JPH05151518A - Magnetic head and production thereof - Google Patents
Magnetic head and production thereofInfo
- Publication number
- JPH05151518A JPH05151518A JP31672091A JP31672091A JPH05151518A JP H05151518 A JPH05151518 A JP H05151518A JP 31672091 A JP31672091 A JP 31672091A JP 31672091 A JP31672091 A JP 31672091A JP H05151518 A JPH05151518 A JP H05151518A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- winding window
- metal magnetic
- material layer
- winding
- Prior art date
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気ヘッド及びその製造
方法に関し、詳しくは高飽和磁束密度を有する金属磁性
体層を非磁性基板で挟み込んだ構造の積層型高密度記録
用磁気ヘッド及びその製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head and a method of manufacturing the same, and more particularly, to a laminated high-density recording magnetic head having a structure in which a metal magnetic layer having a high saturation magnetic flux density is sandwiched between nonmagnetic substrates and a method of manufacturing the same. It is about the method.
【0002】[0002]
【従来の技術】VTR装置やFDD装置等の磁気記録再
生装置に使用される磁気ヘッドには高密度記録を実現し
たものとして積層型のものがあり、その一例を図4を参
照して次に説明する。上記磁気ヘッド(1)は、センダ
ストからなる高飽和磁束密度の金属磁性体層(2)
(2)をそれぞれセラミック等の非磁性基板(3)
(3)で挟み込んでなる一対の第1、第2コア(4)
(5)を、金属磁性体層(2)(2)を対向させてガラ
ス溶着にて接合一体化したものである。そして、その頂
端面(6)に磁気キャップ(g)(ギャップ長0.3〜
0.5μm)を形成すると共に、磁気ギャップ(g)の
下方に金属磁性体層(2)(2)及び非磁性基板(3)
(3)に直交する貫通孔を穿設して巻線窓(7)を形成
し、第1、第2コア(4)(5)のそれぞれに巻線
(8)を巻装する。2. Description of the Related Art A magnetic head used in a magnetic recording / reproducing device such as a VTR device or an FDD device is of a laminated type for realizing high density recording. An example of the magnetic head is shown in FIG. explain. The magnetic head (1) comprises a metallic magnetic layer (2) made of sendust and having a high saturation magnetic flux density.
(2) are non-magnetic substrates such as ceramics (3)
A pair of first and second cores (4) sandwiched by (3)
The metal magnetic material layers (2) and (2) are opposed to each other and integrated (5) by glass welding. Then, a magnetic cap (g) (gap length 0.3 to
0.5 μm) and the metal magnetic layers (2) and (2) and the non-magnetic substrate (3) below the magnetic gap (g).
A through hole orthogonal to (3) is formed to form a winding window (7), and a winding (8) is wound around each of the first and second cores (4) and (5).
【0003】上記積層型磁気ヘッド(1)を製造するに
際しては、まず図5(a)に示すチタン酸カルシウム
(CaTiO3)からなる直方体状非磁性基板(3)の
接合面に、図5(b)に示すように、金属磁性体層(セ
ンダスト)(2)をスパッタリングや蒸着等にて5或い
は12μmの厚さ(磁気ギャップのトラック幅に相当す
る。)に被着形成する。次に、図5(c)に示すよう
に、複数の非磁性基板(3)…を金属磁性体層(2)を
挟んで積層して500〜600°Cにてガラス溶着した
後、図の鎖線にて長手方向に2等分割して第1、第2コ
アブロック(9)(10)を形成する。そこで、図5
(d)(e)に示すように、各コアブロック(9)(1
0)の接合面にそれぞれ巻線窓用溝部(7a)(7b)
を穿設し、更に図5(f)に示すように、溝部(7a)
(7b)を突き合わせてガラス溶着して一体化し、ヘッ
ドブロック(11)を形成する。そして、それを鎖線毎
に切断して所定形状に成形し、且つ、頂端面(6)を全
面研磨すると、磁気ヘッド(1)を得る。[0003] In the production of the laminated magnetic head (1), first the joint surface of FIG. 5 rectangular parallelepiped nonmagnetic substrate made of calcium titanate (CaTiO 3) shown in (a) (3), 5 ( As shown in b), a metal magnetic layer (sendust) (2) is deposited by sputtering, vapor deposition or the like to a thickness of 5 or 12 μm (corresponding to the track width of the magnetic gap). Next, as shown in FIG. 5 (c), a plurality of non-magnetic substrates (3) are laminated with the metal magnetic layer (2) sandwiched between them and glass-welded at 500 to 600 ° C. The first and second core blocks (9) and (10) are formed by halving them in the longitudinal direction along the chain line. Therefore, FIG.
As shown in (d) and (e), each core block (9) (1
The groove portions (7a) and (7b) for the winding windows are respectively formed on the joint surfaces of (0).
And the groove (7a) as shown in FIG. 5 (f).
The head block (11) is formed by abutting (7b) and fusing together with glass. Then, the magnetic head (1) is obtained by cutting each chain line into a predetermined shape and polishing the entire top surface (6).
【0004】[0004]
【発明が解決しようとする課題】解決しようとする課題
は、磁気ヘッド(1)の製造の際、第1、第2コアブロ
ック(9)(10)の接合面における非磁性基板(3)
を金属磁性体層(2)も含めて回転ブレード等にて機械
的に直接、切削加工して巻線窓用溝部(7a)(7b)
を穿設しているため、切削加工面、即ち、溝部(7a)
(7b)の表面に数μmの深さまで加工歪み(加工ダメ
ージ)が残留する点である。この場合、ハードディスク
やVTRでは、磁気ギャップ深さは5〜20μm程度で
あるため、重要な磁路である巻線窓周囲の特にギャップ
近傍まで加工歪みが及んで透磁率が低下すると共に、ヘ
ッドの記録再生特性が劣化する。The problem to be solved is the non-magnetic substrate (3) at the joint surface of the first and second core blocks (9) and (10) during the manufacture of the magnetic head (1).
And the metal magnetic material layer (2) are mechanically directly cut by a rotating blade or the like to form the winding window groove portions (7a) and (7b)
Since it is drilled, the cut surface, that is, the groove (7a)
This is the point that processing strain (processing damage) remains on the surface of (7b) up to a depth of several μm. In this case, in a hard disk or a VTR, since the magnetic gap depth is about 5 to 20 μm, the processing strain extends to the vicinity of the winding window, which is an important magnetic path, especially near the gap, and the magnetic permeability decreases, and at the same time, the magnetic permeability of the head decreases. Recording / reproducing characteristics deteriorate.
【0005】[0005]
【課題を解決するための手段】本発明は、磁気ヘッドと
して、高飽和磁束密度を有する金属磁性体層を非磁性基
板で挟み込んでなるコアを、一対、上記金属磁性体層を
対向させて接合一体化し、その頂端面に磁気キャップを
形成すると共に、磁気ギャップ下方に金属磁性体層の第
1巻線窓及び非磁性基板の第2巻線窓を形成したものに
おいて、上記第1巻線窓の形状を第2巻線窓の形状より
も一回り大きく形成したことを特徴とし、According to the present invention, as a magnetic head, a pair of cores formed by sandwiching a metal magnetic material layer having a high saturation magnetic flux density between nonmagnetic substrates are joined together with the metal magnetic material layers facing each other. The first winding window in which the first winding window of the metal magnetic material layer and the second winding window of the non-magnetic substrate are formed under the magnetic gap, while integrally forming a magnetic cap on the top surface thereof. Is formed to be slightly larger than the shape of the second winding window,
【0006】又、その製造方法として、非磁性基板の表
面に高飽和磁束密度を有する金属磁性体層を被着形成し
て、その表面中央部における金属磁性体層を、非磁性基
板の第2巻線窓よりも一回り大きい形状に金属磁性体層
を劣化させない方法で例えば化学的エッチング等によっ
てくりぬき・除去して金属磁性体層の第1巻線窓を形成
する工程と、多数の上記非磁性基板を上記金属磁性体層
を挟んで積層して接合一体化した後、上記金属磁性体層
に直交すると共に、第1巻線窓を含む面にて2分割して
第1、第2コアブロックを形成する工程と、第1、第2
コアブロックの一方又は両方に溝部を穿設して非磁性基
板の第2巻線窓を形成する工程と、上記第1、第2コア
ブロックを各巻線窓を突き合わせて接合し、ヘッドブロ
ックを形成する工程と、上記ヘッドブロックを所定形状
に切削・成形して磁気ヘッドを形成する工程とを含むこ
とを特徴とする。As a manufacturing method thereof, a metal magnetic material layer having a high saturation magnetic flux density is deposited on the surface of the non-magnetic substrate, and the metal magnetic material layer at the center of the surface is formed on the non-magnetic substrate as a second layer. A step of forming the first winding window of the metal magnetic layer by hollowing and removing it by, for example, chemical etching or the like by a method that does not deteriorate the metal magnetic layer to a shape slightly larger than the winding window, and After the magnetic substrates are laminated with the metal magnetic layer sandwiched therebetween and bonded and integrated, the magnetic substrate is orthogonal to the metal magnetic layer and is divided into two in a plane including the first winding window to form first and second cores. Step of forming block, first and second
Forming a second winding window of a non-magnetic substrate by forming a groove in one or both of the core blocks, and joining the first and second core blocks by abutting the winding windows to form a head block. And a step of cutting and molding the head block into a predetermined shape to form a magnetic head.
【0007】[0007]
【作用】上記技術的手段によれば、金属磁性体層を劣化
させない方法で第1の卷線窓を形成でき、又、第2の卷
線窓を形成する際には、金属磁性体層には、機械的切削
加工が加えられないため、加工歪みを金属磁性体層に残
留させることなく卷線窓の加工が可能となる。According to the above technical means, the first winding window can be formed by a method that does not deteriorate the metal magnetic layer, and when the second winding window is formed, the first winding window is formed on the metal magnetic layer. Since the mechanical cutting process is not applied, it is possible to process the winding window without leaving machining strain in the metal magnetic layer.
【0008】[0008]
【実施例】本発明に係る磁気ヘッド及びその製造方法の
実施例を図1乃至図3を参照して以下に説明する。まず
図1及び図2は本発明に係る磁気ヘッド(12)の要部
分解斜視図と要部拡大正面図を示し、図4に示す部分と
同一部分には同一参照符号を付してその説明を省略す
る。相違する点は巻線窓(13)の形状で、金属磁性体
層(2)に設けた第1巻線窓(13a)の形状を、非磁
性基板(3)に設けた第2巻線窓(13b)の形状に対
し一回り大きく形成したことである。Embodiments of a magnetic head and a method of manufacturing the same according to the present invention will be described below with reference to FIGS. First, FIG. 1 and FIG. 2 show an exploded perspective view and an enlarged front view of an essential part of a magnetic head (12) according to the present invention, and the same parts as those shown in FIG. Is omitted. The difference is the shape of the winding window (13). The shape of the first winding window (13a) provided on the metal magnetic layer (2) is the same as the shape of the second winding window provided on the non-magnetic substrate (3). It is formed to be slightly larger than the shape of (13b).
【0009】即ち、磁気ヘッド(12)の製造におい
て、図3に示すように、非磁性基板(3)に金属磁性体
層(2)をスパッタリング等にて被着形成(図5(b)
に対応)する際、その表面の略中央部における金属磁性
体層(2)を、予めマスキング法にて非磁性基板(3)
の第2巻線窓(13b)よりも一回り大きい形状に一定
ピッチでくりぬき・除去して第1巻線窓(13a)…を
形成しておく。或いは、金属磁性体層(2)の被着形成
後、化学的、或いはイオンビーム等を用いて物理的にエ
ッチングにて同様に第1巻線窓(13a)…を形成す
る。これらは、金属磁性体層に加工歪みを殆ど残留させ
ない。次に、図5(c)に示す従来工程と同様、複数の
非磁性基板(3)…を金属磁性体層(2)…を挟んで積
層してガラス溶着した後、図の鎖線にて長手方向に2等
分割して第1、第2コアブロック(9)(10)を形成
する。そこで、図5(d)(e)に示す従来工程と同様
に、各コアブロック(9)(10)の接合面に、第2巻
線窓(13b)になる溝部(13c)(13d)(図5
(d)(e)の溝部(7a)(7b)に対応)を形成す
る際、回転ブレード等による機械的切削加工にて穿設す
ると、第1巻線窓(13a)は第2巻線窓(13b)よ
りも一回り大きいため、加工歪みが第1巻線窓(13
a)まで及ばず、金属磁性体層(2)に加工歪みが残留
しない。更に図5(f)に示す従来工程と同様に、上記
溝部(13c)(13d)を突き合わせてガラス溶着し
て一体化し、ヘッドブロックを形成する。そして、それ
を図5(f)に示す鎖線毎に切断して所定形状に成形
し、且つ、頂端面(6)を全面研磨すると、磁気ヘッド
(12)を得る。That is, in the manufacture of the magnetic head (12), as shown in FIG. 3, the metallic magnetic layer (2) is deposited on the non-magnetic substrate (3) by sputtering or the like (FIG. 5 (b)).
The metal magnetic layer (2) in the substantially central portion of the surface of the nonmagnetic substrate (3) by a masking method in advance.
Of the second winding window (13b) is hollowed out and removed at a constant pitch to form the first winding window (13a). Alternatively, after the deposition of the metal magnetic layer (2), the first winding windows (13a) are similarly formed chemically or physically by etching using an ion beam or the like. These hardly cause processing strain to remain in the metal magnetic layer. Next, as in the conventional process shown in FIG. 5C, a plurality of non-magnetic substrates (3) ... Are laminated with the metal magnetic layers (2) ... The first and second core blocks (9) and (10) are divided into two equal parts in the direction. Therefore, similar to the conventional process shown in FIGS. 5D and 5E, the groove portions (13c) (13d) (which become the second winding windows (13b) are formed on the joint surfaces of the core blocks (9) and (10). Figure 5
When the grooves (7a) and (7b) of (d) and (e) are formed), the first winding window (13a) becomes the second winding window when bored by mechanical cutting with a rotating blade or the like. Since it is slightly larger than that of (13b), processing strain is generated in the first winding window (13b).
Since it does not reach to a), processing strain does not remain in the metal magnetic layer (2). Further, similarly to the conventional process shown in FIG. 5 (f), the groove portions (13c) and (13d) are butted and glass-welded together to form a head block. Then, the magnetic head (12) is obtained by cutting it along each chain line shown in FIG. 5 (f) to form it into a predetermined shape and polishing the entire top end face (6).
【0010】[0010]
【発明の効果】本発明によれば、金属磁性体層を非磁性
基板で挟み込んでなるコアを、一対、金属磁性体層を対
向させて接合一体化し、その頂端面に磁気キャップを形
成すると共に、磁気ギャップ下方に金属磁性体層及び非
磁性基板に直交する貫通孔を穿設して金属磁性体層の第
1巻線窓及び非磁性体基板の第2巻線窓を形成した磁気
ヘッドにおいて、その製造時に予め第1巻線窓の形状を
第2巻線窓の形状よりも一回り大きく、且つ、残留歪み
のない状態で形成したから、第2巻線窓を切削加工する
際、その加工歪みが第1巻線窓まで及ばず、金属磁性体
層に加工歪みが残留しなくなって重要な磁路である巻線
窓周囲の特にギャップ近傍の透磁率の低下、及びヘッド
の記録再生特性の劣化を防止出来る。According to the present invention, a pair of cores in which a metal magnetic layer is sandwiched between non-magnetic substrates are joined and integrated with the metal magnetic layers facing each other, and a magnetic cap is formed on the top end face thereof. A magnetic head in which a first winding window of a metal magnetic material layer and a second winding window of a nonmagnetic material substrate are formed by forming a through hole perpendicular to the metal magnetic material layer and the nonmagnetic substrate below the magnetic gap. , The shape of the first winding window was made larger than the shape of the second winding window in advance at the time of its manufacture, and was formed without residual strain. Therefore, when cutting the second winding window, Since the processing strain does not reach the first winding window and the processing strain does not remain in the metal magnetic layer, the magnetic permeability is reduced around the winding window, which is an important magnetic path, especially in the vicinity of the gap, and the recording / reproducing characteristics of the head. Can be prevented.
【図1】本発明に係る磁気ヘッドの実施例を示す要部分
解斜視図である。FIG. 1 is an exploded perspective view of essential parts showing an embodiment of a magnetic head according to the present invention.
【図2】本発明に係る磁気ヘッドの実施例を示す要部拡
大正面図である。FIG. 2 is an enlarged front view of an essential part showing an embodiment of a magnetic head according to the present invention.
【図3】本発明に係る磁気ヘッドの製造方法の実施例を
示す要部の工程の斜視図である。FIG. 3 is a perspective view of a main process step showing an embodiment of a method of manufacturing a magnetic head according to the present invention.
【図4】従来の磁気ヘッドの一例を示す斜視図である。FIG. 4 is a perspective view showing an example of a conventional magnetic head.
【図5】(a)〜(f)は従来の磁気ヘッドの製造方法
の一例を示す各工程の斜視図である。5A to 5F are perspective views of respective steps showing an example of a conventional magnetic head manufacturing method.
2 金属磁性体層 3 非磁性基板 4 第1コア 5 第2コア 6 頂端面 13 巻線窓 13a 第1巻線窓 13b 第2巻線窓 g 磁気ギャップ 2 metal magnetic layer 3 non-magnetic substrate 4 first core 5 second core 6 top end face 13 winding window 13a first winding window 13b second winding window g magnetic gap
Claims (2)
非磁性基板で挟み込んでなるコアを、一対、上記金属磁
性体層を対向させて接合一体化し、その頂端面に磁気キ
ャップを形成すると共に、磁気ギャップ下方に金属磁性
体層の第1巻線窓及び非磁性基板の第2巻線窓を形成し
たものにおいて、 上記第1巻線窓の形状を第2巻線窓の形状よりも一回り
大きく形成したことを特徴とする磁気ヘッド。1. A pair of cores, which are formed by sandwiching a metal magnetic layer having a high saturation magnetic flux density between nonmagnetic substrates, are joined and integrated with the metal magnetic layers facing each other, and a magnetic cap is formed on the top end face thereof. In addition, in the case where the first winding window of the metal magnetic layer and the second winding window of the non-magnetic substrate are formed below the magnetic gap, the shape of the first winding window is larger than that of the second winding window. A magnetic head characterized by being formed slightly larger.
する金属磁性体層を被着形成して、その表面中央部にお
ける金属磁性体層を、非磁性基板の第2巻線窓よりも一
回り大きい形状にくりぬき・除去して金属磁性体層の第
1巻線窓を形成する工程と、多数の上記非磁性基板を上
記金属磁性体層を挟んで積層して接合一体化した後、上
記金属磁性体層に直交すると共に、第1巻線窓を含む面
にて2分割して第1、第2コアブロックを形成する工程
と、第1、第2コアブロックの一方又は両方に溝部を穿
設して第2巻線窓を形成する工程と、上記第1、第2コ
アブロックを各巻線窓を突き合わせて接合し、ヘッドブ
ロックを形成する工程と、上記ヘッドブロックを所定形
状に切削・成形して磁気ヘッドを形成する工程とを含む
ことを特徴とする磁気ヘッドの製造方法。2. A metal magnetic material layer having a high saturation magnetic flux density is deposited on the surface of the non-magnetic substrate, and the metal magnetic material layer in the center portion of the surface is formed more than the second winding window of the non-magnetic substrate. After a step of hollowing and removing the metal magnetic material layer to form a first winding window having a size larger than that of the metal magnetic material layer, and laminating a large number of the non-magnetic substrates with the metal magnetic material layer sandwiched therebetween, and joining and integrating them, A step of forming a first core block and a second core block by dividing the surface in a plane including the first winding window while being orthogonal to the metal magnetic layer, and a groove portion in one or both of the first and second core blocks. To form a second winding window, to form a head block by joining the first and second core blocks by abutting the respective winding windows, and cutting the head block into a predetermined shape. .Magnetization characterized by including a step of forming to form a magnetic head Qi head manufacturing method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31672091A JPH05151518A (en) | 1991-11-29 | 1991-11-29 | Magnetic head and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31672091A JPH05151518A (en) | 1991-11-29 | 1991-11-29 | Magnetic head and production thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05151518A true JPH05151518A (en) | 1993-06-18 |
Family
ID=18080155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31672091A Pending JPH05151518A (en) | 1991-11-29 | 1991-11-29 | Magnetic head and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05151518A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3800497A1 (en) | 2016-08-22 | 2021-04-07 | Magic Leap, Inc. | Multi-layer diffractive eyepiece |
-
1991
- 1991-11-29 JP JP31672091A patent/JPH05151518A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3800497A1 (en) | 2016-08-22 | 2021-04-07 | Magic Leap, Inc. | Multi-layer diffractive eyepiece |
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