JPH04138211A - Slicing device - Google Patents

Abstract

PURPOSE:To improve the accuracy of finishing by correcting the local deflection of a blade on the basis of the results of detection of the whole blade deflection- quantity detecting means by a blade deflection correction means. CONSTITUTION:In the constitution of a slicing device, three positions of a section near the inlet section P1, a section near the outlet section P2 and a section near the central section P3 of the work cutting section of a blade 10 are provided with blade deflection-quantity detecting sensors 20, 21, 24. Sections near the blade deflection-quantity detecting sensors 20, 21 near the inlet section P1 and near the outlet section P2 are provided with blade deflection correction means 25, 26 respectively. Each blade deflection correction means 25, 26 is organized so as to inhibit local deflection on the basis of the results of detection of the three blade deflection-quantity detecting sensors 20, 21, 24 respectively, thus correcting local deflection near the outlet section P2 or correcting local deflection near the inlet section P1.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a slicing apparatus for cutting a workpiece, such as a semiconductor ingot, into thin pieces, such as a semiconductor wafer.

[Conventional technology]

Traditionally, slicing fi! By closing one end of the workpiece to face the inside of a blade having a circular inner peripheral edge, and cutting and feeding the front blade or the workpiece in the radial direction of the blade while rotating the blade,
A device is known that is configured to cut out a thin piece by cutting one end of the work.

This slicing device has a problem in that the blade tends to bend during cutting, which leads to a decrease in processing accuracy.

Therefore, a blade deflection amount detection sensor that detects the amount of deflection of the blade, and a blade deflection sensor that suppresses local deflection of the blade in the axial direction using fluid pressure, magnetic force, etc. based on the detection result of this blade deflection amount detection sensor. A device has been developed in which a blade is provided with a correction means, and when a deflection occurs in the blade, the deflection is detected by a blade deflection amount detection sensor and corrected by a blade deflection correction means.

As shown in FIG. 6, the above-mentioned conventional device sets the blade deflection amount detection sensor 29 at a position that avoids the trajectory C along which the workpiece 30 moves by cutting feed, and at the workpiece cutting site (P1 to P2) of the blade 10. ), that is, in the vicinity of the upstream end P1 in the rotation direction (direction of arrow B in the figure). A blade deflection correction means 28 is provided near this blade deflection amount detection sensor 29,
Based only on the detection result of the blade deflection amount detection sensor 29, the blade deflection correcting means 28 corrects the local deflection in the vicinity of the entrance portion P1 of the workpiece cutting site.

[Problem to be solved by the invention]

During cutting, the blade 10 moves toward the entrance portion P1 of the workpiece cutting site.
Even if there is almost no bending in the vicinity, there may be a large bend in the vicinity of the outlet portion (downstream end in the rotational direction) P2 of the workpiece cutting site. Moreover, even if the vicinity of the entrance part P1 is bent, the vicinity of the outlet part P2 may not be bent.

Therefore, with the configuration of the conventional device described above, only the bent eel near the entrance portion P1 can be detected, and the blade 1
It is only possible to correct the deflection near the entrance part P1 of 0.
Moreover, since the correction can only be made based on the detection results near the entrance portion P1, the deflection of the blade 10 cannot be corrected correctly, leading to a decrease in processing accuracy.

In addition, in the conventional device described above, even if the sharpness of the inner circumferential edge 11 decreases, the deflection of the blade 10 increases, resulting in poor processing accuracy. If so, the inner peripheral blade 11 is dressed to restore its sharpness. However, conventionally, the timing of dressing with the above-mentioned dressing device (
Dressing timing) was also controlled based only on the detection results of the blade deflection amount detection sensor 29 installed near the entrance portion P1, so the dressing timing was not controlled to accurately reflect the deflection of the blade 10 over the entire surface of the workpiece. However, there have been problems in that the dress is not done when necessary or the dress is done more than necessary.

In view of the above circumstances, it is an object of the present invention to provide a slicing apparatus that can improve processing accuracy and perform dressing at an appropriate time.

[Means to solve the problem]

The slicing device according to the present invention has one end of the workpiece facing inside a blade having a circular inner peripheral edge, and cuts and feeds the blade or the workpiece in the radial direction of the blade while rotating the blade. In the slicing device that cuts one end of the workpiece to cut out a thin piece, the blade deflection amount detection means for detecting the deflection amount of the blade is connected to at least one of the vicinity of the entrance and the vicinity of the exit of the workpiece cutting portion of the blade. Blade deflection correcting means for suppressing local deflection of the blade in the axial direction are provided near the inlet portion and near the outlet portion, respectively, and these blade deflection correcting means are provided in the vicinity of the central portion, respectively. It is configured to be controlled based on the detection result of the total blade deflection amount detection means (II requirement 1).

Preferably, a blade deflection adjusting means for adjusting the deflection of the entire blade in the axial direction is provided, and the blade deflection adjusting means is configured to be controlled based on the detection result of the total blade deflection amount detecting means (claim 2).

Further, a dressing means for dressing the inner peripheral edge of the blade and a dressing timing ilJ control means for controlling the dressing timing of this dressing means are provided, and the dressing timing control means is controlled based on the detection results of the total blade deflection amount detection means. (Claim 3)

[Effect]

According to the structure of claim 1, the local deflection near the inlet and the local deflection near the outlet of the workpiece cutting portion of the blade are caused by at least one of the near the inlet and the near the exit, and the near the center, respectively. The amount of blade deflection is detected with high accuracy by the blade deflection amount detection means provided in the blade deflection amount detecting means, and the blade deflection is reliably corrected by each blade deflection correction means based on the accurately detected detection result.

Further, according to the second aspect of the present invention, the deflection of the entire blade can be adjusted with high precision by the blade deflection adjusting means based on the detection result of the total blade deflection amount detecting means.

Furthermore, according to the configuration of claim 3, the dressing timing can be controlled by 11 degrees better by the dressing timing control means based on the detection result of the total blade deflection amount detection means.

〔Example〕

FIGS. 1 to 3 show slicing II according to the present invention.
An example of this is shown.

As shown in FIGS. 1 and 2, this slicing device includes a guide rail 2 installed on a base 1, and a slide table (second blade) supported slidably along the guide rail 2. It has a part of the deflection adjusting means) 3, and a headstock 4 installed on the base 1 opposite to the slide table 3.

A main bearing 4a is provided on the upper part of the headstock 4, and a main shaft 6 is rotatably supported on the main bearing 4a.A main shaft drive motor 8 rotatably drives the main shaft 6 via a belt transmission mechanism 7. is installed. A tension disk (a part of the first blade deflection adjusting means) 9 is fixed to the tip of the main shaft 6, and this tension disk 9
It is configured to be rotationally driven by a rotational drive means (a part of the first blade deflection adjusting means) 5 consisting of a main shaft 6, a belt transmission mechanism 7, and a main shaft drive motor 8.

A blade 10 made of a doughnut-shaped thin plate is attached to the peripheral edge of the tension disk 9.
An inner peripheral blade 11 made of diamond particles or the like is fixed to the inner peripheral edge of the tension disc 9.
is rotated and its rotational speed N changes, so that it is displaced in the axial direction of the main shaft 6 (in the rotational axis direction of the blade 10) according to the rotational speed N. In other words, when the tension disk 9 rotates, a centrifugal force is applied to the peripheral edge of the tension disk 9 according to the rotational speed N, and thereby the magnitude and direction of the displacement in the direction of the rotational axis is applied from the tension disk 9 to the blade 10. is now determined.

A holding member 15 is placed on the slide table 3 so as to be slidable in the axial direction of the main shaft 6, and a semiconductor ingot (work 30) made of silicon is held on the holding member 15. The holding member 15 includes a ball screw 16 and a holding member drive motor 17 that rotationally drives the ball screw 16.
The main shaft 6 is configured to be slid in the axial direction of the main shaft 6 by an indexing and feeding means 18 having the above. Therefore, by sliding the holding member 15 toward the main shaft 6 side, one end of the workpiece 30 is held on the surface 10 of the blade 10.
It can be inserted into the inside of the blade 10 from the a side (work holding side) and protrude by a minute amount to the back surface 10b side of the blade 1o.

Further, the slide table 3 is provided with a dress II (dressing means) 19 for dressing the inner peripheral blade 11 so that the tip of the tool faces the inside of the blade 1o.

The slide table 3 is attached to the guide rail 2 by a cutting feed means (a part of the second blade deflection adjusting means) 14 having a ball screw 12 and a cutting feed motor 13 that rotationally drives the ball screw 12. It is configured to be slid along the main shaft 6 in a direction perpendicular to the main shaft 6. Therefore, by sliding the slide table 3 toward the opposite side in FIG. 1, the workpiece 30 can be cut and fed in the radial direction of the blade 10 (in the six directions of arrows in FIG. 2). And blade 1
By cutting and feeding the workpiece 30 with one end facing inside the blade 10 in the radial direction of the blade 10 while rotating the blade 10, one end of the workpiece 30 is sliced by the inner peripheral blade 11 into wafers (8 pieces). ) can be cut out.

The outer peripheral part of the workpiece 30 on the downstream side in the cutting feed direction, that is, the part of the workpiece 30 that is finally cut by the inner peripheral blade 11, includes:
A slice base 31 made of carbon or the like is fixed. This slicing base 31 is provided to prevent the final cut portion of the work 30 from chipping as a result of sudden release of cutting resistance applied to the blade 10 when cutting the work 30 is finished.

In the vicinity of the blade 10, non-contact blade deflection amount detection sensors (blade deflection amount detection means) 20, 21, and 24, such as magnetic sensors, for detecting the amount of deflection of the blade 10 are provided at three locations.

That is, these three blade deflection amount detection sensors 20
．． 21 and 24 are located on the trajectory C along which the workpiece 30 moves by cutting and feeding, and at a position facing the back surface 10b of the blade 10.

Moreover, these three blade deflection amount detection sensors 20.
21 and 24 are arranged at positions close to one end surface of the work 30 when cutting the work 30. One of the blade deflection amount detection sensors 20 is located near the inlet P1 of the workpiece cutting portion (P1 to P2) of the blade 10, that is, at the upstream end P in the rotational direction (direction of arrow B in FIG. 2).
Another blade deflection amount detection sensor 24 is arranged near the outlet P2 of the workpiece cutting portion of the blade 10, that is, near the downstream end P2 in the rotational direction, and the remaining one blade deflection amount detection sensor 24 is blade 10
It is arranged near the central part P3 of the workpiece cutting site.

Blade deflection correction means 25 and 26 for suppressing local deflection of the blade 10 in the axial direction are provided near the blade deflection amount detection sensors 20 and 21 provided near the inlet portion P1 and outlet portion P2, respectively. It is being As each blade deflection correction means 25, 26, for example, one is used that applies a fluid, a magnetic field, etc. to the front and back surfaces 10a and 10b of the blade 10, and corrects the deflection of the blade 10 without contacting the blade 10. There is.

FIG. 3 shows the configuration of the control section 40 of this slicing apparatus.

This control section 40 includes a central part reference displacement storage device 41, an entrance part reference displacement storage device 43, and an exit part reference displacement storage device 45.
, spindle drive motor control device (part of the first blade deflection adjustment means) 49, cutting feed motor control device (part of the second blade deflection adjustment device) 52, dress control device (
It includes a dress timing control means 62 and the like.

The center reference displacement storage device 41, the entrance reference displacement storage device 43, and the exit reference displacement storage device 45 each include a blade deflection amount detection sensor (hereinafter referred to as a "center sensor") provided near the center P3. ) 24, the blade deflection amount detection sensor (hereinafter referred to as "inlet sensor") provided near the inlet section P1, and the blade deflection amount detection sensor (hereinafter referred to as "inlet section sensor") provided near the exit section P2. Hereinafter, the detection results of 21 (hereinafter referred to as "exit sensor") are input.The center reference displacement storage device 41 stores the position of the workpiece 30 immediately before the start of cutting by the cutting feed motor 13 (the two points on the left in FIG. 2). When the center sensor 24 is moved to a position slightly to the left of the position indicated by the chain line,
The amount of deflection of the blade 10 in the vicinity of the central portion P3 detected in is stored as the central portion reference deflection amount Sa3. In addition, the entrance part reference displacement memory @N43 is the blade 10 near the entrance part P1 detected by the entrance part sensor 20 when the workpiece 30 is moved to the position immediately before starting cutting.
The deflection amount is stored as the inlet reference deflection amount Sa1. In addition, the exit section reference displacement storage device 45
is configured to store the amount of deflection of the blade 10 near the outlet P2 detected by the outlet sensor 21 when the workpiece 30 is moved to the position immediately before starting cutting as the outlet reference deflection amount S82. . Note that the fact that the workpiece 30 has been moved to the position immediately before the start of cutting is detected by a cutting feed detection means 521 of the cutting feed motor control device 52, which will be described later.

The center reference deflection l5a3 stored in the center reference displacement storage device 41, the entrance portion reference deflection amount Sat stored in the entrance portion reference displacement storage device 43, and the exit portion reference displacement storage device [
The outlet reference deflection 1582 stored in 45 is output to the center displacement comparator 42, the inlet displacement comparator 44, and the outlet displacement comparator 46, respectively. Central displacement comparator 4
In addition to the center reference deflection -Sa3, the current deflection 1Sb3 of the blade 10 near the center P3 detected by the center sensor 24 is input to the center displacement comparator 4.
2 is the true center deflection (the amount by which the vicinity of the center P3 of the blade 10 is actually deflected by cutting) 83 by subtracting the center reference deflection amount Sa3 from the center sensor value l5b3.
is configured to detect. Further, in addition to the above-mentioned inlet reference deflection amount Sa1, the current deflection amount Sb1 of the blade 10 near the inlet P1 detected by the inlet sensor 20 is input to the inlet displacement comparator 44, and this inlet displacement The comparator 44 is configured to detect the true entrance section deflection amount S1 by subtracting the entrance section reference deflection amount Sa1 from the entrance section sensor sensing amount Sb. In addition, the outlet displacement comparator 4
In addition to the exit section reference deflection amount S82, the current deflection amount Sb2 of the blade 10 near the exit section P2 detected by the exit section sensor 21 is input to the exit section displacement comparator 4.
6 is configured to detect the true outlet deflection amount S2 by subtracting the outlet reference deflection l582 from the outlet sensor sensing amount Sb2.

Center portion deflection amount S detected by the center portion displacement comparator 42
3 is a rotation speed calculation device (part of the first blade deflection adjustment means) 48, a cutting feed rate calculation device (part of the second blade deflection adjustment means) 51, and a dress timing determination device f.
(part of the dress timing control means) 61, the entrance section deflection calculation device 71F3, and the exit section deflection calculation device 73, respectively. Further, the amount of inlet deflection S1 detected by the inlet displacement comparator 44 is calculated by the cutting feed rate calculation device 51,
The exit section deflection IS2, which is output to the dress timing determination device 61 and the entrance section deflection calculation device °71 and detected by the exit section displacement comparator 46, is output to the cutting feed rate calculation device 5.
1, are output to the dress timing determination device 61 and the exit section deflection calculation device [73].

When receiving a drive command signal from a command means 523 of a cutting feed motor control device 52 (described later), the rotation speed calculation device 48 calculates the current rotation speed N of the tension disk 9 and the center detected by the center displacement comparator 42. Based on the central portion deflection amount S3, a target rotational speed Na of the tension disk 9 necessary to make the central portion deflection amount S3 zero is calculated, and a signal corresponding to the calculation result is sent to the main shaft drive motor control I device f49.
is configured to output to .

The spindle drive motor control device 49 sets the rotation speed N of the tension disk 9 in advance to the target rotation speed Na determined by the rotation speed calculation device 48 when receiving the signal from the rotation speed calculation device 48 . The main shaft drive motor 8 is configured to be rotated to the stored basic rotation speed No.

When the cutting feed speed calculation device 51 receives a drive command signal from the command means 523 of the cutting feed motor control device 152, the cutting feed speed calculation device 51 calculates the values in the inlet displacement comparator 44, the outlet displacement comparator 46, and the center displacement comparator 42, respectively. Based on the detected inlet deflection ISl, outlet deflection 182, and center deflection amount S3, the center deflection amount S3 shown in FIG. 5, the difference ΔS1 between the inlet deflection amount S1 and the center deflection amount S3, or The target cutting feed speed Va required to reduce the difference ΔS2 between the outlet deflection amount S2 and the center deflection amount S3 is calculated as II, and a signal corresponding to the calculation result is output to the cutting feed motor control unit [52]. is configured to do so.

The target cutting feed speed Va is calculated using, for example, the following two equations (2).

■a=■o-kS...■ Here, vO is the basic cutting feed rate set and stored in advance,
k indicates the calculation coefficient, S is the absolute value of S3, S+-83
, and the maximum value among the absolute values of S2-83 is substituted.

Further, the cutting feed rate calculation device 51 has S+, S2,
It is determined whether or not the predetermined cutting feed speed calculation condition is met based on $3, and as a result, if the predetermined cutting feed speed calculation condition is not met (when S is less than or equal to a predetermined value), the target cutting feed is Cutting feed motor control without calculating speed va [
It is also configured not to output a signal to the l device 52.

When the cutting feed motor control device 52 receives the signal from the cutting feed speed calculation device 51, the cutting feed speed ■ is set to the target cutting feed speed ■a calculated by the cutting feed speed calculation device 51.
Otherwise, the cutting feed motor 13 is controlled so that the basic cutting feed speed is VC+.

Further, this cutting feed motor control vA device 52 has a cutting feed position detection means 521, a cutting feed position determining means 522, and a command means 523. The cutting feed position detection means 521 detects the cutting feed position (position If in the cutting feed direction) of the workpiece 30 based on the pulse signal detected from the cutting feed motor 13, and the cutting feed position determining means 52
2, the cutting feed position of the workpiece 30 is determined based on the cutting feed position detected by the cutting feed position detection means 521 from the cutting start position @ (position II shown by the two-dot chain line on the left side in FIG. 2) to include the slicing base 31. Cutting end value M for only workpiece 30
(The position shown by the two-dot chain line on the right side in FIG. 2) is configured to determine whether or not it is within the range. Also,
The command means 523 calculates the rotational speed of a drive command signal when the cutting feed position determining means 522 determines that the cutting feed position of the workpiece 30 is within the range, and generates a stop command signal when determining that the cutting feed position of the workpiece 30 is outside the range. It is configured to output to the device 48, the cutting feed speed calculation device 51, the dress timing determination device 61, the entrance section deflection calculation device i71, and the exit section deflection calculation device 8 and 73, respectively.

When the dressing timing determination device 61 receives a drive command signal from the command means 523 of the cutting feed motor control device 52, it determines whether it is time to cause the dressing device 19 to perform dressing based on S+, 32.83. is configured to do so.

The dress control device 62 includes a dress timing determination device 61.
When it is determined that it is the dressing timing (described in detail later), a dressing command signal is output to the dressing device 19 at a predetermined time.

The entrance section deflection calculation device 71 is connected to the cutting feed motor control device 5.
When the drive command signal is received from the command means 523 of No. 2, the difference ΔS1 between the entrance section deflection amount S1 and the center section deflection amount S3 is calculated based on the entrance section deflection ISl and the center section deflection amount S3.
(see FIG. 5), and on the other hand, when the stop command signal is received, the difference ΔS1 is set to zero, and calculation signals corresponding to each result are output to the entrance section deflection control device 172. There is.

Based on the difference ΔS1 between the entrance part deflection amount S1 and the central part deflection MS3 determined by the entrance part deflection control device 71, the entrance part deflection control device 72 provides a control device near the entrance part sensor 20 so as to reduce the difference ΔS1. Blade deflection correction means provided (
It is configured to control the fluid pressure, magnetic force, etc. of 25 (hereinafter referred to as "inlet blade deflection correction means").

On the other hand, the exit section deflection calculating device 73 is configured to control the cutting and feeding motor control device 8.
When a drive command signal is received from the command means 523 of 8152, the difference ΔS2 between the outlet deflection 182 and the center deflection ls3 is calculated based on the outlet deflection amount S2 and the center deflection amount S3.
(see FIG. 5), and when the stop command signal is received, the difference ΔS2 is set to zero, and calculation signals corresponding to each result are output to the outlet deflection control device 74.

The exit section deflection control unit @74 is the exit section deflection calculation device 73.
Based on the difference ΔS2 between the outlet deflection 1iS2 and the central deflection amount S3 obtained in (referred to as "deflection correction means")2
It is configured to control the fluid pressure, magnetic force, etc. of 6.

The control unit 40 also controls the holding member drive motor 17 for indexing and feeding the workpiece 30 with respect to the blade 10.

In addition, the cutting feed speed calculating device 51 and the dressing timing determining device 61 are provided with a substitute for the inlet portion deflection amount S1 detected by the inlet portion displacement comparator 44 and the outlet portion deflection amount S2 detected by the outlet portion displacement comparator 46. In addition, the calculation results of the entrance section deflection calculation device 71 and the calculation results of the exit section deflection calculation device 73 may be respectively input.

Here, the above-mentioned control section 40 when performing slicing processing
A specific example of the control is shown in FIG.

To start this control, first, the main shaft drive motor 8 of the rotation drive means 5 is driven to rotate the tension disc 9 at the basic rotation speed No. (Step S+)
At the same time, the holding member drive motor 1 of the indexing and feeding means 18
7 to slide the workpiece 30 held by the holding member 15 toward the spindle 6 (step 82). As a result, one end of the workpiece 30 is attached to the surface 10a of the blade 10.
The blade 1 is inserted into the inside of the blade 10 from the side.
0 is made to protrude by a minute amount toward the back surface 10b side.

Next, the cutting feed motor 13 of the cutting feed means 14 is driven to move the workpiece 30 in the radial direction of the blade 10 at a basic cutting feed speed of 0 (step 83).

Simultaneously with the movement of the workpiece 30, the cutting feed position detection means 521 detects the cutting feed position of the workpiece 30 (step 84), and each sensor 20°21.24 detects the current deflection of the entrance section Sbz and the current deflection of the exit section L5b2. and detects the current deflection amount Sb3 of the central portion (step Ss
). Then, the workpiece 30 is detected by the cutting feed position detection means 521.
It is determined whether or not the position has exceeded the position immediately before the start of cutting (step Ss), and if it is determined in step S6 that the position has not exceeded the position immediately before the start of cutting, the cutting feed position detection means 521 moves the position immediately before the start of cutting to the position immediately before the start of cutting. It is determined whether or not it has moved (step S7), and steps S4 and subsequent steps are repeated until it is determined in step S7 that the cutting has moved to the position immediately before starting cutting (rYEsJ).

If it is determined in this step S7 that the position has moved to the position immediately before starting cutting, that is, it is determined that cutting is immediately before starting, rYEs
Current deflection amount Sb1 of the entrance section detected immediately before determining J
, exit section current deflection 1sb2 and center section current deflection l5b
3 is the reference deflection amount of the inlet section S81 and the reference deflection amount of the outlet section Sa2.
The center reference deflection amount Sa3 is stored in the inlet reference displacement storage device 43, the outlet reference displacement storage device 45, and the center reference displacement storage W141 (step S8).
), the inlet displacement comparator 44 and the outlet displacement comparator 4
6 and the center displacement comparator 42 detect the inlet deflection amount S1, the outlet deflection amount S2, and the center deflection amount S3, respectively (steps 89 to 511).

On the other hand, if it is determined in step S6 that the cutting start position N (a position i that has not reached the cutting start position to be described later) is exceeded, steps S7 and S8 are skipped and steps 89 to S11 are executed. do.

After executing step S11, the cutting feed position detection means 52
1, it is determined whether the workpiece 30 is beyond the cutting start position (step 512). If it is determined in this step S12 that the workpiece 30 is beyond the cutting start position,
Skipping the determination in step S13, step S1 described below
4 and step S15.

On the other hand, if it is determined in step S12 that the workpiece 30 has not exceeded the cutting start position, the cutting feed position detection means 521 further determines whether or not it has moved to the cutting start position (step 513). Step S4 and subsequent steps are repeated until it is determined that the cutting start position has been reached (determined as rYEsj). Then, when it is determined in step S13 that the cutting start position has been reached, that is, cutting has started, the rotation speed calculation unit w48 calculates the target rotation speed Na of the tension disc 9 based on the central portion deflection 183 (step 5e11), the main shaft. Drive motor control device 1f
At 49, the rotation speed N of the tension disc 9 is the target rotation speed N.
The main shaft drive motor 8 is controlled so that the result is a (step 515). As a result, the rotational speed N of the tension disk 9 is controlled to the target rotational speed Na, and the blade 10 is displaced in the axial direction according to the target rotational speed Na.
Blade 1 so that the amount of deflection near the central part P3 is zero.
0 overall deflection is adjusted.

When executing step S14 and step S5 above, step 8% and step S
17 will also be held. That is, the inlet deflection calculation device 71 and the outlet deflection computing device 73 each calculate the inlet deflection amount S.
1 and the center portion deflection amount S3 and the exit portion deflection I
The difference ΔS2 between S2 and the center deflection 183 is determined (step 516), and the inlet deflection correction means 25 controls the inlet deflection control unit 72 based on the calculation result of the inlet deflection adjustment H71. At the same time, the outlet blade deflection correction means 26 is adjusted by 11J m in the outlet deflection control device 74 based on the calculation result of the outlet deflection calculation device 73 (step Sv). As a result, the inlet blade deflection correcting means 25 and the outlet blade deflection correcting means 26 are respectively driven to adjust the inlet deflection amount S1 and the center deflection amount S.
3, and the difference ΔS2 between the outlet deflection 182 and the central deflection 83 are reduced, so that the local deflection near the inlet P1 and the local deflection near the outlet P2 of the blade 10 are corrected. be done.

Furthermore, when executing steps S% to Sv, in parallel with this execution, the cutting feed rate calculation device 51
It is determined whether or not a predetermined cutting feed speed calculation condition is met (step 518). That is, the absolute value of S3 above,
It is determined whether the absolute value of 5l-83 and the absolute value of 82-83 each exceed a preset allowable limit value R1.

If it is determined in step S18 that the cutting feed rate calculation condition is met, that is, R1<1831, then R1<1s1-
83 1 and R1<182-8
3. If it is determined to be 1, the cutting feed rate calculation device 51 similarly calculates the target cutting feed rate Va based on the inlet portion deflection amount S1, the outlet portion deflection amount S2, and the center portion deflection amount S3 (Step 819), Cutting feed motor control [l The device 52 controls the cutting feed motor 13 so that the cutting feed speed V becomes the target cutting feed speed va (step 820
).

As a result, the cutting feed speed V is tilled to the target cutting feed speed Va (the cutting feed speed V is reduced), the cutting resistance is reduced, and the elastic restoring force of the blade 10 causes the central portion of the blade 10 to deflect by an amount S3, The axial deflection of the entire blade 10 is adjusted so that the difference ΔS1 between the inlet deflection amount S1 and the center deflection IS3 or the difference ΔS2 between the outlet deflection amount S2 and the center deflection amount S3 becomes small.

On the other hand, if it is not the cutting feed rate calculation condition in step S18,
In other words, if it is determined that R1≧IS31, R1≧ls+ -831, and R1≧182-831, step SFI and step 820 are not performed, and step 8
Do 21.

In step S21, the dress timing determination device 61
Based on 81.82.83, it is determined whether a predetermined dress timing condition is met. That is, whether the absolute value of S3 exceeds the limit value R2 (>Rt) and 5
It is determined whether the absolute value of l-83 and the absolute value of S2-83 each exceed the limit [IR3 (>R1).

If it is determined in step S21 that the dress timing condition is met, that is, R2<1831, then R3<is+
-831 and R3<I82-
If it is determined to be 831, the dressing device 62 issues a dressing command to the dressing device 19 (step 522).

Thereby, the dressing device 19 performs dressing after the processing of the work 30 currently being cut is completed. After executing step S22, step S23 is performed.

On the other hand, if it is determined in step S21 that the dress timing conditions are not met, that is, R2≧1531, R3≧ls+ -831, and R3≧182-831, step S23 is performed without performing step S22.

In step 823, the cutting feed position detection means 521 determines whether the workpiece 30 has reached the cutting end position (the position indicated by the two-dot chain line on the right in FIG. 2), and determines that the cutting end position has not been reached. If so, repeat steps S4 and subsequent steps until it is determined that the cutting end position has been reached, and if it is determined that the cutting end position has been reached, the rotation speed N of the tension disc 9 is switched to the basic rotation speed No (step 524). )
At the same time, the cutting feed speed V is basically cut l! li feed speed V
After switching to o (step 525), step S26
I do.

That is, in step 826, the cutting feed position detection means 521 detects that the workpiece 30 is at the complete cutting position, which is further to the right than the position indicated by the two-dot chain line on the right in FIG.
It is determined whether the slicing base 31 has also reached the complete cutting position>, and if it is determined that the complete cutting completion position has not been reached, this step S25 is continued until it is determined that the complete cutting completion position has been reached. is repeated, and if it is determined that the entire cutting completion position has been reached, a predetermined cutting completion operation is performed, and then this control is terminated.

In the configuration of this slicing device, from the start of cutting the workpiece 30 until the cutting of only the workpiece 30 is finished,
The rotation speed N of the tension disk 9 is controlled based on the detection result of the central sensor 24 by the first blade deflection adjusting means, which includes the rotation drive means 5, the tension disk 9, the rotation speed calculation device 48, and the main shaft drive motor 1llllDli149. Thus, the deflection of the entire blade 10 is adjusted. At the same time, the inlet blade deflection correction means 25
and the outlet blade deflection correcting means 26, based on the detection results of each sensor 20, 21, 24, the blade 1.
0 entrance i! ! Local deflection near JP+ and exit part P2
Local deflection in the vicinity is suppressed. Therefore, during cutting, the deflection of the blade 10 is always applied to the entrance of the workpiece cutting area.
The center part and the exit part can be corrected to be on the same plane, and the workpiece 30 can be processed with high precision.

Moreover, in the configuration of this slicing apparatus, the deflection of the entire blade 10 is adjusted by the first blade deflection adjusting means, and the blade deflection correction means 25 and the outlet blade deflection correcting means 26 are used to adjust the deflection of the entire blade 10.
Even if the local deflection of the blade 10 is corrected, if the deflection exceeding a predetermined value still occurs in the blade 10 (center deflection amount S
3 exceeds the limit value R1, the absolute value of the difference ΔS1 between the entrance section deflection amount S1 and the center section deflection amount S3 exceeds the limit value R1, and the exit section deflection amount S2 and the center section deflection amount S2 exceed the limit value R1. If the absolute value of the difference ΔS2 from the deflection amount S3 exceeds the limit value R1), the second blade deflection adjustment consisting of the cutting feed means 14, the cutting feed motor control device 52, and the cutting feed speed control device [51] By means of each sensor 20.
Based on the detection result of 21.24, the cutting feed rate (2) is also controlled to adjust the deflection of the entire blade 10. Therefore, the deflection of the blade 10 can be more reliably removed during cutting.

Further, in the configuration of this slicing apparatus, the blade 10 is adjusted by the first and second blade deflection adjusting means.
Adjusting the overall deflection and correcting each blade deflection 25
．． Even if the local deflection of the blade 10 is corrected by 26, if the deflection of the blade 10 exceeds a predetermined value (if the absolute value of the center deflection IS3 exceeds the limit value R2, the inlet deflection amount Difference Δ between S1 and center deflection amount S3
When the absolute value of S1 exceeds the limit value R3 and when the absolute value of the difference ΔS2 between the outlet deflection amount S2 and the center deflection amount S3 exceeds the limit 1ifiR3, the dress control device 6
The dressing timing ilJm means consisting of 2 and the dressing timing calculating device 61 determines that the deflection of the blade 10 has increased due to the sharpness of the inner circumferential blade 11 becoming dull, and the dressing device 19 performs dressing. . Therefore, during cutting, the sharpness of the inner peripheral blade 11 can be maintained in a good state, and the deflection of the blade 10 can be reduced.

In addition, in the configuration of this slicing apparatus, the blade deflection layer detection sensors 20, 21, and 24 are connected to the workpiece cutting portion of the blade 10 near the entrance portion P1, near the exit portion P2, and at the central portion P1.
In addition, blade deflection correction means 25, 26 are provided near the inlet portion P1 and the blade deflection amount detection sensor 20, 21 near the outlet portion P2, respectively. Therefore, the three areas near the inlet P1, near the outlet P2, and near the center P3 of the blade 10 are
Deflection amount S1. S2 and S3 can be detected, and local deflection near the inlet 811iP1 of the blade 10 and local deflection near the outlet P2 can be corrected. Moreover, each blade deflection correction means 25
．． 26 are three blade deflection amount detection sensors 20, respectively.
, 21. Since the structure is configured to perform local deflection suppression based on the detection results of It is possible to correct the local deflection, or to correct the local deflection near the entrance portion P1 while taking into account the deflection near the exit portion P2 and the center portion P3 of the blade 10.

Furthermore, the amount of deflection S1.82.8 at three locations near the inlet P1, near the outlet P2, and near the center P3 of the blade 10
3 can be detected, the deflection adjustment of the entire blade 10 by the first blade deflection adjusting means and the second blade deflection adjusting means and the dress timing 1IjIll by the dress timing controlling means are made into precise deflection detection results. As a result, the deflection of the entire blade 10 can be adjusted with high precision, and the dressing timing can be controlled with high precision.

Therefore, according to the configuration of this slicing device, it is possible to improve the degree of processing radius and also to perform dressing at an appropriate time.

In particular, in the configuration of this slicing apparatus, the deflection adjustment by the first and second blade deflection adjusting means and the local deflection correction by the blade deflection correcting means 25 and 26 at the inlet and outlet sections are performed based on the center deflection amount S3. and dress timing control by the dress timing control means.

That is, the first blade deflection adjusting means adjusts the deflection of the entire blade 10 by controlling the rotation speed N of the tension disk 9 so that the center deflection mS3 becomes zero. Further, in the second blade deflection adjusting means,
Center portion deflection amount S3, entrance portion deflection amount S1 and center portion deflection amount S
3 and the difference ΔS1 or exit section deflection 182 and central section deflection 1
The deflection of the entire blade 10 is adjusted by adjusting the cutting feed speed V so that the difference ΔS2 from 83 becomes small. In addition, the inlet blade deflection correcting means 25 suppresses the blade 10 in the axial direction so that the difference ΔS1 between the inlet deflection amount S1 and the center pinch mS3 is reduced.
The local deflection near the entrance portion P1 is corrected. Further, the outlet blade deflection correcting means 25 suppresses the blade 10 in the axial direction so that the difference ΔS2 between the outlet deflection amount S2 and the center deflection amount S3 is reduced.
The local deflection near the exit portion P2 is corrected. Furthermore, in the dress timing control means, when the absolute value of the central portion deflection amount S3 exceeds the limit value R2, the absolute value of the difference ΔS1 between the entrance portion deflection 1s1 and the central portion deflection amount S3 is the limit t! Dressing is performed when iR3 is exceeded and when the absolute value of the difference ΔS2 between the outlet deflection amount S2 and the center deflection mS3 exceeds a limit value R3.

In other words, the vicinity of the central part P3 of the workpiece cutting part of the blade 10 is the part where the workpiece 30 continues to be cut for the longest time from the time when the workpiece 30 is started until the time when the workpiece 30 is finished being cut.
This is the part that most affects machining accuracy. therefore,
Like this slicing device, the first and second blade deflection adjustment means adjust the deflection mS3 near the center P3 of the workpiece cutting portion of the blade 10, and each blade deflection correction means 25 and 26 adjust the deflection at By correcting the deflection and controlling the dressing timing using the dressing timing tlJm means, it is possible to further improve the machining accuracy and to perform the dressing at a more appropriate time.

In addition, in the configuration of this slicing IT, a cutting feed position pressure detection means 521, a cutting feed position determining means 522, and a command means 523 are provided, and the deflection adjustment by the first and second blade deflection adjusting means and the inlet and outlet sections are performed. The range in which the local deflection correction by the blade deflection correction means 25 and 26 and the dress timing control by the dress timing control means are limited to the range from the cutting start position to the cutting end position, as follows. There are advantages.

That is, since the center sensor 24 is provided near the center P3 of the workpiece cutting portion of the plate 10, when the workpiece 30 passes the cutting end position, the slice base 31 enters the detection range of the center sensor 24. slice base 3
1 is made of a conductor such as carbon. For this reason,
When the slice base 31 enters the detection range of the central sensor 24, the central sensor 24 malfunctions, and the central sensor 24
Detection results become incorrect. Therefore, if the range in which the deflection adjustment, local deflection correction, and dress timing ilJill of the blade 10 is performed is limited to a range,
It is possible to prevent deflection adjustment, local deflection correction, and dress timing control of the blade 10 from being performed based on inaccurate detection results from the central sensor 24.

In the above embodiment, the inlet sensor 20 and the outlet sensor 21 are placed on the trajectory C along which the workpiece 30 is moved by the cutting feed, but in FIG.
As shown in 1a, it may be arranged at a position that avoids the trajectory C. Furthermore, the inlet sensor 20 and the outlet sensor 21 are connected to the back surface 1 of the blade 10 in the above embodiment.
Although it is provided on the 0b side, it may be provided on the surface 10a side of the blade 10. However, in this case, each sensor 20a, 21a is arranged at a position away from the trajectory C to avoid interference with the workpiece 30.

In addition, in the above embodiment, the central sensor 24 was placed on the trajectory of the slice base 31 moving by the cutting feed, as shown in FIG. You may also do so. In this way, there is no need to limit the range in which deflection adjustment and dress timing control are performed.

In addition to the blade deflection adjusting means shown in the above embodiments, the blade deflection adjusting means may be one that adjusts the amount of deflection of the entire blade 10 by, for example, moving the tension disk 9 in the direction of the rotation axis.

The cutting feed may be performed by moving the blade 10 in the radial direction instead of the workpiece 30.

Roughly speaking, in the above embodiment, the blade deflection amount detection means 20
(20a), 21 (21a), and 24 are provided at three locations near the inlet, near the outlet, and near the center of the workpiece cutting site, and these three blade deflection amount detection means 20 (20
a), 21 (21a).

The local deflection correction and the overall deflection adjustment of the blade 10 are controlled based on the detection results of No. 24, but the blade deflection amount detecting means is used in two locations, one near the entrance and the other near the center of the workpiece cutting site. 88Ill-like deflection of the blade 10 and the overall deflection based on the detection results of the two blade deflection amount detection means. The adjustment may be controlled to fill.

Further, the overall deflection adjustment of the blade 10 may be performed by only one of the first and second blade deflection adjusting means.

(Effects of the Invention) The slicing apparatus according to claim 1 is provided with blade deflection amount detection means for detecting the deflection amount of the blade in at least one of the vicinity of the inlet and the outlet of the workpiece cutting portion of the blade, and in the vicinity of the central portion. , blade deflection correcting means for correcting local deflection of the blade are provided near the inlet and near the exit, respectively, and these blade deflection correcting means each adjust the blade deflection based on the detection result of the total blade deflection amount detecting means. In order to correct the local deflection, it is possible to correct the local deflection near the outlet while considering the deflection near the inlet and the center of the blade, or to correct the deflection near the outlet and the center of the blade. It is possible to correct the local deflection near the inlet while taking into account the deflection in the vicinity.Therefore, the local deflection near the inlet of the blade and the eight-part deflection near the outlet can be corrected with precision. It is possible to improve the machining efficiency.

The slicing apparatus according to claim 2 is provided with a blade deflection adjusting means for adjusting the deflection of the entire blade in the axial direction, and the blade deflection adjusting means adjusts the deflection of the entire blade in the axial direction based on the detection result of the total blade deflection amount detecting means. Since the blade is adjusted so that deflection of the entire blade can be reliably removed, machining accuracy can be further improved.

The slicing apparatus according to claim 3 is provided with a dressing means for dressing the inner circumferential edge of the blade, and a dressing timing control means for controlling the dressing timing of the dressing means, and the dressing timing controlling means controls the total blade deflection amount detecting means. Since the dressing timing of the dressing means is controlled based on the detection result, the dressing timing can be controlled with high accuracy, and the dressing can be performed at an appropriate time.

[Brief explanation of the drawing]

FIG. 1 is a partially sectional front view showing an embodiment of a slicing apparatus according to the present invention, FIG. 2 is a sectional view taken along line II-If in FIG. 1, and FIG. 3 is a block diagram showing a control section. Figure 4 is a flowchart showing a specific example of Ill l of the control unit, and the fifth
The figure is a graph showing the relationship between the cutting feed position and the deflection amount of the blade, and FIG. 6 is a sectional view showing the installation position of the blade deflection amount detection means in a conventional slicing device. 5.9,48.49...First blade deflection adjustment means, 10...Blade, 11...Inner peripheral blade, 14,51
．． 52...Second blade deflection adjustment means, 19...
Dressing means, 20, 208...Blade deflection amount detection means provided near the entrance of the workpiece cutting portion of the blade, 2
1.218... Blade deflection amount detection means provided near the outlet of the workpiece cutting portion of the blade, 24... Blade deflection amount detection means provided near the center of the workpiece cutting portion of the blade, 25.26.・Blade deflection correction means,
30...Work, 61.62...Dress timing control means. Figure Figure

Claims (1)

[Claims] 1. One end of the workpiece is faced inside a blade having a circular inner circumferential edge, and the blade or the workpiece is cut and fed in the radial direction of the blade while rotating the blade. In the slicing device that cuts one end of the workpiece to cut out a thin piece, the blade deflection amount detection means for detecting the deflection amount of the blade is connected to at least one of the vicinity of the entrance and the vicinity of the exit of the workpiece cutting portion of the blade. Blade deflection correcting means for suppressing local deflection of the blade in the axial direction are provided near the inlet portion and near the outlet portion, respectively, and these blade deflection correcting means are provided in the vicinity of the central portion, respectively. A slicing apparatus characterized in that the slicing apparatus is configured to be controlled based on the detection result of the total blade deflection amount detection means. 2. A blade deflection adjusting means for adjusting the deflection of the entire blade in the axial direction is provided, and the blade deflection adjusting means is configured to be controlled based on the detection result of the total blade deflection amount detecting means. The slicing apparatus according to claim 1. 3. Dressing means for dressing the inner peripheral edge of the blade and dressing timing control means for controlling the dressing timing of this dressing means are provided, and this dressing timing control means is based on the detection result of the total blade deflection amount detection means. The slicing device according to claim 1 or 2, characterized in that it is configured to be controlled.