JPH0444610A - Composite thin film magnetic head and production of the head - Google Patents

Abstract

PURPOSE:To prevent the influence of a signal magnetic field from an adjacent track and to reduce noise by projecting the sliding face sides of a recording head and a reproducing head and improving accuracy for matching the positions of the recording head and the reproducing head. CONSTITUTION:As a figure to be obliquely observed while cutting a magnetic head at the center and as a figure enlarging the important part when observing the head in an arrow A direction, a base layer 11 is formed on a ceramic base 10 and a lower magnetic shield member 16 is formed on it. On the shield member 16, a gap member 13, magneto-resistance effect element 2, electrode 1 and gap member 14 are filmed and patterned and further on them, a lower magnetic film 3 of the induced magnetic head, gap member 12 and upper magnetic film 4 are filmed and patterned. The highest surface is covered with a protecting member 7. Then, a groove is formed on the sliding face, and a part sandwiched between the two grooves is shaped in a projecting form by cutting both corner parts in a track width direction on the sliding face of the magnetic head. Thus, the accuracy of work is improved, a resistance change is enlarged as well and a reproducing output to the signal magnetic field is increased.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a composite thin-film magnetic head that is used in magnetic recording devices such as magnetic disks and VTRs and is suitable for high-density magnetic recording, and a method for manufacturing the same.

[Conventional technology]

Conventionally, when processing the tip of a magnetic head,
-14410 Publication, IEE, Transaction on Magnetic Tsukuno,.

M.G.14. , (1978) pp. 503-505 (IEEE, T+dns, o+) Magn
etics.

As discussed in MA et al.-14 (1978) 503, 505) and IEICE Technical Axis 88°305 (1988) pp. 3:3 to 38, the operating gap of thin-film magnetic heads. Partially 1 on both sides of the parts that make up
Delete and reshape using Tsuching method etc. 2. Efforts are being made to improve the accuracy of track width.

In addition, in magnetic heads that utilize the magnetoresistive effect,
As shown in Japanese Patent Application Laid-Open No. 59-30223, the structure is such that the signal extraction conductor is exposed on the sliding surface (the surface facing the recording medium).

However, when the signal extraction conductor is exposed on the sliding surface in this manner, problems such as increased sliding noise and disconnection of the signal extraction conductor are likely to occur. To improve this,
Japanese Patent Publication No. 1983. -37835/Publication, JP-A-58-11
No. 5622 and Japanese Unexamined Patent Publication No. 60-69807 disclose magnetic heads having a structure in which the signal extraction conductor is not exposed on the sliding surface.

Furthermore, Japanese Patent Laid-Open No. 58-115622 discloses that an insulating layer is provided only on the top surface of the signal take-out conductor without exposing the signal take-out conductor to the sliding surface, and a new insulating layer is added to cover the MR film from above. A magnetic head is shown in which the insulation properties of the cut-off portion are improved.

Furthermore, Japanese Patent Laid-Open No. 60-612 discloses that the track width is regulated by not exposing the signal extraction conductor to the sliding surface and by providing a region in the magnetoresistive element where the rate of change in magnetoresistance is small. A magnetic head is shown in which leakage signals from adjacent tracks are reduced.

[Problem to be solved by the invention]

By the way, in recent years, with the increase in recording density, so-called wide-width recording has been developed, which prevents the signal magnetic field from being reproduced from adjacent tracks and improves the reliability of information reproduction by recording in a wide area and reproducing in a narrow area. Narrow width playback (wide light/narrow read) technology is attracting attention.

However, in the above conventional technology, the track width is 10 μm.
If it becomes less than m, the recording head (induction type head)
Since the positioning accuracy in the track width direction between the magnetic head and the reproducing head decreases, there is a problem that a magnetic head for wide-width recording and narrow-width reproducing cannot be realized.

Furthermore, in the above conventional technology, when a magnetoresistive element is used in the reproducing head, no consideration is given to the shape of the signal extraction conductor and the magnetic domain structure of the magnetoresistive element, and Barkhausen noise due to fluctuations in the magnetic domain structure is generated. There are also problems that occur.

SUMMARY OF THE INVENTION An object of the present invention is to provide a composite thin film magnetic head that improves the alignment accuracy of a recording head and a reproducing head in the track width direction.

Another object of the present invention is to provide a composite thin film magnetic head that generates less noise even when a magnetoresistive element is used in the read head.

Still another object of the present invention is to provide a method for manufacturing the above-described composite thin film magnetic head.

[Means to solve the problem]

To achieve the above object, the present invention provides a composite thin film magnetic head in which a recording head and a reproducing head are separated and formed on a substrate, in which both corners in the track width direction of the recording head and the reproducing head are cut out. The sliding surfaces of both heads are convex.

Here, the recording head is a magnetic induction head, and the reproducing head is a magnetic induction head or a magnetoresistive head.

Further, the present invention provides a magnetoresistive head consisting of a magnetic shielding film, a gap film for insulation, a magnetoresistive film, and an electrode film for passing a current through the magnetoresistive film on a substrate, and A magnetic induction head consisting of an upper magnetic film, a lower magnetic film, a gap film for insulation, a conductor film, and an insulating film for insulating the conductor film is laminated on the upper surface of the magnetoresistive head, and the magnetic induction In a composite thin-film magnetic head in which the top surface of the head is covered with a protective material, both corners in the track width direction of the magnetoresistive head and the magnetic induction head are cut out to separate the magnetoresistive head and the magnetic induction head. The sliding surface side is convex.

In addition, the present invention provides a magnetic induction head consisting of an upper magnetic film, a lower magnetic film, a gap film for insulation, a conductor film, and an M edge film for insulating the conductor film on a substrate, and also provides a magnetic shielding film. , a magnetoresistive head consisting of a gap film for insulation, a magnetoresistive film, and an electrode film for passing a current through the magnetoresistive film is laminated on the upper surface of the magnetoresistive head; In a composite thin-film magnetic head in which the upper surface of the effective head is covered with a protective material, both corners in the track width direction of the magnetic induction head and the magnetoresistive head are cut out to separate the magnetic induction head and the magnetoresistive head. The sliding surface side is convex.

Another aspect of the present invention is that any one of the above composite thin film magnetic heads is mounted on a magnetic recording device.

Further, in the present invention, after the recording head and the reproducing head are separately formed on a substrate, the tracks of the recording head and the reproducing head are tracked from the sliding surface side or the protective material side using focused ion beam technology. A composite thin-film magnetic head is manufactured by cutting out both corners in the width direction of the head and making the sliding surfaces of both heads convex.

[Effect]

In the case of recording with an inductive thin-film magnetic head used for both recording and reproduction, when the areal recording density is 150 megabits per square inch, the coercive force of the recording medium on the recording side is 15
Becomes 00 mills or more. This is because when the coercive force of the recording medium is small and the recording density is high, the influence of the demagnetizing field is large, making it impossible to maintain the recorded state. However, for recording media with high coercive force, the magnetic film thickness of the thin film magnetic head must be increased.

On the other hand, in the case of reproduction, the linear recording density also increases to 40 kilobits or more due to the improvement in recording density. At this time, the thickness of the magnetic film of the thin-film magnetic head must be reduced in order to avoid interference of the reproduced waveform with adjacent bits.

As described above, a thin film magnetic head for both recording and reproducing purposes has a limit in terms of high recording density, and a composite thin film magnetic head with separate recording head and reproducing head is required.

This composite thin-film magnetic head uses a magnetic induction type with a thick magnetic film in the recording head, a magnetic induction type with a thin magnetic film in the read head, and a magnetic induction type with a thick magnetic film in the recording head. There are also those using a magnetoresistive type reproducing head. A magnetoresistive head utilizes the fact that the resistance of a magnetoresistive element (MR element) changes in response to an applied magnetic field, and reproduces this resistance change as a voltage change.

In such a composite thin-film magnetic head, after forming the recording head and the reproducing head, the track width is processed to make the sliding surface side convex, thereby adjusting the position of the recording head and the reproducing head. The alignment accuracy has been improved, and recorded information can be reproduced without track misalignment. At the same time, it is no longer affected by the signal magnetic field from adjacent tracks during reproduction, and the signal-to-noise ratio (S/N ratio) has been improved. can be improved.

In addition, when a magnetoresistive head is used as the read head, if the conductor that extracts the signal from the read head is made of a magnetic material, the magnetic domain of the magnetoresistive head can be stabilized and the appearance of noise can be reduced. It can be suppressed.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a composite thin-film magnetic head of the present invention cut vertically at the center, and FIG. 2 is an enlarged view of the main parts of the magnetic head of FIG. 1 as viewed from the direction of arrow A. As shown in the figure, a base layer (AQ, O,) 1 is formed on a ceramic substrate 10.
1 is sputtered, and a lower irradiation shield material (N
iFe) 16 is patterned. On the lower magnetic shielding material 16, there is a gap material (AQ203) 13,
Magnetoresistive element 2. The electrode 1 and the gap material 14 are patterned. Further, on the gap material 14, the lower magnetic film 3 of the inductive recording head and the gap material 1
2. The upper magnetic film 4 is patterned, and the uppermost surface is covered with a protective material 7. Here, in the magnetic head shown in the figure, the lower left end surface is a sliding surface, and the recording medium moves from the bottom to the top along this sliding surface. Further, the arrow direction shown in the figure is the track width direction.

A feature of this embodiment is that grooves are formed on the sliding surface. The magnetic head shown in the figure is only the left half; in reality, the right half is integrated with this to form one magnetic head, and grooves are similarly formed on the sliding surface of the right half. .

That is, in the portion sandwiched between the two grooves, the sliding surface of the magnetic head is shaped into a convex shape by cutting off both corners in the track width direction. The size of this shaping is 0.1 to 2 μm in the direction perpendicular to the sliding surface and 0.1 to 2 μm in the track width direction.

Next, details of the magnetoresistive element 2 will be explained using FIG. 3.

In the figure, the convex shape shown by a solid line represents the outer shape of the magnetoresistive element 2. The upper surface of the convex ridge portion is a sliding surface, and the length of the sliding surface in the left-right direction is the track width. The size of this track width is set based on the recording density. The recording medium is located at a position facing the sliding surface, and is moving in a direction perpendicular to the plane of the paper while maintaining a predetermined flying height from the sliding surface. Further, electrodes 1 are provided at both ends of the magnetoresistive element 2, and the tips of the electrodes 1 are separated from the sliding surface by
It is located at a position set back by l toward the rear of the head (downward in the figure). Note that when electrode 1 is placed in contact with the sliding surface, the track width is 10 μm or less, but the electrode portion is only 5 μm.
m or more, there is a risk of reading the signal magnetic field from the adjacent track, and if the electrode 1 is too far away from the sliding surface, the efficiency of converting the signal magnetic field into resistance change will deteriorate.
A value of 0.1 to 2 μm is an appropriate range.

Also, the distance between the two electrodes 1 is set by g on both sides of the track width.
c (=0.2 μm). In this way, if the interval between the electrodes 1 is made longer than the track width, the resistance of the magnetoresistive element 2 increases, and accordingly,
Since the change in resistance also increases, the reproduction output in response to the signal magnetic field can be increased.

Furthermore, since the protrusion on the sliding surface side of the magnetoresistive element 2 is shaped so that its width is always the same as the track width, the accuracy of the track width can be improved when the head is machined from the sliding surface side. It's helping me improve.

Note that the shape of the magnetoresistive element 2 is not limited to a convex shape, and is located on both sides of the sliding surface side protrusion. The surface along the track width direction may be a curved surface with a constant curvature, as shown in FIGS. 4(a) and 4(b).

Next, other examples of magnetoresistive elements are shown in FIGS. 5 to 9.
This will be explained using figures.

First, in FIG. 5, the magnetoresistive element 2 and the electrode 1 are integrally formed. This involves patterning the thin film (100 to 1000) of the magnetoresistive element 2, including the shape of the electrode 1, and then patterning the soft magnetic electrode 1 with a thickness of 0.1 to 1000.
The film with a thickness of about 1 μm is patterned.

According to such a configuration, the resistance change of the magnetoresistive film due to the signal magnetic field can be read by the current l flowing in the magnetoresistive element 2 as shown by the arrow.

In Fig. 6, the magnetoresistive element 2 and the electrode 1 are integrally formed, which is the same as in Fig. 5, but in Fig. 6, the anti-sliding surface of the magnetoresistive element 2 is The side (right side in the figure) is sandwiched between electrodes 1. This too,
It can be manufactured by patterning the film in the same manner as in FIG.

According to such a configuration, the electric current generator has the magnetoresistive effect element 2.
The magnetic field flows within the shortest distance as shown by the arrow, and the sliding surface side of the magnetoresistive element 2 becomes unable to read resistance changes and becomes a guide portion for guiding the signal magnetic field. This reduces the influence on resistance changes due to sliding with the recording medium, making it possible to obtain stable reproduction signals.

In FIG. 7, the structure is such that the distance of the magnetoresistive element 2 in the track width direction is shorter than the distance between the electrodes 1 (the distance from the outer part of the electrode to the outer part).

In this way, in the track width direction, for example, if the width of one electrode 1 is about 5 μm and the width of the resistance change detection portion of the magnetoresistive element 2 is set to 10 μm or less, the influence of the signal magnetic field from the adjacent track will be reduced. can be reduced, and a decrease in detection sensitivity can be prevented. That is,
In the conventional structure in which an electrode (Cr/Cu is used) is attached to the magnetoresistive element with a track width of 10 μm left in the resistance change detection area, it is not possible to detect changes in the resistance of the magnetic material due to the magnetoresistive effect. This is possible only in the 111110 μm portion of the track where the current is flowing.

Since the signal magnetic field is also emitted from the adjacent track, this signal magnetic field is sensed by the magnetoresistive element under the electrode.
Affects resistance change. Moreover.

Since there are two electrodes, in both cases, the signal magnetic field is detected by the magnetoresistive element below the electrodes.

The signal magnetic field detected by the resistance change detection part becomes the same level, and the detection sensitivity decreases significantly.In contrast, with the above configuration, the distance in the track width direction of the magnetoresistive effect element is shortened, and Since the electrode tip position is set back, the influence of signal magnetic fields from adjacent tracks is reduced, and detection sensitivity can be improved.

Further, as shown in FIG. 8, a similar effect can be obtained by providing a curvature at the junction between the magnetoresistive element 2 and the electrode 1. Moreover, if you do it like this.

This is convenient in manufacturing and can also improve durability.

In FIG. 9, the electrode 1 has a structure in which its tip is provided on the sliding surface and on the magnetoresistive element 2, and both ends in the track width direction are removed by a predetermined amount from the outer part of the electrode 1. It has become. The depth g of the deleted portion from the sliding surface is approximately 0.1 to 2 μm. In FIG. 1, a part of the electrode 1 that reaches the sliding surface remains, but this part may be completely deleted.

According to this configuration, as in the case of FIG. 6, the current I flows in the shortest distance within the magnetoresistive element 2 as shown by the arrow, so that a stable reproduction signal can be obtained, and the seventh As in the case of Fig. 8 and Fig. 8, the width of the resistance change detection portion of the magnetoresistive element 2 can be shortened, and the influence of the signal magnetic field from the adjacent track can be reduced to improve the detection sensitivity. can.

Next, another embodiment of the composite thin film magnetic head of the present invention will be described.

In the above-described magnetic head of FIG. 1, the magnetoresistive element 2 is provided below the upper magnetic film and the lower magnetic film, but as shown in FIG. It can also be provided above. That is, FIG. 10 is a view of the magnetic head viewed from the sliding surface side, and as shown in the figure, an underlayer (Ag2O,
is sputtered, and the lower magnetic film 3 of the inductive recording head thereon, the gap material (Afi, O,) 12. Upper magnetic film 4
゜The gap material 13 is patterned.

Furthermore, a magnetoresistive effect element 2 is placed above the inductive recording head.
, the electrode 1, the gap material 14, and the magnetic sealing material 15 are patterned, and the uppermost surface is covered with a protective material 7.

Next, an example of a magnetic recording device equipped with the composite thin film magnetic head of the present invention will be described.

FIG. 11 is a schematic configuration diagram of a magnetic disk drive, and in FIG. and a case 23 containing an interface. H
There are eight DAs 21, which are installed in two stages of four each, and a case 22 is connected to each HDA 21. The container 20 has a bottom surface of 0.5 to 1.5 cm on each side.
It has an approximately square shape with a height of approximately 2 m.

FIG. 12 shows details of the HDA 21 and case 22 of the - pair. Inside the HDA 21, there are five magnetic disks 31 fixed to a spindle 30, a motor 32 for rotationally driving the spindle 30, and a data magnetic head (for which the composite thin film magnetic head of the present invention is used) 33. A carriage 35 that moves the positioning magnetic head 34 in the radial direction of the magnetic disk 31, and a voice coil motor 38 that controls the carriage 35 and includes a voice coil 36 and a magmet 37 are housed. The spindle 30, motor 32, carriage 35, and voice coil motor 38 are arranged on a base 39. Also, inside the case 22, there are a voice coil motor control circuit 40 connected to the positioning magnetic head 34 and controlling the voice coil motor 38, a write/read circuit 41 connected to the data magnetic head 33, and a write/read circuit 41 connected to the data magnetic head 33. An interface 42 connected to a lead circuit 41 is housed therein. Note that the interface 42 is connected to an external host device (for example, a computer system) 43.

As shown in FIG. 13, the magnetic disk 31 has a magnetic layer 51 provided on one or both sides of a non-magnetic disk 50 made of alumina or the like. A large number of track grooves are formed on the surface of the magnetic layer 51. The magnetic disk 31 is rotating in the direction of the arrow, and a data magnetic head 33 attached to a slider 52 floats above its surface. In the figure, the symbol λ indicates the recording wavelength, the symbol Tp indicates the track pitch, and t indicates the flying height of the magnetic head 33.

The areal recording density of the magnetic head 33 is 150 per square inch.
~400 megabits. The track density is preferably 3000 tracks or more per inch, and the linear recording density is preferably 50 kilobits per inch or more. Then, within the range of these linear recording densities and track densities, the areal density recording, which is the product of both, is calculated as 1 as described above.
It is desirable to set it to 50-400 megabits. By doing so, the recording density can be increased without significantly increasing the disk diameter.

Even if the recording density increases and the information storage capacity increases, if the data transfer speed decreases accordingly, there is little utility value. If the data transfer rate is 4.5 to 9 megabytes/second, data can be transferred quickly. This data transfer speed is determined by the product of the circumferential speed of the disk and the linear recording density. Since the linear recording density is 50 kilobits per inch, a data transfer rate of 4.5 to 9 megabytes/second can be achieved by setting the disk rotation speed to 350 rpm or higher for a disk with a diameter of 5.0 to 11 inches. .

This rotation speed of 3500 ppm is a general rotation speed adopted in ordinary magnetic disk devices,
It is extremely easy to implement.

In FIG. 12, the number of magnetic disks 31 fixed to one spindle 30 is five, but the number is not limited to this and may be any number. A plurality of magnetic disks 31 fixed to 3o may be installed.

Next, an example of a method for manufacturing the composite thin film magnetic head of the present invention will be described. Here, the case of a magnetic head using a magnetoresistive element in the reproducing head will be described using FIG. 14. First, a base layer (A1□0) is sputtered onto a ceramic substrate (Step 100), a magnetic shield material (NiFe) is sputtered, and then patterned into a magnetic shield shape by ion milling (Step 101). A first insulating material (A1
20,) is sputtered (step 1o2). Next, a magnetoresistive element is formed (Step 103), an electrode material (Ti/Au) is sputtered thereon (Step 104), and it is patterned into an electrode shape by ion milling (Step 105). Step 10: Sputtering the material (A120.)
6) After sputtering the magnetic shielding material (NiFe).

It is patterned into a magnetic shield shape by ion milling (step 107), and the second insulating material is shaped into a terminal to form a hole (step 108) to form an inductive thin film magnetic head (step 109). The magnetic head made in this way is processed into a slider shape (
After step 110), using focused ion beam (FIB) technology or the like, both corners in the track width direction are cut out from the sliding surface side or the protective material side, so that the recording head and the reproducing head can slide together. The moving surface side is shaped into a convex shape (step 111).

Even if the vertical relationship between the recording head and the reproducing head is reversed, use focused ion beam technology as described above to cut out both corners in the track width direction and shape the sliding surface side into a convex shape. be able to.

Note that the contact portion between the magnetoresistive element and the conductor for signal extraction is connected via a through hole, and a photoresist is used as an insulating film for the through hole.

In addition, when a magnetic induction type head is used as a read head, the upper magnetic film and the lower magnetic film of the magnetic induction type head are separated by 1 to 2 layers.
It only needs to be about μm, and in order to shape the sliding surface side into a convex shape, focused ion beam technology or the like may be used in the same manner as described above.

〔Effect of the invention〕

As explained above, according to the present invention, since the sliding surfaces of the recording head and the reproducing head are made convex, the alignment accuracy between the recording head and the reproducing head is improved, and the signal magnetic field from the adjacent track is improved. This eliminates the influence of noise, making it possible to reduce noise.

[Brief explanation of drawings]

1 is a perspective view of a composite thin-film magnetic head of the present invention cut vertically at the center; FIG. 2 is an enlarged view of the main parts of the magnetic head of FIG. 1 viewed from the direction of arrow A; The figure is a plan view showing the shape of the magnetoresistive element, Figure 4 is an enlarged view of the main part showing other shapes of the magnetoresistive element, and Figures 5 to 9 show other examples of the magnetoresistive element. , FIG. 5 and FIG. 6 are perspective views thereof, FIGS. 7, 8, and 9 are plan views thereof, and FIG. 10 is a principal part showing another embodiment of the composite thin-film magnetic head of the present invention. An enlarged view, FIG. 11 is a schematic diagram of the magnetic recording device, FIG. 12 is a schematic diagram of the head disk assembly and its control circuit, and FIG. 13 is a main part showing the state of the magnetic head on the magnetic disk. The perspective view and FIG. 14 are flowcharts showing the manufacturing procedure of the composite thin film magnetic head of the present invention. 1... Electrode part, 2-... Magnetoresistive element, 3...
Lower magnetic film, 4... Upper magnetic film, 5... Insulating film, 6
... Conductor, 7... Protective material, 10... Ceramic substrate, 11... Base layer, 12
~14... Gap material, 15.16... Magnetic shielding material, 31... Magnetic disk, 33... Magnetic head for data, 34... Magnetic head for positioning, 35... Carriage, 36 ...Voice coil, 37...Magnet, 38...Voice coil motor.

Claims (1)

[Claims] 1. In a composite thin film magnetic head in which a recording head and a reproducing head are separated and formed on a substrate, both corners in the track width direction of the recording head and reproducing head are cut out to allow sliding of both heads. A composite thin-film magnetic head characterized by a convex moving surface side. 2. In a composite thin-film magnetic head in which a recording head and a reproducing head are formed separately on a substrate, and both the recording head and the reproducing head are magnetic induction heads, the recording head and the reproducing head are arranged in the track width direction of the recording head and the reproducing head. A composite thin-film magnetic head characterized by having both corners cut out to make the sliding surfaces of both heads convex. 3. A composite thin film magnetic head in which a recording head and a reproducing head are formed separately on a substrate, the recording head is a magnetic induction head, and the reproducing head is a magnetoresistive head, wherein the recording A composite thin-film magnetic head characterized in that both corners in the track width direction of the head and read head are cut out to make the sliding surfaces of both heads convex. 4. The composite thin film magnetic head according to claim 1, 2 or 3, wherein both corners in the track width direction of the recording head and the reproducing head are cut by a cutting depth of 0.1 to 2 μm from the sliding surface side. A composite thin-film magnetic head characterized by: 5. The composite thin film magnetic head according to claim 1 or 3, wherein an electrode for passing a current through the reproducing head is provided inside and set back from the sliding surface. 6. A magnetoresistive head consisting of a magnetic shield film, a gap film for insulation, a magnetoresistive film, and an electrode film for passing a current through the magnetoresistive film is provided on the substrate, and an upper magnetic film, A magnetic induction head consisting of a lower magnetic film, a gap film for insulation, a conductor film, and an insulating film insulating the conductor film is laminated on the upper surface of the magnetoresistive head, and the upper surface of the magnetic induction head is In the composite thin film magnetic head covered with a protective material, both corners in the track width direction of the magnetoresistive head and the magnetic induction head are cut out, and the sliding surface sides of the magnetoresistive head and the magnetic induction head are cut out. A composite thin film magnetic head characterized by having a convex shape. 7. A magnetic induction head consisting of an upper magnetic film, a lower magnetic film, a gap film for insulation, a conductive film, and an insulating film for insulating the conductive film is provided on the substrate, and a magnetic shielding film and a magnetic shielding film for insulation are provided on the substrate. A magnetoresistive head consisting of a gap film, a magnetoresistive film, and an electrode film for passing a current through the magnetoresistive film is laminated on the upper surface of the magnetoresistive head, and the upper surface of the magnetoresistive head In the composite thin-film magnetic head covered with a protective material, both corners in the track width direction of the magneto-inductive head and the magnetoresistive head are cut out, and the sliding surface sides of the magneto-inductive head and the magnetoresistive head are cut out. A composite thin film magnetic head characterized by having a convex shape. 8. The composite thin film magnetic head according to claim 6 or 7, wherein both corners in the track width direction of the magnetoresistive head and the magnetic induction head have a cutting depth of 0.1 to 2 μm from the sliding surface side. A composite thin-film magnetic head characterized by being cut out. 9. The composite thin film magnetic head according to claim 6 or 7, wherein an electrode for passing a current through the magnetoresistive head is provided inside and set back from the sliding surface. head. 10. The composite thin film magnetic head according to claim 9, wherein the electrode is formed of a soft magnetic thin film. 11. A magnetic recording device equipped with the composite thin film magnetic head according to any one of claims 1 to 10. 12. After separately forming a recording head and a reproducing head on a substrate, use focused ion beam technology to remove both corners of the recording head and reproducing head in the track width direction from the sliding surface side or the protective material side. 1. A method of manufacturing a composite thin-film magnetic head, characterized in that the sliding surface sides of both heads are made convex by cutting the parts all at once.