JPH0517990U - Industrial heater - Google Patents

Abstract

(57) [Abstract] [Purpose] It is possible to detect mist and detect erosion of the industrial heater radiant pipe by the treatment agent at an early stage to prevent damage to the radiant pipe. [Structure] At least a pair of linear conductive films are arranged close to each other on the surface of an insulating support to form a mist detector. When the treatment agent mist touches the pair of strip conductive films, a weak current flows between the electrodes, and the mist can be detected.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 This invention is, for example, when a semiconductor substrate, a glass substrate for liquid crystal or the like (hereinafter simply referred to as a substrate) is treated with a surface treatment agent such as an etching solution or a cleaning solution or vapors thereof The present invention relates to an industrial heater used to heat the treatment agent to a required temperature.

[0002]

[Prior Art]

 As an industrial heater used for the above purpose, the one disclosed in, for example, Japanese Utility Model Laid-Open No. 2-67593 proposed by the present applicant has been known. As shown in FIGS. 5 and 6, the insulating radiating pipe 11 is filled with an electric heating body 12 and a pair of electrodes 12a and 13 for detecting the intrusion of the conductive treatment liquid 5 into the radiating pipe 11. It is configured such that the radiation pipe can be immersed in the conductive treatment liquid. 5 is a vertical cross-sectional view of the substrate processing tank. In FIG. 5, reference numeral 1 is a substrate, 2 is a substrate accommodating cassette, 3 is a substrate processing tank, 4 is a processing liquid overflow tank, 6 is a processing liquid supply nozzle, Reference numeral 7 is a processing liquid circulation path.

[0003]

[Problems to be solved by the device]

 Since the industrial heater has a structure in which the conductive treatment liquid 5 that has entered the insulating radiating pipe 11 is directly detected by the electrodes 12a and 13, it has the following drawbacks. I. In order to detect the invasion of the conductive treatment liquid 5 directly by the electrodes 12a and 13, it is premised that a considerable amount of the treatment liquid 5 is accumulated in the heat dissipation pipe 11, and it is detected after the heat dissipation pipe 11 is substantially damaged. Means to get. In other words, even if it can be detected, under the condition that the heat radiating pipe 11 is broken, the electric heating body 12 such as nichrome wire is dissolved in the treatment liquid 5, and the metal ions become pollutant particles and the entire treatment liquid in the treatment tank 3 is decomposed. Leading to pollution. B. Therefore, it is not possible to prevent damage to the radiating pipe due to the treatment liquid. C. Moreover, in order to dispose the electrode at the bottom of the heat dissipation tube 11, it is necessary to additionally form a liquid reservoir for detection and the like, and thus the cost is increased due to the sealing of the electrode. The present invention has been made in consideration of such circumstances, and it is a technical subject to solve the above problems (a) to (c).

[0004]

[Means for Solving the Problems]

 The present invention is configured as follows to solve the above problems. The industrial heater according to the present invention is configured by enclosing an electric heating element and a mist detector for detecting invasion of the surface treatment agent in the radiation tube in the radiation tube, and the mist detector is the surface of the insulating support. It is characterized in that at least a pair of strip conductive films are arranged close to each other.

[0005]

[Work]

 Since the mist detector is enclosed in the industrial heater of the present invention, the mist can be detected. That is, even when the radiating pipe 11 is eroded in a pinhole shape, the treatment agent mist can be detected. This makes it possible to detect erosion of the radiating pipe 11 by the surface treatment agent at an early stage and prevent damage to the radiating pipe 11 in advance.

[0006]

【Example】

 Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. FIG. 1 is a plan view showing an embodiment of a mist detector used in an industrial heater of the present invention. The detector 13 is formed by depositing a pair of conductive films 15 having a comb-shaped striation on the surface of an insulating electrode support 14. Each conductive film 15 is composed of a terminal connecting portion 15a formed on one end side and a comb-shaped striation portion 15b formed on the other end side, and each comb-shaped striation portion of the pair of conductive films 15 ・ 15. 15b are alternately meshed with each other and are arranged close to each other. A conductivity detecting means such as an ammeter or an insulation resistance meter is connected to the pair of terminal connecting portions 15a, 15a.

The electrode support 14 is made of a ceramic material or glass fiber hardened with an epoxy resin, and the conductive film 15 is made of copper (Cu) or chromium (Cr). The line width of the comb tooth-shaped line portion 15b is set to about 50 μm to 200 μm, and the interval is set to about 50 μm to 200 μm. By the way, when the line width and the interval are approximately 200 μm, it is possible to detect conductivity even when a person's breath is blown.

FIG. 2 is a longitudinal sectional view showing a first embodiment of the industrial heater according to the present invention. This industrial heater 10 is formed by enclosing an electric heating body 12 made of a nichrome wire and the above-mentioned detector 13 in a substantially L-shaped radiating pipe 11, and conducting detection means such as a detector 13 and an insulation resistance detector. 18 is used to detect the conductivity of the detector 13. That is, when the heat discharge tube 11 is eroded by the surface treatment agent (for example, HF, NH ₄ OH, HCL, pure water) 5 and the treatment agent enters from there, the treatment agent mist can be detected. However, the processing agent mist can be detected by disposing the detector 13 at an arbitrary position in the heat dissipation pipe 11. The terminal of the conductivity detecting means 18 is connected to one terminal connecting portion 15a of the detector 13, and the terminal of the electric heating body 12 is connected to the other terminal connecting portion 15a.

Here, as the heat radiating tube 11, in addition to a quartz tube, one made of stainless steel / titanium, or one made of a fluorine-based resin or ceramic material having corrosion resistance, heat resistance, and insulation is used. Further, if the electric heating body 12 and the detector 13 are sealed in a vacuum, even if a small amount of the processing agent 5 enters, the vapor becomes supersaturated by the heating of the heater 12, and the conductivity of the detector 13 can be easily detected. There are advantages. Further, the output signal from the detection means 18 can be used to turn off the electric heating element 12, activate an alarm buzzer, or stop the surface treatment apparatus itself if necessary.

FIG. 3 is a vertical sectional view showing a second embodiment of the industrial heater according to the present invention. This embodiment is different from the first embodiment in that each terminal of the detecting means 18 is connected to both of the terminal connecting portions 15a, 15a, and other points are the same as in FIG. ing.

FIG. 4 is a longitudinal sectional view showing a third embodiment of the industrial heater according to the present invention. This embodiment is different from the above-mentioned first embodiment in that the heat radiating pipe 11 is a straight pipe type and is fixed to the tank wall 3 in a penetrating manner, and other points are the same as those in FIG. ing. Incidentally, reference numeral 16 in FIG. 4 is a flange for fixing the heat radiation pipe.

The mist detector used in the industrial heater of the present invention is not limited to the above-described embodiment, but a spiral conductive film having a spiral shape may be formed on the surface of the electrode support 14. good. Also, it is not necessary to say that the shape and the like of the heat radiating pipe according to the present invention are not limited to the above-mentioned embodiment and can be appropriately modified and carried out.

[0013]

[Effect of the device]

 According to the present invention, as described above, since at least a pair of strip conductive films are arranged close to each other on the surface of the electrode support, the following effects can be obtained. I. Even if pinhole-like erosion occurs in the heat radiating pipe, erosion of the heat radiating pipe can be detected early and damage to the heat radiating pipe can be prevented. B. Since it is possible to prevent damage to the heat dissipation pipe, it is possible to avoid contamination of the entire processing agent in the processing tank. C. Moreover, the detector can be placed anywhere in the heat dissipation pipe to detect the processing agent mist, so there is no need to additionally form a detection liquid reservoir etc. as in the conventional example, and the high cost as in the conventional example. The problem of can be solved.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of a mist detector used in the present invention.

FIG. 2 is a longitudinal sectional view showing a first embodiment of the industrial heater according to the present invention.

FIG. 3 is a longitudinal sectional view showing a second embodiment of the industrial heater according to the present invention.

FIG. 4 is a longitudinal sectional view showing a third embodiment of the industrial heater according to the present invention.

FIG. 5 is a vertical sectional view of a substrate processing bath.

FIG. 6 is a vertical cross-sectional view of an industrial heater according to a conventional example.

[Explanation of symbols]

5 ... Treatment agent (treatment liquid), 10 ... Industrial heater, 11 ... Radiant pipe, 12 ... Electric heating element,
13 ... Mist detector, 14 ... Insulating electrode support, 15 ... Conductive film, 15b ... Striation conductive film (comb-shaped striation portion).

Claims (1)

[Scope of utility model registration request] 1. An insulative heat radiation tube is provided with an electric heating element and a mist detector for detecting the intrusion of a treatment agent into the heat radiation tube. An industrial heater, characterized in that it is configured such that the striped conductive films are arranged close to each other.