトル (内部標準:CF3 COOH)
[0013] Elemental analysis C H O F Calcd * (%) 24.2 1.0 9.7 65.1 Found (%) (as * C 10 H 5 O 3 F 17) 24.5 1.1 9.5 64.9 IR spectrum (see FIG. 3) characteristic absorption: 3,350 cm -1 (-OH) 1,100 to 1,340 cm -1 (C-F) 1 H-NMR spectrum (solvent: CCl 4 , internal standard: CH
Cl 3 ) 1.9 to 2.8 (m, 2H, -C-CH 2 -O) 3.1 (s, 1H, -C-OH) 3.7 to 4.2 (t, 2H, C-CH 2 -C) 19 F-NMR spectrum (Internal standard: CF 3 COOH)

【化21】 (式中、a〜gは各フッ素原子を示す) a:− 3.17 ppm b:− 4.63 ppm c:− 6.16 ppm d:−11.11 ppm e:−40.35 ppm f:−52.31 ppm g:−67.52 ppm[Chemical 21] (In the formula, a to g represent each fluorine atom) a: -3.17 ppm b: -4.63 ppm c: -6.16 ppm d: -11.11 ppm e: -40.35 ppm f: -52.31 ppm g: -67.52 ppm

【0014】[0014]

【発明の効果】本発明の含フッ素アルコールは新規な物
質であり、例えば、フルオロアルキルアクリレート及び
フルオロアルキルメタクリレートの原料として有用であ
る。また、これら単独でまたはアルキルアクリレート、
アルキルメタクリレート等と共に重合させて得られる重
合体は、撥水、撥油剤として有用である。特に本発明の
含フッ素アルコールはパーフロロ基内にエーテル結合を
持つ事からエーテル結合を有しない直鎖パーフロアルキ
ル基タイプに比べ柔軟性、低温性、低屈折率などの特性
に優れた為、柔軟性の有る撥水、撥油剤、低温性に優れ
た含フッ素アクリルゴム材や光学材料などに応用される
フルオロアルキル(メタ)アクリレート用中間原料とし
て特に有用である。
The fluorinated alcohol of the present invention is a novel substance and is useful as a raw material for fluoroalkyl acrylate and fluoroalkyl methacrylate. Also, these alone or alkyl acrylate,
A polymer obtained by polymerizing with alkyl methacrylate or the like is useful as a water and oil repellent. In particular, since the fluorine-containing alcohol of the present invention has an ether bond in the perfluoro group, it has excellent flexibility, low temperature properties, low refractive index, etc. It is particularly useful as an intermediate raw material for a fluoroalkyl (meth) acrylate applied to a water-repellent, oil-repellent agent, a fluorine-containing acrylic rubber material having excellent low temperature properties, an optical material, and the like.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例1で合成された化合物のIRチャートを
示す図。
FIG. 1 is a view showing an IR chart of a compound synthesized in Example 1.

【図2】実施例2で合成された化合物のIRチャートを
示す図。
FIG. 2 is a view showing an IR chart of a compound synthesized in Example 2.

【図3】実施例3で合成された化合物のIRチャートを
示す図。
FIG. 3 shows an IR chart of the compound synthesized in Example 3.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山口 浩一 群馬県碓氷郡松井田町大字人見1番地10 信越化学工業株式会社シリコーン電子材料 技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Koichi Yamaguchi Izumi Hitomi, Matsuida Town, Usui District, Gunma Prefecture 10 Shin-Etsu Chemical Co., Ltd. Silicone Electronic Materials Research Laboratory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 一般式(I): 【化1】 (式中、Rは−CF2 CF2 −又は 【化2】 であり;nはRが−CF2 CF2 −である場合には2〜7の
整数であり、Rが 【化3】 である場合には1〜7の整数である)で示される含フッ
素アルコール。
1. General formula (I): (In the formula, R is —CF 2 CF 2 — or N is an integer of 2 to 7 when R is —CF 2 CF 2 —, and R is Is an integer of 1 to 7).
JP2607992A 1992-01-17 1992-01-17 Fluorine-containing alcohol Expired - Lifetime JP2603171B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003012578A (en) * 2001-06-28 2003-01-15 Asahi Glass Co Ltd Method for reacting organohalogen compound with high- temperature and high-pressure water
JP2006328020A (en) * 2005-05-30 2006-12-07 Yunimatekku Kk Iodine-containing fluoropolyether and method for producing the same
US20130029056A1 (en) * 2011-07-26 2013-01-31 Canon Kabushiki Kaisha Method for manufacturing liquid ejecting head

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003012578A (en) * 2001-06-28 2003-01-15 Asahi Glass Co Ltd Method for reacting organohalogen compound with high- temperature and high-pressure water
JP2006328020A (en) * 2005-05-30 2006-12-07 Yunimatekku Kk Iodine-containing fluoropolyether and method for producing the same
US7772443B2 (en) * 2005-05-30 2010-08-10 Unimatec Co., Ltd. Iodine-containing fluoropolyether and process for producing the same
US20130029056A1 (en) * 2011-07-26 2013-01-31 Canon Kabushiki Kaisha Method for manufacturing liquid ejecting head
US8956703B2 (en) * 2011-07-26 2015-02-17 Canon Kabushiki Kaisha Method for manufacturing liquid ejecting head

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