JP7567613B2 - Dry Ice Blasting Equipment - Google Patents

Description

The present invention relates to a dry ice blasting device that sprays granular or powdered dry ice.

A dry ice blasting device is known that sprays granular or powdered dry ice (hereinafter, sometimes collectively referred to as "dry ice pellets") from the tip of a nozzle (see Patent Document 1).

The dry ice blasting device described above is used, for example, for surface treatment of workpieces (cleaning and roughening the workpiece surface, etc.). Specifically, dry ice particles ejected from the nozzle tip of the dry ice blasting device are sprayed onto the surface of a silicon wafer, thereby removing particulate matter and contaminants adhering to the surface of the silicon wafer. In addition, dry ice particles ejected from the nozzle tip of the dry ice blasting device are sprayed onto the surface of the insulating coating of an electric wire, thereby forming fine irregularities on the surface of the insulating coating.

The dry ice blasting device is equipped with a crushing means for crushing the dry ice blocks to produce dry ice granules. In the following description, the dry ice blocks before being crushed by the crushing means may be called "dry ice pellets" to distinguish them from the dry ice granules. The dry ice blasting device further includes a hopper to which the dry ice pellets are supplied, and a transport means for transporting the dry ice pellets supplied to the hopper to the crushing means.

In one conventional dry ice blasting device, the conveying means is made up of a screw feeder. The screw feeder that constitutes the conveying means is equipped with a screw with a helical blade. The screw feeder conveys the dry ice pellets sent out from the hopper to the crushing means by means of a rotating screw.

JP 2000-119840 A

The amount of dry ice pellets conveyed by the screw feeder is determined by the pitch of the blades formed on the screw and the rotation speed of the screw. Therefore, if the amount of dry ice pellets sent from the hopper to the screw feeder is constant and the rotation speed of the screw is also constant, a constant amount of dry ice pellets should always be supplied to the crushing means.

However, the amount of dry ice pellets actually supplied to the crushing means (pellet supply amount) is not always constant. For example, even if the pellet supply amount (total amount) per minute is constant, the pellet supply amount per 0.5 seconds or per second is not necessarily constant. In short, there is variation in the amount of dry ice pellets supplied to the crushing means by the screw feeder. And when the variation in the pellet supply amount becomes large, the spraying of the dry ice particles becomes unstable. Specifically, the amount of dry ice particles sprayed increases or decreases, or spraying temporarily stops.

Furthermore, if the spraying of the dry ice particles is unstable, there is a risk that the surface treatment of the workpiece will be uneven. In particular, when performing surface treatment while moving the nozzle or workpiece quickly, there is a greater risk of uneven treatment or untreated areas occurring.

The object of the present invention is to provide a dry ice blasting device that can stably spray dry ice particles.

The dry ice blasting device of the present invention has a nozzle from which dry ice particles are sprayed, a crushing section that crushes dry ice pellets to generate the dry ice particles, and a transport section that transports the dry ice pellets to the crushing section. The transport section includes a tray on which the dry ice pellets are placed and an electromagnet as a drive source that vibrates the tray, and transports the dry ice pellets on the tray to the crushing section while vibrating them.

In one aspect of the present invention, the tray is made of resin, ceramics, or wood.

In another aspect of the present invention, the surface of the tray that comes into contact with the dry ice pellets is provided with at least one of a plurality of convex portions and concave portions that are smaller than the dry ice pellets.

In another aspect of the present invention, a detection unit is provided that detects a change in the amount of the dry ice pellets sprayed from the nozzle. The transport unit controls the amount of the dry ice pellets transported based on the detection result of the detection unit.

In another aspect of the present invention, the transport unit includes a control unit that changes the energization state of the electromagnet based on the detection result of the detection unit to change the vibration state of the tray.

The present invention provides a dry ice blasting device that can stably spray dry ice particles.

FIG. 1 is a diagram showing a configuration of a dry ice blasting device according to an embodiment. FIG. 2 is a diagram showing a configuration of a crushing unit shown in FIG. 1 . FIG. 2 is a diagram showing the configuration of the tray shown in FIG. 1 . FIG. 1 is a diagram showing the results of Test 1-1. FIG. 13 is a diagram showing the results of Test 1-2.

Below, an example of an embodiment of the dry ice blasting device of the present invention will be described with reference to the drawings. Note that the same reference numerals will be used for the same or substantially the same configurations and elements, and as a rule, they will not be described again.

<Overall composition>
The dry ice blasting device 1A shown in Fig. 1 has a device body 10, a compressed air supply unit 20, and a spray unit 30. The device body 10 supplies dry ice grains 100b to the spray unit 30, and the compressed air supply unit 20 supplies compressed air to the spray unit 30. The spray unit 30 sprays the dry ice grains 100b supplied from the device body 10 and the compressed air supplied from the compressed air supply unit 20 together. From another perspective, the dry ice grains 100b supplied from the device body 10 are merged with the compressed air supplied from the compressed air supply unit 20. The dry ice grains 100b merged with the compressed air are sprayed toward the workpiece W by the pressure of the compressed air. In other words, the dry ice blasting device 1A according to this embodiment is a siphon type.

<Device body>
The main body 10 of the apparatus has a hopper 11 , a conveying section 12 , a crushing section 13 , a relay pipe 14 and a dry ice supply tube 15 .

Dry ice pellets 100a, which are chunks of dry ice, are supplied (put into) the hopper 11. For example, dry ice pellets 100a with a diameter of about 3 mm are put into the hopper 11.

The hopper 11 has a box-like shape with a smaller bottom surface than the top surface, giving it an overall cone-shaped appearance. An upper opening 11a is provided on the top surface of the hopper 11, and a lower opening 11b is provided on the bottom surface of the hopper 11. Dry ice pellets 100a are fed into the hopper 11 from the upper opening 11a. The dry ice pellets 100a fed into the hopper 11 are discharged from the lower opening 11b to the outside of the hopper 11. Therefore, in the following description, the upper opening 11a may be referred to as the "feed inlet 11a" and the lower opening 11b may be referred to as the "discharge outlet 11b."

<Transportation section>
The conveying unit 12 conveys the dry ice pellets 100a discharged from the discharge port 11b of the hopper 11 to the crushing unit 13. More specifically, the conveying unit 12 is an electromagnetic vibration type conveying means, and conveys a fixed amount of the dry ice pellets 100a to the crushing unit 13 while vibrating the pellets. The details of the conveying unit 12 will be described later.

<Crushing section>
The crushing unit 13 crushes the dry ice pellets 100a transported by the transport unit 12 to generate dry ice grains 100b, which are grains of dry ice of a predetermined size.

As shown in FIG. 2, the crushing unit 13 includes a pair of crushing rollers 13a and 13b. The crushing rollers 13a and 13b are metal rollers fixed to a rotating shaft. The crushing rollers 13a and 13b face each other with a gap between them and are driven to rotate in opposite directions. The dry ice pellets 100a fall between the crushing rollers 13a and 13b and are crushed by the rotating crushing rollers 13a and 13b. Therefore, by changing the gap between the crushing rollers 13a and 13b, the size (particle size) of the dry ice grains 100b generated in the crushing unit 13 can be adjusted.

Refer back to FIG. 1. The particle size of the dry ice particles 100b generated in the crushing section 13 is determined or adjusted depending on the type of workpiece W and the processing to be performed on the workpiece W. For example, if the workpiece W has a high hardness, the particle size of the dry ice particles 100b is made large. On the other hand, if the workpiece W has a low hardness or if it is desired to avoid damaging the surface of the workpiece W, the dry ice particles 100b are made small.

The particle size of the dry ice particles 100b generated in the crushing section 13 may shrink before being sprayed from the spraying section 30. For example, some of the dry ice particles 100b may sublimate during the process of being transported from the crushing section 13 to the spraying section 30, causing the dry ice particles 100b to become smaller. Therefore, the particle size of the dry ice particles 100b generated in the crushing section 13 may be determined in anticipation of the subsequent shrinkage.

<Relay pipe and dry ice supply tube>
1 form a flow path (dry ice flow path) for supplying the dry ice grains 100b generated in the crushing unit 13 to the spraying unit 30. Specifically, the relay pipe 14 forms a part of the dry ice flow path, and the dry ice supply tube 15 forms the other part of the dry ice flow path.

The relay pipe 14 is a resin or metal pipe with an inner diameter larger than the particle size of the dry ice grains 100b. One end (base end) of the relay pipe 14 is connected to the crushing section 13, and the other end (tip) of the relay pipe 14 is connected to one end (base end) of the dry ice supply tube 15.

The dry ice supply tube 15 is made of an elastic material such as rubber, and has an inner diameter larger than the particle size of the dry ice grains 100b. The dry ice supply tube 15 is made of an elastic material that does not lose its elasticity or flexibility even when cooled by the dry ice grains 100b. The dry ice supply tube 15 also has a hardness (pressure resistance) that does not deform even when the internal pressure falls below a predetermined pressure. An example of an elastic material that forms the dry ice supply tube 15 is an elastic material whose glass transition point is equal to or lower than the sublimation point of dry ice (minus 78.5 degrees Celsius).

The tip of the dry ice supply tube 15 penetrates the housing 10a, which houses the hopper 11, the conveying unit 12, the crushing unit 13, etc., and is pulled out to the outside of the housing 10a and connected to the injection unit 30. Although not shown, a communication hole is provided on the side of the housing 10a, and the dry ice supply tube 15 is pulled out to the outside of the housing 10a through this communication hole. In addition, a seal member that seals the gap may be provided between the dry ice supply tube 15 and the communication hole.

<Compressed air supply unit>
The compressed air supply unit 20 includes a compressor 21 and an air supply tube 22 that connects the compressor 21 and the injection unit 30. The compressed air generated by the compressor 21 is sent to the injection unit 30 via the air supply tube 22. That is, the air supply tube 22 forms a flow path (air flow path) for supplying the compressed air generated by the compressor 21 to the injection unit 30. Therefore, the air supply tube 22 has a hardness (pressure resistance) that does not deform due to the pressure of the compressed air.

The compressor 21 in this embodiment is an oil-free scroll compressor (Think Air SLP-75EFD) manufactured by Anest Iwata Corporation. However, the compressor 21 is not limited to a specific compressor. For example, the compressor 21 may be a reciprocating type such as a piston type or a diaphragm type, rather than a rotary type including a scroll type.

<Injection section>
The ejection unit 30 includes a junction 31 and a nozzle 32. The device body 10 and the compressed air supply unit 20 are connected to the ejection unit 30. More specifically, the dry ice supply tube 15 and the air supply tube 22 are connected to the junction 31. The junction 31 merges the dry ice grains 100b supplied via the dry ice supply tube 15 and the compressed air supplied via the air supply tube 22. From another perspective, the dry ice grains 100b shown in FIG. 2 are merged with the compressed air at the junction 31 shown in FIG. 1.

One end of the nozzle 32 is connected to the junction 31, and the other end of the nozzle 32 is provided with a nozzle opening 32a. The dry ice particles 100b that join the compressed air at the junction 31 are sprayed from the tip of the nozzle 32 (nozzle opening 32a) together with the compressed air. Therefore, when the nozzle opening 32a is directed toward the surface of the workpiece W, the dry ice particles 100b sprayed from the nozzle opening 32a are sprayed onto the surface of the workpiece W, and the surface of the workpiece W is treated. Specifically, the surface of the workpiece W is cleaned, or fine irregularities are formed on the surface of the workpiece W. The nozzle 32 is bent into an approximately L-shape to make it easier to direct the nozzle opening 32a toward the surface of the workpiece W.

<Transportation section>
The transport unit 12 includes at least a base 40, a tray 41, a drive unit 42, a control unit 43, and a support unit 44. The transport unit 12 vibrates the tray 41, thereby transporting the dry ice pellets 100a placed on the tray 41 while vibrating them.

The tray 41 is made of metal. Specifically, the tray 41 is formed from a single sheet metal bent into a predetermined shape. As shown in FIG. 3, the tray 41 has a rectangular bottom 41a, side portions 41b and 41c rising from each long side of the bottom 41a, and a back portion 41d rising from one short side of the bottom 41a. Furthermore, a plurality of protrusions 41e smaller than the dry ice pellets 100a are formed on the surface of the tray 41. More specifically, a plurality of protrusions 41e are formed at predetermined intervals on the inner surface of the bottom 41a.

Referring again to FIG. 1, the tray 41 is disposed above the base 40 so as to overlap the base 40. The tray 41 is supported by a support 44. The support 44 is an elastic body such as a leaf spring, and one end of the support 44 is connected to the base 40 and the other end is connected to the tray 41. In other words, the tray 41 is held so as to be able to swing relative to the base 40.

As shown in FIG. 1, the base 40 and the tray 41 are disposed below the hopper 11. Therefore, the dry ice pellets 100a fed into the hopper 11 fall from the discharge outlet 11b of the hopper 11 into the tray 41 (onto the bottom 41a). The tray is sometimes called a "trough."

The drive unit 42 is equipped with an electromagnet 42a as a drive source (vibration source). When power is supplied from the control unit 43 to the electromagnet 42a and the electromagnet 42a is excited, the tray 41 moves (is attracted) in a direction approaching the drive unit 42 (left side/rear in the figure). Thereafter, when the supply of power from the control unit 43 to the electromagnet 42a is cut off and the electromagnet 42a is demagnetized, the restoring force of the support unit 44 moves (pulls back) the tray 41 in a direction away from the drive unit 42 (right side/front in the figure).

In other words, when power is intermittently supplied from the control unit 43 to the electromagnet 42a, the tray 41 mainly vibrates back and forth. In other words, when a pulsating current is passed through the electromagnet 42a, the tray 41 mainly vibrates back and forth. As a result, the dry ice pellets 100a on the tray 41 move forward (towards the crushing unit 13) while vibrating. At this time, the multiple dry ice pellets 100a on the tray 41 that move while vibrating gradually align themselves. Also, if several dry ice pellets 100a are adhered to each other, the dry ice pellets 100a are separated.

In addition, the multiple protrusions 41e (Figure 3) formed on the surface of the tray 41 (the inner surface of the bottom 41a) that contacts the dry ice pellets 100a prevent or suppress the dry ice pellets 100a from slipping. Furthermore, since each protrusion 41e is smaller than the dry ice pellets 100a, the dry ice pellets 100a do not get caught or jammed between adjacent protrusions 41e.

The control unit 43 shown in FIG. 1 can change the vibration state of the tray 41 by changing the current flow state of the electromagnet 42a. Specifically, the frequency and amplitude of the vibration of the tray 41 can be changed by changing the frequency and magnitude of the current supplied to the electromagnet 42a. When the frequency and amplitude of the vibration of the tray 41 are changed, the transport capacity of the tray 41 for the dry ice pellets 100a changes. For example, when the amplitude of the tray 41 increases, the transport amount of the dry ice pellets 100a increases.

The dry ice blasting device 1A of this embodiment is provided with a detection unit that detects changes in the amount (ejection amount) of dry ice grains 100b ejected from the nozzle 32 of the ejection unit 30. Specifically, the dry ice blasting device 1A is equipped with a laser 50 and a power meter 51 arranged near the nozzle opening 32a. The laser 50 outputs laser light of a predetermined wavelength. The power meter 51 receives the laser light output from the laser 50 and outputs a voltage (detection signal) according to the amount of light received (energy).

The laser 50 and the power meter 51 face each other across the nozzle opening 32a, and the dry ice particles 100b ejected from the nozzle opening 32a pass between the laser 50 and the power meter 51. Therefore, the more the amount of dry ice particles 100b ejected from the nozzle 32, the less the amount of light received by the power meter 51. On the other hand, the less the amount of dry ice particles 100b ejected from the nozzle 32, the more the amount of light received by the power meter 51. In other words, the change in the amount of dry ice particles 100b ejected can be detected based on the change in the output of the power meter 51. Note that the laser 50 in this embodiment is a helium neon laser (HeNe laser), but the laser 50 is not limited to a gas laser.

The conveying unit 12 controls the amount of dry ice pellets 100a conveyed based on the detection result of the injection amount by the detection unit (laser 50 and power meter 51). Specifically, the control unit 43 changes the energization state of the electromagnet 42a based on the change in the output of the power meter 51 to change the vibration state of the tray 41. More specifically, when the output of the power meter 51 decreases, the control unit 43 changes the vibration state of the tray 41 so that the amount of dry ice pellets 100a conveyed decreases. Also, when the output of the power meter 51 increases, the control unit 43 changes the vibration state of the tray 41 so that the amount of dry ice pellets 100a conveyed increases. As already mentioned, when the frequency or amplitude of the vibration of the tray 41 is changed, the conveying capacity of the tray 41 for the dry ice pellets 100a changes.

Next, we will explain the tests that the inventors conducted using the dry ice blasting device 1A according to this embodiment to confirm the effects of the present invention.

<Test 1-1>
In this test, the amount [g/min] of dry ice pellets 100a supplied from conveyor 12 to crusher 13 per minute, and the frequency [Hz] and amplitude [mm] of vibration of tray 41 were set as follows, and the change in the amount of dry ice grains 100b sprayed was measured based on the amount of light received [V] by power meter 51. The supply amount [g/min] of dry ice pellets 100a was measured in advance using a weighing scale placed under the outlet of tray 41, and the weighing scale was removed during the test.

Feed rate: 50 [g/min]
Frequency: 80 [Hz]
Amplitude: 0.7 mm (70% of maximum amplitude)
FIG. 4 shows the measurement results in Test 1-1. The vertical axis of the graph shown in FIG. 4 is the amount of light received by the power meter 51 [V], and the horizontal axis is time [sec]. The reference line X in the graph indicates the amount of light received by the power meter 51 (0.681 [V]) when the amount of dry ice particles 100b ejected is zero. In other words, when the amount of light received by the power meter 51 [V] is below the reference line X, the dry ice particles 100b are being ejected. On the other hand, when the amount of light received by the power meter 51 [V] is above the reference line X, the dry ice particles 100b are not being ejected.

From the graph shown in Figure 4, it can be seen that the dry ice pellets 100b continued to be ejected for essentially the entire period (20 seconds). It can also be seen that, when the amount of light received by the power meter 51 [V] is used as a reference, the change in the amount of ejection of the dry ice pellets 100b falls within the range of 0.63 [V] to 0.69 [V]. In other words, it can be seen that the dry ice pellets 100b continued to be ejected stably for the entire period (20 seconds).

<Test 1-2>
In this test, the change in the amount of dry ice pellets 100b sprayed was measured under the same conditions and by the same method as in Test 1-1 above, except that the supply rate [g/min] of dry ice pellets 100a, and the frequency [Hz] and amplitude [mm] of the vibration of the tray 41 were changed as follows.

Feed rate: 80 [g/min]
Frequency: 70 [Hz]
Amplitude: 0.55 [mm] (55% of maximum amplitude)
The measurement results in Test 1-2 are shown in Fig. 5. The vertical axis of the graph shown in Fig. 5 is the amount of light received by the power meter 51 [V], and the horizontal axis is time [sec]. The reference line X in the graph indicates the amount of light received by the power meter 51 (0.705 [V]) when the amount of dry ice pellets 100b sprayed is zero.

From the graph shown in Figure 5, it can be seen that the dry ice pellets 100b continued to be ejected throughout the entire period (20 seconds) and that the ejection never stopped. It can also be seen that, when the amount of light received by the power meter 51 [V] is used as the standard, the change in the amount of ejection of the dry ice pellets 100b fell within the range of 0.65 [V] to 0.71 [V]. In other words, it can be seen that the dry ice pellets 100b continued to be ejected stably throughout the entire period (20 seconds).

<Test 2-1>
In this test, the dry ice blasting device 1A according to this embodiment was used to roughen the surface of the insulation coating of an electric wire, and the results were confirmed. Specifically, the amount [g/min] of the dry ice pellets 100a supplied from the conveying unit 12 to the crushing unit 13 per minute, the pressure (ejection pressure) [MPa] of the dry ice grains 100b sprayed from the nozzle 32, and other factors were set as follows to perform the roughening treatment. Next, the arithmetic mean roughness (Ra) of multiple measurement areas on the roughened insulation coating surface was measured using a laser microscope.

Feed rate: 50 [g/min]
Injection pressure: 0.4 [MPa]
Laser microscope: Keyence laser microscope (VK-8510)
Size of each measurement area: 200 x 100 [mm]
Number of measurement areas: 6 (lined up along the length of the wire at intervals of approximately 10 mm)
Here, when plating the surface of the insulating coating, in order to ensure sufficient adhesion between the insulating coating surface and the plating, it is preferable that the average value of the arithmetic mean roughness (Ra) of the insulating coating surface is 3.0 [μm] or more and the lower limit is 2.0 [μm] or more.

In Test 2-1, the average value of the arithmetic mean roughness (Ra) of the six measurement areas was 3.0 μm or more, and the lower limit was 2.0 μm or more.

<Test 2-2>
In this test, the amount of dry ice pellets 100a fed from the conveying unit 12 to the crushing unit 13 per minute was changed to 80 [g/min], and the surface of the insulating coating was roughened under the same conditions and by the same method as in Test 2-1, and the arithmetic mean roughness (Ra) of the roughened insulating coating surface was measured. As a result, the average value of the arithmetic mean roughness (Ra) of the six measurement areas was 3.0 [μm] or more, and the lower limit was also 3.0 [μm] or more.

The above test confirmed that the dry ice blasting device 1A of this embodiment, which has an electromagnetic vibration type conveying unit 12, can stably spray dry ice particles. From another perspective, it was confirmed that the work surface can be uniformly treated by using the dry ice blasting device 1A of this embodiment.

The present invention is not limited to the above embodiment, and various modifications are possible without departing from the gist of the present invention. For example, the configuration of the transport unit 12 can be modified as appropriate. For example, the shape, size, vibration frequency, amplitude, etc. of the tray 41 can be modified as appropriate as necessary. In addition, although the tray 41 in the above embodiment is made of metal, the material of the tray 41 is not limited to a specific material. However, it is preferable that the thermal conductivity of the tray 41 that is in direct contact with the dry ice pellets 100a is as low as possible. From this perspective, it is preferable that the tray 41 is made of resin, ceramics, or wood.

In the above embodiment, the convex portion 41e is formed on a part of the surface of the tray 41 (the inner surface of the bottom portion 41a). However, the convex portion 41e may be formed in a place other than the inner surface of the bottom portion 41a. The convex portion 41e may also be replaced with a concave portion. Furthermore, both a convex portion and a concave portion may be formed. However, from the viewpoint of preventing clogging of the dry ice pellets 100a, it is preferable that the concave portion is smaller than the dry ice pellets 100a.

The configuration of the detection unit can also be changed as necessary. For example, the laser 50 in the above embodiment can be replaced with a light-emitting diode, and the power meter 51 can be replaced with a photodiode. In addition, it is also possible to detect a change in the amount of dry ice pellets 100b sprayed based on an image of the dry ice pellets 100b sprayed from the nozzle 32.

The present invention can be applied not only to siphon-type dry ice blasting devices, but also to direct-injection dry ice blasting devices.

1A... dry ice blasting device, 10... device body, 10a... housing, 11... hopper, 11a... upper opening (inlet), 11b... lower opening (outlet), 12... conveying section, 13... crushing section, 13a (13b)... crushing roller, 14... relay pipe, 15... dry ice supply tube, 20... compressed air supply section, 21... compressor, 22... air supply tube, 30... injection section, 31... junction section, 32... nozzle, 32a... nozzle opening, 40... base, 41... tray, 41a... bottom, 41b (41c)... side section, 41d... rear section, 41e... convex section, 42... drive section, 42a... electromagnet, 43... control section, 44... support section, 50... laser, 51... power meter, 100a... dry ice pellets, 100b... dry ice grains, W... workpiece

Claims (5)

A nozzle from which dry ice particles are sprayed;
A crushing unit that crushes the dry ice pellets to generate the dry ice grains;
A conveying unit that conveys the dry ice pellets to the crushing unit,
The conveying unit includes a tray on which the dry ice pellets are placed and an electromagnet as a driving source for vibrating the tray, and conveys the dry ice pellets on the tray to the crushing unit while vibrating the dry ice pellets ;
At least one of a plurality of convex portions and concave portions smaller than the dry ice pellets is formed on the surface of the tray that contacts the dry ice pellets.
Dry ice blasting equipment. The dry ice blasting device according to claim 1, wherein the tray is made of resin, ceramics or wood. The dry ice pellets are sprayed from the nozzle.
The dry ice blasting device according to claim 1 , wherein the transport unit controls the amount of the dry ice pellets transported based on a detection result of the detection unit. The dry ice blasting device according to claim 3 , wherein the transport unit includes a control unit that changes a power supply state of the electromagnet based on a detection result of the detection unit to change a vibration state of the tray. A nozzle from which dry ice particles are sprayed;
A crushing unit that crushes the dry ice pellets to generate the dry ice grains;
A conveying section includes a tray on which the dry ice pellets are placed and an electromagnet as a driving source for vibrating the tray, and conveys the dry ice pellets on the tray to the crushing section while vibrating the pellets;
A detection unit that detects a change in the amount of the dry ice grains sprayed from the nozzle,
The conveying unit changes the energization state of the electromagnet based on the detection result of the detection unit to change the vibration state of the tray, thereby controlling the conveying amount of the dry ice pellets.
Dry ice blasting equipment.

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