JP7512071B2 - CURABLE RESIN COMPOSITION, CURED FILM AND DISPLAY DEVICE - Google Patents
CURABLE RESIN COMPOSITION, CURED FILM AND DISPLAY DEVICE Download PDFInfo
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- JP7512071B2 JP7512071B2 JP2020074902A JP2020074902A JP7512071B2 JP 7512071 B2 JP7512071 B2 JP 7512071B2 JP 2020074902 A JP2020074902 A JP 2020074902A JP 2020074902 A JP2020074902 A JP 2020074902A JP 7512071 B2 JP7512071 B2 JP 7512071B2
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- 239000011342 resin composition Substances 0.000 title claims description 101
- 150000001875 compounds Chemical class 0.000 claims description 159
- 239000011347 resin Substances 0.000 claims description 90
- 229920005989 resin Polymers 0.000 claims description 90
- 239000004065 semiconductor Substances 0.000 claims description 89
- 239000002245 particle Substances 0.000 claims description 69
- 239000002904 solvent Substances 0.000 claims description 36
- 239000003963 antioxidant agent Substances 0.000 claims description 22
- 239000003795 chemical substances by application Substances 0.000 claims description 17
- 230000003078 antioxidant effect Effects 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 12
- 239000003759 ester based solvent Substances 0.000 claims description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 8
- 125000003827 glycol group Chemical group 0.000 claims description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 7
- 125000002947 alkylene group Chemical group 0.000 claims description 6
- 229920001515 polyalkylene glycol Polymers 0.000 claims description 5
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 239000005456 alcohol based solvent Substances 0.000 claims description 3
- 150000001408 amides Chemical class 0.000 claims description 3
- 125000003277 amino group Chemical group 0.000 claims description 3
- 239000004210 ether based solvent Substances 0.000 claims description 3
- 239000005453 ketone based solvent Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 62
- 238000004519 manufacturing process Methods 0.000 description 59
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 57
- 239000002096 quantum dot Substances 0.000 description 44
- -1 Group 11 elements Inorganic materials 0.000 description 38
- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Inorganic materials [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 38
- 238000006243 chemical reaction Methods 0.000 description 32
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 31
- 238000000034 method Methods 0.000 description 28
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 27
- 239000003505 polymerization initiator Substances 0.000 description 26
- 239000000243 solution Substances 0.000 description 23
- 238000006862 quantum yield reaction Methods 0.000 description 22
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 21
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 21
- 239000006185 dispersion Substances 0.000 description 21
- 239000003446 ligand Substances 0.000 description 20
- 238000000059 patterning Methods 0.000 description 20
- 229920001577 copolymer Polymers 0.000 description 19
- 235000006708 antioxidants Nutrition 0.000 description 18
- 239000010410 layer Substances 0.000 description 17
- 238000006116 polymerization reaction Methods 0.000 description 17
- 238000002360 preparation method Methods 0.000 description 17
- 229920001427 mPEG Polymers 0.000 description 16
- 150000003573 thiols Chemical class 0.000 description 16
- 125000004432 carbon atom Chemical group C* 0.000 description 15
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 15
- 239000000178 monomer Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 230000014759 maintenance of location Effects 0.000 description 11
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 150000004292 cyclic ethers Chemical group 0.000 description 10
- 239000007787 solid Substances 0.000 description 10
- 239000002253 acid Substances 0.000 description 9
- 239000004094 surface-active agent Substances 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 8
- 230000000977 initiatory effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000011161 development Methods 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 150000002430 hydrocarbons Chemical group 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 229910052798 chalcogen Inorganic materials 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 6
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 5
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- QGLWBTPVKHMVHM-KTKRTIGZSA-N (z)-octadec-9-en-1-amine Chemical compound CCCCCCCC\C=C/CCCCCCCCN QGLWBTPVKHMVHM-KTKRTIGZSA-N 0.000 description 4
- PVVTWNMXEHROIA-UHFFFAOYSA-N 2-(3-hydroxypropyl)-1h-quinazolin-4-one Chemical compound C1=CC=C2NC(CCCO)=NC(=O)C2=C1 PVVTWNMXEHROIA-UHFFFAOYSA-N 0.000 description 4
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical group C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000000149 argon plasma sintering Methods 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 125000004122 cyclic group Chemical group 0.000 description 4
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 4
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 4
- 125000003566 oxetanyl group Chemical group 0.000 description 4
- 125000000466 oxiranyl group Chemical group 0.000 description 4
- 229910052696 pnictogen Inorganic materials 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- 125000003396 thiol group Chemical group [H]S* 0.000 description 4
- VNQNXQYZMPJLQX-UHFFFAOYSA-N 1,3,5-tris[(3,5-ditert-butyl-4-hydroxyphenyl)methyl]-1,3,5-triazinane-2,4,6-trione Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CN2C(N(CC=3C=C(C(O)=C(C=3)C(C)(C)C)C(C)(C)C)C(=O)N(CC=3C=C(C(O)=C(C=3)C(C)(C)C)C(C)(C)C)C2=O)=O)=C1 VNQNXQYZMPJLQX-UHFFFAOYSA-N 0.000 description 3
- GODZNYBQGNSJJN-UHFFFAOYSA-N 1-aminoethane-1,2-diol Chemical compound NC(O)CO GODZNYBQGNSJJN-UHFFFAOYSA-N 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 description 3
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 3
- QRLSTWVLSWCGBT-UHFFFAOYSA-N 4-((4,6-bis(octylthio)-1,3,5-triazin-2-yl)amino)-2,6-di-tert-butylphenol Chemical compound CCCCCCCCSC1=NC(SCCCCCCCC)=NC(NC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=N1 QRLSTWVLSWCGBT-UHFFFAOYSA-N 0.000 description 3
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 description 3
- GHKOFFNLGXMVNJ-UHFFFAOYSA-N Didodecyl thiobispropanoate Chemical group CCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCC GHKOFFNLGXMVNJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- BGYHLZZASRKEJE-UHFFFAOYSA-N [3-[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxy]-2,2-bis[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxymethyl]propyl] 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CCC(=O)OCC(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=C1 BGYHLZZASRKEJE-UHFFFAOYSA-N 0.000 description 3
- 125000004450 alkenylene group Chemical group 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 229910052795 boron group element Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910052800 carbon group element Inorganic materials 0.000 description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 229940116333 ethyl lactate Drugs 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- GHDIHPNJQVDFBL-UHFFFAOYSA-N methoxycyclohexane Chemical compound COC1CCCCC1 GHDIHPNJQVDFBL-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- SSDSCDGVMJFTEQ-UHFFFAOYSA-N octadecyl 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)CCC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 SSDSCDGVMJFTEQ-UHFFFAOYSA-N 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 239000002798 polar solvent Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- PMQZNGSMBAGPRU-UHFFFAOYSA-N propan-2-yl cyclohexanecarboxylate Chemical compound CC(C)OC(=O)C1CCCCC1 PMQZNGSMBAGPRU-UHFFFAOYSA-N 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000001226 reprecipitation Methods 0.000 description 3
- 239000012321 sodium triacetoxyborohydride Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000006228 supernatant Substances 0.000 description 3
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 3
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 3
- KNDQHSIWLOJIGP-UMRXKNAASA-N (3ar,4s,7r,7as)-rel-3a,4,7,7a-tetrahydro-4,7-methanoisobenzofuran-1,3-dione Chemical compound O=C1OC(=O)[C@@H]2[C@H]1[C@]1([H])C=C[C@@]2([H])C1 KNDQHSIWLOJIGP-UMRXKNAASA-N 0.000 description 2
- GVJHHUAWPYXKBD-UHFFFAOYSA-N (±)-α-Tocopherol Chemical compound OC1=C(C)C(C)=C2OC(CCCC(C)CCCC(C)CCCC(C)C)(C)CCC2=C1C GVJHHUAWPYXKBD-UHFFFAOYSA-N 0.000 description 2
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 2
- XYXJKPCGSGVSBO-UHFFFAOYSA-N 1,3,5-tris[(4-tert-butyl-3-hydroxy-2,6-dimethylphenyl)methyl]-1,3,5-triazinane-2,4,6-trione Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C)=C1CN1C(=O)N(CC=2C(=C(O)C(=CC=2C)C(C)(C)C)C)C(=O)N(CC=2C(=C(O)C(=CC=2C)C(C)(C)C)C)C1=O XYXJKPCGSGVSBO-UHFFFAOYSA-N 0.000 description 2
- LAVARTIQQDZFNT-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-yl acetate Chemical compound COCC(C)OCC(C)OC(C)=O LAVARTIQQDZFNT-UHFFFAOYSA-N 0.000 description 2
- MKRBAPNEJMFMHU-UHFFFAOYSA-N 1-benzylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CC1=CC=CC=C1 MKRBAPNEJMFMHU-UHFFFAOYSA-N 0.000 description 2
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- YAGPRJYCDKGWJR-UHFFFAOYSA-N 2-(2,4,8,10-tetratert-butylbenzo[d][1,3,2]benzodioxaphosphepin-6-yl)oxy-n,n-bis[2-(2,4,8,10-tetratert-butylbenzo[d][1,3,2]benzodioxaphosphepin-6-yl)oxyethyl]ethanamine Chemical compound O1C2=C(C(C)(C)C)C=C(C(C)(C)C)C=C2C2=CC(C(C)(C)C)=CC(C(C)(C)C)=C2OP1OCCN(CCOP1OC2=C(C=C(C=C2C=2C=C(C=C(C=2O1)C(C)(C)C)C(C)(C)C)C(C)(C)C)C(C)(C)C)CCOP(OC1=C(C=C(C=C11)C(C)(C)C)C(C)(C)C)OC2=C1C=C(C(C)(C)C)C=C2C(C)(C)C YAGPRJYCDKGWJR-UHFFFAOYSA-N 0.000 description 2
- GBOJZXLCJZDBKO-UHFFFAOYSA-N 2-(2-chlorophenyl)-2-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 GBOJZXLCJZDBKO-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 2
- VFBJXXJYHWLXRM-UHFFFAOYSA-N 2-[2-[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxy]ethylsulfanyl]ethyl 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CCC(=O)OCCSCCOC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=C1 VFBJXXJYHWLXRM-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- PTJWCLYPVFJWMP-UHFFFAOYSA-N 2-[[3-hydroxy-2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)COCC(CO)(CO)CO PTJWCLYPVFJWMP-UHFFFAOYSA-N 0.000 description 2
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- WERQPPCVTFSKSO-UHFFFAOYSA-N 3a,7a-dimethyl-4,5-dihydro-2-benzofuran-1,3-dione Chemical compound C1CC=CC2(C)C(=O)OC(=O)C21C WERQPPCVTFSKSO-UHFFFAOYSA-N 0.000 description 2
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- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 description 1
- LVEOKSIILWWVEO-UHFFFAOYSA-N tetradecyl 3-(3-oxo-3-tetradecoxypropyl)sulfanylpropanoate Chemical group CCCCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCCCC LVEOKSIILWWVEO-UHFFFAOYSA-N 0.000 description 1
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- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
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Description
本発明は、硬化性樹脂組成物、それから形成される硬化膜、及び該硬化膜を含む表示装置に関する。 The present invention relates to a curable resin composition, a cured film formed from the composition, and a display device including the cured film.
画像表示装置等の表示装置に含まれる波長変換膜等の硬化膜を形成するための硬化性樹脂組成物として、半導体量子ドット等の半導体粒子を含有するものが知られている〔例えば、特開2015-028139号公報(特許文献1)〕。特開2005-128539号公報(特許文献2)には、感光性作用基を有する化合物が表面配位された半導体ナノ結晶及びこれを含む感光性組成物が記載されている。 Curable resin compositions containing semiconductor particles such as semiconductor quantum dots are known for forming cured films such as wavelength conversion films included in display devices such as image display devices [for example, JP 2015-028139 A (Patent Document 1)]. JP 2005-128539 A (Patent Document 2) describes semiconductor nanocrystals with a compound having a photosensitive functional group coordinated on the surface, and a photosensitive composition containing the same.
波長変換膜等の硬化膜は、フォトリソグラフィ法等によってパターニングされることが求められている。本発明の目的は、半導体粒子を含み、パターニング性の良好な硬化性樹脂組成物、それから形成される硬化膜、及び該硬化膜を含む表示装置を提供することにある。 Cured films such as wavelength conversion films are required to be patterned by photolithography or the like. The object of the present invention is to provide a curable resin composition containing semiconductor particles and having good patterning properties, a cured film formed therefrom, and a display device including the cured film.
本発明は、以下に示す硬化性樹脂組成物、硬化膜及び表示装置を提供する。
[1] 半導体粒子(A)、ポリアルキレングリコール構造を含み、かつ極性基を分子末端に有する化合物(B)、樹脂(C)及び重合性化合物(D)を含む、硬化性樹脂組成物。
The present invention provides the following curable resin composition, cured film, and display device.
[1] A curable resin composition comprising semiconductor particles (A), a compound (B) containing a polyalkylene glycol structure and having a polar group at a molecular end, a resin (C), and a polymerizable compound (D).
[2] 前記化合物(B)の少なくとも一部が前記半導体粒子(A)に配位している、[1]に記載の硬化性樹脂組成物。 [2] The curable resin composition according to [1], in which at least a portion of the compound (B) is coordinated to the semiconductor particles (A).
[3] 前記極性基がチオール基、カルボキシル基及びアミノ基からなる群より選択される少なくとも1種の基である、[1]又は[2]に記載の硬化性樹脂組成物。 [3] The curable resin composition according to [1] or [2], wherein the polar group is at least one group selected from the group consisting of a thiol group, a carboxyl group, and an amino group.
[4] 前記化合物(B)は、分子量が500以上5000以下である、[1]~[3]のいずれかに記載の硬化性樹脂組成物。 [4] The curable resin composition according to any one of [1] to [3], wherein the compound (B) has a molecular weight of 500 or more and 5,000 or less.
[5] 前記化合物(B)以外の化合物であって、前記半導体粒子(A)に対する配位能を有する化合物(L)をさらに含み、
前記半導体粒子(A)に対する前記化合物(B)及び前記化合物(L)の合計量の比が、質量比で0.1以上1.5以下である、[1]~[4]のいずれかに記載の硬化性樹脂組成物。
[5] The semiconductor particle (A) further includes a compound (L) other than the compound (B), the compound (L) having a coordination ability with the semiconductor particle (A),
The ratio of the total amount of the compound (B) and the compound (L) to the semiconductor particles (A) is 0.1 to 1.5 in terms of mass ratio. The curable resin composition according to any one of [1] to [4].
[6] [1]~[5]のいずれかに記載の硬化性樹脂組成物から形成される、硬化膜。 [6] A cured film formed from the curable resin composition described in any one of [1] to [5].
[7] [6]に記載の硬化膜を含む、表示装置。 [7] A display device including the cured film described in [6].
本発明によれば、半導体粒子を含み、パターニング性の良好な硬化性樹脂組成物、それから形成される硬化膜、及び該硬化膜を含む表示装置を提供することができる。 According to the present invention, it is possible to provide a curable resin composition containing semiconductor particles and having good patterning properties, a cured film formed therefrom, and a display device containing the cured film.
<硬化性樹脂組成物>
本発明に係る硬化性樹脂組成物は、半導体粒子(A)、ポリアルキレングリコール構造を含み、かつ極性基を分子末端に有する化合物(B)〔以下、「化合物(B)」ともいう。〕、樹脂(C)及び重合性化合物(D)を含む。該硬化性樹脂組成物は、良好なパターニング性を示すことができる。例えば、該硬化性樹脂組成物によれば、所望の線幅を有するパターニングされた硬化膜を精度良く形成することが可能である。該硬化性樹脂組成物によれば、上記線幅が比較的細い場合であっても、パターニングされた硬化膜を精度良く形成することが可能である。
<Curable resin composition>
The curable resin composition according to the present invention includes semiconductor particles (A), a compound (B) having a polyalkylene glycol structure and a polar group at the molecular end (hereinafter also referred to as "compound (B)"). ), a resin (C) and a polymerizable compound (D). The curable resin composition can exhibit good patterning properties. For example, the curable resin composition can accurately form a patterned cured film having a desired line width. The curable resin composition can accurately form a patterned cured film even when the line width is relatively narrow.
また、本発明に係る硬化性樹脂組成物によれば、ポストベーク後も量子収率(QY)を保持する硬化膜、パターニングされた硬化膜(波長変換膜等)を形成することが可能である。本明細書では、硬化性樹脂組成物(硬化前)の量子収率を100%としたときの、該硬化性樹脂組成物から形成される硬化膜(ポストベーク後)の量子収率(%)を「QY保持率」(%)という。QY保持率は、後述する実施例の項の記載に従って測定される。 In addition, the curable resin composition according to the present invention can form a cured film that retains quantum yield (QY) even after post-baking, and a patterned cured film (such as a wavelength conversion film). In this specification, the quantum yield (%) of a cured film (after post-baking) formed from the curable resin composition when the quantum yield of the curable resin composition (before curing) is taken as 100% is referred to as "QY retention" (%). The QY retention is measured as described in the Examples section below.
なお、本明細書において硬化性樹脂組成物に含まれる又は含まれ得る各成分として例示する化合物は、特に断りのない限り、単独で、又は、複数種を組み合わせて使用することができる。 In addition, the compounds exemplified in this specification as components that are or can be contained in the curable resin composition can be used alone or in combination, unless otherwise specified.
〔1〕半導体粒子(A)
硬化性樹脂組成物は、半導体粒子(A)を含む。半導体粒子(A)は、好ましくは発光性(蛍光発光性)の半導体粒子である。発光性の半導体粒子を含む硬化性樹脂組成物から形成される波長変換膜等の硬化膜は、所望の波長域の蛍光発光を示す色再現性に優れたものであり得る。
[1] Semiconductor particles (A)
The curable resin composition contains semiconductor particles (A). The semiconductor particles (A) are preferably luminescent (fluorescent) semiconductor particles. A cured film such as a wavelength conversion film formed from the curable resin composition containing the luminescent semiconductor particles can have excellent color reproducibility and exhibit fluorescent emission in a desired wavelength range.
発光性の半導体粒子は、半導体結晶からなる粒子、好ましくは半導体結晶からなるナノ粒子である。発光性の半導体粒子の好ましい例は、半導体量子ドットである。半導体量子ドットの平均粒径は、例えば0.5nm以上20nm以下、好ましくは1nm以上15nm以下(例えば2nm以上15nm以下)である。半導体量子ドットの平均粒径は、透過型電子顕微鏡(TEM)を用いて求めることができる。 The luminescent semiconductor particles are particles made of semiconductor crystals, preferably nanoparticles made of semiconductor crystals. A preferred example of the luminescent semiconductor particles is semiconductor quantum dots. The average particle size of the semiconductor quantum dots is, for example, 0.5 nm to 20 nm, preferably 1 nm to 15 nm (for example, 2 nm to 15 nm). The average particle size of the semiconductor quantum dots can be determined using a transmission electron microscope (TEM).
半導体量子ドットは、例えば、周期表第2族元素、第11族元素、第12族元素、第13族元素、第14族元素、第15族元素及び第16族元素からなる群より選択される1種又は2種以上の元素を含む半導体材料から構成することができる。 The semiconductor quantum dots can be composed of a semiconductor material containing one or more elements selected from the group consisting of Group 2 elements, Group 11 elements, Group 12 elements, Group 13 elements, Group 14 elements, Group 15 elements, and Group 16 elements of the periodic table.
半導体量子ドットを構成し得る半導体材料の具体例は、SnS2、SnS、SnSe、SnTe、PbS、PbSe、PbTe等の第14族元素と第16族元素との化合物;GaN、GaP、GaAs、GaSb、InN、InP、InAs、InSb、InGaN、InGaP等の第13族元素と第15族元素との化合物;Ga2O3、Ga2S3、Ga2Se3、Ga2Te3、In2O3、In2S3、In2Se3、In2Te3等の第13族元素と第16族元素との化合物;ZnO、ZnS、ZnSe、ZnTe、CdO、CdS、CdSe、CdTe、HgO、HgS、HgSe、HgTe等の第12族元素と第16族元素との化合物;As2O3、As2S3、As2Se3、As2Te3、Sb2O3、Sb2S3、Sb2Se3、Sb2Te3、Bi2O3、Bi2S3、Bi2Se3、Bi2Te3等の第15族元素と第16族元素との化合物;MgS、MgSe、MgTe、CaS、CaSe、CaTe、SrS、SrSe、SrTe、BaS、BaSe、BaTe等の第2族元素と第16族元素との化合物;Si、Ge等の第14族元素、第15族元素又は第16族元素の単体を含む。 Specific examples of semiconductor materials that can form semiconductor quantum dots include compounds of Group 14 elements and Group 16 elements, such as SnS2 , SnS, SnSe, SnTe, PbS, PbSe, and PbTe; compounds of Group 13 elements and Group 15 elements, such as GaN, GaP, GaAs, GaSb, InN, InP , InAs, InSb, InGaN, and InGaP; Ga2O3 , Ga2S3 , Ga2Se3 , Ga2Te3 , In2O3 , In2S3 , In2Se3 , and In2Te . compounds of Group 13 elements and Group 16 elements, such as ZnO, ZnS, ZnSe , ZnTe, CdO, CdS, CdSe, CdTe, HgO, HgS , HgSe, HgTe; compounds of Group 12 elements and Group 16 elements, such as As2O3, As2S3 , As2Se3 , As2Te3 , Sb2O3 , Sb2S3 , Sb2Se3 , Sb2Te3 , Bi2O3 , Bi2S3 , Bi2Se3 , Bi2Te compounds of Group 15 elements and Group 16 elements, such as CaS, CaSe, CaTe, SrS, SrSe, SrTe, BaS, BaSe, BaTe; and simple substances of Group 14 elements, Group 15 elements, or Group 16 elements, such as Si and Ge.
半導体量子ドットは、単一の半導体材料からなる単層構造であってもよいし、単一の半導体材料からなる核粒子(コア層)の表面が、これとは異なる1種又は2種以上の半導体材料からなる被覆層(シェル層)によって被覆されたコアシェル構造であってもよい。後者の場合、シェル層を構成する半導体材料としては通常、コア層を構成する半導体材料よりもバンドギャップエネルギーが大きいものを用いる。半導体量子ドットは、シェル層を2種以上有していてもよい。半導体量子ドットの形状は特に限定されず、例えば、球状又は略球状、棒状、円盤状等であり得る。 The semiconductor quantum dots may have a single-layer structure made of a single semiconductor material, or a core-shell structure in which the surface of a core particle (core layer) made of a single semiconductor material is covered with a coating layer (shell layer) made of one or more different semiconductor materials. In the latter case, the semiconductor material constituting the shell layer is usually one having a larger band gap energy than the semiconductor material constituting the core layer. The semiconductor quantum dots may have two or more shell layers. The shape of the semiconductor quantum dots is not particularly limited, and may be, for example, spherical or nearly spherical, rod-like, disc-like, etc.
半導体粒子(A)の含有量は、硬化性樹脂組成物の固形分100質量部中、例えば0.1質量部以上50質量部以下であり、好ましくは1質量部以上40質量部以下であり、より好ましくは2質量部以上30質量部以下である。半導体粒子(A)の含有量が過度に小さいと、硬化膜(波長変換膜等)において十分な発光強度が得られにくい傾向にある。半導体粒子(A)の含有量が過度に大きいと、硬化膜(波長変換膜等)の機械的強度及びパターニング性が低下する傾向にある。本明細書において「硬化性樹脂組成物の固形分」とは、硬化性樹脂組成物に含まれる溶剤(F)以外の成分の合計をいう。 The content of the semiconductor particles (A) is, for example, 0.1 parts by mass or more and 50 parts by mass or less, preferably 1 part by mass or more and 40 parts by mass or less, and more preferably 2 parts by mass or more and 30 parts by mass or less, per 100 parts by mass of the solid content of the curable resin composition. If the content of the semiconductor particles (A) is excessively small, it tends to be difficult to obtain sufficient luminescence intensity in the cured film (wavelength conversion film, etc.). If the content of the semiconductor particles (A) is excessively large, the mechanical strength and patterning property of the cured film (wavelength conversion film, etc.) tend to decrease. In this specification, the "solid content of the curable resin composition" refers to the total of the components other than the solvent (F) contained in the curable resin composition.
〔2〕化合物(B)
硬化性樹脂組成物に含まれる化合物(B)は、ポリアルキレングリコール構造を含み、かつ極性基を分子末端に有する有機化合物である。硬化性樹脂組成物に化合物(B)を含有させることによって、半導体粒子(A)を含む硬化性樹脂組成物のパターニング性を改善させることが可能となる。また、硬化性樹脂組成物に化合物(B)を含有させることは、QY保持率を高めることにも貢献し得る。分子末端とは、化合物(B)中、最も長い炭素鎖(炭素鎖中の炭素原子は、酸素原子等の他の原子に置き換わっていてもよい。)の末端であることが好ましい。
[2] Compound (B)
The compound (B) contained in the curable resin composition is an organic compound containing a polyalkylene glycol structure and having a polar group at the molecular end. By including the compound (B) in the curable resin composition, it is possible to improve the patterning property of the curable resin composition containing the semiconductor particles (A). In addition, including the compound (B) in the curable resin composition can also contribute to increasing the QY retention rate. The molecular end is preferably the end of the longest carbon chain in the compound (B) (the carbon atom in the carbon chain may be replaced with another atom such as an oxygen atom).
ポリアルキレングリコール構造とは、下記式: The polyalkylene glycol structure is the following formula:
で表される構造をいう(nは2以上の整数)。式中、R1は、アルキレン基であり、例えば、エチレン基、プロピレン基等が挙げられる。
化合物(B)の具体例として、下記式(B-1):
(n is an integer of 2 or more) In the formula, R 1 is an alkylene group, for example, an ethylene group, a propylene group, etc.
Specific examples of the compound (B) include the compound represented by the following formula (B-1):
で表されるポリアルキレングリコール系化合物を挙げることができる。式(B-1)中、Xは極性基であり、Yは1価の基であり、Zは2価又は3価の基である。nは2以上の整数である。mは1又は2である。R1はアルキレン基であり、例えば、エチレン基、プロピレン基である。硬化性樹脂組成物は、化合物(B)を1種のみ含んでいてもよいし2種以上含んでいてもよい。 In formula (B-1), X is a polar group, Y is a monovalent group, and Z is a divalent or trivalent group. n is an integer of 2 or more. m is 1 or 2. R 1 is an alkylene group, for example, an ethylene group or a propylene group. The curable resin composition may contain only one type of compound (B), or may contain two or more types.
硬化性樹脂組成物において化合物(B)は、その少なくとも一部の分子が半導体粒子(A)に配位していることが好ましく、そのすべて又はほぼすべての分子が半導体粒子(A)に配位していてもよい。すなわち、硬化性樹脂組成物は、半導体粒子(A)に配位している化合物(B)を含むことが好ましいが、半導体粒子(A)に配位している化合物(B)とともに、半導体粒子(A)に配位していない化合物(B)を含んでいてもよい。半導体粒子(A)に配位している化合物(B)を含むことは、硬化性樹脂組成物のパターニング性を改善するうえで、及び/又は、QY保持率を高めるうえで有利となり得る。化合物(B)は通常、極性基Xを介して半導体粒子(A)に配位することができる。基Yが極性基を含む場合、化合物(B)は、基Yの極性基を介して、又は極性基X及び基Yの極性基を介して半導体粒子(A)に配位することもできる。化合物(B)が配位していることは、化合物(B)に好適な分散媒に半導体粒子(A)が均一分散することから確認される。
化合物(B)は、例えば半導体粒子(A)の表面に配位することができる。
In the curable resin composition, at least a part of the molecules of the compound (B) are preferably coordinated to the semiconductor particle (A), and all or almost all of the molecules may be coordinated to the semiconductor particle (A). That is, the curable resin composition preferably contains the compound (B) coordinated to the semiconductor particle (A), but may contain the compound (B) not coordinated to the semiconductor particle (A) together with the compound (B) coordinated to the semiconductor particle (A). The inclusion of the compound (B) coordinated to the semiconductor particle (A) can be advantageous in improving the patterning property of the curable resin composition and/or in increasing the QY retention rate. The compound (B) can usually be coordinated to the semiconductor particle (A) via the polar group X. When the group Y contains a polar group, the compound (B) can also be coordinated to the semiconductor particle (A) via the polar group of the group Y, or via the polar groups of the polar group X and the group Y. The coordination of the compound (B) is confirmed by the fact that the semiconductor particle (A) is uniformly dispersed in a dispersion medium suitable for the compound (B).
The compound (B) can be coordinated, for example, to the surface of the semiconductor particle (A).
極性基Xは、チオール基(-SH)、カルボキシル基(-COOH)及びアミノ基(-NH2)からなる群より選択される少なくとも1種の基であることが好ましい。該群より選択される極性基は、半導体粒子(A)への配位性を高めるうえで有利となり得る。高い配位性は、硬化性樹脂組成物のパターニング性の改善及び/又はQY保持率の向上に貢献し得る。中でも、発光特性により優れる硬化膜(波長変換膜等)を得る観点から、極性基Xは、チオール基及びカルボキシル基からなる群より選択される少なくとも1種の基であることがより好ましく、チオール基であることがさらに好ましい。 The polar group X is preferably at least one group selected from the group consisting of a thiol group (-SH), a carboxyl group (-COOH) and an amino group (-NH 2 ). A polar group selected from this group can be advantageous in increasing the coordination with the semiconductor particles (A). High coordination can contribute to improving the patterning properties of the curable resin composition and/or improving the QY retention rate. In particular, from the viewpoint of obtaining a cured film (such as a wavelength conversion film) having superior light-emitting properties, the polar group X is more preferably at least one group selected from the group consisting of a thiol group and a carboxyl group, and even more preferably a thiol group.
基Yは1価の基である。基Yとしては特に制限されず、置換基(N、O、S、ハロゲン原子等)を有していてもよい1価の炭化水素基を挙げることができる。該炭化水素基に含まれるメチレン基は、-O-、-S-、-C(=O)-、-C(=O)-O-、-O-C(=O)-、-C(=O)-NH-、-NH-等で置換されていてもよい。該炭化水素基の炭素数は例えば1以上12以下である。該炭化水素基は、不飽和結合を有していてもよい。基Yの例は、直鎖状、分岐鎖状又は環状構造を有する炭素数1以上12以下のアルキル基;直鎖状、分岐鎖状又は環状構造を有する炭素数1以上12以下のアルコキシ基等を含む。該アルキル基及びアルコキシ基の炭素数は、好ましくは1以上8以下であり、より好ましくは1以上6以下であり、さらに好ましくは1以上4以下である。該アルキル基及びアルコキシ基に含まれるメチレン基は、-O-、-S-、-C(=O)-、-C(=O)-O-、-O-C(=O)-、-C(=O)-NH-、-NH-等で置換されていてもよい。中でも、基Yは、炭素数が1以上4以下である直鎖状又は分岐鎖状のアルコキシ基であることが好ましく、炭素数が1以上4以下である直鎖状のアルコキシ基であることがより好ましい。 The group Y is a monovalent group. The group Y is not particularly limited, and may be a monovalent hydrocarbon group which may have a substituent (N, O, S, halogen atom, etc.). The methylene group contained in the hydrocarbon group may be substituted with -O-, -S-, -C(=O)-, -C(=O)-O-, -O-C(=O)-, -C(=O)-NH-, -NH-, etc. The number of carbon atoms in the hydrocarbon group is, for example, 1 to 12. The hydrocarbon group may have an unsaturated bond. Examples of the group Y include an alkyl group having 1 to 12 carbon atoms and a linear, branched, or cyclic structure; an alkoxy group having 1 to 12 carbon atoms and a linear, branched, or cyclic structure. The number of carbon atoms in the alkyl group and alkoxy group is preferably 1 to 8, more preferably 1 to 6, and even more preferably 1 to 4. The methylene groups contained in the alkyl and alkoxy groups may be substituted with -O-, -S-, -C(=O)-, -C(=O)-O-, -O-C(=O)-, -C(=O)-NH-, -NH-, etc. Among these, the group Y is preferably a linear or branched alkoxy group having 1 to 4 carbon atoms, and more preferably a linear alkoxy group having 1 to 4 carbon atoms.
基Yは、極性基を含んでいてもよい。該極性基の具体例については極性基Xに係る上記記述が引用される。該極性基は、好ましくは基Yの末端に配置される。 The group Y may contain a polar group. Specific examples of the polar group are as described above for the polar group X. The polar group is preferably located at the terminal of the group Y.
基Zは2価又は3価の基である。基Zとしては特に制限されず、ヘテロ原子(N、O、S、ハロゲン原子等)を含んでいてもよい2価又は3価の炭化水素基を挙げることができる。該炭化水素基の炭素数は例えば1以上24以下である。該炭化水素基は、不飽和結合を有していてもよい。2価の基である基Zの例は、直鎖状、分岐鎖状又は環状構造を有する炭素数1以上24以下のアルキレン基;直鎖状、分岐鎖状又は環状構造を有する炭素数1以上24以下のアルケニレン基等を含む。該アルキル基及びアルケニレン基の炭素数は、好ましくは1以上12以下であり、より好ましくは1以上8以下であり、さらに好ましくは1以上4以下である。該アルキル基及びアルケニレン基に含まれるメチレン基は、-O-、-S-、-C(=O)-、-C(=O)-O-、-O-C(=O)-、-C(=O)-NH-、-NH-等で置換されていてもよい。3価の基である基Zの例としては、上記2価の基である基Zから水素原子を1つ取り除いた基を挙げることができる。 The group Z is a divalent or trivalent group. The group Z is not particularly limited, and examples thereof include divalent or trivalent hydrocarbon groups that may contain heteroatoms (N, O, S, halogen atoms, etc.). The number of carbon atoms in the hydrocarbon group is, for example, 1 to 24. The hydrocarbon group may have an unsaturated bond. Examples of the group Z that is a divalent group include an alkylene group having a linear, branched, or cyclic structure and a carbon number of 1 to 24; an alkenylene group having a linear, branched, or cyclic structure and a carbon number of 1 to 24. The number of carbon atoms in the alkyl group and the alkenylene group is preferably 1 to 12, more preferably 1 to 8, and even more preferably 1 to 4. The methylene group contained in the alkyl group and the alkenylene group may be substituted with -O-, -S-, -C(=O)-, -C(=O)-O-, -O-C(=O)-, -C(=O)-NH-, -NH-, etc. An example of the trivalent group Z is a group obtained by removing one hydrogen atom from the divalent group Z.
基Zは分岐構造を有していてもよい。分岐構造を有する基Zは、上記式(B-1)に示されるポリエチレングリコール構造を含む分岐鎖とは別の分岐鎖において、上記式(B-1)に示されるポリエチレングリコール構造とは別のポリエチレングリコール構造を有していてもよい。 The group Z may have a branched structure. The group Z having a branched structure may have a polyethylene glycol structure other than the polyethylene glycol structure shown in the above formula (B-1) in a branched chain other than the branched chain containing the polyethylene glycol structure shown in the above formula (B-1).
中でも、基Zは、炭素数が1以上6以下である直鎖状又は分岐鎖状のアルキレン基であることが好ましく、炭素数が1以上4以下である直鎖状のアルキレン基であることがより好ましい。 Among these, the group Z is preferably a linear or branched alkylene group having 1 to 6 carbon atoms, and more preferably a linear alkylene group having 1 to 4 carbon atoms.
式(B-1)中のnは2以上の整数であり、好ましくは4以上540以下であり、より好ましくは8以上120以下である。 In formula (B-1), n is an integer of 2 or more, preferably 4 or more and 540 or less, and more preferably 8 or more and 120 or less.
化合物(B)の分子量は、例えば200以上10000以下程度であり得るが、硬化性樹脂組成物のパターニング性を改善する観点、及び/又は、QY保持率を高める観点から、500以上5000以下であることが好ましく、600以上4000以下であることがより好ましく、700以上3000以下であってもよい。 The molecular weight of compound (B) may be, for example, about 200 or more and 10,000 or less, but from the viewpoint of improving the patterning properties of the curable resin composition and/or increasing the QY retention rate, it is preferably 500 or more and 5,000 or less, more preferably 600 or more and 4,000 or less, and may be 700 or more and 3,000 or less.
上記分子量は、数平均分子量であってもよいし重量平均分子量であってもよい。すなわち、化合物(B)の分子量が200以上10000以下であるとは、化合物(B)の数平均分子量及び/又は重量平均分子量が200以上10000以下であることを意味する。数平均分子量及び重量平均分子量はそれぞれ、ゲルパーミエーションクロマトグラフィにより測定される標準ポリスチレン換算の数平均分子量及び重量平均分子量である。 The above molecular weight may be a number average molecular weight or a weight average molecular weight. In other words, the molecular weight of compound (B) being 200 or more and 10,000 or less means that the number average molecular weight and/or weight average molecular weight of compound (B) is 200 or more and 10,000 or less. The number average molecular weight and weight average molecular weight are the number average molecular weight and weight average molecular weight, respectively, calculated in terms of standard polystyrene as measured by gel permeation chromatography.
硬化性樹脂組成物は、化合物(B)以外の化合物であって、半導体粒子(A)に対する配位能を有する化合物(L)をさらに含むことができる。
化合物(L)としては、有機酸、有機アミン化合物、チオール化合物等が挙げられる。
なお、化合物(L)に、樹脂(C)、重合性化合物(D)、重合開始剤(E)、重合開始助剤(E1)、溶剤(F)、レベリング剤(G)、酸化防止剤(H)及び下記〔10〕に示すその他の成分は含まれない。
硬化性樹脂組成物中の半導体粒子(A)に対する化合物(B)及び化合物(L)の合計量の比の含有量比〔以下、「(B,L)/(A)質量比」ともいう。〕は、質量比で、好ましくは0.1以上1.5以下である。該含有量比がこの範囲内であることは、硬化性樹脂組成物のパターニング性を改善するうえで、及び/又は、QY保持率を高めるうえで有利となり得る。パターニング性が改善するのは、半導体粒子(A)が樹脂(C)へ親和しやすくなり、アルカリ現像液への溶解性が向上することによるものと考えられる。また、QY保持率が高くなるのは、半導体粒子(A)が硬化性樹脂組成物へ分散しやすくなることによるものと考えられる。(B,L)/(A)質量比は、より好ましくは0.1以上1.4以下であり、さらに好ましくは0.2以上1.4以下である。(B,L)/(A)質量比は、後述する実施例の項の記載に従って測定される。あるいは、核磁気共鳴法(NMR)によっても測定することができる。
The curable resin composition may further contain a compound (L) other than the compound (B) that has a coordination ability with the semiconductor particles (A).
Examples of the compound (L) include organic acids, organic amine compounds, and thiol compounds.
In addition, the compound (L) does not include the resin (C), the polymerizable compound (D), the polymerization initiator (E), the polymerization initiation aid (E1), the solvent (F), the leveling agent (G), the antioxidant (H), and other components shown in the following [10].
The content ratio of the total amount of the compound (B) and the compound (L) to the semiconductor particles (A) in the curable resin composition [hereinafter also referred to as "(B, L) / (A) mass ratio"] is preferably 0.1 or more and 1.5 or less in mass ratio. The content ratio within this range can be advantageous in improving the patterning property of the curable resin composition and / or in increasing the QY retention rate. The patterning property is improved because the semiconductor particles (A) become more easily compatible with the resin (C) and the solubility in an alkaline developer is improved. In addition, the QY retention rate is increased because the semiconductor particles (A) become more easily dispersed in the curable resin composition. The (B, L) / (A) mass ratio is more preferably 0.1 or more and 1.4 or less, and even more preferably 0.2 or more and 1.4 or less. The (B, L) / (A) mass ratio is measured according to the description in the Examples section described later. Alternatively, it can also be measured by nuclear magnetic resonance (NMR).
化合物(B)の含有量は、硬化性樹脂組成物の固形分100質量部中、例えば0.4質量部以上27質量部以下であり、好ましくは0.9質量部以上24質量部以下であり、より好ましくは1.8質量部以上24質量部以下である。化合物(B)の含有量が前述の範囲にあることは、硬化性樹脂組成物のパターニング性を改善するうえで、及び/又は、QY保持率を高めるうえで有利になり得る。 The content of compound (B) is, for example, 0.4 parts by mass or more and 27 parts by mass or less, preferably 0.9 parts by mass or more and 24 parts by mass or less, and more preferably 1.8 parts by mass or more and 24 parts by mass or less, per 100 parts by mass of the solid content of the curable resin composition. The content of compound (B) in the above-mentioned range can be advantageous in improving the patterning properties of the curable resin composition and/or in increasing the QY retention rate.
〔3〕樹脂(C)
硬化性樹脂組成物は、樹脂(C)を含有する。硬化性樹脂組成物は、樹脂(C)として1種又は2種以上の樹脂を含有することができる。樹脂(C)は、アルカリ可溶性樹脂であることが好ましい。アルカリ可溶性とは、アルカリ化合物の水溶液である現像液に溶解する性質のことをいう。樹脂(C)としては、以下の樹脂[K1]~[K6]等が挙げられる。
[3] Resin (C)
The curable resin composition contains a resin (C). The curable resin composition may contain one or more resins as the resin (C). The resin (C) is preferably an alkali-soluble resin. Alkali-solubility refers to the property of dissolving in a developer, which is an aqueous solution of an alkaline compound. Examples of the resin (C) include the following resins [K1] to [K6].
樹脂[K1]:不飽和カルボン酸及び不飽和カルボン酸無水物からなる群より選択される少なくとも1種(a)〔以下、「(a)」ともいう。〕と、炭素数2以上4以下の環状エーテル構造及びエチレン性不飽和結合を有する単量体(b)〔以下、「(b)」ともいう。〕との共重合体、
樹脂[K2]:(a)と(b)と、(a)と共重合可能な単量体(c)(ただし、(a)及び(b)とは異なる。)〔以下、「(c)」ともいう。〕との共重合体、
樹脂[K3]:(a)と(c)との共重合体、
樹脂[K4]:(a)と(c)との共重合体に(b)を反応させて得られる樹脂、
樹脂[K5]:(b)と(c)との共重合体に(a)を反応させて得られる樹脂、
樹脂[K6]:(b)と(c)との共重合体に(a)を反応させ、さらにカルボン酸無水物を反応させて得られる樹脂。
Resin [K1]: a copolymer of at least one (a) selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides (hereinafter also referred to as "(a)"). and a monomer (b) having a cyclic ether structure and an ethylenically unsaturated bond and having from 2 to 4 carbon atoms (hereinafter also referred to as "(b)").
Resin [K2]: A copolymer of (a), (b), and a monomer (c) copolymerizable with (a) (but different from (a) and (b)) (hereinafter also referred to as "(c)");
Resin [K3]: a copolymer of (a) and (c),
Resin [K4]: a resin obtained by reacting a copolymer of (a) and (c) with (b);
Resin [K5]: a resin obtained by reacting a copolymer of (b) and (c) with (a);
Resin [K6]: A resin obtained by reacting a copolymer of (b) and (c) with (a) and then reacting it with a carboxylic acid anhydride.
(a)としては、具体的には、
(メタ)アクリル酸、クロトン酸、o-、m-、p-ビニル安息香酸、コハク酸モノ〔2-(メタ)アクリロイルオキシエチル〕、フタル酸モノ〔2-(メタ)アクリロイルオキシエチル〕等の不飽和モノカルボン酸類;
マレイン酸、フマル酸、シトラコン酸、メサコン酸、イタコン酸、3-ビニルフタル酸、4-ビニルフタル酸、3,4,5,6-テトラヒドロフタル酸、1,2,3,6-テトラヒドロフタル酸、ジメチルテトラヒドロフタル酸、1、4-シクロヘキセンジカルボン酸等の不飽和ジカルボン酸類;
メチル-5-ノルボルネン-2,3-ジカルボン酸、5-カルボキシビシクロ[2.2.1]ヘプト-2-エン、5,6-ジカルボキシビシクロ[2.2.1]ヘプト-2-エン、5-カルボキシ-5-メチルビシクロ[2.2.1]ヘプト-2-エン、5-カルボキシ-5-エチルビシクロ[2.2.1]ヘプト-2-エン、5-カルボキシ-6-メチルビシクロ[2.2.1]ヘプト-2-エン、5-カルボキシ-6-エチルビシクロ[2.2.1]ヘプト-2-エン等のカルボキシ基を含有するビシクロ不飽和化合物類;
無水マレイン酸、シトラコン酸無水物、イタコン酸無水物、3-ビニルフタル酸無水物、4-ビニルフタル酸無水物、3,4,5,6-テトラヒドロフタル酸無水物、1,2,3,6-テトラヒドロフタル酸無水物、ジメチルテトラヒドロフタル酸無水物、5,6-ジカルボキシビシクロ[2.2.1]ヘプト-2-エン無水物(ハイミック酸無水物)等の不飽和ジカルボン酸類無水物;
α-(ヒドロキシメチル)(メタ)アクリル酸のような、同一分子中にヒドロキシ基及びカルボキシ基を含有する不飽和(メタ)アクリル酸類等が挙げられる。
Specifically, (a) is
Unsaturated monocarboxylic acids such as (meth)acrylic acid, crotonic acid, o-, m-, and p-vinylbenzoic acid, mono[2-(meth)acryloyloxyethyl] succinate, and mono[2-(meth)acryloyloxyethyl] phthalate;
Unsaturated dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinylphthalic acid, 4-vinylphthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, dimethyltetrahydrophthalic acid, and 1,4-cyclohexenedicarboxylic acid;
Bicyclounsaturated compounds containing a carboxy group, such as methyl-5-norbornene-2,3-dicarboxylic acid, 5-carboxybicyclo[2.2.1]hept-2-ene, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methylbicyclo[2.2.1]hept-2-ene, and 5-carboxy-6-ethylbicyclo[2.2.1]hept-2-ene;
Unsaturated dicarboxylic acid anhydrides such as maleic anhydride, citraconic anhydride, itaconic anhydride, 3-vinylphthalic anhydride, 4-vinylphthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride, and 5,6-dicarboxybicyclo[2.2.1]hept-2-ene anhydride (himic anhydride);
Examples of such compounds include unsaturated (meth)acrylic acids containing a hydroxy group and a carboxy group in the same molecule, such as α-(hydroxymethyl)(meth)acrylic acid.
中でも、共重合反応性の観点やアルカリ水溶液への溶解性の観点から、(a)は、(メタ)アクリル酸、無水マレイン酸等であることが好ましい。 Among these, from the viewpoint of copolymerization reactivity and solubility in an alkaline aqueous solution, (a) is preferably (meth)acrylic acid, maleic anhydride, etc.
本明細書において「(メタ)アクリル」とは、アクリル及びメタクリルからなる群より選択される少なくとも1種を表す。「(メタ)アクリロイル」及び「(メタ)アクリレート」等の表記についても同様である。 In this specification, "(meth)acrylic" refers to at least one selected from the group consisting of acrylic and methacrylic. The same applies to the terms "(meth)acryloyl" and "(meth)acrylate".
(b)は、炭素数2以上4以下の環状エーテル構造(例えば、オキシラン環、オキセタン環及びテトラヒドロフラン環(オキソラン環)からなる群より選択される少なくとも1種)とエチレン性不飽和結合とを有する重合性化合物をいう。(b)は、好ましくは、炭素数2以上4以下の環状エーテル構造と(メタ)アクリロイルオキシ基とを有する単量体である。 (b) refers to a polymerizable compound having a cyclic ether structure having 2 to 4 carbon atoms (e.g., at least one selected from the group consisting of an oxirane ring, an oxetane ring, and a tetrahydrofuran ring (oxolane ring)) and an ethylenically unsaturated bond. (b) is preferably a monomer having a cyclic ether structure having 2 to 4 carbon atoms and a (meth)acryloyloxy group.
(b)としては、例えば、オキシラニル基とエチレン性不飽和結合とを有する単量体(b1)〔以下、「(b1)」ともいう。〕、オキセタニル基とエチレン性不飽和結合とを有する単量体(b2)〔以下、「(b2)」ともいう。〕、テトラヒドロフリル基とエチレン性不飽和結合とを有する単量体(b3)〔以下、「(b3)」ともいう。〕等が挙げられる。 Examples of (b) include monomer (b1) having an oxiranyl group and an ethylenically unsaturated bond (hereinafter also referred to as "(b1)"); monomer (b2) having an oxetanyl group and an ethylenically unsaturated bond (hereinafter also referred to as "(b2)"); and monomer (b3) having a tetrahydrofuryl group and an ethylenically unsaturated bond (hereinafter also referred to as "(b3)").
(b1)としては、不飽和脂肪族炭化水素をエポキシ化した構造を有する単量体(b1-1)〔以下、「(b1-1)」ともいう。〕、不飽和脂環式炭化水素をエポキシ化した構造を有する単量体(b1-2)〔以下、「(b1-2)」ともいう。〕が挙げられる。 Examples of (b1) include monomer (b1-1) having a structure in which an unsaturated aliphatic hydrocarbon has been epoxidized (hereinafter also referred to as "(b1-1)"); and monomer (b1-2) having a structure in which an unsaturated alicyclic hydrocarbon has been epoxidized (hereinafter also referred to as "(b1-2)").
(b1-1)としては、グリシジル(メタ)アクリレート、β-メチルグリシジル(メタ)アクリレート、β-エチルグリシジル(メタ)アクリレート、グリシジルビニルエーテル、o-ビニルベンジルグリシジルエーテル、m-ビニルベンジルグリシジルエーテル、p-ビニルベンジルグリシジルエーテル、α-メチル-o-ビニルベンジルグリシジルエーテル、α-メチル-m-ビニルベンジルグリシジルエーテル、α-メチル-p-ビニルベンジルグリシジルエーテル、2,3-ビス(グリシジルオキシメチル)スチレン、2,4-ビス(グリシジルオキシメチル)スチレン、2,5-ビス(グリシジルオキシメチル)スチレン、2,6-ビス(グリシジルオキシメチル)スチレン、2,3,4-トリス(グリシジルオキシメチル)スチレン、2,3,5-トリス(グリシジルオキシメチル)スチレン、2,3,6-トリス(グリシジルオキシメチル)スチレン、3,4,5-トリス(グリシジルオキシメチル)スチレン、2,4,6-トリス(グリシジルオキシメチル)スチレン等が挙げられる。 (b1-1) includes glycidyl (meth)acrylate, β-methyl glycidyl (meth)acrylate, β-ethyl glycidyl (meth)acrylate, glycidyl vinyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, α-methyl-o-vinylbenzyl glycidyl ether, α-methyl-m-vinylbenzyl glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis(glycidyl Examples include 2,4-bis(glycidyloxymethyl)styrene, 2,5-bis(glycidyloxymethyl)styrene, 2,6-bis(glycidyloxymethyl)styrene, 2,3,4-tris(glycidyloxymethyl)styrene, 2,3,5-tris(glycidyloxymethyl)styrene, 2,3,6-tris(glycidyloxymethyl)styrene, 3,4,5-tris(glycidyloxymethyl)styrene, and 2,4,6-tris(glycidyloxymethyl)styrene.
(b1-2)としては、ビニルシクロヘキセンモノオキサイド、1,2-エポキシ4-ビニルシクロヘキサン(例えば、セロキサイド2000;ダイセル化学工業(株)製)、3,4-エポキシシクロヘキシルメチル(メタ)アクリレート(例えば、サイクロマーA400;ダイセル化学工業(株)製)、3,4-エポキシシクロヘキシルメチル(メタ)アクリレート(例えば、サイクロマーM100;ダイセル化学工業(株)製)、3,4-エポキシトリシクロ[5.2.1.02,6]デシル(メタ)アクリレート等が挙げられる。 Examples of (b1-2) include vinylcyclohexene monoxide, 1,2-epoxy 4-vinylcyclohexane (e.g., Celloxide 2000; manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl (meth)acrylate (e.g., Cyclomer A400; manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl (meth)acrylate (e.g., Cyclomer M100; manufactured by Daicel Chemical Industries, Ltd.), and 3,4-epoxytricyclo[ 5.2.1.02,6 ]decyl (meth)acrylate.
オキセタニル基とエチレン性不飽和結合とを有する単量体(b2)は、オキセタニル基と(メタ)アクリロイルオキシ基とを有する単量体であることが好ましい。(b2)の好ましい例は、3-メチル-3-(メタ)アクリロイルオキシメチルオキセタン、3-エチル-3-(メタ)アクリロイルオキシメチルオキセタン、3-メチル-3-(メタ)アクリロイルオキシエチルオキセタン、3-エチル-3-(メタ)アクリロイルオキシエチルオキセタンを含む。 The monomer (b2) having an oxetanyl group and an ethylenically unsaturated bond is preferably a monomer having an oxetanyl group and a (meth)acryloyloxy group. Preferred examples of (b2) include 3-methyl-3-(meth)acryloyloxymethyloxetane, 3-ethyl-3-(meth)acryloyloxymethyloxetane, 3-methyl-3-(meth)acryloyloxyethyloxetane, and 3-ethyl-3-(meth)acryloyloxyethyloxetane.
テトラヒドロフリル基とエチレン性不飽和結合とを有する単量体(b3)は、テトラヒドロフリル基と(メタ)アクリロイルオキシ基とを有する単量体であることが好ましい。(b3)の好ましい例は、テトラヒドロフルフリルアクリレート(例えば、ビスコートV#150、大阪有機化学工業(株)製)、テトラヒドロフルフリルメタクリレート等が挙げられる。 The monomer (b3) having a tetrahydrofuryl group and an ethylenically unsaturated bond is preferably a monomer having a tetrahydrofuryl group and a (meth)acryloyloxy group. Preferred examples of (b3) include tetrahydrofurfuryl acrylate (e.g., Viscoat V#150, manufactured by Osaka Organic Chemical Industry Co., Ltd.), tetrahydrofurfuryl methacrylate, etc.
(c)の具体例は、
メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-ブチル(メタ)アクリレート、sec-ブチル(メタ)アクリレート、tert-ブチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、ドデシル(メタ)アクリレート、ラウリル(メタ)アクリレート、ステアリル(メタ)アクリレート、シクロペンチル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、2-メチルシクロヘキシル(メタ)アクリレート、トリシクロ[5.2.1.02,6]デカン-8-イル(メタ)アクリレート〔当該技術分野では、慣用名として「ジシクロペンタニル(メタ)アクリレート」と呼ばれている。また、「トリシクロデシル(メタ)アクリレート」と呼ばれることもある。〕、トリシクロ[5.2.1.02,6]デセン-8-イル(メタ)アクリレート〔当該技術分野では、慣用名として「ジシクロペンテニル(メタ)アクリレート」と呼ばれている。〕、ジシクロペンタニルオキシエチル(メタ)アクリレート、イソボルニル(メタ)アクリレート、アダマンチル(メタ)アクリレート、アリル(メタ)アクリレート、プロパルギル(メタ)アクリレート、フェニル(メタ)アクリレート、ナフチル(メタ)アクリレート、ベンジル(メタ)アクリレート等の(メタ)アクリル酸エステル類;
2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート等のヒドロキシ基含有(メタ)アクリル酸エステル類;
マレイン酸ジエチル、フマル酸ジエチル、イタコン酸ジエチル等のジカルボン酸ジエステル;
ビシクロ[2.2.1]ヘプト-2-エン、5-メチルビシクロ[2.2.1]ヘプト-2-エン、5-エチルビシクロ[2.2.1]ヘプト-2-エン、5-ヒドロキシビシクロ[2.2.1]ヘプト-2-エン、5-ヒドロキシメチルビシクロ[2.2.1]ヘプト-2-エン、5-(2’-ヒドロキシエチル)ビシクロ[2.2.1]ヘプト-2-エン、5-メトキシビシクロ[2.2.1]ヘプト-2-エン、5-エトキシビシクロ[2.2.1]ヘプト-2-エン、5,6-ジヒドロキシビシクロ[2.2.1]ヘプト-2-エン、5,6-ジ(ヒドロキシメチル)ビシクロ[2.2.1]ヘプト-2-エン、5,6-ジ(2’-ヒドロキシエチル)ビシクロ[2.2.1]ヘプト-2-エン、5,6-ジメトキシビシクロ[2.2.1]ヘプト-2-エン、5,6-ジエトキシビシクロ[2.2.1]ヘプト-2-エン、5-ヒドロキシ-5-メチルビシクロ[2.2.1]ヘプト-2-エン、5-ヒドロキシ-5-エチルビシクロ[2.2.1]ヘプト-2-エン、5-ヒドロキシメチル-5-メチルビシクロ[2.2.1]ヘプト-2-エン、5-tert-ブトキシカルボニルビシクロ[2.2.1]ヘプト-2-エン、5-シクロヘキシルオキシカルボニルビシクロ[2.2.1]ヘプト-2-エン、5-フェノキシカルボニルビシクロ[2.2.1]ヘプト-2-エン、5,6-ビス(tert-ブトキシカルボニル)ビシクロ[2.2.1]ヘプト-2-エン、5,6-ビス(シクロヘキシルオキシカルボニル)ビシクロ[2.2.1]ヘプト-2-エン等のビシクロ不飽和化合物類;
N-フェニルマレイミド、N-シクロヘキシルマレイミド、N-ベンジルマレイミド、N-スクシンイミジル-3-マレイミドベンゾエート、N-スクシンイミジル-4-マレイミドブチレート、N-スクシンイミジル-6-マレイミドカプロエート、N-スクシンイミジル-3-マレイミドプロピオネート、N-(9-アクリジニル)マレイミド等のジカルボニルイミド誘導体類;
スチレン、α-メチルスチレン、m-メチルスチレン、p-メチルスチレン、ビニルトルエン、p-メトキシスチレン、アクリロニトリル、メタクリロニトリル、塩化ビニル、塩化ビニリデン、アクリルアミド、メタクリルアミド、酢酸ビニル、1,3-ブタジエン、イソプレン、2,3-ジメチル-1,3-ブタジエン等
が挙げられる。
Specific examples of (c) are:
Methyl (meth)acrylate, ethyl (meth)acrylate, n-butyl (meth)acrylate, sec-butyl (meth)acrylate, tert-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, dodecyl (meth)acrylate, lauryl (meth)acrylate, stearyl (meth)acrylate, cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-methylcyclohexyl (meth)acrylate, tricyclo[5.2.1.0 2,6 ]decan-8-yl (meth)acrylate (commonly known in the art as "dicyclopentanyl (meth)acrylate" and sometimes also called "tricyclodecyl (meth)acrylate"). ], tricyclo[5.2.1.0 2,6 ]decen-8-yl(meth)acrylate (commonly known in the technical field as "dicyclopentenyl(meth)acrylate")], dicyclopentanyloxyethyl(meth)acrylate, isobornyl(meth)acrylate, adamantyl(meth)acrylate, allyl(meth)acrylate, propargyl(meth)acrylate, phenyl(meth)acrylate, naphthyl(meth)acrylate, benzyl(meth)acrylate and other (meth)acrylic acid esters;
Hydroxy group-containing (meth)acrylic acid esters such as 2-hydroxyethyl (meth)acrylate and 2-hydroxypropyl (meth)acrylate;
dicarboxylic acid diesters such as diethyl maleate, diethyl fumarate, and diethyl itaconate;
Bicyclo[2.2.1]hept-2-ene, 5-methylbicyclo[2.2.1]hept-2-ene, 5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxybicyclo[2.2.1]hept-2-ene, 5-hydroxymethylbicyclo[2.2.1]hept-2-ene, 5-(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5-methoxybicyclo[2.2.1]hept-2-ene, chloro[2.2.1]hept-2-ene, 5-ethoxybicyclo[2.2.1]hept-2-ene, 5,6-dihydroxybicyclo[2.2.1]hept-2-ene, 5,6-di(hydroxymethyl)bicyclo[2.2.1]hept-2-ene, 5,6-di(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5,6-dimethoxybicyclo[2.2.1]hept -2-ene, 5,6-diethoxybicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxymethyl-5-methylbicyclo[2.2.1]hept-2-ene, 5-tert-butoxycarbonylbicyclo[2.2.1]hept-2-ene bicyclounsaturated compounds such as ene, 5-cyclohexyloxycarbonylbicyclo[2.2.1]hept-2-ene, 5-phenoxycarbonylbicyclo[2.2.1]hept-2-ene, 5,6-bis(tert-butoxycarbonyl)bicyclo[2.2.1]hept-2-ene, and 5,6-bis(cyclohexyloxycarbonyl)bicyclo[2.2.1]hept-2-ene;
dicarbonyl imide derivatives such as N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimidocaproate, N-succinimidyl-3-maleimidopropionate, and N-(9-acridinyl)maleimide;
Examples of the copolymer include styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, vinyltoluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, and 2,3-dimethyl-1,3-butadiene.
中でも、共重合反応性、耐熱性又はパターニング時の現像性等の観点から、(c)は、メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-ブチル(メタ)アクリレート、ベンジル(メタ)アクリレート、トリシクロデシル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、スチレン、N-フェニルマレイミド、N-シクロヘキシルマレイミド、N-ベンジルマレイミド、ビシクロ[2.2.1]ヘプト-2-エン等が好ましい。 Among these, from the viewpoints of copolymerization reactivity, heat resistance, developability during patterning, etc., (c) is preferably methyl (meth)acrylate, ethyl (meth)acrylate, n-butyl (meth)acrylate, benzyl (meth)acrylate, tricyclodecyl (meth)acrylate, dicyclopentenyl (meth)acrylate, styrene, N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, bicyclo[2.2.1]hept-2-ene, etc.
樹脂[K1]において、それぞれに由来する構造単位の比率は、樹脂[K1]を構成する全構造単位中、以下の範囲にあることが好ましい。
(a)に由来する構造単位;2モル%以上50モル%以下(より好ましくは10モル%以上45モル%以下)、
(b)に由来する構造単位、特に(b1)に由来する構造単位;50モル%以上98モル%以下(より好ましくは55モル%以上90モル%以下)。
In the resin [K1], the ratio of the structural units derived from each of them to all the structural units constituting the resin [K1] is preferably within the following range.
Structural units derived from (a): 2 mol % or more and 50 mol % or less (more preferably 10 mol % or more and 45 mol % or less),
Structural units derived from (b), particularly structural units derived from (b1): 50 mol % or more and 98 mol % or less (more preferably 55 mol % or more and 90 mol % or less).
樹脂[K1]の構造単位の比率が、上記範囲にあると、保存安定性、現像性、得られるパターンの耐溶剤性に優れる傾向がある。 When the ratio of structural units in resin [K1] is within the above range, the storage stability, developability, and solvent resistance of the resulting pattern tend to be excellent.
樹脂[K1]は、文献「高分子合成の実験法」(大津隆行著 発行所(株)化学同人 第1版第1刷 1972年3月1日発行)に記載された方法及び当該文献に記載された引用文献を参考にして製造することができる。 Resin [K1] can be produced by referring to the method described in the literature "Experimental Methods for Polymer Synthesis" (written by Otsu Takayuki, published by Kagaku Dojin Co., Ltd., 1st edition, 1st printing, published March 1, 1972) and the references cited therein.
具体的には、(a)及び(b)(特に(b1))の所定量、重合開始剤及び溶剤等を反応容器中に仕込んで、脱酸素雰囲気下で、攪拌、加熱、保温する方法が挙げられる。なお、ここで用いられる重合開始剤及び溶剤等は、特に限定されず、当該分野で通常使用されているもののいずれをも使用することができる。重合開始剤としては、アゾ化合物(2,2’-アゾビスイソブチロニトリル、2,2’-アゾビス(2,4-ジメチルバレロニトリル)等)や有機過酸化物(ベンゾイルペルオキシド等)が挙げられる。溶剤としては、各単量体を溶解するものであればよく、後述する溶剤(F)等を用いてもよい。 Specific examples of the method include a method in which predetermined amounts of (a) and (b) (particularly (b1)), a polymerization initiator, a solvent, and the like are charged into a reaction vessel, and the mixture is stirred, heated, and kept warm in a deoxygenated atmosphere. The polymerization initiator and solvent used here are not particularly limited, and any of those commonly used in the relevant field can be used. Examples of the polymerization initiator include azo compounds (2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), etc.) and organic peroxides (benzoyl peroxide, etc.). The solvent may be any that dissolves each monomer, and solvent (F) described below may be used.
なお、得られた共重合体は、反応後の溶液をそのまま使用してもよいし、濃縮あるいは希釈した溶液を使用してもよいし、再沈殿等の方法で固体(粉体)として取り出したものを使用してもよい。 The copolymer obtained may be used as it is in the form of a solution after the reaction, or in the form of a concentrated or diluted solution, or may be extracted as a solid (powder) by a method such as reprecipitation.
樹脂[K2]において、それぞれに由来する構造単位の比率は、樹脂[K2]を構成する全構造単位中、以下の範囲にあることが好ましい。
(a)に由来する構造単位;4モル%以上45モル%以下(より好ましくは10モル%以上30モル%以下)、
(b)に由来する構造単位、特に(b1)に由来する構造単位;2モル%以上95モル%以下(より好ましくは5モル%以上80モル%以下)、
(c)に由来する構造単位;1モル%以上65モル%以下(より好ましくは5モル%以上60モル%以下)。
In the resin [K2], the ratio of the structural units derived from each of them to all the structural units constituting the resin [K2] is preferably within the following range.
Structural units derived from (a): 4 mol % or more and 45 mol % or less (more preferably 10 mol % or more and 30 mol % or less),
Structural units derived from (b), particularly structural units derived from (b1); 2 mol % or more and 95 mol % or less (more preferably 5 mol % or more and 80 mol % or less),
Structural units derived from (c): 1 mol % or more and 65 mol % or less (more preferably 5 mol % or more and 60 mol % or less).
樹脂[K2]の構造単位の比率が、上記範囲にあると、保存安定性、現像性、得られるパターンの耐溶剤性、耐熱性及び機械強度に優れる傾向がある。 When the ratio of structural units in resin [K2] is within the above range, the storage stability, developability, and solvent resistance, heat resistance, and mechanical strength of the resulting pattern tend to be excellent.
樹脂[K2]は、樹脂[K1]の製造方法として記載した方法と同様にして製造することができる。具体的には、(a)、(b)(特に(b1))及び(c)の所定量、重合開始剤及び溶剤を反応容器中に仕込んで、脱酸素雰囲気下で、攪拌、加熱、保温する方法が挙げられる。得られた共重合体は、反応後の溶液をそのまま使用してもよいし、濃縮あるいは希釈した溶液を使用してもよいし、再沈殿等の方法で固体(粉体)として取り出したものを使用してもよい。 Resin [K2] can be produced in the same manner as described for the production method of resin [K1]. Specifically, a method can be mentioned in which predetermined amounts of (a), (b) (particularly (b1)), and (c), a polymerization initiator, and a solvent are charged into a reaction vessel, and the mixture is stirred, heated, and kept warm in a deoxygenated atmosphere. The resulting copolymer may be used as a solution after the reaction as is, or a concentrated or diluted solution may be used, or a solid (powder) extracted by a method such as reprecipitation may be used.
樹脂[K3]において、それぞれに由来する構造単位の比率は、樹脂[K3]を構成する全構造単位中、以下の範囲にあることが好ましい。
(a)に由来する構造単位;2モル%以上55モル%以下(より好ましくは10モル%以上50モル%以下)、
(c)に由来する構造単位;45モル%以上98モル%以下(より好ましくは50モル%以上90モル%以下)。
In the resin [K3], the ratio of the structural units derived from each of them to all the structural units constituting the resin [K3] is preferably within the following range.
Structural units derived from (a): 2 mol % or more and 55 mol % or less (more preferably 10 mol % or more and 50 mol % or less),
Structural units derived from (c): 45 mol % or more and 98 mol % or less (more preferably 50 mol % or more and 90 mol % or less).
樹脂[K3]は、樹脂[K1]の製造方法として記載した方法と同様にして製造することができる。 Resin [K3] can be produced in the same manner as described for the production method of resin [K1].
樹脂[K4]は、(a)と(c)との共重合体を得て、(b)が有する炭素数2以上4以下の環状エーテル構造、特に(b1)が有するオキシラン環を(a)が有するカルボン酸及び/又はカルボン酸無水物に付加させることにより製造することができる。具体的には、まず(a)と(c)との共重合体を、樹脂[K1]の製造方法として記載した方法と同様にして製造する。この場合、それぞれに由来する構造単位の比率は、(a)と(c)との共重合体を構成する全構造単位中、以下の範囲にあることが好ましい。
(a)に由来する構造単位;5モル%以上50モル%以下(より好ましくは10モル%以上45モル%以下)、
(c)に由来する構造単位;50モル%以上95モル%以下(より好ましくは55モル%以上90モル%以下)。
Resin [K4] can be produced by obtaining a copolymer of (a) and (c), and adding a cyclic ether structure having 2 to 4 carbon atoms contained in (b), particularly an oxirane ring contained in (b1), to a carboxylic acid and/or a carboxylic acid anhydride contained in (a). Specifically, a copolymer of (a) and (c) is first produced in the same manner as described as the production method of resin [K1]. In this case, the ratio of the structural units derived from each of them is preferably within the following range among all the structural units constituting the copolymer of (a) and (c).
Structural units derived from (a): 5 mol % or more and 50 mol % or less (more preferably 10 mol % or more and 45 mol % or less),
Structural units derived from (c): 50 mol % or more and 95 mol % or less (more preferably 55 mol % or more and 90 mol % or less).
次に、上記共重合体中の(a)に由来するカルボン酸及び/又はカルボン酸無水物の一部に、(b)が有する炭素数2以上4以下の環状エーテル構造、特に(b1)が有するオキシラン環を反応させる。具体的には、(a)と(c)との共重合体の製造に引き続き、フラスコ内雰囲気を窒素から空気に置換し、(b)(特に(b1))、カルボン酸又はカルボン酸無水物と環状エーテル構造との反応触媒(例えばトリス(ジメチルアミノメチル)フェノール等)及び重合禁止剤(例えばハイドロキノン等)等をフラスコ内に入れて、60℃以上130℃以下で、1時間以上10時間以下の反応時間で反応することにより、樹脂[K4]を得ることができる。 Next, a part of the carboxylic acid and/or carboxylic anhydride derived from (a) in the copolymer is reacted with the cyclic ether structure having 2 to 4 carbon atoms contained in (b), particularly the oxirane ring contained in (b1). Specifically, following the production of the copolymer of (a) and (c), the atmosphere in the flask is replaced with air instead of nitrogen, and (b) (particularly (b1)), a reaction catalyst for the reaction of the carboxylic acid or carboxylic anhydride with the cyclic ether structure (e.g., tris(dimethylaminomethyl)phenol, etc.), and a polymerization inhibitor (e.g., hydroquinone, etc.) are placed in the flask, and the reaction is carried out at 60°C to 130°C for a reaction time of 1 hour to 10 hours, thereby obtaining the resin [K4].
(b)の使用量、特に(b1)の使用量は、(a)100モルに対して、5モル以上80モル以下であることが好ましく、より好ましくは10モル以上75モル以下である。この範囲とすることにより、保存安定性、現像性、耐溶剤性、耐熱性、機械強度及び感度のバランスが良好になる傾向がある。環状エーテル構造の反応性が高く、未反応の(b)が残存しにくいことから、樹脂[K4]に用いる(b)としては(b1)が好ましく、(b1-1)がより好ましい。 The amount of (b), particularly (b1), used is preferably 5 to 80 moles, more preferably 10 to 75 moles, per 100 moles of (a). This range tends to provide a good balance between storage stability, developability, solvent resistance, heat resistance, mechanical strength, and sensitivity. As the cyclic ether structure has high reactivity and unreacted (b) is unlikely to remain, (b1) is preferred as (b) used in resin [K4], and (b1-1) is more preferred.
上記反応触媒の使用量は、(a)、(b)(特に(b1))及び(c)の合計量に対して0.001質量%以上5質量%以下であることが好ましい。上記重合禁止剤の使用量は、(a)、(b)及び(c)の合計量に対して0.001質量%以上5質量%以下であることが好ましい。 The amount of the reaction catalyst used is preferably 0.001% by mass or more and 5% by mass or less based on the total amount of (a), (b) (especially (b1)), and (c). The amount of the polymerization inhibitor used is preferably 0.001% by mass or more and 5% by mass or less based on the total amount of (a), (b), and (c).
仕込方法、反応温度及び時間等の反応条件は、製造設備や重合による発熱量等を考慮して適宜調整することができる。なお、重合条件と同様に、製造設備や重合による発熱量等を考慮し、仕込方法や反応温度を適宜調整することができる。 The reaction conditions such as the charging method, reaction temperature and time can be adjusted as appropriate, taking into consideration the production equipment, the amount of heat generated by polymerization, etc. As with the polymerization conditions, the charging method and reaction temperature can be adjusted as appropriate, taking into consideration the production equipment, the amount of heat generated by polymerization, etc.
樹脂[K5]は、第一段階として、上述した樹脂[K1]の製造方法と同様にして、(b)(特に(b1))と(c)との共重合体を得る。上記と同様に、得られた共重合体は、反応後の溶液をそのまま使用してもよいし、濃縮あるいは希釈した溶液を使用してもよいし、再沈殿等の方法で固体(粉体)として取り出したものを使用してもよい。 In the first step, resin [K5] is produced by obtaining a copolymer of (b) (particularly (b1)) and (c) in the same manner as in the production method of resin [K1] described above. As in the above, the obtained copolymer may be used as it is in the form of a solution after the reaction, or a concentrated or diluted solution, or it may be extracted as a solid (powder) by a method such as reprecipitation.
(b)(特に(b1))及び(c)に由来する構造単位の比率は、上記の共重合体を構成する全構造単位の合計モル数に対して、以下の範囲にあることが好ましい。
(b)に由来する構造単位、特に(b1)に由来する構造単位;5モル%以上95モル%以下(より好ましくは10モル%以上90モル%以下)、
(c)に由来する構造単位;5モル%以上95モル%以下(より好ましくは10モル%以上90モル%以下)。
The ratio of the structural units derived from (b) (particularly (b1)) and (c) to the total number of moles of all structural units constituting the above copolymer is preferably within the following range.
Structural units derived from (b), particularly structural units derived from (b1); 5 mol % or more and 95 mol % or less (more preferably 10 mol % or more and 90 mol % or less),
Structural units derived from (c): 5 mol % or more and 95 mol % or less (more preferably 10 mol % or more and 90 mol % or less).
さらに、樹脂[K4]の製造方法と同様の条件で、(b)(特に(b1))と(c)との共重合体が有する(b)に由来する環状エーテル構造に、(a)が有するカルボン酸又はカルボン酸無水物を反応させることにより、樹脂[K5]を得ることができる。上記の共重合体に反応させる(a)の使用量は、(b)(特に(b1))100モルに対して、5モル以上80モル以下であることが好ましい。環状エーテル構造の反応性が高く、未反応の(b)が残存しにくいことから、樹脂[K5]に用いる(b)としては(b1)が好ましく、(b1-1)がより好ましい。 Furthermore, under the same conditions as in the manufacturing method of resin [K4], resin [K5] can be obtained by reacting a cyclic ether structure derived from (b) contained in a copolymer of (b) (particularly (b1)) and (c) with a carboxylic acid or carboxylic anhydride contained in (a). The amount of (a) reacted with the above copolymer is preferably 5 to 80 moles per 100 moles of (b) (particularly (b1)). As the reactivity of the cyclic ether structure is high and unreacted (b) is unlikely to remain, (b1) is preferred as (b) used in resin [K5], and (b1-1) is more preferred.
樹脂[K6]は、樹脂[K5]に、さらにカルボン酸無水物を反応させた樹脂である。環状エーテル構造とカルボン酸又はカルボン酸無水物との反応により発生するヒドロキシ基に、カルボン酸無水物を反応させる。 Resin [K6] is a resin obtained by further reacting resin [K5] with a carboxylic acid anhydride. The hydroxyl group generated by the reaction of the cyclic ether structure with a carboxylic acid or a carboxylic acid anhydride is reacted with the carboxylic acid anhydride.
カルボン酸無水物としては、無水マレイン酸、シトラコン酸無水物、イタコン酸無水物、3-ビニルフタル酸無水物、4-ビニルフタル酸無水物、3,4,5,6-テトラヒドロフタル酸無水物、1,2,3,6-テトラヒドロフタル酸無水物、ジメチルテトラヒドロフタル酸無水物、5,6-ジカルボキシビシクロ[2.2.1]ヘプト-2-エン無水物(ハイミック酸無水物)等が挙げられる。 Examples of carboxylic acid anhydrides include maleic anhydride, citraconic anhydride, itaconic anhydride, 3-vinylphthalic anhydride, 4-vinylphthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene anhydride (himic anhydride), etc.
樹脂(C)のポリスチレン換算の重量平均分子量は、好ましくは3000以上100000以下であり、より好ましくは5000以上50000以下であり、さらに好ましくは5000以上30000以下である。分子量が上記範囲にあると、未露光部の現像液に対する溶解性が高く、得られるパターンの残膜率や硬度も高い傾向にある。樹脂(C)の分子量分布〔重量平均分子量(Mw)/数平均分子量(Mn)〕は、好ましくは1.1以上6以下であり、より好ましくは1.2以上4以下である。 The polystyrene-equivalent weight average molecular weight of resin (C) is preferably 3,000 to 100,000, more preferably 5,000 to 50,000, and even more preferably 5,000 to 30,000. When the molecular weight is within the above range, the solubility of the unexposed parts in the developer is high, and the residual film rate and hardness of the obtained pattern tend to be high. The molecular weight distribution [weight average molecular weight (Mw)/number average molecular weight (Mn)] of resin (C) is preferably 1.1 to 6, and more preferably 1.2 to 4.
樹脂(C)の酸価は、例えば20mg-KOH/g以上200mg-KOH/g以下であり、好ましくは40mg-KOH/g以上170mg-KOH/g以下であり、さらに好ましくは60mg-KOH/g以上150mg-KOH/g以下である。樹脂(C)の酸価が上記の範囲にあることにより、現像性と高い分散性とを両立できる。
酸価は、樹脂1gを中和するのに必要な水酸化カリウムの量(mg)として測定される値であり、例えば水酸化カリウム水溶液を用いた滴定により求めることができる。
The acid value of the resin (C) is, for example, 20 mg-KOH/g or more and 200 mg-KOH/g or less, preferably 40 mg-KOH/g or more and 170 mg-KOH/g or less, and more preferably 60 mg-KOH/g or more and 150 mg-KOH/g or less. When the acid value of the resin (C) is in the above range, both developability and high dispersibility can be achieved.
The acid value is a value measured as the amount (mg) of potassium hydroxide required to neutralize 1 g of resin, and can be determined, for example, by titration using an aqueous potassium hydroxide solution.
樹脂(C)の溶液酸価は、好ましくは5mg-KOH/g以上180mg-KOH/g以下であり、より好ましくは10mg-KOH/g以上100mg-KOH/g以下であり、さらに好ましくは12mg-KOH/g以上50mg-KOH/g以下である。溶液酸価は、樹脂溶液1gを中和するのに必要な水酸化カリウムの量(mg)として測定される値であり、例えば水酸化カリウム水溶液を用いた滴定により求めることができる。
溶液酸価は、樹脂(C)を所定の溶媒に溶解させて測定した値であり、その溶液の樹脂濃度は例えば10質量%以上50質量%以下である。
樹脂(C)の溶液酸価が前述の範囲にあることで、半導体粒子及び樹脂(C)のいずれもが凝集することなくこれらを混合することができる。
The solution acid value of the resin (C) is preferably 5 mg-KOH/g or more and 180 mg-KOH/g or less, more preferably 10 mg-KOH/g or more and 100 mg-KOH/g or less, and even more preferably 12 mg-KOH/g or more and 50 mg-KOH/g or less. The solution acid value is a value measured as the amount (mg) of potassium hydroxide required to neutralize 1 g of the resin solution, and can be determined, for example, by titration using an aqueous potassium hydroxide solution.
The solution acid value is a value measured by dissolving the resin (C) in a predetermined solvent, and the resin concentration in the solution is, for example, 10% by mass or more and 50% by mass or less.
When the solution acid value of the resin (C) is within the above-mentioned range, the semiconductor particles and the resin (C) can be mixed without causing aggregation of either of them.
樹脂(C)の含有量は、硬化性樹脂組成物の固形分100質量%中、好ましくは5質量%以上70質量%以下であり、より好ましくは10質量%以上65質量%以下であり、さらに好ましくは15質量%以上60質量%以下である。樹脂(C)の含有量が、上記範囲にあると、未露光部の現像液に対する溶解性が高い傾向がある。 The content of resin (C) is preferably 5% by mass or more and 70% by mass or less, more preferably 10% by mass or more and 65% by mass or less, and even more preferably 15% by mass or more and 60% by mass or less, based on 100% by mass of the solid content of the curable resin composition. When the content of resin (C) is within the above range, the solubility of the unexposed portion in the developer tends to be high.
〔4〕重合性化合物(D)
重合性化合物(D)は、光照射等より重合開始剤(E)から発生する活性ラジカル等によって重合し得る化合物であれば、特に限定されず、重合性のエチレン性不飽和結合を有する化合物等が挙げられる。重合性化合物(D)の重量平均分子量は、3000以下であることが好ましい。
[4] Polymerizable compound (D)
The polymerizable compound (D) is not particularly limited as long as it is a compound that can be polymerized by active radicals generated from the polymerization initiator (E) by light irradiation, etc., and examples thereof include compounds having a polymerizable ethylenically unsaturated bond, etc. The weight average molecular weight of the polymerizable compound (D) is preferably 3000 or less.
中でも、重合性化合物(D)としては、エチレン性不飽和結合を3つ以上有する光重合性化合物であることが好ましい。エチレン性不飽和結合を3つ以上有する光重合性化合物の具体例は、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、トリペンタエリスリトールオクタ(メタ)アクリレート、トリペンタエリスリトールヘプタ(メタ)アクリレート、テトラペンタエリスリトールデカ(メタ)アクリレート、テトラペンタエリスリトールノナ(メタ)アクリレート、トリス(2-(メタ)アクリロイルオキシエチル)イソシアヌレート、エチレングリコール変性ペンタエリスリトールテトラ(メタ)アクリレート、エチレングリコール変性ジペンタエリスリトールヘキサ(メタ)アクリレート、プロピレングリコール変性ペンタエリスリトールテトラ(メタ)アクリレート、プロピレングリコール変性ジペンタエリスリトールヘキサ(メタ)アクリレート、カプロラクトン変性ペンタエリスリトールテトラ(メタ)アクリレート、カプロラクトン変性ジペンタエリスリトールヘキサ(メタ)アクリレート等が挙げられる。 Among them, the polymerizable compound (D) is preferably a photopolymerizable compound having three or more ethylenically unsaturated bonds. Specific examples of photopolymerizable compounds having three or more ethylenically unsaturated bonds include trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, tripentaerythritol octa(meth)acrylate, tripentaerythritol hepta(meth)acrylate, tetrapentaerythritol deca(meth)acrylate, and tetrapentaerythritol nona(meth)acrylate. acrylate, tris(2-(meth)acryloyloxyethyl)isocyanurate, ethylene glycol modified pentaerythritol tetra(meth)acrylate, ethylene glycol modified dipentaerythritol hexa(meth)acrylate, propylene glycol modified pentaerythritol tetra(meth)acrylate, propylene glycol modified dipentaerythritol hexa(meth)acrylate, caprolactone modified pentaerythritol tetra(meth)acrylate, caprolactone modified dipentaerythritol hexa(meth)acrylate, etc.
硬化性樹脂組成物は、1種又は2種以上の重合性化合物(D)を含有することができる。重合性化合物(D)の含有量は、硬化性樹脂組成物中の樹脂(C)100質量部に対して、好ましくは20質量部以上150質量部以下であり、より好ましくは80質量部以上120質量部以下である。 The curable resin composition may contain one or more polymerizable compounds (D). The content of the polymerizable compound (D) is preferably 20 parts by mass or more and 150 parts by mass or less, more preferably 80 parts by mass or more and 120 parts by mass or less, per 100 parts by mass of the resin (C) in the curable resin composition.
〔5〕重合開始剤(E)
硬化性樹脂組成物は、重合開始剤(E)を含むことができる。重合開始剤(E)は、光や熱の作用により活性ラジカル、酸等を発生し、重合を開始し得る化合物であれば特に限定されることなく、公知の重合開始剤を用いることができる。
[5] Polymerization initiator (E)
The curable resin composition may contain a polymerization initiator (E). The polymerization initiator (E) is not particularly limited as long as it is a compound that can generate active radicals, acids, etc. by the action of light or heat and initiate polymerization, and any known polymerization initiator can be used.
重合開始剤(E)としては、O-アシルオキシム化合物等のオキシム系化合物、アルキルフェノン化合物、ビイミダゾール化合物、トリアジン化合物、アシルホスフィンオキサイド化合物等が挙げられる。重合開始剤(E)は、感度や、パターニング性等を考慮して、2種以上を併用してもよい。重合開始剤(E)は、感度及び所望の線幅を有するパターン形状を精密に作り込むうえで有利であることから、O-アシルオキシム化合物等のオキシム系化合物を含むことが好ましい。 Examples of the polymerization initiator (E) include oxime compounds such as O-acyloxime compounds, alkylphenone compounds, biimidazole compounds, triazine compounds, acylphosphine oxide compounds, and the like. Two or more types of polymerization initiator (E) may be used in combination, taking into consideration the sensitivity, patterning properties, and the like. It is preferable that the polymerization initiator (E) contains an oxime compound such as O-acyloxime compounds, as this is advantageous in precisely creating a pattern shape having sensitivity and a desired line width.
O-アシルオキシム化合物は、下記式(d)で表される構造を有する化合物である。以下、*は結合手を表す。 An O-acyloxime compound is a compound having a structure represented by the following formula (d). Hereinafter, * represents a bond.
このようなO-アシルオキシム化合物としては、N-ベンゾイルオキシ-1-(4-フェニルスルファニルフェニル)ブタン-1-オン-2-イミン、N-ベンゾイルオキシ-1-(4-フェニルスルファニルフェニル)オクタン-1-オン-2-イミン、N-ベンゾイルオキシ-1-(4-フェニルスルファニルフェニル)-3-シクロペンチルプロパン-1-オン-2-イミン、N-アセトキシ-1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]エタン-1-イミン、N-アセトキシ-1-[9-エチル-6-{2-メチル-4-(3,3-ジメチル-2,4-ジオキサシクロペンタニルメチルオキシ)ベンゾイル}-9H-カルバゾール-3-イル]エタン-1-イミン、N-アセトキシ-1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-3-シクロペンチルプロパン-1-イミン、N-ベンゾイルオキシ-1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-3-シクロペンチルプロパン-1-オン-2-イミン、N-アセチルオキシ-1-[4-(2-ヒドロキシエチルオキシ)フェニルスルファニルフェニル]プロパン-1-オン-2-イミン、N-アセチルオキシ-1-[4-(1-メチル-2-メトキシエトキシ)-2-メチルフェニル]-1-(9-エチル-6-ニトロ-9H-カルバゾール-3-イル)メタン-1-イミン等が挙げられる。イルガキュア(登録商標)OXE01、同OXE02、同OXE03(以上、BASF社製)、N-1919、NCI-930、NCI-831(以上、ADEKA社製)等の市販品を用いてもよい。これらのO-アシルオキシム化合物は、リソグラフィ性能を向上させ得る点で有利である。 Examples of such O-acyloxime compounds include N-benzoyloxy-1-(4-phenylsulfanylphenyl)butan-1-one-2-imine, N-benzoyloxy-1-(4-phenylsulfanylphenyl)octan-1-one-2-imine, N-benzoyloxy-1-(4-phenylsulfanylphenyl)-3-cyclopentylpropan-1-one-2-imine, N-acetoxy-1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-{2-methyl-4-(3,3-dimethyl-2,4-dioxacyclopentanylmethyloxy)benzoyl}-9H-carbazol-3-yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-3-cyclopentylpropan-1-imine, N-benzoyloxy-1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-3-cyclopentylpropan-1-one-2-imine, N-acetyloxy-1-[4-(2-hydroxyethyloxy)phenylsulfanylphenyl]propan-1-one-2-imine, N-acetyloxy-1-[4-(1-methyl-2-methoxyethoxy)-2-methylphenyl]-1-(9-ethyl-6-nitro-9H-carbazol-3-yl)methane-1-imine, and the like. Commercially available products such as Irgacure (registered trademark) OXE01, OXE02, and OXE03 (all manufactured by BASF), N-1919, NCI-930, and NCI-831 (all manufactured by ADEKA) may also be used. These O-acyloxime compounds are advantageous in that they can improve lithography performance.
アルキルフェノン化合物は、下記式(d4)で表される部分構造又は下記式(d5)で表される部分構造を有する化合物である。これらの部分構造中、ベンゼン環は置換基を有していてもよい。 The alkylphenone compound is a compound having a partial structure represented by the following formula (d4) or a partial structure represented by the following formula (d5). In these partial structures, the benzene ring may have a substituent.
式(d4)で表される構造を有する化合物としては、2-メチル-2-モルホリノ-1-(4-メチルスルファニルフェニル)プロパン-1-オン、2-ジメチルアミノ-1-(4-モルホリノフェニル)-2-ベンジルブタン-1-オン、2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]ブタン-1-オン等が挙げられる。イルガキュア(登録商標)369、同907、同379(以上、BASF社製)等の市販品を用いてもよい。 Examples of compounds having the structure represented by formula (d4) include 2-methyl-2-morpholino-1-(4-methylsulfanylphenyl)propan-1-one, 2-dimethylamino-1-(4-morpholinophenyl)-2-benzylbutan-1-one, and 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]butan-1-one. Commercially available products such as Irgacure (registered trademark) 369, 907, and 379 (all manufactured by BASF) may also be used.
式(d5)で表される構造を有する化合物としては、2-ヒドロキシ-2-メチル-1-フェニルプロパン-1-オン、2-ヒドロキシ-2-メチル-1-〔4-(2-ヒドロキシエトキシ)フェニル〕プロパン-1-オン、1-ヒドロキシシクロヘキシルフェニルケトン、2-ヒドロキシ-2-メチル-1-(4-イソプロペニルフェニル)プロパン-1-オンのオリゴマー、α,α-ジエトキシアセトフェノン、ベンジルジメチルケタール等が挙げられる。 Examples of compounds having a structure represented by formula (d5) include 2-hydroxy-2-methyl-1-phenylpropan-1-one, 2-hydroxy-2-methyl-1-[4-(2-hydroxyethoxy)phenyl]propan-1-one, 1-hydroxycyclohexyl phenyl ketone, oligomers of 2-hydroxy-2-methyl-1-(4-isopropenylphenyl)propan-1-one, α,α-diethoxyacetophenone, and benzyl dimethyl ketal.
感度の点で、アルキルフェノン化合物としては、式(d4)で表される構造を有する化合物が好ましい。 In terms of sensitivity, the alkylphenone compound is preferably a compound having a structure represented by formula (d4).
ビイミダゾール化合物としては、2,2’-ビス(2-クロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(2,3-ジクロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール(例えば、特開平6-75372号公報、特開平6-75373号公報等参照。)、2,2’-ビス(2-クロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(2-クロロフェニル)-4,4’,5,5’-テトラ(アルコキシフェニル)ビイミダゾール、2,2’-ビス(2-クロロフェニル)-4,4’,5,5’-テトラ(ジアルコキシフェニル)ビイミダゾール、2,2’-ビス(2-クロロフェニル)-4,4’,5,5’-テトラ(トリアルコキシフェニル)ビイミダゾール(例えば、特公昭48-38403号公報、特開昭62-174204号公報等参照。)、4,4’,5,5’-位のフェニル基がカルボアルコキシ基により置換されているイミダゾール化合物(例えば、特開平7-10913号公報等参照)等が挙げられる。中でも、下記式で表される化合物又はこれらの混合物が好ましい。 Examples of biimidazole compounds include 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole (see, for example, JP-A-6-75372 and JP-A-6-75373), 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(alkoxyphenyl ) biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(dialkoxyphenyl) biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(trialkoxyphenyl) biimidazole (see, for example, JP-B-48-38403 and JP-A-62-174204), imidazole compounds in which the phenyl groups at the 4,4',5,5'-positions are substituted with carboalkoxy groups (see, for example, JP-A-7-10913), etc. Among these, compounds represented by the following formula or mixtures thereof are preferred.
トリアジン化合物としては、2,4-ビス(トリクロロメチル)-6-(4-メトキシフェニル)-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-(4-メトキシナフチル)-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-ピペロニル-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-(4-メトキシスチリル)-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-〔2-(5-メチルフラン-2-イル)エテニル〕-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-〔2-(フラン-2-イル)エテニル〕-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-〔2-(4-ジエチルアミノ-2-メチルフェニル)エテニル〕-1,3,5-トリアジン、2,4-ビス(トリクロロメチル)-6-〔2-(3,4-ジメトキシフェニル)エテニル〕-1,3,5-トリアジン等が挙げられる。 Triazine compounds include 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-( 5-methylfuran-2-yl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(4-diethylamino-2-methylphenyl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl)ethenyl]-1,3,5-triazine, etc.
アシルホスフィンオキサイド化合物としては、2,4,6-トリメチルベンゾイルジフェニルホスフィンオキサイド等が挙げられる。 Examples of acylphosphine oxide compounds include 2,4,6-trimethylbenzoyldiphenylphosphine oxide.
さらに重合開始剤(E)としては、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾインイソブチルエーテル等のベンゾイン化合物;ベンゾフェノン、o-ベンゾイル安息香酸メチル、4-フェニルベンゾフェノン、4-ベンゾイル-4’-メチルジフェニルサルファイド、3,3’,4,4’-テトラ(tert-ブチルパーオキシカルボニル)ベンゾフェノン、2,4,6-トリメチルベンゾフェノン等のベンゾフェノン化合物;9,10-フェナンスレンキノン、2-エチルアントラキノン、カンファーキノン等のキノン化合物;10-ブチル-2-クロロアクリドン、ベンジル、フェニルグリオキシル酸メチル、チタノセン化合物等が挙げられる。これらは、後述の重合開始助剤(E1)(特にアミン類)と組み合わせて用いることが好ましい。 Further examples of the polymerization initiator (E) include benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin isobutyl ether; benzophenone compounds such as benzophenone, o-benzoyl methyl benzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, 3,3',4,4'-tetra(tert-butylperoxycarbonyl)benzophenone, and 2,4,6-trimethylbenzophenone; quinone compounds such as 9,10-phenanthrenequinone, 2-ethylanthraquinone, and camphorquinone; 10-butyl-2-chloroacridone, benzyl, methyl phenylglyoxylate, and titanocene compounds. These are preferably used in combination with the polymerization initiator aid (E1) (particularly amines) described below.
重合開始剤(E)としては、アルキルフェノン化合物、トリアジン化合物、アシルホスフィンオキサイド化合物、O-アシルオキシム化合物及びビイミダゾール化合物からなる群より選択される少なくとも1種を含む重合開始剤が好ましく、O-アシルオキシム化合物を含む重合開始剤がより好ましい。 As the polymerization initiator (E), a polymerization initiator containing at least one selected from the group consisting of an alkylphenone compound, a triazine compound, an acylphosphine oxide compound, an O-acyloxime compound, and a biimidazole compound is preferred, and a polymerization initiator containing an O-acyloxime compound is more preferred.
重合開始剤(E)の含有量は、樹脂(C)及び重合性化合物(D)の合計量100質量部に対して、好ましくは0.1質量部以上30質量部以下であり、より好ましくは1質量部以上25質量部以下であり、さらに好ましくは1質量部以上20質量部以下である。重合開始剤(E)の含有量が上記範囲内にあると、高感度化して露光時間が短縮される傾向があるため、波長変換膜等の硬化膜の生産性が向上する傾向にある。 The content of the polymerization initiator (E) is preferably 0.1 parts by mass or more and 30 parts by mass or less, more preferably 1 part by mass or more and 25 parts by mass or less, and even more preferably 1 part by mass or more and 20 parts by mass or less, relative to 100 parts by mass of the total amount of the resin (C) and the polymerizable compound (D). When the content of the polymerization initiator (E) is within the above range, the sensitivity tends to be increased and the exposure time tends to be shortened, so that the productivity of the cured film such as the wavelength conversion film tends to be improved.
〔6〕重合開始助剤(E1)
硬化性樹脂組成物は、重合開始助剤(E1)を含むことができる。重合開始助剤(E1)は、重合開始剤(E)によって重合が開始された重合性化合物(D)の重合を促進するために用いられる化合物、もしくは増感剤である。重合開始助剤(E1)を含む場合、重合開始剤(E)と組み合わせて用いられる。
[6] Polymerization initiator aid (E1)
The curable resin composition may contain a polymerization initiation aid (E1). The polymerization initiation aid (E1) is a compound used to promote the polymerization of the polymerizable compound (D) whose polymerization has been initiated by the polymerization initiator (E), or a sensitizer. When the polymerization initiation aid (E1) is contained, it is used in combination with the polymerization initiator (E).
重合開始助剤(E1)としては、アミン化合物、アルコキシアントラセン化合物、チオキサントン化合物及びカルボン酸化合物等が挙げられる。中でも、チオキサントン化合物が好ましい。重合開始助剤(E1)は、2種以上を併用してもよい。 Examples of the polymerization initiation aid (E1) include amine compounds, alkoxyanthracene compounds, thioxanthone compounds, and carboxylic acid compounds. Among these, thioxanthone compounds are preferred. Two or more types of polymerization initiation aids (E1) may be used in combination.
アミン化合物としては、トリエタノールアミン、メチルジエタノールアミン、トリイソプロパノールアミン、4-ジメチルアミノ安息香酸メチル、4-ジメチルアミノ安息香酸エチル、4-ジメチルアミノ安息香酸イソアミル、安息香酸2-ジメチルアミノエチル、4-ジメチルアミノ安息香酸2-エチルヘキシル、N,N-ジメチルパラトルイジン、4,4’-ビス(ジメチルアミノ)ベンゾフェノン(通称ミヒラーズケトン)、4,4’-ビス(ジエチルアミノ)ベンゾフェノン、4,4’-ビス(エチルメチルアミノ)ベンゾフェノン等が挙げられ、中でも4,4’-ビス(ジエチルアミノ)ベンゾフェノンが好ましい。EAB-F(保土谷化学工業(株)製)等の市販品を用いてもよい。 Examples of amine compounds include triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, 2-ethylhexyl 4-dimethylaminobenzoate, N,N-dimethyl-p-toluidine, 4,4'-bis(dimethylamino)benzophenone (commonly known as Michler's ketone), 4,4'-bis(diethylamino)benzophenone, 4,4'-bis(ethylmethylamino)benzophenone, etc., of which 4,4'-bis(diethylamino)benzophenone is preferred. Commercially available products such as EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) may also be used.
アルコキシアントラセン化合物としては、9,10-ジメトキシアントラセン、2-エチル-9,10-ジメトキシアントラセン、9,10-ジエトキシアントラセン、2-エチル-9,10-ジエトキシアントラセン、9,10-ジブトキシアントラセン、2-エチル-9,10-ジブトキシアントラセン等が挙げられる。 Examples of alkoxyanthracene compounds include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene, 9,10-dibutoxyanthracene, and 2-ethyl-9,10-dibutoxyanthracene.
チオキサントン化合物としては、2-イソプロピルチオキサントン、4-イソプロピルチオキサントン、2,4-ジエチルチオキサントン、2,4-ジクロロチオキサントン、1-クロロ-4-プロポキシチオキサントン等が挙げられる。 Examples of thioxanthone compounds include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, and 1-chloro-4-propoxythioxanthone.
カルボン酸化合物としては、フェニルスルファニル酢酸、メチルフェニルスルファニル酢酸、エチルフェニルスルファニル酢酸、メチルエチルフェニルスルファニル酢酸、ジメチルフェニルスルファニル酢酸、メトキシフェニルスルファニル酢酸、ジメトキシフェニルスルファニル酢酸、クロロフェニルスルファニル酢酸、ジクロロフェニルスルファニル酢酸、N-フェニルグリシン、フェノキシ酢酸、ナフチルチオ酢酸、N-ナフチルグリシン、ナフトキシ酢酸等が挙げられる。 Examples of carboxylic acid compounds include phenylsulfanylacetic acid, methylphenylsulfanylacetic acid, ethylphenylsulfanylacetic acid, methylethylphenylsulfanylacetic acid, dimethylphenylsulfanylacetic acid, methoxyphenylsulfanylacetic acid, dimethoxyphenylsulfanylacetic acid, chlorophenylsulfanylacetic acid, dichlorophenylsulfanylacetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine, naphthoxyacetic acid, etc.
重合開始助剤(E1)の含有量は、樹脂(C)及び重合性化合物(D)の合計量100質量部に対して、好ましくは0.1質量部以上30質量部以下、より好ましくは1質量部以上20質量部以下である。重合開始助剤(E1)の含有量が上記範囲内にあると、波長変換膜等の硬化膜の生産性をさらに向上させ得る。 The content of the polymerization initiation aid (E1) is preferably 0.1 parts by mass or more and 30 parts by mass or less, more preferably 1 part by mass or more and 20 parts by mass or less, relative to 100 parts by mass of the total amount of the resin (C) and the polymerizable compound (D). When the content of the polymerization initiation aid (E1) is within the above range, the productivity of the cured film such as the wavelength conversion film can be further improved.
〔7〕溶剤(F)
硬化性樹脂組成物は、1種又は2種以上の溶剤(F)を含むことが好ましい。溶剤(F)としては、エステル溶剤(-C(=O)-O-を含む溶剤)、エステル溶剤以外のエーテル溶剤(-O-を含む溶剤)、エーテルエステル溶剤(-C(=O)-O-と-O-とを含む溶剤)、エステル溶剤以外のケトン溶剤(-C(=O)-を含む溶剤)、アルコール溶剤、芳香族炭化水素溶剤、アミド溶剤及びジメチルスルホキシド等が挙げられる。
[7] Solvent (F)
The curable resin composition preferably contains one or more solvents (F). Examples of the solvent (F) include ester solvents (solvents containing -C(=O)-O-), ether solvents other than ester solvents (solvents containing -O-), ether ester solvents (solvents containing -C(=O)-O- and -O-), ketone solvents other than ester solvents (solvents containing -C(=O)-), alcohol solvents, aromatic hydrocarbon solvents, amide solvents, and dimethyl sulfoxide.
エステル溶剤としては、乳酸メチル、乳酸エチル、乳酸ブチル、2-ヒドロキシイソブタン酸メチル、酢酸エチル、酢酸n-ブチル、酢酸イソブチル、ギ酸ペンチル、酢酸イソペンチル、プロピオン酸ブチル、酪酸イソプロピル、酪酸エチル、酪酸ブチル、ピルビン酸メチル、ピルビン酸エチル、ピルビン酸プロピル、アセト酢酸メチル、アセト酢酸エチル、酢酸シクロヘキシル、酢酸2-メチルシクロヘキシル、プロピオン酸シクロヘキシル、酢酸cis-3,3,5-トリメチルシクロヘキシル、酢酸4-tert-ブチルシクロヘキシル、酪酸シクロヘキシル、シクロヘキサンカルボン酸イソプロピル及びγ-ブチロラクトン等が挙げられる。 Examples of ester solvents include methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutanoate, ethyl acetate, n-butyl acetate, isobutyl acetate, pentyl formate, isopentyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, cyclohexyl acetate, 2-methylcyclohexyl acetate, cyclohexyl propionate, cis-3,3,5-trimethylcyclohexyl acetate, 4-tert-butylcyclohexyl acetate, cyclohexyl butyrate, isopropyl cyclohexanecarboxylate, and γ-butyrolactone.
エーテル溶剤としては、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノプロピルエーテル、エチレングリコールモノブチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノブチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテル、3-メトキシ-1-ブタノール、3-メトキシ-3-メチルブタノール、テトラヒドロフラン、テトラヒドロピラン、1,4-ジオキサン、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、ジエチレングリコールメチルエチルエーテル、ジエチレングリコールジプロピルエーテル、ジエチレングリコールジブチルエーテル、アニソール、フェネトール、メチルアニソール、メトキシシクロヘキサン等が挙げられる。 Ether solvents include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-1-butanol, 3-methoxy-3-methylbutanol, tetrahydrofuran, tetrahydropyran, 1,4-dioxane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, anisole, phenetole, methylanisole, and methoxycyclohexane.
エーテルエステル溶剤としては、メトキシ酢酸メチル、メトキシ酢酸エチル、メトキシ酢酸ブチル、エトキシ酢酸メチル、エトキシ酢酸エチル、3-メトキシプロピオン酸メチル、3-メトキシプロピオン酸エチル、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、2-メトキシプロピオン酸メチル、2-メトキシプロピオン酸エチル、2-メトキシプロピオン酸プロピル、2-エトキシプロピオン酸メチル、2-エトキシプロピオン酸エチル、2-メトキシ-2-メチルプロピオン酸メチル、2-エトキシ-2-メチルプロピオン酸エチル、3-メトキシブチルアセテート、3-メチル-3-メトキシブチルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート、エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノブチルエーテルアセテート及びジプロピレングリコールメチルエーテルアセテート等が挙げられる。 Ether ester solvents include methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-methoxy-2-methylpropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-methoxy-2-methylpropionate, 2-ethoxy-2-methylpropionate, Examples of such ether acetates include ethyl acetate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, and dipropylene glycol methyl ether acetate.
ケトン溶剤としては、4-ヒドロキシ-4-メチル-2-ペンタノン、アセトン、2-ブタノン、2-ヘプタノン、3-ヘプタノン、4-ヘプタノン、4-メチル-2-ペンタノン、シクロペンタノン、2-アセチルシクロペンタノン、シクロヘキサノン、2-アセチルシクロヘキサノン及びイソホロン等が挙げられる。 Ketone solvents include 4-hydroxy-4-methyl-2-pentanone, acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone, 4-methyl-2-pentanone, cyclopentanone, 2-acetylcyclopentanone, cyclohexanone, 2-acetylcyclohexanone, and isophorone.
アルコール溶剤としては、メタノール、エタノール、プロパノール、ブタノール、ヘキサノール、シクロヘキサノール、エチレングリコール、プロピレングリコール及びグリセリン等が挙げられる。芳香族炭化水素溶剤としては、ベンゼン、トルエン、キシレン及びメシチレン等が挙げられる。アミド溶剤としては、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド及びN-メチルピロリドン等が挙げられる。 Examples of alcohol solvents include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, and glycerin. Examples of aromatic hydrocarbon solvents include benzene, toluene, xylene, and mesitylene. Examples of amide solvents include N,N-dimethylformamide, N,N-dimethylacetamide, and N-methylpyrrolidone.
溶剤(F)は、塗布性、乾燥性の点から、プロピレングリコールモノメチルエーテルアセテート、乳酸エチル、プロピレングリコールモノメチルエーテル、3-エトキシプロピオン酸エチル、エチレングリコールモノメチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、3-メトキシブチルアセテート、3-メトキシ-1-ブタノール、4-ヒドロキシ-4-メチル-2-ペンタノン及びN,N-ジメチルホルムアミド、酢酸シクロヘキシル、メトキシシクロヘキサン、シクロヘキサンカルボン酸イソプロピル、シクロペンタノン、シクロヘキサノン、シクロヘキサノール、ベンゼン、トルエン、キシレン及びメシチレンからなる群より選択される少なくとも1種を含むことが好ましく、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテル、ジプロピレングリコールメチルエーテルアセテート、乳酸エチル、3-メトキシブチルアセテート、3-メトキシ-1-ブタノール及び3-エトキシプロピオン酸エチル、酢酸シクロヘキシル、メトキシシクロヘキサン、シクロヘキサンカルボン酸イソプロピル、シクロペンタノン、シクロヘキサノン、シクロヘキサノールからなる群より選択される少なくとも1種を含むことがより好ましい。 From the viewpoints of application and drying properties, the following solvents are selected as the solvent (F): propylene glycol monomethyl ether acetate, ethyl lactate, propylene glycol monomethyl ether, ethyl 3-ethoxypropionate, ethylene glycol monomethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, 3-methoxybutyl acetate, 3-methoxy-1-butanol, 4-hydroxy-4-methyl-2-pentanone, N,N-dimethylformamide, cyclohexyl acetate, methoxycyclohexane, isopropyl cyclohexanecarboxylate, cyclopentanone, cyclohexanone, cyclohexafluoropropane ... It is preferable that the solvent contains at least one selected from the group consisting of ethanol, benzene, toluene, xylene, and mesitylene, and it is more preferable that the solvent contains at least one selected from the group consisting of propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, dipropylene glycol methyl ether acetate, ethyl lactate, 3-methoxybutyl acetate, 3-methoxy-1-butanol, ethyl 3-ethoxypropionate, cyclohexyl acetate, methoxycyclohexane, isopropyl cyclohexanecarboxylate, cyclopentanone, cyclohexanone, and cyclohexanol.
溶剤(F)の含有量は、硬化性樹脂組成物100質量%中、好ましくは60質量%以上95質量%以下であり、より好ましくは65質量%以上92質量%以下である。言い換えると、硬化性樹脂組成物の固形分は、好ましくは5質量%以上40質量%以下、より好ましくは8質量%以上35質量%以下である。溶剤(F)の含有量が上記範囲にあると、硬化性樹脂組成物の塗布性及び塗布時の平坦性が良好になる傾向があり、また波長変換膜等の硬化膜の発光特性が良好となる傾向がある。 The content of the solvent (F) is preferably 60% by mass or more and 95% by mass or less, more preferably 65% by mass or more and 92% by mass or less, based on 100% by mass of the curable resin composition. In other words, the solid content of the curable resin composition is preferably 5% by mass or more and 40% by mass or less, more preferably 8% by mass or more and 35% by mass or less. When the content of the solvent (F) is within the above range, the coatability of the curable resin composition and the flatness during application tend to be good, and the light-emitting properties of the cured film such as the wavelength conversion film tend to be good.
〔8〕レベリング剤(G)
硬化性樹脂組成物は、1種又は2種以上のレベリング剤(G)を含むことができる。レベリング剤(G)としては、シリコーン系界面活性剤、フッ素系界面活性剤及びフッ素原子を有するシリコーン系界面活性剤等が挙げられる。これらは、側鎖に重合性基を有していてもよい。
[8] Leveling agent (G)
The curable resin composition may contain one or more leveling agents (G). Examples of the leveling agent (G) include silicone surfactants, fluorine surfactants, and silicone surfactants having fluorine atoms. These may have a polymerizable group in the side chain.
シリコーン系界面活性剤としては、分子内にシロキサン結合を有する界面活性剤等が挙げられる。具体的には、トーレシリコーンDC3PA、同SH7PA、同DC11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、同SH8400(商品名:東レ・ダウコーニング(株)製)、KP321、KP322、KP323、KP324、KP326、KP340、KP341(信越化学工業(株)製)、TSF400、TSF401、TSF410、TSF4300、TSF4440、TSF4445、TSF-4446、TSF4452及びTSF4460(モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製)等が挙げられる。 Examples of silicone surfactants include surfactants having a siloxane bond in the molecule. Specific examples include Toray Silicone DC3PA, SH7PA, DC11PA, SH21PA, SH28PA, SH29PA, SH30PA, and SH8400 (product names: manufactured by Toray Dow Corning Co., Ltd.), KP321, KP322, KP323, KP324, KP326, KP340, and KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, and TSF4460 (manufactured by Momentive Performance Materials Japan, LLC).
フッ素系界面活性剤としては、分子内にフルオロカーボン鎖を有する界面活性剤等が挙げられる。具体的には、フロラード(登録商標)FC430、同FC431(住友スリーエム(株)製)、メガファック(登録商標)F142D、同F171、同F172、同F173、同F177、同F183、同F554、同R30、同RS-718-K(DIC(株)製)、エフトップ(登録商標)EF301、同EF303、同EF351、同EF352(三菱マテリアル電子化成(株)製)、サーフロン(登録商標)S381、同S382、同SC101、同SC105(旭硝子(株)製)及びE5844((株)ダイキンファインケミカル研究所製)等が挙げられる。 Examples of fluorosurfactants include surfactants having a fluorocarbon chain in the molecule. Specific examples include Fluorad (registered trademark) FC430 and FC431 (manufactured by Sumitomo 3M Limited), Megafac (registered trademark) F142D, F171, F172, F173, F177, F183, F554, R30, and RS-718-K (manufactured by DIC Corporation), EF-TOP (registered trademark) EF301, EF303, EF351, and EF352 (manufactured by Mitsubishi Materials Electronic Chemicals Co., Ltd.), Surflon (registered trademark) S381, S382, SC101, and SC105 (manufactured by Asahi Glass Co., Ltd.), and E5844 (manufactured by Daikin Fine Chemicals Research Institute, Ltd.).
フッ素原子を有するシリコーン系界面活性剤としては、分子内にシロキサン結合及びフルオロカーボン鎖を有する界面活性剤等が挙げられる。具体的には、メガファック(登録商標)R08、同BL20、同F475、同F477及び同F443(DIC(株)製)等が挙げられる。 Examples of silicone surfactants having fluorine atoms include surfactants having siloxane bonds and fluorocarbon chains in the molecule. Specific examples include Megafac (registered trademark) R08, BL20, F475, F477, and F443 (manufactured by DIC Corporation).
レベリング剤(G)の含有量は、硬化性樹脂組成物100質量%中、通常0.001質量%以上0.2質量%以下であり、好ましくは0.002質量%以上0.1質量%以下、より好ましくは0.005質量%以上0.05質量%以下である。 The content of the leveling agent (G) is usually 0.001% by mass or more and 0.2% by mass or less, preferably 0.002% by mass or more and 0.1% by mass or less, and more preferably 0.005% by mass or more and 0.05% by mass or less, based on 100% by mass of the curable resin composition.
〔9〕酸化防止剤(H)
硬化性樹脂組成物の耐熱性及び耐光性を向上させる観点から、硬化性樹脂組成物は、酸化防止剤(H)を含有することができる。酸化防止剤(H)としては、工業的に一般に使用される酸化防止剤であれば特に限定はなく、フェノール系酸化防止剤、リン系酸化防止剤及び硫黄系酸化防止剤等を用いることができる。酸化防止剤(H)は、2種以上を併用してもよい。
[9] Antioxidant (H)
From the viewpoint of improving the heat resistance and light resistance of the curable resin composition, the curable resin composition may contain an antioxidant (H). The antioxidant (H) is not particularly limited as long as it is an antioxidant generally used industrially, and phenol-based antioxidants, phosphorus-based antioxidants, sulfur-based antioxidants, etc. may be used. Two or more types of antioxidants (H) may be used in combination.
フェノール系酸化防止剤としては、イルガノックス(登録商標)1010(Irganox 1010:ペンタエリスリトールテトラキス[3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート]、BASF(株)製)、同1076(Irganox 1076:オクタデシル-3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート、BASF(株)製)、同1330(Irganox 1330:3,3’,3’’,5,5’,5’’-ヘキサ-t-ブチル-a,a’,a’’-(メシチレン-2,4,6-トリイル)トリ-p-クレゾール、BASF(株)製)、同3114(Irganox 3114:1,3,5-トリス(3,5-ジ-t-ブチル-4-ヒドロキシベンジル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、BASF(株)製)、同3790(Irganox 3790:1,3,5-トリス((4-t-ブチル-3-ヒドロキシ-2,6-キシリル)メチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、BASF(株)製)、同1035(Irganox 1035:チオジエチレンビス[3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロピオネート]、BASF(株)製)、同1135(Irganox 1135:ベンゼンプロパン酸、3,5-ビス(1,1-ジメチルエチル)-4-ヒドロキシ、C7-C9側鎖アルキルエステル、BASF(株)製)、同1520L(Irganox 1520L:4,6-ビス(オクチルチオメチル)-o-クレゾール、BASF(株)製)、同3125(Irganox 3125、BASF(株)製)、同565(Irganox 565:2,4-ビス(n-オクチルチオ)-6-(4-ヒドロキシ3’、5’-ジ-t-ブチルアニリノ)-1,3,5-トリアジン、BASF(株)製)、アデカスタブ(登録商標)AO-80(アデカスタブ AO-80:3,9-ビス(2-(3-(3-t-ブチル-4-ヒドロキシ-5-メチルフェニル)プロピオニルオキシ)-1,1-ジメチルエチル)-2,4,8,10-テトラオキサスピロ(5,5)ウンデカン、(株)ADEKA製)、スミライザー(登録商標)BHT、同GA-80、同GS(以上、住友化学(株)製)、サイアノックス(登録商標)1790(Cyanox 1790、(株)サイテック製)及びビタミンE(エーザイ(株)製)等が挙げられる。 Phenol-based antioxidants include Irganox (registered trademark) 1010 (Irganox 1010: pentaerythritol tetrakis [3-(3,5-di-t-butyl-4-hydroxyphenyl)propionate], manufactured by BASF Corporation), Irganox 1076 (Irganox 1076: octadecyl-3-(3,5-di-t-butyl-4-hydroxyphenyl)propionate, manufactured by BASF Corporation), Irganox 1330 (Irganox 1330: 3,3',3'',5,5',5''-hexa-t-butyl-a,a',a''-(mesitylene-2,4,6-triyl)tri-p-cresol, manufactured by BASF Corporation), and Irganox 3114 (Irganox Irganox 3114: 1,3,5-tris(3,5-di-t-butyl-4-hydroxybenzyl)-1,3,5-triazine-2,4,6(1H,3H,5H)-trione, manufactured by BASF Corporation, Irganox 3790: 1,3,5-tris((4-t-butyl-3-hydroxy-2,6-xylyl)methyl)-1,3,5-triazine-2,4,6(1H,3H,5H)-trione, manufactured by BASF Corporation, Irganox 1035: thiodiethylenebis[3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate], manufactured by BASF Corporation, Irganox 1135: Irganox 1135: benzenepropanoic acid, 3,5-bis(1,1-dimethylethyl)-4-hydroxy, C7-C9 side chain alkyl ester, manufactured by BASF Corporation; Irganox 1520L (Irganox 1520L: 4,6-bis(octylthiomethyl)-o-cresol, manufactured by BASF Corporation); Irganox 3125 (Irganox 3125, manufactured by BASF Corporation); Irganox 565 (Irganox 565: 2,4-bis(n-octylthio)-6-(4-hydroxy-3',5'-di-t-butylanilino)-1,3,5-triazine, manufactured by BASF Corporation); Adeka STAB (registered trademark) AO-80 (Adeka STAB AO-80: 3,9-bis(2-(3-(3-t-butyl-4-hydroxy-5-methylphenyl)propionyloxy)-1,1-dimethylethyl)-2,4,8,10-tetraoxaspiro(5,5)undecane, manufactured by ADEKA Co., Ltd., Sumilizer (registered trademark) BHT, Sumilizer GA-80, Sumilizer GS (all manufactured by Sumitomo Chemical Co., Ltd.), Cyanox (registered trademark) 1790 (manufactured by Cytec Co., Ltd.), and Vitamin E (manufactured by Eisai Co., Ltd.), etc.
リン系酸化防止剤としては、イルガフォス(登録商標)168(Irgafos 168:トリス(2,4-ジ-t-ブチルフェニル)フォスファイト、BASF(株)製)、同12(Irgafos 12:トリス[2-[[2,4,8,10-テトラ-t-ブチルジベンゾ[d、f][1,3,2]ジオキサフォスフィン-6-イル]オキシ]エチル]アミン、BASF(株)製)、同38(Irgafos 38:ビス(2,4-ビス(1,1-ジメチルエチル)-6-メチルフェニル)エチルエステル亜りん酸、BASF(株)製)、アデカスタブ(登録商標)329K、同PEP36、同PEP-8(以上、(株)ADEKA製)、Sandstab P-EPQ(クラリアント社製)、Weston(登録商標)618、同619G(以上、GE社製)、Ultranox626(GE社製)及びスミライザー(登録商標)GP(6-[3-(3-t-ブチル-4-ヒドロキシ-5-メチルフェニル)プロポキシ]-2,4,8,10-テトラ-t-ブチルジベンズ[d,f][1.3.2]ジオキサホスフェピン)(住友化学(株)製)等が挙げられる。 Phosphorus-based antioxidants include Irgafos (registered trademark) 168 (Irgafos 168: tris(2,4-di-t-butylphenyl)phosphite, manufactured by BASF Corporation), Irgafos 12 (Irgafos 12: tris[2-[[2,4,8,10-tetra-t-butyldibenzo[d,f][1,3,2]dioxaphosphine-6-yl]oxy]ethyl]amine, manufactured by BASF Corporation), Irgafos 38 (Irgafos 38: bis(2,4-bis(1,1-dimethylethyl)-6-methylphenyl)ethyl ester phosphorous acid, manufactured by BASF Corporation), Adekastab (registered trademark) 329K, Adekastab PEP36, Adekastab PEP-8 (all manufactured by ADEKA Corporation), and Sandstab Examples include P-EPQ (Clariant), Weston (registered trademark) 618, Weston (registered trademark) 619G (both manufactured by GE), Ultranox 626 (manufactured by GE), and Sumilizer (registered trademark) GP (6-[3-(3-t-butyl-4-hydroxy-5-methylphenyl)propoxy]-2,4,8,10-tetra-t-butyldibenz[d,f][1.3.2]dioxaphosphepine) (manufactured by Sumitomo Chemical Co., Ltd.).
硫黄系酸化防止剤としては、チオジプロピオン酸ジラウリル、ジミリスチル又はジステアリール等のジアルキルチオジプロピオネート化合物及びテトラキス[メチレン(3-ドデシルチオ)プロピオネート]メタン等のポリオールのβ-アルキルメルカプトプロピオン酸エステル化合物等が挙げられる。 Examples of sulfur-based antioxidants include dialkyl thiodipropionate compounds such as dilauryl, dimyristyl, or distearyl thiodipropionate, and β-alkyl mercaptopropionate compounds of polyols such as tetrakis[methylene(3-dodecylthio)propionate]methane.
〔10〕その他の成分
硬化性樹脂組成物には、必要に応じて、充填剤、樹脂(C)以外の高分子化合物、密着促進剤、紫外線吸収剤、凝集防止剤、硬化剤、光散乱剤等の添加剤を1種又は2種以上含有することができる。
[10] Other Components The curable resin composition may contain, as necessary, one or more additives such as a filler, a polymer compound other than the resin (C), an adhesion promoter, an ultraviolet absorber, an anti-aggregation agent, a curing agent, and a light scattering agent.
充填剤としては、ガラス、シリカ、アルミナ等が挙げられる。樹脂(C)以外の高分子化合物としては、ポリビニルアルコール、ポリアクリル酸、ポリエチレングリコールモノアルキルエーテル及びポリフロロアルキルアクリレート等が挙げられる。 Examples of fillers include glass, silica, and alumina. Examples of polymer compounds other than resin (C) include polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, and polyfluoroalkyl acrylate.
密着促進剤としては、ビニルトリメトキシシラン、ビニルトリエトキシシラン、ビニルトリス(2-メトキシエトキシ)シラン、N-(2-アミノエチル)-3-アミノプロピルメチルジメトキシシラン、N-(2-アミノエチル)-3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルメチルジメトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、3-クロロプロピルメチルジメトキシシラン、3-クロロプロピルトリメトキシシラン、3-メタクリロイロキシプロピルトリメトキシシラン及び3-メルカプトプロピルトリメトキシシラン等が挙げられる。 Examples of adhesion promoters include vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris(2-methoxyethoxy)silane, N-(2-aminoethyl)-3-aminopropylmethyldimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, and 3-mercaptopropyltrimethoxysilane.
紫外線吸収剤としては、2-(2-ヒドロキシ-3-tert-ブチル-5-メチルフェニル)-5-クロロベンゾトリアゾール等のベンゾトリアゾール系化合物;2-ヒドロキシ-4-オクチルオキシベンゾフェノン等のベンゾフェノン系化合物;2,4-ジ-tert-ブチルフェニル-3,5-ジ-tert-ブチル-4-ヒドロキシベンゾエート等のベンゾエート系化合物;2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-ヘキシルオキシフェノール等のトリアジン系化合物;等が挙げられる。凝集防止剤としては、ポリアクリル酸ナトリウム等が挙げられる。 Examples of ultraviolet absorbers include benzotriazole-based compounds such as 2-(2-hydroxy-3-tert-butyl-5-methylphenyl)-5-chlorobenzotriazole; benzophenone-based compounds such as 2-hydroxy-4-octyloxybenzophenone; benzoate-based compounds such as 2,4-di-tert-butylphenyl-3,5-di-tert-butyl-4-hydroxybenzoate; and triazine-based compounds such as 2-(4,6-diphenyl-1,3,5-triazin-2-yl)-5-hexyloxyphenol. Examples of anti-aggregation agents include sodium polyacrylate.
硬化剤としては、加熱されることによって樹脂(C)中のカルボキシ基と反応して樹脂(C)を架橋することができる化合物、単独で重合して硬化し得る化合物等が挙げられ、エポキシ化合物、オキセタン化合物等が挙げられる。 Examples of the curing agent include compounds that can react with carboxy groups in the resin (C) when heated to crosslink the resin (C), and compounds that can be polymerized and cured by themselves, such as epoxy compounds and oxetane compounds.
光散乱剤としては、金属又は金属酸化物の粒子、ガラス粒子等を挙げることができる。金属酸化物としては、TiO2、SiO2、BaTiO3、ZnO等を挙げることができる。光散乱剤の粒子径は、例えば0.03μm以上20μm以下程度であり、好ましくは0.05μm以上1μm以下、さらに好ましくは0.05μm以上0.3μm以下である。光散乱剤の含有量は、硬化性樹脂組成物100質量%中、通常0.001質量%以上50質量%以下であり、好ましくは1質量%以上40質量%以下、より好ましくは5質量%以上30質量%以下である。 Examples of the light scattering agent include metal or metal oxide particles, glass particles, etc. Examples of metal oxides include TiO 2 , SiO 2 , BaTiO 3 , ZnO, etc. The particle size of the light scattering agent is, for example, about 0.03 μm or more and 20 μm or less, preferably 0.05 μm or more and 1 μm or less, and more preferably 0.05 μm or more and 0.3 μm or less. The content of the light scattering agent is usually 0.001 mass% or more and 50 mass% or less, preferably 1 mass% or more and 40 mass% or less, and more preferably 5 mass% or more and 30 mass% or less in 100 mass% of the curable resin composition.
<硬化性樹脂組成物の調製方法>
硬化性樹脂組成物は、半導体粒子(A)、化合物(B)、樹脂(C)、重合性化合物(D)、並びに必要に応じて使用される他の成分を混合することにより調製することができる。ただし、有機配位子等の配位子〔以下、「配位子M」ともいう。配位子Mは、例えば上述の化合物(L)である。〕が配位している半導体粒子(A)を原料として使用する場合には、化合物(B)の少なくとも一部が配位している半導体粒子(A)を含む硬化性樹脂組成物を得るために、配位子Mが配位している半導体粒子(A)を事前に配位子交換反応に供して化合物(B)(又は、化合物(B)及び配位子M)が配位している半導体粒子(A)を得た後、これと、樹脂(C)、重合性化合物(D)及び必要に応じて使用される他の成分とを混合することにより硬化性樹脂組成物を調製することが好ましい。
<Method for preparing curable resin composition>
The curable resin composition can be prepared by mixing the semiconductor particles (A), the compound (B), the resin (C), the polymerizable compound (D), and other components used as necessary. However, when using the semiconductor particles (A) coordinated with a ligand such as an organic ligand [hereinafter also referred to as "ligand M". The ligand M is, for example, the above-mentioned compound (L). ] as a raw material, in order to obtain a curable resin composition containing the semiconductor particles (A) coordinated with at least a part of the compound (B), it is preferable to previously subject the semiconductor particles (A) coordinated with the ligand M to a ligand exchange reaction to obtain the semiconductor particles (A) coordinated with the compound (B) (or the compound (B) and the ligand M), and then mix the semiconductor particles (A) with the resin (C), the polymerizable compound (D), and other components used as necessary to prepare the curable resin composition.
上記配位子交換反応は、半導体粒子(A)に配位している配位子Mの少なくとも一部を、化合物(B)に置換する反応である。該反応は、例えば、配位子Mを有する半導体粒子(A)と化合物(B)との混合物を溶剤中で加熱することにより行うことができる。加熱温度は、例えば50℃以上180℃以下である。 The ligand exchange reaction is a reaction in which at least a portion of the ligand M coordinated to the semiconductor particle (A) is replaced with the compound (B). The reaction can be carried out, for example, by heating a mixture of the semiconductor particle (A) having the ligand M and the compound (B) in a solvent. The heating temperature is, for example, 50°C or higher and 180°C or lower.
<硬化膜、パターニングされた硬化膜、波長変換膜及び表示装置>
硬化性樹脂組成物からなる膜(層)を硬化させることによって硬化膜を得ることができる。この際、フォトリソグラフ法、インクジェット法、印刷法等の方法によってパターニングすることによりパターニングされた硬化膜を得ることができる。硬化膜又はパターニングされた硬化膜は、入射する光の波長とは異なる波長の光を出射する波長変換膜(波長変換フィルタ)として好適に用いることができる。波長変換膜は、液晶表示装置、有機EL装置等の表示装置に好適に用いることができる。パターニング方法は、フォトリソグラフィ法であることが好ましい。フォトリソグラフィ法は、硬化性樹脂組成物を基板に塗布し、乾燥させて硬化性樹脂組成物層を形成し、フォトマスクを介して該硬化性樹脂組成物層を露光して、現像する方法である。
<Cured film, patterned cured film, wavelength conversion film, and display device>
A cured film can be obtained by curing a film (layer) made of a curable resin composition. In this case, a patterned cured film can be obtained by patterning using a method such as a photolithography method, an inkjet method, or a printing method. The cured film or the patterned cured film can be suitably used as a wavelength conversion film (wavelength conversion filter) that emits light with a wavelength different from the wavelength of incident light. The wavelength conversion film can be suitably used in a display device such as a liquid crystal display device or an organic EL device. The patterning method is preferably a photolithography method. The photolithography method is a method in which a curable resin composition is applied to a substrate, dried to form a curable resin composition layer, and the curable resin composition layer is exposed to light through a photomask and developed.
基板としては、石英ガラス、ホウケイ酸ガラス、アルミナケイ酸塩ガラス、表面をシリカコートしたソーダライムガラス等のガラス板や、ポリカーボネート、ポリメタクリル酸メチル、ポリエチレンテレフタレート等の樹脂板、シリコン、上記基板上にアルミニウム、銀、銀/銅/パラジウム合金薄膜等を形成したもの等を用いることができる。 As the substrate, glass plates such as quartz glass, borosilicate glass, alumina silicate glass, and soda lime glass with a silica-coated surface, resin plates such as polycarbonate, polymethylmethacrylate, and polyethylene terephthalate, silicon, and the above substrates on which thin films of aluminum, silver, and silver/copper/palladium alloys have been formed can be used.
フォトリソグラフィ法によるパターニングされた硬化膜の形成は、公知又は慣用の装置や条件で行うことができ、例えば次のようにして形成することができる。まず、硬化性樹脂組成物を基板上に塗布し、加熱乾燥(プリベーク)及び/又は減圧乾燥することにより溶剤等の揮発成分を除去して乾燥させ、硬化性樹脂組成物層を得る。塗布方法としては、スピンコート法、スリットコート法、スリット アンド スピンコート法等が挙げられる。 The formation of a patterned cured film by photolithography can be carried out using known or conventional equipment and conditions, and can be formed, for example, as follows. First, a curable resin composition is applied onto a substrate, and then the substrate is dried by heating and drying (pre-baking) and/or drying under reduced pressure to remove volatile components such as solvents, thereby obtaining a curable resin composition layer. Examples of application methods include spin coating, slit coating, and slit and spin coating.
加熱乾燥を行う場合の温度は、30℃以上120℃以下が好ましく、50℃以上110℃以下がより好ましい。加熱時間は、10秒間以上10分間以下であることが好ましく、30秒間以上5分間以下であることがより好ましい。減圧乾燥を行う場合は、50Pa以上150Pa以下の圧力下、20℃以上25℃以下の温度範囲で行うことが好ましい。硬化性樹脂組成物層の膜厚は、特に限定されず、所望の波長変換膜等の硬化膜の膜厚に応じて適宜選択することができる。 When drying by heating, the temperature is preferably 30°C or more and 120°C or less, and more preferably 50°C or more and 110°C or less. The heating time is preferably 10 seconds or more and 10 minutes or less, and more preferably 30 seconds or more and 5 minutes or less. When drying under reduced pressure, it is preferably performed under a pressure of 50 Pa or more and 150 Pa or less, and at a temperature range of 20°C or more and 25°C or less. The film thickness of the curable resin composition layer is not particularly limited, and can be appropriately selected according to the film thickness of the desired cured film such as a wavelength conversion film.
次に、硬化性樹脂組成物層は、所望のパターンを形成するためのフォトマスクを介して露光される。該フォトマスク上のパターンは特に限定されず、目的とする用途に応じたパターンが用いられる。露光に用いられる光源としては、250nm以上450nm以下の波長の光を発生する光源が好ましい。例えば、350nm未満の光を、この波長域をカットするフィルタを用いてカットしたり、436nm付近、408nm付近、365nm付近の光を、これらの波長域を取り出すバンドパスフィルタを用いて選択的に取り出したりしてもよい。光源としては、水銀灯、発光ダイオード、メタルハライドランプ、ハロゲンランプ等が挙げられる。 Next, the curable resin composition layer is exposed through a photomask to form a desired pattern. The pattern on the photomask is not particularly limited, and a pattern according to the intended use is used. As the light source used for exposure, a light source that generates light with a wavelength of 250 nm or more and 450 nm or less is preferable. For example, light less than 350 nm may be cut using a filter that cuts this wavelength range, or light near 436 nm, near 408 nm, and near 365 nm may be selectively extracted using a bandpass filter that extracts these wavelength ranges. Examples of light sources include mercury lamps, light-emitting diodes, metal halide lamps, halogen lamps, etc.
露光には、露光面全体に均一に平行光線を照射したり、フォトマスクと硬化性樹脂組成物層が形成された基板との正確な位置合わせを行うことができるため、マスクアライナ及びステッパ等の露光装置を使用することが好ましい。 For exposure, it is preferable to use an exposure device such as a mask aligner or stepper, since it is possible to uniformly irradiate the entire exposure surface with parallel light rays and to perform accurate alignment between the photomask and the substrate on which the curable resin composition layer is formed.
露光後の硬化性樹脂組成物層を現像液に接触させて現像することにより、基板上に硬化性樹脂組成物層のパターンが形成される。現像により、硬化性樹脂組成物層の未露光部が現像液に溶解して除去される。現像液は、例えば、水酸化カリウム、炭酸水素ナトリウム、炭酸ナトリウム、水酸化テトラメチルアンモニウム等のアルカリ性化合物の水溶液であることが好ましい。これらのアルカリ性化合物の水溶液中の濃度は、好ましくは0.01質量%以上10質量%以下であり、より好ましくは0.03質量%以上5質量%以下である。現像液は、界面活性剤をさらに含んでいてもよい。現像方法としては、パドル法、ディッピング法及びスプレー法等が挙げられる。さらに現像時に基板を任意の角度に傾けてもよい。現像後は、水洗することが好ましい。 The exposed curable resin composition layer is brought into contact with a developer and developed to form a pattern of the curable resin composition layer on the substrate. The unexposed portion of the curable resin composition layer is dissolved in the developer and removed by development. The developer is preferably an aqueous solution of an alkaline compound such as potassium hydroxide, sodium bicarbonate, sodium carbonate, or tetramethylammonium hydroxide. The concentration of these alkaline compounds in the aqueous solution is preferably 0.01% by mass or more and 10% by mass or less, more preferably 0.03% by mass or more and 5% by mass or less. The developer may further contain a surfactant. Examples of the development method include a paddle method, a dipping method, and a spray method. Furthermore, the substrate may be tilted at any angle during development. After development, it is preferable to wash with water.
さらに、得られた硬化性樹脂組成物層のパターンは、ポストベークされることが好ましい。ポストベーク温度は、60℃以上250℃以下であることが好ましく、110℃以上240℃以下であることがより好ましい。ポストベーク時間は、1分間以上120分間以下であることが好ましく、10分間以上60分間以下であることがより好ましい。ポストベーク後の硬化膜の膜厚は、例えば1μm以上10μm以下であり、好ましくは3μm以上10μm以下である。 Furthermore, the obtained pattern of the curable resin composition layer is preferably post-baked. The post-baking temperature is preferably 60°C or more and 250°C or less, and more preferably 110°C or more and 240°C or less. The post-baking time is preferably 1 minute or more and 120 minutes or less, and more preferably 10 minutes or more and 60 minutes or less. The film thickness of the cured film after post-baking is, for example, 1 μm or more and 10 μm or less, and preferably 3 μm or more and 10 μm or less.
以下、実施例を示して本発明をさらに具体的に説明するが、本発明はこれらの例によって限定されるものではない。例中、含有量ないし使用量を表す%及び部は、特記ない限り、質量基準である。 The present invention will be explained in more detail below with reference to examples, but the present invention is not limited to these examples. In the examples, percentages and parts indicating the content or amount used are based on mass unless otherwise specified.
<製造例1-1:化合物(B)が配位した半導体粒子(A)の作製-1>
(1)半導体量子ドット(半導体粒子(A))の準備
半導体量子ドットとして、InP(コア)/ZnS(第1シェル)/ZnS(第2シェル)の構造を有するコアシェル型半導体量子ドットINP530〔NN-LABS社製、〕を使用した。この半導体量子ドットの表面にはオレイルアミンが配位している。
<Production Example 1-1: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-1>
(1) Preparation of semiconductor quantum dots (semiconductor particles (A)) As the semiconductor quantum dots, core-shell type semiconductor quantum dots INP530 [manufactured by NN-LABS] having a structure of InP (core)/ZnS (first shell)/ZnS (second shell) were used. Oleylamine is coordinated to the surface of this semiconductor quantum dot.
(2)配位子低減処理
次に、上記の半導体量子ドット(QD)について、次の手順で配位子低減処理を行った。まず、上記(1)で得られたQDを含む分散液1容量部にヘキサン2容量部を加えて希釈した。その後、エタノール30容量部を添加してQDを沈殿させ、遠心分離処理を行った。上澄み液を除去し、ヘキサン3容量部を加えてQDを再分散させた。このような処理(エタノール添加による沈殿→遠心分離→上澄み液除去→ヘキサン添加による再分散)を合計3回行った。ただし、3回目の再分散時には、ヘキサンではなくトルエンをQD(オレイルアミン配位子を含む)の濃度が20質量%となるように添加し、QD分散液-Aを得た。後述の製造例1-1の(4)と同様にして、得られたQD分散液-Aについて、(B,L)/(A)質量比を測定した。
(2) Ligand reduction treatment Next, the above semiconductor quantum dots (QDs) were subjected to a ligand reduction treatment according to the following procedure. First, 2 parts by volume of hexane was added to 1 part by volume of the dispersion containing QDs obtained in (1) above to dilute it. Then, 30 parts by volume of ethanol was added to precipitate the QDs, and a centrifugation treatment was performed. The supernatant was removed, and 3 parts by volume of hexane was added to redisperse the QDs. This treatment (precipitation by adding ethanol → centrifugation → removal of the supernatant → redispersion by adding hexane) was performed a total of three times. However, at the third redispersion, toluene was added instead of hexane so that the concentration of QDs (containing oleylamine ligands) was 20% by mass, and QD dispersion liquid-A was obtained. In the same manner as in (4) of Production Example 1-1 described later, the (B, L)/(A) mass ratio was measured for the obtained QD dispersion liquid-A.
(3)化合物(B)が配位した半導体粒子(A)の作製(配位子交換処理)
上記(2)で得られたQD分散液-A 1部に、化合物(B)としてのポリ(エチレングリコール)メチルエーテルチオール〔Sigma-Aldrich社製、数平均分子量800、上記式(B-1)においてX=-SHであり、Y=-OCH3であり、Z=-CH2CH2-であり、R1=-CH2CH2-であり、m=1である化合物〕を0.1部加え、80℃で12時間加熱撹拌することで配位子交換反応を行い、ポリ(エチレングリコール)メチルエーテルチオールが配位したQDを含む分散液を得た。
(3) Preparation of semiconductor particles (A) coordinated with compound (B) (ligand exchange treatment)
To 1 part of the QD dispersion-A obtained in (2) above, 0.1 part of poly(ethylene glycol) methyl ether thiol (Sigma-Aldrich, number average molecular weight 800, a compound in the above formula (B-1) where X = -SH, Y = -OCH3 , Z = -CH2CH2- , R1 = -CH2CH2- , and m = 1) as compound ( B ) was added, and the mixture was heated and stirred at 80°C for 12 hours to carry out a ligand exchange reaction, thereby obtaining a dispersion containing QDs coordinated with poly(ethylene glycol) methyl ether thiol.
上記分散液に19.7部のヘキサンを添加してQDを沈殿させ、遠心分離処理を行った。上澄み液を除去し、QDをプロピレングリコールモノメチルエーテルアセテート(PGMEA)に分散させることにより、ポリ(エチレングリコール)メチルエーテルチオール(数平均分子量800)が配位したQDの濃度が20質量%であるPGMEA分散液として、QD分散液-Bを得た。
上記配位子低減処理によって得られたQD分散液-AにおいてQDは、無極性溶媒であるトルエンに分散しており、極性溶媒には分散しにくいものである。一方、上記配位子交換処理によって得られたQD分散液-BにおいてQDは、極性溶媒であるPGMEAに分散したことから、少なくとも一部の配位子の交換が起こり、ポリ(エチレングリコール)メチルエーテルチオール(化合物(B))がQDに配位していると判断した。
以下の他の製造例においても同様にして、極性溶媒であるPGMEAに分散したことをもって化合物(B)がQDに配位していると判断した。
19.7 parts of hexane was added to the dispersion to precipitate the QDs, and the mixture was centrifuged. The supernatant was removed, and the QDs were dispersed in propylene glycol monomethyl ether acetate (PGMEA) to obtain QD dispersion-B, which is a PGMEA dispersion containing 20% by weight of QDs coordinated with poly(ethylene glycol) methyl ether thiol (number average molecular weight 800).
In the QD dispersion-A obtained by the ligand reduction treatment, the QDs were dispersed in toluene, a nonpolar solvent, and were difficult to disperse in polar solvents. On the other hand, in the QD dispersion-B obtained by the ligand exchange treatment, the QDs were dispersed in PGMEA, a polar solvent. This indicates that at least a portion of the ligands were exchanged, and poly(ethylene glycol) methyl ether thiol (compound (B)) was coordinated to the QDs.
In the other production examples described below, it was determined that compound (B) was coordinated to QDs by being dispersed in the polar solvent PGMEA.
(4)(B,L)/(A)質量比の測定
得られたQD分散液-Bについて、(B,L)/(A)質量比〔半導体量子ドット(半導体粒子(A))に対する化合物(B)及び化合物(L)であるオレイルアミンの合計量の質量比〕を次の手順で測定した。アルミパンに30μLのQD分散液を測りとり、熱重量分析装置「TGDTA6200」(Seiko Instrument社製)を用いて、窒素気流下において、5℃/minの昇温速度で45℃から550℃までの温度範囲について熱重量測定を行った。PGMEAの揮発終了温度である130℃から500℃までの変化重量を化合物(B)及び化合物(L)の合計重量(合計質量)とし、測定終了後の残渣物の重量を半導体量子ドットの重量(質量)とし、化合物(B)及び化合物(L)の合計質量を半導体量子ドットの質量で除することで(B,L)/(A)質量比を求めた。
(4) Measurement of (B, L)/(A) mass ratio The (B, L)/(A) mass ratio [mass ratio of the total amount of compound (B) and compound (L) oleylamine to semiconductor quantum dots (semiconductor particles (A)] for the obtained QD dispersion-B was measured by the following procedure. 30 μL of the QD dispersion was measured in an aluminum pan, and thermogravimetric measurements were performed in the temperature range from 45 ° C. to 550 ° C. at a heating rate of 5 ° C./min under a nitrogen gas flow using a thermogravimetric analyzer "TGDTA6200" (Seiko Instrument Co., Ltd.). The weight change from 130°C, which is the temperature at which the PGMEA volatilization ends, to 500°C was taken as the total weight (total mass) of compound (B) and compound (L), the weight of the residue after the measurement was taken as the weight (mass) of the semiconductor quantum dots, and the (B, L)/(A) mass ratio was calculated by dividing the total mass of compound (B) and compound (L) by the mass of the semiconductor quantum dots.
<製造例1-2:化合物(B)が配位した半導体粒子(A)の作製-2>
製造例1-1の(3)において、化合物(B)として、ポリ(エチレングリコール)メチルエーテルチオール〔Sigma-Aldrich社製、数平均分子量800〕の代わりに、ポリ(エチレングリコール)メチルエーテルチオール〔日油株式会社製の「SUNBRIGHT ME-020SH」、重量平均分子量2000、上記式(B-1)においてX=-SHであり、Y=-OCH3であり、Z=-CH2CH2-であり、R1=-CH2CH2-であり、m=1である化合物〕を用いたこと以外は製造例1-1と同様にして、ポリ(エチレングリコール)メチルエーテルチオール(重量平均分子量2000)が配位したQDの濃度が20質量%であるPGMEA分散液として、QD分散液-Cを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Cについて、(B,L)/(A)質量比を測定した。
<Production Example 1-2: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-2>
QD dispersion-C was obtained as a PGMEA dispersion containing 20 mass% QDs coordinated with poly(ethylene glycol) methyl ether thiol (weight average molecular weight 2000) in the same manner as in Production Example 1-1, except that in Production Example 1-1 ( 3 ), poly(ethylene glycol) methyl ether thiol (manufactured by Sigma-Aldrich, number average molecular weight 800) was used as compound (B) ("Sunbright ME- 020SH " manufactured by NOF Corporation, weight average molecular weight 2000, a compound in which X=-SH, Y=-OCH3, Z= -CH2CH2- , R1 = -CH2CH2- , and m=1 in the above formula (B-1)). In the same manner as in (4) of Production Example 1-1, the (B, L)/(A) mass ratio of the obtained QD dispersion-C was measured.
<製造例1-3:化合物(B)が配位した半導体粒子(A)の作製-3>
製造例1-1の(3)において、化合物(B)として、ポリ(エチレングリコール)メチルエーテルチオール〔Sigma-Aldrich社製、数平均分子量800〕の代わりに、メトキシポリエチレングリコールアミン〔Sigma-Aldrich社製、数平均分子量750、上記式(B-1)においてX=-NH2であり、Y=-OCH3であり、Z=-CH2CH2-であり、R1=-CH2CH2-であり、m=1である化合物〕を用いたこと以外は製造例1-1と同様にして、メトキシポリエチレングリコールアミン(数平均分子量750)が配位したQDの濃度が20質量%であるPGMEA分散液として、QD分散液-Dを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Dについて、(B,L)/(A)質量比を測定した。
<Production Example 1-3: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-3>
In (3) of Production Example 1-1, instead of poly(ethylene glycol) methyl ether thiol (Sigma-Aldrich, number average molecular weight 800), methoxypolyethylene glycolamine (Sigma-Aldrich, number average molecular weight 750, compound in the above formula (B-1) where X= -NH2 , Y= -OCH3 , Z= -CH2CH2- , R1 = -CH2CH2- , and m= 1 ) was used as compound ( B ), in the same manner as in Production Example 1-1, to obtain QD dispersion-D as a PGMEA dispersion having a concentration of 20 mass% QDs coordinated with methoxypolyethylene glycolamine (number average molecular weight 750). The (B, L)/(A) mass ratio of the obtained QD dispersion-D was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-4:化合物(B)が配位した半導体粒子(A)の作製-4>
製造例1-1の(3)において、化合物(B)としてのポリ(エチレングリコール)メチルエーテルチオール〔Sigma-Aldrich社製、数平均分子量800〕の添加量を0.05部に変更したこと以外は製造例1-1と同様にして、ポリ(エチレングリコール)メチルエーテルチオール(数平均分子量800)が配位したQDの濃度が20質量%であるPGMEA分散液として、QD分散液-Eを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Eについて、(B,L)/(A)質量比を測定した。
<Production Example 1-4: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-4>
In (3) of Production Example 1-1, except that the amount of poly(ethylene glycol) methyl ether thiol [Sigma-Aldrich, number average molecular weight 800] added as compound (B) was changed to 0.05 parts, the same procedure as in Production Example 1-1 was repeated to obtain QD dispersion-E as a PGMEA dispersion having a concentration of QDs coordinated with poly(ethylene glycol) methyl ether thiol (number average molecular weight 800) of 20 mass%. The (B, L)/(A) mass ratio of the obtained QD dispersion-E was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-5:化合物(B)が配位した半導体粒子(A)の作製-5>
製造例1-1の(3)において、化合物(B)としてのポリ(エチレングリコール)メチルエーテルチオール〔Sigma-Aldrich社製、数平均分子量800〕の添加量を0.2部に変更したこと以外は製造例1-1と同様にして、ポリ(エチレングリコール)メチルエーテルチオール(数平均分子量800)が配位したQDの濃度が20質量%であるPGMEA分散液として、QD分散液-Fを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Fについて、(B,L)/(A)質量比を測定した。
<Production Example 1-5: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-5>
In (3) of Production Example 1-1, except that the amount of poly(ethylene glycol) methyl ether thiol [Sigma-Aldrich, number average molecular weight 800] added as compound (B) was changed to 0.2 parts, the same procedure as in Production Example 1-1 was repeated to obtain QD dispersion-F as a PGMEA dispersion having a concentration of QDs coordinated with poly(ethylene glycol) methyl ether thiol (number average molecular weight 800) of 20 mass%. The (B, L)/(A) mass ratio of the obtained QD dispersion-F was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-6:化合物(B)が配位した半導体粒子(A)の作製-6>
製造例1-1の(3)において、化合物(B)としてのポリ(エチレングリコール)メチルエーテルチオール〔Sigma-Aldrich社製、数平均分子量800〕の添加量を0.3部に変更したこと以外は製造例1-1と同様にして、ポリ(エチレングリコール)メチルエーテルチオール(数平均分子量800)が配位したQDの濃度が20質量%であるPGMEA分散液として、QD分散液-Gを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Gについて、(B,L)/(A)質量比を測定した。
<Production Example 1-6: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-6>
In (3) of Production Example 1-1, except that the amount of poly(ethylene glycol) methyl ether thiol [Sigma-Aldrich, number average molecular weight 800] added as compound (B) was changed to 0.3 parts, the same procedure as in Production Example 1-1 was repeated to obtain QD dispersion-G as a PGMEA dispersion having a concentration of QDs coordinated with poly(ethylene glycol) methyl ether thiol (number average molecular weight 800) of 20 mass%. The (B, L)/(A) mass ratio of the obtained QD dispersion-G was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-7:化合物(B)が配位した半導体粒子(A)の作製-7>
製造例1-1の(3)において、PGMEA添加によりQDを再分散させたときのQD濃度を、最後の再分散時に30質量%としたこと以外は製造例1-1と同様にして、ポリ(エチレングリコール)メチルエーテルチオール(数平均分子量800)が配位したQDの濃度が30質量%であるPGMEA分散液として、QD分散液-Hを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Hについて、(B,L)/(A)質量比を測定した。
<Production Example 1-7: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-7>
In (3) of Production Example 1-1, the QD concentration when QDs were redispersed by adding PGMEA was set to 30 mass% at the final redispersion in the same manner as in Production Example 1-1, and QD dispersion liquid-H was obtained as a PGMEA dispersion liquid having a concentration of QDs coordinated with poly(ethylene glycol) methyl ether thiol (number average molecular weight 800) of 30 mass%. The (B, L)/(A) mass ratio of the obtained QD dispersion liquid-H was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-8:化合物(B)が配位した半導体粒子(A)の作製-8>
製造例1-1の(3)において、PGMEA添加によりQDを再分散させたときのQD濃度を、最後の再分散時に35質量%としたこと以外は製造例1-1と同様にして、ポリ(エチレングリコール)メチルエーテルチオール(数平均分子量800)が配位したQDの濃度が35質量%であるPGMEA分散液として、QD分散液-Iを得た。また、製造例1-1の(4)と同様にして、得られたQD分散液-Iについて、(B,L)/(A)質量比を測定した。
<Production Example 1-8: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-8>
In (3) of Production Example 1-1, the QD concentration when redispersing QDs by adding PGMEA was set to 35 mass% at the final redispersion, and the same procedure was followed as in Production Example 1-1 to obtain QD dispersion-I as a PGMEA dispersion having a concentration of QDs coordinated with poly(ethylene glycol) methyl ether thiol (number average molecular weight 800) of 35 mass%. In addition, the (B, L)/(A) mass ratio of the obtained QD dispersion-I was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-9:オレイルアミンが配位した半導体粒子(A)の作製-1>
製造例1-1の(2)において、3回目の再分散時に、トルエンではなくシクロヘキサンカルボン酸イソプロピル(CHCI)をQD(オレイルアミン配位子を含む)の濃度が20質量%となるように添加したこと以外は製造例1-1と同様にして、QD分散液-Jを得た。この製造例において、製造例1-1の(3)の工程(配位子交換処理)は行っていない。製造例1-1の(4)と同様にして、得られたQD分散液-Jについて、(B,L)/(A)質量比を測定した。
<Production Example 1-9: Preparation of Semiconductor Particles (A) Coordinated with Oleylamine-1>
In (2) of Production Example 1-1, QD dispersion-J was obtained in the same manner as in Production Example 1-1, except that in the third redispersion, cyclohexane carboxylate isopropyl (CHCI) was added instead of toluene so that the concentration of QD (including oleylamine ligand) was 20 mass%. In this production example, the step (3) of Production Example 1-1 (ligand exchange treatment) was not performed. The (B, L)/(A) mass ratio of the obtained QD dispersion-J was measured in the same manner as in (4) of Production Example 1-1.
<製造例1-10:化合物(B)が配位した半導体粒子(A)の作製-9>
製造例1-1の(3)において、分散時に、トルエンではなくエタノールをQD(PEG-チオール配位子を含む)の濃度が20質量%となるように添加したこと以外は製造例1-1と同様にして、QD分散液-Kを得た。製造例1-1の(4)と同様にして、得られたQD分散液-Kについて、(B,L)/(A)質量比を測定した。(B,L)/(A)質量比の測定においては、エタノールの揮発終了温度である100℃から550℃までの変化重量を化合物(B)の重量(質量)とした。
<Production Example 1-10: Preparation of Semiconductor Particles (A) Coordinated with Compound (B)-9>
QD dispersion liquid-K was obtained in the same manner as in Production Example 1-1, except that in (3) of Production Example 1-1, ethanol was added instead of toluene during dispersion so that the concentration of QD (containing PEG-thiol ligand) was 20% by mass. The (B, L)/(A) mass ratio of the obtained QD dispersion liquid-K was measured in the same manner as in Production Example 1-1 (4). In measuring the (B, L)/(A) mass ratio, the change in weight from 100°C, which is the temperature at which ethanol volatilizes, to 550°C was taken as the weight (mass) of compound (B).
製造例1-1~1-10の要約を表1に示す。なお、同表において、「PEG-チオール」は、ポリ(エチレングリコール)メチルエーテルチオールを表す。「PEG-アミン」は、メトキシポリエチレングリコールアミンを表す。同表に記載のPEG-チオール及びPEG-アミンの分子量は、ゲルパーミエーションクロマトグラフィにより測定された数平均分子量又は重量平均分子量である(標準ポリスチレン換算値)。 A summary of Production Examples 1-1 to 1-10 is shown in Table 1. In the table, "PEG-thiol" represents poly(ethylene glycol) methyl ether thiol. "PEG-amine" represents methoxypolyethylene glycol amine. The molecular weights of PEG-thiol and PEG-amine shown in the table are number average molecular weights or weight average molecular weights measured by gel permeation chromatography (standard polystyrene equivalent values).
<製造例2-1:樹脂(C)を含む溶液の調製-1>
冷却管と攪拌機を備えたフラスコに、PGMEA100部を仕込んで窒素置換した。70℃で撹拌しながら、同温度でメチルメタクリレート(東京化成工業株式会社製)14.3部、ジシクロペンタニルメタクリレート(FA-513M,日立化成株式会社製)5.6質量部、メタクリル酸(東京化成工業株式会社製)2.4部、2,2’-アゾビス(2,4-ジメチルバレロニトリル)(和光純薬工業株式会社製)2.1部、ペンタエリスリトールテトラキス(3-メルカプトプロピオネート)〔PEMP〕(SC有機化学株式会社製)1.4質量部及びPGMEA100部の混合溶液を30分かけて滴下し、同温度で2時間重合反応を行った。反応溶液を室温まで徐冷後、エタノールに滴下し、沈殿物をろ過回収し、40℃の真空乾燥機で乾燥させた。得られた白色粉末20部をPGMEA80部に溶解して、樹脂溶液-aを得た(樹脂濃度:20質量%)。得られた樹脂の重量平均分子量は17000であった(ゲルパーミエーションクロマトグラフィによる標準ポリスチレン換算値)。
<Production Example 2-1: Preparation of solution containing resin (C)-1>
A flask equipped with a cooling tube and a stirrer was charged with 100 parts of PGMEA and substituted with nitrogen. While stirring at 70 ° C., a mixed solution of 14.3 parts of methyl methacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.), 5.6 parts by mass of dicyclopentanyl methacrylate (FA-513M, manufactured by Hitachi Chemical Co., Ltd.), 2.4 parts by mass of methacrylic acid (manufactured by Tokyo Chemical Industry Co., Ltd.), 2.1 parts of 2,2'-azobis (2,4-dimethylvaleronitrile) (manufactured by Wako Pure Chemical Industries, Ltd.), 1.4 parts by mass of pentaerythritol tetrakis (3-mercaptopropionate) [PEMP] (manufactured by SC Organic Chemical Co., Ltd.) and 100 parts of PGMEA was dropped over 30 minutes at the same temperature, and a polymerization reaction was carried out at the same temperature for 2 hours. The reaction solution was gradually cooled to room temperature, then dropped into ethanol, and the precipitate was collected by filtration and dried in a vacuum dryer at 40 ° C. 20 parts of the obtained white powder was dissolved in 80 parts of PGMEA to obtain a resin solution-a (resin concentration: 20% by mass). The weight average molecular weight of the obtained resin was 17,000 (standard polystyrene equivalent value by gel permeation chromatography).
<製造例2-2:樹脂(C)を含む溶液の調製-2>
得られた白色粉末20部をPGMEA46.7部に溶解したこと以外は製造例2-1と同様にして、樹脂溶液-bを得た(樹脂濃度:30質量%)。
<Production Example 2-2: Preparation of solution containing resin (C)-2>
A resin solution-b was obtained in the same manner as in Production Example 2-1, except that 20 parts of the obtained white powder was dissolved in 46.7 parts of PGMEA (resin concentration: 30% by mass).
<製造例2-3:樹脂(C)を含む溶液の調製-3>
上記特許文献1の[0191]の記載に従って樹脂溶液を調製した後、PGMEAを添加して、樹脂濃度20質量%の樹脂溶液-cを得た。
<Production Example 2-3: Preparation of solution containing resin (C)-3>
A resin solution was prepared according to the description of paragraph [0191] of the above-mentioned Patent Document 1, and then PGMEA was added to obtain a resin solution-c having a resin concentration of 20 mass %.
<製造例2-4:ポリエチレンオキシド溶液の調製>
ポリエチレンオキシド(Sigma-Aldrich社製、重量平均分子量20~40万)をエタノールに溶解して、濃度20質量%のポリエチレンオキシド(PEO)溶液である樹脂溶液-dを調製した。
<Production Example 2-4: Preparation of polyethylene oxide solution>
Polyethylene oxide (Sigma-Aldrich, weight average molecular weight 200,000 to 400,000) was dissolved in ethanol to prepare a resin solution-d, which was a polyethylene oxide (PEO) solution with a concentration of 20% by mass.
<実施例1>
製造例1-1で得られたQD分散液-B 25部、製造例2-1で得られた樹脂溶液-a 56部、及び酸化防止剤(H-1)を20質量%濃度で含むPGMEA溶液1.85部をフラスコに入れ、撹拌して、QD及び樹脂を含有する液を得た。
Example 1
25 parts of QD dispersion liquid-B obtained in Production Example 1-1, 56 parts of resin solution-a obtained in Production Example 2-1, and 1.85 parts of a PGMEA solution containing an antioxidant (H-1) at a concentration of 20% by mass were placed in a flask and stirred to obtain a liquid containing QDs and resin.
次いで、重合性化合物(D-1)3.75部、重合性化合物(D-2)3.75部、重合開始剤(E-1)0.20部、酸化防止剤(H-2)0.75部、レベリング剤(G-1)を10質量%濃度で含むPGMEA溶液0.25部及びPGMEA8.50部を混合した。得られた混合液を上述のQD及び樹脂を含有する液に加え、撹拌混合して、硬化性樹脂組成物を得た。得られた硬化性樹脂組成物の固形分濃度は25質量%である。本実施例で使用した配合成分の種類及びそれらの使用量を表2にまとめた。表2において、使用量の単位は質量部である。得られた硬化性樹脂組成物において、樹脂は均一溶解され、QDは均一分散されていることが目視観察により確認された。 Next, 3.75 parts of polymerizable compound (D-1), 3.75 parts of polymerizable compound (D-2), 0.20 parts of polymerization initiator (E-1), 0.75 parts of antioxidant (H-2), 0.25 parts of PGMEA solution containing leveling agent (G-1) at a concentration of 10% by mass, and 8.50 parts of PGMEA were mixed. The resulting mixture was added to the above-mentioned liquid containing QDs and resin, and stirred and mixed to obtain a curable resin composition. The solid content concentration of the obtained curable resin composition was 25% by mass. The types of blending components used in this example and their amounts used are summarized in Table 2. In Table 2, the unit of amount used is parts by mass. It was confirmed by visual observation that the resin was uniformly dissolved and the QDs were uniformly dispersed in the obtained curable resin composition.
<実施例2~8、比較例1~4>
使用したQD分散液、樹脂溶液及びその他の配合成分の種類及びそれらの使用量を表2又は表3に示されるとおりとしたこと以外は実施例1と同様にして硬化性樹脂組成物を調製した。表2及び表3において、使用量の単位は質量部である。実施例2~8及び比較例1~4で得られた硬化性樹脂組成物の固形分濃度はいずれも25質量%である。実施例2~8及び比較例3~4で得られた硬化性樹脂組成物において、樹脂は均一溶解され、QDは均一分散されていることが目視観察により確認された。一方、比較例1及び2の硬化性樹脂組成物においては、液分散性が不良であり、QDが沈殿した。このため、これらの比較例については、後述の評価試験を行っていない。
<Examples 2 to 8, Comparative Examples 1 to 4>
The curable resin composition was prepared in the same manner as in Example 1, except that the types of QD dispersion, resin solution, and other blending components used and their amounts used were as shown in Table 2 or Table 3. In Tables 2 and 3, the units of amounts used are parts by mass. The solid content concentrations of the curable resin compositions obtained in Examples 2 to 8 and Comparative Examples 1 to 4 are all 25% by mass. In the curable resin compositions obtained in Examples 2 to 8 and Comparative Examples 3 to 4, it was confirmed by visual observation that the resin was uniformly dissolved and the QDs were uniformly dispersed. On the other hand, in the curable resin compositions of Comparative Examples 1 and 2, the liquid dispersibility was poor and the QDs precipitated. For this reason, the evaluation tests described below were not performed on these comparative examples.
<比較例5>
樹脂組成物を得るために、製造例1-10で得られたQD分散液-K 0.5部、製造例2-4で得られたPEO溶液0.4部、及びエタノール1.1部を撹拌混合したところ、混合物がゲル化した。このため、本比較例については、後述の評価試験を行っていない。
<Comparative Example 5>
In order to obtain a resin composition, 0.5 parts of the QD dispersion-K obtained in Production Example 1-10, 0.4 parts of the PEO solution obtained in Production Example 2-4, and 1.1 parts of ethanol were mixed by stirring, and the mixture gelled. For this reason, the evaluation test described below was not performed for this comparative example.
表2及び表3に示される配合成分の詳細は次のとおりである。
〔1〕重合性化合物(D-1):プロポキシ化ペンタエリスリトールトリアクリレート(新中村化学工業株式会社製「NKエステル ATM-4PL」)、
〔2〕重合性化合物(D-2):ペンタエリスリトールトリアクリレート(新中村化学工業株式会社製「NKエステル A-TMM-3LM-N」)、
〔3〕重合性化合物(D-3):モノ-2-(メタクリロイルオキシ)エチルサクシネート(Sigma-Aldrich社製)、
〔4〕重合開始剤(E-1):株式会社ADEKA製のO-アシルオキシム系重合開始剤「NCI-930」、
〔5〕溶剤(F-1):PGMEA、
〔6〕溶剤(F-2):トルエン、
〔7〕溶剤(F-3):エタノール、
〔8〕レベリング剤(G-1):東レ・ダウコーニング株式会社製のポリエーテル変性シリコーンオイル系レベリング剤「トーレシリコーンSH8400」、
〔9〕酸化防止剤(H-1):株式会社ADEKA製のヒンダードフェノール系酸化防止剤「アデカスタブ(登録商標)AO-60」、
〔10〕酸化防止剤(H-2):住友化学株式会社製のフェノールリン系酸化防止剤「スミライザー(登録商標)GP」。
The details of the blended components shown in Tables 2 and 3 are as follows.
[1] Polymerizable compound (D-1): propoxylated pentaerythritol triacrylate ("NK Ester ATM-4PL" manufactured by Shin-Nakamura Chemical Co., Ltd.),
[2] Polymerizable compound (D-2): pentaerythritol triacrylate ("NK Ester A-TMM-3LM-N" manufactured by Shin-Nakamura Chemical Co., Ltd.),
[3] Polymerizable compound (D-3): mono-2-(methacryloyloxy)ethyl succinate (Sigma-Aldrich),
[4] Polymerization initiator (E-1): O-acyloxime polymerization initiator "NCI-930" manufactured by ADEKA Corporation,
[5] Solvent (F-1): PGMEA,
[6] Solvent (F-2): toluene,
[7] Solvent (F-3): ethanol,
[8] Leveling agent (G-1): Toray Dow Corning Co., Ltd.'s polyether-modified silicone oil-based leveling agent "Toray Silicone SH8400";
[9] Antioxidant (H-1): Hindered phenol-based antioxidant "ADEKA STAB (registered trademark) AO-60" manufactured by ADEKA Corporation;
[10] Antioxidant (H-2): Phenol-phosphorus antioxidant “Sumilizer (registered trademark) GP” manufactured by Sumitomo Chemical Co., Ltd.
[評価試験]
(1)パターニング性
ガラス基板に0.45mLの硬化性樹脂組成物を滴下し、150rpm、20秒の条件でスピンコートを行った後、100℃、3分間の条件で乾燥(プリベーク)させて硬化性樹脂組成物層を形成した。次いで、線幅が50μmであるラインアンドスペースパターンを有するフォトマスクを用いて、大気雰囲気下、40mJ/cm2の露光量(365nm基準)でパターン露光を行った。基板とフォトマスクとの距離は120μmとした。パターン露光後の硬化性樹脂組成物層を、水酸化カリウムの濃度が0.04質量%である水系現像液に23℃で70秒間浸漬し、水洗後、オーブン中、230℃で20分間ポストベークを行い、パターニングされた硬化膜を得た。硬化膜の膜厚はいずれも5μm以上6μm以下であった。
[Evaluation test]
(1) Patterning property 0.45 mL of the curable resin composition was dropped onto a glass substrate, spin-coated at 150 rpm for 20 seconds, and then dried (pre-baked) at 100 ° C for 3 minutes to form a curable resin composition layer. Next, using a photomask having a line and space pattern with a line width of 50 μm, pattern exposure was performed at an exposure dose of 40 mJ / cm 2 (based on 365 nm) in an air atmosphere. The distance between the substrate and the photomask was 120 μm. The curable resin composition layer after pattern exposure was immersed in an aqueous developer having a potassium hydroxide concentration of 0.04 mass% at 23 ° C for 70 seconds, washed with water, and then post-baked in an oven at 230 ° C for 20 minutes to obtain a patterned cured film. The thickness of each of the cured films was 5 μm or more and 6 μm or less.
パターニングされた硬化膜のライン(マスク幅50μmのライン)の1点をレーザー顕微鏡(オリンパス株式会社製の「3D Measuring Laser Microscope OLS4100」)を用いて観察し、以下の評価基準に従ってパターニング性を評価した。結果を表4に示す。 A point on the line of the patterned cured film (a line with a mask width of 50 μm) was observed using a laser microscope (Olympus Corporation's "3D Measuring Laser Microscope OLS4100"), and the patterning property was evaluated according to the following evaluation criteria. The results are shown in Table 4.
A:ライン幅が、[マスク幅(50μm)-2μm]以上[マスク幅(50μm)+3μm]以下の範囲内である、
B:ライン幅が、[マスク幅(50μm)-6μm]以上[マスク幅(50μm)-2μm]未満の範囲内であるか、又は[マスク幅(50μm)+3μm]超[マスク幅(50μm)+10μm]以下の範囲内である、
C:ライン幅が、[マスク幅(50μm)-6μm]未満であるか、又は[マスク幅(50μm)+10μm]超である、
D:現像が不十分な箇所、すなわち、隣り合うライン同士が繋がっている箇所が存在する、又は現像密着性が不十分でラインが剥離している。
A: The line width is within the range of [mask width (50 μm)-2 μm] or more and [mask width (50 μm)+3 μm] or less.
B: The line width is within the range of [mask width (50 μm)-6 μm] or more and less than [mask width (50 μm)-2 μm], or within the range of [mask width (50 μm)+3 μm] and less than [mask width (50 μm)+10 μm];
C: The line width is less than [mask width (50 μm)−6 μm] or more than [mask width (50 μm)+10 μm];
D: There are areas where development is insufficient, that is, there are areas where adjacent lines are connected to each other, or the lines are peeled off due to insufficient development adhesion.
(2)QY保持率
浜松ホトニクス株式会社製の絶対PL量子収率測定装置「C9920-02G」を用いて、硬化性樹脂組成物の塗布膜(硬化前)の量子収率を測定した。また、同装置を用いて、硬化性樹脂組成物から形成された硬化膜(ポストベーク後)の量子収率を測定した。これらの測定結果から、硬化性樹脂組成物(硬化前)の量子収率を100%としたときの、該硬化性樹脂組成物から形成される硬化膜(ポストベーク後)の量子収率(%)であるQY保持率を算出した。結果を表4に示す。
(2) QY retention The quantum yield of the coating film (before curing) of the curable resin composition was measured using an absolute PL quantum yield measurement device "C9920-02G" manufactured by Hamamatsu Photonics K.K. The quantum yield of the cured film (after post-baking) formed from the curable resin composition was also measured using the same device. From these measurement results, the QY retention, which is the quantum yield (%) of the cured film (after post-baking) formed from the curable resin composition when the quantum yield of the curable resin composition (before curing) was taken as 100%, was calculated. The results are shown in Table 4.
硬化性樹脂組成物(硬化前)の量子収率の測定においては、ガラス基板に硬化性樹脂組成物を塗布したものを測定サンプルとした。硬化膜(ポストベーク後)の量子収率の測定においては、フォトマスクを用いないこと以外は、上記「パターニング性」の評価試験と同様にして作製した硬化膜を測定サンプルとした。 When measuring the quantum yield of the curable resin composition (before curing), the measurement sample was a glass substrate coated with the curable resin composition. When measuring the quantum yield of the cured film (after post-baking), the measurement sample was a cured film prepared in the same manner as in the evaluation test for "patterning ability" above, except that a photomask was not used.
(3)発光強度
フォトマスクを用いないこと以外は、上記「パターニング性」の評価試験と同様にしてガラス基板上に硬化膜を形成した。この硬化膜付ガラス基板を青色バックライト上に配置し、オーシャンフォトニクス株式会社製の全光束測定装置「CSTM-OP-RADIANT-FLUX」を用いて発光強度を測定した。実施例1の硬化膜の発光強度を1.0としたときの発光強度比を表4に示す。
(3) Emission Intensity A cured film was formed on a glass substrate in the same manner as in the evaluation test for "patterning property" above, except that a photomask was not used. The glass substrate with the cured film was placed on a blue backlight, and the emission intensity was measured using a total luminous flux measuring device "CSTM-OP-RADIANT-FLUX" manufactured by Ocean Photonics Co., Ltd. Table 4 shows the emission intensity ratio when the emission intensity of the cured film of Example 1 is set to 1.0.
上述のように、比較例1、2及び5については、硬化性樹脂組成物の液分散性が不良であったり、樹脂組成物調製時にゲル化を生じたりしたため、上記評価試験を実施することができなかった。 As described above, for Comparative Examples 1, 2, and 5, the liquid dispersibility of the curable resin composition was poor, and gelation occurred during the preparation of the resin composition, so the above evaluation tests could not be carried out.
比較例3の硬化性樹脂組成物は、液分散性は良好であったが、露光しても硬化性樹脂組成物層が硬化しなかったため、上記評価試験を実施することができなかった。比較例4の硬化性樹脂組成物は、液分散性は良好であったが、パターン露光後に現像処理を行ってもパターニングを行うことができず、ライン同士がすべて繋がっていた。 The curable resin composition of Comparative Example 3 had good liquid dispersibility, but the curable resin composition layer did not cure even when exposed to light, so the above evaluation test could not be carried out. The curable resin composition of Comparative Example 4 had good liquid dispersibility, but patterning could not be achieved even when development processing was carried out after pattern exposure, and all the lines were connected to each other.
Claims (4)
前記化合物(B)以外の化合物であって、前記半導体粒子(A)に対する配位能を有する化合物(L)をさらに含み、
前記化合物(B)は、下記式(B-1)で表される化合物であり、
[式(B-1)中、Xは前記極性基であって、カルボキシル基、及びアミノ基からなる群より選ばれる基であり、Yは1価の基であり、Zは2価又は3価の基であり、nは2以上の整数であり、mは1又は2であり、R1はアルキレン基である。]
前記化合物(B)及び前記化合物(L)は前記半導体粒子(A)に配位し、
前記樹脂(C)はアルカリ可溶性樹脂であり、
前記重合性化合物(D)は、エチレン性不飽和結合を3つ以上有する光重合性化合物であり、
前記半導体粒子(A)は均一分散されており、
前記半導体粒子(A)に対する前記化合物(B)及び前記化合物(L)の合計量の比が、質量比で0.1以上1.5以下であり、
前記溶剤(F)は、エステル溶剤、エステル溶剤以外のエーテル溶剤、エーテルエステル溶剤、エステル溶剤以外のケトン溶剤、アルコール溶剤、アミド溶剤及びジメチルスルホキシドからなる群より選択される1種又は2種以上であり、
前記酸化防止剤(H)は、フェノール系酸化防止剤及びリン系酸化防止剤の少なくとも一方を含む、硬化性樹脂組成物。 The composition comprises semiconductor particles (A), a compound (B) containing a polyalkylene glycol structure and having a polar group at a molecular end, a resin (C), a polymerizable compound (D) , a solvent (F) and an antioxidant (H),
The semiconductor particle (A) further includes a compound (L) other than the compound (B) and having a coordination ability with the semiconductor particle (A),
The compound (B) is a compound represented by the following formula (B-1):
[In formula (B-1), X is the polar group selected from the group consisting of a carboxyl group and an amino group, Y is a monovalent group, Z is a divalent or trivalent group, n is an integer of 2 or more, m is 1 or 2, and R 1 is an alkylene group.]
the compound (B) and the compound (L) are coordinated to the semiconductor particle (A);
The resin (C) is an alkali-soluble resin,
The polymerizable compound (D) is a photopolymerizable compound having three or more ethylenically unsaturated bonds,
The semiconductor particles (A) are uniformly dispersed,
a ratio of the total amount of the compound (B) and the compound (L) to the semiconductor particles (A) is 0.1 or more and 1.5 or less in terms of mass ratio,
The solvent (F) is one or more selected from the group consisting of ester solvents, ether solvents other than ester solvents, ether ester solvents, ketone solvents other than ester solvents, alcohol solvents, amide solvents, and dimethyl sulfoxide;
The curable resin composition, wherein the antioxidant (H) includes at least one of a phenol-based antioxidant and a phosphorus-based antioxidant.
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KR102544663B1 (en) | 2023-06-16 |
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CN108445715B (en) | 2022-12-13 |
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