JPH0489620A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH0489620A JPH0489620A JP20071290A JP20071290A JPH0489620A JP H0489620 A JPH0489620 A JP H0489620A JP 20071290 A JP20071290 A JP 20071290A JP 20071290 A JP20071290 A JP 20071290A JP H0489620 A JPH0489620 A JP H0489620A
- Authority
- JP
- Japan
- Prior art keywords
- film layer
- thin film
- thin
- alloy thin
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010409 thin film Substances 0.000 claims abstract description 59
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 abstract description 15
- 238000010438 heat treatment Methods 0.000 abstract description 13
- 239000010408 film Substances 0.000 abstract description 8
- 230000001681 protective effect Effects 0.000 abstract description 6
- 229910018134 Al-Mg Inorganic materials 0.000 abstract description 4
- 229910018467 Al—Mg Inorganic materials 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract description 3
- 229910018104 Ni-P Inorganic materials 0.000 abstract 1
- 229910018536 Ni—P Inorganic materials 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- IUVCFHHAEHNCFT-INIZCTEOSA-N 2-[(1s)-1-[4-amino-3-(3-fluoro-4-propan-2-yloxyphenyl)pyrazolo[3,4-d]pyrimidin-1-yl]ethyl]-6-fluoro-3-(3-fluorophenyl)chromen-4-one Chemical compound C1=C(F)C(OC(C)C)=CC=C1C(C1=C(N)N=CN=C11)=NN1[C@@H](C)C1=C(C=2C=C(F)C=CC=2)C(=O)C2=CC(F)=CC=C2O1 IUVCFHHAEHNCFT-INIZCTEOSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は磁気記録媒体の製造方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method of manufacturing a magnetic recording medium.
［従来の技術］
従来、磁気記録媒体としては、 ＮｉＰ等の下地硬化層
を設けたＡｌ−Ｍｇ基板または直接Ａｌ−Ｍｇ基板上に
酸化鉄などの針状粒子を樹脂バインダー中に分散させた
ものを磁気記録層として形成させたものが主流であった
。しかし、近年の情報の高密度記録化の要求から、湿式
メツキ、真空蒸着、スパッタリング等の薄膜形成法によ
り形成された強磁性薄膜層を磁気記録層とする磁気記録
媒体が精力的に研究開発されており、中でもスパッタリ
ング法により作製される磁気記録媒体が高密度特性およ
び量産性に優れるもので今後の磁気記録媒体の主流にな
るものと考えられている。[Prior Art] Conventionally, magnetic recording media have been made by dispersing acicular particles such as iron oxide in a resin binder on an Al-Mg substrate with a hardened base layer such as NiP or directly on an Al-Mg substrate. The mainstream was to form it as a magnetic recording layer. However, due to the recent demand for high-density recording of information, magnetic recording media whose magnetic recording layer is a ferromagnetic thin film layer formed by thin film forming methods such as wet plating, vacuum evaporation, and sputtering have been actively researched and developed. Among these, magnetic recording media manufactured by sputtering are considered to be the mainstream of magnetic recording media in the future because of their excellent high-density characteristics and mass productivity.
［発明が解決しようとする課］
しかし、このスパッタリング法により作製される磁気記
録媒体（以下、メタルスパッタ媒体と略す。）は一般に
、ＮｉＰ下地硬化層を設けたＡｌ−Ｍｇ基板」二にＣｒ
薄膜、Ｇｏ合金薄膜、保護膜を順次形成することにより
得られるが、この磁気特性および電磁変換特性は、Ｃｒ
薄膜層およびＣｏ合金薄膜層の膜厚およびこれらを形成
する際の条件（基板温度、スパッタガス圧等）に強く依
存しており、基板温度の影響を見ても、例えば、刊行物
（昭和６３年電子通信学会研究会資料ＭＲａ８−２）に
おいて報告されているように、基板温度を高めることに
より磁気特性（特に保磁力）は向上し、高密度記録時の
再生信号は大きくなるものの、媒体ノイズも増加するた
め、Ｓ／Ｎ比（信号強度と雑音との比）で見る限りにお
いては、磁気特性の向上から期待されるほどの改善がみ
られないという課題がある。この媒体ノイズは磁気記録
層である００合金薄膜の結晶構造（結晶粒径、結晶粒間
の孤立性等）に強く依存しており、例えば刊行物（ＩＥ
ＥＥ Ｔｒａｎｓ。[Problem to be solved by the invention] However, magnetic recording media (hereinafter abbreviated as metal sputtering media) produced by this sputtering method are generally made of an Al-Mg substrate with a hardened NiP underlayer.
It is obtained by sequentially forming a thin film, a Go alloy thin film, and a protective film, but the magnetic properties and electromagnetic conversion properties are different from those of Cr.
It strongly depends on the thickness of the thin film layer and the Co alloy thin film layer and the conditions for forming them (substrate temperature, sputtering gas pressure, etc.). As reported in the Institute of Electronics and Communication Engineers Research Group Material MRa8-2), increasing the substrate temperature improves the magnetic properties (especially coercive force) and increases the reproduction signal during high-density recording, but the media noise Therefore, as far as the S/N ratio (ratio of signal strength to noise) is concerned, there is a problem that the improvement expected from the improvement in magnetic properties is not observed. This medium noise strongly depends on the crystal structure (crystal grain size, isolation between crystal grains, etc.) of the 00 alloy thin film that is the magnetic recording layer.
EE Trans.
阿ｏｇｎ、ＭＡＧ−２５，Ｐ３８６９−３８７１１９８
９年刊）において、結晶粒間に働く相互作用の大きさを
低減させることにより、媒体ノイズが低減することが報
告されている。結晶粒間に働く相互作用の大きさを低減
させるためには、結晶粒間の孤立性を増すことが必要で
あり、そのためには、結晶粒界に非磁性材を偏析させて
やることが必要である。結晶粒界に非磁性材を偏析させ
る方法として、例えば成膜時のスパッタガス圧を高くす
る等があるが、それも限界があり、より結晶粒間の孤立
性を増し、媒体ノイズを低減させるにも限界があった。Aogn, MAG-25, P3869-3871198
It has been reported in 1999) that media noise can be reduced by reducing the magnitude of the interaction between crystal grains. In order to reduce the magnitude of the interaction between crystal grains, it is necessary to increase the isolation between the crystal grains, and to do this, it is necessary to segregate non-magnetic materials at the grain boundaries. It is. There are methods to segregate non-magnetic materials at grain boundaries, such as increasing the sputtering gas pressure during film formation, but this also has its limits, and it is necessary to increase isolation between grains and reduce media noise. There were also limits.
この発明はかかる課題を解決するためになされたもので
、媒体ノイズを低減できると共に、Ｓ／Ｎ比を向上でき
る磁気記録媒体の製造方法を得ることを目的とする。The present invention has been made to solve these problems, and an object of the present invention is to provide a method for manufacturing a magnetic recording medium that can reduce media noise and improve the S/N ratio.
［課題を解決するための手段］
この発明の磁気記録媒体の製造方法は、非磁性体基材に
第１Ｃｒ薄膜層を設け、この第１ｃｒ薄膜層にＣｏ合金
薄膜層を設け、このＣｏ合金薄膜層に第２Ｃｒ薄膜層を
設けて、１５０℃以上で熱処理するものである。[Means for Solving the Problems] The method for manufacturing a magnetic recording medium of the present invention includes providing a first Cr thin film layer on a non-magnetic base material, providing a Co alloy thin film layer on the first Cr thin film layer, and forming the Co alloy thin film on the first Cr thin film layer. A second Cr thin film layer is provided on the layer and heat treated at 150° C. or higher.
［作用コ
特許請求の範囲に示した方法により、非磁性材のＣｒが
Ｃｏ合金薄膜層に拡散し、しかもＣｏ合金の結晶粒界に
偏析するので、媒体ノイズが小さくなり、Ｓ／Ｎ比が向
上する。[Operation] By the method shown in the claims, Cr, which is a non-magnetic material, diffuses into the Co alloy thin film layer and segregates at the grain boundaries of the Co alloy, so that the medium noise is reduced and the S/N ratio is increased. improves.
［実施例］
図面は、この発明の一実施例に係わる熱処理前の積層状
態を示す断面図であり、図において（１）はＡｌＭｇ基
板、（２）はＮ１−Ｐ下地硬化層で、Ａｌ−Ｍｇ基板（
１）およびＮ１−Ｐ下地硬化層（２）で非磁性体基材（
１０）を構成し、（３）は第１Ｃｒ薄膜層、（４）はＣ
ｏ合金薄膜層、（５）は第２Ｃｒ薄膜層、（６）は保護
膜層である。[Example] The drawing is a cross-sectional view showing a laminated state before heat treatment according to an example of the present invention. In the drawing, (1) is an AlMg substrate, (2) is an N1-P base hardening layer, and Mg substrate (
1) and N1-P base hardening layer (2) to form a non-magnetic base material (
10), (3) is the first Cr thin film layer, and (4) is the C
o alloy thin film layer, (5) is a second Cr thin film layer, and (6) is a protective film layer.
即ち、この発明の一実施例の磁気記録媒体の製造方法に
おいて、図面のように積層した後、１５０℃以上で熱処
理する。即ち、Ｃｒ薄膜層がＣｏ合金薄膜層に拡散する
ようにしたもので、Ｃｏ合金薄膜層の粒子が非磁性材の
Ｃｒにより、その孤立性が高められるため、媒体ノイズ
が減少し高いＳ／Ｎ比が得られるのである。That is, in a method for manufacturing a magnetic recording medium according to an embodiment of the present invention, after laminating layers as shown in the drawings, heat treatment is performed at 150° C. or higher. That is, the Cr thin film layer is made to diffuse into the Co alloy thin film layer, and since the particles of the Co alloy thin film layer are isolated by the non-magnetic Cr, the media noise is reduced and the S/N is high. The ratio is obtained.
なお、この発明に係わる第１Ｃｒ薄膜層の膜厚は、５０
０〜３０００人が望ましく、その範囲以外では００合金
薄膜層の結晶性のコントロールが困難になる。The thickness of the first Cr thin film layer according to the present invention is 50 mm.
The number is preferably 0 to 3,000, and outside that range it becomes difficult to control the crystallinity of the 00 alloy thin film layer.
また、この発明に係わる第２Ｃｒ薄膜層の膜厚は、１０
０Å以下が望ましく、それ以上では磁性層とヘッドとの
間隔が大きくなる。Further, the thickness of the second Cr thin film layer according to the present invention is 10
The distance is preferably 0 Å or less; if it is more than that, the distance between the magnetic layer and the head becomes large.
この発明に係わる熱処理温度は１５０℃以上であり、そ
れ以下では、Ｃｒの拡散が起こり難い、また熱処理は基
材の耐熱温度以下で行われるのが望ましく、上記この発
明の一実施例に用いたＮｉＰ下地硬化層を設けたＡｌ−
Ｍｇ基板では３００℃以下であるのが望ましい。The heat treatment temperature according to this invention is 150° C. or higher; at lower temperatures, diffusion of Cr is difficult to occur, and it is desirable that the heat treatment is performed at a temperature lower than the heat resistance temperature of the base material. Al- with NiP base hardening layer
For Mg substrates, the temperature is preferably 300°C or less.
それ以上では、ＮｉＰ下地硬化層が帯磁するのである。Above this, the hardened NiP underlayer becomes magnetized.
次に、この発明を実施例により具体的に説明するが、こ
れに限定されるものではない。Next, the present invention will be specifically explained with reference to examples, but the present invention is not limited thereto.
実施例
非磁性体基材としてＮｊＰ下地硬化層を設けたＡ１にｇ
基板にテクスチャ加工を施したものを用い、００合金薄
膜層としてＣｏｅ２．５Ｎｉ３ｅＣｒｖ、ｓａｔ％の組
成のＣ。Example A1 with a hardened NjP base layer as a non-magnetic base material
A textured substrate was used, and the 00 alloy thin film layer was Coe2.5Ni3eCrv, C with a sat% composition.
ＮｉＣｒを、保護膜としてカーボンを用い、各層をスパ
ッタリング法により形成した。第１Ｃｒ薄膜層の膜厚を
２０００人、ＣｏＮｉＣｒを５００人、第２Ｃｒ薄膜層
の膜厚を８０人、カーボン保護膜層を３２０人形成し、
その後、大気中にて２５０℃、１時間の熱処理を施し、
この発明の一実施例による磁気記録媒体を製造した。な
お、各層を形成する際の基板温度は２００℃、ガス圧は
全て１０ｍＴｏｒｒとした。Each layer of NiCr was formed by sputtering using carbon as a protective film. The thickness of the first Cr thin film layer was 2000, the thickness of CoNiCr was 500, the thickness of the second Cr thin film was 80, and the carbon protective film layer was 320.
After that, heat treatment was performed at 250°C for 1 hour in the atmosphere.
A magnetic recording medium according to an embodiment of the present invention was manufactured. Note that the substrate temperature when forming each layer was 200° C., and the gas pressure was all 10 mTorr.
比較例１
実施例１において、熱処理を行わない他は実施例１と同
様にして磁気記録媒体を製造した。Comparative Example 1 A magnetic recording medium was manufactured in the same manner as in Example 1 except that the heat treatment was not performed.
比較例２
実施例１において、００合金薄膜層に第２Ｃｒ薄膜層を
形成せず、直接カーボン保護膜を４００人形成する他は
、実施例１と同様にして磁気記録媒体を製造した。Comparative Example 2 A magnetic recording medium was manufactured in the same manner as in Example 1, except that the second Cr thin film layer was not formed on the 00 alloy thin film layer and a carbon protective film was directly formed by 400 people.
電磁変換特性測定
実施例、比較例１および比較例２で得られた磁気記録媒
体の電磁変換特性を測定した。電磁変換特性測定には薄
膜磁気ヘッドを用い、相対速度１２．１ｍ／ｓｅｅ。Electromagnetic Conversion Characteristic Measurement The electromagnetic conversion characteristics of the magnetic recording media obtained in Example, Comparative Example 1, and Comparative Example 2 were measured. A thin film magnetic head was used to measure the electromagnetic conversion characteristics at a relative speed of 12.1 m/see.
記録周波数８ＭＨｚ、ノイズ帯域２０ＭＨ２にて行った
。その結果を表に示す。The recording frequency was 8 MHz and the noise band was 20 MH2. The results are shown in the table.
表
表によると、実施例、比較例１および比較例２とも再生
出力はほぼ同じ値が得られている。一方、媒体ノイズに
関しては、実施例は、比較例１および比較例２に比べ低
い値を示しており、Ｓ／Ｎにおいて２ｄＢ以上の改善が
見られた。According to the table, almost the same reproduction output values were obtained in the example, comparative example 1, and comparative example 2. On the other hand, regarding the medium noise, the example showed a lower value than Comparative Example 1 and Comparative Example 2, and an improvement of 2 dB or more in S/N was observed.
即ち、この発明の一実施例による磁気記録媒体は、第２
Ｃｒ＠膜層を形成し熱処理を行うことにより、Ｃｏ合金
薄ｒｇ層にＣｒを拡散させるようにしたものであり、Ｃ
ｏ合金薄膜層の結晶粒界にＣｒを偏析させたもので、結
晶粒間に働く相互作用を小さくでき、媒体ノイズを低減
できる。また、比較例１から解るように、単に第２Ｃｒ
薄膜層を設けても熱処理を施さないとノイズ低減には効
果が見られず、比較例２から解るように、第２Ｃｒ薄膜
層を設けなければ、熱処理を施してもノイズ低減には効
果が見られなかった。That is, the magnetic recording medium according to an embodiment of the present invention has a second
By forming a Cr@ film layer and performing heat treatment, Cr is diffused into the Co alloy thin RG layer.
Cr is segregated at the grain boundaries of the o-alloy thin film layer, which can reduce interaction between grains and reduce media noise. In addition, as can be seen from Comparative Example 1, simply the second Cr
Even if a thin film layer is provided, no noise reduction effect is observed unless heat treatment is performed, and as can be seen from Comparative Example 2, no noise reduction effect is observed even if heat treatment is performed unless a second Cr thin film layer is provided. I couldn't.
なお、−上記実施例において、非磁性体基材としてＮｉ
Ｐ等の下地硬化層を設けた＾１−Ｍｇ基板にテクスチャ
加工を施したものを用い、Ｃｏ合金薄膜層としてｃｏ６
２５Ｎｉ３１ＩＣｒ７５ａｔ％の組成のＣｏＮｉＣｒを
用いた場合について説明したが、これに限らず他の非磁
性体基材および他のＣｏ合金薄膜を用いても同様の効果
を得ることができる。Note that - in the above examples, Ni was used as the non-magnetic base material.
A textured ^1-Mg substrate with a hardened base layer of P, etc. was used, and a Co6 alloy thin film layer was used.
Although a case has been described in which CoNiCr having a composition of 25Ni31ICr75 at% is used, the same effect can be obtained by using other non-magnetic base materials and other Co alloy thin films.
また、成膜時の基板温度、ガス圧等スパッタ条件も上記
実施例に限定されるものではなく、熱処理温度も１５０
℃以上であれば所期目的を達成することができる。Furthermore, the sputtering conditions such as the substrate temperature and gas pressure during film formation are not limited to the above examples, and the heat treatment temperature is also 150°C.
If the temperature is above ℃, the desired purpose can be achieved.
［発明の効果］
以上説明した通り、この発明は非磁性体基材に第１Ｃｒ
薄膜層を設け、この第１Ｃｒ薄膜層にＣｏ合金薄膜層を
設け、このＣｏ合金薄膜層に第２Ｃｒ薄膜層を設けて、
１５０℃以上で熱処理することにより、媒体ノイズを低
減できると共に、Ｓ／Ｎ比を向上できる磁気記録媒体の
製造方法を得ることができる。[Effects of the Invention] As explained above, the present invention has a non-magnetic base material containing 1Cr.
providing a thin film layer, providing a Co alloy thin film layer on the first Cr thin film layer, providing a second Cr thin film layer on the Co alloy thin film layer,
By performing the heat treatment at 150° C. or higher, it is possible to obtain a method for manufacturing a magnetic recording medium that can reduce medium noise and improve the S/N ratio.
図面は、この発明の一実施例に係わる熱処理前の積層状
態を示す断面図である。
図において（３）は第１Ｃｒ薄膜層、（４）はＣｏ合金
薄膜層、（５）は第２Ｃｒ薄膜層、（１０）は非磁性体
基材である。The drawing is a sectional view showing a stacked state before heat treatment according to an embodiment of the present invention. In the figure, (3) is the first Cr thin film layer, (4) is the Co alloy thin film layer, (5) is the second Cr thin film layer, and (10) is the nonmagnetic base material.
Claims (1)
膜層にＣｏ合金薄膜層を設け、このＣｏ合金薄膜層に第
２Ｃｒ薄膜層を設けて、１５０℃以上で熱処理する磁気
記録媒体の製造方法。A first Cr thin film layer is provided on a non-magnetic substrate, a Co alloy thin film layer is provided on the first Cr thin film layer, a second Cr thin film layer is provided on the Co alloy thin film layer, and the magnetic recording medium is heat-treated at 150° C. or higher. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20071290A JPH0489620A (en) | 1990-07-25 | 1990-07-25 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20071290A JPH0489620A (en) | 1990-07-25 | 1990-07-25 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0489620A true JPH0489620A (en) | 1992-03-23 |
Family
ID=16428966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20071290A Pending JPH0489620A (en) | 1990-07-25 | 1990-07-25 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0489620A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6740383B2 (en) | 1998-05-27 | 2004-05-25 | Fujitsu Limited | Magnetic recording medium possessing a ratio of Hc(perpendicular) to Hc(horizontal) that is not more than 0.22 and magnetic recording disk device |
| US7670696B2 (en) | 2007-05-01 | 2010-03-02 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording medium with patterned magnetic islands and nonmagnetic trenches and manufacturing method for suppressing surface diffusion of trench material |
-
1990
- 1990-07-25 JP JP20071290A patent/JPH0489620A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6740383B2 (en) | 1998-05-27 | 2004-05-25 | Fujitsu Limited | Magnetic recording medium possessing a ratio of Hc(perpendicular) to Hc(horizontal) that is not more than 0.22 and magnetic recording disk device |
| US7670696B2 (en) | 2007-05-01 | 2010-03-02 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording medium with patterned magnetic islands and nonmagnetic trenches and manufacturing method for suppressing surface diffusion of trench material |
| US7846565B2 (en) | 2007-05-01 | 2010-12-07 | Hitachi Golbal Storage Technologies Netherlands B.V. | Perpendicular magnetic recording disk drive with patterned disk having capping layer for suppression of surface diffusion of trench material |
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