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JP7578552B2 - Component Mounting Equipment - Google Patents

Component Mounting Equipment Download PDF

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Publication number
JP7578552B2
JP7578552B2 JP2021115082A JP2021115082A JP7578552B2 JP 7578552 B2 JP7578552 B2 JP 7578552B2 JP 2021115082 A JP2021115082 A JP 2021115082A JP 2021115082 A JP2021115082 A JP 2021115082A JP 7578552 B2 JP7578552 B2 JP 7578552B2
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nozzle
inspection
tip
angles
standard
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JP2023011304A (en
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ēœŸäø€ 岔嵜
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Yamaha Motor Co Ltd
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Yamaha Motor Co Ltd
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Description

ęœ¬é–‹ē¤ŗćÆ态éƒØå“å®Ÿč£…č£…ē½®ć«é–¢ć™ć‚‹ć€‚ This disclosure relates to a component mounting device.

å¾“ę„ć€åøē€ćƒ˜ćƒƒćƒ‰ć«č£…ē€ć—ćŸćƒŽć‚ŗ惫恫éƒØå“ć‚’åøē€ć™ć‚‹éƒØå“å®Ÿč£…č£…ē½®ćØ恗恦态äø‹čؘē‰¹čØ±ę–‡ēŒ®ļ¼‘ļ¼ˆē‰¹é–‹å¹³ļ¼—ļ¼ļ¼‘ļ¼˜ļ¼“ļ¼–ļ¼™ļ¼”号公報ļ¼‰ć«čØ˜č¼‰ć®ć‚‚ć®ćŒēŸ„ć‚‰ć‚Œć¦ć„ć‚‹ć€‚ć“ć®éƒØå“å®Ÿč£…č£…ē½®ćÆ态åøē€ćƒ˜ćƒƒćƒ‰ćØ态åøē€ćƒ˜ćƒƒćƒ‰ć«ē€č„±åÆčƒ½ćØ恕悌悋惎ć‚ŗ惫ćØ态åøē€ćƒ˜ćƒƒćƒ‰éƒØåˆ†ć®čæ‘å‚ć«å‘ć‘ć¦å“ę–¹ć‹ć‚‰ć»ć¼ę°“å¹³ę–¹å‘ć«ćƒ¬ćƒ¼ć‚¶ćƒ¼å…‰ć‚’ē…§å°„恙悋ē™ŗ光éƒØćØ态ē™ŗ光éƒØ恫åÆ¾ć—ć¦åøē€ćƒ˜ćƒƒćƒ‰éƒØåˆ†ć‚’ęŒŸć‚“ć§åÆ¾å‘ć™ć‚‹ä½ē½®ć«é…ć•ć‚Œć¦ē™ŗ光éƒØ恌ē…§å°„ć—ćŸćƒ¬ćƒ¼ć‚¶ćƒ¼å…‰ć‚’å—å…‰ć™ć‚‹å—å…‰éƒØćØć€ć‚’å‚™ćˆć‚‹ć€‚ē™ŗ光éƒØ恋悉ē™ŗć›ć‚‰ć‚ŒćŸćƒ¬ćƒ¼ć‚¶ćƒ¼å…‰ćŒåøē€ćƒ˜ćƒƒćƒ‰ć«č£…ē€ć—ćŸćƒŽć‚ŗćƒ«ć‚’č¶Šćˆć¦å—å…‰éƒØć«å—å…‰ć•ć‚ŒćŸéš›ć«ć€ćƒŽć‚ŗćƒ«ć®å­˜åœØć«ć‚ˆć‚‹éžęŠ•å½±éƒØåˆ†ć‚’åŸŗć«ćƒŽć‚ŗćƒ«ć®å½¢ēŠ¶ćŠć‚ˆć³åÆøę³•ē­‰ć‚’ęø¬å®šć™ć‚‹ć“ćØćŒć§ćć‚‹ć€‚ć—ćŸćŒć£ć¦ć€ä¾‹ćˆć°ć€åøē€ćƒ˜ćƒƒćƒ‰ć«č£…ē€ć—ćŸćƒŽć‚ŗćƒ«ć®å¾„ćŒć€äŗˆć‚äøŽćˆć‚‰ć‚ŒćŸćƒŽć‚ŗćƒ«å¾„ćƒ‡ćƒ¼ć‚æćØäø€č‡“ć™ć‚‹ć‹å¦ć‹ć‚’čŖæć¹ć‚‹ć“ćØ恌恧恍悋怂 The component mounting device described in the following Patent Document 1 (JP Patent Publication No. 7-183694) is known as a component mounting device that picks up components with a nozzle attached to a suction head. This component mounting device includes a suction head, a nozzle that is detachable from the suction head, a light emitting unit that irradiates laser light from the side in a substantially horizontal direction toward the vicinity of the suction head, and a light receiving unit that is disposed in a position facing the light emitting unit across the suction head and receives the laser light irradiated by the light emitting unit. When the laser light emitted from the light emitting unit is received by the light receiving unit beyond the nozzle attached to the suction head, the shape and dimensions of the nozzle can be measured based on the non-projected portion due to the presence of the nozzle. Therefore, for example, it is possible to check whether the diameter of the nozzle attached to the suction head matches pre-given nozzle diameter data.

ē‰¹é–‹å¹³ļ¼—ļ¼ļ¼‘ļ¼˜ļ¼“ļ¼–ļ¼™ļ¼”号公報Japanese Unexamined Patent Publication No. 7-183694

äøŠčØ˜ć®ę§‹ęˆć§ćÆ态惎ć‚ŗ惫恫åÆ¾ć—ć¦ć‚ć‚‹äø€ę–¹å‘恋悉恮ćæćƒ¬ćƒ¼ć‚¶ćƒ¼å…‰ć‚’ē…§å°„ć—ć¦ćƒŽć‚ŗćƒ«ć®å¾„ć‚’č؈ęø¬ć™ć‚‹ćŸć‚ć€ćƒ¬ćƒ¼ć‚¶ćƒ¼å…‰ć‚’ē…§å°„ć™ć‚‹ę–¹å‘ć«ć‚ˆć£ć¦ćÆ态惎ć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę­£ē¢ŗ恫ē¢ŗčŖć§ććŖć„å “åˆćŒć‚ć‚‹ć€‚ä¾‹ćˆć°ć€ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ćŒć€ćƒ¬ćƒ¼ć‚¶ćƒ¼å…‰ćŒē…§å°„ć•ć‚ŒćŖć„ä½ē½®ć«ć‚ć‚‹å “合ē­‰ć«ćÆ态惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć‚’ę¤œå‡ŗ恙悋恓ćØ恌恧恍ćŖ恄怂 In the above configuration, the nozzle diameter is measured by irradiating the nozzle with laser light from only one direction, so depending on the direction of irradiation with the laser light, it may not be possible to accurately confirm the state of the nozzle. For example, if the chipped tip of the nozzle is in a position where the laser light is not irradiated, the chipped tip of the nozzle cannot be detected.

ęœ¬é–‹ē¤ŗ恮éƒØå“å®Ÿč£…č£…ē½®ćÆ态åŸŗęæ恫éƒØå“ć‚’å®Ÿč£…ć™ć‚‹éƒØå“å®Ÿč£…č£…ē½®ć§ć‚ć£ć¦ć€å‰čؘéƒØå“ć‚’åøē€ć™ć‚‹ćƒŽć‚ŗćƒ«ćŒč»øē·šäøŠć«č£…ē€ć•ć‚ŒćŸå®Ÿč£…ćƒ˜ćƒƒćƒ‰ćØć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®å›žć‚Šć«å›žč»¢ć•ć›ć‚‹å›žč»¢ę©Ÿę§‹ćØć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®č»øę–¹å‘ćØē›“äŗ¤ć™ć‚‹ę’®åƒę–¹å‘ć‹ć‚‰ę’®åƒć™ć‚‹ę’®åƒéƒØćØ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ悒čØ˜ę†¶ć™ć‚‹čØ˜ę†¶éƒØćØć€åˆ¶å¾”éƒØćØć€ć‚’å‚™ćˆć€å‰čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć‚’含ćæć€å‰čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ćŒē™ŗē”Ÿć—悄恙恄ē®‡ę‰€ćŒć€å‰čؘč»øę–¹å‘ćŠć‚ˆć³å‰čØ˜ę’®åƒę–¹å‘ć®åŒę–¹ć«ē›“äŗ¤ć™ć‚‹å¹…ę–¹å‘ć«ćŠć‘ć‚‹ē«ÆéƒØć«é…ć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹å‰čØ˜ćƒŽć‚ŗćƒ«ć®å‰čؘč»øē·šć®å›žć‚Šć®č§’åŗ¦ć§ć‚ć‚Šć€å‰čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆć€å‰čØ˜ćƒŽć‚ŗ惫ćØ同ēØ®é”žć§ć‚ć‚Šć€å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ćŖ恄ęؙęŗ–ćƒŽć‚ŗćƒ«ć‚’å‰čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ć¦å‰čؘęؙęŗ–ćƒŽć‚ŗćƒ«ć‚’å‰čØ˜ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®å‰čؘęؙęŗ–ćƒŽć‚ŗćƒ«ć®ć‚µć‚¤ć‚ŗ恧恂悋複ꕰ恮ęؙęŗ–悵悤ć‚ŗć‚’å«ćæć€å‰čؘ制徔éƒØćÆć€å‰čØ˜å›žč»¢ę©Ÿę§‹ć«ć‚ˆć‚Šå‰čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć®ć†ć”恮ļ¼‘恤仄äøŠć®ę¤œęŸ»č§’åŗ¦ ć«å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å›žč»¢ć•ć›ć¦ć€å‰čØ˜ę’®åƒéƒØć«ć‚ˆć‚Šå‰čؘļ¼‘恤仄äøŠć®ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć‚‹ć“ćØ恧态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć‚’å–å¾—ć—ć€å‰čؘļ¼‘恤仄äøŠć®ę’®åƒē”»åƒćØ前čؘčØ˜ę†¶éƒØ恫čØ˜ę†¶ć•ć‚ŒćŸå‰čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦å‰čØ˜ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć€éƒØå“å®Ÿč£…č£…ē½®ć§ć‚悋怂 The component mounting device of the present disclosure is a component mounting device that mounts components on a board, and includes a mounting head having a nozzle that picks up the components attached on an axis, a rotation mechanism that rotates the nozzle around the axis, an imaging unit that images the nozzle from an imaging direction perpendicular to the axial direction of the axis, a memory unit that stores nozzle data, and a control unit, the nozzle data including a plurality of inspection angles, the plurality of inspection angles being angles around the axis of the nozzle such that a location of the nozzle where chipping is likely to occur at the tip is located at an end in a width direction perpendicular to both the axial direction and the imaging direction, the nozzle data including a plurality of standard sizes that are the sizes of the standard nozzle when a standard nozzle of the same type as the nozzle and having an unchipped tip is rotated to the plurality of inspection angles and the standard nozzle is viewed from the imaging direction, and the control unit rotates the mounting head to one or more of the plurality of inspection angles by the rotation mechanism. The component mounting device rotates the nozzle and captures images of the nozzle at the one or more inspection angles with the imaging unit to obtain one or more captured images, and inspects the state of the nozzle based on the one or more captured images and the nozzle data stored in the memory unit.

ęœ¬é–‹ē¤ŗć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗćƒ«ć‚’č»øē·šć®å›žć‚Šć®ļ¼‘恤仄äøŠć®č§’åŗ¦ć«ćŠć„ć¦ę’®åƒć™ć‚‹ć“ćØć«ć‚ˆć‚Šć€ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØ恮ꬠ恑ē­‰ć®ē•°åøø悒ꤜēŸ„恗悄恙恄éƒØå“å®Ÿč£…č£…ē½®ć‚’ęä¾›ć™ć‚‹ć“ćØ恌恧恍悋怂 According to the present disclosure, it is possible to provide a component mounting device that can easily detect abnormalities such as chipping of the nozzle tip by imaging the nozzle at one or more angles around the axis.

図ļ¼‘ćÆć€å®Ÿę–½å½¢ę…‹ļ¼‘恫äæ‚ć‚‹éƒØå“å®Ÿč£…č£…ē½®ć®å¹³é¢å›³ć§ć‚悋怂FIG. 1 is a plan view of a component mounting apparatus according to a first embodiment. 図ļ¼’ćÆ态惎ć‚ŗćƒ«ć€ē¬¬ļ¼‘ć‚«ćƒ”ćƒ©ć€ćŠć‚ˆć³ē¬¬ļ¼‘ē…§ę˜Žć®ä½ē½®é–¢äæ‚ć‚’ē¤ŗć™å›³ć§ć‚ć‚‹ć€‚FIG. 2 is a diagram showing the positional relationship between the nozzle, the first camera, and the first lighting. 図ļ¼“ćÆ态ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æć«ć‚ˆć‚‹ćƒŽć‚ŗćƒ«ć®č§’åŗ¦ć®åˆ¶å¾”恫恤恄恦ē¤ŗć™å›³ć§ć‚ć‚‹ć€‚FIG. 3 is a diagram showing the control of the nozzle angle by the R-axis servo motor. 図ļ¼”ćÆć€å¹³č”Œå…‰ć‚’ē”Ø恄恟惎ć‚ŗćƒ«ć®ę’®åƒćØę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 4 is a diagram for explaining imaging of a nozzle using parallel light and the captured image. 図ļ¼•ćÆć€ę‹”ę•£å…‰ć‚’ē”Ø恄恟惎ć‚ŗćƒ«ć®ę’®åƒćØę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 5 is a diagram illustrating imaging of a nozzle using diffused light and the captured image. 図ļ¼–ćÆ态éƒØå“å®Ÿč£…č£…ē½®ć®é›»ę°—ēš„ę§‹ęˆć‚’ē¤ŗć™å›³ć§ć‚ć‚‹ć€‚FIG. 6 is a diagram showing the electrical configuration of the component mounting apparatus. 図ļ¼—ćÆć€å…ˆē«ÆéƒØćŒé•·ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćØč¤‡ę•°ć®ę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 7 is a diagram illustrating a plurality of inspection angles and a plurality of captured images of a nozzle having a rectangular tip. 図ļ¼˜ćÆć€å…ˆē«ÆéƒØćŒé•·ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ć«ć¤ć„ć¦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 8 is a diagram for explaining an inspection of a nozzle having a rectangular tip for chipping. 図ļ¼™ćÆ态惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ć«ćŠć‘ć‚‹åˆ¶å¾”éƒØć®å‡¦ē†ć‚’čŖ¬ę˜Žć™ć‚‹ćƒ•ćƒ­ćƒ¼ćƒćƒ£ćƒ¼ćƒˆć§ć‚悋怂FIG. 9 is a flowchart illustrating the process of the control unit in inspecting the tip of the nozzle for chipping. 図ļ¼‘ļ¼ćÆć€å…ˆē«ÆéƒØćŒę­£ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćØč¤‡ę•°ć®ę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 10 is a diagram illustrating a plurality of inspection angles and a plurality of captured images of a nozzle having a square tip. 図ļ¼‘ļ¼‘ćÆć€å…ˆē«ÆéƒØćŒę­£ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ć«ć¤ć„ć¦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 11 is a diagram for explaining an inspection of chipping at the tip of a nozzle having a square tip. 図ļ¼‘ļ¼’ćÆć€å…ˆē«ÆéƒØćŒč±å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćØč¤‡ę•°ć®ę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 12 is a diagram illustrating a plurality of inspection angles and a plurality of captured images of a nozzle having a diamond-shaped tip. 図ļ¼‘ļ¼“ćÆć€å…ˆē«ÆéƒØćŒč±å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ć«ć¤ć„ć¦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 13 is a diagram for explaining an inspection of chipping at the tip of a nozzle having a diamond-shaped tip. 図ļ¼‘ļ¼”ćÆć€å®Ÿę–½å½¢ę…‹ļ¼’恫äæ‚ć‚‹å…ˆē«ÆéƒØćŒé•·ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 14 is a diagram illustrating a plurality of captured images of a nozzle having a rectangular tip according to the second embodiment. 図ļ¼‘ļ¼•ćÆć€å›³ļ¼‘ļ¼”恫ē¤ŗ恗恟惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę’®åƒē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ惎ć‚ŗćƒ«ć®č§’åŗ¦ć®é–¢äæ‚ć‚’č”Øć™ć‚°ćƒ©ćƒ•ć§ć‚ć‚‹ć€‚FIG. 15 is a graph showing the relationship between the measured size of a plurality of captured images of the nozzle shown in FIG. 14 and the nozzle angle. 図ļ¼‘ļ¼–ćÆć€å…ˆē«ÆéƒØćŒč±å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę’®åƒē”»åƒć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹å›³ć§ć‚悋怂FIG. 16 is a diagram illustrating a plurality of captured images of a nozzle having a diamond-shaped tip. 図ļ¼‘ļ¼—ćÆć€å›³ļ¼‘ļ¼–恫ē¤ŗ恗恟惎ć‚ŗćƒ«ć®č¤‡ę•°ć®ę’®åƒē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ惎ć‚ŗćƒ«ć®č§’åŗ¦ć®é–¢äæ‚ć‚’č”Øć™ć‚°ćƒ©ćƒ•ć§ć‚ć‚‹ć€‚FIG. 17 is a graph showing the relationship between the measured size of a plurality of captured images of the nozzle shown in FIG. 16 and the nozzle angle.

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[Description of the embodiments of the present disclosure]
First, embodiments of the present disclosure will be listed and described.
(1) A component mounting device according to the present disclosure is a component mounting device that mounts components on a board, the component mounting device including: a mounting head having a nozzle that sucks up the component attached on an axis; a rotation mechanism that rotates the nozzle about the axis; an imaging unit that images the nozzle from an imaging direction perpendicular to an axial direction of the axis; a storage unit that stores nozzle data; and a control unit, the nozzle data including a plurality of inspection angles, the plurality of inspection angles being angles about the axis of the nozzle such that a portion of a tip of the nozzle that is prone to chipping is located at an end in a width direction perpendicular to both the axial direction and the imaging direction. the nozzle data includes a plurality of standard sizes which are sizes of the standard nozzle when a standard nozzle of the same type as the nozzle and having an unbroken tip is rotated to the plurality of inspection angles and the standard nozzle is viewed from the imaging direction, and the control unit rotates the nozzle to one or more inspection angles of the plurality of inspection angles using the rotation mechanism and images the nozzle at the one or more inspection angles using the imaging unit, thereby obtaining one or more captured images, and inspecting a condition of the nozzle based on the one or more captured images and the nozzle data stored in the memory unit.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć‚‹č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćŒćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć¾ć‚Œć¦ć„ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć®ę¤œęŸ»ć«åæ…要ćŖļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć®ćæć‚’å–å¾—ć§ćć€ę¤œęŸ»ć«č¦ć™ć‚‹ę™‚é–“ć‚’ēŸ­ēø®ć™ć‚‹ć“ćØćŒć§ćć‚‹ć€‚ć¾ćŸć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć§ćÆ态惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ćŒē™ŗē”Ÿć—悄恙恄ē®‡ę‰€ćŒć€å¹…ę–¹å‘ć«ćŠć‘ć‚‹ē«ÆéƒØć«é…ć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫恮ē•°åøø态ē‰¹ć«ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć‚’ę¤œēŸ„恗悄恙恄怂惎ć‚ŗ惫恮ē•°åøø悒ꤜēŸ„恗悄恙恄꧋ꈐ恧恂悋恋悉态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć™ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the nozzle data includes multiple inspection angles for imaging the nozzle, so it is possible to obtain only one or more images required to inspect the state of the nozzle, thereby shortening the time required for inspection. Furthermore, with multiple inspection angles, the location where chipping of the nozzle tip is likely to occur is arranged at the end in the width direction, making it easy to detect nozzle abnormalities, particularly chipping of the nozzle tip. As this configuration makes it easy to detect nozzle abnormalities, it is possible to suppress a decrease in the component pickup rate and mounting misalignment.

ļ¼ˆļ¼’ļ¼‰å‰čؘ制徔éƒØćÆć€å‰čؘļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć«åŸŗ恄恄恦ļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋悵悤ć‚ŗē®—å‡ŗ処ē†ćØć€å‰čؘļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ前čØ˜č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗ恮恆恔恮ļ¼‘恤仄äøŠć®ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØć§ć€å‰čØ˜ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ćØć€ć‚’å®Ÿč”Œć™ć‚‹ć“ćØćŒå„½ć¾ć—ć„ć€‚ (2) It is preferable that the control unit executes a size calculation process that calculates one or more measurement sizes based on the one or more captured images, and a determination process that determines whether or not the tip of the nozzle is chipped by comparing the one or more measurement sizes with one or more standard sizes among the plurality of standard sizes.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€åˆ¶å¾”éƒØćÆ态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć«åŸŗ恄恄恦ē®—å‡ŗ恕悌恟ļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć¾ć‚Œć‚‹č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗ恮恆恔恮ļ¼‘恤仄äøŠć®ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ć®ē²¾åŗ¦ć‚’向äøŠć•ć›ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the control unit determines whether the tip of the nozzle is chipped by comparing one or more measured sizes calculated based on one or more captured images with one or more standard sizes among the multiple standard sizes included in the nozzle data, thereby improving the accuracy of inspection for chipping of the nozzle tip.

ļ¼ˆļ¼“ļ¼‰å‰čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ćŒå–ć‚Šä»˜ć‘ć‚‰ć‚Œć‚‹å‰čØ˜å®Ÿč£…ćƒ˜ćƒƒćƒ‰ć«å›ŗęœ‰ć®ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ć‚’åŠ å‘³ć—ć¦čØ­å®šć•ć‚Œć¦ć„ć‚‹ć“ćØćŒå„½ć¾ć—ć„ć€‚ (3) It is preferable that the multiple inspection angles are set taking into account an offset amount specific to the mounting head to which the nozzle is attached.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ä½æē”Øć™ć‚‹å®Ÿč£…ćƒ˜ćƒƒćƒ‰ć‚’å¤‰ę›“ć—ć¦ć‚‚ę­£ē¢ŗć«ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć§ćć‚‹ć€‚ This configuration allows the nozzle condition to be inspected accurately even when the mounting head used is changed.

ļ¼ˆļ¼”ļ¼‰ęœ¬é–‹ē¤ŗ恫äæ‚ć‚‹éƒØå“å®Ÿč£…č£…ē½®ćÆ态åŸŗęæ恫éƒØå“ć‚’å®Ÿč£…ć™ć‚‹éƒØå“å®Ÿč£…č£…ē½®ć§ć‚ć£ć¦ć€å‰čؘéƒØå“ć‚’åøē€ć™ć‚‹ćƒŽć‚ŗćƒ«ćŒč»øē·šäøŠć«č£…ē€ć•ć‚ŒćŸå®Ÿč£…ćƒ˜ćƒƒćƒ‰ćØć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®å›žć‚Šć«å›žč»¢ć•ć›ć‚‹å›žč»¢ę©Ÿę§‹ćØć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®č»øę–¹å‘ćØē›“äŗ¤ć™ć‚‹ę’®åƒę–¹å‘ć‹ć‚‰ę’®åƒć™ć‚‹ę’®åƒéƒØćØ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ悒čØ˜ę†¶ć™ć‚‹čØ˜ę†¶éƒØćØć€åˆ¶å¾”éƒØćØć€ć‚’å‚™ćˆć€å‰čؘ制徔éƒØćÆć€å‰čØ˜å›žč»¢ę©Ÿę§‹ć«ć‚ˆć‚Šå‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å›žč»¢ć•ć›ć¦ć€å‰čØ˜ćƒŽć‚ŗćƒ«ć®å‰čؘč»øē·šć®å›žć‚Šć®č¤‡ę•°ć®č§’åŗ¦ć«ćŠć„ć¦å‰čØ˜ę’®åƒéƒØć«ć‚ˆć‚Šå‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć‚‹ć“ćØ恧态ļ¼‘ć¤ć®å‰čØ˜ćƒŽć‚ŗćƒ«ć«ć¤ćč¤‡ę•°ć®ę’®åƒē”»åƒć‚’å–å¾—ć—ć€å‰čØ˜č¤‡ę•°ć®ę’®åƒē”»åƒćØ前čؘčØ˜ę†¶éƒØ恫čØ˜ę†¶ć•ć‚ŒćŸå‰čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦å‰čØ˜ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć€éƒØå“å®Ÿč£…č£…ē½®ć§ć‚ć£ć¦ć‚‚ć‚ˆć„ć€‚ (4) The component mounting device according to the present disclosure may be a component mounting device that mounts components on a board, and includes a mounting head having a nozzle that adsorbs the component attached on an axis, a rotation mechanism that rotates the nozzle around the axis, an imaging unit that images the nozzle from an imaging direction perpendicular to the axial direction of the axis, a memory unit that stores nozzle data, and a control unit, in which the control unit rotates the nozzle using the rotation mechanism and images the nozzle using the imaging unit at multiple angles around the axis of the nozzle, thereby obtaining multiple captured images for each nozzle, and inspects the state of the nozzle based on the multiple captured images and the nozzle data stored in the memory unit.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗćƒ«ć‚’č»øē·šć®å›žć‚Šć®č¤‡ę•°ć®č§’åŗ¦ć«ćŠć„ć¦ę’®åƒć—ć¦å–å¾—ć•ć‚ŒćŸč¤‡ę•°ć®ę’®åƒē”»åƒćØčØ˜ę†¶éƒØ恫čØ˜ę†¶ć•ć‚ŒćŸćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ćŒę¤œęŸ»ć•ć‚Œć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØ恮ꬠ恑ē­‰ć®ē•°åøø悒ꤜēŸ„ć—ć‚„ć™ć„ć€‚ć¾ćŸć€ćƒŽć‚ŗ惫恮ē•°åøø悒ꤜēŸ„恗悄恙恄꧋ꈐ恧恂悋恋悉态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć™ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the state of the nozzle is inspected based on multiple captured images obtained by capturing images of the nozzle at multiple angles around the axis and the nozzle data stored in the memory unit, making it easy to detect abnormalities such as chipping of the nozzle tip. In addition, because the configuration makes it easy to detect nozzle abnormalities, it is possible to suppress a decrease in the component pickup rate and mounting misalignment.

ļ¼ˆļ¼•ļ¼‰å‰čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆ态ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØć€å‰čؘē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗ仄äø‹ć®ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØć€é™¤å¤–č§’åŗ¦ćØć€ć‚’å«ćæć€å‰čØ˜ćƒŽć‚ŗ惫ćØ同ēØ®é”žć§ć‚ć‚Šć€å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ćŖ恄ęؙęŗ–ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®å›žć‚Šć«ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ć¦ć€å‰čØ˜ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®å‰čؘęؙęŗ–ćƒŽć‚ŗćƒ«ć®ć‚µć‚¤ć‚ŗćÆć€å‰čؘē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØ前čؘē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗć«ćŠć„ć¦ę„µå¤§å€¤ć‚’ćØć‚Šć€å‰čؘ制徔éƒØćÆć€å‰čØ˜å›žč»¢ę©Ÿę§‹ć«ć‚ˆć‚Šå‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ćŖćŒć‚‰ć€å‰čØ˜ę’®åƒéƒØć«ć‚ˆć‚Šå‰čØ˜ćƒŽć‚ŗćƒ«ć‚’é€£ē¶šēš„ć«ę’®åƒć™ć‚‹ć“ćØć§ć€å‰čØ˜č¤‡ę•°ć®ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹é€£ē¶šę’®åƒå‡¦ē†ćØć€å‰čØ˜č¤‡ę•°ć®ę’®åƒē”»åƒć«åŸŗ恄恄恦複ꕰ恮č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋悵悤ć‚ŗē®—å‡ŗ処ē†ćØć€å‰čؘč؈ęø¬ć‚µć‚¤ć‚ŗćŒęœ€å¤§ć§ć‚ć‚‹ē¬¬ļ¼‘ē”»åƒćØć€å‰čؘē¬¬ļ¼‘ē”»åƒć‚’ę’®åƒć—ćŸéš›ć®å‰čØ˜ćƒŽć‚ŗćƒ«ć®č§’åŗ¦ć®å‰å¾Œć®å‰čØ˜é™¤å¤–č§’åŗ¦ć«ćŠć„ć¦ę’®åƒć•ć‚ŒćŸå‰čØ˜ę’®åƒē”»åƒć‚’é™¤ć„ć¦å‰čؘč؈ęø¬ć‚µć‚¤ć‚ŗćŒęœ€å¤§ć§ć‚ć‚‹ē¬¬ļ¼’ē”»åƒćØć€ć‚’ęŠ½å‡ŗ恙悋ē”»åƒęŠ½å‡ŗ処ē†ćØć€å‰čؘē¬¬ļ¼‘ē”»åƒć®å‰čؘč؈ęø¬ć‚µć‚¤ć‚ŗćØ前čؘē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ćØćØć‚‚ć«ć€å‰čؘē¬¬ļ¼’ē”»åƒć®å‰čؘč؈ęø¬ć‚µć‚¤ć‚ŗćØ前čؘē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØć§ć€å‰čØ˜ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ćØć€ć‚’å®Ÿč”Œć—ć¦ć‚‚ć‚ˆć„ć€‚ (5) The nozzle data includes a first maximum size, a second maximum size equal to or smaller than the first maximum size, and an exclusion angle, and a standard nozzle of the same type as the nozzle and having an unbroken tip is rotated 180Ā° or more around the axis, and the size of the standard nozzle when viewed from the imaging direction takes maximum values at the first maximum size and the second maximum size, and the control unit performs a continuous imaging process to obtain the multiple captured images by continuously capturing images of the nozzle using the imaging unit while rotating the nozzle by 180Ā° or more using the rotation mechanism, and The method may include a size calculation process for calculating multiple measurement sizes based on the multiple captured images, an image extraction process for extracting a first image having the maximum measurement size and a second image having the maximum measurement size excluding the captured images captured at the exclusion angle before and after the angle of the nozzle when the first image was captured, and a determination process for determining whether the tip of the nozzle is chipped by comparing the measurement size of the first image with the first maximum size and comparing the measurement size of the second image with the second maximum size.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗćƒ«ć‚’ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ćŖ恌悉惎ć‚ŗćƒ«ć‚’é€£ē¶šēš„ć«ę’®åƒć—ć¦å–å¾—ć•ć‚Œć‚‹č¤‡ę•°ć®ę’®åƒē”»åƒć«åŸŗć„ć„ć¦ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć¹ćč§’åŗ¦ćŒå«ć¾ć‚Œć¦ć„ćŖć„å “åˆć‚„ć€å®Ÿč£…ćƒ˜ćƒƒćƒ‰å›ŗęœ‰ć®č§’åŗ¦ć®ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ćŒåŠ å‘³ć•ć‚Œć¦ć„ćŖć„å “åˆć§ć‚‚ć€ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć€ē‰¹ć«ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ćŒåÆčƒ½ć§ć‚ć‚‹ć€‚ć¾ćŸć€åˆ¶å¾”éƒØćÆć€č¤‡ę•°ć®ę’®åƒē”»åƒć‹ć‚‰ē¬¬ļ¼‘ē”»åƒćØē¬¬ļ¼’ē”»åƒćØć‚’ęŠ½å‡ŗ恗态ē¬¬ļ¼‘ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼‘ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ćØćØ悂恫态ē¬¬ļ¼’ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć®ę¤œęŸ»ć®ē²¾åŗ¦ć‚’向äøŠć•ć›ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the nozzle condition is inspected based on multiple captured images obtained by continuously capturing images of the nozzle while rotating the nozzle by 180Ā° or more. This makes it possible to inspect the nozzle condition, particularly the tip of the nozzle for chipping, even when the nozzle data does not include the angle at which the nozzle should be captured or when an angle offset specific to the mounting head is not taken into account. In addition, the control unit extracts a first image and a second image from the multiple captured images, compares the measured size of the first image with the first standard size, and compares the measured size of the second image with the second standard size to determine whether the tip of the nozzle is chipped, thereby improving the accuracy of the inspection for chipping of the nozzle tip.

ļ¼ˆļ¼–ļ¼‰å‰čؘ制徔éƒØćŒå‰čØ˜ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć‚æć‚¤ćƒŸćƒ³ć‚°ćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čØ˜å®Ÿč£…ćƒ˜ćƒƒćƒ‰ć«č£…ē€ć—ćŸē›“å¾Œć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ćƒŽć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«åŽē“ć™ć‚‹ē›“å‰ć€åøē€ć‚Øćƒ©ćƒ¼ć®ē™ŗē”Ÿę™‚态äŗˆć‚čØ­å®šć•ć‚ŒćŸå®šęœŸć‚æć‚¤ćƒŸćƒ³ć‚°ć€ćŠć‚ˆć³å‰čؘåŸŗęæć®ę¬é€ę™‚ć®ć†ć”ć€å°‘ćŖ恏ćØ悂ļ¼‘恤恮ć‚æć‚¤ćƒŸćƒ³ć‚°ćØ恕悌悋恓ćØćŒå„½ć¾ć—ć„ć€‚ (6) It is preferable that the control unit inspects the state of the nozzle at at least one of the following times: immediately after the nozzle is attached to the mounting head, immediately before the nozzle is stored in the nozzle stocker, when a suction error occurs, at a preset regular timing, and when the substrate is transported.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€čØ­å®šć•ć‚ŒćŸå°‘ćŖ恏ćØ悂ļ¼‘恤恮ć‚æć‚¤ćƒŸćƒ³ć‚°ć§ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć®ę¤œęŸ»ćŒč”Œć‚ć‚Œć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫恮ē•°åøø悒äø€å±¤ę¤œēŸ„恗悄恙恏态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć™ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the nozzle condition is inspected at at least one set timing, making it easier to detect nozzle abnormalities and reducing the drop in component pickup rate and mounting misalignment.

ļ¼ˆļ¼—ļ¼‰å‰čØ˜ę’®åƒéƒØćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć‚‹ę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ćØć€å‰čØ˜ę’®åƒę–¹å‘ć«ć¤ć„ć¦å‰čØ˜ę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ćØćØć‚‚ć«å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ęŒŸć‚€ć‚ˆć†ć«é…ć•ć‚Œć‚‹ę¤œęŸ»ē”Øē…§ę˜ŽćØć€ć‚’å‚™ćˆć€å‰čØ˜ę¤œęŸ»ē”Øē…§ę˜Žć®å…‰ęŗćÆå¹³č”Œå…‰ć§ć‚ć‚‹ć“ćØćŒå„½ć¾ć—ć„ć€‚ (7) It is preferable that the imaging unit includes an inspection camera that images the nozzle and an inspection light arranged to sandwich the nozzle together with the inspection camera in the imaging direction, and that the light source of the inspection light is a parallel light.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ę¤œęŸ»ē”Øē…§ę˜Žć®å…‰ęŗćŒå¹³č”Œå…‰ć§ć‚ć‚‹ć‹ć‚‰ć€č¤‡ę•°ć®ę’®åƒē”»åƒć«åŸŗć„ć„ć¦ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØ恮悵悤ć‚ŗć‚’ę­£ē¢ŗ恫ē®—å‡ŗ恗悄恙恏态惎ć‚ŗ惫恮ē•°åøø悒äø€å±¤ę¤œēŸ„恗悄恙恄怂 With this configuration, the light source for the inspection illumination is parallel light, making it easier to accurately calculate the size of the nozzle tip based on multiple captured images, and making it easier to detect nozzle abnormalities.

ļ¼»ęœ¬é–‹ē¤ŗć®å®Ÿę–½å½¢ę…‹ļ¼‘ć®č©³ē“°ļ¼½
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[Details of the First Embodiment of the Present Disclosure]
A first embodiment of the present disclosure will be described with reference to Figures 1 to 13. Note that the present disclosure is not limited to these examples, but is intended to include all modifications within the scope of the claims and meaning equivalent thereto. As shown in Figure 1, the first embodiment illustrates a component mounting device 10 that mounts components such as electronic components (not shown) on a board B such as a printed circuit board.

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éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ćÆć€å›³ļ¼‘恫ē¤ŗć™ć‚ˆć†ć«ć€åŸŗ台ļ¼‘ļ¼‘ćØ态åŸŗęæļ¼¢ć‚’ę¬é€ć™ć‚‹ę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ćØć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ćØć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć‚’åŸŗ台ļ¼‘ļ¼‘äøŠć«ć¦ē§»å‹•ć•ć›ć‚‹é§†å‹•č£…ē½®ļ¼’ļ¼ćØć‚’å‚™ćˆć¦ć„ć‚‹ć€‚ćŖ恊态仄äø‹ć®čŖ¬ę˜Žć«ćŠć„恦态åŸŗ台ļ¼‘ļ¼‘ć®é•·ę‰‹ę–¹å‘ļ¼ˆå›³ļ¼‘ć®å·¦å³ę–¹å‘ļ¼‰ć‚’å·¦å³ę–¹å‘ć€åŸŗ台ļ¼‘ļ¼‘ć®å„„č”Œę–¹å‘ļ¼ˆå›³ļ¼‘恮äøŠäø‹ę–¹å‘ļ¼‰ć‚’å‰å¾Œę–¹å‘ć€å›³ļ¼‘恮ē“™é¢åž‚ē›“ę–¹å‘ć‚’äøŠäø‹ę–¹å‘ćØć™ć‚‹ć€‚å„å›³ć«ćŠć„ć¦ć€ļ¼øę–¹å‘ćÆå³ę–¹ć€ļ¼¹ę–¹å‘ćÆå‰ę–¹ć€ļ¼ŗę–¹å‘ćÆäøŠę–¹ć‚’ē¤ŗ恗恦恄悋怂
<Overall configuration of component mounting device>
1, the component mounting apparatus 10 includes a base 11, a transport conveyor 14 for transporting the board B, a head unit 30, and a drive device 20 for moving the head unit 30 on the base 11. In the following description, the longitudinal direction of the base 11 (left-right direction in FIG. 1) is referred to as the left-right direction, the depth direction of the base 11 (up-down direction in FIG. 1) is referred to as the front-rear direction, and the direction perpendicular to the paper surface of FIG. 1 is referred to as the up-down direction. In each figure, the X direction indicates the right, the Y direction indicates the front, and the Z direction indicates the upward direction.

ę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ćÆ态åŸŗ台ļ¼‘ļ¼‘恮äø­å¤®ć«é…ē½®ć•ć‚Œć¦ć„ć‚‹ć€‚ę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ćÆå·¦å³ę–¹å‘ć«å¾Ŗē’°é§†å‹•ć™ć‚‹äø€åÆ¾ć®ę¬é€ćƒ™ćƒ«ćƒˆļ¼‘ļ¼•ć‚’å‚™ćˆć¦ćŠć‚Šć€ę¬é€ćƒ™ćƒ«ćƒˆļ¼‘ļ¼•äøŠć®åŸŗęæļ¼¢ć‚’ć€ę¬é€ćƒ™ćƒ«ćƒˆļ¼‘ļ¼•ćØć®ę‘©ę“¦ć«ć‚ˆć‚Šå³ę–¹ć«ę¬é€ć™ć‚‹ć€‚ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆ态åŸŗęæļ¼¢ćÆć€å·¦å“ć‚ˆć‚Šę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ć‚’é€šć˜ć¦éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć®å†…éƒØćøćØę¬å…„ć•ć‚Œć‚‹ć€‚ę¬å…„ć•ć‚ŒćŸåŸŗęæļ¼¢ćÆć€ę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ć«ć‚ˆć‚ŠåŸŗ台ļ¼‘ļ¼‘恮äø­å¤®ć®ä½œę„­ä½ē½®ć¾ć§é‹ć°ć‚Œć€ćć“ć§åœę­¢ć•ć‚Œć‚‹ć€‚ The transport conveyor 14 is disposed in the center of the base 11. The transport conveyor 14 is equipped with a pair of transport belts 15 that are driven in a circulating manner in the left-right direction, and transports the board B on the transport belts 15 to the right by friction with the transport belts 15. In this embodiment, the board B is carried into the component mounting device 10 from the left side through the transport conveyor 14. The carried-in board B is carried by the transport conveyor 14 to a working position in the center of the base 11, where it is stopped.

åŸŗ台ļ¼‘ļ¼‘äøŠć«ćÆć€ä½œę„­ä½ē½®ć®å‘Øå›²ć‚’å›²ć‚€ć‚ˆć†ć«ć—ć¦ć€éƒØ品供ēµ¦éƒØļ¼‘ļ¼’ćŒļ¼”ē®‡ę‰€čØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚å„éƒØ品供ēµ¦éƒØļ¼‘ļ¼’恫ćÆ态éƒØå“ć‚’ä¾›ēµ¦ć™ć‚‹ćƒ•ć‚£ćƒ¼ćƒ€ļ¼‘ļ¼“ćŒå·¦å³ę–¹å‘ć«éš£ęŽ„ć—ć¦å¤šę•°čØ­ē½®ć•ć‚Œć¦ć„悋怂 Four part supply units 12 are provided on the base 11, surrounding the work position. Each part supply unit 12 has multiple feeders 13 adjacent to each other in the left-right direction that supply parts.

ä½œę„­ä½ē½®ć§ćÆć€ćƒ•ć‚£ćƒ¼ćƒ€ļ¼‘ļ¼“ć«ć‚ˆć‚ŠéƒØå“ćŒä¾›ēµ¦ć•ć‚Œć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼‘ć«ć‚ˆć‚ŠéƒØå“ćŒåŸŗęæļ¼¢äøŠć«å®Ÿč£…ć•ć‚Œć‚‹ć€‚ćć®å¾Œć€éƒØå“ćŒå®Ÿč£…ć•ć‚ŒćŸåŸŗęæļ¼¢ćÆę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ć‚’é€šć˜ć¦å³ę–¹ć«é‹ć°ć‚Œć€éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć®å¤–éƒØ恫ꐬå‡ŗć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚ At the work position, components are supplied by the feeder 13, and the components are mounted on the board B by the mounting head 31 of the head unit 30. The board B on which the components are mounted is then transported to the right via the transport conveyor 14 and taken out of the component mounting device 10.

é§†å‹•č£…ē½®ļ¼’ļ¼ćÆć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć‚’ę‰€å®šć®åÆ動ēÆ„å›²å†…ć§ļ¼øč»øę–¹å‘ćŠć‚ˆć³ļ¼¹č»øę–¹å‘ć«ę¬é€ć™ć‚‹ć‚‚ć®ć§ć‚ć‚‹ć€‚é§†å‹•č£…ē½®ļ¼’ļ¼ćÆć€å›³ļ¼‘恫ē¤ŗć™ć‚ˆć†ć«ć€ļ¼øč»øćƒ“ćƒ¼ćƒ ļ¼’ļ¼‘态ļ¼¹č»øćƒ•ćƒ¬ćƒ¼ćƒ ļ¼’ļ¼’态ļ¼øč»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼’ļ¼“态ļ¼¹č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼’ļ¼”ćŖć©ć‚’å‚™ćˆć¦ć„ć‚‹ć€‚ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ćÆ态ļ¼øč»øćƒ“ćƒ¼ćƒ ļ¼’ļ¼‘恫ę”Æꌁ恕悌态ļ¼øč»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼’ļ¼“ć«ć‚ˆć‚Šļ¼øč»øę–¹å‘ć«å¾€å¾©ē§»å‹•åÆčƒ½ćØćŖć£ć¦ć„ć‚‹ć€‚ļ¼øč»øćƒ“ćƒ¼ćƒ ļ¼’ļ¼‘ćÆ态ļ¼¹č»øćƒ•ćƒ¬ćƒ¼ćƒ ļ¼’ļ¼’恫ę”Æꌁ恕悌态ļ¼¹č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼’ļ¼”ć«ć‚ˆć‚Šļ¼¹č»øę–¹å‘ć«å¾€å¾©ē§»å‹•åÆčƒ½ćØćŖć£ć¦ć„ć‚‹ć€‚ The driving device 20 transports the head unit 30 in the X-axis direction and the Y-axis direction within a predetermined movable range. As shown in FIG. 1, the driving device 20 includes an X-axis beam 21, a Y-axis frame 22, an X-axis servo motor 23, and a Y-axis servo motor 24. The head unit 30 is supported by the X-axis beam 21, and can be moved back and forth in the X-axis direction by the X-axis servo motor 23. The X-axis beam 21 is supported by the Y-axis frame 22, and can be moved back and forth in the Y-axis direction by the Y-axis servo motor 24.

ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ćÆć€å›³ļ¼‘ćŠć‚ˆć³å›³ļ¼’恫ē¤ŗć™ć‚ˆć†ć«ć€ē®±å½¢ēŠ¶ć‚’ćŖć™ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆęœ¬ä½“ļ¼“ļ¼‘ćØ态éƒØå“ć®å®Ÿč£…å‹•ä½œć‚’č”Œć†ļ¼“ć¤ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćØć€å„å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć‚’ę’®åƒć™ć‚‹ćŸć‚ć®ę’®åƒéƒØļ¼”ļ¼ćØć€ć‚’ęœ‰ć—ć¦ć„ć‚‹ć€‚ As shown in Figures 1 and 2, the head unit 30 has a box-shaped head unit body 31, three mounting heads 32 that perform component mounting operations, and an imaging unit 40 for imaging each mounting head 32.

å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćÆć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆęœ¬ä½“ļ¼“ļ¼‘恋悉äø‹ę–¹ć«ēŖå‡ŗć—ćŸå½¢ę…‹ćØć•ć‚Œć¦ć„ć‚‹ć€‚å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćÆć€å›³ļ¼’恫ē¤ŗć™ć‚ˆć†ć«ć€äøŠäø‹ę–¹å‘ć«å»¶ć³ć‚‹ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ćØć€ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“恮äø‹ē«ÆéƒØ恫ē€č„±åÆčƒ½ćØ恕悌悋惎ć‚ŗ惫ļ¼–ļ¼ćØć€ć‚’ęœ‰ć—ć¦ć„ć‚‹ć€‚å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’恮äø­åæƒć‚’通悊态äøŠäø‹ę–¹å‘ļ¼ˆč»øę–¹å‘ć®äø€ä¾‹ļ¼‰ć«ć®ć³ć‚‹ē·šćÆč»øē·šļ¼¬ćØć•ć‚Œć¦ćŠć‚Šć€ćƒŽć‚ŗ惫ļ¼–ļ¼ćÆå®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’恮č»øē·šļ¼¬äøŠć«č£…ē€ć•ć‚Œć¦ć„ć‚‹ć€‚å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’恫ćÆć€å›³ē¤ŗ恗ćŖ恄ć‚Øć‚¢ä¾›ēµ¦č£…ē½®ć‹ć‚‰č² åœ§ćŒä¾›ēµ¦ć•ć‚Œć‚‹ć“ćØ恧态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恫åøå¼•åŠ›ćŒē”Ÿć˜ć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚ć“ć‚Œć«ć‚ˆć‚Šć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć«ć‚ˆć‚‹éƒØå“ć®åøē€ćŠć‚ˆć³å®Ÿč£…ćŒåÆčƒ½ćØć•ć‚Œć¦ć„ć‚‹ć€‚ The mounting head 32 protrudes downward from the head unit body 31. As shown in FIG. 2, the mounting head 32 has a shaft 33 that extends in the vertical direction, and a nozzle 60 that is detachable from the lower end of the shaft 33. A line that passes through the center of the mounting head 32 and extends in the vertical direction (an example of the axial direction) is the axis L, and the nozzle 60 is attached to the axis L of the mounting head 32. Negative pressure is supplied to the mounting head 32 from an air supply device (not shown), generating a suction force at the tip 61 of the nozzle 60. This allows the nozzle 60 to pick up and mount components.

ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“恫ćÆć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆęœ¬ä½“ļ¼“ļ¼‘å†…ć«čØ­ć‘ć‚‰ć‚ŒćŸļ¼ŗč»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼ˆå›³ē¤ŗ恛恚ļ¼‰ćŒå–ć‚Šä»˜ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ļ¼ˆćŠć‚ˆć³ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼‰ćÆ态ļ¼ŗč»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æć«ć‚ˆć£ć¦äøŠäø‹ę–¹å‘ć«ę˜‡é™åÆčƒ½ćØć•ć‚Œć¦ć„ć‚‹ć€‚ A Z-axis servo motor (not shown) is attached to the shaft 33 and is provided inside the head unit body 31. The shaft 33 (and the nozzle 60) can be raised and lowered in the vertical direction by the Z-axis servo motor.

ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆć€å›³ļ¼“恫ē¤ŗć™ć‚ˆć†ć«ć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć®ļ¼“ć¤ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ļ¼ˆć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ļ¼‰ć«åÆ¾ć—ć¦ļ¼‘恤恮ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ļ¼ˆå›žč»¢ę©Ÿę§‹ć®äø€ä¾‹ļ¼‰ćŒčØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć®å¤–å‘Ø恫ćÆé§†å‹•ćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼–ļ¼”ćŒć€ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ć®å¤–å‘Ø恫ćÆć‚·ćƒ£ćƒ•ćƒˆćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼“ļ¼”恌čØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚é§†å‹•ćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼–ļ¼”ćŠć‚ˆć³ć‚·ćƒ£ćƒ•ćƒˆćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼“ļ¼”恫ćÆć€ćƒ™ćƒ«ćƒˆļ¼“ļ¼—ćŒć‹ć‘ęø”ć•ć‚Œć¦ć„ć‚‹ć€‚ćƒ™ćƒ«ćƒˆļ¼“ļ¼—ćÆć€é§†å‹•ćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼–ļ¼”ćŠć‚ˆć³ć‚·ćƒ£ćƒ•ćƒˆćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼“ļ¼”ć®ä»–ć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć«čØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹č£œåŠ©ćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼˜ć«ć‚‚恋恑ęø”ć•ć‚Œć¦ć„ć‚‹ć€‚ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć‚’é§†å‹•ć™ć‚‹ćØć€é§†å‹•ćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼–ļ¼”恫恋恑ęø”ć•ć‚ŒćŸćƒ™ćƒ«ćƒˆļ¼“ļ¼—ć‚’ä»‹ć—ć¦ć‚·ćƒ£ćƒ•ćƒˆćƒ—ćƒ¼ćƒŖćƒ¼ļ¼“ļ¼“ļ¼”恫ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć®å›žč»¢ćŒä¼é”ć•ć‚Œć‚‹ć€‚ć“ć‚Œć«ć‚ˆć‚Šć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ļ¼ˆćŠć‚ˆć³ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼‰ćŒč»øē·šļ¼¬ć®å›žć‚Šć«å›žč»¢ć™ć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚ In this embodiment, as shown in FIG. 3, one R-axis servo motor 36 (an example of a rotation mechanism) is provided for each of the three mounting heads 32 (shafts 33) of the head unit 30. A drive pulley 36A is provided on the outer periphery of the R-axis servo motor 36, and a shaft pulley 33A is provided on the outer periphery of the shaft 33. A belt 37 is stretched between the drive pulley 36A and the shaft pulley 33A. The belt 37 is also stretched between the drive pulley 36A and the shaft pulley 33A, as well as the auxiliary pulley 38 provided in the head unit 30. When the R-axis servo motor 36 is driven, the rotation of the R-axis servo motor 36 is transmitted to the shaft pulley 33A via the belt 37 stretched around the drive pulley 36A. This causes the shaft 33 (and the nozzle 60) to rotate around the axis L.

ęœ¬å®Ÿę–½å½¢ę…‹ć®ę’®åƒéƒØļ¼”ļ¼ćÆć€å›³ļ¼‘恫ē¤ŗć™ć‚ˆć†ć«ć€ļ¼“ć¤ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć®ćć‚Œćžć‚Œć«ć¤ć„ć¦ļ¼‘恤恚恤čØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚å›³ļ¼’恫ē¤ŗć™ć‚ˆć†ć«ć€ę’®åƒéƒØļ¼”ļ¼ćÆć€å„å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć®å¾Œę–¹ć«čØ­ć‘ć‚‰ć‚Œć‚‹ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘ļ¼ˆę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ć®äø€ä¾‹ļ¼‰ćØć€å„å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć®å‰ę–¹ć«čØ­ć‘ć‚‰ć‚Œć‚‹ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ļ¼ˆę¤œęŸ»ē”Øē…§ę˜Žć®äø€ä¾‹ļ¼‰ćØć€ć‚’å‚™ćˆć‚‹ć€‚ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘ćØē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ćÆć€å‰å¾Œę–¹å‘ć«å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć‚’ęŒŸć‚€ć‚ˆć†ć«é…ē½®ć•ć‚Œć¦ć„ć‚‹ć€‚ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚Šć€å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’恮äø‹ē«ÆéƒØå‘Øč¾ŗ态恙ćŖć‚ć”ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚„ćƒŽć‚ŗ惫ļ¼–ļ¼ć«åøē€ć•ć‚ŒćŸéƒØå“ć‚’å‰å¾Œę–¹å‘ļ¼ˆę’®åƒę–¹å‘恮äø€ä¾‹ļ¼‰ć‹ć‚‰ę’®åƒć™ć‚‹ć“ćØ恌恧恍悋怂 As shown in FIG. 1, the imaging unit 40 of this embodiment is provided for each of the three mounting heads 32. As shown in FIG. 2, the imaging unit 40 includes a first camera 41 (an example of an inspection camera) provided behind each mounting head 32, and a first light 42 (an example of an inspection light) provided in front of each mounting head 32. The first camera 41 and the first light 42 are arranged to sandwich the mounting head 32 in the front-rear direction. The imaging unit 40 can capture images of the periphery of the lower end of the mounting head 32, i.e., the nozzle 60 and the component adsorbed to the nozzle 60, from the front-rear direction (an example of the imaging direction).

図ļ¼”ļ¼ˆļ¼”ļ¼‰ć«ē¤ŗć™ć‚ˆć†ć«ć€ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’恋悉å‡ŗå°„ć•ć‚ŒćŸå…‰ćÆ态åÆ¾č±”ē‰©ć®å‘Øć‚Šć‚’é€éŽć—ć¦ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘ć®ćƒ¬ćƒ³ć‚ŗć«å…„å°„ć•ć‚Œć‚‹ć€‚ć™ćŖć‚ć”ć€ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘ćÆé€éŽå…‰ć‚’ę’®åƒć™ć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚ć“ć®ćŸć‚ć€å›³ļ¼”ļ¼ˆļ¼¢ļ¼‰ć«ē¤ŗć™ć‚ˆć†ć«ć€å¾—ć‚‰ć‚ŒćŸę’®åƒē”»åƒć«ćŠć„恦åÆ¾č±”ē‰©ćÆć‚·ćƒ«ć‚Ø惃惈ļ¼ˆē¶²ęŽ›ć‘éƒØåˆ†ć§ē¤ŗ恙ļ¼‰ćØ恗恦ē¾ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚ćŖćŠć€å›³ļ¼”ļ¼ˆļ¼”ļ¼‰ćÆē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’态åÆ¾č±”ē‰©ć§ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć€ćŠć‚ˆć³ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘恮äøŠäø‹ę–¹å‘ć‹ć‚‰č¦‹ćŸä½ē½®é–¢äæ‚ć‚’ē¤ŗ恙ęØ”å¼å›³ć§ć‚ć‚Šć€å›³ļ¼”ļ¼ˆļ¼¢ļ¼‰ćÆ図ļ¼”ļ¼ˆļ¼”ļ¼‰ć®ēŠ¶ę…‹ć§ę’®åƒć•ć‚ŒćŸę’®åƒē”»åƒć‚’ē¤ŗć™å›³ć§ć‚ć‚‹ć€‚ę’®åƒē”»åƒć§ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恫åƾåæœć™ć‚‹ć‚·ćƒ«ć‚Ø惃惈恮ćæ恌ē¤ŗć•ć‚Œć¦ćŠć‚Šć€å›³ē¤ŗäøŠäø‹ę–¹å‘ćÆ惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®é«˜ć•ę–¹å‘ļ¼ˆļ¼ŗę–¹å‘ļ¼‰ć«åƾåæœć—ć¦ć„ć‚‹ć€‚å›³ļ¼•ćÆ図ļ¼”ćØåŒę§˜ć«č”Øć•ć‚ŒćŸå›³ć§ć‚ć‚‹ćŒć€ę¬”čæ°ć™ć‚‹ć‚ˆć†ć«ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’恫ä½æē”Øć™ć‚‹å…‰ęŗćŒē•°ćŖć£ć¦ć„ć‚‹ć€‚ As shown in FIG. 4(A), the light emitted from the first lighting 42 passes around the object and enters the lens of the first camera 41. That is, the first camera 41 captures the transmitted light. Therefore, as shown in FIG. 4(B), the object appears as a silhouette (shown by the shaded area) in the captured image. Note that FIG. 4(A) is a schematic diagram showing the positional relationship of the first lighting 42, the tip 61 of the nozzle 60, which is the object, and the first camera 41, as viewed from the top and bottom, and FIG. 4(B) is a diagram showing the captured image captured in the state of FIG. 4(A). In the captured image, only the silhouette corresponding to the tip 61 of the nozzle 60 is shown, and the vertical direction in the figure corresponds to the height direction (Z direction) of the tip 61 of the nozzle 60. FIG. 5 is a diagram similar to FIG. 4, but the light source used for the first lighting 42 is different, as described below.

ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ć®å…‰ęŗć«ćÆć€å›³ļ¼”ļ¼ˆļ¼”ļ¼‰ć«ē¤ŗ恙悈恆ćŖå¹³č”Œå…‰ć‚’ē”Øć„ć¦ć‚‚ć‚ˆć„ć—ć€å›³ļ¼•ļ¼ˆļ¼”ļ¼‰ć«ē¤ŗ恙悈恆ćŖę‹”ę•£å…‰ć‚’ē”Øć„ć¦ć‚‚ć‚ˆć„ć€‚ćŸć ć—ć€ę‹”ę•£å…‰ć‚’ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ć®å…‰ęŗćØć—ćŸå “åˆć€åÆ¾č±”ē‰©ļ¼ˆå›³ļ¼•ć§ćÆ惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ļ¼‰ć®å“é¢ć«å…‰ćŒå›žć‚Šč¾¼ć‚€ć€‚ć“ć®ćŸć‚ć€å›³ļ¼•ļ¼ˆļ¼¢ļ¼‰ć«ē¤ŗć™ć‚ˆć†ć«ć€ę’®åƒē”»åƒć®ć‚·ćƒ«ć‚Øćƒƒćƒˆć®å·¦å³ę–¹å‘ć®ē«ÆéƒØć®ć‚³ćƒ³ćƒˆćƒ©ć‚¹ćƒˆćŒäøę˜Žēž­ć«ćŖć‚‹ć€‚ć—ćŸćŒć£ć¦ć€åÆ¾č±”ē‰©ć®ć‚µć‚¤ć‚ŗć‚’ę­£ē¢ŗ恫č؈ęø¬ć™ć‚‹ćŸć‚ć«ćÆć€å…‰ć®å›žć‚Šč¾¼ćæ恌ē™ŗē”Ÿć—ćŖć„å¹³č”Œå…‰ć‚’ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ć®å…‰ęŗćØ恙悋恓ćØćŒć‚ˆć‚Šå„½ć¾ć—ć„ć€‚ä»„äø‹ć§ćÆ态ē°”å˜ć®ćŸć‚ć€å¹³č”Œå…‰ć‚’ē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ć®å…‰ęŗć«ē”Øć„ćŸå “åˆć«ć¤ć„ć¦čŖ¬ę˜Žć™ć‚‹ć€‚ The light source of the first illumination 42 may be parallel light as shown in FIG. 4(A) or diffuse light as shown in FIG. 5(A). However, if diffuse light is used as the light source of the first illumination 42, the light will wrap around the side of the object (tip 61 of the nozzle 60 in FIG. 5). For this reason, as shown in FIG. 5(B), the contrast of the left and right ends of the silhouette in the captured image becomes unclear. Therefore, in order to accurately measure the size of the object, it is more preferable to use parallel light, which does not wrap around, as the light source of the first illumination 42. For simplicity, the following describes the case where parallel light is used as the light source of the first illumination 42.

図ļ¼‘恫ē¤ŗć™ć‚ˆć†ć«ć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć«ćÆē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ćŒę’®åƒé¢ć‚’äø‹ć«å‘ć‘ćŸēŠ¶ę…‹ć§é…ē½®ć•ć‚Œć¦ć„悋怂ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ćÆ态åŸŗęæļ¼¢ć®ä½ē½®ćŠć‚ˆć³å§æå‹¢ć‚’čŖč­˜ć™ć‚‹ćŸć‚ć«ć€åŸŗęæļ¼¢ć®ćƒ•ć‚£ćƒ‡ćƒ„ćƒ¼ć‚·ćƒ£ćƒ«ćƒžćƒ¼ć‚Æļ¼ˆå›³ē¤ŗ恛恚ļ¼‰ć‚’ę’®åƒć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚ć¾ćŸć€ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć®čæ‘å‚ć«ćÆē¬¬ļ¼’ē…§ę˜Žļ¼•ļ¼‘ļ¼ˆå›³ļ¼–参ē…§ļ¼‰ćŒčØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼’ē…§ę˜Žļ¼•ļ¼‘ćÆ态ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć®ę’®åƒę™‚恫åÆč¦–å…‰ć‚’åŸŗęæļ¼¢ć«ē…§å°„ć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚ć“ć‚Œć«ć‚ˆć‚Šć€ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć«ć‚ˆć‚ŠåŸŗęæļ¼¢ć‚’é®®ę˜Žć«ę’®åƒć™ć‚‹ć“ćØ恌恧恍悋怂 As shown in FIG. 1, a second camera 50 is disposed on the head unit 30 with its imaging surface facing downward. The second camera 50 is configured to capture an image of a fiducial mark (not shown) on the substrate B in order to recognize the position and orientation of the substrate B. In addition, a second illumination 51 (see FIG. 6) is provided near the second camera 50. The second illumination 51 is configured to irradiate the substrate B with visible light when the second camera 50 captures an image. This allows the second camera 50 to capture a clear image of the substrate B.

図ļ¼‘恫ē¤ŗć™ć‚ˆć†ć«ć€åŸŗ台ļ¼‘ļ¼‘äøŠć«ćÆē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ćŒę’®åƒé¢ć‚’äøŠć«å‘ć‘ć¦é…ē½®ć•ć‚Œć¦ć„悋怂ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć«åøē€ć•ć‚ŒćŸéƒØå“ć®ē”»åƒļ¼ˆäø‹é¢ē”»åƒļ¼‰ć‚’ę’®åƒć—ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć«ć‚ˆć‚‹éƒØå“ć®åøē€å§æå‹¢ć‚’ę¤œå‡ŗć™ć‚‹ć€‚ć¾ćŸć€ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’恮čæ‘å‚ć«ćÆ态ē¬¬ļ¼“ē…§ę˜Žļ¼•ļ¼“ļ¼ˆå›³ļ¼–参ē…§ļ¼‰ćŒčØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼“ē…§ę˜Žļ¼•ļ¼“ćÆ态ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ć®ę’®åƒę™‚ć«åÆč¦–å…‰ć‚’ćƒŽć‚ŗ惫ļ¼–ļ¼ć«åøē€ć•ć‚ŒćŸéƒØå“ć«ē…§å°„ć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚ć“ć‚Œć«ć‚ˆć‚Šć€ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć«åøē€ć•ć‚ŒćŸéƒØå“ć‚’é®®ę˜Žć«ę’®åƒć™ć‚‹ć“ćØ恌åÆčƒ½ć§ć‚ć‚‹ć€‚ As shown in FIG. 1, a third camera 52 is disposed on the base 11 with its imaging surface facing upward. The third camera 52 captures an image (bottom image) of the component picked up by the nozzle 60, and detects the suction posture of the component by the nozzle 60. In addition, a third illumination 53 (see FIG. 6) is provided near the third camera 52. The third illumination 53 is configured to irradiate the component picked up by the nozzle 60 with visible light when the third camera 52 captures an image. This allows the third camera 52 to clearly capture an image of the component picked up by the nozzle 60.

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ꬔ恫态éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć®é›»ę°—ēš„ę§‹ęˆć‚’ć€å›³ļ¼–ć‚’å‚ē…§ć—恦čŖ¬ę˜Žć™ć‚‹ć€‚éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ćÆ态ļ¼£ļ¼°ļ¼µļ¼ˆäø­å¤®ę¼”ē®—処ē†č£…ē½®ļ¼‰ļ¼˜ļ¼‘ćØ态čØ˜ę†¶éƒØļ¼˜ļ¼’ćØć€ćƒ”ćƒ¢ćƒŖļ¼˜ļ¼“ćØ态č”Øē¤ŗéƒØļ¼˜ļ¼”ćØć€å…„åŠ›č£…ē½®ļ¼˜ļ¼•ćØć€ćƒ¢ćƒ¼ć‚æć‚³ćƒ³ćƒˆćƒ­ćƒ¼ćƒ©ļ¼˜ļ¼–ćØć€ć‚«ćƒ”ćƒ©ļ¼©ļ¼ļ¼¦ļ¼˜ļ¼—ćØ态ē…§ę˜Žć‚³ćƒ³ćƒˆćƒ­ćƒ¼ćƒ©ļ¼˜ļ¼˜ćØć€å„ēØ®ļ¼©ļ¼ļ¼Æļ¼˜ļ¼™ćØć€ćƒ¢ćƒ¼ć‚æć‚¢ćƒ³ćƒ—ļ¼™ļ¼ćØć€ćƒ¢ćƒ¼ć‚æļ¼™ļ¼‘ćØć‚’å‚™ćˆć¦ć„ć‚‹ć€‚ćŖ恊态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆć€åˆ¶å¾”éƒØ恮äø€ä¾‹ć§ć‚悋怂
<Electrical configuration of component mounter>
Next, the electrical configuration of the component mounting device 10 will be described with reference to Fig. 6. The component mounting device 10 includes a CPU (Central Processing Unit) 81, a storage unit 82, a memory 83, a display unit 84, an input device 85, a motor controller 86, a camera I/F 87, a lighting controller 88, various I/Os 89, a motor amplifier 90, and a motor 91. The CPU 81 is an example of a control unit.

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆć€å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć«ć‚ˆć‚‹éƒØå“å®Ÿč£…å‹•ä½œć‚’åˆ¶å¾”ć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚å…·ä½“ēš„恫ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态äø€åÆ¾ć®ę¬é€ć‚³ćƒ³ćƒ™ć‚¢ļ¼‘ļ¼”ć«ć‚ˆć‚‹åŸŗęæļ¼¢ć®ę¬é€å‹•ä½œć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć«ć‚ˆć‚‹å®Ÿč£…å‹•ä½œć€ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘态ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć€ćŠć‚ˆć³ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ć«ć‚ˆć‚‹ę’®åƒå‹•ä½œćŖ恩态éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć®å…Øä½“ć®å‹•ä½œć‚’åˆ¶å¾”ć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚ The CPU 81 is configured to control the component mounting operation by the mounting head 32. Specifically, the CPU 81 is configured to control the overall operation of the component mounting device 10, such as the transport operation of the board B by the pair of transport conveyors 14, the mounting operation by the head unit 30, and the imaging operation by the first camera 41, the second camera 50, and the third camera 52.

čØ˜ę†¶éƒØļ¼˜ļ¼’恫ćÆ态åŸŗęæļ¼¢ć«éƒØå“ć‚’å®Ÿč£…ć™ć‚‹ćŸć‚ć®å®Ÿč£…ćƒ—ćƒ­ć‚°ćƒ©ćƒ ć‚„å„ēØ®ćƒ‡ćƒ¼ć‚æćŖć©ćŒčØ˜ę†¶ć•ć‚Œć¦ć„ć‚‹ć€‚å„ēØ®ćƒ‡ćƒ¼ć‚æ恫ćÆ态ē”Ÿē”£ćŒäŗˆå®šć•ć‚Œć¦ć„ć‚‹åŸŗęæļ¼¢ć®åÆøę³•ć‚„ę¬é€é€Ÿåŗ¦ć«é–¢ć™ć‚‹åŸŗęæęƒ…å ±ć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć«č£…ē€ć•ć‚Œć¦ć„ć‚‹ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ć‚„ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č­˜åˆ„ęƒ…å ±ć€ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘态ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć€ćŠć‚ˆć³ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ć«ć‚ˆć£ć¦ęø¬å®šć•ć‚ŒćŸåÆ¾č±”ē‰©ć®ä½ē½®ć€ćŠć‚ˆć³åÆ¾č±”ē‰©ć®ä½ē½®ćšć‚Œć‚’åˆ¤ę–­ć™ć‚‹ćŸć‚ć®åŸŗęŗ–ćØćŖć‚‹ä½ē½®ćŖć©ćŒå«ć¾ć‚Œć¦ć„ć‚‹ć€‚čØ˜ę†¶éƒØļ¼˜ļ¼’ćÆć€ä¾‹ćˆć°ć€ļ¼Øļ¼¤ļ¼¤ļ¼ˆćƒćƒ¼ćƒ‰ćƒ‡ć‚£ć‚¹ć‚Æćƒ‰ćƒ©ć‚¤ćƒ–ļ¼‰ć‚„态ļ¼³ļ¼³ļ¼¤ļ¼ˆć‚½ćƒŖćƒƒćƒ‰ć‚¹ćƒ†ćƒ¼ćƒˆćƒ‰ćƒ©ć‚¤ćƒ–ļ¼‰ćŖć©ć‚’å«ć‚“ć§ć„ć‚‹ć€‚ The memory unit 82 stores a mounting program for mounting components on the board B and various data. The various data includes board information related to the dimensions and transport speed of the board B to be produced, identification information of the shaft 33 and nozzle 60 attached to the head unit 30, the position of the object measured by the first camera 41, the second camera 50, and the third camera 52, and a reference position for determining the positional deviation of the object. The memory unit 82 includes, for example, a hard disk drive (HDD) and a solid state drive (SSD).

ęœ¬å®Ÿę–½å½¢ę…‹ć®čØ˜ę†¶éƒØļ¼˜ļ¼’ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć«ē”Øć„ć‚‹ćƒ‘ćƒ©ćƒ”ćƒ¼ć‚æćØć—ć¦ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ悒čØ˜ę†¶ć—ć¦ć„ć‚‹ć€‚ęœ¬å®Ÿę–½å½¢ę…‹ć®ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ恫ćÆć€å¾Œčæ°ć™ć‚‹č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć€č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗćŒå«ć¾ć‚Œć¦ć„ć‚‹ć€‚ć“ć‚Œć‚‰ć®ćƒ‘ćƒ©ćƒ”ćƒ¼ć‚æćÆ惎ć‚ŗ惫ļ¼–ļ¼ć®ēخ锞ęÆŽć«čØ­å®šć•ć‚Œć¦ć„ć‚‹ć€‚ The memory unit 82 in this embodiment stores nozzle data as parameters used to inspect the state of the nozzle 60. The nozzle data in this embodiment includes multiple inspection angles and multiple standard sizes, which will be described later. These parameters are set for each type of nozzle 60.

ćƒ”ćƒ¢ćƒŖļ¼˜ļ¼“ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ć®å‹•ä½œć®éš›ć«ęƒ…å ±ćŒčØ˜ę†¶ć•ć‚Œć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚č”Øē¤ŗéƒØļ¼˜ļ¼”ćÆ态éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć®ēŠ¶ę…‹ć‚„态ē”Ÿē”£ć—恦恄悋åŸŗęæļ¼¢ć®ęƒ…å ±ćŖć©ćŒč”Øē¤ŗć•ć‚Œć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚å…„åŠ›č£…ē½®ļ¼˜ļ¼•ćÆć€ćƒ¦ćƒ¼ć‚¶ć®éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć«åÆ¾ć™ć‚‹ę“ä½œćŒå…„åŠ›ć•ć‚Œć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚å…„åŠ›č£…ē½®ļ¼˜ļ¼•ć«ćÆć€ä¾‹ćˆć°ć€ćƒžć‚¦ć‚¹ć€ć‚­ćƒ¼ćƒœćƒ¼ćƒ‰ć€ć‚¹ć‚¤ćƒƒćƒć€ć‚æćƒƒćƒćƒ‘ćƒćƒ«ćŖć©ćŒå«ć¾ć‚Œć‚‹ć€‚ The memory 83 is configured to store information when the CPU 81 is operating. The display unit 84 is configured to display the status of the component mounting device 10 and information about the board B being produced. The input device 85 is configured to input operations by the user for the component mounting device 10. The input device 85 includes, for example, a mouse, a keyboard, a switch, a touch panel, etc.

ćƒ¢ćƒ¼ć‚æć‚³ćƒ³ćƒˆćƒ­ćƒ¼ćƒ©ļ¼˜ļ¼–ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ć®åˆ¶å¾”ć«ć‚ˆć‚Šćƒ¢ćƒ¼ć‚æć‚¢ćƒ³ćƒ—ļ¼™ļ¼ć‚’ä»‹ć—ć¦å„ēØ®ćƒ¢ćƒ¼ć‚æļ¼™ļ¼‘ļ¼ˆļ¼øč»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼’ļ¼“态ļ¼¹č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼’ļ¼”态ļ¼ŗč»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æ态ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ćŖ恩ļ¼‰ć‚’é§†å‹•ć•ć›ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚ć‚«ćƒ”惩ļ¼©ļ¼ļ¼¦ļ¼ˆć‚¤ćƒ³ć‚æćƒ¼ćƒ•ć‚§ćƒ¼ć‚¹ļ¼‰ļ¼˜ļ¼—恫ćÆ态ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘态ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć€ćŠć‚ˆć³ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ćŒęŽ„ē¶šć•ć‚Œć¦ć„ć‚‹ć€‚ć¾ćŸć€ć‚«ćƒ”惩ļ¼©ļ¼ļ¼¦ļ¼˜ļ¼—ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘恫ꎄē¶šć•ć‚Œć¦ć„ć‚‹ć€‚ć“ć‚Œć«ć‚ˆć‚Šć€ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćØ态ē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘态ē¬¬ļ¼’ć‚«ćƒ”惩ļ¼•ļ¼ć€ćŠć‚ˆć³ē¬¬ļ¼“ć‚«ćƒ”惩ļ¼•ļ¼’ćØć‚’ćć‚Œćžć‚ŒęŽ„ē¶šć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„悋怂 The motor controller 86 is configured to drive various motors 91 (X-axis servo motor 23, Y-axis servo motor 24, Z-axis servo motor, R-axis servo motor 36, etc.) via a motor amplifier 90 under the control of the CPU 81. The first camera 41, the second camera 50, and the third camera 52 are connected to the camera I/F (interface) 87. The camera I/F 87 is also connected to the CPU 81. This is configured to connect the CPU 81 to the first camera 41, the second camera 50, and the third camera 52, respectively.

ē…§ę˜Žć‚³ćƒ³ćƒˆćƒ­ćƒ¼ćƒ©ļ¼˜ļ¼˜ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ć®åˆ¶å¾”ć«ć‚ˆć‚Šē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’态ē¬¬ļ¼’ē…§ę˜Žļ¼•ļ¼‘ć€ćŠć‚ˆć³ē¬¬ļ¼“ē…§ę˜Žļ¼•ļ¼“ć‚’é§†å‹•ć•ć›ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚å„ēØ®ļ¼©ļ¼ļ¼Æļ¼ˆå…„å‡ŗ力ļ¼‰ļ¼˜ļ¼™ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘恫åÆ¾ć—ć¦ć€å…„åŠ›ćŠć‚ˆć³å‡ŗåŠ›ć•ć‚Œć‚‹äæ”å·ć‚’åˆ¶å¾”ć™ć‚‹ć‚ˆć†ć«ę§‹ęˆć•ć‚Œć¦ć„ć‚‹ć€‚ The lighting controller 88 is configured to drive the first lighting 42, the second lighting 51, and the third lighting 53 under the control of the CPU 81. The various I/O (input/output) 89 are configured to control the signals input and output to the CPU 81.

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ęœ¬å®Ÿę–½å½¢ę…‹ć«äæ‚ć‚‹éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®å‘Øć‚Šć«å›žč»¢ć•ć›ć¦ć€äŗˆć‚čØ­å®šć•ć‚ŒćŸč¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«ćŠć„ć¦ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć™ć‚‹ć“ćØ恧态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹ć€‚ćć—ć¦ć€å–å¾—ć•ć‚ŒćŸļ¼‘恤仄äøŠć®ę’®åƒē”»åƒćØčØ˜ę†¶éƒØļ¼˜ļ¼’恫čØ˜ę†¶ć•ć‚ŒćŸćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć“ćØ悒ē‰¹å¾“ćØć—ć¦ć„ć‚‹ć€‚ć“ć“ć§ć„ć†ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ćØćÆć€ä¾‹ćˆć°ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēØ®é”žć‚„č£…ē€å§æå‹¢ćŒę­£ć—ć„ć‹ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ćŖ恄恋ē­‰ć‚’å«ć‚€ć€‚
<Inspection of nozzle condition>
The component mounting device 10 according to this embodiment acquires one or more captured images by rotating the nozzle 60 around the axis L and capturing images of the nozzle 60 with the imaging unit 40 at a plurality of preset inspection angles. Then, the device is characterized in that the state of the nozzle 60 is inspected based on the acquired one or more captured images and the nozzle data stored in the storage unit 82. The state of the nozzle 60 here includes, for example, whether the type and mounting posture of the nozzle 60 are correct, whether the tip 61 of the nozzle 60 is chipped, and the like.

åŸŗęæļ¼¢ć«å®Ÿč£…ć•ć‚Œć‚‹å°åž‹ć®éƒØ品ćÆć€é•·ę–¹å½¢ć®å½¢ēŠ¶ć‚’ęœ‰ć™ć‚‹ć“ćØćŒå¤šć„ć€‚ć“ć®ćŸć‚ć€å°åž‹ć®éƒØå“ć‚’åøē€ć™ć‚‹ćŸć‚ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®å½¢ēŠ¶ć‚‚ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č»øē·šļ¼¬ć®č»øę–¹å‘ļ¼ˆäøŠäø‹ę–¹å‘ļ¼‰ć«ē›“äŗ¤ć™ć‚‹ę–¹å‘恫ē“°é•·ć„å½¢ēŠ¶ć§ć‚悋恓ćØćŒå¤šć„ć€‚ä¾‹ćˆć°ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćÆć€å¹³é¢č¦–ć«ćŠć„ć¦é•·ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖć—ć¦ć„ć‚‹ć€‚ć“ć®ć‚ˆć†ćŖå°åž‹ć®éƒØ品ē”Øć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恫恊恄恦态角悄ē«Æ恮éƒØ分ćÆåæœåŠ›ć‚’å—ć‘ć‚„ć™ćć€ä¾‹ćˆć°ęč³Ŗć«ć‚ˆć£ć¦ćÆę¬ ć‘ć‚„ć™ć„ć€‚ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć«ę¬ ć‘ćŒē™ŗē”Ÿć™ć‚‹ćØ态惎ć‚ŗ惫ļ¼–ļ¼ć®åøē€åŠ›ćŒä½Žäø‹ć—恦态éƒØå“ć®åøē€å§æå‹¢ćŒäøå®‰å®šć«ćŖć£ćŸć‚Šć€éƒØå“ć‚’ę­£ć—ć„ä½ē½®ć«å®Ÿč£…恧恍ćŖ恏ćŖć£ćŸć‚Šć™ć‚‹å “åˆćŒć‚ć‚‹ć€‚ Small components mounted on the board B often have a rectangular shape. For this reason, the tip 61 of the nozzle 60 used to pick up small components is often elongated in a direction perpendicular to the axial direction (up and down direction) of the axis L of the nozzle 60. For example, the tip 61 of the nozzle 60 has a rectangular shape in a plan view. The corners and edges of the tip 61 of such nozzles 60 for small components are susceptible to stress, and may be prone to chipping, for example, depending on the material. If chipping occurs in the tip 61 of the nozzle 60, the suction power of the nozzle 60 decreases, which may cause the component to be picked up unstable or the component to be unable to be mounted in the correct position.

ęœ¬å®Ÿę–½å½¢ę…‹ć®éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ćÆ态仄äø‹ć«č©³ē“°ć«čŖ¬ę˜Žć™ć‚‹ć‚ˆć†ć«ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć€ē‰¹ć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć‚’ę¤œęŸ»ć™ć‚‹ć“ćØ恌恧恍悋恋悉态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ä½ē½®ē²¾åŗ¦ć®ä½Žäø‹ē­‰ć‚’ęŠ‘åˆ¶ć§ćć‚‹ć€‚ As described in detail below, the component mounting device 10 of this embodiment can inspect the condition of the nozzle 60, particularly the tip 61 of the nozzle 60 for chipping, thereby preventing a decrease in the component pickup rate and a decrease in mounting position accuracy.

図ļ¼—恫ē¤ŗć™ć‚ˆć†ć«ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćÆ态ļ¼”恤恮角éƒØļ¼–ļ¼’ļ¼”ļ½žļ¼–ļ¼’ļ¼¤ćØ态éƒØå“ć‚’åøē€ć™ć‚‹ćŸć‚ć®ļ¼’恤恮åøē€å­”ļ¼–ļ¼“ćØ态悒꜉恙悋怂ļ¼”恤恮角éƒØļ¼–ļ¼’ļ¼”ļ½žļ¼–ļ¼’ļ¼¤ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć«ćŠć„ć¦ę¬ ć‘ćŒē™ŗē”Ÿć—悄恙恄ē®‡ę‰€ćØćŖć£ć¦ć„ć‚‹ć€‚ä»„äø‹ć®čŖ¬ę˜Žć§ćÆ态ļ¼”恤恮角éƒØļ¼–ļ¼’ļ¼”ļ½žļ¼–ļ¼’ļ¼¤ć‚’ē‰¹ć«åŒŗåˆ„ć›ćšć«ļ¼”ć¤ć®ć†ć”ć®ć„ćšć‚Œć‹ć‚’ć€å˜ć«č§’éƒØļ¼–ļ¼’ćØ呼ē§°ć™ć‚‹å “åˆćŒć‚ć‚‹ć€‚ļ¼’恤恮åøē€å­”ļ¼–ļ¼“ćÆć€å¹³é¢č¦–ć«ćŠć„ć¦å††å½¢ēŠ¶ć§ć‚ć‚Šć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®é•·č¾ŗę–¹å‘ć«äø¦ć‚“恧čØ­ć‘ć‚‰ć‚Œć¦ć„ć‚‹ć€‚ As shown in FIG. 7, the tip 61 of the nozzle 60 has four corners 62A-62D and two suction holes 63 for suctioning components. The four corners 62A-62D are locations on the tip 61 of the nozzle 60 where chipping is likely to occur. In the following description, there are cases where the four corners 62A-62D are not differentiated from one another and any of the four is simply referred to as a corner 62. The two suction holes 63 are circular in plan view and are arranged side by side along the long side of the nozzle 60.

ļ¼œč¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ļ¼ž
惎ć‚ŗ惫ļ¼–ļ¼ć®č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆ态č»øę–¹å‘ļ¼ˆäøŠäø‹ę–¹å‘态ļ¼ŗę–¹å‘ļ¼‰ćŠć‚ˆć³ę’®åƒę–¹å‘ļ¼ˆå‰å¾Œę–¹å‘态ļ¼¹ę–¹å‘ļ¼‰ć®åŒę–¹ć«ē›“äŗ¤ć™ć‚‹å¹…ę–¹å‘ļ¼ˆå·¦å³ę–¹å‘态ļ¼øę–¹å‘ļ¼‰ć«ćŠć„ć¦ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮角éƒØļ¼–ļ¼’ćŒē«Æć«é…ć•ć‚Œć‚‹č§’åŗ¦ćØć•ć‚Œć¦ć„ć‚‹ć€‚ć™ćŖć‚ć”ć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć—ćŸč¤‡ę•°ć®ę’®åƒē”»åƒć«ćŠć„恦ćÆ态角éƒØļ¼–ļ¼’ćŒå·¦å³ę–¹å‘ć®ē«ÆéƒØć«é…ć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚
<Multiple inspection angles>
The multiple inspection angles of nozzle 60 are angles at which corners 62 of tip 61 of nozzle 60 are located at ends in a width direction (left-right direction, X direction) perpendicular to both the axial direction (up-down direction, Z direction) and the imaging direction (front-back direction, Y direction). That is, in multiple captured images of nozzle 60 at multiple inspection angles, corners 62 are located at ends in the left-right direction.

ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćØē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ćØ恋悉ćŖ悋怂ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ę’®åƒē”»åƒćÆ态ē¬¬ļ¼‘ę’®åƒē”»åƒćØć•ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼‘ę’®åƒē”»åƒć«ćŠć„恦态ļ¼’恤恮角éƒØļ¼–ļ¼’ļ¼”态ļ¼–ļ¼’ļ¼£ćŒć‚·ćƒ«ć‚Øćƒƒćƒˆć®å¹…ę–¹å‘ć®ē«ÆéƒØć«é…ć•ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ę’®åƒē”»åƒćÆ态ē¬¬ļ¼’ę’®åƒē”»åƒćØć•ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼’ę’®åƒē”»åƒć«ćŠć„恦态ļ¼’恤恮角éƒØļ¼–ļ¼’ļ¼¢ć€ļ¼–ļ¼’ļ¼¤ćŒć‚·ćƒ«ć‚Øćƒƒćƒˆć®å¹…ę–¹å‘ć®ē«ÆéƒØć«é…ć•ć‚Œć¦ć„ć‚‹ć€‚ In this embodiment, the multiple inspection angles include a first inspection angle and a second inspection angle. The captured image of the nozzle 60 at the first inspection angle is the first captured image. In the first captured image, the two corners 62A and 62C are located at the ends of the silhouette in the width direction. The captured image of the nozzle 60 at the second inspection angle is the second captured image. In the second captured image, the two corners 62B and 62D are located at the ends of the silhouette in the width direction.

ć¾ćŸć€ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ćŸēŠ¶ę…‹ć§ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮角éƒØļ¼–ļ¼’åŒå£«ć‚’ēµć‚“恠åÆ¾č§’ē·šćŒå¹…ę–¹å‘ļ¼ˆå·¦å³ę–¹å‘ļ¼‰ć«ć®ć³ć‚‹åŸŗęŗ–č»øļ¼³ļ¼”ć«å¹³č”ŒćØćŖć‚‹ć‚ˆć†ć«č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć‚’čØ­å®šć—ć¦ć„ć‚‹ć€‚ć“ć‚Œć«ć‚ˆć‚Šć€ę’®åƒē”»åƒć«ćŠć„ć¦ć‚·ćƒ«ć‚Øćƒƒćƒˆć®å¹…ę–¹å‘ć®åÆøę³•ć‚’å¤§ććć™ć‚‹ć“ćØ恌恧恍态惎ć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ć•ć‚‰ć«ę¤œęŸ»ć—ć‚„ć™ć„ć€‚ In addition, in this embodiment, when the nozzle 60 is rotated to multiple inspection angles, the multiple inspection angles are set so that the diagonal line connecting the corners 62 of the tip 61 of the nozzle 60 is parallel to the reference axis SA extending in the width direction (left-right direction). This makes it possible to increase the width dimension of the silhouette in the captured image, making it even easier to inspect the condition of the nozzle 60.

惎ć‚ŗ惫ļ¼–ļ¼ćŒč»øē·šļ¼¬ć®å›žć‚Šć«å›žč»¢ć™ć‚‹č§’åŗ¦Īøć‚’ć€é•·ę–¹å½¢ć®é•·č¾ŗ恌åŸŗęŗ–č»øļ¼³ļ¼”ćØå¹³č”ŒćØćŖ悋角åŗ¦ć‚’åŸŗęŗ–角åŗ¦ļ¼ˆĪøļ¼ļ¼Ā°ļ¼‰ćØć—ć€å¹³é¢č¦–ć«ćŠć‘ć‚‹åę™‚čØˆå›žć‚Šć®ę–¹å‘ć‚’ę­£ć®ę–¹å‘ćØć—ć¦ć€å®šē¾©ć™ć‚‹ć€‚ć“ć®å “åˆć€ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćÆĪøļ¼Īøļ¼‘ļ¼ˆļ¼žļ¼Ā°ļ¼‰ć§ć‚悊态ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ćÆĪøļ¼Īøļ¼’ļ¼ˆļ¼ļ¼Īøļ¼‘ļ¼œļ¼Ā°ļ¼‰ć§ć‚悋怂 The angle Īø at which the nozzle 60 rotates around the axis L is defined as the reference angle (Īø = 0Ā°) at which the long side of the rectangle is parallel to the reference axis SA, and the counterclockwise direction in a plan view is defined as the positive direction. In this case, the first inspection angle is Īø = Īø1 (> 0Ā°), and the second inspection angle is Īø = Īø2 (= -Īø1 < 0Ā°).

図ļ¼“恫ē¤ŗć™ć‚ˆć†ć«ć€ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆć€ćƒ˜ćƒƒćƒ‰ćƒ¦ćƒ‹ćƒƒćƒˆļ¼“ļ¼ć®ļ¼“ć¤ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćÆ态ļ¼‘ć¤ć®åŒäø€ć®ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć«ć‚ˆć£ć¦å›žč»¢ć™ć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚č¤‡ę•°ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćŒåŒäø€ć®ēØ®é”žć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ęœ‰ć™ć‚‹å “åˆć§ć‚‚ć€č¤‡ę•°ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć®ćć‚Œćžć‚Œć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’åŗ¦ćÆäŗ’恄恫ē•°ćŖć£ć¦ć„ć‚‹å “åˆćŒć‚ć‚‹ć€‚ä¾‹ćˆć°ć€å›³ļ¼“ć«ćŠć„ć¦ć€å·¦ē«Æć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’åŗ¦ćŒĪøļ¼ļ¼Ā°ć§ć‚ć‚‹ćØ恍态äø­å¤®ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’åŗ¦ćÆĪøļ¼Ī±ļ¼ˆļ¼žļ¼Ā°ļ¼‰ć§ć‚ć‚Šć€å³ē«Æć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’åŗ¦ćÆĪøļ¼Ī²ļ¼ˆļ¼œļ¼Ā°ļ¼‰ć§ć‚悋怂ćŖćŠć€č¤‡ę•°ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’間恮角åŗ¦ć®ćšć‚ŒćÆ态å‡ŗč·ę™‚ć§Ā±ļ¼ļ¼Žļ¼•Ā°ęœŖęŗ€ć§ć‚ć‚‹ćŒć€å›³ļ¼“恫恊恄恦ćÆ态角åŗ¦ć®ćšć‚ŒćŒč¦‹ć‚„ć™ć„ć‚ˆć†ć«čŖ‡å¼µć—ć¦å›³ē¤ŗć—ć¦ć‚ć‚‹ć€‚č¤‡ę•°ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’間恫角åŗ¦ć®ćšć‚ŒćŒē”Ÿć˜ć¦ć„ć‚‹å “åˆć€ćć‚Œćžć‚Œć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ę¤œęŸ»č§’åŗ¦ćÆć€å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ęÆŽć«ē•°ćŖ悋čح定ćØć•ć‚Œć‚‹ć€‚ä¾‹ćˆć°ć€å›³ļ¼“ć«ćŠć„ć¦ć€å·¦ē«Æć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćŒĪøļ¼Īøļ¼‘ć§ć‚ć‚Œć°ć€äø­å¤®ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćÆĪøļ¼Īøļ¼‘ļ¼Ī±ćØćŖć‚Šć€å³ē«Æć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćÆĪøļ¼Īøļ¼‘ļ¼‹Ī²ćØćŖć‚‹ć€‚ć“ć®ć‚ˆć†ć«ć€éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ćŒč¤‡ę•°ć®å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ļ¼ˆćŠć‚ˆć³ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼‰ć‚’å‚™ćˆć‚‹å “åˆć€å„ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ę¤œęŸ»č§’åŗ¦ćÆć€å„å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’恫å›ŗęœ‰ć®ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ć‚’åŠ å‘³ć—ć¦čØ­å®šć•ć‚Œć¦ć„ć‚‹ć€‚ As shown in FIG. 3, in this embodiment, the three mounting heads 32 of the head unit 30 are rotated by one and the same R-axis servo motor 36. Even if the multiple mounting heads 32 have the same type of nozzle 60, the angles of the nozzles 60 of the multiple mounting heads 32 may be different from each other. For example, in FIG. 3, when the angle of the nozzle 60 at the left end is Īø=0Ā°, the angle of the nozzle 60 at the center is Īø=Ī± (>0Ā°), and the angle of the nozzle 60 at the right end is Īø=Ī² (<0Ā°). Note that the deviation in angle between the multiple mounting heads 32 is less than Ā±0.5Ā° at the time of shipment, but in FIG. 3, the deviation in angle is exaggerated so that it is easy to see. When there is a deviation in angle between the multiple mounting heads 32, the inspection angle of each nozzle 60 is set differently for each mounting head 32. For example, in FIG. 3, if the first inspection angle of the leftmost nozzle 60 is Īø=Īø1, the first inspection angle of the central nozzle 60 is Īø=Īø1-Ī±, and the first inspection angle of the rightmost nozzle 60 is Īø=Īø1+Ī². In this way, when the component mounting device 10 has multiple mounting heads 32 (and nozzles 60), the inspection angle of each nozzle 60 is set taking into account the offset amount specific to each mounting head 32.

ļ¼œč¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗļ¼ž
図ļ¼—恫ē¤ŗ恙惎ć‚ŗ惫ļ¼–ļ¼ćÆć€å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ćŖ恄惎ć‚ŗ惫ļ¼–ļ¼ć§ć‚ć‚Šć€ęœ¬é–‹ē¤ŗ恫恊恄恦ćÆęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ćØć•ć‚Œć¦ć„ć‚‹ć€‚ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć‚’č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ć¦ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć‚’ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮悵悤ć‚ŗćÆ态複ꕰ恮ęؙęŗ–悵悤ć‚ŗćØć•ć‚Œć¦ć„ć‚‹ć€‚ć™ćŖć‚ć”ć€č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗćÆć€å›³ļ¼—恮ē¬¬ļ¼‘ę’®åƒē”»åƒćŠć‚ˆć³ē¬¬ļ¼’ę’®åƒē”»åƒć®ć‚·ćƒ«ć‚Øćƒƒćƒˆć®ć‚µć‚¤ć‚ŗćØē­‰ć—恄怂恓恓恧ćÆ态ęؙęŗ–悵悤ć‚ŗć®ę„ē¾©ćŒć‚ć‹ć‚Šć‚„ć™ć„ć‚ˆć†ć«ć€ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć®ē¬¬ļ¼‘ę’®åƒē”»åƒćŠć‚ˆć³ē¬¬ļ¼’ę’®åƒē”»åƒć‚’図ē¤ŗ恗恦čŖ¬ę˜Žć—ćŸćŒć€å®Ÿéš›ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć®éš›ć«ć€ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć‚’ę’®åƒć—ć€ęؙęŗ–悵悤ć‚ŗ悒ē®—å‡ŗ恙悋åæ…要ćÆćŖ恄怂ęؙęŗ–悵悤ć‚ŗćÆę•°å€¤ćƒ‘ćƒ©ćƒ”ćƒ¼ć‚æćØ恗恦äŗˆć‚čØ˜ę†¶éƒØļ¼˜ļ¼’ć®ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć‚ć¦ćŠćć“ćØ恌恧恍悋怂ęؙęŗ–悵悤ć‚ŗćØ恗恦ćÆć€ć‚·ćƒ«ć‚Øćƒƒćƒˆć®é¢ē©ć‚„å¹…ę–¹å‘ć®åÆøę³•ć«åƾåæœć™ć‚‹ę•°å€¤ć‚’ꎔē”Ø恙悋恓ćØćŒć§ćć‚‹ć€‚ęœ¬å®Ÿę–½å½¢ę…‹ć®ęؙęŗ–悵悤ć‚ŗćÆć€ć‚·ćƒ«ć‚Øćƒƒćƒˆć®é¢ē©ć«åƾåæœć™ć‚‹ę•°å€¤ćØć•ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼‘ę’®åƒē”»åƒć®ęؙęŗ–悵悤ć‚ŗćÆē¬¬ļ¼‘ęؙęŗ–悵悤ć‚ŗćØ恕悌态ē¬¬ļ¼’ę’®åƒē”»åƒć®ęؙęŗ–悵悤ć‚ŗćÆē¬¬ļ¼’ęؙęŗ–悵悤ć‚ŗćØć•ć‚Œć¦ć„ć‚‹ć€‚
<Multiple standard sizes>
The nozzle 60 shown in FIG. 7 is a nozzle 60 in which the tip 61 is not chipped, and is referred to as a standard nozzle 60S in the present disclosure. The size of the tip 61 of the standard nozzle 60S when the standard nozzle 60S is rotated to a plurality of inspection angles and viewed from the imaging direction is referred to as a plurality of standard sizes. That is, the plurality of standard sizes are equal to the sizes of the silhouettes of the first captured image and the second captured image in FIG. 7. Here, the first captured image and the second captured image of the standard nozzle 60S are illustrated and described so that the meaning of the standard size can be easily understood, but it is not necessary to capture the standard nozzle 60S and calculate the standard size when inspecting the actual state of the nozzle 60. The standard size can be included in advance as a numerical parameter in the nozzle data in the storage unit 82. As the standard size, a numerical value corresponding to the area of the silhouette or the dimension in the width direction can be adopted. The standard size in this embodiment is referred to as a numerical value corresponding to the area of the silhouette. The standard size of the first captured image is referred to as the first standard size, and the standard size of the second captured image is referred to as the second standard size.

ļ¼œč¤‡ę•°ć®č؈ęø¬ć‚µć‚¤ć‚ŗļ¼ž
å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć«č£…ē€ć•ć‚Œć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’éƒØļ¼–ļ¼’ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć®åˆ¤å®šćÆć€å…·ä½“ēš„恫ćÆ态äøŠčØ˜ć®č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗćØ态惎ć‚ŗ惫ļ¼–ļ¼ć®č¤‡ę•°ć®ę’®åƒē”»åƒć‹ć‚‰ē®—å‡ŗć•ć‚Œć‚‹č¤‡ę•°ć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ态悒ęÆ”č¼ƒć™ć‚‹ć“ćØć«ć‚ˆć‚Šč”Œć‚ć‚Œć‚‹ć€‚ć“ć“ć§ć€č¤‡ę•°ć®č؈ęø¬ć‚µć‚¤ć‚ŗćØćÆ複ꕰ恮ęؙęŗ–悵悤ć‚ŗ恫åƾåæœć™ć‚‹č؈ęø¬å€¤ć§ć‚悋怂ē¬¬ļ¼‘ę’®åƒē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćÆē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗćØ恕悌态ē¬¬ļ¼’ę’®åƒē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćÆē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗćØć•ć‚Œć¦ć„ć‚‹ć€‚ć—ćŸćŒć£ć¦ć€ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼‘ęؙęŗ–悵悤ć‚ŗ恌äø€č‡“恙悋ćØćØ悂恫态ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ęؙęŗ–悵悤ć‚ŗ恌äø€č‡“恙悌恰态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćÆꬠ恑恦恄ćŖ恄ćØåˆ¤å®šć™ć‚‹ć“ćØ恌恧恍悋怂
<Multiple measurement sizes>
Specifically, the determination of whether the corner 62 of the nozzle 60 attached to the mounting head 32 is chipped is performed by comparing the above-mentioned multiple standard sizes with multiple measurement sizes calculated from multiple captured images of the nozzle 60. Here, the multiple measurement sizes are measurement values corresponding to multiple standard sizes. The measurement size of the first captured image is set to the first measurement size, and the measurement size of the second captured image is set to the second measurement size. Therefore, if the first measurement size matches the first standard size and the second measurement size matches the second standard size, it can be determined that the tip 61 of the nozzle 60 is not chipped.

ć‚ˆć‚Šč©³ē“°ć«ćÆ态č؈ęø¬ć‚µć‚¤ć‚ŗ恌态åƾåæœć™ć‚‹ęؙęŗ–悵悤ć‚ŗ恫åŸŗć„ć„ć¦å®šć‚ć‚‰ć‚ŒćŸčØ±å®¹å€¤ć®ēƄ囲内ļ¼ˆä¾‹ćˆć°ęؙęŗ–悵悤ć‚ŗ恮ļ¼™ļ¼•ļ¼…仄äøŠē­‰ļ¼‰ć§ć‚ć‚Œć°ć€č§’éƒØļ¼–ļ¼’ćÆꬠ恑恦恄ćŖ恄ćØåˆ¤å®šć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚ååÆ¾ć«ć€č؈ęø¬å€¤ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å¤–ć§ć‚ć‚Œć°ć€č§’éƒØļ¼–ļ¼’ćÆꬠ恑恦恄悋ćØåˆ¤å®šć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć€‚čر容値ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ćŒę­£åøø恫éƒØå“ć‚’åøē€ćŠć‚ˆć³å®Ÿč£…ć§ćć‚‹å…ˆē«ÆéƒØļ¼–ļ¼‘ć®å½¢ēŠ¶ć€åÆøę³•ćŖć©ć‚’č€ƒę…®ć—ć¦čØ­å®šć™ć‚‹ć“ćØćŒć§ćć‚‹ć€‚ä¾‹ćˆć°ć€åøē€å­”ļ¼–ļ¼“ć®å½¢ēŠ¶ćŒå¤‰åŒ–ć™ć‚‹ć‚ˆć†ćŖ先ē«ÆéƒØļ¼–ļ¼‘恮ꬠ恑ćÆ态åøē€ēŽ‡ć‚’低äø‹ć•ć›ć‚„ć™ć„ćŸć‚ć€ćć®ć‚ˆć†ćŖ先ē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ćŒē™ŗē”Ÿć—ć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č؈ęø¬ć‚µć‚¤ć‚ŗćÆ态čØ±å®¹å€¤ć®ēƄ囲外ćØćŖć‚‹ć‚ˆć†ć«čØ±å®¹å€¤ć‚’čØ­å®šć—ć¦ćŠćć“ćØćŒå„½ć¾ć—ć„ć€‚čØ±å®¹å€¤ć®ēƄ囲ćÆ态čØ˜ę†¶éƒØļ¼˜ļ¼’ć®ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć¾ć‚Œć¦ć„ć‚‹ć€‚ More specifically, if the measured size is within a tolerance range determined based on the corresponding standard size (e.g., 95% or more of the standard size), the corner 62 is determined to be not chipped. Conversely, if the measured size is outside the tolerance range, the corner 62 is determined to be chipped. The tolerance can be set taking into consideration the shape and dimensions of the tip 61 that allows the nozzle 60 to normally pick up and mount components. For example, chipping of the tip 61 that changes the shape of the suction hole 63 tends to reduce the pickup rate, so it is preferable to set the tolerance so that the measured size of a nozzle 60 with such chipping of the tip 61 is outside the tolerance range. The tolerance range is included in the nozzle data in the memory unit 82.

仄äø‹ć€å›³ļ¼™ć®ćƒ•ćƒ­ćƒ¼ćƒćƒ£ćƒ¼ćƒˆć‚’参ē…§ć—ć¤ć¤ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ę‰‹é †ć«ć¤ć„ć¦čŖ¬ę˜Žć™ć‚‹ć€‚ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ćŒč”Œć‚ć‚Œć‚‹ć‚æć‚¤ćƒŸćƒ³ć‚°ćÆć€ä¾‹ćˆć°ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć«č£…ē€ć—ćŸē›“å¾Œć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼å†…ć®ćƒŽć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ļ¼ˆå›³ē¤ŗ恛恚ļ¼‰ć«åŽē“ć™ć‚‹ē›“å‰ć€åøē€ć‚Øćƒ©ćƒ¼ć®ē™ŗē”Ÿę™‚态äŗˆć‚čØ­å®šć•ć‚ŒćŸå®šęœŸć‚æć‚¤ćƒŸćƒ³ć‚°ć€ćŠć‚ˆć³åŸŗęæļ¼¢ć®ę¬é€ę™‚ć®ć†ć”ć€å°‘ćŖ恏ćØ悂ļ¼‘恤恮ć‚æć‚¤ćƒŸćƒ³ć‚°ćØ恙悋恓ćØ恌恧恍悋怂 The procedure for inspecting the state of the nozzle 60 will be described below with reference to the flowchart in Figure 9. The timing for inspecting the state of the nozzle 60 can be, for example, at least one of the following: immediately after the nozzle 60 is attached to the mounting head 32, immediately before the nozzle 60 is stored in a nozzle stocker (not shown) in the component mounting device 10, when a suction error occurs, at a preset regular timing, and when the board B is being transported.

惎ć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ćŒé–‹å§‹ć•ć‚Œć‚‹ćØ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć‚’åˆ¶å¾”恗态惎ć‚ŗ惫ļ¼–ļ¼ć‚’ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ć‚‹č§’åŗ¦čح定処ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼‘ļ¼ļ¼‰ć€‚ When inspection of the state of the nozzle 60 begins, the CPU 81 controls the R-axis servo motor 36 to execute an angle setting process that rotates the nozzle 60 to the first inspection angle (S10).

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć‚’ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚Šę’®åƒć—态ē¬¬ļ¼‘ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹ę’®åƒå‡¦ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼’ļ¼ļ¼‰ć€‚ The CPU 81 performs an imaging process in which the tip 61 of the nozzle 60 at the first inspection angle is imaged by the imaging unit 40 to obtain a first image (S20).

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼‘ę’®åƒē”»åƒć«åŸŗ恄恄恦ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋ē®—å‡ŗ処ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼“ļ¼ļ¼‰ć€‚ The CPU 81 executes a calculation process to calculate the first measurement size based on the first captured image (S30).

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗ恌ē¬¬ļ¼‘ęؙęŗ–悵悤ć‚ŗć«ć‚ˆć‚ŠčØ­å®šć•ć‚ŒćŸčØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ć‚ć‚‹ć‹å¦ć‹ć«ć‚ˆć£ć¦ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼”ļ¼ļ¼‰ć€‚ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ć‚ć‚‹å “åˆļ¼ˆļ¼³ļ¼”ļ¼ļ¼šļ¼¹ļ¼„ļ¼³ļ¼‰ć€ļ¼³ļ¼•ļ¼ć«ē§»č”Œć™ć‚‹ć€‚ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ćÆćŖć„å “åˆļ¼ˆļ¼³ļ¼”ļ¼ļ¼šļ¼®ļ¼Æļ¼‰ć€ļ¼³ļ¼‘ļ¼ļ¼ć«ē§»č”Œć™ć‚‹ć€‚ The CPU 81 executes a determination process to determine whether the tip 61 of the nozzle 60 is missing, depending on whether the first measured size is within the tolerance range set by the first standard size (S40). If the first measured size is within the tolerance range (S40: YES), the process proceeds to S50. If the first measured size is not within the tolerance range (S40: NO), the process proceeds to S100.

ä¾‹ćˆć°ć€å›³ļ¼˜ć«ē¤ŗć™å “åˆć«ćÆć€ć‚·ćƒ«ć‚Øćƒƒćƒˆć®é¢ē©ćØ恕悌悋ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗćÆē¬¬ļ¼‘ęؙęŗ–悵悤ć‚ŗļ¼ˆå›³ļ¼—参ē…§ļ¼‰ć«äø€č‡“恙悋恋悉态ļ¼³ļ¼”ļ¼ć‹ć‚‰ļ¼³ļ¼•ļ¼ć«ē§»č”Œć™ć‚‹ć€‚仄äø‹ć€å›³ļ¼™ć®ćƒ•ćƒ­ćƒ¼ćƒćƒ£ćƒ¼ćƒˆć«ćŠć„恦ļ¼³ļ¼•ļ¼ä»„降悒čŖ¬ę˜Žć™ć‚‹ć€‚ For example, in the case shown in FIG. 8, the first measured size, which is the area of the silhouette, matches the first standard size (see FIG. 7), so the process moves from S40 to S50. Below, we will explain S50 and subsequent steps using the flowchart in FIG. 9.

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć‚’åˆ¶å¾”恗态惎ć‚ŗ惫ļ¼–ļ¼ć‚’ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ć‚‹č§’åŗ¦čح定処ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼•ļ¼ļ¼‰ć€‚ The CPU 81 controls the R-axis servo motor 36 and executes an angle setting process to rotate the nozzle 60 to the second inspection angle (S50).

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć‚’ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚Šę’®åƒć—态ē¬¬ļ¼’ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹ę’®åƒå‡¦ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼–ļ¼ļ¼‰ć€‚ The CPU 81 performs an imaging process in which the tip 61 of the nozzle 60 at the second inspection angle is imaged by the imaging unit 40 to obtain a second image (S60).

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼’ę’®åƒē”»åƒć«åŸŗ恄恄恦ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋ē®—å‡ŗ処ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼—ļ¼ļ¼‰ć€‚ The CPU 81 executes a calculation process to calculate the second measurement size based on the second captured image (S70).

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗ恌ē¬¬ļ¼’ęؙęŗ–悵悤ć‚ŗć«ć‚ˆć‚ŠčØ­å®šć•ć‚ŒćŸčØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ć‚ć‚‹ć‹å¦ć‹ć«ć‚ˆć£ć¦ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ć‚’å®Ÿč”Œć™ć‚‹ļ¼ˆļ¼³ļ¼˜ļ¼ļ¼‰ć€‚ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ć‚ć‚‹å “åˆļ¼ˆļ¼³ļ¼˜ļ¼ļ¼šļ¼¹ļ¼„ļ¼³ļ¼‰ć€ļ¼³ļ¼™ļ¼ć«ē§»č”Œć™ć‚‹ć€‚恙ćŖć‚ć”ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮角éƒØļ¼–ļ¼’ćÆć„ćšć‚Œć‚‚ę¬ ć‘ć¦ć„ćŖ恄ćØåˆ¤å®šć—ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć«ć‚ˆć‚‹éƒØå“å®Ÿč£…ćŒč”Œć‚ć‚Œć‚‹ć€‚ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ćÆćŖć„å “åˆļ¼ˆļ¼³ļ¼˜ļ¼ļ¼šļ¼®ļ¼Æļ¼‰ć€ļ¼³ļ¼‘ļ¼ļ¼ć«ē§»č”Œć™ć‚‹ć€‚ The CPU 81 executes a determination process to determine whether the tip 61 of the nozzle 60 is chipped, depending on whether the second measured size is within the tolerance range set by the second standard size (S80). If the second measured size is within the tolerance range (S80: YES), the process proceeds to S90. In other words, it is determined that none of the corners 62 of the tip 61 of the nozzle 60 are chipped, and component mounting is performed using the nozzle 60. If the second measured size is not within the tolerance range (S80: NO), the process proceeds to S100.

図ļ¼˜ć«ē¤ŗć™å “åˆć§ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®č§’éƒØļ¼–ļ¼’ļ¼¤ćŒę¬ ć‘态åøē€å­”ļ¼–ļ¼“ć®å½¢ēŠ¶ćŒęćŖć‚ć‚Œć¦ć„ć‚‹ć€‚ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗćÆć€ę’®åƒē”»åƒć«ćŠć„恦äø€ē‚¹éŽ–ē·šć§ē¤ŗ恕悌悋ē¬¬ļ¼’ęؙęŗ–悵悤ć‚ŗ恮ļ¼™ļ¼ļ¼…ē؋åŗ¦ćØćŖć£ć¦ć„ć‚‹ć€‚ē¬¬ļ¼’ęؙęŗ–悵悤ć‚ŗ恮ļ¼™ļ¼•ļ¼…仄äøŠć‚’čØ±å®¹å€¤ć®ēƄ囲内ćØć—ć¦ć„ć‚‹å “åˆć€ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å¤–ć§ć‚ć‚‹ćØåˆ¤å®šć—ć€å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć‚’ę¤œēŸ„恙悋恓ćØ恌恧恍悋ļ¼ˆļ¼³ļ¼˜ļ¼ļ¼šļ¼®ļ¼Æļ¼‰ć€‚ In the case shown in FIG. 8, the corner 62D of the nozzle 60 is chipped, damaging the shape of the suction hole 63. The second measured size is approximately 90% of the second standard size shown by the dashed line in the captured image. If 95% or more of the second standard size is within the acceptable range, the CPU 81 determines that the second measured size is outside the acceptable range and is able to detect chipping of the tip 61 (S80: NO).

ä»®ć«å›³ļ¼˜ć«ē¤ŗ恙惎ć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć‚’态ē¬¬ļ¼‘ę’®åƒē”»åƒć®ćæ恫åŸŗć„ć„ć¦č”Œć£ćŸå “åˆć«ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮ꬠ恑ćÆč¦‹é€ƒć•ć‚Œć¦ć—ć¾ć†ć€‚ć—ć‹ć—ć€ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆ态äøŠčØ˜ć—ćŸć‚ˆć†ć«ć€ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ć§ē¬¬ļ¼‘ę’®åƒē”»åƒć‚’å–å¾—ć—ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć‚’č”Œć£ćŸå¾Œć€ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ć§ē¬¬ļ¼’ę’®åƒē”»åƒć‚’å–å¾—ć—ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć‚’再åŗ¦č”Œć†ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć‚’ę¤œēŸ„恗悄恙恏ćŖć£ć¦ć„ć‚‹ć€‚ć—ćŸćŒć£ć¦ć€éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć—ć‚„ć™ććŖć£ć¦ć„ć‚‹ć€‚ If the inspection of the state of the nozzle 60 shown in FIG. 8 were performed based only on the first captured image, any chipping in the tip 61 of the nozzle 60 would be overlooked. However, in this embodiment, as described above, after the first captured image is acquired at the first inspection angle and the state of the nozzle 60 is inspected, the second captured image is acquired at the second inspection angle and the state of the nozzle 60 is inspected again, making it easier to detect any chipping in the tip 61 of the nozzle 60. This makes it easier to suppress a decrease in the component pickup rate, mounting misalignment, etc.

ć¾ćŸć€å›³ļ¼˜ć«ē¤ŗć™å “åˆćØćÆē•°ćŖ悊态ē¬¬ļ¼‘ę’®åƒē”»åƒć‹ć‚‰ē®—å‡ŗ恕悌恟ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗ恌čØ±å®¹å€¤ć®ēÆ„å›²å†…ć§ćŖć‹ć£ćŸå “åˆć«ćÆļ¼ˆļ¼³ļ¼”ļ¼ļ¼šļ¼®ļ¼Æļ¼‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ćØåˆ¤å®šć•ć‚Œć€ē¬¬ļ¼’ę’®åƒē”»åƒćÆå–å¾—ć•ć‚Œćšć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ćŒēµ‚äŗ†ć™ć‚‹ć€‚ć“ć®ć‚ˆć†ć«ć€ęœ¬é–‹ē¤ŗ恫ćÆć€å–å¾—äŗˆå®šć®ć™ć¹ć¦ć®ļ¼ˆę¤œęŸ»č§’åŗ¦ć®ę•°ćØåŒę•°ć®ļ¼‰ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹ć“ćØćŖćć€å°‘ćŖ恏ćØ悂ļ¼‘ć¤ć®ę’®åƒē”»åƒć«åŸŗć„ć„ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē•°åøø恌ꤜēŸ„恕悌悋恓ćØć«ć‚ˆć‚Šć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ćŒēµ‚äŗ†ć™ć‚‹å “åˆć‚‚å«ć¾ć‚Œć‚‹ć€‚
仄äø‹ć€å›³ļ¼™ć®ćƒ•ćƒ­ćƒ¼ćƒćƒ£ćƒ¼ćƒˆć«ćŠć„恦ļ¼³ļ¼‘ļ¼ļ¼ä»„降悒čŖ¬ę˜Žć™ć‚‹ć€‚
8, if the first measurement size calculated from the first captured image is not within the range of the allowable value (S40: NO), it is determined that the tip 61 of the nozzle 60 is chipped, and the second captured image is not acquired and the inspection of the state of the nozzle 60 ends. In this way, the present disclosure also includes a case where the inspection of the state of the nozzle 60 ends when an abnormality in the nozzle 60 is detected based on at least one captured image, without acquiring all captured images (the same number as the number of inspection angles) that are planned to be acquired.
The steps from S100 onwards in the flow chart of FIG. 9 will be described below.

惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ćØåˆ¤å®šć•ć‚ŒćŸå “åˆć€ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态惎ć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«äŗˆå‚™ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ćŒć‚ć‚‹ć‹åˆ¤å®šć™ć‚‹ļ¼ˆļ¼³ļ¼‘ļ¼ļ¼ļ¼‰ć€‚ćƒŽć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«ęŗ–å‚™ć•ć‚Œć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å€‹ę•°ć«ć¤ć„恦ćÆ态äŗˆć‚ćƒ¦ćƒ¼ć‚¶ćŒå…„åŠ›č£…ē½®ļ¼˜ļ¼•ć«ć‚ˆć‚ŠčØ˜ę†¶éƒØļ¼˜ļ¼’ć®ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ恫čØ˜ę†¶ć•ć›ć‚‹ć“ćØ恌恧恍态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ恫åŸŗć„ć„ć¦åˆ¤å®šć‚’č”Œć†ć€‚ If it is determined that the tip 61 of the nozzle 60 is chipped, the CPU 81 determines whether there are spare nozzles 60 in the nozzle stocker (S100). The number of nozzles 60 prepared in the nozzle stocker can be stored in advance by the user in the nozzle data in the memory unit 82 via the input device 85, and the CPU 81 makes the determination based on the nozzle data.

惎ć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«äŗˆå‚™ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ćŒć‚ć‚‹å “åˆć€ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆå®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć«č£…ē€ć•ć‚Œć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’态äŗˆå‚™ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ćØäŗ¤ę›ć—态ē”Ÿē”£ć‚’ē¶™ē¶šć•ć›ć‚‹ļ¼ˆļ¼³ļ¼‘ļ¼‘ļ¼ļ¼‰ć€‚ If there is a spare nozzle 60 in the nozzle stocker, the CPU 81 replaces the nozzle 60 attached to the mounting head 32 with the spare nozzle 60 and continues production (S110).

惎ć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«äŗˆå‚™ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ćŒćŖć„å “åˆć€ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆć‚Øćƒ©ćƒ¼ćƒ”ćƒƒć‚»ćƒ¼ć‚ø恮送äæ”ćŖć©ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē•°åøøć‚’ćƒ¦ćƒ¼ć‚¶ć«ēŸ„ć‚‰ć›ć¦ć€ćƒžć‚·ćƒ³å‹•ä½œć‚’åœę­¢ć•ć›ć‚‹ļ¼ˆļ¼³ļ¼‘ļ¼’ļ¼ļ¼‰ć€‚ćƒ¦ćƒ¼ć‚¶ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’ćƒŽć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«č£œå……ć™ć‚‹ć“ćØć«ć‚ˆć‚Šć€ē”Ÿē”£ć‚’å†é–‹ć•ć›ć‚‹ć“ćØ恌恧恍悋怂 If there are no spare nozzles 60 in the nozzle stocker, the CPU 81 notifies the user of the abnormality in the nozzle 60 by sending an error message or the like, and stops the machine operation (S120). The user can resume production by replenishing the nozzle stocker with nozzles 60.

ļ¼œćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒę­£ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖć™å “åˆļ¼ž
ē¶šć„ć¦ć€å›³ļ¼‘ļ¼ćŠć‚ˆć³å›³ļ¼‘ļ¼‘ć‚’å‚ē…§ć—ć¤ć¤ć€å¹³é¢č¦–ć«ćŠć„ć¦å…ˆē«ÆéƒØļ¼–ļ¼–ćŒę­£ę–¹å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗ惫ļ¼–ļ¼•ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹ć€‚äøŠčØ˜ć—ćŸćƒŽć‚ŗ惫ļ¼–ļ¼ćØåŒę§˜ć«čŖ¬ę˜Žć§ćć‚‹äŗ‹é …恫恤恄恦ćÆ态čŖ¬ę˜Žć‚’ēœē•„ć™ć‚‹ć€‚å›³ļ¼‘ļ¼ć«ē¤ŗć™ć‚ˆć†ć«ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ćØåŒę§˜ć«ćƒŽć‚ŗ惫ļ¼–ļ¼•ć®å›žč»¢ć™ć‚‹č§’åŗ¦Īøć‚’å®šē¾©ć™ć‚‹ćØ态惎ć‚ŗ惫ļ¼–ļ¼•ć®č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆ态Īøļ¼ļ¼”ļ¼•Ā°ćØ恕悌悋ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćØ态Īøļ¼ļ¼ļ¼”ļ¼•Ā°ćØ恕悌悋ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ćØ态恋悉ćŖ悋怂
<When the nozzle tip is square shaped>
Next, inspection of the state of a nozzle 65 having a tip 66 that is square in plan view will be described with reference to Figures 10 and 11. Items that can be explained in the same way as the nozzle 60 described above will not be described. As shown in Figure 10, if the rotation angle Īø of the nozzle 65 is defined in the same way as the nozzle 60, the multiple inspection angles of the nozzle 65 consist of a first inspection angle of Īø = 45Ā° and a second inspection angle of Īø = -45Ā°.

惎ć‚ŗ惫ļ¼–ļ¼•ć®å…ˆē«ÆéƒØļ¼–ļ¼–ćÆ态ļ¼”恤恮角éƒØļ¼–ļ¼—ļ¼”ļ½žļ¼–ļ¼—ļ¼¤ćØ态ē•„ļ¼øå­—å½¢ć®åøē€å­”ļ¼–ļ¼˜ćØć€ć‚’ęœ‰ć™ć‚‹ć€‚ä¾‹ćˆć°ć€å›³ļ¼‘ļ¼‘恫ē¤ŗć™ć‚ˆć†ć«ć€č§’éƒØļ¼–ļ¼—ļ¼¤ćŒę¬ ć‘ć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼•ć‚’č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć§ę’®åƒć™ć‚‹ćØ态ē¬¬ļ¼’ę’®åƒē”»åƒć«åŸŗ恄恄恦角éƒØļ¼–ļ¼—ļ¼¤ć®ę¬ ć‘ć‚’ę¤œēŸ„恙悋恓ćØ恌恧恍悋怂 The tip 66 of the nozzle 65 has four corners 67A-67D and a generally X-shaped suction hole 68. For example, as shown in FIG. 11, if a nozzle 65 with a chipped corner 67D is imaged from multiple inspection angles, the chipped corner 67D can be detected based on the second captured image.

ļ¼œćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒč±å½¢ć®å½¢ēŠ¶ć‚’ćŖć™å “åˆļ¼ž
ē¶šć„ć¦ć€å›³ļ¼‘ļ¼’ćŠć‚ˆć³å›³ļ¼‘ļ¼“ć‚’å‚ē…§ć—ć¤ć¤ć€å¹³é¢č¦–ć«ćŠć„ć¦å…ˆē«ÆéƒØļ¼—ļ¼‘ćŒč±å½¢ć®å½¢ēŠ¶ć‚’ćŖ恙惎ć‚ŗ惫ļ¼—ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹ć€‚äøŠčØ˜ć—ćŸćƒŽć‚ŗ惫ļ¼–ļ¼ćØåŒę§˜ć«čŖ¬ę˜Žć§ćć‚‹äŗ‹é …恫恤恄恦ćÆ态čŖ¬ę˜Žć‚’ēœē•„ć™ć‚‹ć€‚å›³ļ¼‘ļ¼’恫ē¤ŗć™ć‚ˆć†ć«ć€ćƒŽć‚ŗ惫ļ¼—ļ¼ćŒč»øē·šļ¼¬ć®å›žć‚Šć«å›žč»¢ć™ć‚‹č§’åŗ¦Īøć‚’ć€č±å½¢ć®é•·ć„ę–¹ć®åÆ¾č§’ē·šćŒåŸŗęŗ–č»øļ¼³ļ¼”ćØå¹³č”ŒćØćŖ悋角åŗ¦ć‚’åŸŗęŗ–角åŗ¦ļ¼ˆĪøļ¼ļ¼Ā°ļ¼‰ćØć—ć€å¹³é¢č¦–ć«ćŠć‘ć‚‹åę™‚čØˆå›žć‚Šć®ę–¹å‘ć‚’ę­£ć®ę–¹å‘ćØć—ć¦ć€å®šē¾©ć™ć‚‹ć€‚ćƒŽć‚ŗ惫ļ¼—ļ¼ć®č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆ态Īøļ¼ļ¼Ā°ļ¼ˆåŸŗęŗ–角åŗ¦ļ¼‰ćØ恕悌悋ē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ćØ态Īøļ¼ļ¼™ļ¼Ā°ćØ恕悌悋ē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ćØ态恋悉ćŖ悋怂
<When the nozzle tip is diamond-shaped>
Next, with reference to Fig. 12 and Fig. 13, the inspection of the state of the nozzle 70 whose tip 71 is rhombic in plan view will be described. The description of matters that can be explained in the same manner as the nozzle 60 described above will be omitted. As shown in Fig. 12, the angle Īø at which the nozzle 70 rotates around the axis L is defined as the reference angle (Īø = 0Ā°) at which the longer diagonal of the rhombic shape is parallel to the reference axis SA, and the counterclockwise direction in plan view is defined as the positive direction. The multiple inspection angles of the nozzle 70 consist of a first inspection angle of Īø = 0Ā° (reference angle) and a second inspection angle of Īø = 90Ā°.

惎ć‚ŗ惫ļ¼—ļ¼ć®å…ˆē«ÆéƒØļ¼—ļ¼‘ćÆ态ļ¼”恤恮角éƒØļ¼—ļ¼’ļ¼”ļ½žļ¼—ļ¼’ļ¼¤ćØ态ļ¼’恤恮åøē€å­”ļ¼—ļ¼“ćØ态悒꜉恙悋怂惎ć‚ŗ惫ļ¼—ļ¼ćŒē¬¬ļ¼‘ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćØ恍态鋭角ļ¼ˆļ¼œļ¼™ļ¼Ā°ļ¼‰ćØ恕悌悋ļ¼’恤恮角éƒØļ¼—ļ¼’ļ¼”态ļ¼—ļ¼’ļ¼£ćŒē¬¬ļ¼‘ę’®åƒē”»åƒć®å¹…ę–¹å‘ć®ē«ÆéƒØć«é…ć•ć‚Œć¦ć„ć‚‹ć€‚ćƒŽć‚ŗ惫ļ¼—ļ¼ćŒē¬¬ļ¼’ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćØ恍态鈍角ļ¼ˆļ¼žļ¼™ļ¼Ā°ļ¼‰ćØ恕悌悋ļ¼’恤恮角éƒØļ¼—ļ¼’ļ¼¢ć€ļ¼—ļ¼’ļ¼¤ćŒē¬¬ļ¼’ę’®åƒē”»åƒć®å¹…ę–¹å‘ć®ē«ÆéƒØć«é…ć•ć‚Œć¦ć„ć‚‹ć€‚ä¾‹ćˆć°ć€å›³ļ¼‘ļ¼“恫ē¤ŗć™ć‚ˆć†ć«ć€č§’éƒØļ¼—ļ¼’ļ¼£ćŒę¬ ć‘ć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼—ļ¼ć‚’č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć§ę’®åƒć™ć‚‹ćØ态ē¬¬ļ¼‘ę’®åƒē”»åƒć‹ć‚‰č§’éƒØļ¼—ļ¼’ļ¼£ć®ę¬ ć‘ć‚’ę¤œēŸ„恙悋恓ćØ恌恧恍悋怂 The tip 71 of the nozzle 70 has four corners 72A-72D and two suction holes 73. When the nozzle 70 is at the first inspection angle, the two corners 72A, 72C, which are acute angles (<90Ā°), are located at the ends in the width direction of the first captured image. When the nozzle 70 is at the second inspection angle, the two corners 72B, 72D, which are obtuse angles (>90Ā°), are located at the ends in the width direction of the second captured image. For example, as shown in FIG. 13, when a nozzle 70 with a chipped corner 72C is imaged at multiple inspection angles, the chipped corner 72C can be detected from the first captured image.

ļ¼»å®Ÿę–½å½¢ę…‹ļ¼‘ć®ä½œē”ØåŠ¹ęžœļ¼½
仄äøŠć®ć‚ˆć†ć«ć€å®Ÿę–½å½¢ę…‹ļ¼‘恫äæ‚ć‚‹éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ćÆ态åŸŗęæļ¼¢ć«éƒØå“ć‚’å®Ÿč£…ć™ć‚‹éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼ć§ć‚ć£ć¦ć€éƒØå“ć‚’åøē€ć™ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ćŒč»øē·šļ¼¬äøŠć«č£…ē€ć•ć‚ŒćŸå®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćØ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®å›žć‚Šć«å›žč»¢ć•ć›ć‚‹å›žč»¢ę©Ÿę§‹ļ¼ˆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ļ¼‰ćØ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®č»øę–¹å‘ćØē›“äŗ¤ć™ć‚‹ę’®åƒę–¹å‘ć‹ć‚‰ę’®åƒć™ć‚‹ę’®åƒéƒØļ¼”ļ¼ćØ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ悒čØ˜ę†¶ć™ć‚‹čØ˜ę†¶éƒØļ¼˜ļ¼’ćØć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćØć€ć‚’å‚™ćˆć€ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć‚’含ćæć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ćŒē™ŗē”Ÿć—悄恙恄ē®‡ę‰€ćŒć€č»øę–¹å‘ćŠć‚ˆć³ę’®åƒę–¹å‘ć®åŒę–¹ć«ē›“äŗ¤ć™ć‚‹å¹…ę–¹å‘ć«ćŠć‘ć‚‹ē«ÆéƒØć«é…ć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č»øē·šļ¼¬ć®å›žć‚Šć®č§’åŗ¦ć§ć‚ć‚Šć€ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆ态惎ć‚ŗ惫ļ¼–ļ¼ćØ同ēØ®é”žć§ć‚ć‚Šć€å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ćŖ恄ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć‚’č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ć¦ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć‚’ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć®ć‚µć‚¤ć‚ŗ恧恂悋複ꕰ恮ęؙęŗ–悵悤ć‚ŗć‚’å«ćæć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćÆć€å›žč»¢ę©Ÿę§‹ļ¼ˆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ļ¼‰ć«ć‚ˆć‚Šč¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć®ć†ć”恮ļ¼‘恤仄äøŠć®ę¤œęŸ»č§’åŗ¦ć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’å›žč»¢ć•ć›ć¦ć€ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚Šļ¼‘恤仄äøŠć®ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć™ć‚‹ć“ćØ恧态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć‚’å–å¾—ć—ć€ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒćØčØ˜ę†¶éƒØļ¼˜ļ¼’恫čØ˜ę†¶ć•ć‚ŒćŸćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć€‚
[Effects of the First Embodiment]
As described above, the component mounting device 10 according to the first embodiment is a component mounting device 10 that mounts components on a board B, and includes a mounting head 32 in which the nozzle 60 that picks up components is attached on the axis L, a rotation mechanism (R-axis servo motor 36) that rotates the nozzle 60 about the axis L, an imaging unit 40 that images the nozzle 60 from an imaging direction perpendicular to the axial direction of the axis L, a storage unit 82 that stores nozzle data, and a control unit (CPU 81), and the nozzle data includes a plurality of inspection angles, and the plurality of inspection angles are such that a portion of the tip 61 of the nozzle 60 where chipping is likely to occur is disposed at an end in a width direction perpendicular to both the axial direction and the imaging direction. The nozzle data includes a plurality of standard sizes which are the sizes of the standard nozzle 60S when a standard nozzle 60S of the same type as the nozzle 60 and having an unbroken tip 61 is rotated to a plurality of inspection angles and viewed from the imaging direction, and the control unit (CPU 81) rotates the nozzle 60 to one or more inspection angles among the plurality of inspection angles using the rotation mechanism (R-axis servo motor 36) and images the nozzle 60 at the one or more inspection angles using the imaging unit 40, thereby obtaining one or more captured images, and inspects the condition of the nozzle 60 based on the one or more captured images and the nozzle data stored in the memory unit 82.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć™ć‚‹č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćŒćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć¾ć‚Œć¦ć„ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć«åæ…要ćŖļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć®ćæć‚’å–å¾—ć§ćć€ę¤œęŸ»ć«č¦ć™ć‚‹ę™‚é–“ć‚’ēŸ­ēø®ć™ć‚‹ć“ćØćŒć§ćć‚‹ć€‚ć¾ćŸć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć§ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ćŒē™ŗē”Ÿć—悄恙恄ē®‡ę‰€ćŒć€å¹…ę–¹å‘ć«ćŠć‘ć‚‹ē«ÆéƒØć«é…ć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē•°åøø态ē‰¹ć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć‚’ę¤œēŸ„恗悄恙恄怂惎ć‚ŗ惫ļ¼–ļ¼ć®ē•°åøø悒ꤜēŸ„恗悄恙恄꧋ꈐ恧恂悋恋悉态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć™ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the nozzle data includes multiple inspection angles for imaging the nozzle 60, so that it is possible to obtain only one or more images required to inspect the state of the nozzle 60, thereby shortening the time required for inspection. Furthermore, with multiple inspection angles, the location where chipping of the tip 61 of the nozzle 60 is likely to occur is arranged at the end in the width direction, so that it is easy to detect abnormalities in the nozzle 60, particularly chipping of the tip 61 of the nozzle 60. Because this configuration makes it easy to detect abnormalities in the nozzle 60, it is possible to suppress a decrease in the component pickup rate and mounting misalignment.

å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćÆ态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć«åŸŗ恄恄恦ļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋悵悤ć‚ŗē®—å‡ŗ処ē†ćØ态ļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ複ꕰ恮ęؙęŗ–悵悤ć‚ŗ恮恆恔恮ļ¼‘恤仄äøŠć®ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ćØć€ć‚’å®Ÿč”Œć™ć‚‹ć€‚ In the first embodiment, the control unit (CPU 81) executes a size calculation process that calculates one or more measurement sizes based on one or more captured images, and a determination process that determines whether or not the tip 61 of the nozzle 60 is chipped by comparing the one or more measurement sizes with one or more standard sizes among a plurality of standard sizes.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćÆ态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć«åŸŗ恄恄恦ē®—å‡ŗ恕悌恟ļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć¾ć‚Œć‚‹č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗ恮恆恔恮ļ¼‘恤仄äøŠć®ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć®ę¤œęŸ»ć®ē²¾åŗ¦ć‚’向äøŠć•ć›ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the control unit (CPU 81) determines whether or not the tip 61 of the nozzle 60 is chipped by comparing one or more measured sizes calculated based on one or more captured images with one or more standard sizes among the multiple standard sizes included in the nozzle data, thereby improving the accuracy of inspection for chipping of the tip 61 of the nozzle 60.

å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ćŒå–ć‚Šä»˜ć‘ć‚‰ć‚Œć‚‹å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’恫å›ŗęœ‰ć®ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ć‚’åŠ å‘³ć—ć¦čØ­å®šć•ć‚Œć¦ć„ć‚‹ć€‚ In the first embodiment, the multiple inspection angles are set taking into account the offset amount specific to the mounting head 32 to which the nozzle 60 is attached.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ä½æē”Øć™ć‚‹å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć‚’å¤‰ę›“ć—ć¦ć‚‚ę­£ē¢ŗć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć§ćć‚‹ć€‚ With this configuration, the state of the nozzle 60 can be accurately inspected even if the mounting head 32 used is changed.

å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćŒćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć‚æć‚¤ćƒŸćƒ³ć‚°ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ć«č£…ē€ć—ćŸē›“å¾Œć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ćƒŽć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«åŽē“ć™ć‚‹ē›“å‰ć€åøē€ć‚Øćƒ©ćƒ¼ć®ē™ŗē”Ÿę™‚态äŗˆć‚čØ­å®šć•ć‚ŒćŸå®šęœŸć‚æć‚¤ćƒŸćƒ³ć‚°ć€ćŠć‚ˆć³åŸŗęæļ¼¢ć®ę¬é€ę™‚ć®ć†ć”ć€å°‘ćŖ恏ćØ悂ļ¼‘恤恮ć‚æć‚¤ćƒŸćƒ³ć‚°ćØ恕悌悋怂 In the first embodiment, the control unit (CPU 81) inspects the state of the nozzle 60 at least one of the following times: immediately after the nozzle 60 is attached to the mounting head 32, immediately before the nozzle 60 is stored in the nozzle stocker, when a suction error occurs, at a preset regular timing, and when the substrate B is transported.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€čØ­å®šć•ć‚ŒćŸå°‘ćŖ恏ćØ悂ļ¼‘恤恮ć‚æć‚¤ćƒŸćƒ³ć‚°ć§ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ćŒč”Œć‚ć‚Œć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē•°åøø悒äø€å±¤ę¤œēŸ„恗悄恙恏态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć™ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the state of the nozzle 60 is inspected at at least one set timing, making it easier to detect abnormalities in the nozzle 60 and suppressing a decrease in the component pickup rate, mounting misalignment, etc.

å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆć€ę’®åƒéƒØļ¼”ļ¼ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć™ć‚‹ę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ļ¼ˆē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘ļ¼‰ćØć€ę’®åƒę–¹å‘ć«ć¤ć„ć¦ę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ļ¼ˆē¬¬ļ¼‘ć‚«ćƒ”惩ļ¼”ļ¼‘ļ¼‰ćØćØć‚‚ć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ęŒŸć‚€ć‚ˆć†ć«é…ć•ć‚Œć‚‹ę¤œęŸ»ē”Øē…§ę˜Žļ¼ˆē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ļ¼‰ćØć€ć‚’å‚™ćˆć‚‹ć€‚ę¤œęŸ»ē”Øē…§ę˜Žļ¼ˆē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ļ¼‰ć®å…‰ęŗćÆå¹³č”Œå…‰ć§ć‚ć‚‹ć“ćØćŒå„½ć¾ć—ć„ć€‚ In the first embodiment, the imaging unit 40 includes an inspection camera (first camera 41) that images the nozzle 60, and an inspection illuminator (first illuminator 42) that is arranged to sandwich the nozzle 60 together with the inspection camera (first camera 41) in the imaging direction. The light source of the inspection illuminator (first illuminator 42) is preferably a parallel light.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ę¤œęŸ»ē”Øē…§ę˜Žļ¼ˆē¬¬ļ¼‘ē…§ę˜Žļ¼”ļ¼’ļ¼‰ć®å…‰ęŗćŒå¹³č”Œå…‰ć§ć‚ć‚‹ć‹ć‚‰ć€č¤‡ę•°ć®ę’®åƒē”»åƒć«åŸŗć„ć„ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮悵悤ć‚ŗć‚’ę­£ē¢ŗ恫ē®—å‡ŗ恗悄恙恏态惎ć‚ŗ惫ļ¼–ļ¼ć®ē•°åøø悒äø€å±¤ę¤œēŸ„恗悄恙恄怂 With this configuration, the light source of the inspection illumination (first illumination 42) is parallel light, making it easier to accurately calculate the size of the tip 61 of the nozzle 60 based on multiple captured images, and making it easier to detect abnormalities in the nozzle 60.

ļ¼»ęœ¬é–‹ē¤ŗć®å®Ÿę–½å½¢ę…‹ļ¼’ć®č©³ē“°ļ¼½
ęœ¬é–‹ē¤ŗć®å®Ÿę–½å½¢ę…‹ļ¼’ć‚’ć€å›³ļ¼‘ļ¼”ćŖć„ć—å›³ļ¼‘ļ¼—ć‚’å‚ē…§ć—恤恤čŖ¬ę˜Žć™ć‚‹ć€‚仄äø‹ć€å®Ÿę–½å½¢ę…‹ļ¼‘ćØåŒę§˜ć®ę§‹ęˆć€ä½œē”ØåŠ¹ęžœć«ć¤ć„ć¦ćÆ态čŖ¬ę˜Žć‚’ēœē•„ć™ć‚‹ć€‚ć¾ćŸć€å®Ÿę–½å½¢ę…‹ļ¼‘ćØ同äø€ć®ę§‹ęˆć«ć¤ć„恦ćÆć€åŒäø€ć®ē¬¦å·ć‚’ē”Ø恄恦čŖ¬ę˜Žć™ć‚‹ć€‚
[Details of the second embodiment of the present disclosure]
A second embodiment of the present disclosure will be described with reference to Fig. 14 to Fig. 17. Hereinafter, the description of the configuration and the operation and effect similar to those of the first embodiment will be omitted. Also, the same configuration as that of the first embodiment will be described using the same reference numerals.

å®Ÿę–½å½¢ę…‹ļ¼’恮éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼‘ļ¼ć«ćŠć„恦ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®å‘Ø悊恫ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ćŖćŒć‚‰ć€ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’連ē¶šēš„ć«ę’®åƒć™ć‚‹ć“ćØć§ć€č¤‡ę•°ć®ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹ć€‚ć™ćŖć‚ć”ć€å®Ÿę–½å½¢ę…‹ļ¼’恧ćÆć€å®Ÿę–½å½¢ę…‹ļ¼‘恫äæ‚ć‚‹č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć‚’ē”Ø恄ćŖ恄恋悉态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆč¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć‚’å«ć¾ćŖćć¦ć‚ˆć„ć€‚ć¾ćŸć€č§’åŗ¦Īø恮ē›øåÆ¾å€¤ć®ćæćŒå•é”ŒćØćŖć‚‹ć®ć§ć€å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’å›ŗęœ‰ć®č§’åŗ¦Īø恮ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ć‚’åŠ å‘³ć—ćŖćć¦ć‚‚ć‚ˆć„ć€‚ In the component mounting device 110 of the second embodiment, the CPU 81 acquires multiple captured images by continuously capturing images of the nozzle 60 using the imaging unit 40 while rotating the nozzle 60 by 180Ā° or more around the axis L. That is, in the second embodiment, the multiple inspection angles of the first embodiment are not used, so the nozzle data does not need to include multiple inspection angles. Also, since only the relative value of the angle Īø matters, there is no need to take into account the offset amount of the angle Īø specific to the mounting head 32.

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆć€å–å¾—ć—ćŸč¤‡ę•°ć®ę’®åƒē”»åƒć®ćć‚Œćžć‚Œć®č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗć™ć‚‹ć€‚ä¾‹ćˆć°ć€å›³ļ¼‘ļ¼”恫ē¤ŗć•ć‚Œć‚‹å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ćŸćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ä¾‹ć«ćØ悋ćØć€ę’®åƒē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćÆ态角åŗ¦Īø恫åÆ¾ć—ć¦å›³ļ¼‘ļ¼•ć®å®Ÿē·šć®ć‚ˆć†ćŖ関äæ‚ć‚’ē¤ŗ恙ļ¼ˆē “ē·šćÆęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ļ¼‰ć€‚図ļ¼‘ļ¼•ć«ćŠć„恦ē™½ęŠœćēŸ¢å°ć§ē¤ŗć™ć‚ˆć†ć«ć€č؈ęø¬ć‚µć‚¤ć‚ŗćÆ态角åŗ¦Īøļ¼Īøļ¼“ļ¼ˆļ¼žļ¼Ā°ļ¼‰ć€Īøļ¼”ļ¼ˆļ¼œļ¼Ā°ļ¼‰ć«ćŠć„ć¦ę„µå¤§ćØćŖ悊态角åŗ¦Īøļ¼ļ¼ļ¼™ļ¼Ā°ć€ļ¼Ā°ć€ļ¼™ļ¼Ā°ć«ćŠć„ć¦ę„µå°ćØćŖć£ć¦ć„ć‚‹ć€‚č؈ęø¬ć‚µć‚¤ć‚ŗćŒę„µå¤§ć¾ćŸćÆę„µå°ćØćŖć‚‹ę’®åƒē”»åƒćÆć€å›³ļ¼‘ļ¼”恫ē¤ŗć•ć‚Œć¦ć„ć‚‹ć€‚ The CPU 81 calculates the measured size of each of the multiple captured images. For example, taking the nozzle 60 with a chipped tip 61 shown in FIG. 14 as an example, the measured size of the captured image shows a relationship with the angle Īø as shown by the solid line in FIG. 15 (the dashed line is for the standard nozzle 60S). As shown by the white arrows in FIG. 15, the measured size is maximum at angles Īø=Īø3 (>0Ā°) and Īø4 (<0Ā°), and is minimum at angles Īø=-90Ā°, 0Ā°, and 90Ā°. Captured images with maximum and minimum measured sizes are shown in FIG. 14.

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态č؈ęø¬ć‚µć‚¤ć‚ŗćŒęœ€å¤§ć§ć‚ć‚‹ę’®åƒē”»åƒć€ć™ćŖć‚ć”ć€č§’åŗ¦Īøļ¼Īøļ¼“ć«ćŠć‘ć‚‹ę’®åƒē”»åƒć‚’ē¬¬ļ¼‘ē”»åƒćØć—ć¦ęŠ½å‡ŗ恙悋怂ꬔ恫态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼‘ē”»åƒć‚’ę’®åƒć—ćŸéš›ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’åŗ¦Īøļ¼Īøļ¼“ć®å‰å¾Œć®é™¤å¤–č§’åŗ¦ļ½„Īøć«ćŠć„ć¦ę’®åƒć•ć‚ŒćŸę’®åƒē”»åƒć‚’除恄恦态č؈ęø¬ć‚µć‚¤ć‚ŗćŒęœ€å¤§ć§ć‚ć‚‹ę’®åƒē”»åƒć€ć™ćŖć‚ć”ć€č§’åŗ¦Īøļ¼Īøļ¼”ć«ćŠć‘ć‚‹ę’®åƒē”»åƒć‚’ē¬¬ļ¼’ē”»åƒćØć—ć¦ęŠ½å‡ŗ恙悋怂ē¬¬ļ¼‘ē”»åƒć®å‰å¾Œć®é™¤å¤–角åŗ¦ļ½„Īøć«ćŠć‘ć‚‹ę’®åƒē”»åƒć‚’é™¤ćć“ćØć§ć€ä¾‹ćˆć°ć€å›³ļ¼‘ļ¼•ć®č§’åŗ¦Īøļ¼Īøļ¼•ć«ćŠć‘ć‚‹ę’®åƒē”»åƒćŒē¬¬ļ¼’ē”»åƒćØć—ć¦ęŠ½å‡ŗ恕悌悋恓ćØć‚’å›žéæ恙悋恓ćØ恌恧恍悋怂 The CPU 81 extracts the captured image with the largest measurement size, i.e., the image captured at angle Īø=Īø3, as the first image. Next, the CPU 81 extracts the captured image with the largest measurement size, i.e., the image captured at angle Īø=Īø4, as the second image, excluding the captured images captured at the exclusion angle dĪø before and after the angle Īø=Īø3 of the nozzle 60 when the first image was captured. By excluding the captured images at the exclusion angle dĪø before and after the first image, it is possible to avoid, for example, the image captured at angle Īø=Īø5 in FIG. 15 being extracted as the second image.

ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ态ē¬¬ļ¼‘ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ćØćØ悂恫态ē¬¬ļ¼’ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹ć‚’åˆ¤å®šć™ć‚‹ć€‚ć“ć“ć§ć€ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćŠć‚ˆć³ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØćÆ态ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ļ¼ˆćƒŽć‚ŗ惫ļ¼–ļ¼ćØ同ēØ®é”žć§ć‚ć£ć¦å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ćŖć„ć‚‚ć®ć€å®Ÿę–½å½¢ę…‹ļ¼‘ć®å›³ļ¼—参ē…§ļ¼‰ć‚’č»øē·šļ¼¬ć®å›žć‚Šć«ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ć¦ć€ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć®ć‚µć‚¤ć‚ŗ恮角åŗ¦Īø恫åÆ¾ć™ć‚‹ę„µå¤§å€¤ć§ć‚ć‚Šć€ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćÆē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗ仄äø‹ćØć•ć‚Œć‚‹ć€‚å›³ļ¼‘ļ¼”ćŠć‚ˆć³å›³ļ¼‘ļ¼•ć«ē¤ŗć™å “åˆć€ę¬ ć‘ćŒē„”恄ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćÆå¹³é¢č¦–ć«ćŠć„ć¦é•·ę–¹å½¢ć®å½¢ēŠ¶ć§ć‚悋恋悉态ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćŠć‚ˆć³ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćÆē­‰ć—恄怂ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćŠć‚ˆć³ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćÆć€ę•°å€¤ćƒ‘ćƒ©ćƒ”ćƒ¼ć‚æćØ恗恦äŗˆć‚čØ˜ę†¶éƒØļ¼˜ļ¼’ć®ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«å«ć¾ć‚Œć¦ć„ć‚‹ć€‚ The CPU 81 compares the measured size of the first image with the first maximum size, and compares the measured size of the second image with the second maximum size to determine whether the tip 61 of the nozzle 60 is chipped. Here, the first maximum size and the second maximum size are the maximum values of the size of the standard nozzle 60S (same type as the nozzle 60, with the tip 61 not chipped; see FIG. 7 of the first embodiment) with respect to the angle Īø when viewed from the imaging direction by rotating the standard nozzle 60S by 180Ā° or more around the axis L, and the second maximum size is equal to or smaller than the first maximum size. In the case shown in FIG. 14 and FIG. 15, the tip 61 of the standard nozzle 60S without chipping has a rectangular shape in a plan view, so the first maximum size and the second maximum size are equal. The first maximum size and the second maximum size are included in advance in the nozzle data of the storage unit 82 as numerical parameters.

ęœ¬å®Ÿę–½å½¢ę…‹ć§ćÆć€å›³ļ¼‘ļ¼•ć«ē¤ŗć™ć‚ˆć†ć«ć€é™¤å¤–č§’åŗ¦ļ½„ĪøćŒé©åˆ‡ć«čØ­å®šć•ć‚Œć¦ć„ć‚‹ćŸć‚ć€ē¬¬ļ¼’ē”»åƒćØć—ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ćŒåę˜ ć•ć‚ŒćŸč§’åŗ¦Īøļ¼Īøļ¼”ć«ćŠć‘ć‚‹ę’®åƒē”»åƒćŒęŠ½å‡ŗć•ć‚Œć¦ć„ć‚‹ć€‚ć‚ˆć£ć¦ć€å›³ļ¼‘ļ¼”恫ē¤ŗć™ć‚ˆć†ć«ć€ē¬¬ļ¼’ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗļ¼ˆę’®åƒē”»åƒć®äø€ē‚¹éŽ–ē·šļ¼‰ć‚’ęÆ”č¼ƒć™ć‚‹ć“ćØć«ć‚ˆć‚Šć€å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć‚’ę¤œēŸ„恙悋恓ćØ恌恧恍悋怂 In this embodiment, as shown in FIG. 15, the exclusion angle dĪø is appropriately set, so that the captured image at angle Īø=Īø4, which reflects the chipping of the tip 61 of the nozzle 60, is extracted as the second image. Therefore, as shown in FIG. 14, by comparing the measured size of the second image with the second maximum size (the dashed dotted line in the captured image), it is possible to detect the chipping of the tip 61.

ļ¼œćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒč±å½¢ć®å½¢ēŠ¶ć‚’ćŖć™å “åˆļ¼ž
ę¬”ć«ć€č±å½¢ć®å½¢ēŠ¶ć®å…ˆē«ÆéƒØļ¼—ļ¼‘ć‚’ęœ‰ć™ć‚‹ćƒŽć‚ŗ惫ļ¼—ļ¼ć«ć¤ć„恦čŖ¬ę˜Žć™ć‚‹ć€‚ćƒŽć‚ŗ惫ļ¼—ļ¼ćÆ态ē°”å˜ć®ćŸć‚å…ˆē«ÆéƒØļ¼—ļ¼‘ćŒę¬ ć‘ć¦ć„ćŖ恄ęؙęŗ–ćƒŽć‚ŗ惫ļ¼—ļ¼ļ¼³ćØ恙悋怂
<When the nozzle tip is diamond-shaped>
Next, a description will be given of the nozzle 70 having a diamond-shaped tip 71. For simplicity, the nozzle 70 is assumed to be a standard nozzle 70S in which the tip 71 is not chipped.

図ļ¼‘ļ¼–恫ē¤ŗ恙惎ć‚ŗ惫ļ¼—ļ¼ć®å…ˆē«ÆéƒØļ¼—ļ¼‘ć®ę’®åƒē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćÆ态角åŗ¦Īø恫åÆ¾ć—ć¦å›³ļ¼‘ļ¼—ć®å®Ÿē·šć®ć‚ˆć†ćŖ関äæ‚ć‚’ē¤ŗć™ć€‚å›³ļ¼‘ļ¼—恫恊恄恦ē™½ęŠœćēŸ¢å°ć§ē¤ŗć™ć‚ˆć†ć«ć€č؈ęø¬ć‚µć‚¤ć‚ŗćÆ态角åŗ¦Īøļ¼ļ¼ļ¼™ļ¼Ā°ć€ļ¼Ā°ć€ļ¼™ļ¼Ā°ć«ćŠć„ć¦ę„µå¤§ćØćŖ悊态角åŗ¦Īøļ¼Īøļ¼–ļ¼ˆļ¼žļ¼Ā°ļ¼‰ć€Īøļ¼—ļ¼ˆļ¼œļ¼Ā°ļ¼‰ć«ćŠć„ć¦ę„µå°ćØćŖć£ć¦ć„ć‚‹ć€‚å›³ļ¼‘ļ¼–ćÆ态č؈ęø¬ć‚µć‚¤ć‚ŗćŒę„µå¤§ć¾ćŸćÆę„µå°ćØćŖć‚‹ę’®åƒē”»åƒć‚’ē¤ŗ恙怂 The measured size of the captured image of the tip 71 of the nozzle 70 shown in Figure 16 shows a relationship with the angle Īø as shown by the solid line in Figure 17. As shown by the white arrows in Figure 17, the measured size is maximum at angles Īø = -90Ā°, 0Ā°, and 90Ā°, and is minimum at angles Īø = Īø6 (> 0Ā°) and Īø7 (< 0Ā°). Figure 16 shows captured images where the measured size is maximum or minimum.

ćØ恓悍恧态ęؙęŗ–ćƒŽć‚ŗ惫ļ¼—ļ¼ļ¼³ć«äæ‚ć‚‹ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćÆå¤§ććē•°ćŖ悋ćØćØ悂恫态ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćÆč؈ęø¬ć‚µć‚¤ć‚ŗć®ę„µå°å€¤ć«čæ‘ć„ę•°å€¤ćØćŖć£ć¦ć„ć‚‹ć€‚ć—ćŸćŒć£ć¦ć€ä¾‹ćˆć°ć€Īøļ¼Īøļ¼˜ć«ćŠć‘ć‚‹ę’®åƒē”»åƒćŒē¬¬ļ¼’ē”»åƒćØć—ć¦ęŠ½å‡ŗ恕悌ćŖć„ć‚ˆć†ć«é™¤å¤–č§’åŗ¦ļ¼¤Īø悒čØ­å®šć™ć‚‹åæ…č¦ćŒć‚ć‚‹ć€‚ä»®ć«Īøļ¼Īøļ¼˜ć«ćŠć‘ć‚‹ę’®åƒē”»åƒćŒē¬¬ļ¼’ē”»åƒćØć—ć¦ęŠ½å‡ŗ恕悌悋ćØć€ęœ¬ę„ęŠ½å‡ŗć•ć‚Œć‚‹ć¹ćč§’åŗ¦Īøļ¼ļ¼ļ¼™ļ¼Ā°ć€ļ¼™ļ¼Ā°ć®å‘Øč¾ŗć®ę’®åƒē”»åƒćŒęŠ½å‡ŗ恕悌ćŖ恄恟悁态角éƒØļ¼—ļ¼’ļ¼¢ć€ļ¼—ļ¼’ļ¼¤ć®ę¬ ć‘ć‚’ę¤œēŸ„恧恍ćŖć„å “åˆćŒć‚ć‚‹ć€‚ However, the first and second maximum sizes for the standard nozzle 70S are significantly different, and the second maximum size is close to the minimum measured size. Therefore, for example, it is necessary to set the exclusion angle DĪø so that the image captured at Īø = Īø8 is not extracted as the second image. If the image captured at Īø = Īø8 is extracted as the second image, the images captured around angles Īø = -90Ā° and 90Ā° that should have been extracted will not be extracted, and chipping of corners 72B and 72D may not be detected.

äøŠčØ˜ć—ćŸć‚ˆć†ć«ć€å®Ÿę–½å½¢ę…‹ļ¼’恫äæ‚ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ć€ļ¼—ļ¼ć®ēŠ¶ę…‹ć®ę¤œęŸ»ć«ćŠć„恦ćÆć€é€£ē¶šę’®åƒć«ć‚ˆć‚Šå¾—ć‚‰ć‚ŒćŸč¤‡ę•°ć®ę’®åƒē”»åƒć‹ć‚‰ēœŸę­£ćŖē¬¬ļ¼‘ē”»åƒćŠć‚ˆć³ē¬¬ļ¼’ē”»åƒć‚’ęŠ½å‡ŗć™ć‚‹ćŸć‚ć«ć€é™¤å¤–č§’åŗ¦ļ½„Īø态ļ¼¤Īøć‚’é©åˆ‡ć«čØ­å®šć™ć‚‹ć“ćØćŒé‡č¦ć§ć‚ć‚‹ć€‚
ļ¼»å®Ÿę–½å½¢ę…‹ļ¼’ć®ä½œē”ØåŠ¹ęžœļ¼½
As described above, in inspecting the state of nozzles 60, 70 in embodiment 2, it is important to appropriately set the exclusion angles dĪø, DĪø in order to extract true first and second images from multiple captured images obtained by successive imaging.
[Effects of the Second Embodiment]

å®Ÿę–½å½¢ę…‹ļ¼’恫äæ‚ć‚‹éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼‘ļ¼ćÆ态åŸŗęæļ¼¢ć«éƒØå“ć‚’å®Ÿč£…ć™ć‚‹éƒØå“å®Ÿč£…č£…ē½®ļ¼‘ļ¼‘ļ¼ć§ć‚ć£ć¦ć€éƒØå“ć‚’åøē€ć™ć‚‹ćƒŽć‚ŗ惫ļ¼–ļ¼ćŒč»øē·šļ¼¬äøŠć«č£…ē€ć•ć‚ŒćŸå®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’ćØ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®å›žć‚Šć«å›žč»¢ć•ć›ć‚‹å›žč»¢ę©Ÿę§‹ļ¼ˆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ļ¼‰ćØ态惎ć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®č»øę–¹å‘ćØē›“äŗ¤ć™ć‚‹ę’®åƒę–¹å‘ć‹ć‚‰ę’®åƒć™ć‚‹ę’®åƒéƒØļ¼”ļ¼ćØ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ悒čØ˜ę†¶ć™ć‚‹čØ˜ę†¶éƒØļ¼˜ļ¼’ćØć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćØć€ć‚’å‚™ćˆć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćÆć€å›žč»¢ę©Ÿę§‹ļ¼ˆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ļ¼‰ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’å›žč»¢ć•ć›ć¦ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č»øē·šļ¼¬ć®å›žć‚Šć®č¤‡ę•°ć®č§’åŗ¦ć«ćŠć„ć¦ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć™ć‚‹ć“ćØ恧态ļ¼‘ć¤ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć«ć¤ćč¤‡ę•°ć®ę’®åƒē”»åƒć‚’å–å¾—ć—ć€č¤‡ę•°ć®ę’®åƒē”»åƒćØčØ˜ę†¶éƒØļ¼˜ļ¼’恫čØ˜ę†¶ć•ć‚ŒćŸćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć€‚ The component mounting device 110 according to the second embodiment is a component mounting device 110 that mounts components on a board B, and includes a mounting head 32 on which a nozzle 60 that picks up components is attached on an axis L, a rotation mechanism (R-axis servo motor 36) that rotates the nozzle 60 around the axis L, an imaging unit 40 that images the nozzle 60 from an imaging direction perpendicular to the axial direction of the axis L, a storage unit 82 that stores nozzle data, and a control unit (CPU 81). The control unit (CPU 81) rotates the nozzle 60 using the rotation mechanism (R-axis servo motor 36) and images the nozzle 60 using the imaging unit 40 at multiple angles around the axis L of the nozzle 60, thereby obtaining multiple captured images for each nozzle 60, and inspects the state of the nozzle 60 based on the multiple captured images and the nozzle data stored in the storage unit 82.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’č»øē·šļ¼¬ć®å›žć‚Šć®č¤‡ę•°ć®č§’åŗ¦ć«ćŠć„ć¦ę’®åƒć—ć¦å–å¾—ć•ć‚ŒćŸč¤‡ę•°ć®ę’®åƒē”»åƒćØčØ˜ę†¶éƒØļ¼˜ļ¼’恫čØ˜ę†¶ć•ć‚ŒćŸćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ćŒę¤œęŸ»ć•ć‚Œć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘恮ꬠ恑ē­‰ć®ē•°åøø悒ꤜēŸ„ć—ć‚„ć™ć„ć€‚ć¾ćŸć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ē•°åøø悒ꤜēŸ„恗悄恙恄꧋ꈐ恧恂悋恋悉态éƒØå“ć®åøē€ēŽ‡ć®ä½Žäø‹ć‚„å®Ÿč£…ćšć‚Œē­‰ć‚’ęŠ‘åˆ¶ć™ć‚‹ć“ćØ恌恧恍悋怂 With this configuration, the state of the nozzle 60 is inspected based on multiple captured images obtained by capturing images of the nozzle 60 at multiple angles around the axis L and the nozzle data stored in the memory unit 82, making it easy to detect abnormalities such as chipping of the tip 61 of the nozzle 60. In addition, because the configuration makes it easy to detect abnormalities in the nozzle 60, it is possible to suppress a decrease in the component pickup rate and mounting misalignment.

å®Ÿę–½å½¢ę…‹ļ¼’恧ćÆ态惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆ态ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØ态ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗ仄äø‹ć®ē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØć€é™¤å¤–č§’åŗ¦ļ½„ĪøćØć€ć‚’å«ćæ态惎ć‚ŗ惫ļ¼–ļ¼ćØ同ēØ®é”žć§ć‚ć‚Šć€å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ćŖ恄ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć‚’č»øē·šļ¼¬ć®å›žć‚Šć«ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ć¦ć€ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®ęؙęŗ–ćƒŽć‚ŗ惫ļ¼–ļ¼ļ¼³ć®ć‚µć‚¤ć‚ŗćÆ态ē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗć«ćŠć„ć¦ę„µå¤§å€¤ć‚’ćØć‚Šć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćÆć€å›žč»¢ę©Ÿę§‹ļ¼ˆļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ļ¼‰ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ćŖćŒć‚‰ć€ę’®åƒéƒØļ¼”ļ¼ć«ć‚ˆć‚ŠćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’連ē¶šēš„ć«ę’®åƒć™ć‚‹ć“ćØć§ć€č¤‡ę•°ć®ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹é€£ē¶šę’®åƒå‡¦ē†ćØć€č¤‡ę•°ć®ę’®åƒē”»åƒć«åŸŗ恄恄恦複ꕰ恮č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋悵悤ć‚ŗē®—å‡ŗ処ē†ćØ态č؈ęø¬ć‚µć‚¤ć‚ŗćŒęœ€å¤§ć§ć‚ć‚‹ē¬¬ļ¼‘ē”»åƒćØ态ē¬¬ļ¼‘ē”»åƒć‚’ę’®åƒć—ćŸéš›ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ć®č§’åŗ¦ć®å‰å¾Œć®é™¤å¤–角åŗ¦ļ½„Īøć«ćŠć„ć¦ę’®åƒć•ć‚ŒćŸę’®åƒē”»åƒć‚’除恄恦č؈ęø¬ć‚µć‚¤ć‚ŗćŒęœ€å¤§ć§ć‚ć‚‹ē¬¬ļ¼’ē”»åƒćØć€ć‚’ęŠ½å‡ŗ恙悋ē”»åƒęŠ½å‡ŗ処ē†ćØ态ē¬¬ļ¼‘ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ćØćØ悂恫态ē¬¬ļ¼’ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ćØć€ć‚’å®Ÿč”Œć™ć‚‹ć€‚ In embodiment 2, the nozzle data includes a first maximum size, a second maximum size equal to or smaller than the first maximum size, and an exclusion angle dĪø, and a standard nozzle 60S of the same type as the nozzle 60 and having an unbroken tip 61 is rotated 180Ā° or more around the axis L, and the size of the standard nozzle 60S when viewed from the imaging direction takes maximum values at the first maximum size and the second maximum size, and the control unit (CPU 81) captures multiple images of the nozzle 60 continuously using the imaging unit 40 while rotating the nozzle 60 by 180Ā° or more using the rotation mechanism (R-axis servo motor 36). The system performs a continuous imaging process to acquire captured images of the nozzle 60, a size calculation process to calculate multiple measurement sizes based on the multiple captured images, an image extraction process to extract a first image with the maximum measurement size and a second image with the maximum measurement size excluding captured images captured at an exclusion angle dĪø before and after the angle of the nozzle 60 when the first image was captured, and a determination process to determine whether the tip 61 of the nozzle 60 is chipped by comparing the measurement size of the first image with the first maximum size and comparing the measurement size of the second image with the second maximum size.

ć“ć®ć‚ˆć†ćŖę§‹ęˆć«ć‚ˆć‚Œć°ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ļ¼‘ļ¼˜ļ¼Ā°ä»„äøŠå›žč»¢ć•ć›ćŖ恌悉惎ć‚ŗ惫ļ¼–ļ¼ć‚’連ē¶šēš„ć«ę’®åƒć—ć¦å–å¾—ć•ć‚Œć‚‹č¤‡ę•°ć®ę’®åƒē”»åƒć«åŸŗć„ć„ć¦ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć‚’ę’®åƒć™ć¹ćč§’åŗ¦ĪøćŒå«ć¾ć‚Œć¦ć„ćŖć„å “åˆć‚„ć€å®Ÿč£…ćƒ˜ćƒƒćƒ‰ļ¼“ļ¼’å›ŗęœ‰ć®č§’åŗ¦Īø恮ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ćŒåŠ å‘³ć•ć‚Œć¦ć„ćŖć„å “åˆć§ć‚‚ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®ēŠ¶ę…‹ć€ē‰¹ć«ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć®ę¤œęŸ»ćŒåÆčƒ½ć§ć‚ć‚‹ć€‚ć¾ćŸć€åˆ¶å¾”éƒØļ¼ˆļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ļ¼‰ćÆć€č¤‡ę•°ć®ę’®åƒē”»åƒć‹ć‚‰ē¬¬ļ¼‘ē”»åƒćØē¬¬ļ¼’ē”»åƒćØć‚’ęŠ½å‡ŗ恗态ē¬¬ļ¼‘ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼‘ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ćØćØ悂恫态ē¬¬ļ¼’ē”»åƒć®č؈ęø¬ć‚µć‚¤ć‚ŗćØē¬¬ļ¼’ę„µå¤§ć‚µć‚¤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØ恧态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹ć‹ć‚‰ć€ćƒŽć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć®ę¤œęŸ»ć®ē²¾åŗ¦ć‚’向äøŠć•ć›ć‚‹ć“ćØ恌恧恍悋怂 According to this configuration, the state of the nozzle 60 is inspected based on multiple captured images obtained by continuously capturing images of the nozzle 60 while rotating the nozzle 60 by 180Ā° or more. Therefore, even if the nozzle data does not include the angle Īø at which the nozzle 60 should be captured or the offset amount of the angle Īø specific to the mounting head 32 is not taken into account, it is possible to inspect the state of the nozzle 60, particularly the chipping of the tip 61 of the nozzle 60. In addition, the control unit (CPU 81) extracts a first image and a second image from the multiple captured images, compares the measured size of the first image with the first maximum size, and compares the measured size of the second image with the second maximum size to determine whether the tip 61 of the nozzle 60 is chipped, thereby improving the accuracy of the inspection for chipping of the tip 61 of the nozzle 60.

ļ¼œä»–ć®å®Ÿę–½å½¢ę…‹ļ¼ž
ļ¼ˆļ¼‘ļ¼‰å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆ态ļ¼“ć¤ć®ć‚·ćƒ£ćƒ•ćƒˆļ¼“ļ¼“ćÆļ¼‘ć¤ć®åŒäø€ć®ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æļ¼“ļ¼–ć«ć‚ˆć‚Šč»øē·šļ¼¬ć®å›žć‚Šć«å›žč»¢ć™ć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ćŸćŒć€č¤‡ę•°ć®ć‚·ćƒ£ćƒ•ćƒˆć®ćć‚Œćžć‚Œć«ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æ恌čØ­ć‘ć‚‰ć‚Œć€å„ć‚·ćƒ£ćƒ•ćƒˆćŒåˆ„ć®ļ¼²č»øć‚µćƒ¼ćƒœćƒ¢ćƒ¼ć‚æć«ć‚ˆć‚Šå›žč»¢ć™ć‚‹ę§‹ęˆćØć—ć¦ć‚‚ć‚ˆć„ć€‚
ļ¼ˆļ¼’ļ¼‰å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć€ļ¼–ļ¼•ć€ļ¼—ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘态ļ¼–ļ¼–态ļ¼—ļ¼‘ć®å½¢ēŠ¶ćÆć€å››č§’å½¢ć§ć‚ć£ćŸćŒć€ä¾‹ćˆć°ć€ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®å½¢ēŠ¶ćÆ态äøøćæ悒åøÆć³ćŸē•„å¤šč§’å½¢ć‚„ć€ę„•å††å½¢ć€ē•„å††å½¢ć§ć‚ć£ć¦ć‚‚ć‚ˆć„ć€‚
<Other embodiments>
(1) In embodiment 1, the three shafts 33 are rotated around the axis L by one and the same R-axis servo motor 36. However, an R-axis servo motor may be provided on each of the multiple shafts, and each shaft may be rotated by a separate R-axis servo motor.
(2) In the first embodiment, the tip portions 61, 66, and 71 of the nozzles 60, 65, and 70 have a rectangular shape. However, for example, the shape of the tip portions of the nozzles may be a rounded polygonal shape, an elliptical shape, or a circular shape.

ļ¼ˆļ¼“ļ¼‰å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆ态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ćŒę¤œēŸ„恕悌态惎ć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«äŗˆå‚™ć®ćƒŽć‚ŗ惫ļ¼–ļ¼ćŒćŖć„å “åˆć€ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆ惎ć‚ŗ惫ļ¼–ļ¼ć®ē•°åøøć‚’ćƒ¦ćƒ¼ć‚¶ć«ēŸ„ć‚‰ć›ć¦ć€ćƒžć‚·ćƒ³å‹•ä½œć‚’åœę­¢ć•ć›ć‚‹ę§‹ęˆć§ć‚ć£ćŸćŒļ¼ˆļ¼³ļ¼‘ļ¼’ļ¼ļ¼‰ć€ć“ć‚Œć«é™ć‚‰ć‚Œć‚‹ć“ćØćÆćŖć„ć€‚ä¾‹ćˆć°ć€ē•°åøø悒ꤜēŸ„恗恟惎ć‚ŗćƒ«ć‚’ä½æć£ćŸåŸŗęæäø€ęžšć®ē”Ÿē”£ć‚’äø­ę­¢ć—态ēµ‚äŗ†å¾Œć«ćƒžć‚·ćƒ³å‹•ä½œć‚’åœę­¢ć•ć›ć¦ć‚‚ć‚ˆć„ć€‚ć¾ćŸćÆ态ē•°åøø悒ꤜēŸ„恗恟惎ć‚ŗćƒ«ć‚’ä½æć£ćŸē”Ÿē”£ć‚’äø­ę­¢ć—态ēµ±åˆē®”ē†ć‚·ć‚¹ćƒ†ćƒ ć«ćƒŽć‚ŗ惫äøč¶³ć‚’連ēµ”恗态ē”Ÿē”£ć‚’ē¶™ē¶šć—态äŗˆå‚™ć®ćƒŽć‚ŗćƒ«ćŒč£œå……ć•ć‚ŒćŸć‚‰ćć®ćƒŽć‚ŗćƒ«ć‚’ä½æć£ćŸē”Ÿē”£ć‚’å†é–‹ć™ć‚‹ć‚ˆć†ć«ć—ć¦ć‚‚ć‚ˆć„ć€‚ (3) In the first embodiment, if chipping of the tip 61 of the nozzle 60 is detected and there is no spare nozzle 60 in the nozzle stocker, the CPU 81 is configured to inform the user of the abnormality in the nozzle 60 and stop the machine operation (S120), but this is not limited to this. For example, production of one board using the nozzle for which an abnormality was detected may be stopped, and the machine operation may be stopped after completion. Alternatively, production using the nozzle for which an abnormality was detected may be stopped, the nozzle shortage may be notified to the integrated management system, production may be continued, and production using the nozzle may be resumed once spare nozzles have been replenished.

ļ¼ˆļ¼”ļ¼‰å®Ÿę–½å½¢ę…‹ļ¼‘恧ćÆ态ļ¼£ļ¼°ļ¼µļ¼˜ļ¼‘ćÆē¬¬ļ¼‘ę’®åƒē”»åƒć‚’å–å¾—ć—ćŸå¾Œć€ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恗态惎ć‚ŗ惫ļ¼–ļ¼ć®å…ˆē«ÆéƒØļ¼–ļ¼‘ć®ę¬ ć‘ć®åˆ¤å®šć‚’å®Ÿč”Œć—ć€ę¬ ć‘ćŒę¤œēŸ„恕悌ćŖć„å “åˆć«ćÆ态ꬔ恄恧ē¬¬ļ¼’ę’®åƒē”»åƒć‚’å–å¾—ć™ć‚‹ę§‹ęˆć§ć‚ć£ćŸćŒć€ć“ć‚Œć«é™ć‚‰ć‚Œć‚‹ć“ćØćÆćŖć„ć€‚ä¾‹ćˆć°ć€ļ¼£ļ¼°ļ¼µćÆē¬¬ļ¼‘ę’®åƒē”»åƒć‚’å–å¾—ć—ćŸå¾Œć€ē¬¬ļ¼’ę’®åƒē”»åƒć‚’å–å¾—ć—ć€ę¬”恄恧态ē¬¬ļ¼‘č؈ęø¬ć‚µć‚¤ć‚ŗćŠć‚ˆć³ē¬¬ļ¼’č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恗态惎ć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ć‚’åˆ¤å®šć—ć¦ć‚‚ć‚ˆć„ć€‚ (4) In the first embodiment, the CPU 81 acquires the first captured image, calculates the first measurement size, and executes a check for chipping of the tip 61 of the nozzle 60. If no chipping is detected, the CPU then acquires the second captured image. However, this is not limited to this. For example, the CPU may acquire the first captured image, then acquire the second captured image, and then calculate the first and second measurement sizes to check for chipping of the tip of the nozzle.

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ļ¼—ļ¼‘ā€¦å…ˆē«ÆéƒØ态ļ¼—ļ¼’ļ¼”态ļ¼—ļ¼’ļ¼¢ć€ļ¼—ļ¼’ļ¼£ć€ļ¼—ļ¼’ļ¼¤ā€¦č§’éƒØ态ļ¼—ļ¼“ā€¦åøē€å­”
ļ¼˜ļ¼‘ā€¦ļ¼£ļ¼°ļ¼µć€ļ¼˜ļ¼’ā€¦čØ˜ę†¶éƒØ态ļ¼˜ļ¼“ā€¦ćƒ”ćƒ¢ćƒŖ态ļ¼˜ļ¼”ā€¦č”Øē¤ŗéƒØ态ļ¼˜ļ¼•ā€¦å…„åŠ›č£…ē½®ć€ļ¼˜ļ¼–ā€¦ćƒ¢ćƒ¼ć‚æć‚³ćƒ³ćƒˆćƒ­ćƒ¼ćƒ©ć€ļ¼˜ļ¼—ā€¦ć‚«ćƒ”惩ļ¼©ļ¼ļ¼¦ć€ļ¼˜ļ¼˜ā€¦ē…§ę˜Žć‚³ćƒ³ćƒˆćƒ­ćƒ¼ćƒ©ć€ļ¼˜ļ¼™ā€¦å„ēØ®ļ¼©ļ¼ļ¼Æ态ļ¼™ļ¼ā€¦ćƒ¢ćƒ¼ć‚æć‚¢ćƒ³ćƒ—ć€ļ¼™ļ¼‘ā€¦ćƒ¢ćƒ¼ć‚æ
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10, 110... component mounting device 11... base, 12... component supply unit, 13... feeder, 14... transport conveyor, 15... transport belt 20... drive unit, 21... X-axis beam, 22... Y-axis frame, 23... X-axis servo motor, 24... Y-axis servo motor 30... head unit 31... head unit main body, 32... mounting head, 33... shaft, 33A... shaft pulley, 36... R-axis servo motor, 36A... drive pulley, 37... belt, 38... auxiliary pulley, 40... imaging unit, 41... first camera, 42... first lighting 50... second camera, 51... second lighting, 52... third camera, 53... third lighting 60... nozzle (tip is rectangular)
60S: Standard nozzle; 61: Tip; 62A, 62B, 62C, 62D: Corners; 63: Suction hole; 65: Nozzle (with square tip)
66: tip portion; 67A, 67B, 67C, 67D: corner portions; 68: suction hole; 70: nozzle (tip portion has a diamond shape)
71...tip portion, 72A, 72B, 72C, 72D...corner portion, 73...suction hole 81...CPU, 82...storage portion, 83...memory, 84...display portion, 85...input device, 86...motor controller, 87...camera I/F, 88...lighting controller, 89...various I/O, 90...motor amplifier, 91...motor B...circuit board, dĪø, DĪø...exclusion angle, L...axis, SA...reference axis

Claims (5)

åŸŗęæ恫éƒØå“ć‚’å®Ÿč£…ć™ć‚‹éƒØå“å®Ÿč£…č£…ē½®ć§ć‚ć£ć¦ć€
前čؘéƒØå“ć‚’åøē€ć™ć‚‹ćƒŽć‚ŗćƒ«ćŒč»øē·šäøŠć«č£…ē€ć•ć‚ŒćŸå®Ÿč£…ćƒ˜ćƒƒćƒ‰ćØ态
前čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®å›žć‚Šć«å›žč»¢ć•ć›ć‚‹å›žč»¢ę©Ÿę§‹ćØ态
前čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čؘč»øē·šć®č»øę–¹å‘ćØē›“äŗ¤ć™ć‚‹ę’®åƒę–¹å‘ć‹ć‚‰ę’®åƒć™ć‚‹ę’®åƒéƒØćØ态
惎ć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æ悒čØ˜ę†¶ć™ć‚‹čØ˜ę†¶éƒØćØ态
制徔éƒØćØć€ć‚’å‚™ćˆć€
前čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆć€č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć‚’含ćæ态
前čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØć®ę¬ ć‘ćŒē™ŗē”Ÿć—悄恙恄ē®‡ę‰€ćŒć€å‰čؘč»øę–¹å‘ćŠć‚ˆć³å‰čØ˜ę’®åƒę–¹å‘ć®åŒę–¹ć«ē›“äŗ¤ć™ć‚‹å¹…ę–¹å‘ć«ćŠć‘ć‚‹ē«ÆéƒØć«é…ć•ć‚Œć‚‹ć‚ˆć†ć«ćŖć£ć¦ć„ć‚‹å‰čØ˜ćƒŽć‚ŗćƒ«ć®å‰čؘč»øē·šć®å›žć‚Šć®č§’åŗ¦ć§ć‚悊态
前čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćÆć€å‰čØ˜ćƒŽć‚ŗ惫ćØ同ēØ®é”žć§ć‚ć‚Šć€å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ćŖ恄ęؙęŗ–ćƒŽć‚ŗćƒ«ć‚’å‰čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć«å›žč»¢ć•ć›ć¦å‰čؘęؙęŗ–ćƒŽć‚ŗćƒ«ć‚’å‰čØ˜ę’®åƒę–¹å‘ć‹ć‚‰č¦‹ćŸćØćć®å‰čؘęؙęŗ–ćƒŽć‚ŗćƒ«ć®ć‚µć‚¤ć‚ŗ恧恂悋複ꕰ恮ęؙęŗ–悵悤ć‚ŗć‚’å«ćæ态
前čؘ制徔éƒØćÆć€å‰čØ˜å›žč»¢ę©Ÿę§‹ć«ć‚ˆć‚Šå‰čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ć®ć†ć”恮ļ¼‘恤仄äøŠć®ę¤œęŸ»č§’åŗ¦ć«å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å›žč»¢ć•ć›ć¦ć€å‰čØ˜ę’®åƒéƒØć«ć‚ˆć‚Šå‰čؘļ¼‘恤仄äøŠć®ę¤œęŸ»č§’åŗ¦ć«ć‚ć‚‹å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć‚‹ć“ćØ恧态ļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć‚’å–å¾—ć—ć€å‰čؘļ¼‘恤仄äøŠć®ę’®åƒē”»åƒćØ前čؘčØ˜ę†¶éƒØ恫čØ˜ę†¶ć•ć‚ŒćŸå‰čØ˜ćƒŽć‚ŗćƒ«ćƒ‡ćƒ¼ć‚æćØ恫åŸŗć„ć„ć¦å‰čØ˜ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć€éƒØå“å®Ÿč£…č£…ē½®ć€‚
A component mounting apparatus for mounting components on a substrate, comprising:
a mounting head having a nozzle for suctioning the component attached on an axis thereof;
A rotation mechanism that rotates the nozzle about the axis;
an imaging unit that images the nozzle from an imaging direction perpendicular to an axial direction of the axis;
A storage unit that stores nozzle data;
A control unit,
the nozzle data includes a plurality of test angles;
the plurality of inspection angles are angles about the axis of the nozzle such that a portion of the tip of the nozzle where chipping is likely to occur is disposed at an end in a width direction perpendicular to both the axial direction and the imaging direction;
the nozzle data includes a plurality of standard sizes which are sizes of the standard nozzle when a standard nozzle of the same type as the nozzle and having an unbroken tip is rotated to the plurality of inspection angles and the standard nozzle is viewed from the imaging direction,
The control unit rotates the nozzle to one or more inspection angles among the multiple inspection angles using the rotation mechanism, and images the nozzle at the one or more inspection angles using the imaging unit, thereby obtaining one or more captured images, and inspects the condition of the nozzle based on the one or more captured images and the nozzle data stored in the memory unit.
前čؘ制徔éƒØćÆ态
前čؘļ¼‘恤仄äøŠć®ę’®åƒē”»åƒć«åŸŗ恄恄恦ļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗ悒ē®—å‡ŗ恙悋悵悤ć‚ŗē®—å‡ŗ処ē†ćØ态
前čؘļ¼‘恤仄äøŠć®č؈ęø¬ć‚µć‚¤ć‚ŗćØ前čØ˜č¤‡ę•°ć®ęؙęŗ–悵悤ć‚ŗ恮恆恔恮ļ¼‘恤仄äøŠć®ęؙęŗ–悵悤ć‚ŗćØ悒ęÆ”č¼ƒć™ć‚‹ć“ćØć§ć€å‰čØ˜ćƒŽć‚ŗćƒ«ć®å…ˆē«ÆéƒØćŒę¬ ć‘ć¦ć„ć‚‹ć‹å¦ć‹ć‚’åˆ¤å®šć™ć‚‹åˆ¤å®šå‡¦ē†ćØ态
ć‚’å®Ÿč”Œć™ć‚‹ć€č«‹ę±‚é …ļ¼‘恫čØ˜č¼‰ć®éƒØå“å®Ÿč£…č£…ē½®ć€‚
The control unit is
a size calculation process for calculating one or more measurement sizes based on the one or more captured images;
a determination process for determining whether or not the tip of the nozzle is chipped by comparing the one or more measured sizes with one or more standard sizes among the plurality of standard sizes;
The component mounting apparatus according to claim 1 ,
前čØ˜č¤‡ę•°ć®ę¤œęŸ»č§’åŗ¦ćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ćŒå–ć‚Šä»˜ć‘ć‚‰ć‚Œć‚‹å‰čØ˜å®Ÿč£…ćƒ˜ćƒƒćƒ‰ć«å›ŗęœ‰ć®ć‚Ŗćƒ•ć‚»ćƒƒćƒˆé‡ć‚’åŠ å‘³ć—ć¦čØ­å®šć•ć‚Œć¦ć„ć‚‹ć€č«‹ę±‚é …ļ¼‘ć¾ćŸćÆ請걂項ļ¼’恫čØ˜č¼‰ć®éƒØå“å®Ÿč£…č£…ē½®ć€‚ The component mounting device according to claim 1 or 2, wherein the multiple inspection angles are set taking into account an offset amount specific to the mounting head to which the nozzle is attached. 前čؘ制徔éƒØćŒå‰čØ˜ćƒŽć‚ŗ惫恮ēŠ¶ę…‹ć‚’ę¤œęŸ»ć™ć‚‹ć‚æć‚¤ćƒŸćƒ³ć‚°ćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’å‰čØ˜å®Ÿč£…ćƒ˜ćƒƒćƒ‰ć«č£…ē€ć—ćŸē›“å¾Œć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ćƒŽć‚ŗćƒ«ć‚¹ćƒˆćƒƒć‚«ćƒ¼ć«åŽē“ć™ć‚‹ē›“å‰ć€åøē€ć‚Øćƒ©ćƒ¼ć®ē™ŗē”Ÿę™‚态äŗˆć‚čØ­å®šć•ć‚ŒćŸå®šęœŸć‚æć‚¤ćƒŸćƒ³ć‚°ć€ćŠć‚ˆć³å‰čؘåŸŗęæć®ę¬é€ę™‚ć®ć†ć”ć€å°‘ćŖ恏ćØ悂ļ¼‘恤恮ć‚æć‚¤ćƒŸćƒ³ć‚°ćØć•ć‚Œć‚‹ć€č«‹ę±‚é …ļ¼‘恋悉請걂項ļ¼“ć®ć„ćšć‚Œć‹äø€é …恫čØ˜č¼‰ć®éƒØå“å®Ÿč£…č£…ē½®ć€‚ 4. The component mounting device according to claim 1, wherein the control unit inspects the state of the nozzle at at least one of the following times : immediately after the nozzle is attached to the mounting head, immediately before the nozzle is stored in a nozzle stocker, when a suction error occurs, at a predetermined regular timing, and when the substrate is transported. 前čØ˜ę’®åƒéƒØćÆć€å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ę’®åƒć™ć‚‹ę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ćØć€å‰čØ˜ę’®åƒę–¹å‘ć«ć¤ć„ć¦å‰čØ˜ę¤œęŸ»ē”Øć‚«ćƒ”ćƒ©ćØćØć‚‚ć«å‰čØ˜ćƒŽć‚ŗćƒ«ć‚’ęŒŸć‚€ć‚ˆć†ć«é…ć•ć‚Œć‚‹ę¤œęŸ»ē”Øē…§ę˜ŽćØć€ć‚’å‚™ćˆć€
前čØ˜ę¤œęŸ»ē”Øē…§ę˜Žć®å…‰ęŗćÆå¹³č”Œå…‰ć§ć‚ć‚‹ć€č«‹ę±‚é …ļ¼‘恋悉請걂項ļ¼”ć®ć„ćšć‚Œć‹äø€é …恫čØ˜č¼‰ć®éƒØå“å®Ÿč£…č£…ē½®ć€‚
the imaging unit includes an inspection camera that images the nozzle, and an inspection light that is disposed so as to sandwich the nozzle together with the inspection camera in the imaging direction;
5. The component mounting apparatus according to claim 1 , wherein a light source of the inspection illumination emits parallel light.
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