JPH04102426U - Fluid vibration detection sensor for fluidics flowmeter - Google Patents

Abstract

(57) [Summary] [Purpose] In a fluid vibration detection sensor for a fluidic flowmeter, two piezoelectric films can output stable electrical signals in response to fluid vibrations generated by a fluidic oscillator. The purpose is to improve sexual performance. Structure Two rooms 20c and 20d, 20e and 20f are formed by each of two piezoelectric films 20a and 20b. Connecting pipes 20 arranged in a sash pattern crossing each other
g, 20h interconnect the two rooms on one side with the two rooms on the other side. A varying pressure is introduced into each of the interconnected chambers by fluid vibrations of a fluidic oscillator. This makes it possible to apply a similar differential pressure to the two piezoelectric films, and to make the conduit short and large in diameter.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention allows the gas that flows into the gas inlet to pass through the jet nozzle and downstream of the jet nozzle. A stream with a frequency proportional to the flow rate is ejected towards a target located in the center. It has a fluidic oscillator that generates body vibrations, and detects this fluid vibration to e.g. A fluidic oscillator is used in a fluidic flowmeter to measure the flow rate of gas. This relates to a fluid vibration detection sensor that measures fluid vibrations that occur as pressure fluctuations. be.

0002

[Conventional technology]

Fluidic oscillators conventionally used in fluidic flowmeters include , the structure shown in FIG. 4 is generally used. In the same figure, for ease of understanding The fluidic oscillator is shown with the lid removed. In the case body 1 of the oscillator, , a gas inlet 1a to which the gas inflow pipe is connected so as to be connected in the middle of the gas pipe; and a gas outlet 1b to which a gas outlet pipe is connected.

0003 The case body 1 also includes a gas inflow chamber 1c formed adjacent to the gas inflow port 1a. and a gas outlet chamber 1d formed adjacent to the gas outlet 1b are formed. , between the gas inlet chamber 1c and the gas outlet chamber 1d, the gas flowing into the gas inlet 1a is An ejection nozzle 1e is formed to eject the gas from the gas inflow chamber 1c to the gas outflow chamber 1d. There is. In the gas outflow chamber 1d, there is a tarpaulin located at the center downstream of the jet nozzle 1e. A get 1f is provided.

0004 In the above configuration, gas flows from the gas pipe to the gas inlet 1a as shown by the arrow. The gas is ejected from the ejection nozzle 1e to the gas outflow chamber 1d through the gas inflow chamber 1c. . The gas ejected from the ejection nozzle 1e hits the target 1f due to the Coanda effect. The flow follows. The pressure caused by this flow is transmitted to the jet nozzle 1e, and the flow switch. This switching occurs alternately, and the flow has a frequency proportional to the flow rate. Generates body vibration.

[0005] Due to the generation of this fluid vibration, the pressure inside the fluidic oscillator changes periodically. However, in order to detect this with a high SN ratio, it is necessary to sample the static pressure near the outlet of the jet nozzle 1e. It has been found to be most effective to Pressure outlet ports A and B are formed in the chamber 1d at both ends of the outlet of the jet nozzle 1e, A piezoelectric membrane type fluid vibration detection sensor as shown in FIG. 2, pressure is introduced.

[0006] The illustrated piezoelectric film type fluid vibration detection sensor 2 is made up of two piezoelectric films 2a and 2b. It has three cut chambers 2c to 2e, and a pressure introduction pipe 2f is connected to the central chamber 2d. A pressure outlet A is connected to the chambers 2c and 2e at both ends through a pressure introduction pipe 2g. The pressure outlet ports B are connected to each other.

[0007] In addition, pressure extraction ports A and B based on pressure vibration generated by fluid vibration. Since static pressure is always large on one side and small on the other, the movements of the piezoelectric films 2a and 2b are in opposite phases. becomes. Therefore, by connecting the outputs of the two piezoelectric films 2a and 2b, An electrical signal output is obtained only when pressure fluctuations occur due to fluid vibrations, and this electrical signal is By processing the air signal, the flow rate can be determined by calculation. Also, this frame Luidic oscillators are small and have no moving parts, making them highly durable flowmeters. It is extremely effective.

[0008]

[Problem that the idea aims to solve]

However, in the sensor described above, the pressure from the pressure outlet A is in one room 2d. The pressure from the pressure outlet B is introduced into the two chambers 2c and 2c. Since the pressure is introduced into rooms 2e and 2e, it is possible to connect pressure outlets A and B to rooms 2d and 2e. There is a possibility that a difference will occur between the pressures introduced into 2c and 2e. In other words, the department Pressure acting on the piezoelectric films 2a and 2b from the room 2d side is applied from the rooms 2c and 2e sides. This causes a difference in the electromotive force obtained from the piezoelectric films 2a and 2b. However, there is a problem in that the electrical signal generated by the sensor is unstable.

[0009] In addition, the pressure enters the room through a long pipe, which results in poor response and requires a fast response speed. This is especially problematic when required.

0010 Therefore, in view of the above-mentioned conventional problems, the present invention is designed to generate a fluidic oscillator. The two piezoelectric films can output stable electrical signals in response to fluid vibrations. Our first objective is to provide a fluid vibration detection sensor for a fluidic flowmeter. ing.

[0011] In view of the above-mentioned conventional problems, the present invention also provides a fluidic flow rate system with excellent responsiveness. The second objective is to provide a fluid vibration detection sensor for a meter.

0012

[Means to solve the problem]

The fluidic flowmeter developed by this invention to solve the first problem mentioned above. The fluid vibration detection sensor moves the gas that has flowed into the gas inlet through the jet nozzle. It is ejected towards the target located in the center downstream of the jet, and the frequency is proportional to the flow rate. A fluidic oscillator that generates fluid vibrations with a certain number of vibrations and two piezoelectric films are used to Pressure fluctuates due to fluid vibrations generated by a fluidic oscillator in the cut chamber This system has a fluid vibration detection sensor that measures fluid vibration as pressure fluctuation by introducing A fluid device that measures flow rate using fluid vibration detected by a fluid vibration detection sensor. In the piezoelectric flowmeter, the piezoelectric film is partitioned by one of the two piezoelectric films. a first and second chamber partitioned by the other of the two piezoelectric films; a third and a fourth room; the first room, the fourth room and the third part; The room communicates with the second room, and the first room and the third room communicate with each other. The pressure that fluctuates due to the fluid vibration is introduced into the room. It is a feature.

[0013] In order to solve the second problem mentioned above, the fluidic flowmeter developed by this invention The fluid vibration detection sensor is arranged between the first room, the fourth room, the third room, and the front. The connecting pipes that connect the second rooms are arranged in a cross-section pattern. It is characterized by

[0014]

[Effect]

In the above configuration, two rooms are formed by each of the two piezoelectric films, and each piezoelectric The two chambers formed by the membrane are mutually connected to the two chambers formed by the other piezoelectric membrane. and each of the rooms communicated with each other by fluid vibrations of a fluidic oscillator. Since varying pressure is introduced into each piezoelectric film, the same pressure is applied to the two piezoelectric films. Such a differential pressure will be applied.

[0015] In addition, two chambers formed by each piezoelectric film are replaced by two chambers formed by another piezoelectric film. Two rooms and connecting pipes that communicate with each other are arranged in a cross-over manner. Therefore, tubes for introducing pressure that fluctuates due to fluid vibrations into rooms that communicate with each other. The path can be made short and large in diameter.

[0016]

【Example】

Hereinafter, embodiments of the present invention will be described based on the drawings. Figures 1 to 3 are based on the present invention. Figure 1 shows a fluidic flowmeter incorporating a fluidic vibration detection sensor. A top view of the Dick oscillator with the lid removed, Figure 2 is a sectional view taken along line X-X in Figure 1, and Figure 3 is the main view. FIG. 4, parts equivalent to those described above with respect to FIG. 4 are given the same reference numerals and A detailed explanation of this part will be omitted.

[0017] In the figure, 1g is a lid that closes the top opening of the case body 1 of the fluidic oscillator. , 20 is a fluid vibration detection sensor according to the present invention, and this fluid vibration detection sensor 20 is attached to the bottom surface of the case body 1 of the fluidic oscillator.

[0018] The fluid vibration detection sensor 20 has two piezoelectric films 20a, as shown in FIG. The first and second chambers 20c and 20d are partitioned by the piezoelectric film 20a, Third and fourth chambers 20e and 20f are partitioned by a piezoelectric film 20b, respectively. is formed. The first room 20c and the fourth room 20f are connected by a connecting pipe 20g. The second room 20d and the third room 20e are connected to each other by a connecting pipe 20h. has been done. In addition, pressure is extracted from the first chamber 20c via a pressure introduction pipe 20i. A pressure outlet A is connected to the third chamber 20e, and a pressure outlet B is connected to the third chamber 20e through a pressure introduction pipe 20j. each connected.

[0019] The first and second chambers 20c and 20d are connected to the pressure outlet A, and the third and second chambers 20c and 20d are connected to the pressure outlet A. 4 chambers 20e and 20f correspond to the pressure outlet B, respectively, in the case body 1. The first and second chambers 20c and 20d are arranged overlappingly on the lower surface of the and the third and fourth chambers 20e and 20f are juxtaposed on the lower surface of the case body 1. It is. In addition, the connecting pipe 20g and the connecting pipe 20h cross each other in a sash-like shape. It is arranged in

[0020] With the above configuration, the first part is connected from the pressure outlet A through the pressure introduction pipe 20i. Pressure is introduced into the chamber 20c, and the pressure introduced into this first chamber 20c is further communicated. It is also introduced into the third chamber 20f via the pipe 20g. On the other hand, pressure outlet B? Pressure is introduced into the third chamber 20e through the pressure introduction pipe 20j, and this third section The pressure introduced into the chamber 20e is further transferred to the second chamber 20d via the connecting pipe 20h. force is introduced.

[0021] In this way, the pressure from pressure outlets A and B is introduced into each room. Therefore, no matter which pressure outlet A or B introduces higher pressure, the same conditions apply. In this case, a differential pressure is applied to each of the two piezoelectric films 20a and 20b, and both piezoelectric films There is less difference in the electromotive force generated by 20a and 20b, and a stable electrical signal is output. sensor that can be used to

[0022] In addition, by arranging as shown in the figure, piezoelectric By shortening the distance to the membranes 20a and 20b and increasing the diameter of the entrance to each chamber. This makes it possible to improve responsiveness.

[0023]

[Effect of the idea]

As explained above, according to the present invention, the shape is formed by each of the two piezoelectric films. The two chambers formed by the piezoelectric film are interconnected with the two chambers formed by the other piezoelectric film, and the Pressure fluctuates due to fluid vibrations of a fluidic oscillator in each of the connected rooms. The force is introduced separately so that the same differential pressure is applied to the two piezoelectric films. , the pressure of the two plates is adjusted according to the fluid vibrations generated by the fluidic oscillator. It becomes possible to output stable electrical signals from the electrical membrane.

[0024] In addition, two chambers formed by each piezoelectric film are replaced by two chambers formed by another piezoelectric film. The connecting pipes that communicate with the two rooms are arranged crosswise and cross each other. A short pipe line is used to introduce pressure that fluctuates due to fluid vibration into a room that communicates with the In addition, since the diameter can be increased, responsiveness can be improved.

[Brief explanation of drawings]

FIG. 1 is a top view showing an embodiment of a fluidic flowmeter incorporating a flow vibration detection sensor according to the present invention.

FIG. 2 is a sectional view taken along line XX in FIG. 1;

FIG. 3 is an enlarged sectional view of the flow vibration detection sensor in FIG. 1;

FIG. 4 is a top view showing a conventional general fluidic flowmeter.

FIG. 5 is a sectional view showing a conventional fluid vibration detection sensor.

[Explanation of symbols]

1a Gas inlet (gas inlet) 1e Spout nozzle 1f target 20 Fluid vibration detection sensor 20a, 20b piezoelectric film 20c 1st room 20d Second room 20e Third room 20f 4th room 20g, 20h connecting pipe

Claims (2)

[Scope of utility model registration request] 1. A fluidic oscillator that causes the gas that has flowed into the gas inlet to be ejected through the ejection nozzle toward a target located at the center downstream of the ejection nozzle, thereby generating fluid vibrations having a frequency proportional to the flow rate. , a fluid vibration detection sensor that measures fluid vibration as pressure fluctuation by introducing pressure that fluctuates due to fluid vibration generated by a fluidic oscillator into a room partitioned by two piezoelectric films,
In this fluidic flowmeter that measures the flow rate using fluid vibrations detected by the fluid vibration detection sensor, a first
and a second room, and third and fourth rooms partitioned by the other of the two piezoelectric films, the first room, the fourth room, and the third room. and the second chamber, and the fluid vibration detection sensor is configured to communicate with the first chamber and the third chamber, respectively, and to introduce pressures that vary due to the fluid vibration into the first chamber and the third chamber, respectively. 2. Communication pipes communicating the first room and the fourth room, and the third room and the second room, respectively, are arranged in a cross-crossing manner. The fluid vibration detection sensor according to claim 1.