JPH0455347A - Method and device for applying oily resin solution - Google Patents
Method and device for applying oily resin solutionInfo
- Publication number
- JPH0455347A JPH0455347A JP16245090A JP16245090A JPH0455347A JP H0455347 A JPH0455347 A JP H0455347A JP 16245090 A JP16245090 A JP 16245090A JP 16245090 A JP16245090 A JP 16245090A JP H0455347 A JPH0455347 A JP H0455347A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating
- resin
- glass substrates
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 39
- 239000011347 resin Substances 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title description 10
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 239000011521 glass Substances 0.000 claims abstract description 32
- 238000000576 coating method Methods 0.000 claims description 55
- 239000011248 coating agent Substances 0.000 claims description 44
- 238000001035 drying Methods 0.000 abstract description 11
- 239000003973 paint Substances 0.000 abstract description 10
- 239000002904 solvent Substances 0.000 abstract description 8
- 239000011230 binding agent Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 125000000524 functional group Chemical group 0.000 abstract description 4
- 150000003839 salts Chemical class 0.000 abstract description 3
- 239000006185 dispersion Substances 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 15
- 239000010410 layer Substances 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 238000007667 floating Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- -1 amine compounds Chemical class 0.000 description 3
- 239000002270 dispersing agent Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 229920005749 polyurethane resin Polymers 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 239000002216 antistatic agent Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 239000006258 conductive agent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000003094 microcapsule Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 235000011007 phosphoric acid Nutrition 0.000 description 2
- 150000003014 phosphoric acid esters Chemical class 0.000 description 2
- 150000003016 phosphoric acids Chemical class 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- QMMJWQMCMRUYTG-UHFFFAOYSA-N 1,2,4,5-tetrachloro-3-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=C(Cl)C(Cl)=CC(Cl)=C1Cl QMMJWQMCMRUYTG-UHFFFAOYSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OSNILPMOSNGHLC-UHFFFAOYSA-N 1-[4-methoxy-3-(piperidin-1-ylmethyl)phenyl]ethanone Chemical compound COC1=CC=C(C(C)=O)C=C1CN1CCCCC1 OSNILPMOSNGHLC-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- HXDLWJWIAHWIKI-UHFFFAOYSA-N 2-hydroxyethyl acetate Chemical compound CC(=O)OCCO HXDLWJWIAHWIKI-UHFFFAOYSA-N 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- 102100038495 Bile acid receptor Human genes 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004986 Cholesteric liquid crystals (ChLC) Substances 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- CTKINSOISVBQLD-UHFFFAOYSA-N Glycidol Chemical compound OCC1CO1 CTKINSOISVBQLD-UHFFFAOYSA-N 0.000 description 1
- 101000603876 Homo sapiens Bile acid receptor Proteins 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004990 Smectic liquid crystal Substances 0.000 description 1
- ULUAUXLGCMPNKK-UHFFFAOYSA-N Sulfobutanedioic acid Chemical class OC(=O)CC(C(O)=O)S(O)(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical class ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- RNXZADVBNGOJOL-UHFFFAOYSA-N [Sb+]=O.[Sn+2]=O.[O-2].[Ti+4] Chemical class [Sb+]=O.[Sn+2]=O.[O-2].[Ti+4] RNXZADVBNGOJOL-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 150000008051 alkyl sulfates Chemical class 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 150000001414 amino alcohols Chemical class 0.000 description 1
- 239000002280 amphoteric surfactant Chemical group 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 235000012745 brilliant blue FCF Nutrition 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- PZTQVMXMKVTIRC-UHFFFAOYSA-L chembl2028348 Chemical compound [Ca+2].[O-]S(=O)(=O)C1=CC(C)=CC=C1N=NC1=C(O)C(C([O-])=O)=CC2=CC=CC=C12 PZTQVMXMKVTIRC-UHFFFAOYSA-L 0.000 description 1
- XOCUHWXGSSSCTJ-UHFFFAOYSA-N chembl3145171 Chemical compound O=C1C(N=NC=2C=CC=CC=2)=C(C)NN1C1=CC=CC=C1 XOCUHWXGSSSCTJ-UHFFFAOYSA-N 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 230000002844 continuous effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- VYXSBFYARXAAKO-UHFFFAOYSA-N ethyl 2-[3-(ethylamino)-6-ethylimino-2,7-dimethylxanthen-9-yl]benzoate;hydron;chloride Chemical compound [Cl-].C1=2C=C(C)C(NCC)=CC=2OC2=CC(=[NH+]CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 235000010187 litholrubine BK Nutrition 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- WMHSAFDEIXKKMV-UHFFFAOYSA-N oxoantimony;oxotin Chemical class [Sn]=O.[Sb]=O WMHSAFDEIXKKMV-UHFFFAOYSA-N 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 125000005496 phosphonium group Chemical group 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229920001483 poly(ethyl methacrylate) polymer Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 239000001397 quillaja saponaria molina bark Substances 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 229940043267 rhodamine b Drugs 0.000 description 1
- 229930182490 saponin Natural products 0.000 description 1
- 150000007949 saponins Chemical class 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical class NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium group Chemical group [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は親油性樹脂を含有する有機溶剤溶液の塗布に関
し、更に具体的には比較的速乾性、低粘度の有機溶剤溶
液のガラス基板への連続塗布に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to the application of an organic solvent solution containing a lipophilic resin, and more specifically to the application of a relatively quick-drying, low-viscosity organic solvent solution to a glass substrate. Concerning continuous application of.
比較的速乾性、低粘度の有機溶剤樹脂溶液をガラス等の
平面基板に塗布する方法としては、ディッピング塗布法
、ロール塗布法、スピンナー塗布法か使用され或はその
改善が提案(実開昭62−83573号、特開昭63−
107789号等)されている。Dipping coating, roll coating, and spinner coating methods are used as methods for applying comparatively quick-drying, low-viscosity organic solvent resin solutions to flat substrates such as glass, or improvements to these methods have been proposed (1983). -83573, JP-A-63-
No. 107789, etc.).
最も一般的に用いられるディッピング塗布法は、基板を
一旦塗布液の中に浸漬し所定速度で引上げ塗布する方法
であって、粘度及び引上げ速度の調節によって相当精度
高く膜厚の規制か可能である。The most commonly used dipping coating method is a method in which the substrate is once immersed in a coating solution and then pulled up and coated at a predetermined speed, making it possible to control the film thickness with considerable precision by adjusting the viscosity and pulling speed. .
しかし、本質的に片面或は部分塗布は困難であるし、ま
た無用に準備すべき塗布液量が多い等の欠点かある。However, it is essentially difficult to coat one side or partially, and there are disadvantages such as the amount of coating liquid that must be prepared unnecessarily.
またスピンナー法は回転する基板上に塗布液を供給し遠
心力で塗布液を均一厚みに流延拡張する方法であり、本
質的に非連続な方法であり、かつ塗布液の半分程度は基
板外に振飛ばす必要があり塗布液のロスが多過ぎるとい
う欠陥がある。In addition, the spinner method is a method in which a coating liquid is supplied onto a rotating substrate and the coating liquid is spread and spread to a uniform thickness using centrifugal force.It is essentially a discontinuous method, and about half of the coating liquid is outside the substrate. The disadvantage is that it is necessary to shake it off, resulting in too much loss of coating liquid.
またロール塗布法は、塗布液に塗布ロールの一部を浸漬
し塗布ロールの回転によってその表面に塗布液を所定厚
みに引上げ、ガラス基板に接触し塗布液を供給する方法
であるが、塗布液かガラス基板の先頭塗布部に薄(、後
尾に厚くなり膜厚の均一性に欠ける。In addition, the roll coating method is a method in which a part of the coating roll is immersed in the coating liquid, the coating liquid is pulled up to a predetermined thickness on the surface by rotation of the coating roll, and the coating liquid is supplied by contacting the glass substrate. The film is thin at the first coated part of the glass substrate, but thicker at the rear, resulting in a lack of uniformity in film thickness.
しかしながら前記のロール塗布法は連続塗布の可能性を
秘めており、生産技術的に注目すべき方法と思われる。However, the roll coating method described above has the possibility of continuous coating, and is considered to be a method worthy of attention from a production technology perspective.
尚温度によりゾル−ゲル状態変化を起す親水性のゼラチ
ン溶液については、古くには塗布液を塗布ナイフ上を流
下させ基板に供給し水平連続塗布するオーバフロー塗布
法の例があるか、ゾル−ゲル状態を示さぬ速乾性、低粘
度の有機溶剤樹脂溶液についての連続塗布の例は見当ら
ない。Regarding hydrophilic gelatin solutions that undergo a sol-gel state change depending on temperature, there is an example of an overflow coating method in which the coating solution is flowed down over a coating knife and supplied to the substrate for horizontal continuous coating. There are no examples of continuous coating of fast-drying, low-viscosity organic solvent resin solutions that do not exhibit conditions.
一方基板一枚毎に塗布液の供給、塗布、乾燥を施す工程
の構成では、生産効率か低いことは避けられず、しかも
塗布液ロスか多くしかも塗布均一性に欠ける従来の方法
には大きな問題かあると言える。On the other hand, with a process configuration that supplies, coats, and dries the coating liquid for each substrate, it is inevitable that the production efficiency will be low.In addition, the conventional method suffers from a large amount of coating liquid loss and lacks coating uniformity, which is a major problem. I can say that there is.
本発明の目的は、方形に整えられたガラス基板への油性
樹脂溶媒溶液の塗布において、塗布膜厚か均一で、液ロ
スか少く、生産効率の高い塗布方法及び装置を提供する
ことにある。An object of the present invention is to provide a coating method and apparatus that has a uniform coating thickness, little liquid loss, and high production efficiency in coating an oil-based resin solvent solution onto a rectangular glass substrate.
前記本発明の目的は
(11方形のガラス基板相互の等辺を密に接合し、空気
圧で浮上させて同一平面に配列保持したガラス基板列に
、その最後尾の基板に搬送力を加え、水平に搬送しなが
ら連続的に油性樹脂溶液を塗布することを特徴とする塗
布方法及び
(2)前記油性樹脂溶液のガラス基板への水平連続塗布
装置が、少くとも塗布ヘッド及び搬送方向に平行な複数
列の空気噴出孔列を設けた搬送装置を具備していること
を特徴とする塗布装置
によって達成される。The object of the present invention is to (11 square glass substrates whose equilateral sides are tightly bonded to each other, floated by air pressure, and arranged and held on the same plane, apply a conveyance force to the last substrate in the row, horizontally A coating method characterized in that an oil-based resin solution is continuously applied while being conveyed, and (2) the horizontal continuous coating device for applying the oil-based resin solution onto a glass substrate comprises at least a plurality of rows parallel to the coating head and the conveying direction. This is achieved by a coating device characterized in that it is equipped with a conveyance device provided with a row of air jet holes.
尚本発明の態様においては、基板接合部からの空気噴出
による基板列の乱れを回避するために、前記浮上搬送さ
れるガラス基板列の基板接合部の通過点の空気噴出孔か
らの空気噴出が、前記接合部の通過に対応する時点に順
次中止され、通過後再開されることが好ましく、また塗
布領域における基板搬送力が接合部を介して加えられる
ので浮上搬送されるガラス基板列へのガラス基板の供給
・接合が無衝撃に制御されていることが好ましい。In an aspect of the present invention, in order to avoid disturbance of the substrate row due to air jetting from the substrate joining portion, air jetting from an air jetting hole at a passing point of the substrate joining portion of the glass substrate row being floated and conveyed is provided. , is preferably stopped sequentially at a time point corresponding to passing through the bonding area and restarted after passing through the bonding area, and since the substrate conveying force in the application area is applied via the bonding area, the glass substrates are transferred in a floating manner to the array of glass substrates. It is preferable that supply and bonding of the substrates be controlled without impact.
本発明に用いれる油性樹脂溶液(以後塗料と略称)は、
有機溶剤に樹脂を溶解したものであり、該樹脂をバイン
ダとして各種の着色剤、液晶マイクロカプセル或はそれ
らの分散質に対する分散剤、帯電防止もしくは導電剤、
必要によっては硬化剤を含有させることができる。The oil-based resin solution (hereinafter abbreviated as paint) used in the present invention is
A resin is dissolved in an organic solvent, and the resin is used as a binder for various coloring agents, dispersants for liquid crystal microcapsules or their dispersoids, antistatic or conductive agents,
A curing agent may be included if necessary.
本発明に係る塗料は塗布時室温において粘度05〜50
0cp、好ましくはlO〜50cpに調整される。The paint according to the present invention has a viscosity of 05 to 50 at room temperature at the time of application.
It is adjusted to 0 cp, preferably 10 to 50 cp.
また乾燥速度は風量、温度、溶媒及び溶媒量或は膜厚の
調整によって塗布後生くともl win内で完了するよ
うに調えられる。Further, the drying speed can be adjusted so that the drying speed is completed within at least 1 win after coating by adjusting the air volume, temperature, solvent, amount of solvent, or film thickness.
本発明に用いられるバインダには有機溶剤に可溶性の樹
脂か使用されるか、分散質の分散の点から官能基或は分
子内塩を形成する官能基を導入して変性した樹脂、例え
ば変性塩化ビニル系樹脂、変性ポリウレタン系樹脂或は
変性ポリエステル樹脂旨か好ましい。The binder used in the present invention may be a resin soluble in an organic solvent, or a resin modified by introducing a functional group or a functional group that forms an inner salt from the viewpoint of dispersion of the dispersoid, such as a modified chloride resin. Vinyl resin, modified polyurethane resin, or modified polyester resin is preferred.
更に必要に応し従来用いられている非変性の塩化ビニル
系樹脂、ポリウレタン樹脂或はポリエステル樹脂を混用
することもできるし、更に繊維素系樹脂、フェノキン樹
脂或は熱硬化性樹脂、反応型樹脂、或はレジストとして
使用される電磁波に感応する所謂感光性樹脂等を使用し
てもよい。Furthermore, conventionally used unmodified vinyl chloride resins, polyurethane resins, or polyester resins can be used in combination, if necessary, as well as cellulose resins, phenokine resins, thermosetting resins, and reactive resins. Alternatively, a so-called photosensitive resin sensitive to electromagnetic waves used as a resist may be used.
該感光性樹脂としては、ポリメタクリル酸メチル、クロ
ルメチル化ポリスチレン、ポリエチルメタクリレート、
ポリフルオルブチルメタクリレート、ノボラック樹脂等
レジスト用樹脂として使用されているのが挙げられる。Examples of the photosensitive resin include polymethyl methacrylate, chloromethylated polystyrene, polyethyl methacrylate,
Examples include polyfluorobutyl methacrylate, novolak resin, and other resins used as resist resins.
次にバインダ・樹脂中に混合される着色剤としては、ベ
ンジジン・イx o −(Benzidine Yel
low)G(C,1,21090)、ヘンシジン・イエ
ローGll (C,1,21100)、パーマネント・
イエo −(Permanen) Yell。Next, as a coloring agent mixed into the binder/resin, Benzidine Yel
low) G (C, 1, 21090), Hensidine Yellow Gll (C, 1, 21100), Permanent
Yell - (Permanen) Yell.
w)DHG(ヘキスト社の製品)、ブリリアント・カー
マイン(Brilliant Carmine)6B
(C,1,15850)、ローダミン6Gレーク(La
Ke) (C,1,45160)、ローダミンBレーク
(C,1,45170)、フタロンアニン・ブルー・ノ
ン・クリスタル(F’hLhalocyanine B
tue non Crystal)(C,1,7416
0) 、フタロシアニン・グリーン(C,1,7426
0)、カーボンブラック、ファツト(Fa)・イエロー
5G、ファツト・イエロー3G、ファツト・レッドG1
ファツト・レッドHRR1ファツト・レッド5B、ファ
ツト・ブラックB1ザポン・ファースト(Zapon
Pa5t) ・ブラックRE、ザボ戸ファースト・ブラ
ックB1ザポン・ファースト・ブルー1(PL、ザポン
・ファースト・レッドBB、ザポン・ファースト・レッ
ドGE、ザボ戸ファースト・イエローG1キナクリドン
・レッド(C,1,465000)等が挙げられ、これ
らの顔料はバインダ樹脂100重量部当り1〜50重量
部含有されることか好ましい。w) DHG (Hoechst product), Brilliant Carmine 6B
(C, 1, 15850), Rhodamine 6G Lake (La
Ke) (C, 1,45160), Rhodamine B Lake (C, 1,45170), Phthalonanine Blue Non-Crystal (F'hLhalocyanine B
tue non Crystal) (C, 1,7416
0), Phthalocyanine Green (C, 1,7426
0), Carbon Black, Fat (Fa) Yellow 5G, Fat Yellow 3G, Fat Red G1
Fat Red HRR1 Fat Red 5B, Fat Black B1 Zapon First
Pa5t) ・Black RE, Zabodo First Black B1 Zapon First Blue 1 (PL, Zapon First Red BB, Zapon First Red GE, Zabodo First Yellow G1 Quinacridone Red (C, 1,465,000 ), and these pigments are preferably contained in an amount of 1 to 50 parts by weight per 100 parts by weight of the binder resin.
また液晶マイクロカプセルとしては、電気的或は光学的
応答可能な、スメクティック、ネマティック、コレステ
リック液晶から好ましいものか選ばれる。The liquid crystal microcapsules are preferably selected from smectic, nematic, and cholesteric liquid crystals that can respond electrically or optically.
これら液晶の含有量はバインダ樹脂100重量部当り1
〜50重量部含有させることが好ましい。The content of these liquid crystals is 1 per 100 parts by weight of binder resin.
It is preferable to contain up to 50 parts by weight.
本発明の樹脂層の耐久性を向上させるために塗料に各種
硬化剤を含有させることかでき、芳香族、脂肪族イソン
アナート等を用いることができる。In order to improve the durability of the resin layer of the present invention, various curing agents can be included in the coating material, such as aromatic and aliphatic isoneanates.
本発明に使用される分散剤としては、燐酸エステル、ア
ミン化合物、アルキルサルフェート、脂肪酸アミド、高
級アルコール、ポリエチレンオキサイド、スルホ琥珀酸
、スルホ琥珀酸エステル、公知の界面活性剤等及びこれ
らの塩があり、また、陰性有機基(例えば−COO)I
)を有する重合体分散剤の塩を使用することも出来る。Dispersants used in the present invention include phosphoric acid esters, amine compounds, alkyl sulfates, fatty acid amides, higher alcohols, polyethylene oxides, sulfosuccinic acids, sulfosuccinic esters, known surfactants, and salts thereof. , also a negative organic group (e.g. -COO) I
) can also be used.
これら分散剤は1種類のみで用いても、或は2種類以上
を併用してもよい。These dispersants may be used alone or in combination of two or more.
帯電防止剤もしくは導電剤としては、酸化錫−酸化アン
チモン系化合物、酸化チタン−酸化錫−酸化アンチモン
系化合物などの導電性粉末;サポニンなどの天然界面活
性剤;アルキレンオキサイド系、グリセリン系、グリシ
ドール系などのノニオン界面活性側−高級アルキルアミ
ン類、第4級アンモニウム塩類、ピリジン、その他の複
素環類、ホスホニウムまたはスルホニウム類などのカチ
オン界面活性剤;カルボン酸、スルホン酸、燐酸、硫酸
エステル基、燐酸エステル基等の酸性基を含むアニオン
界面活性剤;アミノ酸類、アミノスルホン酸類、アミノ
アルコールの硫酸または燐酸エステル類等両性活性剤な
とがあげられる。As antistatic agents or conductive agents, conductive powders such as tin oxide-antimony oxide compounds, titanium oxide-tin oxide-antimony oxide compounds; natural surfactants such as saponin; alkylene oxide-based, glycerin-based, glycidol-based Nonionic surfactants such as higher alkyl amines, quaternary ammonium salts, pyridine, other heterocycles, phosphoniums or sulfoniums; carboxylic acids, sulfonic acids, phosphoric acids, sulfate ester groups, phosphoric acids Examples include anionic surfactants containing acidic groups such as ester groups; amphoteric surfactants such as sulfuric acid or phosphoric acid esters of amino acids, aminosulfonic acids, and amino alcohols.
前記塗料に配合される溶剤或はこの塗料の塗布時の希釈
溶剤としては、アセトン、メチルエチルケトン、メチル
イソブチルケトン、ンクロヘキサノン等のケトン類;メ
タノール、エタノール、プロパツール、ブタノール等の
アルコール類;酢酸メチル、酢酸エチル、酢酸ブチル、
乳酸エチル、エチレングリコールモノアセテート等のエ
ステル類・グリコールジメチルエーテル、グリコールモ
ノエチルエーテル、ジオキサン、テトラヒドロフラン等
のエーテル類;ベンゼン、トルエン、キシレン等の芳香
族炭化水素;メチレンクロライド、エチレンクロライド
、四塩化炭素、クロロホルム、ジクロルヘンゼン等のハ
ロゲン化炭化水素等が使用できる。Solvents to be added to the paint or diluting solvents during application of this paint include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, and nclohexanone; alcohols such as methanol, ethanol, propatool, and butanol; methyl acetate. , ethyl acetate, butyl acetate,
Esters such as ethyl lactate and ethylene glycol monoacetate; ethers such as glycol dimethyl ether, glycol monoethyl ether, dioxane, and tetrahydrofuran; aromatic hydrocarbons such as benzene, toluene, and xylene; methylene chloride, ethylene chloride, carbon tetrachloride, Halogenated hydrocarbons such as chloroform and dichlorohenzene can be used.
また、ガラス基板としては、光学的、化学的或は電気的
要求に沿って、石英ガラス、鉛ガラス、化学強化ガラス
、硼珪酸ガラス等を選択して使用できる。Further, as the glass substrate, quartz glass, lead glass, chemically strengthened glass, borosilicate glass, etc. can be selected and used in accordance with optical, chemical, or electrical requirements.
これらの基体の厚みは0.1〜5 m1m、好ましくは
05〜2mmである。The thickness of these substrates is between 0.1 and 5 ml, preferably between 0.5 and 2 mm.
上記基体と樹脂層の中間には接着性を向上させる中間層
を設けても良い。An intermediate layer for improving adhesiveness may be provided between the base and the resin layer.
本発明においてガラス基板上に設ける樹脂層の厚みは、
その用途形態によって最適に選ばれるが、塗布上好まし
くは乾燥厚として0.1〜20μ飄であり、好ましくは
0.1〜5μ■である。In the present invention, the thickness of the resin layer provided on the glass substrate is
Although it is optimally selected depending on the form of use, the dry thickness is preferably 0.1 to 20 .mu.m, more preferably 0.1 to 5 .mu.m.
また用途によって本発明に係る樹脂層の他に透明電極層
等の機能層が付加されてもよい。Further, depending on the application, a functional layer such as a transparent electrode layer may be added in addition to the resin layer according to the present invention.
次に図によって本発明の塗布方法を説明する。Next, the coating method of the present invention will be explained with reference to the drawings.
第1図は本発明の塗布方法及び装置を説明する概要図で
ある。FIG. 1 is a schematic diagram illustrating the coating method and apparatus of the present invention.
図において3は方形のガラス基板31が相互の等辺3i
Eを密に接合し、空気圧で浮上し、同−平面Pに配列保
持されたガラス基板列である。該基板列には、その最後
尾の基板31に搬送駆動装置5によってその辺31Bを
介して搬送力が加わり、水平に搬送される。In the figure, 3 indicates that rectangular glass substrates 31 have mutually equal sides 3i.
This is a row of glass substrates E closely bonded, floated by air pressure, and arranged and held on the same plane P. In the substrate row, a conveyance force is applied to the last substrate 31 by the conveyance drive device 5 via its side 31B, and the substrate is conveyed horizontally.
この連結して連続的に搬送される基板列上に塗布ヘッド
lから粘度、乾燥速度の調節された塗料4の所定量が連
続的に供給され樹脂層41が形成される。A predetermined amount of paint 4 whose viscosity and drying speed have been adjusted is continuously supplied from the coating head 1 onto the connected and continuously conveyed row of substrates to form a resin layer 41.
更に塗布装置について具体的に説明する。Furthermore, the coating device will be specifically explained.
6は並立若しくは積重して偏置したガラス基板をガラス
基板含窒から一枚宛捌き取りガラス基板判面Pに整合さ
せて搬送駆動装置I5の駆動ロール51に供給する捌き
供給手段である。Reference numeral 6 denotes a sorting and supplying means that separates the glass substrates arranged side by side or stacked one by one from the nitrogen-containing glass substrates, aligns them with the glass substrate surface P, and supplies them to the drive roll 51 of the transport drive device I5.
駆動ロール51はモータ53で駆動される。新たに供給
される基板30が先行している基板31に互い密に接合
する際には位置センサ54によって供給ロール6■は駆
動制御か行われ、ガラス基板列に無衝撃に接合され塗布
段むらか防止される。The drive roll 51 is driven by a motor 53. When a newly supplied substrate 30 is closely bonded to the preceding substrate 31, the supply roll 6 is driven and controlled by the position sensor 54, and is bonded to the glass substrate row without impact to prevent uneven coating. or be prevented.
無衝撃に接合された基板30は基板列3の一員31とな
って浮上搬送に乗せられる。The substrate 30 bonded without impact becomes a member 31 of the substrate row 3 and is carried on floating conveyance.
本発明においてはガラス基板列の浮上保持は空気噴出管
2i(i−1,2,・・・、n)の作る噴出管アレイ2
によって行われる。In the present invention, the floating and holding of the glass substrate array is carried out by the air ejection tube array 2 formed by the air ejection tubes 2i (i-1, 2, . . . , n).
carried out by
第2図に噴出管アレイ2の構成列を示した。同図(a)
は噴出管アレイの平面図であり、同図(b)は基板列の
搬送方向に直角な平面A−Aによる断面図である。FIG. 2 shows the configuration rows of the ejection tube array 2. Figure (a)
1 is a plan view of the ejection tube array, and FIG. 3B is a sectional view taken along a plane A-A perpendicular to the conveying direction of the substrate array.
噴出管21は搬送方向に直角に並置することか好ましい
。各噴出管21には複数個の空気噴出孔21J(j=1
.2.・・・、k)か設けられており、全21に亘り同
」番孔列は搬送方向に平行直線をなし、また異j番孔列
は互いに平行である。It is preferable that the ejection pipes 21 are arranged in parallel at right angles to the conveying direction. Each jet pipe 21 has a plurality of air jet holes 21J (j=1
.. 2. .
55及び55′は基板列のガイド板であり、その上縁は
内側へ折込まれ、ガラス基板の基板判面からの躍り出し
を抑える。Reference numerals 55 and 55' designate guide plates for the substrate rows, the upper edges of which are folded inward to prevent the glass substrates from protruding from the substrate surface.
22は空気圧縮装置或いは圧縮空気ボンベ21に連結さ
れ、各噴出管2Iに連通した送風管である。噴出孔2I
」から噴出した空気はガラス基板を浮上保持する。浮上
刃は噴出空気流の動圧により賄われ、静圧は主として基
板振動防止もしくはクツションの効用を有する。Reference numeral 22 denotes a blowing pipe connected to an air compressor or compressed air cylinder 21 and communicating with each ejection pipe 2I. Spout hole 2I
The air blown out from the ” keeps the glass substrate floating. The floating blade is provided by the dynamic pressure of the ejected air flow, and the static pressure mainly has the effect of preventing substrate vibration or providing cushioning.
尚基板列のガイド板には接合部検出センサが設けられて
おり基板接合部が噴出管21にかかると空気噴出が中止
され、通過後には再開される。Note that the guide plate of the substrate row is provided with a bonding portion detection sensor, and when the substrate bonding portion touches the ejection pipe 21, air ejection is stopped and resumed after passing.
図において3′は基板列3の想定位置を示し、噴出管ア
レイ2の上面と基板列裏面との浮上高さhは基板の重さ
、面積及び基板当りの噴出孔数に応じ空気圧を調整し、
好ましくは0.5〜2菌にとられる。In the figure, 3' indicates the assumed position of the substrate row 3, and the flying height h between the top surface of the jet tube array 2 and the back surface of the board row is determined by adjusting the air pressure according to the weight and area of the board and the number of jet holes per board. ,
Preferably the number of bacteria is 0.5 to 2.
7は塗布済基板の乾燥・搬出手段であり、搬出機包装工
程に廻される。Reference numeral 7 denotes a means for drying and carrying out the coated substrate, which is sent to the carrying out packaging process.
本発明においては、乾燥速度、粘度の調節された塗料の
塗布速度は0.1〜6 m/win好ましくは03〜1
.5m/sinである。In the present invention, the coating speed of the paint with controlled drying speed and viscosity is 0.1 to 6 m/win, preferably 0.3 to 1 m/win.
.. It is 5m/sin.
本発明の態様によれば、必要充分な生産効率が任意に得
られ、また滑かなまた基板間に切れ目のない連続効果に
よって表面張力と乾燥得度の相互作用による塗布基板先
頭及び後尾における膜厚差を生ずることはない。According to the aspect of the present invention, the necessary and sufficient production efficiency can be obtained arbitrarily, and the difference in film thickness at the beginning and end of the coated substrate due to the interaction between surface tension and dryness due to the continuous effect with no breaks between the substrates. will not occur.
下記組成の塗料を調製し、ガラス基板の10@に本発明
の態様によって塗布を行い、塗布むらの発生、液ロス率
をチエツクした。尚塗布むらチエツクのため顔料として
カーボンブランクを用いた。A paint having the following composition was prepared and applied to 10 glass substrates according to the embodiment of the present invention, and the occurrence of uneven coating and liquid loss rate were checked. A carbon blank was used as the pigment to check for coating unevenness.
(1)ガラス基板
硼珪酸ガラス、厚み2mm、30X30ci、重さ40
0g(2)塗料組成 重量部
スルホ変性塩ビ系樹脂 12ポリウレ
タン樹脂 6シクロへキサノン
150メチルエチルケトン
100トルエン
100カーボンブラツク
7ステアリン酸
ブチルステアレート 1(3)浮
上保持条件
噴出孔数256個/基板直径2鵬
空気圧 1 kg/cn+
(4)塗布速度
0.5.1.0.1.5.2.On/m1n(5)乾燥
条件
60℃、風量 10n?/win
前記のようにしてえられた試料の塗布むらを目視判定し
た結果、すべて実用的に使用可能であった。(1) Glass substrate borosilicate glass, thickness 2mm, 30x30ci, weight 40
0g (2) Paint composition Weight parts Sulfo-modified PVC resin 12 Polyurethane resin 6 Cyclohexanone 150 Methyl ethyl ketone
100 toluene
100 carbon black
7 Butyl stearate 1 (3) Levitation and maintenance conditions Number of ejection holes 256/substrate diameter 2 Pneumatic pressure 1 kg/cn+ (4) Coating speed 0.5.1.0.1.5.2. On/m1n (5) Drying conditions 60℃, air volume 10n? /win As a result of visually evaluating the coating unevenness of the samples obtained as described above, all of them were found to be usable for practical use.
また液ロスは塗布液量と塗布残液の比率は100枚塗布
バッチにおいて5%に止った。In addition, the liquid loss was limited to 5% in a coating batch of 100 sheets, with the ratio of coating liquid amount to coating residual liquid remaining.
第1図は本発明の塗布方法及び装置を説明する概要図で
ある。
第2図は本発明に係る噴出官アレイの構成例の平面図及
び断面図である。
1・・・塗布ヘッド、
2・・・噴出管アレイ、21・・・空気噴出管、2ij
・・・空気噴出孔、
ガラス基板列、31・
塗料、41・・・樹脂層、
・搬送駆動装置、
・捌き供給手段、
・・乾燥・搬出手段。FIG. 1 is a schematic diagram illustrating the coating method and apparatus of the present invention. FIG. 2 is a plan view and a cross-sectional view of a configuration example of a jetting array according to the present invention. DESCRIPTION OF SYMBOLS 1... Application head, 2... Ejection pipe array, 21... Air ejection pipe, 2ij
... Air blowout hole, glass substrate row, 31. Paint, 41.. Resin layer, - Conveyance drive device, - Sorting and supplying means, ... Drying and carrying out means.
Claims (4)
圧で浮上させて同一平面に配列保持したガラス基板列に
、その最後尾の基板に搬送力を加え、水平に搬送しなが
ら連続的に油性樹脂溶液を塗布することを特徴とする塗
布方法。(1) A row of rectangular glass substrates whose equilateral sides are tightly bonded, floated by air pressure, and arranged and held on the same plane. A conveying force is applied to the last substrate, and the glass substrates are continuously conveyed horizontally. A coating method characterized by applying an oil-based resin solution to.
装置が、少くとも塗布ヘッド及び搬送方向に平行な複数
列の空気噴出孔列を設けた搬送装置を具備していること
を特徴とする塗布装置。(2) The horizontal continuous coating device for applying the oil-based resin solution onto a glass substrate is characterized in that it is equipped with at least a coating head and a conveying device provided with a plurality of rows of air jet holes parallel to the conveying direction. Coating device.
通過点の空気噴出孔からの空気噴出が、前記接合部の通
過に対応する時点に順次中止され、通過後再開される請
求項2に記載の塗布装置。(3) Air jetting from air jetting holes at passage points of the substrate bonding portion of the glass substrate row to be floated and conveyed is sequentially stopped at a time point corresponding to passage of the bonding portion, and resumed after passing the substrate bonding portion. The coating device described in .
給・接合が無衝撃に制御されている請求項2又は3に記
載の塗布装置。(4) The coating apparatus according to claim 2 or 3, wherein the supply and bonding of the glass substrates to the row of glass substrates that are floated and conveyed are controlled without impact.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16245090A JPH0455347A (en) | 1990-06-20 | 1990-06-20 | Method and device for applying oily resin solution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16245090A JPH0455347A (en) | 1990-06-20 | 1990-06-20 | Method and device for applying oily resin solution |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0455347A true JPH0455347A (en) | 1992-02-24 |
Family
ID=15754844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16245090A Pending JPH0455347A (en) | 1990-06-20 | 1990-06-20 | Method and device for applying oily resin solution |
Country Status (1)
Country | Link |
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JP (1) | JPH0455347A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002346454A (en) * | 2001-05-25 | 2002-12-03 | Toppan Printing Co Ltd | Continuous coating device for glass |
JP2005321505A (en) * | 2004-05-07 | 2005-11-17 | Kokusai Gijutsu Kaihatsu Co Ltd | Exposure apparatus |
JP2006186251A (en) * | 2004-12-28 | 2006-07-13 | Kumamoto Technology & Industry Foundation | Coating apparatus |
JP2006253373A (en) * | 2005-03-10 | 2006-09-21 | Tokyo Electron Ltd | Apparatus, method, and program for substrate processing |
JP2007173365A (en) * | 2005-12-20 | 2007-07-05 | Tokyo Electron Ltd | System and method for processing application drying |
JP2010003881A (en) * | 2008-06-20 | 2010-01-07 | Toppan Printing Co Ltd | Substrate treatment apparatus |
JP2010014873A (en) * | 2008-07-02 | 2010-01-21 | Dainippon Printing Co Ltd | Method for producing color filter |
-
1990
- 1990-06-20 JP JP16245090A patent/JPH0455347A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002346454A (en) * | 2001-05-25 | 2002-12-03 | Toppan Printing Co Ltd | Continuous coating device for glass |
JP4670182B2 (en) * | 2001-05-25 | 2011-04-13 | 凸版印刷株式会社 | Single plate continuous coating equipment |
JP2005321505A (en) * | 2004-05-07 | 2005-11-17 | Kokusai Gijutsu Kaihatsu Co Ltd | Exposure apparatus |
JP2006186251A (en) * | 2004-12-28 | 2006-07-13 | Kumamoto Technology & Industry Foundation | Coating apparatus |
JP2006253373A (en) * | 2005-03-10 | 2006-09-21 | Tokyo Electron Ltd | Apparatus, method, and program for substrate processing |
JP4571525B2 (en) * | 2005-03-10 | 2010-10-27 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing method |
JP2007173365A (en) * | 2005-12-20 | 2007-07-05 | Tokyo Electron Ltd | System and method for processing application drying |
JP2010003881A (en) * | 2008-06-20 | 2010-01-07 | Toppan Printing Co Ltd | Substrate treatment apparatus |
JP2010014873A (en) * | 2008-07-02 | 2010-01-21 | Dainippon Printing Co Ltd | Method for producing color filter |
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